CN102865816A - Non-contact automatic detection device for absolute grating ruler overall measuring accuracy - Google Patents
Non-contact automatic detection device for absolute grating ruler overall measuring accuracy Download PDFInfo
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- CN102865816A CN102865816A CN2012103755682A CN201210375568A CN102865816A CN 102865816 A CN102865816 A CN 102865816A CN 2012103755682 A CN2012103755682 A CN 2012103755682A CN 201210375568 A CN201210375568 A CN 201210375568A CN 102865816 A CN102865816 A CN 102865816A
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- workbench
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- slide table
- guide rail
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- 238000001514 detection method Methods 0.000 title claims abstract description 17
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 238000011897 real-time detection Methods 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
Abstract
绝对式光栅尺总体测量精度的非接触式的自动检测装置属于光栅检测领域，该装置包括：工作台、平行光管、丝杠、第一反射镜、第二反射镜、滑台、光栅尺和激光干涉仪；所述平行光管固定在工作台的一侧；光栅尺中的标准尺放置在工作台上，与工作台上的导轨平行，光栅尺读数头放置在滑台内；丝杠固定在平行光管下方的工作台上，滑台放置在工作台的导轨上，由丝杠控制滑台在导轨上运动；第一反射镜和第二反射镜固定在滑台上，激光干涉仪固定在工作台的另一侧。本发明通过非接触式检测，用来检测光栅尺加工、组装之后的总体测量精度，在线实时检测选择合格光栅尺，以保证光栅尺所需的精度要求。
The non-contact automatic detection device for the overall measurement accuracy of the absolute grating ruler belongs to the field of grating detection. Laser interferometer; the collimator is fixed on one side of the workbench; the standard ruler in the grating ruler is placed on the workbench parallel to the guide rail on the workbench, and the reading head of the grating ruler is placed in the slide table; the screw is fixed On the workbench under the collimator, the slide table is placed on the guide rail of the workbench, and the lead screw controls the slide table to move on the guide rail; the first reflector and the second reflector are fixed on the slide table, and the laser interferometer is fixed On the other side of the workbench. The invention uses non-contact detection to detect the overall measurement accuracy of the grating ruler after processing and assembly, and selects a qualified grating ruler through online real-time detection to ensure the accuracy required by the grating ruler.
Description
Technical field
The invention belongs to the grating detection field, be specifically related to a kind of contactless automatic detection device of absolute grating scale overall measurement precision.
Background technology
After the absolute grating scale general assembly was finished, the error that each production link of work in-process and assembling link accumulate can impact the optical grating ruler measurement precision, need to detect the grating scale overall accuracy.Existing grating scale overall accuracy detection method adopts the contact type measurement structure more, the contact probe is installed on the Mobile Slide of workbench, read head synchronizing moving with grating scale, precision to grating scale is tested, owing to have friction force, stress deformation and surface blemish, can there be error in testing result.
Summary of the invention
In order to solve problems of the prior art, the invention provides a kind of contactless automatic detection device of absolute grating scale overall measurement precision, this device reduces the error that produces by contactless metering system in testing process.
The technical scheme that technical solution problem of the present invention adopts is as follows:
The contactless automatic detection device of absolute grating scale overall measurement precision, this device comprises: worktable, parallel light tube, leading screw, the first catoptron, the second catoptron, slide unit, grating scale and laser interferometer; Described parallel light tube is fixed on a side of worktable; Gauge in the grating scale is placed on the worktable, and with the guide rail parallel on the worktable, grating ruler reading head is placed in the slide unit; Leading screw is fixed on the worktable of parallel light tube below, and slide unit is placed on the guide rail of worktable, is moved at guide rail by leading screw control slide unit; The first catoptron and the second catoptron are fixed on the slide unit, and laser interferometer is fixed on the opposite side of worktable.
The invention has the beneficial effects as follows: the present invention is used for detecting grating scale processing, assembling overall measurement precision afterwards by non-contact detection, and online the detection in real time selected qualified grating scale, with the required accuracy requirement of assurance grating scale.
Description of drawings
The structural drawing of the contactless automatic detection device of Fig. 1 absolute grating scale overall measurement of the present invention precision.
Among the figure: 1, worktable, 2, parallel light tube, 3, leading screw, the 4, first catoptron, the 5, second catoptron, 6, slide unit, 7, gauge and 8, laser interferometer.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in further details.
As shown in Figure 1, the contactless automatic detection device of absolute grating scale overall measurement precision, this device comprises: worktable 1, parallel light tube 2, leading screw 3, the first catoptron 4, the second catoptron 5, slide unit 6, grating scale and laser interferometer 8; Parallel light tube 2 is fixed on a side of worktable 1; Gauge 7 in the grating scale is placed on the worktable 1, and with the guide rail parallel on the worktable 1, grating ruler reading head is placed in the slide unit 6; Leading screw 3 is fixed on the worktable 1 of parallel light tube 2 belows, and slide unit 6 is placed on the guide rail of worktable 1, is moved at guide rail by leading screw 3 control slide unit 6; The first catoptron 4 and the second catoptron 5 are fixed on the slide unit 6, and laser interferometer 8 is fixed on the opposite side of worktable 1.
Send the collimation directional light by parallel light tube 2 and incide the first catoptron 4 back reflections and return parallel light tube 2, return by detecting only no former road whether slide unit 6 is existed swing in the guide rail direction, eliminate Abbe error.When grating ruler reading head moves with slide unit 6 to gauge 7 readings, laser interferometer 8 is sent detection light and is returned laser interferometer 8 by the second catoptron 5 back reflections on the slide unit 6 simultaneously, displacement to slide unit 6 detects, obtain the actual displacement amount of grating ruler reading head, the data that obtain with grating ruler reading head compare, and obtain the testing result of grating scale overall accuracy.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103755682A CN102865816A (en) | 2012-09-27 | 2012-09-27 | Non-contact automatic detection device for absolute grating ruler overall measuring accuracy |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103755682A CN102865816A (en) | 2012-09-27 | 2012-09-27 | Non-contact automatic detection device for absolute grating ruler overall measuring accuracy |
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| Publication Number | Publication Date |
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| CN102865816A true CN102865816A (en) | 2013-01-09 |
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| CN2012103755682A Pending CN102865816A (en) | 2012-09-27 | 2012-09-27 | Non-contact automatic detection device for absolute grating ruler overall measuring accuracy |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106091992A (en) * | 2016-08-23 | 2016-11-09 | 中冶陕压重工设备有限公司 | Plane milling and boring machine bed ways parallelism detecting device and detection method |
| CN104390586B (en) * | 2014-11-12 | 2017-04-19 | 广东工业大学 | Device and method for detecting geometric errors of single-axis motions of machine tool |
| CN106839997A (en) * | 2017-03-16 | 2017-06-13 | 黑龙江省计量检定测试院 | The detection method of linear grating chi |
| CN112506131A (en) * | 2020-11-09 | 2021-03-16 | 襄阳华中科技大学先进制造工程研究院 | Method for selecting measuring point of numerical control machine tool |
| CN113776439A (en) * | 2021-09-07 | 2021-12-10 | 中国科学院长春光学精密机械与物理研究所 | Method for reducing Abbe error of grating ruler |
Citations (3)
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| JPH10253318A (en) * | 1997-03-11 | 1998-09-25 | Brother Ind Ltd | Cleaning mechanism for linear encoder |
| CN101288937A (en) * | 2008-05-27 | 2008-10-22 | 深圳市木森科技有限公司 | Numerically controlled machine, grating ruler system and fixing method of grating ruler |
| CN201348846Y (en) * | 2009-01-14 | 2009-11-18 | 深圳市德普施科技有限公司 | Test bed for testing distance and displacement |
-
2012
- 2012-09-27 CN CN2012103755682A patent/CN102865816A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10253318A (en) * | 1997-03-11 | 1998-09-25 | Brother Ind Ltd | Cleaning mechanism for linear encoder |
| CN101288937A (en) * | 2008-05-27 | 2008-10-22 | 深圳市木森科技有限公司 | Numerically controlled machine, grating ruler system and fixing method of grating ruler |
| CN201348846Y (en) * | 2009-01-14 | 2009-11-18 | 深圳市德普施科技有限公司 | Test bed for testing distance and displacement |
Non-Patent Citations (1)
| Title |
|---|
| 陈龙飞等: "《工程测量》", 31 August 1990, article "自准直平行光管应用举例", pages: 219-220 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104390586B (en) * | 2014-11-12 | 2017-04-19 | 广东工业大学 | Device and method for detecting geometric errors of single-axis motions of machine tool |
| CN106091992A (en) * | 2016-08-23 | 2016-11-09 | 中冶陕压重工设备有限公司 | Plane milling and boring machine bed ways parallelism detecting device and detection method |
| CN106091992B (en) * | 2016-08-23 | 2018-09-11 | 中冶陕压重工设备有限公司 | Plane milling and boring machine bed ways parallelism detecting device and detection method |
| CN106839997A (en) * | 2017-03-16 | 2017-06-13 | 黑龙江省计量检定测试院 | The detection method of linear grating chi |
| CN106839997B (en) * | 2017-03-16 | 2019-04-16 | 黑龙江省计量检定测试院 | The detection method of linear grating ruler |
| CN112506131A (en) * | 2020-11-09 | 2021-03-16 | 襄阳华中科技大学先进制造工程研究院 | Method for selecting measuring point of numerical control machine tool |
| CN112506131B (en) * | 2020-11-09 | 2023-02-28 | 襄阳华中科技大学先进制造工程研究院 | A Method for Selecting Measurement Points of CNC Machine Tool |
| CN113776439A (en) * | 2021-09-07 | 2021-12-10 | 中国科学院长春光学精密机械与物理研究所 | Method for reducing Abbe error of grating ruler |
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Application publication date: 20130109 |