CN102778298A - Laser wavelength/frequency measuring method based on etalons, wavelength meter and use method - Google Patents
Laser wavelength/frequency measuring method based on etalons, wavelength meter and use method Download PDFInfo
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- CN102778298A CN102778298A CN2011101210732A CN201110121073A CN102778298A CN 102778298 A CN102778298 A CN 102778298A CN 2011101210732 A CN2011101210732 A CN 2011101210732A CN 201110121073 A CN201110121073 A CN 201110121073A CN 102778298 A CN102778298 A CN 102778298A
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Abstract
The invention relates to a laser wavelength/frequency measuring method based on etalons, a wavelength meter and a use method. According to the measuring method, one or two parameters in the etalon refractive index n, the surface gap lamed and the incident angle theta are fixed, the other two or one parameter is changed, N kinds of different etalons are obtained, a standard laser is used for scanning, N groups of data at different transmission efficiencies are obtained, and a calibration table is built. The transmission efficiency value of the laser to be measured corresponding to N kinds of etalons is measured and is compared with the data calibration table, and the wavelength of the laser to be measured is obtained through calculation. The input laser is subjected to light splitting through the wavelength meter, N paths of light beams are collimated and then enter PDs (photoelectric diodes) respectively through N kinds of etalons, the reference light directly enters the PDs, and all PDs are then connected into a computer. A use method is characterized in that after the assembly, the standard laser is used for scanning for generating a transmission efficiency data calibration table, in addition, the transmission efficiency data calibration table is stored, the computer compares and calculates the transmission efficiency of the laser to be measured, and then, results are directly displayed. The measuring method, the wavelength meter and the use method have the advantages that the high-precision and high-speed C+L waveband laser wavelength can be realized, the structure of the wavelength meter is simple, and the cost is low.
Description
(1) technical field
The present invention relates to the field of measuring technique of optical maser wavelength, the measuring method, the wavelength that are specially a kind of Wavelength of Laser/frequency based on Etalon are taken into account method of application.
(2) background technology
Along with the high speed development in fields such as optical fiber communication and delicate metering, optical maser wavelength (frequency) is as a kind of important parameters, and its Research on Measuring Technology obtains extensive concern.Laser Measurement wavelength (frequency) is one of key factor of decision association area development progress quickly and accurately.
The measuring technique of existing optical wavelength and wavemeter sweep velocity, measuring accuracy all are difficult to meet the demands, and are difficult to use in the optical maser wavelength of measuring in the high-power scope.The wavemeter measuring speed is slow, complex structure, build is big, cost is high, hinders its application in industries such as communications.
Etalon is a kind of optical instrument; Have two parallel reflecting surfaces, form the interference of light owing to light beam repeatedly reflects on two surfaces, the light transmissioning efficiency (T) that this interference produces is the periodic function of light wavelength/frequency; Available Airy function representes, suc as formula 1 with shown in the formula 2.
R=r in the formula
2, r is an amplitude reflectance, and n is refractive index, l is the Etalon spacing of reflecting plane, i.e. and the spacing on two surfaces, λ is the optical maser wavelength of incident, θ is an incident angle.
Transition function formula (1) is a periodic function, and the frequency interval between crest and crest is:
This value is defined as free spectral range, in order vividerly to show periodically, below is referred to as frequency period.
Through measuring transfer efficiency T; Can use function (1) and (2) to calculate the wavelength X of laser beam, but this formula is a periodic function, that is to say; The corresponding a plurality of wavelength/frequency of same transfer efficiency, this moment is not if there are other decision conditions can't confirm the optical maser wavelength of its actual input.Directly measure the input Wavelength of Laser so be difficult to adopt the method for measuring the Etalon transfer efficiency.
(3) summary of the invention
The objective of the invention is to disclose a kind of measuring method of the optical maser wavelength/frequency based on Etalon.
Another object of the present invention is that the wavelength based on Etalon of design consideration measuring method design of the present invention is taken into account method of application.
The measuring method based on optical maser wavelength/frequency of Etalon of the present invention design is to select the Etalon with two parallel reflecting surfaces for use; Its major parameter is amplitude reflectance r, refractive index n, surface spacing l and incident angle θ; Amplitude reflectance r remains unchanged, and among n, l and the θ 1 or 2 parameters keep fixing and change other 2 or 1 parameter, obtain having the Etalon of the different parameter group of N kind; N is 4～6 integer; In the survey frequency scope, use the standard tunable laser to scan the Etalon of above-mentioned N kind parameter group, measure the transfer efficiency of different frequency laser on different parameter group Etalon; Obtain the frequency response curve of the different transfer efficiency of N bar; Set up corresponding transfer efficiency data calibration table simultaneously, measure the transfer efficiency of the testing laser of input again with the Etalon of above-mentioned N kind parameter group, obtain the N group transfer efficiency data value of testing laser; Through with the contrast of above-mentioned transfer efficiency data calibration table, can calculate the wavelength of corresponding testing laser.
Said laser is continuous or pulse laser.
For the Etalon of clearance, but fixed refraction n and incident angle θ change its surface spacing l.
For the Etalon of gas/liquid filled chamber, can fix its surface spacing l is certain particular value, and the refractive index n of controlling Etalon through heat, pressure or electronic technology is a different value.
For solid etalon, have fixing refractive index n and surface spacing l, the incident angle θ of input laser can adopt mechanical hook-up or electronic installation dynamically to adjust.
This method reaches 0.0005 at least to the measuring accuracy of transfer efficiency.
Because the transfer efficiency of Etalon has periodically the frequency/wavelength of laser, thus the key of this method be tell certain transfer efficiency value corresponding be the frequency in which cycle.The periodicity of single Etalon exists; And the Etalon of N kind different conditions; Frequency period is different, and the system of their compositions has avoided the transfer efficiency array to have periodic problem basically so, thereby has satisfied the condition of every group of unique corresponding wavelength of transfer efficiency numerical value.
Concrete steps based on the measuring method of optical maser wavelength/frequency of Etalon are following:
I, confirm that Etalon measures system
Select the Etalon of N kind different parameters group for use, amplitude reflectance r remains unchanged in the said parameter group, 1 or 2 parameters maintenances fixing, other 2 or 1 parameter change among refractive index n, surface spacing l and the incident angle θ.
Choose and use one or several Etalon, among refractive index n, surface spacing l and the incident angle θ 1 or 2 parameters of control keep fixing, change the Etalon that other 2 or 1 parameter obtain N kind different parameters group state;
Perhaps take N Etalon, amplitude reflectance r is identical, and among refractive index n, surface spacing l and the incident angle θ 1 or 2 parameters identical, other 2 or 1 parameter are got different values, constitute the N kind Etalon of different parameters group.
It is unique making the transfer efficiency numerical value group of pairing each wavelength of mensuration system that the Etalon of N kind different conditions forms, and promptly will make at frequency f+P* Δ v
Min(f is each frequency values in first cycle in the frequency measurement scope, P=0, and 1,2 ... P
Max, P
MaxThe upper limit according to measurement range is decided; Δ v
MinBe the minimum value in the N kind frequency period) between each transfer efficiency have distinguishable otherness; Always there is 1 or 2 s' transfer efficiency numerical value that certain frequency in this scope is had higher resolution capability among the Etalon of N kind parameter state, thereby calculates the wavelength of surveying exactly in view of the above.
Near transfer efficiency curve numerical value change Wave crest and wave trough is more not obvious, and the frequency here is difficult to distinguish.Utilize the different transfer efficiency curves of the Etalon of different conditions that resolution characteristic is carried out complementation.The Etalon that so, must guarantee every kind of state in the different Etalon states of N kind has the Etalon of other a kind of state to compensate it when its resolution characteristic difference.Two transfer efficiency curves conduct main combinations of compensation each other that frequency period is close; Scan the N bar transfer efficiency curve of the N kind different conditions Etalon that obtains with step delta f; Each other the adjacent corrugation pitch of two transfer efficiency curves of compensation be wherein a transfer efficiency curve frequency period 20%～30%; To reach the complementary effect of resolution characteristic, 24%～26% is best.Under the situation of four kinds of Etalon states, be divided into two groups, on the same group in the adjacent corrugation pitch of two transfer efficiency curves of Etalon of two states be wherein a transfer efficiency curve frequency period 20%～30%, resolution characteristic is carried out complementation.
II, set up the frequency response curve of transfer efficiency and generate transfer efficiency data calibration table
Employing standard tunable laser is in whole test frequency range, with the mensuration system among certain step delta f scanning step I; Thereby obtain the transfer efficiency of the Etalon different frequency laser of N kind different conditions, and generate the corresponding different parameters group A in the whole test frequency range in view of the above
1, A
2... A
NTransfer efficiency data calibration table.
Select scanning step Δ f according to measuring accuracy, its value is 0.2GHz≤Δ f≤1GHz, and step-length is more little, and precision is high more.
III, measurement
Certain continuously or pulse laser import above-mentioned Etalon and measure system, accurately measure this continuously or N transfer efficiency numerical value A of pulse laser
1', A
2' ... A
N', measuring accuracy reaches 0.0005 at least;
IV, accurately definite Wavelength of Laser of surveying
The transfer efficiency data calibration table corresponding data of transfer efficiency numerical value group that Step II I is measured and Step II compares, and promptly can calculate the optical maser wavelength of surveying.
This step mainly is subdivided into following 3 steps:
The value of corresponding certain Etalon compares with the transmission data of the corresponding same state Etalon of transfer efficiency data calibration table in IV-i, the transfer efficiency numerical value group that Step II I is measured, in certain error range, obtains a plurality of frequency values.
Error range is by measuring accuracy and side frequency maximum transmitted efficient difference DELTA A decision, and the error range of this method is ± 0.0005.
The correction card data of IV-ii, another state Etalon that each frequency values that step IV-i is obtained is corresponding and the measurement data of this state Etalon compare; Keeping the two difference is ± 0.0005 frequency value corresponding, is about to the frequency values quantity reduction that step IV-i obtains.
The correction card data of IV-iii, other state Etalon that each frequency values that step IV-ii is obtained is corresponding compare with corresponding measurement data respectively; Because the otherness and the uniqueness of each frequency transmission efficient group; Obtain immediate frequency values, obtain frequency values accurately with interpolation calculation again.Method of interpolation can obviously improve the measuring accuracy of frequency under the low situation of transfer efficiency measuring accuracy.
The wavemeter based on Etalon according to the design of the measuring method of the invention described above comprises light path part, circuit and computing machine; Light path part comprises the Etalon of spectrometer, a collimating apparatus and N different conditions; The amplitude reflectance r of each Etalon is identical; Identical and other 1 parameter of 2 parameters among refractive index n, surface spacing l and the incident angle θ is selected N different value, constitutes the Etalon of N kind different conditions.Make that the frequency response curve of transfer efficiency of each Etalon is different; Promptly the incident laser by different wavelengths/frequency obtains the different transfer efficiency of N group; Thereby after measuring the transfer efficiency value of testing laser, can uniquely confirm a correct wavelength/frequency through checking transfer efficiency data calibration table.Continuous or the pulse laser of input inserts spectrometer, is divided into the multichannel light beam, and N road light beam gets into each Etalon respectively after each collimating apparatus, photodiode is respectively arranged on the output light path of each Etalon.Another road light beam is a reference light, directly gets into corresponding with it photodiode, and photodiode connects the amplification Acquisition Circuit, amplifies Acquisition Circuit and connects computing machine, and computing machine is connected to display screen.
The method of application of above-mentioned wavemeter based on Etalon is following:
Photodiode converts the light signal that receives into electric signal and sends into computing machine through amplifying Acquisition Circuit.The transfer efficiency of COMPUTER CALCULATION Etalon and storage transmission efficiency data correction card.Amplify the amplification of Acquisition Circuit realization data acquisition and electric signal, for Computer Processing provides signal.The operation of computer control wavemeter, deal with data and demonstration measurement result.Computing machine is the transfer efficiency of each Etalon with each electrical signal conversion of testing laser gained, relatively calculates with the storage data, and the wavelength value of the continuous or pulse laser that promptly obtains importing is sent to display screen simultaneously and directly shows.
The ratio of the electric signal magnitude of voltage of the electric signal magnitude of voltage of the photodiode of each light beam through Etalon and the photodiode of reference light is the transfer efficiency value that light beam passes through each Etalon.
After the wavemeter assembling is accomplished; Employing standard tunable laser is in test specification, and f scans with step delta, 0.2GHz≤Δ f≤1GHz; The transfer efficiency of the Etalon of the different conditions of measurement different frequency laser; Obtain N group transfer efficiency value, thereby generate the transfer efficiency data calibration table of the Etalon of the corresponding different conditions in the whole test frequency range, and be stored in the computing machine.
Above-mentioned wavemeter based on Etalon; Also can only adopt one or several Etalon assembly parameter regulating part; Make 2 parameters among refractive index n, surface spacing l and the incident angle θ of this Etalon keep constant; Adjustment parameter regulation part makes other 1 parameter select N different value, obtains the Etalon of N kind different conditions.
The present invention is based on Etalon continuously or the advantage of the measuring method of the wavelength/frequency of pulse laser be: can realize high precision, measure the optical maser wavelength of C+L wave band at high speed, measuring speed is up to 100KHz; Precision is high, can realize being superior to the precision of 0.5GHz, can make wavemeter simple in structure, that cost is low and precision is high according to this law.
The advantage that the wavelength that the present invention is based on Etalon is taken into account method of application is: 1, superior performance, and precision is high, is applicable to research and development, production and the communications field of optical device; 2, compare with existing optical wavelengthmeter, guarantee high precision and high-resolution while, sweep velocity more has very large raising; 3, small, simple in structure and cost is relatively low, have high cost performance.
(4) description of drawings
Fig. 1 is an Etalon model synoptic diagram;
Fig. 2 is that this is based on the Etalon transfer efficiency of 4 kinds of different reflecting surface spacings and the graph of relation between frequency among the measuring method embodiment 1 of the wavelength/frequency of the continuous or pulse laser of Etalon;
Fig. 3 is 191245GHz for the Etalon of 4 kinds of different reflecting surface spacings being obtained by Fig. 2 at beginning frequency point, the graph of relation when increment is 50GHz between transfer efficiency and frequency;
Fig. 4 is that this is based on the Etalon transfer efficiency of 4 kinds of different reflecting surface spacing/refractive indexes and the graph of relation between frequency among the measuring method embodiment 2 of the wavelength/frequency of the continuous or pulse laser of Etalon;
Fig. 5 is 191231GHz for the Etalon of 4 kinds of different reflecting surface spacing/refractive indexes being obtained by Fig. 4 at beginning frequency point, the graph of relation when increment is 50GHz between transfer efficiency and frequency;
Fig. 6 is this structural representation based on the wavemeter embodiment of Etalon;
Fig. 7 is this based on different Etalon transfer efficiency of 4 incident angles among the wavemeter embodiment of Etalon and the graph of relation between frequency;
Fig. 8 is 186310GHz based on 4 different Etalon of incident angle among the wavemeter embodiment of Etalon playing dot frequency for this, the graph of relation when frequency increment is 50GHz between transfer efficiency and frequency.
(5) embodiment
This is based on the measuring method embodiment 1 of the wavelength/frequency of the continuous or pulse laser of Etalon
The concrete steps of this method are following:
I, confirm that Etalon measures system
The structural model of Etalon with two parallel reflecting surfaces is as shown in Figure 1, and r is an amplitude reflectance among the figure, and n is that refractive index, l are that reflecting surface spacing, θ are incident angle.
This example is selected the Etalon of air cavity, n=1, and θ=0, F=4 gets l
1=3mm, l
2=3.01mm, l
3=3.015mm, l
4=3.016mm.
This routine frequency measurement scope is 191200GHz～197000GHz; With step-length 1GHz scanning, measure the Etalon transfer efficiency of the corresponding different surface spacing of different frequency laser in this scope internal standard tunable laser, obtain the frequency response curve of 4 transfer efficiency; As shown in Figure 2; Horizontal ordinate is a frequency among the figure, and the GHz of unit, ordinate are transfer efficiency.The transfer efficiency curve A of Fig. 2
1, A
2, A
3, A
4Frequency period be respectively 50GHz, 49.834GHz, 49.751GHz and 49.735GHz.With A
1And A
2As one group, A
3And A
4As another group.The transfer efficiency curve A
1, A
2The spacing of adjacent peaks is 12GHz, is A
124% of frequency period; The transfer efficiency curve A
3, A
4The spacing of adjacent peaks be 14GHz, be A
328% of frequency period.
II, set up the frequency response curve of transfer efficiency and generate transfer efficiency data calibration table
According to the scan-data that obtains among the step I, generating step-length is the transfer efficiency data calibration table of 4 different Etalon of 1GHz, and the center divided data is as shown in table 1.
Simultaneously, be that starting point, 50GHz are that frequency increment is drawn A in the whole test frequency range with 191245GHz
1, A
2, A
3, A
4The frequency response curve of transfer efficiency, as shown in Figure 3.
4 kinds of Etalon part transfer efficiency data calibration tables of table 1 embodiment 1 (step-length=1GHz)
1., at frequency range 191200～192200GHz Fig. 3 can be divided into four zones:; Curve A 1, A2 and A4 are more smooth; It is less promptly to increase the transfer efficiency variation with frequency, and the variation of A3 transfer efficiency in this scope is bigger, so can rely on A3 to differentiate correct frequency values; 2., at scope 192200～194200GHz, A1 and A4 are more smooth, and the variation of A2, A3 is bigger, can rely on A2, A3 to differentiate; 3., at scope 194200～196200GHz, A1 and A3 are more smooth, and the variation of A2, A4 is bigger, can rely on A2, A4 to differentiate; 4., at scope 196200～197000GHz, A4 changes greatly, can be in order to differentiate different frequency.
Though curve A 1 resolution characteristic in the 191245+P*50GHz scope is poor in Fig. 3, be still useful for differentiating other frequencies.Article 4, curve is an equality, and for some frequency band, wherein one or two resolution characteristic is relatively poor, and correspondingly other curve resolution ability is higher, and the resolution characteristic of promptly different transfer efficiency curves is complementary.
III, measurement
The transfer efficiency of this continuous laser (actual frequency is 191245GHz) is accurately measured by Etalon system among certain continuous laser input step I, obtains A '
1=0.7235, A '
2=0.2394, A '
3=0.9772, A '
4=0.2770;
IV, accurately definite Wavelength of Laser of surveying
IV-i, A ' that Step II I is measured
1=0.7235 with the corresponding data A of Step II
1Relatively, in ± 0.0005 error range, obtain a plurality of be 191205+P*50GHz and 191245+P*50GHz (P=0,1,2......P
Max, according to measurement range upper limit 197000GHz, P
Max=115) frequency.
Correction card data and the measurement data A ' of IV-ii, A2 that each frequency values that step IV-i is obtained is corresponding
2=0.2394 compares, and keeps transfer efficiency and satisfies error range ± 0.0005 frequency value corresponding, is about to the frequency values quantity reduction that step IV-i obtains.
IV-iii, the corresponding A of each frequency values that step IV-ii is obtained
3And A
4The correction card data respectively with corresponding measurement data A '
3=0.9772, A '
4=0.2770 compares, and confirms P=0, thereby can uniquely confirm that the most close frequency values is 191245GHz, uses interpolation calculation can get frequency values again and still is 191245GHz; Relation according to wavelength X, frequency f and light velocity c:
λ f=c=3 * 10
8Meter per second
Obtaining this optical maser wavelength of surveying is 1568.668nm.
This is based on the measuring method embodiment 2 of the wavelength/frequency of the continuous or pulse laser of Etalon
The concrete steps of this method are following:
I, confirm the Etalon measuring system
The structural model of Etalon with two parallel reflecting surfaces is as shown in Figure 1, and r is an amplitude reflectance among the figure, and n is that refractive index, l are that reflecting surface spacing, θ are incident angle.
F=2 in this example adopts to keep invariable incident angle θ=0, and the refractive index n of control break Etalon and surface spacing l obtain 4 kinds of different Etalon, and parameter value is distinguished as follows: n
1=1, l
1=3mm; n
2=1.013, l
2=2.97mm; n
3=1.01, l
3=2.96mm; n
4=1.05, l
4=2.85mm.
This routine frequency measurement scope is 191200GHz～197000GHz; In whole test specification, the standard tunable laser obtains the frequency response curve of 4 transfer efficiency with the Etalon transfer efficiency of the corresponding different parameters state of step-length 0.5GHz scanning survey different frequency; As shown in Figure 4; Horizontal ordinate is a frequency among the figure, and the GHz of unit, ordinate are transfer efficiency.The transfer efficiency curve A of Fig. 4
1, A
2, A
3, A
4Frequency period be respectively 50GHz, 49.841GHz, 50.174GHz and 50.125GHz.With A
1And A
2As one group, A
3And A
4As another group.The transfer efficiency curve A
1, A
2The spacing of adjacent peaks be 12GHz, be A
124% of frequency period; The transfer efficiency curve A
3, A
4The spacing of adjacent peaks be 15GHz, be A
330% of frequency period.
II, set up the frequency response curve of transfer efficiency and generate transfer efficiency data calibration table
According to the scan-data that obtains among the step I, generating step-length is the transfer efficiency data calibration table of 4 different Etalon of 0.5GHz, and the center divided data is as shown in table 2.
Simultaneously, be that starting point, 50GHz are that frequency increment is drawn A in the whole test frequency range with 191231GHz
1, A
2, A
3, A
4The frequency response curve of transfer efficiency, as shown in Figure 5.
4 kinds of Etalon part transfer efficiency data calibration tables of table 2 embodiment 2 (step-length=0.5GHz)
III, measurement
The transfer efficiency of this continuous laser (actual frequency is 191231GHz) is accurately measured by Etalon system among certain continuous laser input step I, obtains A '
1=0.3667, A '
2=0.7311, A '
3=0.3784, A '
4=0.9376;
IV, accurately definite Wavelength of Laser of surveying
IV-i, A ' that Step II I is measured
1=0.3667 with the corresponding data A of Step II
1Relatively, in error range ± 0.0005, obtain a plurality of 191219+P*50GHz of being about and 191231+P*50GHz (P=0,1,2......P
Max, according to measurement range upper limit 197000GHz, P
Max=115) frequency.
Correction card data and the measurement data A ' of IV-ii, A2 that each frequency values that step IV-i is obtained is corresponding
2=0.7311 compares, and keeps transfer efficiency and satisfies error range ± 0.0005 frequency value corresponding, is about to the frequency values quantity reduction that step IV-i obtains.
IV-iii, the corresponding A of each frequency values that step IV-ii is obtained
3And A
4The correction card data respectively with corresponding measurement data A '
3=0.3784, A '
4=0.9376 compares, and confirms P=0, thereby can uniquely confirm that the most close frequency values is 191231GHz, uses interpolation calculation can get frequency values again and still is 191231GHz; Relation according to wavelength X, frequency f and light velocity c:
λ f=c=3 * 10
8Meter per second
Obtaining this optical maser wavelength of surveying is 1568.783nm.
The Etalon of different parameters combination measures continuously or the method for pulse laser wavelength, and is similar with this two example like the calculation procedure that l remains unchanged with θ, n gets different value or l remains unchanged with n, θ gets other embodiment such as different value.
Wavemeter embodiment based on Etalon
This structure based on the wavemeter embodiment of Etalon is as shown in Figure 6; Comprise light path part, circuit and computing machine; Light path part comprises spectrometer, collimating apparatus and 4 Etalon that amplitude reflectance r equates, the major parameter of each Etalon is refractive index n, reflecting surface spacing l and incident angle θ.The parameter n of 4 Etalon is identical with l, but incident angle θ is different.Input continuously or pulse laser insert spectrometer, be divided into 8 road light beams, wherein 5 the tunnel respectively through 5 collimating apparatuss after, one tunnel light as a reference directly gets into the photodiode PD on the light path, other 4 the tunnel each with different incident angle θ entering each Etalon: θ
1=0, θ
2=1.97 °, θ
3=5.36 °, θ
4=5.48 °, constitute Etalon1, Etalon2, Etalon3 and Etalon4.Photodiode PD is respectively arranged on the output light path of each Etalon, and 5 photodiode PD connect the amplification Acquisition Circuit, amplify Acquisition Circuit and connect computing machine, and computing machine is connected to display screen.This routine used computing machine is a PC.Each photodiode PD converts the light signal that receives into electric signal and sends into computing machine through amplifying Acquisition Circuit.
Method of application embodiment based on the wavemeter of Etalon
The photodiode of above-mentioned wavemeter embodiment based on Etalon converts the light signal that receives into electric signal and sends into computing machine through amplifying Acquisition Circuit.The transfer efficiency of COMPUTER CALCULATION Etalon and storage transmission efficiency data correction card.Amplify the amplification of Acquisition Circuit realization data acquisition and electric signal, for Computer Processing provides signal.The operation of computer control wavemeter, deal with data and demonstration measurement result.Computing machine is the transfer efficiency of each Etalon with each electrical signal conversion of testing laser gained, relatively calculates with the storage data, and the wavelength value of the continuous or pulse laser that promptly obtains importing is sent to display screen simultaneously and directly shows not.
The ratio of the electric signal magnitude of voltage of the electric signal magnitude of voltage of the photodiode of each light beam through Etalon and the photodiode of reference light is the transfer efficiency value that light beam passes through each Etalon.
After the wavemeter assembling is accomplished; In test specification, use the transfer efficiency of standard tunable laser with the step scan measurement different frequency laser of 1GHz, the frequency response curve of the transfer efficiency of each Etalon that parameter θ is different is different; As shown in Figure 7, the correspondent frequency cycle is respectively A
150GHz, A
250.030GHz, A
350.220GHz, A
450.230GHz.The transfer efficiency data that simultaneously scanning obtained are stored in the computing machine as correction card.Fig. 8 is 186310 being dot frequency, is the frequency response curve of the frequency increment transfer efficiency of drawing with 50GHz.
During measurement, testing laser is with above-mentioned θ
1, θ
2, θ
3, θ
4Each Etalon of incident, computing machine will import laser and pass through the transfer efficiency of the electrical signal conversion of each Etalon generation for each Etalon, relatively calculate with the storage data, and the wavelength value of the continuous or pulse laser that promptly obtains importing can be delivered to display screen simultaneously and directly show.
The major parameter of this routine wavemeter is following:
| Wavelength coverage | 1525～1610nm |
| Absolute precision | ±1.0pm |
| Wavelength resolution | ±0.1pm |
| Display resolution | 0.0001nm |
| Sample rate | 100Hz |
| Power bracket | -35±20dBm |
| The power precision | ±0.5dB |
| The power flatness | ±0.5dB |
Select suitable Etalon parameter combinations; Make resolution characteristic reach requirement; Can in the light wave scope of non-constant width, realize optical maser wavelength/frequency measurement so in theory; But the working range of actual each device of medium wavelength meter is like the linearity of devices such as photodiode PD, spectrometer and the actual measurement range that precision affects wavemeter.
The foregoing description is merely concrete example to the object of the invention, technical scheme and beneficial effect further explain, and the present invention is defined in this.All any modifications of within scope of disclosure of the present invention, being made, be equal to replacement, improvement etc., all be included within protection scope of the present invention.
Claims (10)
1. based on the measuring method of Wavelength of Laser/frequency of Etalon, select the Etalon with two parallel reflecting surfaces for use, its major parameter is amplitude reflectance r, refractive index n, thickness l and incident angle θ, it is characterized in that:
Said Etalon parameter amplitude reflectance r remains unchanged, and among n, l and the θ 1 or 2 parameters keep fixing and change other 2 or 1 parameter, obtain having the Etalon of the different parameter group of N kind; N is 4～6 integer; In the survey frequency scope, use the standard tunable laser to scan above-mentioned N kind Etalon with certain step delta f, measure the transfer efficiency of different frequency laser on different parameter group Etalon; Obtain the frequency response curve of the different transfer efficiency of N bar; Set up corresponding transfer efficiency data calibration table simultaneously, measure the transfer efficiency of input laser to be measured again with the Etalon of above-mentioned N kind parameter group, obtain the N group transfer efficiency data value of testing laser; Through with the contrast of above-mentioned transfer efficiency data calibration table, calculate corresponding input Wavelength of Laser to be measured.
2. the measuring method of the Wavelength of Laser/frequency based on Etalon according to claim 1 is characterized in that concrete steps are following:
I, confirm that Etalon measures system
Select the Etalon of N kind different parameters group for use, amplitude reflectance r remains unchanged in the said parameter group, 1 or 2 parameters maintenances fixing, other 2 or 1 parameter change among refractive index n, surface spacing l and the incident angle θ;
II, set up the frequency response curve of transfer efficiency and generate transfer efficiency data calibration table
Adopt the mensuration system among the step I; In whole test frequency range, use the standard tunable laser to scan with step delta f; 0.2GHz≤Δ f≤1GHz; Obtain the transfer efficiency of the Etalon different frequency laser of N kind different conditions, and generate the transfer efficiency data calibration table of the corresponding different parameters group in the whole test frequency range in view of the above;
III, measurement
Certain continuously or pulse laser import above-mentioned Etalon and measure system, accurately measure this continuously or N transfer efficiency data of pulse laser, measuring accuracy reaches 0.0005 at least;
IV, accurately definite Wavelength of Laser of surveying
The transfer efficiency data calibration table corresponding data of transfer efficiency data that Step II I is measured and Step II compares, and promptly can calculate the optical maser wavelength of surveying.
3. the measuring method of the Wavelength of Laser/frequency based on Etalon according to claim 2 is characterized in that:
Take one or several Etalon among the said step I, among refractive index n, surface spacing l and the incident angle θ 1 or 2 parameters of control keep fixing, change the Etalon that other 2 or 1 parameter obtain N kind different parameters group state;
Perhaps, take N Etalon among the said step I, amplitude reflectance r is identical, and among refractive index n, surface spacing l and the incident angle θ 1 or 2 parameters identical, other 2 or 1 parameter are got different values, constitute the N kind Etalon of different parameters group.
4. according to the measuring method of each described Wavelength of Laser/frequency based on Etalon in the claim 1 to 3, it is characterized in that:
The change of said Etalon parameter is for the Etalon of clearance, and fixed refraction n and incident angle θ change its surface spacing l;
And/or for the Etalon of gas/liquid filled chamber, fixing its surface spacing l be certain particular value, and the refractive index n of controlling Etalon through heat, pressure or electronic technology is a different value;
And/or, having fixing refractive index n and surface spacing l for solid etalon, mechanical hook-up or electronic installation are dynamically adjusted the incident angle θ of input laser.
5. according to the measuring method of each described Wavelength of Laser/frequency based on Etalon in the claim 1 to 3, it is characterized in that:
Said use standard tunable laser with close two transfer efficiency curves of Δ f step scan N kind different conditions Etalon resulting N bar transfer efficiency curve medium frequency cycle as the main combination of compensation each other, each other the adjacent corrugation pitch of two transfer efficiency curves of compensation be wherein a transfer efficiency curve frequency period 20%～30%.
6. the measuring method of the Wavelength of Laser/frequency based on Etalon according to claim 5 is characterized in that:
The spacing of two transfer efficiency curve adjacent peaks of said mutual compensation be wherein a transfer efficiency curve frequency period 24%～26%.
7. according to the measuring method described in the claim 2, it is characterized in that wherein step IV specifically is subdivided into following steps based on Wavelength of Laser/frequency of Etalon:
The value of corresponding certain Etalon compares with the transmission data of the corresponding same state Etalon of transfer efficiency data calibration table in IV-i, the transfer efficiency numerical value group that Step II I is measured, when the transfer efficiency difference satisfies certain error range, obtains a plurality of frequency values;
The correction card data of IV-ii, another state Etalon that each frequency values that step IV-i is obtained is corresponding compare with the measurement data of this state Etalon, and the reservation transfer efficiency satisfies the error range frequency value corresponding;
The correction card data of IV-iii, other state Etalon that each frequency values that step IV-ii is obtained is corresponding compare with corresponding measurement data respectively, obtain immediate frequency values, obtain frequency values accurately with interpolation calculation again.
8. according to the measuring method described in the claim 7, it is characterized in that based on Wavelength of Laser/frequency of Etalon:
Said error range is ± 0.0005.
9. the wavemeter based on Etalon of the measuring method design of the Wavelength of Laser/frequency based on Etalon according to claim 1 is characterized in that:
Comprise light path part, circuit and computing machine; Light path part comprises the Etalon of spectrometer, a collimating apparatus and N different conditions; The amplitude reflectance r of each Etalon is identical; Identical and other 1 parameter of 2 parameters among the refractive index n of N Etalon, surface spacing l and the incident angle θ is selected N different value, constitutes the Etalon of N kind different conditions; Continuous or the pulse laser of input inserts spectrometer, is divided into the multichannel light beam, and N road light beam gets into each Etalon respectively after each collimating apparatus, photodiode is respectively arranged on the output light path of each Etalon; Another road light beam is a reference light, directly gets into corresponding with it photodiode, and photodiode connects the amplification Acquisition Circuit, amplifies Acquisition Circuit and connects computing machine, and computing machine is connected to display screen.
10. the method for application of the wavemeter based on Etalon according to claim 9 is characterized in that:
Said photodiode converts the light signal that receives into electric signal and sends into computing machine through amplifying Acquisition Circuit; The transfer efficiency of COMPUTER CALCULATION Etalon and storage transmission efficiency data correction card; Amplify the amplification of Acquisition Circuit realization data acquisition and electric signal, for Computer Processing provides signal; The operation of computer control wavemeter, deal with data and demonstration measurement result; Computing machine is the transfer efficiency of each Etalon with each electrical signal conversion of testing laser gained, relatively calculates the wavelength value of the continuous or pulse laser that obtains importing with the storage data;
The ratio of the electric signal magnitude of voltage of the electric signal magnitude of voltage of the photodiode of each light beam through Etalon and the photodiode of reference light is the transfer efficiency value that light beam passes through each Etalon;
After the wavemeter assembling is accomplished; In test specification; Use standard tunable laser scans with step delta f, 0.2GHz≤Δ f≤1GHz, the transfer efficiency of the Etalon of the different conditions of measurement different frequency laser; Thereby generate the transfer efficiency data calibration table of the Etalon of the corresponding different conditions in the whole test frequency range, and be stored in the computing machine.
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| CN113324665A (en) * | 2020-02-29 | 2021-08-31 | 华为技术有限公司 | Wavemeter, method for obtaining parameters of wavemeter and method for on-line calibration |
| CN113494967A (en) * | 2020-03-19 | 2021-10-12 | 华为技术有限公司 | Wavelength measuring device and method for measuring wavelength |
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| CN113494967A (en) * | 2020-03-19 | 2021-10-12 | 华为技术有限公司 | Wavelength measuring device and method for measuring wavelength |
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