CN102830457B - Color filter substrate - Google Patents
Color filter substrate Download PDFInfo
- Publication number
- CN102830457B CN102830457B CN201210286419.9A CN201210286419A CN102830457B CN 102830457 B CN102830457 B CN 102830457B CN 201210286419 A CN201210286419 A CN 201210286419A CN 102830457 B CN102830457 B CN 102830457B
- Authority
- CN
- China
- Prior art keywords
- color
- arc
- photoresist
- curvature
- color photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【技术领域】 【Technical field】
本发明涉及一种彩色滤光片基板,特别涉及一种在满足高解析度高色彩饱和度情况下能够有效减小斜向色偏现象的薄型彩色滤光片基板。The invention relates to a color filter substrate, in particular to a thin color filter substrate capable of effectively reducing oblique color shift phenomenon under the condition of high resolution and high color saturation.
【背景技术】 【Background technique】
彩色滤光片基板广泛应用于显示装置中,在一般的彩色滤光片基板的制程中,首先是在基板上设置黑色矩阵,再在黑色矩阵和基板上设置复数彩色光阻,然后在彩色光阻上层设置一平坦层。其中,彩色光阻有三种,可以分别透过三种不同颜色的光线,如红、绿、蓝光等。其中,黑色矩阵位于相邻的彩色光阻之间,主要起阻挡杂光,防止混色等作用。Color filter substrates are widely used in display devices. In the general process of color filter substrates, firstly, a black matrix is set on the substrate, and then a plurality of color photoresists are set on the black matrix and the substrate, and then the colored light A flat layer is provided on the resistive upper layer. Among them, there are three kinds of color photoresists, which can pass through three different colors of light, such as red, green, and blue light. Among them, the black matrix is located between adjacent color photoresists, which mainly plays the role of blocking stray light and preventing color mixing.
如图1所示,为先前技术中一种彩色滤光片基板100的剖视图。先前技术中,黑色矩阵120位于基板110之上;彩色光阻130,包括第一彩色光阻131、第二彩色光阻132以及第三彩色光阻133,位于黑色矩阵120之间,且位于基板110和黑色矩阵120之上;平坦层140位于彩色光阻130的上方。在依次形成第一彩色光阻131、第二彩色光阻132以及第三彩色光阻133时,如果彩色光阻130在黑色矩阵120上方有爬坡现象,即相邻的彩色光阻131在黑色矩阵120上方会形成一部分的重叠凸出部134,该重叠凸出部134是一个凸起,会造成后续形成的平坦层140的平坦度不足,使为达到一定的平坦度而需增大平坦层140的厚度。As shown in FIG. 1 , it is a cross-sectional view of a color filter substrate 100 in the prior art. In the prior art, the black matrix 120 is located on the substrate 110; the color photoresist 130, including the first color photoresist 131, the second color photoresist 132 and the third color photoresist 133, is located between the black matrix 120 and is located on the substrate 110 and the black matrix 120; the flat layer 140 is located above the color photoresist 130. When forming the first color photoresist 131, the second color photoresist 132, and the third color photoresist 133 in sequence, if the color photoresist 130 has a climbing phenomenon above the black matrix 120, that is, the adjacent color photoresist 131 is on the black matrix 120. A part of the overlapping protrusion 134 is formed above the matrix 120. The overlapping protrusion 134 is a protrusion, which will cause insufficient flatness of the subsequently formed flat layer 140, so that the flat layer needs to be enlarged to achieve a certain flatness. 140 thickness.
同时,如图1所示的彩色滤光片基板,容易产生斜向色偏的问题。图2所示为先前技术中彩色滤光片基板产生斜向色偏现象的原理图。由于在先前技术中,黑色矩阵120位于基板110之上,彩色光阻130位于黑色矩阵120之间,且位于基板110和黑色矩阵120之上。彩色光阻130上表面除掉重叠凸出部134之后的中间部分135是平坦的,即该中间部分135是平行于该彩色光阻130与基板110的界面的。当观察者透过该彩色滤光片基板100观察从彩色光阻130透过来的光,正视(视线垂直于基板110)和斜视(视线与基板110成一定的角度,如大于0°且小于90°)显示器时,从显示器中透出来的光线经过彩色光阻130时的光程是不一样的,斜视时光线的光程一般要大于正视时光线的光程,即观察者正视和斜视显示器时,会产生光程差,从而产生斜向色偏现象。目前可以通过增加彩色光阻膜厚的方法来提高显示面板的色彩饱和度,但是彩色光阻的膜厚越大,也越易出现斜向色偏现象。如此一来,纵使彩色光阻的高膜厚能够提高色彩饱和度,仍然不能对彩色光阻进行高膜厚的设计。Meanwhile, the color filter substrate shown in FIG. 1 is prone to the problem of oblique color shift. FIG. 2 is a schematic diagram of the oblique color shift phenomenon produced by the color filter substrate in the prior art. Because in the prior art, the black matrix 120 is located on the substrate 110 , the color photoresist 130 is located between the black matrix 120 and on the substrate 110 and the black matrix 120 . The middle portion 135 of the upper surface of the color photoresist 130 after removing the overlapping protrusions 134 is flat, that is, the middle portion 135 is parallel to the interface between the color photoresist 130 and the substrate 110 . When the viewer observes the light transmitted from the color photoresist 130 through the color filter substrate 100, the viewer can look upright (the line of sight is perpendicular to the substrate 110) and squint (the line of sight forms a certain angle with the substrate 110, such as greater than 0° and less than 90°) °) When displaying the display, the optical path of the light passing through the color photoresist 130 from the display is different. The optical path of the light when squinting is generally greater than that of the light when looking squarely, that is, when the observer looks squarely and squints at the display , will produce optical path difference, resulting in oblique color shift phenomenon. At present, the color saturation of the display panel can be improved by increasing the film thickness of the color photoresist, but the larger the film thickness of the color photoresist, the more prone to oblique color shift. In this way, even though the high film thickness of the color photoresist can improve the color saturation, it is still impossible to design the high film thickness of the color photoresist.
【发明内容】 【Content of invention】
本发明提供一种彩色滤光片基板,该彩色滤光片基板能够在满足高解析度和高色彩饱和度的情况下减小斜向色偏的问题。The invention provides a color filter substrate, which can reduce the problem of oblique color shift while satisfying high resolution and high color saturation.
本发明中提供一种彩色滤光片基板,所述彩色滤光片基板包含复数彩色光阻位于基板上,该复数彩色光阻均具有一弧面造型;一黑色矩阵位于相邻的彩色光阻之间且位于彩色光阻边缘部之上;一平坦层位于所述彩色光阻和所述黑色矩阵之上。The present invention provides a color filter substrate, the color filter substrate includes a plurality of color photoresist located on the substrate, the plurality of color photoresist has a curved surface shape; a black matrix located in the adjacent color photoresist between and on the edge of the color photoresist; a flat layer is on the color photoresist and the black matrix.
根据本发明,复数彩色光阻首先形成在基板上,该彩色光阻具有一弧面造型,该彩色光阻的下表面与所述基板贴合,该彩色光阻的上表面为一弧形,即该彩色光阻的上表面之弧形为上凸的弧形,该彩色光阻具有一边缘部,且相邻的彩色光阻相互接触,在相邻的彩色光阻之间有一凹陷部分,而黑色矩阵位于相邻彩色光阻之间的凹陷部分并覆盖部分彩色光阻即黑色矩阵位于彩色光阻所述边缘部之上,如此,相邻彩色光阻因边缘部重叠而产生的凸起会在形成黑色矩阵之后被黑色矩阵所覆盖,而不会直接影响到后续平坦层的平坦度,也就是说,可以在保证平坦层具有较好平坦度的情况下减小平坦层的厚度,从而形成较薄的彩色滤光片基板。According to the present invention, a plurality of color photoresist is firstly formed on the substrate, the color photoresist has an arc shape, the lower surface of the color photoresist is attached to the substrate, the upper surface of the color photoresist is arc-shaped, That is, the arc of the upper surface of the color photoresist is an upwardly convex arc, the color photoresist has an edge portion, and adjacent color photoresists are in contact with each other, and there is a concave portion between adjacent color photoresists. The black matrix is located in the recessed part between adjacent color photoresist and covers part of the color photoresist, that is, the black matrix is located on the edge of the color photoresist, so that the adjacent color photoresist produces protrusions due to the overlap of the edge. It will be covered by the black matrix after forming the black matrix, and will not directly affect the flatness of the subsequent flat layer, that is, the thickness of the flat layer can be reduced while ensuring that the flat layer has better flatness, thereby Form thinner color filter substrates.
根据本发明,彩色光阻具有一弧面造型,该彩色光阻的上表面为一弧形,即该彩色光阻的上表面之弧形为上凸的弧形,该彩色光阻上表面的曲率半径较小,该彩色光阻上表面的曲率半径小于该彩色光阻下表面的长度,即使该彩色光阻上表面的曲率中心位于该彩色光阻的下表面附近,最佳的,该彩色光阻上表面的曲率中心正好位于彩色光阻下表面处,如此,观察者在正视和斜视显示器时,从彩色滤光片基板透过来的光经过彩色光阻时的路程相近或相同即光经过彩色光阻时的光程相近或相同,可以减小斜向色偏或消除斜向色偏。According to the present invention, the color photoresist has an arc shape, and the upper surface of the color photoresist is an arc, that is, the arc of the upper surface of the color photoresist is an upwardly convex arc, and the upper surface of the color photoresist is curved. The radius of curvature is small, the radius of curvature of the upper surface of the color photoresist is smaller than the length of the lower surface of the color photoresist, even if the center of curvature of the upper surface of the color photoresist is located near the lower surface of the color photoresist, the best, the color photoresist The center of curvature of the upper surface of the photoresist is exactly located at the lower surface of the color photoresist. In this way, when the observer looks straight and obliquely at the display, the path of the light transmitted from the color filter substrate when passing through the color photoresist is similar or the same, that is, the light passes through The optical path of the color photoresist is similar or the same, which can reduce or eliminate the oblique color shift.
根据本发明,由于该彩色光阻具有一弧面造型,该彩色光阻的上表面为一弧形,可以适当增加该彩色光阻的厚度来提高该彩色光阻的色彩饱和度。同时,由于该彩色光阻具有一弧面造型,黑色矩阵位于相邻彩色光阻之间的凹陷部分且位于彩色光阻边缘部之上,即黑色矩阵是依着彩色光阻的边缘部而设置的,如此便可以在保证可视范围的情况下,有效的节省空间并制作尺寸较小数量更多的彩色光阻,从而制作达到满足高解析度要求的彩色滤光片基板。According to the present invention, since the color photoresist has an arc shape and the upper surface of the color photoresist is arc-shaped, the color saturation of the color photoresist can be improved by properly increasing the thickness of the color photoresist. At the same time, because the color photoresist has a curved shape, the black matrix is located in the concave part between adjacent color photoresists and on the edge of the color photoresist, that is, the black matrix is arranged along the edge of the color photoresist. In this way, under the condition of ensuring the visible range, it can effectively save space and produce a smaller size and more color photoresists, so as to produce a color filter substrate that meets the high-resolution requirements.
本发明提供一种制造彩色滤光片基板的方法,首先提供一基板,在该基板上形成第一色阻材料;在第一色阻材料的上方设置一光罩;透过光罩对第一色阻材料进行曝光,采用的曝光方式为弱曝光;对第一色阻材料进行蚀刻;蚀刻完成后,从而形成第一彩色光阻,该第一彩色光阻具有一弧面造型;随后,依次在基板上形成第二彩色光阻和第三彩色光阻,如此,在整个基板上形成复数彩色光阻,该复数彩色光阻均具有一弧面造型,该彩色光阻的上表面为一弧形,该上表面的曲率半径较小,该彩色光阻上表面之弧形的曲率半径小于该彩色光阻下表面的长度,即该彩色光阻上表面的曲率中心位于该彩色光阻下表面附近,最佳的,该彩色光阻上表面的曲率中心正好位于彩色光阻下表面处,且相邻的彩色光阻相互接触,相邻的彩色光阻之间会形成一凹陷部分;然后在彩色光阻上形成黑色矩阵,黑色矩阵位于相邻彩色光阻之间的凹陷部分并覆盖部分的彩色光阻,且位于彩色光阻边缘部之上;最后在彩色光阻和黑色矩阵上方形成一平坦层。The invention provides a method for manufacturing a color filter substrate. Firstly, a substrate is provided, and a first color-resist material is formed on the substrate; a photomask is arranged above the first color-resist material; The color resist material is exposed, and the exposure method adopted is weak exposure; the first color resist material is etched; after the etching is completed, the first color photoresist is formed, and the first color photoresist has an arc shape; then, sequentially A second color photoresist and a third color photoresist are formed on the substrate, so that a plurality of color photoresists are formed on the entire substrate, the plurality of color photoresists all have an arc shape, and the upper surface of the color photoresist is an arc shape, the radius of curvature of the upper surface is small, the radius of curvature of the upper surface of the color photoresist is smaller than the length of the lower surface of the color photoresist, that is, the center of curvature of the upper surface of the color photoresist is located on the lower surface of the color photoresist Nearby, preferably, the center of curvature of the upper surface of the color photoresist is just at the lower surface of the color photoresist, and the adjacent color photoresists are in contact with each other, and a concave part will be formed between the adjacent color photoresists; then A black matrix is formed on the color photoresist, the black matrix is located in the recessed part between adjacent color photoresists and covers part of the color photoresist, and is located on the edge of the color photoresist; finally a black matrix is formed above the color photoresist and the black matrix flat layer.
一种制造如上所述彩色滤光片基板的方法为采用色阻材料制作彩色光阻,当为满足高色彩饱和度的要求而增加彩色光阻的膜厚时,彩色光阻的光透过率便会下降,为了解决高色彩饱和度下彩色光阻光透过率下降问题,采用色彩分子(paste分子)较小的色阻材料。A method for manufacturing the above-mentioned color filter substrate is to use a color-resist material to make a color photoresist. When the film thickness of the color photoresist is increased to meet the requirements of high color saturation, the light transmittance of the color photoresist In order to solve the problem of lower light transmittance of color photoresists under high color saturation, color resist materials with smaller color molecules (paste molecules) are used.
一种制造如上所述彩色滤光片基板的方法为采用色阻材料制作彩色光阻,该色阻材料为感光度较低的色阻材料。A method for manufacturing the above-mentioned color filter substrate is to use a color-resist material to make a color photoresist, and the color-resist material is a color-resist material with low sensitivity.
一种制造如上所述彩色滤光片基板的方法为在色阻材料的上方设置一具有开口部分和遮光部分的光罩,降低曝光光强度,对色阻材料进行弱曝光。该色阻材料的感光度较低,该色阻材料的充分感光部分在后续的蚀刻过程中被保留下来,未感光部分在蚀刻过程中被蚀刻掉,弱感光部分在蚀刻过程中被部分蚀刻掉同时部分保留下来。A method for manufacturing the above-mentioned color filter substrate is to place a photomask with an opening and a light-shielding portion above the color-resist material, reduce the intensity of exposure light, and weakly expose the color-resist material. The sensitivity of the color resist material is low, the fully photosensitive part of the color resist material is retained in the subsequent etching process, the unphotosensitive part is etched away during the etching process, and the weak photosensitive part is partially etched away during the etching process while partially preserved.
【附图说明】【Description of drawings】
图1为先前技术中彩色滤光片基板的剖视图。FIG. 1 is a cross-sectional view of a color filter substrate in the prior art.
图2为先前技术中彩色滤光片基板产生斜向色偏现象的原理图。FIG. 2 is a schematic diagram of the oblique color shift phenomenon produced by the color filter substrate in the prior art.
图3为本发明中彩色滤光片基板的剖视图。FIG. 3 is a cross-sectional view of a color filter substrate in the present invention.
图4a,4b为单个彩色光阻的具体形状剖视图。4a and 4b are cross-sectional views of specific shapes of a single color photoresist.
图5,6a,6b为本发明中彩色滤光片基板改善斜向色偏现象的原理图。5, 6a, 6b are schematic diagrams of the color filter substrate improving oblique color shift in the present invention.
图7~图10为本发明中制造彩色滤光片基板的流程图。7 to 10 are flowcharts of manufacturing the color filter substrate in the present invention.
图11为本发明中制作彩色光阻的曝光过程并实现彩色光阻弧面造型的原理图。FIG. 11 is a schematic diagram of the exposure process for making the color photoresist and realizing the arc shape of the color photoresist in the present invention.
【具体实施方式】 【Detailed ways】
图3为本发明中彩色滤光片基板的剖视图。如图3所示,本发明中彩色滤光片基板200包含一基板210,其中,所述基板210由可透光材料制作而成;一彩色光阻230,其设置于基板210上,其中,该彩色光阻230为一弧面造型,其下表面202与基板210相接触,其上表面201为一弧形,该彩色光阻230具有一边缘部204,且相邻的彩色光阻230相互接触,在相邻的彩色光阻230之间形成有一凹陷部分203;一黑色矩阵220,其设置于两相邻彩色光阻230之间,即黑色矩阵220设置于相邻彩色光阻230之间所形成的凹陷部分203;一平坦层240设置于该彩色光阻230及该黑色矩阵220的上方。FIG. 3 is a cross-sectional view of a color filter substrate in the present invention. As shown in FIG. 3 , the color filter substrate 200 in the present invention includes a substrate 210, wherein the substrate 210 is made of a light-transmitting material; a color photoresist 230 is arranged on the substrate 210, wherein, The color photoresist 230 has an arc shape, its lower surface 202 is in contact with the substrate 210, and its upper surface 201 is arc-shaped. The color photoresist 230 has an edge portion 204, and the adjacent color photoresist 230 is mutually Contact, a recessed portion 203 is formed between adjacent color photoresists 230; a black matrix 220 is arranged between two adjacent color photoresists 230, that is, the black matrix 220 is arranged between adjacent color photoresists 230 The formed concave portion 203 ; a flat layer 240 is disposed above the color photoresist 230 and the black matrix 220 .
其中,上述彩色光阻230更包含有第一彩色光阻231、第二彩色光阻232以及第三彩色光阻233,且设置在基板210上依序交替排列,现以此三种彩色光阻为例,但不限于三种彩色光阻,例如:亦可使用R(红),绿(G),蓝(B),白(W)四种彩色光阻或其他的彩色光阻组合。而所述三种彩色光阻是由三种不同的色阻材料(如树脂材料)所制作而成,其可将入射光分别透过不同的彩色光阻而过滤出不同波长段的光,如红、绿、蓝光等,其中该彩色光阻230设计为具有一弧面造型,其下表面202与基板210相接触并贴合,其上表面201为一弧形,即该彩色光阻230的上表面201之弧形为上凸的弧形,如图4a,4b所示,为单个彩色光阻230的具体形状剖视图,该彩色光阻230的上表面201的曲率半径R较小,该曲率半径R小于该彩色光阻230下表面202的长度H,即其上表面201的曲率中心O位于该彩色光阻230的下表面202附近,该曲率中心O越靠近该下表面202越好,最佳的,该彩色光阻230的上表面201的曲率半径R等于该下表面202长度H的一半,即该上表面201的曲率中心O正好位于该下表面202处,即使该彩色光阻230为一个半球,图4a中彩色光阻230上表面201的曲率半径R小于下表面202长度H并大于1/2H(该上表面201的曲率中心O位于该下表面202附近),图4b中彩色光阻230上表面201的曲率半径R等于下表面202长度H的一半(该上表面201的曲率中心O正好位于该下表面202处),当然,这是在该彩色光阻230的上表面201之弧形为一标准弧形(具有一个曲率半径)的情况下所需要满足的条件,而很多情况下,该彩色光阻230的上表面201之弧形也可以为一不标准的弧形(具有多个曲率半径,如为一椭圆状的弧形或其他连续曲线所构成的弧形),此时,亦可将该不标准弧形所具有的曲率半径均设置成小于该彩色光阻230下表面的202的长度,或者至少将该不标准弧形正中央的一段弧的曲率中心设置在该彩色光阻230下表面202的附近,如此,则可以通过适当增加彩色光阻230的膜厚来提高彩色光阻230的色彩饱和度,此时,由于增加了彩色光阻230的膜厚,其光透过率则会因膜厚增加受到影响而降低,然而为了解决彩色光阻230光透过率降低的问题,该彩色光阻230是采用色彩分子(paste分子)较小的色阻材料,即在增加彩色光阻230膜厚的情况下使其光透过率不受影响。由于彩色光阻230的上表面201均为一弧形,因所述第一彩色光阻231、第二彩色光阻232以及第三彩色光阻233设置在基板210上时是依序交替排列的,且相邻的彩色光阻230相互接触,故在相邻的彩色光阻230之间会形成一凹陷部分203。Wherein, the above-mentioned color photoresist 230 further includes a first color photoresist 231, a second color photoresist 232, and a third color photoresist 233, which are disposed on the substrate 210 and arranged alternately in sequence. As an example, but not limited to three kinds of color photoresist, for example: four color photoresist of R (red), green (G), blue (B), white (W) or other combination of color photoresist can also be used. The three color photoresists are made of three different color resist materials (such as resin materials), which can filter the incident light through different color photoresists to filter out light of different wavelengths, such as Red, green, blue light, etc., wherein the color photoresist 230 is designed to have a curved shape, its lower surface 202 is in contact with and bonded to the substrate 210, and its upper surface 201 is an arc, that is, the color photoresist 230 The arc of the upper surface 201 is an upwardly convex arc, as shown in Figures 4a and 4b, which are cross-sectional views of the specific shape of a single color photoresist 230. The radius of curvature R of the upper surface 201 of the color photoresist 230 is relatively small, and the curvature The radius R is less than the length H of the lower surface 202 of the color photoresist 230, that is, the center of curvature O of the upper surface 201 is located near the lower surface 202 of the color photoresist 230, the closer the center of curvature O is to the lower surface 202, the better, and the best Preferably, the radius of curvature R of the upper surface 201 of the color photoresist 230 is equal to half of the length H of the lower surface 202, that is, the center of curvature O of the upper surface 201 is just located at the lower surface 202, even if the color photoresist 230 is A hemisphere, the radius of curvature R of the upper surface 201 of the color photoresist 230 in FIG. The radius of curvature R of the upper surface 201 of the resistance 230 is equal to half of the length H of the lower surface 202 (the center of curvature O of the upper surface 201 is just located at the lower surface 202), of course, this is between the upper surface 201 of the color photoresist 230 The condition that the arc is a standard arc (with a radius of curvature) needs to be satisfied, and in many cases, the arc of the upper surface 201 of the color photoresist 230 can also be a non-standard arc (with a radius of curvature). Multiple radii of curvature, such as an elliptical arc or arc formed by other continuous curves), at this time, the radii of curvature of the non-standard arc can also be set to be smaller than the color photoresist 230 The length of 202 of the surface, or at least the center of curvature of a section of arc in the center of the non-standard arc is set near the lower surface 202 of the color photoresist 230, so that it can be achieved by appropriately increasing the film thickness of the color photoresist 230 Improve the color saturation of the color photoresist 230. At this time, due to the increase of the film thickness of the color photoresist 230, its light transmittance will be affected by the increase of the film thickness and decrease. In order to solve the problem of low efficiency, the color photoresist 230 uses a color resist material with small color molecules (paste molecules), that is, the light transmittance of the color photoresist 230 will not be affected when the film thickness of the color photoresist 230 is increased. Since the upper surface 201 of the color photoresist 230 is arc-shaped, the first color photoresist 231, the second color photoresist 232 and the third color photoresist 233 are arranged alternately in sequence when they are arranged on the substrate 210. , and the adjacent color photoresists 230 are in contact with each other, so a concave portion 203 is formed between the adjacent color photoresists 230 .
再接续上述,其中所述黑色矩阵220是设置于相邻彩色光阻230之间所形成的凹陷部分203并覆盖部分的彩色光阻230,且位于彩色光阻230边缘部204之上,由于黑色矩阵220位于相邻彩色光阻230之间的凹陷部分203,可以在有效的节省空间的同时扩大彩色光阻230的可视范围,即该黑色矩阵220是依着彩色光阻230的边缘部204而设置的,而该上表面201为一弧形,使其彩色光阻230底部的可视范围扩大,如此便可以在保证同样大小的可视范围的情况下缩小彩色光阻230的尺寸并制作数量更多的彩色光阻230,从而使该彩色滤光片基板200能够满足高解析度的要求。其中该黑色矩阵220为不透光材料,该不透光材料至少要阻挡可见光。Continuing from the above, wherein the black matrix 220 is arranged in the recessed portion 203 formed between adjacent color photoresists 230 and covers part of the color photoresist 230, and is located on the edge portion 204 of the color photoresist 230, due to the black The matrix 220 is located in the recessed portion 203 between adjacent color photoresists 230, which can effectively save space and expand the visible range of the color photoresist 230, that is, the black matrix 220 follows the edge 204 of the color photoresist 230 And set, and this upper surface 201 is an arc shape, makes the visible range of the bottom of its color photoresist 230 expand, so just can reduce the size of color photoresist 230 under the situation of ensuring the same size visible range and make A greater number of color photoresists 230 enables the color filter substrate 200 to meet the requirement of high resolution. Wherein the black matrix 220 is an opaque material, and the opaque material at least blocks visible light.
所述平坦层240位于彩色光阻230和黑色矩阵220的上方,平坦层240为透明绝缘材料。通常,在形成彩色光阻230时,相邻的彩色光阻230之间也会形成一部分的重叠区域,而在本发明中,纵使相邻的彩色光阻230之间形成了一部分的重叠区域,但是该重叠区域会首先被黑色矩阵220覆盖,而并不会直接影响到后续平坦层的形成,即在本发明中并不会在形成平坦层之前产生如图1所示之重叠凸出部(如图1中所示的重叠凸出部134,需要形成较厚的平坦层140,才能使平坦层140的平坦度较好。)如此,即可在保证平坦层240具有较好平坦度的情况下减少形成的平坦层240的厚度,从而减少形成的该彩色滤光片基板200的厚度。The flat layer 240 is located above the color photoresist 230 and the black matrix 220, and the flat layer 240 is a transparent insulating material. Usually, when the color photoresist 230 is formed, a part of the overlapping area is formed between the adjacent color photoresist 230, but in the present invention, even if a part of the overlapping area is formed between the adjacent color photoresist 230, However, the overlapping area will be covered by the black matrix 220 at first, and will not directly affect the formation of the subsequent flat layer, that is, in the present invention, the overlapping protrusions as shown in FIG. 1 will not be generated before the flat layer is formed ( As shown in Fig. 1, overlapping protrusions 134 need to form a thicker flat layer 140 to make the flatness of the flat layer 140 better.) In this way, it is possible to ensure that the flat layer 240 has better flatness. The thickness of the formed flat layer 240 is reduced, thereby reducing the thickness of the formed color filter substrate 200 .
如图5,6a,6b所示,为本发明中彩色滤光片基板改善斜向色偏现象的原理图。如图5所示,本发明中彩色滤光片基板200上的彩色光阻230位于基板210之上,由于每一彩色光阻230,包括第一彩色光阻231、第二彩色光阻232以及第三彩色光阻233,其上表面201均为一弧形,即该彩色光阻230的上表面201为上凸的弧形,该上表面201的曲率半径R较小,该曲率半径R小于该彩色光阻230下表面202的长度H,即使其上表面201的曲率中心O位于该彩色光阻230的下表面202附近,该曲率中心O越靠近该下表面202越好,最佳的,该彩色光阻230的上表面201的曲率半径R等于该下表面202长度H的一半,即该上表面201的曲率中心O正好位于该下表面202处,即使该彩色光阻230为一个半球,如此,当观察者正视(视线垂直于基板210)和斜视(视线与基板210成一定的角度,如大于0°小于90°)显示器时,从彩色滤光片基板200透出来的光线经过彩色光阻230时的路程分别为L1和L2(一般情况下,彩色光阻230的尺寸都在微米量级,不管正视还是斜视显示器,人眼接收到的经过彩色光阻230的光线大部分都会经过彩色光阻230的下表面202的中心点附近),L1和L2相近或相同,最佳的,该路程L1和L2的大小相同且为该彩色光阻230上表面201的曲率半径R的大小,如图6a所示,该彩色光阻230上表面201的曲率半径小于该下表面202长度H并大于1/2H(该上表面201的曲率中心O位于该下表面202附近),正视和斜视显示器时,光线通过彩色光阻230时的路程L1和L2大小相近,如图6b所示,该彩色光阻230上表面的曲率半径R等于该下表面202的长度H的一半(该上表面201的曲率中心正好位于该下表面202处),正视和斜视显示器时,光线通过彩色光阻230时的路程L1和L2大小相等且等于该上表面201的曲率半径R,如此,从彩色滤光片基板200透出来的光线经过彩色光阻230时的光程相近或相同,即观察者正视和斜视显示器时,所产生的光程差较小或不产生光程差。因此,该彩色滤光片基板200能够有效改善斜向色偏现象。As shown in FIGS. 5, 6a and 6b, they are schematic diagrams of improving oblique color shift by the color filter substrate in the present invention. As shown in Figure 5, the color photoresist 230 on the color filter substrate 200 of the present invention is located on the substrate 210, because each color photoresist 230 includes a first color photoresist 231, a second color photoresist 232 and The third color photoresist 233 has an arc shape on its upper surface 201, that is, the upper surface 201 of the color photoresist 230 is an upwardly convex arc shape, and the curvature radius R of the upper surface 201 is relatively small, and the curvature radius R is less than The length H of the lower surface 202 of the color photoresist 230, even if the center of curvature O of the upper surface 201 is located near the lower surface 202 of the color photoresist 230, the closer the center of curvature O is to the lower surface 202, the better, the best, The radius of curvature R of the upper surface 201 of the color photoresist 230 is equal to half the length H of the lower surface 202, that is, the center of curvature O of the upper surface 201 is just located at the lower surface 202, even if the color photoresist 230 is a hemisphere, In this way, when the observer looks straight (the line of sight is perpendicular to the substrate 210) and squints (the line of sight is at a certain angle to the substrate 210, such as greater than 0° and less than 90°) the display, the light transmitted from the color filter substrate 200 passes through the colored light The distances of the resistance 230 are L1 and L2 respectively (generally, the size of the color photoresist 230 is on the order of microns, no matter looking straight up or squinting at the display, most of the light received by the human eye through the color photoresist 230 will pass through the color photoresist 230 Near the center point of the lower surface 202 of the photoresist 230), L1 and L2 are similar or the same, and optimally, the distances L1 and L2 have the same size and are the size of the radius of curvature R of the upper surface 201 of the color photoresist 230, such as As shown in Figure 6a, the radius of curvature of the upper surface 201 of the color photoresist 230 is less than the length H of the lower surface 202 and greater than 1/2H (the center of curvature O of the upper surface 201 is located near the lower surface 202), when the display is viewed frontally and obliquely , the distances L1 and L2 of light passing through the color photoresist 230 are similar in size. As shown in FIG. The center is just at the lower surface 202), when the display is viewed frontally and obliquely, the distances L1 and L2 of the light passing through the color photoresist 230 are equal in size and equal to the radius of curvature R of the upper surface 201, so, from the color filter substrate 200 The optical path of the transmitted light passing through the color photoresist 230 is similar or the same, that is, the optical path difference generated by the observer is small or does not occur when the observer looks straight or obliquely at the display. Therefore, the color filter substrate 200 can effectively improve oblique color shift.
图7~图10为本发明中制作彩色滤光片基板的流程图。如图7所示,首先提供一基板210,该基板210由透明材料制作而成,其可透过可见光。然后在基板210上形成一层第一色阻材料250,该第一色阻材料250为负光阻,其中该第一色阻材料250为一种感光度较低的色阻材料,即该第一色阻材料250主要是对光的敏感度较低,即光强需要达到一定的值,该第一色阻材料250才能充分反应,若所接收到的光强较小,其反应度会较小或不能充分反应或反应较缓慢。7 to 10 are flow charts of manufacturing a color filter substrate in the present invention. As shown in FIG. 7 , firstly, a substrate 210 is provided, and the substrate 210 is made of a transparent material that can transmit visible light. Then a layer of first color resist material 250 is formed on the substrate 210, the first color resist material 250 is a negative photoresist, wherein the first color resist material 250 is a color resist material with lower sensitivity, that is, the first color resist material The first color-resist material 250 is mainly less sensitive to light, that is, the light intensity needs to reach a certain value before the first color-resist material 250 can fully respond. Small or less responsive or slower to respond.
再接续下个步骤,请同时参考图8及图11。如图8中所示,在第一色阻材料250的上方设置一光罩900,该光罩900具有开口部分901及遮光部分903,开口部分901可以让光通过,遮光部分903不可以让光通过。接着,通过光罩900对第一色阻材料250进行曝光,该曝光方式是使用弱曝光,即曝光的强度较弱,而第一色阻材料250是选择感光度较低的色阻材料,即该第一色阻材料250对光的敏感度较低,在进行弱曝光的过程中,该第一色阻材料250上所接收到的光强没有达到一定强度的部分,其反应度则会较小或不能充分反应或反应较缓慢,而该第一色阻材料250上所接收到的光强达到一定强度的部分能够充分反应,此时请同时参考图11所示,经过弱曝光后,位于光罩900开口部分901中央正下方的第一色阻材料250所接收到的光强最强成为充分感光部分251,位于光罩900开口部分901与遮光部分903交界处下方的第一色阻材料250所接收到的光强较小成为弱感光部分252,而位于光罩900遮光部分903下方的第一色阻材料250没有接收到光照成为未感光部分253。Continue to the next step, please refer to Figure 8 and Figure 11 at the same time. As shown in FIG. 8 , a photomask 900 is arranged above the first color-resist material 250. The photomask 900 has an opening 901 and a light-shielding portion 903. The opening 901 allows light to pass through, and the light-shielding portion 903 does not allow light to pass through. pass. Next, the first color-resist material 250 is exposed through the photomask 900. The exposure method is to use weak exposure, that is, the intensity of exposure is relatively weak, and the first color-resist material 250 is a color-resist material with a lower sensitivity, that is, The first color-resist material 250 is less sensitive to light. During the weak exposure process, the part of the first color-resist material 250 whose received light intensity does not reach a certain intensity will have a lower reactivity. small or unable to fully react or react slowly, and the part of the first color resist material 250 that receives a certain intensity of light can fully react. At this time, please refer to FIG. 11 at the same time. The first color-resist material 250 directly under the center of the opening 901 of the photomask 900 receives the strongest light intensity and becomes the fully photosensitive part 251 , and the first color-resist material below the junction of the opening 901 and the light-shielding part 903 of the photomask 900 The light intensity received by 250 is small and becomes the weakly photosensitive part 252 , while the first color resist material 250 under the light shielding part 903 of the mask 900 does not receive light and becomes the non-photosensitive part 253 .
随后接着,对经过弱曝光后的该第一色阻材料250进行蚀刻,其中该充分感光部分251全部被保留下来,未感光部位253完全被蚀刻掉,弱感光部分252被部分蚀刻掉且部分保留下来。蚀刻完成后,从而形成复数个第一彩色光阻231,如图9所示,其中该第一彩色光阻231则形成为具一弧面造型,同时参考图4a和图4b,即该第一彩色光阻231的上表面201为一弧形,该弧形为上凸的弧形,该第一彩色光阻231的上表面201的曲率半径R较小,该曲率半径R小于该彩色光阻231下表面202的长度H,即且该上表面201的曲率中心O位于该第一彩色光阻231的下表面202附近,该曲率中心O越靠近该下表面202越好,最佳的,该彩色光阻231的上表面201的曲率半径等于该下表面202长度H的一半,即该上表面201的曲率中心O正好位于该下表面202处,即使该彩色光祖231为一个半球。随后,用相同的方法在基板210上依次形成复数个第二彩色光阻232和复数个第三彩色光阻233,第二彩色光阻232及第三彩色光阻233也均为一弧面造型,即该第二彩色光阻232及第三彩色光阻233的上表面201为一弧形,该弧形为上凸的弧形,该上表面201的曲率半径R较小,该曲率半径R小于该彩色光阻230下表面202的长度H,即该上表面201的曲率中心O位于该第二彩色光阻232及第三彩色光阻233的下表面202附近,最佳的,该曲率中心O正好位于下表面202处,且所述第一彩色光阻231与第二彩色光阻232以及第三彩色光阻233的形状和大小都相同。本发明以彩色光阻230所采用的色阻材料都是负光阻为例来解释本发明,但不限于使用负光阻,如若采用正光阻,本领域内的一般技术人员也可采用类似的原理实施。其中第一彩色光阻231、第二彩色光阻232以及第三彩色光阻233所采用的色阻材料各不相同,该三种彩色光阻可分别将入射光过滤出不同波长段的光。第一彩色光阻231、第二彩色光阻232以及第三彩色光阻233在基板210上是依序交替排列的,相邻的彩色光阻230彼此接触,如此,在整个基板210上都布满了彩色光阻230,且相邻的彩色光阻230之间会形成一凹陷部分203。Subsequently, the first color resist material 250 after weak exposure is etched, wherein the fully photosensitive part 251 is completely retained, the unphotosensitive part 253 is completely etched away, and the weakly photosensitive part 252 is partially etched and partially retained down. After the etching is completed, a plurality of first color photoresists 231 are formed, as shown in FIG. The upper surface 201 of the color photoresist 231 is an arc, and the arc is an upwardly convex arc. The radius of curvature R of the upper surface 201 of the first color photoresist 231 is relatively small, and the radius of curvature R is smaller than that of the color photoresist. 231 The length H of the lower surface 202, that is, the center of curvature O of the upper surface 201 is located near the lower surface 202 of the first color photoresist 231, the closer the center of curvature O is to the lower surface 202, the better, and the best, the The radius of curvature of the upper surface 201 of the color photoresist 231 is equal to half of the length H of the lower surface 202, that is, the center of curvature O of the upper surface 201 is exactly located at the lower surface 202, even though the color photoresist 231 is a hemisphere. Subsequently, a plurality of second color photoresists 232 and a plurality of third color photoresists 233 are successively formed on the substrate 210 by the same method, and the second color photoresists 232 and the third color photoresists 233 are also in an arc shape , that is, the upper surface 201 of the second color photoresist 232 and the third color photoresist 233 is an arc, the arc is an upwardly convex arc, the radius of curvature R of the upper surface 201 is relatively small, and the radius of curvature R Less than the length H of the lower surface 202 of the color photoresist 230, that is, the center of curvature O of the upper surface 201 is located near the lower surface 202 of the second color photoresist 232 and the third color photoresist 233, preferably, the center of curvature O is just located on the lower surface 202 , and the shape and size of the first color photoresist 231 , the second color photoresist 232 and the third color photoresist 233 are the same. In the present invention, the color resist materials used in the color photoresist 230 are all negative photoresist as an example to explain the present invention, but it is not limited to the use of negative photoresist. If a positive photoresist is used, a person skilled in the art can also use a similar Principle implementation. The first color photoresist 231 , the second color photoresist 232 and the third color photoresist 233 use different color resist materials, and the three color photoresist can respectively filter the incident light into light of different wavelength bands. The first color photoresist 231, the second color photoresist 232 and the third color photoresist 233 are alternately arranged in sequence on the substrate 210, and adjacent color photoresist 230 are in contact with each other. The color photoresists 230 are filled, and a concave portion 203 is formed between adjacent color photoresists 230 .
如图10所示,随后,在彩色滤光片基板200上形成黑色矩阵220,黑色矩阵220位于相邻彩色光阻230之间的凹陷部分203并覆盖部分的彩色光阻230,且位于彩色光阻230边缘部204之上,该黑色矩阵220可以防止不同彩色光阻230之间的混色现象,同时阻挡杂光。黑色矩阵220采用不透光的材料制作而成,可以是金属材料也可以是其他不透光材料。接着,在彩色光阻230和黑色矩阵220上方形成一平坦层240,该平坦层240采用透明绝缘材料,如氮化硅等。As shown in FIG. 10 , subsequently, a black matrix 220 is formed on the color filter substrate 200. The black matrix 220 is located in the recessed portion 203 between adjacent color photoresists 230 and covers part of the color photoresist 230, and is located in the color photoresist. Above the edge portion 204 of the resist 230, the black matrix 220 can prevent color mixing between different color resists 230 and block stray light at the same time. The black matrix 220 is made of opaque material, which can be metal material or other opaque materials. Next, a flat layer 240 is formed on the color photoresist 230 and the black matrix 220, and the flat layer 240 is made of a transparent insulating material, such as silicon nitride.
如图11所示,为本发明中制作彩色光阻的曝光过程并以此实现彩色光阻弧面造型的原理图。本发明以彩色光阻(彩色滤光片)所采用的色阻材料为负光阻为例来解释本发明实现彩色光阻弧面造型的原理,当然,当彩色光阻采用的色阻材料为正光阻时,也可以用同样的基本原理和思想来解释。本发明中,对色阻材料进行曝光时,该曝光方式是使用弱曝光,即曝光的强度较弱。以曝光蚀刻第一色阻材料250形成第一彩色光阻231为例,形成第二彩色光阻232以及第三彩色光阻233时,原理相同。弱光照透过光罩900的开口部分901照射到第一色阻材料250上,光线通过开口部分901时发生衍射,光照的范围如图11中的长虚线所示,此时,第一色阻材料250接收到的光强并不是均匀的,第一色阻材料250所接收到的光强强度分布如图11中的点直线所示,其中,纵轴Y方向示意光强强度大小。由图11可知,该光强强度在开口部分901的中央是最大的,越到旁边光强越小。同时,由于第一色阻材料250的感光度较低,光强强度要达到一定的值,第一色阻材料250才能充分反应,充分感光而充分反应的色阻材料会在后续的蚀刻过程中被保留下来。由于在开口部分901的中央光强强度最大,第一色阻材料250上位于开口部分901中央正下方的部分能够充分感光从而充分反应,该部分成为充分感光部分251。而第一色阻材料250位于光罩900开口部分901与遮光部分903交界处下方的部分弱感光,其接收到的光强较小而不能充分反应,该部分成为弱感光部分252。位于光罩900遮光部分903下方的第一色阻材料250没有感光,不能反应,该部分成为未感光部分253。因此在后续的蚀刻过程中,充分感光部分251由于曝光时所接收到的光强最强并充分反应,在蚀刻过程中被完全保留下来,同时由于色阻材料250的感光度较低,在曝光时弱感光部分252所接收到的光强强度较弱,弱感光部分252反应不充分而在蚀刻过程中被部分保留下来同时部分被蚀刻掉,而未感光部分253由于在曝光时没有接收到光照,没有反应,在蚀刻过程中被完全蚀刻掉,便形成具有一弧面造型的第一彩色光阻231,如图11中的点虚线所示。形成彩色光阻231之后,采用同样的原理,依序在基板210上形成彩色光阻232、彩色光阻233,相邻的彩色光阻230彼此接触。As shown in FIG. 11 , it is a principle diagram of the exposure process of making the color photoresist in the present invention and realizing the arc shape of the color photoresist. The present invention takes the color resist material adopted in the color photoresist (color filter) as an example to explain the principle of the present invention to realize the arc shape of the color photoresist. Of course, when the color resist material used in the color photoresist is When the photoresist is positive, it can also be explained by the same basic principle and idea. In the present invention, when exposing the color resist material, the exposure method is to use weak exposure, that is, the intensity of exposure is relatively weak. Taking the exposure and etching of the first color resist material 250 to form the first color photoresist 231 as an example, the principle of forming the second color photoresist 232 and the third color photoresist 233 is the same. Weak light is irradiated on the first color resist material 250 through the opening 901 of the mask 900, and diffraction occurs when the light passes through the opening 901. The range of light is shown by the long dotted line in FIG. The light intensity received by the material 250 is not uniform, and the distribution of the light intensity received by the first color-resist material 250 is shown as a dotted line in FIG. 11 , where the vertical axis Y indicates the light intensity. It can be seen from FIG. 11 that the light intensity is the largest at the center of the opening 901 , and the light intensity decreases toward the side. At the same time, because the sensitivity of the first color-resist material 250 is low, the light intensity must reach a certain value before the first color-resist material 250 can fully react. was preserved. Since the light intensity is the highest at the center of the opening 901 , the part of the first color-resist material 250 directly below the center of the opening 901 can be fully sensitive to light and react fully, and this part becomes the fully photosensitive part 251 . The part of the first color-resist material 250 located below the junction of the opening 901 and the light-shielding part 903 of the mask 900 is weakly sensitive to light. The first color-resist material 250 located under the light-shielding portion 903 of the mask 900 is not sensitive to light and cannot react, and this portion becomes the unsensitized portion 253 . Therefore, in the subsequent etching process, the fully photosensitive part 251 is completely retained in the etching process due to the strongest light intensity received during exposure and fully reacts, and because the sensitivity of the color resist material 250 is low, When the light intensity received by the weakly photosensitive part 252 is relatively weak, the weakly photosensitive part 252 reacts insufficiently and is partially retained and partially etched away during the etching process, while the non-photosensitive part 253 does not receive light when it is exposed. , there is no reaction, and is completely etched away during the etching process to form a first color photoresist 231 with an arc shape, as shown by the dotted line in FIG. 11 . After the color photoresist 231 is formed, the same principle is used to sequentially form the color photoresist 232 and the color photoresist 233 on the substrate 210 , and adjacent color photoresist 230 are in contact with each other.
虽然本发明已揭示具体实施方式,但其并非用以限定本发明,任何本领域的技术人员,在不脱离本发明的构思和范围的前提下所作出的等同结构或步骤的置换,或依本发明专利保护范围所作的等同变化与修饰,皆应仍属本专利涵盖之范畴。Although the present invention has disclosed a specific embodiment, it is not intended to limit the present invention. Any person skilled in the art may make equivalent structure or step replacements without departing from the concept and scope of the present invention, or follow the present invention. The equivalent changes and modifications made in the protection scope of the invention patent shall still fall within the scope of this patent.
Claims (18)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210286419.9A CN102830457B (en) | 2012-08-13 | 2012-08-13 | Color filter substrate |
TW101146160A TWI486645B (en) | 2012-08-13 | 2012-12-07 | A color filter substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210286419.9A CN102830457B (en) | 2012-08-13 | 2012-08-13 | Color filter substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102830457A CN102830457A (en) | 2012-12-19 |
CN102830457B true CN102830457B (en) | 2015-08-26 |
Family
ID=47333652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210286419.9A Active CN102830457B (en) | 2012-08-13 | 2012-08-13 | Color filter substrate |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102830457B (en) |
TW (1) | TWI486645B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108227291A (en) * | 2018-02-01 | 2018-06-29 | 京东方科技集团股份有限公司 | A kind of colored filter, its production method, display panel and display device |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103592710B (en) * | 2013-11-11 | 2016-08-17 | 京东方科技集团股份有限公司 | Color membrane substrates and preparation method thereof, display floater and display device |
CN104570183A (en) * | 2014-12-26 | 2015-04-29 | 深圳市华星光电技术有限公司 | Filter, LCD (liquid crystal display) panel and manufacture method of filter |
CN105629363A (en) | 2016-03-11 | 2016-06-01 | 京东方科技集团股份有限公司 | Anti-blue light thin film and manufacturing method thereof |
CN115712203A (en) * | 2022-10-27 | 2023-02-24 | 福建华佳彩有限公司 | Preparation method of microlens color film substrate capable of improving brightness |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07198924A (en) * | 1993-12-28 | 1995-08-01 | Fujitsu Ltd | Color filter |
CN1302297C (en) * | 2000-10-12 | 2007-02-28 | 三洋电机株式会社 | Method for forming color filter, method for forming light lkight emitting element layer, method for manufacturing color display device comprising them, or color dispaly device |
JP2003122267A (en) * | 2001-10-04 | 2003-04-25 | Koninkl Philips Electronics Nv | Optical reflection body and display device using the same |
WO2007061097A1 (en) * | 2005-11-28 | 2007-05-31 | Fujifilm Corporation | Optical element and method for fabricating the same, and liquid crystal display |
JP5393092B2 (en) * | 2008-09-30 | 2014-01-22 | 富士フイルム株式会社 | Dye-containing negative curable composition, color filter using the same, method for producing the same, and solid-state imaging device |
KR101200229B1 (en) * | 2008-12-18 | 2012-11-09 | 도판 인사츠 가부시키가이샤 | Color filter for liquid-crystal display device and liquid-crystal display device |
TW201140165A (en) * | 2010-05-12 | 2011-11-16 | Ind Tech Res Inst | Polarizer |
US20130222936A1 (en) * | 2010-11-02 | 2013-08-29 | Sharp Kabushiki Kaisha | Color filter substrate and method for producing same |
-
2012
- 2012-08-13 CN CN201210286419.9A patent/CN102830457B/en active Active
- 2012-12-07 TW TW101146160A patent/TWI486645B/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108227291A (en) * | 2018-02-01 | 2018-06-29 | 京东方科技集团股份有限公司 | A kind of colored filter, its production method, display panel and display device |
CN108227291B (en) * | 2018-02-01 | 2022-04-12 | 京东方科技集团股份有限公司 | Color filter, manufacturing method thereof, display panel and display device |
Also Published As
Publication number | Publication date |
---|---|
TW201407205A (en) | 2014-02-16 |
TWI486645B (en) | 2015-06-01 |
CN102830457A (en) | 2012-12-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107632453B (en) | Display panel, manufacturing method thereof and display device | |
US7683302B2 (en) | Solid-state imaging device having on-chip color filter layers and solid-state imaging device manufacturing method of the solid-state imaging device | |
CN102830457B (en) | Color filter substrate | |
US9874777B2 (en) | Color filter substrate, touch display device and method for manufacturing the color filter substrate | |
CN110767721A (en) | Display device, display substrate thereof, and manufacturing method of display substrate | |
CN110764169A (en) | Lens structure, preparation method and display device | |
JP2021015732A (en) | Display device and display system | |
TW200422658A (en) | Color filter substrate and liquid crystal display apparatus having the same | |
TWI254151B (en) | Transflective liquid crystal display device color filter | |
CN107340626A (en) | Black matrix structure and preparation method thereof, colored filter and display panel | |
WO2013060236A1 (en) | Transflective color filter, manufacturing method thereof and liquid crystal display | |
CN109545825A (en) | A kind of top light emitting display panel | |
CN113036052A (en) | Display panel, preparation method thereof and display device | |
CN106773417A (en) | Display device | |
CN108073033B (en) | Photomask, method for manufacturing the same, and method for manufacturing display device | |
WO2023082327A1 (en) | Display apparatus and vehicle-mounted monitoring apparatus | |
TWI276840B (en) | Color filter substrate and liquid crystal display device | |
JP6672883B2 (en) | Manufacturing method of color filter | |
WO2015078157A1 (en) | Colour film substrate, manufacturing method therefor, and display device | |
CN110989232A (en) | Display module, electronic equipment and preparation method of display module | |
JP4175169B2 (en) | Solid-state imaging device and manufacturing method thereof | |
JP2006058876A (en) | Mask, thin film transistor substrate, method for manufacturing thin film transistor substrate, and display device having thin film transistor substrate | |
CN110579901A (en) | color film substrate, manufacturing method thereof and display device | |
CN105572982B (en) | Display device and manufacturing method thereof | |
CN100381902C (en) | Color liquid crystal panel, manufacturing method thereof, and color liquid crystal display using the color liquid crystal panel |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |