CN102768332A - Real-time online monitoring system of electromigration warning circuit - Google Patents
Real-time online monitoring system of electromigration warning circuit Download PDFInfo
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- CN102768332A CN102768332A CN2012102177115A CN201210217711A CN102768332A CN 102768332 A CN102768332 A CN 102768332A CN 2012102177115 A CN2012102177115 A CN 2012102177115A CN 201210217711 A CN201210217711 A CN 201210217711A CN 102768332 A CN102768332 A CN 102768332A
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 88
- 238000012360 testing method Methods 0.000 claims abstract description 34
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- 239000002184 metal Substances 0.000 description 7
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Abstract
本发明提供一种电迁移预警电路实时在线监测系统，包括：电源、信号源、电路夹具、信号监测与数据采集设备、控制端；所述电路夹具与被测电迁移预警电路、电源、信号源、信号监测与数据采集设备分别相连接，所述信号监测与数据采集设备还与所述控制端相连接。本发明的电迁移预警电路实时在线监测系统，实现了实时在线监测电迁移预警电路的预警信号并自动进行数据采集和保存的功能，满足了电迁移预警电路测试时间长、所采集与保存数据量大的要求。而且本发明的电迁移预警电路实时在线监测系统简单易行，方便高效，便于推广应用，具有较好的市场应用前景。
The present invention provides a real-time online monitoring system for electromigration early warning circuit, including: power supply, signal source, circuit fixture, signal monitoring and data acquisition equipment, and control terminal; the circuit fixture and the measured electromigration early warning circuit, power supply, and signal source 1. The signal monitoring and data collection equipment are respectively connected, and the signal monitoring and data collection equipment are also connected to the control terminal. The real-time online monitoring system of the electromigration early warning circuit of the present invention realizes the function of real-time online monitoring of the early warning signal of the electromigration early warning circuit and automatically collects and saves data, and satisfies the long test time of the electromigration early warning circuit and the amount of collected and stored data big request. Moreover, the real-time on-line monitoring system of the electromigration early warning circuit of the present invention is simple, convenient, efficient, easy to popularize and apply, and has good market application prospects.
Description
Technical field
The present invention relates to electronic failure prediction and health control technology, particularly relate to a kind of electromigration early warning circuit real time on-line monitoring system.
Background technology
Along with the widespread use of integrated circuit in every profession and trade of MOS (Metal Oxide Semiconductor, metal-oxide semiconductor (MOS)) device, its integrity problem that electrology characteristic degeneration causes in production and use also becomes more and more outstanding.And along with the develop rapidly of modern electronic technology, oneself gets into nanometer scale the size of electronic devices and components and set of devices, and its metal interconnected area shared in whole IC chip is increasing.Now, metal interconnected electromigration invalidation problem has become the bottleneck of restriction large scale integrated circuit technical development, also becomes the focus of current MOS device reliability research simultaneously.
ELECTROMIGRATION PHENOMENON is a kind of major reason that causes ic failure, also just becomes the research focus by its IC reliability problem that causes.Discover that it is very complicated to influence the electromigratory factor of interconnecting line, comprises working current gathering, Joule heat, thermograde, crystalline granular texture, grain orientation, Interface Microstructure, stress gradient, alloying component, interconnect dimensions and shape etc.ELECTROMIGRATION PHENOMENON is because under the effect of distribution of current density due to the ion displacement in the metal; Be that metallic atom in metal interconnected receives the transport of substances phenomenon that the ELECTRON OF MOTION effect causes; The linearity that it at first shows as resistance value increases, and will cause the local loss of metal film after to a certain degree and occur emptyly, or causes the metal film local accumulation and hillock or whisker occur; Finally cause sudden failure, have a strong impact on the life-span of integrated circuit.Especially, along with the raising of chip integration, interconnecting line becomes more carefully, narrower, thinner, and therefore wherein current density is increasing.Under higher current density effect, ELECTROMIGRATION PHENOMENON will take place along the electron motion direction in metallic atom in the interconnecting line more easily.Therefore, the research to ELECTROMIGRATION PHENOMENON more and more obtains paying attention to.
EPHM (Electronic Prognostics and Health Management; Electronic failure prediction and health control) technology be a kind of emerging be the basis with the physics of failure, be used for prediction and assessment electronic product (or system) technology of dependability at actual environment.Compare with traditional fault diagnosis technology, it can monitor and discern the fault of electronic system as early as possible, and possesses the ability to the health of electronic system is managed, state is predicted.Early warning circuit according to the concrete failure mechanism design in the circuit can send early warning signal in time before chip failure.Electromigration early warning circuit that can be integrated belongs to an important branch of EPHM technology; It utilizes the reliability monitor in the sheet; Can send alerting signal during to delimit in device degradation, thereby reduce dependence, avoid the critical failure of system Modelling of Reliability.
Obviously, the electromigration early warning circuit is before formally pushing commercial applications, and the test experiments checking is a requisite link.Traditional electrical migration early warning circuit adopts the manual test method, all needs manual work to read the instrument test data at every turn, and the while logging test results, till off-test.This method can satisfy the test request that the follow-on test time is short, testing time is few.Yet; The time ratio that metal generation electromigration causes losing efficacy in the integrated circuit is more of a specified duration, and in the test of electromigration early warning circuit, must monitor its early warning signal incessantly always; Thereby the continuously uninterrupted test duration will be very long, and the data volume of required collection simultaneously will be very big also.Obviously, traditional electromigration early warning circuit manual test method can't satisfy long, gather and this big requirement of preservation data volume of electromigration early warning circuit test duration.Therefore, demand developing a kind of better electromigration early warning circuit real time on-line monitoring technology urgently.
Summary of the invention
Based on this, be necessary, gather and preservation data volume few problem short to the above-mentioned traditional electrical migration early warning circuit manual test method test duration, a kind of electromigration early warning circuit real time on-line monitoring system is provided.
A kind of electromigration early warning circuit real time on-line monitoring system comprises: power supply, signal source, circuit anchor clamps, signal monitoring and data acquisition equipment, control end; Said circuit anchor clamps are connected respectively with data acquisition equipment with tested electromigration early warning circuit, power supply, signal source, signal monitoring, and said signal monitoring also is connected with said control end with data acquisition equipment;
Said power supply is used for power supply voltage signal being provided for tested electromigration early warning circuit through said circuit anchor clamps;
Said signal source is used for square-wave signal being provided for said tested electromigration early warning circuit through said circuit anchor clamps;
Said circuit anchor clamps are used to realize the data transmission between said signal monitoring and data acquisition equipment, power supply, signal source and the said tested electromigration early warning circuit;
Said control end is used for input according to the user to said signal monitoring and data acquisition equipment sending controling instruction, and the data that said signal monitoring and data acquisition equipment are beamed back are stored;
Said signal monitoring and data acquisition equipment are used for according to said steering order, tested electromigration early warning circuit is monitored in real time, and give said control end with the data transmission that monitors automatically.
Can find out by above scheme; Electromigration early warning circuit real time on-line monitoring system of the present invention; Interconnection and communication between signal monitoring and data acquisition equipment and the control end have been realized; Send steering order through control end to signal monitoring and data acquisition equipment, on signal monitoring and the data acquisition equipment the real-time data monitored of electromigration early warning circuit being gathered, and the data back control end of being gathered is preserved; Thereby realized the early warning signal of real time on-line monitoring electromigration early warning circuit and the function of carrying out data acquisition and preservation automatically, satisfied long, gather and the big requirement of preservation data volume of electromigration early warning circuit test duration.And electromigration early warning circuit real time on-line monitoring system of the present invention is simple, and is convenient efficient, easy to utilize, has better market application.
Description of drawings
Fig. 1 is the structural representation of a kind of electromigration early warning circuit real time on-line monitoring system of the present invention;
Fig. 2 is the structural representation of electromigration early warning circuit pin among the embodiment;
Fig. 3 is input and the output relation curve before the electromigration early warning circuit is reported to the police among the embodiment;
Fig. 4 is input and the output relation curve after the electromigration early warning circuit is reported to the police among the embodiment.
Wherein, 100 is signal monitoring and data acquisition equipment; 101 is signal source; 102 is power supply; 103 is lead; 104 are the two-way probe; 105 is data line; 106 is control end; 107 is human-computer interaction interface; 108 is the circuit anchor clamps; 109 is the signal converting circuit board; 110 is signal transmission wire; 111 is the signal circuit plate; 112 is circuit pin slot; 113 are the electromigration early warning circuit; 114 is storer; 115 is the two-way lead; 116 is display screen; 200 is the input supply voltage pin; 201 is the input grounding pin; 202 is input clock control signal pin; 203 is the input offset voltage pin; 204 is output signal pin.
Embodiment
Below in conjunction with accompanying drawing and concrete embodiment, technical scheme of the present invention is done further to describe.
Referring to shown in Figure 1, a kind of electromigration early warning circuit real time on-line monitoring system comprises: signal monitoring and data acquisition equipment 100, signal source 101, power supply 102, control end 106, circuit anchor clamps 108; Said circuit anchor clamps are connected respectively with data acquisition equipment with tested electromigration early warning circuit, power supply, signal source, signal monitoring, and said signal monitoring also is connected with said control end with data acquisition equipment;
Said power supply is used for power supply voltage signal being provided for tested electromigration early warning circuit through said circuit anchor clamps;
Said signal source is used for square-wave signal being provided for said tested electromigration early warning circuit through said circuit anchor clamps;
Said circuit anchor clamps are used to realize the data transmission between said signal monitoring and data acquisition equipment, power supply, signal source and the said tested electromigration early warning circuit;
Said control end is used for input according to the user to said signal monitoring and data acquisition equipment sending controling instruction, and the data that said signal monitoring and data acquisition equipment are beamed back are stored;
Said signal monitoring and data acquisition equipment are used for according to said steering order, tested electromigration early warning circuit is monitored in real time, and give said control end with the data transmission that monitors automatically.
The concrete course of work of electromigration early warning circuit real time on-line monitoring system of the present invention is described below:
Step 1, the tested electromigration early warning circuit pin of identification.Preferably, said tested electromigration early warning circuit can comprise following input, output and control signal pin: input supply voltage pin two 00, input grounding pin two 01, input clock control signal pin two 02, input offset voltage pin two 03 and output signal pin.In the present embodiment, during electromigration early warning circuit 113 operate as normal that designed, input supply voltage pin two 00 need connect the power supply voltage signal of 3.3V; Input grounding pin two 01 needs ground connection; Input clock control signal pin two 02 need connect frequency be 1Hz, dutycycle is 50% square-wave signal; Input offset voltage pin two 03 need connect the voltage of 1.7V; Output signal pin 204 is an output signal end.
1) but circuit pin slot 112 and tested electromigration early warning circuit 113 form the electric interconnection of plugs, as an embodiment preferably, when design circuit pin slot, can adopt the slot of anti-250 ℃ of high temperature;
2) signal circuit plate 111 is through the plain conductor of design in it; Realize the signal transfer functions between circuit pin slot 112 and the signal transmission wire 110; Signal circuit plate 111 is after design; Adopt the circuit board of anti-250 ℃ of high temperature to carry out processing and fabricating in circuit board making manufacturer, signal circuit plate 111 forms holding electrical with circuit pin slot 112 through welding and is connected;
3) signal transfer functions between signal transmission wire 110 realization signal circuit plates 111 and the signal converting circuit board 109; One end of signal transmission wire 110 forms holding electrical with signal circuit plate 111 through welding and is connected; But row's needle socket of the other end and the row's pin on the signal converting circuit board 109 form plug, electric interconnection flexibly.As an embodiment preferably, the winding displacement that said signal transmission wire 110 equally can anti-250 ℃ of high temperature designs;
4) signal converting circuit board 109 carries out processing and fabricating in circuit board making manufacturer after design.
Because resistant to elevated temperatures material has been adopted in electromigration early warning circuit real time on-line monitoring system of the present invention many places; Therefore can realize the real time on-line monitoring under the electromigration early warning circuit hot conditions and data acquisition and automatic hold function; Wherein, maximum temperature can be 250 ℃.
As an embodiment preferably, signal monitoring in the present embodiment and data acquisition equipment 100 can adopt oscillograph Tektronix TDS3052B.Signal monitoring and data acquisition equipment 100 are connected on the signal converting circuit board 109 port corresponding to the output signal pin 204 of electromigration early warning circuit 113 through road probe in its two-way probe 104, on another road probe connection signal converting circuit board 109 in the two-way probe 104 corresponding to the port of the input clock control signal pin two 02 of electromigration early warning circuit 113.
As an embodiment preferably, the signal source 101 in the present embodiment can adopt function signal generator HP3324A.Signal source 101 connects on the signal converting circuit boards 109 port corresponding to the input clock control signal pin two 02 of electromigration early warning circuit 113 through lead 103.
As an embodiment preferably, the power supply 102 in the present embodiment can adopt two-way stabilized voltage supply Agilent E3647A.Power supply 102 connects on the signal converting circuit boards 109 corresponding to the port of the input supply voltage pin two 00 of electromigration early warning circuit 113 and the port of input offset voltage pin two 03 through two-way lead 115.
The design of step 4, control end.As an embodiment preferably, said control end can comprise: human-computer interaction interface 107, storer 114;
Said human-computer interaction interface is used for input according to the user to said signal monitoring and data acquisition equipment sending controling instruction.The human-computer interaction interface that designs in the present embodiment three function buttons that have beginning, stop and resetting; Wherein, After clicking start button, signal monitoring and data acquisition equipment 100 can be through the pop one's head in signal and the preservation data automatically of input clock control signal pin two 02 and output signal pin 204 of 104 automatic time on-line monitoring electromigration early warning circuits 113 of two-way; After clicking stop button, then stop the signal of tested electromigration early warning circuit pin is monitored and data acquisition automatically; After clicking SR then to total testing time zero clearing;
Said storer is used for the data that said signal monitoring and data acquisition equipment are beamed back are stored.
In addition, as an embodiment preferably, said control end can also comprise display screen 116, is used for showing that beginning test duration, test duration last time, current test duration, total testing time and data preserve the position.
Step 5, real time on-line monitoring and data acquisition.After preparation and design through early stage, this step begins really to get into on-line monitoring, and action description is following:
1), at first electromigration early warning circuit 113 is inserted in the circuit pin slot 112 in the test macros, realizes being electrically connected;
2), the start signal source 101; Frequency be set simultaneously be 1Hz, dutycycle is 50% output square-wave signal; This signal is transferred to signal converting circuit board 109 through lead 103; Through signal transmission wire 110, signal circuit plate 111 and 112 transmission of circuit pin slot, finally be transported to square-wave signal the input clock control signal pin two 02 of electromigration early warning circuit 113;
3), power-on 102; The two-way voltage output signal of 3.3V and 1.7V is set simultaneously; Be transferred to signal converting circuit board 109 through two-way lead 115; Through signal transmission wire 110, signal circuit plate 111 and 112 transmission of circuit pin slot, finally be transported to 3.3V and 1.7V voltage signal respectively the input supply voltage pin two 00 and the input offset voltage pin two 03 of electromigration early warning circuit 113;
4), start signal monitoring and data acquisition equipment 100 and control end 106.At first; The user clicks the beginning function button of human-computer interaction interface; Signal monitoring and data acquisition equipment 100 can be through two-way pop one's head in the input clock control signal pin two 02 of 104 automatic time on-line monitoring electromigration early warning circuits 113 and the signals of output signal pin 204; And automatically the two paths of signals data that detect are preserved according to the storer that command request is transferred to control end, as an embodiment preferably, the form of data storage can be text formatting here.Secondly, when test can finish, click the hold function button, stop the input clock control signal pin two 02 of electromigration early warning circuit 113 and the signal automatic monitoring and the data acquisition of efferent duct signal pins 204.
The Document type data of above-mentioned preservation is imported in the related data graphics software, can obtain Monitoring Data intuitively.Be illustrated in figure 4 as at experiment beginning test phase the input clock control signal pin two 02 before monitoring automatically, the electromigration early warning circuit 113 of gathering and preserving are reported to the police and the signal data of output signal pin 204.Can know that from Fig. 4 input clock control signal pin two 02 is when high level (3.3V), output signal pin 204 is in low level (0V); Input clock control signal pin two 02 (0V) when low level, output signal pin 204 are high level (3.3V); This test result meets the input clock control signal before electromigration early warning circuit 113 is reported to the police and exports the logic corresponding relation between the signal.
In addition; It is 125 ℃ of high-temperature cabinets (EspecPH-101) that electromigration early warning circuit 113 and circuit anchor clamps 108 are put into temperature; Adopt this method to carry out continuous 5 months monitoring and data acquisition to electromigration early warning circuit 113; Automatically input clock control signal pin two 02 and the signal data of output signal pin 204 after electromigration early warning circuit 113 is reported to the police have been obtained; Be input clock control signal pin two 02 when high level (3.3V) or low level (0V), output signal pin 204 is high level (3.3V), this test result meets the input clock control signal and the logic corresponding relation of exporting between the signal after electromigration early warning circuit 113 is reported to the police.Therefore, electromigration early warning circuit realtime on-line monitoring method is feasible, and has advantage simply, conveniently and efficiently.
Can find out through above scheme; Electromigration early warning circuit real time on-line monitoring system of the present invention; Interconnection and communication between signal monitoring and data acquisition equipment and the control end have been realized; Send steering order through control end to signal monitoring and data acquisition equipment, on signal monitoring and the data acquisition equipment the real-time data monitored of electromigration early warning circuit being gathered, and the data back control end of being gathered is preserved; Thereby realized the early warning signal of real time on-line monitoring electromigration early warning circuit and the function of carrying out data acquisition and preservation automatically, satisfied long, gather and the big requirement of preservation data volume of electromigration early warning circuit test duration.And electromigration early warning circuit real time on-line monitoring system of the present invention is simple, and is convenient efficient, easy to utilize, has better market application.
The above embodiment has only expressed several kinds of embodiments of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to claim of the present invention.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the present invention's design, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with accompanying claims.
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| CN2012102177115A CN102768332A (en) | 2012-06-28 | 2012-06-28 | Real-time online monitoring system of electromigration warning circuit |
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| CN2012102177115A CN102768332A (en) | 2012-06-28 | 2012-06-28 | Real-time online monitoring system of electromigration warning circuit |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108475293A (en) * | 2015-11-24 | 2018-08-31 | 甲骨文国际公司 | Method and system for determining fault rate |
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| CN101131382A (en) * | 2006-08-25 | 2008-02-27 | 中国科学院金属研究所 | Performance test system and test method of thin film material under electric/thermal/mechanical coupling |
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| CN202794446U (en) * | 2012-06-28 | 2013-03-13 | 工业和信息化部电子第五研究所 | Electromigration early warning circuit real-time on-line monitoring system |
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- 2012-06-28 CN CN2012102177115A patent/CN102768332A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5760595A (en) * | 1996-09-19 | 1998-06-02 | International Business Machines Corporation | High temperature electromigration stress test system, test socket, and use thereof |
| US7271608B1 (en) * | 2002-11-25 | 2007-09-18 | Ridgetop Group, Inc. | Prognostic cell for predicting failure of integrated circuits |
| CN101131382A (en) * | 2006-08-25 | 2008-02-27 | 中国科学院金属研究所 | Performance test system and test method of thin film material under electric/thermal/mechanical coupling |
| CN102323451A (en) * | 2011-05-30 | 2012-01-18 | 华南理工大学 | A kind of method and device that detects interconnection solder joint electric migration performance |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108475293A (en) * | 2015-11-24 | 2018-08-31 | 甲骨文国际公司 | Method and system for determining fault rate |
| CN108475293B (en) * | 2015-11-24 | 2022-04-26 | 甲骨文国际公司 | Method and system for determining circuit failure rate |
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Application publication date: 20121107 |