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CN102856215B - Column set-up device and method of ceramic column grid array device - Google Patents

Column set-up device and method of ceramic column grid array device Download PDF

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CN102856215B
CN102856215B CN201210264353.3A CN201210264353A CN102856215B CN 102856215 B CN102856215 B CN 102856215B CN 201210264353 A CN201210264353 A CN 201210264353A CN 102856215 B CN102856215 B CN 102856215B
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column
welding
ceramic
welding column
detent mechanism
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CN102856215A (en
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姚全斌
练滨浩
黄颖卓
林鹏荣
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Beijing Microelectronic Technology Institute
Mxtronics Corp
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Abstract

本发明涉及一种陶瓷柱栅阵列元器件的植柱装置及方法,属于陶瓷电子元器件封装技术领域。该装置从下往上依次包括底座、焊柱平整化机构、焊柱定位机构、陶瓷外壳定位机构和上盖;焊柱平整化机构、焊柱定位机构、陶瓷外壳定位机构和上盖用螺钉固定连接,底座与焊柱平整化机构用螺钉固定连接;连接后,陶瓷外壳定位机构和焊柱定位机构的植柱孔都位于上盖的中空部位。通过本发明制备的柱栅阵列元器件的焊柱位置度和共面性较好。

The invention relates to a column planting device and method for ceramic column grid array components, and belongs to the technical field of packaging of ceramic electronic components. The device includes base, welding post leveling mechanism, welding post positioning mechanism, ceramic shell positioning mechanism and upper cover from bottom to top; welding post leveling mechanism, welding post positioning mechanism, ceramic shell positioning mechanism and upper cover are fixed with screws Connection, the base and the welding post leveling mechanism are fixedly connected with screws; after connection, the post planting holes of the ceramic shell positioning mechanism and the welding post positioning mechanism are all located in the hollow part of the upper cover. The position degree and coplanarity of the welding posts of the column grid array components prepared by the invention are better.

Description

一种陶瓷柱栅阵列元器件的植柱装置及方法Pillar planting device and method for ceramic post grid array components

技术领域 technical field

本发明涉及一种陶瓷柱栅阵列元器件的植柱装置及方法,属于陶瓷电子元器件封装技术领域。The invention relates to a column planting device and method for ceramic column grid array components, and belongs to the technical field of packaging of ceramic electronic components.

背景技术 Background technique

现代集成电路技术飞速发展,集成电路的小型化、高速化和高可靠性要求电子元器件向小型化和集成化转变,同时促使新的封装技术也随之不断出现和发展。球栅阵列封装作为当今大规模集成电路的主要封装形式在不同领域得到广泛的应用。陶瓷球栅阵列封装作为球栅阵列封装的一种封装形式具有电热性能好、气密性强、抗湿性能好和可靠性高的优点。陶瓷柱栅阵列封装是陶瓷球栅阵列封装的发展和改进,用柱栅取代球栅,大大环节了氧化铝陶瓷外壳与环氧树脂印制电路板之间由于热膨胀系不匹配带来的热疲劳问题,从而提高了组装的可靠性。陶瓷柱栅阵列封装可实现很多逻辑和微处理器功能,其封装形式决定其耐高温、耐高压和高可靠性的特性,适用于大尺寸和多I/O的情况。因此在电子产品制造领域占有重要的地位。相对于球栅阵列,柱栅阵列的直径小、高度高、不易固定,使得陶瓷柱栅阵列封装的工艺技术存在难度。而焊柱的共面性和位置度是植柱工艺质量的两个主要考核指标,其直接关系到陶瓷柱栅阵列器件表贴工艺的质量和可靠性。能否开发出一种高精度陶瓷柱栅阵列元器件植柱装置及方法,确保焊柱的位置度和共面性,是制约陶瓷柱栅阵列元器件在我国电子产品制造领域中应用的重大瓶颈之一。With the rapid development of modern integrated circuit technology, the miniaturization, high speed and high reliability of integrated circuits require electronic components to be miniaturized and integrated, and at the same time, new packaging technologies are also emerging and developing. As the main packaging form of large-scale integrated circuits today, ball grid array packaging has been widely used in different fields. As a packaging form of ball grid array packaging, ceramic ball grid array packaging has the advantages of good electrothermal performance, strong air tightness, good moisture resistance and high reliability. The ceramic column grid array package is the development and improvement of the ceramic ball grid array package. The column grid is used to replace the ball grid, which greatly reduces the thermal fatigue caused by the mismatch of the thermal expansion system between the alumina ceramic shell and the epoxy resin printed circuit board. problem, thereby improving the reliability of the assembly. The ceramic pillar grid array package can realize many logic and microprocessor functions, and its package form determines its high temperature resistance, high pressure resistance and high reliability characteristics, and is suitable for large size and multiple I/O situations. Therefore, it occupies an important position in the field of electronic product manufacturing. Compared with the ball grid array, the pillar grid array has a small diameter, a high height, and is not easy to fix, which makes the process technology of the ceramic pillar grid array package difficult. The coplanarity and position degree of soldering pillars are the two main evaluation indicators of the quality of pillar planting process, which are directly related to the quality and reliability of the surface mount process of ceramic pillar grid array devices. Whether a high-precision ceramic column grid array component planting device and method can be developed to ensure the position and coplanarity of the welding column is a major bottleneck restricting the application of ceramic column grid array components in the field of electronic product manufacturing in my country one.

发明内容 Contents of the invention

本发明的目的是为了提出一种陶瓷柱栅阵列元器件的植柱装置及方法,该装置及方法能够使得陶瓷柱栅阵列元器件的焊柱具有良好的位置度和共面性,而且有效控制了焊点处的空洞率,保证了陶瓷柱栅阵列元器件组装到板级时表贴工艺的质量,操作简便。The object of the present invention is to propose a device and method for planting pillars of ceramic pillar grid array components. The device and method can make the welding pillars of ceramic pillar grid array components have good position and coplanarity, and effectively control It ensures the void rate at the solder joints, ensures the quality of the surface mount process when the ceramic column grid array components are assembled to the board level, and is easy to operate.

本发明的目的是通过以下技术方案实现的。The purpose of the present invention is achieved through the following technical solutions.

本发明提出了一种陶瓷柱栅阵列元器件的植柱装置,该装置从下往上依次包括底座、焊柱平整化机构、焊柱定位机构、陶瓷外壳定位机构和上盖;The present invention proposes a pillar planting device for ceramic pillar grid array components, which sequentially includes a base, a welding pillar leveling mechanism, a welding pillar positioning mechanism, a ceramic shell positioning mechanism and an upper cover from bottom to top;

底座为中心带有凸台的平板,凸台的高度根据焊柱平整化的厚度而决定;The base is a flat plate with a boss in the center, and the height of the boss is determined by the flattened thickness of the welding column;

焊柱平整化机构为中空的平板;平板的一个侧边为切削边,即该边从边缘到中心的厚度逐渐变小;焊柱平整化机构的中空部位与底座的凸台相匹配;The welding column leveling mechanism is a hollow plate; one side of the plate is a cutting edge, that is, the thickness of the side from the edge to the center gradually becomes smaller; the hollow part of the welding column leveling mechanism matches the boss of the base;

焊柱定位机构为一平板,是由数块相同厚度的网板组合而成。其中心带有与待焊接焊柱直径相适应的植柱孔;The welding column positioning mechanism is a flat plate, which is composed of several mesh plates of the same thickness. Its center has a post planting hole adapted to the diameter of the welding post to be welded;

陶瓷外壳定位机构为中空的平板,陶瓷外壳定位机构的每个侧边各带有一限位台,四个限位台组成的空间与陶瓷外壳相匹配;每两个限位台之间的中空部分用于回流焊过程中助焊剂的挥发以及热量的传导;The positioning mechanism of the ceramic shell is a hollow plate, and each side of the positioning mechanism of the ceramic shell has a limit platform, and the space composed of four limit platforms matches the ceramic shell; the hollow part between every two limit platforms Used for flux volatilization and heat conduction during reflow soldering;

上盖为中空的平板,用于与焊柱平整化机构进行连接并通过螺钉将焊柱定位机构和陶瓷外壳定位机构组合在一起;The upper cover is a hollow flat plate, which is used to connect with the welding post leveling mechanism and combine the welding post positioning mechanism and the ceramic shell positioning mechanism through screws;

焊柱平整化机构、焊柱定位机构、陶瓷外壳定位机构和上盖用螺钉固定连接,底座与焊柱平整化机构用螺钉固定连接;连接后,陶瓷外壳定位机构和焊柱定位机构的植柱孔都位于上盖的中空部位。The welding post leveling mechanism, the welding post positioning mechanism, the ceramic shell positioning mechanism and the upper cover are fixedly connected with screws, and the base and the welding post leveling mechanism are fixedly connected with screws; The holes are all located in the hollow part of the upper cover.

本发明提出了一种陶瓷柱栅阵列元器件的植柱方法,该方法的步骤为:The present invention proposes a method for planting pillars of ceramic pillar grid array components, the steps of which are:

1)将焊柱平整化机构、焊柱定位机构、陶瓷外壳定位机构和上盖用螺钉固定连接,然后再用螺钉将底座与焊柱平整化机构固定连接;1) Fix and connect the welding post leveling mechanism, welding post positioning mechanism, ceramic shell positioning mechanism and the upper cover with screws, and then use screws to fix the base with the welding post leveling mechanism;

2)将待焊接焊柱按照陶瓷外壳焊盘分布的要求放置在焊柱定位机构的植柱孔中,并穿过植柱孔至底座的凸台上;2) Place the welding post to be welded in the post planting hole of the post positioning mechanism according to the distribution requirements of the ceramic shell pads, and pass through the post planting hole to the boss of the base;

3)在陶瓷外壳的焊盘上印刷焊锡膏,将陶瓷外壳放置于焊柱上,使焊锡膏与待焊接焊柱充分接触,并通过陶瓷外壳定位机构上的限位台将陶瓷外壳进行定位;3) Print solder paste on the solder pad of the ceramic shell, place the ceramic shell on the welding post, make the solder paste fully contact with the welding post to be welded, and position the ceramic shell through the limit platform on the positioning mechanism of the ceramic shell;

4)将放置有陶瓷外壳的植柱装置放于回流炉内进行焊点的回流焊,待植柱装置冷却后将底座取下,用切削工具通过焊柱平整化机构的切削边对焊柱表面进行平整化处理,最后将植好焊柱的陶瓷外壳即元器件从植柱装置中取出。4) Put the pillar-planting device with the ceramic shell in the reflow furnace for reflow soldering of the solder joints. After the pillar-planting device cools down, remove the base, and use a cutting tool to pass the cutting edge of the welding pillar leveling mechanism to the surface of the welding pillar Carry out planarization treatment, and finally take out the ceramic shell with the solder post planted, that is, the component, from the post planting device.

有益效果Beneficial effect

本发明通过焊柱定位机构精确的限定了焊柱的位置,使得陶瓷柱栅阵列元器件植柱后焊柱的位置度好;The invention precisely limits the position of the welding post through the positioning mechanism of the welding post, so that the position of the welding post after the ceramic column grid array component is planted is good;

本发明通过陶瓷外壳定位机构限位凸台之间的中空部位将回流焊过程中助焊剂产生的气体有效的散出,并使热量有效的进行传导,使得回流焊后焊点处的空洞率得到控制;The invention effectively dissipates the gas generated by the flux during the reflow soldering process through the hollow part between the limiting bosses of the positioning mechanism of the ceramic shell, and conducts the heat effectively, so that the void rate at the solder joint after the reflow soldering is obtained. control;

本发明通过焊柱平整化机构并结合切削工具使得陶瓷柱栅阵列元器件植柱后焊柱的表面平整,焊柱表面的共面性较好;The invention uses a welding post leveling mechanism combined with a cutting tool to make the surface of the welding post smooth after the ceramic column grid array component is planted, and the coplanarity of the welding post surface is better;

本发明将焊柱平整化机构、焊柱定位机构、陶瓷外壳定位机构和上盖先用螺钉固定连接,然后再将底座与焊柱平整化机构用螺钉固定连接,方便底座的拆除;In the present invention, the welding post leveling mechanism, the welding post positioning mechanism, the ceramic shell positioning mechanism and the upper cover are first fixedly connected with screws, and then the base and the welding post leveling mechanism are fixedly connected with screws to facilitate the removal of the base;

本发明中的焊柱定位机构和陶瓷外壳定位机构是由使用激光进行精密加工的厚度为0.1~0.6mm的网板组合而成;由于其加工精度较高,使用多块网板组合在一起后整体装置的精度也较高,满足陶瓷柱栅阵列元器件对焊柱植柱精度的要求。The welding column positioning mechanism and the ceramic shell positioning mechanism in the present invention are composed of 0.1-0.6mm thick stencils precisely processed by laser; The precision of the overall device is also high, which meets the requirements of the ceramic column grid array components for the precision of welding post planting.

附图说明 Description of drawings

图1为本发明的植柱装置的结构示意图;Fig. 1 is the structural representation of column planting device of the present invention;

图2为底座的结构示意图;Fig. 2 is the structural representation of base;

图3为焊柱平整化机构的结构示意图;Fig. 3 is a structural schematic diagram of a welding column leveling mechanism;

图4为焊柱定位机构的结构示意图;Fig. 4 is a structural schematic diagram of a welding post positioning mechanism;

图5为陶瓷外壳定位机构的结构示意图;Fig. 5 is a structural schematic diagram of a ceramic housing positioning mechanism;

图6为上盖的结构示意图;Figure 6 is a structural schematic diagram of the upper cover;

其中,1-底座,2-焊柱平整化机构,3-焊柱定位机构,4-陶瓷外壳定位机构,5-上盖。Among them, 1-base, 2-welding column leveling mechanism, 3-welding column positioning mechanism, 4-ceramic shell positioning mechanism, 5-top cover.

具体实施方式 Detailed ways

下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.

实施例1Example 1

要求:Require:

对LGA560陶瓷外壳进行植柱工艺,陶瓷外壳焊盘尺寸为Φ0.89mm,节距为1.27mm;焊柱尺寸为Φ0.89mm,高度为2.2mm。The pillar planting process is carried out on the LGA560 ceramic shell. The size of the ceramic shell pad is Φ0.89mm, the pitch is 1.27mm; the size of the welding pillar is Φ0.89mm, and the height is 2.2mm.

实施步骤:Implementation steps:

一种适用于CCGA560陶瓷柱栅阵列元器件的植柱装置,该装置从下往上依次包括底座1、焊柱平整化机构2、焊柱定位机构3、陶瓷外壳定位机构4和上盖5,如图1所示;A column planting device suitable for CCGA560 ceramic column grid array components, the device sequentially includes a base 1, a welding column leveling mechanism 2, a welding column positioning mechanism 3, a ceramic shell positioning mechanism 4 and an upper cover 5 from bottom to top, As shown in Figure 1;

底座1为中心带有凸台的平板,该平板的尺寸为:85mm×85mm×3mm,凸台为60mm×60mm×2mm,如图2所示;The base 1 is a flat plate with a boss in the center. The size of the flat plate is: 85mm×85mm×3mm, and the boss is 60mm×60mm×2mm, as shown in Figure 2;

焊柱平整化机构2为中空的平板,该平板的尺寸为:85mm×85mm×3mm,中空的部分的尺寸为60mm×60mm,如图3所示;焊柱平整化机构2的一个侧边为切削边,即该边从边缘到中心的厚度逐渐变小,倾斜度小于10°。焊柱平整化机构2的中空部位与底座1的凸台相匹配。如图3所示;The welding column leveling mechanism 2 is a hollow flat plate, the size of which is: 85mm × 85mm × 3mm, and the size of the hollow part is 60mm × 60mm, as shown in Figure 3; one side of the welding column leveling mechanism 2 is Cutting edge, that is, the thickness of the edge gradually decreases from the edge to the center, and the inclination is less than 10°. The hollow part of the welding post leveling mechanism 2 matches the boss of the base 1 . As shown in Figure 3;

焊柱定位机构3为平板,该平板的尺寸为:85mm×85mm×3mm。其中心带有植柱孔;由5块厚度为0.5mm精密激光加工的网板组合而成,植柱孔的直径为0.65~0.75mm,节距为1.27mm。如图4所示;The welding post positioning mechanism 3 is a flat plate, and the size of the flat plate is: 85mm×85mm×3mm. There is a post-planting hole in the center; it is composed of 5 stencils with a thickness of 0.5mm and precision laser processing. The diameter of the post-planting hole is 0.65-0.75mm and the pitch is 1.27mm. As shown in Figure 4;

陶瓷外壳定位机构4为中空的平板,该平板的尺寸为:85mm×85mm×3mm。陶瓷外壳定位机构4的每个侧边各带有一限位台,限位的尺寸为20mm×2mm;四个限位台组成的空间与陶瓷外壳相匹配;每两个限位台之间的中空部分用于气体或热量的扩散。如图5所示;The positioning mechanism 4 of the ceramic shell is a hollow flat plate, and the size of the flat plate is: 85mm×85mm×3mm. Each side of the positioning mechanism 4 of the ceramic shell has a limiting platform, and the size of the limiting is 20mm×2mm; the space formed by the four limiting platforms matches the ceramic shell; the hollow space between every two limiting platforms Some are used for the diffusion of gas or heat. As shown in Figure 5;

上盖5为中空的平板,该平板的尺寸为:85mm×85mm×3mm。用于与焊柱平整化机构2进行连接并通过螺钉将焊柱定位机构3和陶瓷外壳定位机构4组合在一起。如图6所示;The upper cover 5 is a hollow flat plate, the size of which is: 85mm×85mm×3mm. It is used for connecting with the welding post flattening mechanism 2 and combining the welding post positioning mechanism 3 and the ceramic shell positioning mechanism 4 through screws. As shown in Figure 6;

焊柱平整化机构2、焊柱定位机构3、陶瓷外壳定位机构4和上盖5用螺钉固定连接,底座1与焊柱平整化机构2用螺钉固定连接;连接后,陶瓷外壳定位机构4和焊柱定位机构3的植柱孔都位于上盖5的中空部位。The welding post leveling mechanism 2, the welding post positioning mechanism 3, the ceramic shell positioning mechanism 4 and the upper cover 5 are fixedly connected with screws, and the base 1 and the welding post leveling mechanism 2 are fixedly connected with screws; after the connection, the ceramic shell positioning mechanism 4 and the The post-planting holes of the welding post positioning mechanism 3 are all located in the hollow part of the upper cover 5 .

将组合好的焊柱定位机构、陶瓷外壳定位机构和焊柱平整化机构放置于上盖与下盖之间,然后通过四边的固定组件将上盖、焊柱定位机构、陶瓷外壳定位机构、焊柱平整化机构和下盖固定,保证各组件的相对位置始终保持不变,参照图1。Place the combined welding post positioning mechanism, ceramic shell positioning mechanism and welding post leveling mechanism between the upper cover and the lower cover, and then fix the upper cover, welding post positioning mechanism, ceramic shell positioning mechanism, welding The column leveling mechanism and the lower cover are fixed to ensure that the relative positions of each component remain unchanged, see Figure 1.

将焊柱按照LGA560焊盘的阵列排布方式放置于相应焊柱的定位孔内,确保焊柱的底面接触到底部平台上。将LGA560外壳焊盘上均匀地印刷一定量的焊锡膏,通过对准设备将LGA560外壳倒置放在陶瓷外壳定位机构内,确保每个焊盘上的焊料均与相应焊柱充分接触。将放置好元器件的植柱装置平稳的放置于回流焊炉内进行回流焊,回流焊的峰值温度为250~275℃,回流时间为30~60s。使焊料在经过回流焊的过程中熔化,将焊盘与焊柱充分的连接在一起。待植柱装置冷却至室温后,通过旋开螺钉将下盖取下,通过切削工具对焊柱表面进行平整化处理,并将切削掉的焊柱端清除干净。最后使用拾取装置将元器件从植柱装置中无损伤的取出。Place the welding posts in the positioning holes of the corresponding welding posts according to the array arrangement of the LGA560 pads, and ensure that the bottom surface of the welding posts touches the bottom platform. Evenly print a certain amount of solder paste on the pads of the LGA560 case, and place the LGA560 case upside down in the positioning mechanism of the ceramic case through the alignment device to ensure that the solder on each pad is in full contact with the corresponding solder post. Place the post-planting device with the components placed in the reflow furnace stably for reflow soldering. The peak temperature of reflow soldering is 250-275°C, and the reflow time is 30-60s. The solder is melted during the reflow process, and the pad and the solder post are fully connected together. After the pillar planting device is cooled to room temperature, the lower cover is removed by unscrewing the screws, the surface of the welding pillar is smoothed by a cutting tool, and the cut off welding pillar end is cleaned. Finally, the pick-up device is used to remove the components from the post-planting device without damage.

Claims (6)

  1. Ceramic column grid array components and parts plant a column device, it is characterized in that: this device comprises base (1), welding column leveling mechanism (2), welding column detent mechanism (3), ceramic package detent mechanism (4) and upper cover (5) from the bottom up successively;
    Centered by base (1) with the flat board of boss;
    The flat board that welding column leveling mechanism (2) is hollow; A dull and stereotyped side is cutting edge, and the boss of the hollow part of welding column leveling mechanism (2) and base (1) matches;
    Welding column detent mechanism (3) is a flat board, is combined by web plate; Post hole is planted with what adapt with welding column diameter to be welded in its center;
    The flat board that ceramic package detent mechanism (4) is hollow, each side of ceramic package detent mechanism (4) is respectively with a limiting stand, and space and the ceramic package of four limiting stand compositions match; Between every two limiting stands, be hollow;
    The flat board that upper cover (5) is hollow;
    Welding column leveling mechanism (2), welding column detent mechanism (3), ceramic package detent mechanism (4) and upper cover (5) are fixedly connected with, and base (1) is fixedly connected with welding column leveling mechanism (2); After connection, the hollow part of planting post hole and be all positioned at upper cover (5) of ceramic package detent mechanism (4) and welding column detent mechanism (3).
  2. A kind of Ceramic column grid array components and parts according to claim 1 plant column device, it is characterized in that: web plate is to carry out precision machinedly with laser, and the web plate that welding column detent mechanism (3) is 0.5mm precise laser processing by 5 thickness combines.
  3. A kind of Ceramic column grid array components and parts according to claim 1 plant column device, it is characterized in that: cutting edge diminishes to the thickness at center gradually from the edge of welding column leveling mechanism (2), the gradient of cutting edge is less than 10 °.
  4. Ceramic column grid array components and parts plant a column method, it is characterized in that steps of the method are:
    1) welding column leveling mechanism (2), welding column detent mechanism (3), ceramic package detent mechanism (4) and upper cover (5) are fixedly connected with, then base (1) are fixedly connected with welding column leveling mechanism (2);
    2) requirement welding column to be welded being distributed according to ceramic package pad is placed on planting in post hole of welding column detent mechanism (3), and through planting post hole to the boss of base (1);
    3) printed solder paste on the pad of ceramic package, is positioned over ceramic package on welding column, solder(ing) paste is fully contacted with welding column to be welded, and by the limiting stand on ceramic package detent mechanism (4), ceramic package is positioned;
    4) planting column device and carrying out the Reflow Soldering of solder joint of ceramic package will be placed with, base (1) is taken off after cooling wait planting column device, by the cutting edge of welding column leveling mechanism (2), planarizing process is carried out in welding column surface with cutting tools, finally the ceramic package of having planted welding column is taken out from plant column device.
  5. A kind of Ceramic column grid array components and parts according to claim 4 plant column method, it is characterized in that: step 4) in Reflow Soldering in reflow ovens, carry out.
  6. 6. according to the column method of planting of a kind of Ceramic column grid array components and parts described in claim 4 or 5, it is characterized in that: the peak temperature of Reflow Soldering is 250~275 DEG C, return time is 30~60s.
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CN103258748B (en) * 2013-05-16 2015-11-04 无锡中微高科电子有限公司 The assemble method of column gate array ceramic packaging welding column
CN103394842B (en) * 2013-07-23 2015-05-20 中国电子科技集团公司第五十八研究所 Arrangement device for CCGA (ceramic column grid array) packaging welding columns and pins
CN103700607B (en) * 2013-12-19 2016-02-10 北京遥测技术研究所 A kind of frock for repairing pin in Ceramic column grid array
CN104779186B (en) * 2014-12-31 2017-06-13 中国航天科技集团公司第五研究院第五一三研究所 A kind of device for CCGA chip post techniques
CN105655264B (en) * 2015-12-30 2018-07-31 北京时代民芯科技有限公司 A kind of the plant column device and plant column method of CCGA devices
CN105789097B (en) * 2016-05-04 2019-03-26 中国电子科技集团公司第十三研究所 The ceramic pin grid array shell parallel seam welding fixture of system in package
CN106564002A (en) * 2016-11-09 2017-04-19 北京时代民芯科技有限公司 Tool and method for controlling coplanarity, position tolerance and perpendicularity of CCGA device welding columns
CN109920741A (en) * 2019-04-10 2019-06-21 成都智明达电子股份有限公司 A kind of CCGA device, which is reprocessed, plants column process
CN110116252A (en) * 2019-06-19 2019-08-13 西安微电子技术研究所 A kind of LCCC device is planted column welding tooling and is planted method of column to LCCC device using its
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