CN102723299B - XY precision motion platform capable of suppressing vibration by utilizing piezoelectric ceramic - Google Patents

Abstract

The invention provides a XY precision motion platform capable of suppressing vibration by utilizing a piezoelectric ceramic. An X-axis linear motor component (2), a Y-axis linear motor component (3) and a motion connector component (4) are installed on a baseplate (5), X-axis mover piezoelectric ceramic films (15) are arranged on the upper surface and the lower surface of an X-axis linear motor mover (16) of the X-axis linear motor component (2) respectively, and Y-axis mover piezoelectric ceramic films (20) are arranged on the upper surface and the lower surface of a Y-axis linear motor mover (21) of the Y-axis linear motor component (3) respectively. The XY precision motion platform of the invention has a rapid response to mechanism vibration of a linear motor mover and can eliminate or reduce the mechanism vibration of the linear motor mover intelligently, so that the mechanism rigidity is improved. Moreover, the XY precision motion platform has advantages of light weight, small size, etc., and is suitable for high-speed packaging operations of semiconductor integrated chips carried out in a small space, such as a production line and the like.

Description

A Piezoelectric Ceramic Vibration-Suppressed XY Precision Motion Platform

technical field

The invention relates to semiconductor chip packaging equipment, in particular to an XY precision motion platform which responds quickly to the vibration of a linear motor mover and reduces it in an intelligent way compared with a traditional XY motion platform, and is suitable for production High-speed packaging of semiconductor integrated chips in narrow spaces such as assembly lines.

Background technique

In the XY motion platform, the weakest and most prone to mechanism vibration is the mover coil assembly of the linear motor. This is because:

1. The mover coil assembly of the linear motor generally protrudes from the linear motor housing in the form of a cantilever beam, and the kinematic connection mechanism generally adopts two sets of roller guide rails with a cantilever beam for sliding connection. This structure itself is prone to vibration vibration, resulting in low system stiffness;

2. The driving current passed through the linear motor mover coil assembly is generally a pulse current with a certain frequency and waveform. Therefore, the driving force generated in the coil is also a pulse force corresponding to the pulse current. This pulse force body will Causes chatter at the output end of the linear motor mover coil assembly.

Therefore, it is inevitable for the mover coil assembly of the linear motor to vibrate. How to reduce or even eliminate the impact of vibration on the accuracy of the motion platform system is an important issue in the design and manufacturing process of the motion platform.

Contents of the invention

The object of the present invention is to provide an XY precision motion platform with a reasonable structure, quick response to the vibration of the linear motor mover, and pre-reducing in an intelligent way.

The purpose of the present invention is achieved as follows: a piezoelectric ceramic vibration-suppressed XY precision motion platform, the base plate assembly includes a base plate, and an X-axis linear motor assembly, a Y-axis linear motor assembly, and a motion connector assembly are installed on the base plate; Among them, the X-axis linear motor assembly is installed on the X-axis installation plane of the base plate through the X-axis linear motor mounting seat screws; the Y-axis linear motor assembly is installed on the Y-axis mounting plane of the base plate through the Y-axis linear motor mounting seat screws; Both the precision motion guide rail and the Y-axis precision motion guide rail are composed of fixed rails and sliding rails; in the motion connector assembly, the fixed rail in the X-axis precision motion guide rail is installed on the X-axis of the base plate through the X-axis precision motion guide rail fixed rail mounting screws on the mounting plane of the guide rail;

In the base plate assembly, the angle bracket of the X-axis grating ruler reading head is installed on the outer side of the installation plane of the X-axis guide rail of the base plate through the mounting screws of the X-axis grating ruler reading head angle bracket; the X-axis grating ruler reading head is installed through the X-axis grating ruler reading head The screw is installed at the corresponding position of the angle frame of the reading head of the X-axis grating ruler;

In the X-axis linear motor assembly, the X-axis linear motor mounting seat is installed on the X-axis mounting plane of the bottom plate through the X-axis linear motor mounting seat screws; the X-axis linear motor stator and housing are mounted on the X-axis linear motor installation by positioning The X-axis linear motor mover assembly is installed in the X-axis linear motor stator and housing; the X-axis mover piezoelectric ceramic film is respectively provided on the upper and lower surfaces of the X-axis linear motor mover; X The exposed end of the axis linear motor mover is provided with a connecting hole for connecting the X-axis motion connecting frame;

In the Y-axis linear motor assembly, the Y-axis linear motor mounting seat is mounted on the Y-axis mounting plane of the bottom plate through the Y-axis linear motor mounting seat screws; the Y-axis linear motor stator and housing are mounted on the Y-axis linear motor installation by positioning On the installation plane of the seat; the Y-axis linear motor mover assembly is installed in the Y-axis linear motor stator and housing; the Y-axis mover piezoelectric ceramic film is respectively provided on the upper and lower surfaces of the Y-axis linear motor mover; The exposed end of the axis linear motor mover is provided with a connecting hole for connecting the Y-axis motion connecting frame;

In the motion connector assembly, the X-axis motion connection frame is connected to the X-axis linear motor mover through the X-axis direction connecting screw; the X-axis motion connection frame is connected to the X-axis precision motion guide rail through the X-axis precision motion guide rail sliding rail installation screw. The sliding rails are connected; the fixed rail of the Y-axis precision motion guide rail is installed on the corresponding positioning plane on the X-axis motion connecting frame through the Y-axis precision motion rail fixing rail mounting screws; the Y-axis motion connecting frame passes the Y-axis precision motion The guide rail sliding rail mounting screw is connected with the sliding rail of the Y-axis precision motion guide rail; the connecting end of the Y-axis motion connecting frame is connected with the Y-axis linear motor mover through the Y-axis direction connecting screw; the Y-axis grating scale frame passes through the Y-axis grating The frame mounting screw is installed on the side of the Y-axis motion connecting frame; the Y-axis grating ruler reading head angle frame is installed on the side of the X-axis motion connecting frame through the Y-axis grating ruler reading head angle frame mounting screws; the Y-axis grating The reading head of the ruler is installed on the corresponding position of the angle frame of the reading head of the Y-axis grating ruler through the mounting screw of the reading head of the Y-axis grating ruler.

Preferably, except for the coil and the steel core part, the remaining components of the X-axis linear motor mover subassembly are made of carbon fiber.

Preferably, except for the coil and the steel core part, the remaining components of the Y-axis linear motor rotor assembly are made of carbon fiber.

Preferably, the piezoelectric ceramic film of the X-axis mover is prefabricated on the upper and lower surfaces of the X-axis linear motor mover, and the piezoelectric ceramic film of the Y-axis mover is prefabricated on the upper and lower surfaces of the Y-axis linear motor mover.

Preferably, there are two sets of X-axis precise motion guide rails and Y-axis precise motion guide rails.

Preferably, the X-axis linear motor assembly is an ordinary linear motor, and its mover can only move linearly within a certain range along the X-axis direction.

Preferably, the X-axis linear motor assembly installed on the bottom plate assembly is driven by the X-axis linear motor mover to drive the X-axis motion connecting frame to move in the X direction.

Preferably, the Y-axis linear motor assembly is an adaptive decoupling linear motor, and its mover can move passively within a certain range in the X-axis direction in addition to linear motion along the Y-axis direction within a certain range. .

Preferably, the Y-axis linear motor assembly installed on the bottom plate assembly is driven by the Y-axis linear motor mover to drive the Y-axis motion connecting frame to move along the Y direction, and also perform decoupling motion along the X direction in an adaptive manner .

Preferably, the motion accuracy of the platform is controlled by a computer for precise measurement and feedback based on grating rulers installed in the X-axis and Y-axis directions.

Compared with the traditional motion platform, the piezoelectric ceramic vibration-suppressed XY precision motion platform of the present invention has the following advantages:

1. Due to the use of computer-controlled piezoelectric ceramics to suppress vibration in an intelligent way, thereby improving structural rigidity, the response is fast, and it is especially suitable for precision movement mechanisms;

2. Due to the decoupling of the self-adaptive decoupling linear motor, the overall structure of the platform mentioned in the patent is simple, the structure size is small, and the quality of the moving part of the platform is significantly reduced;

3. Since the rigidity of the mechanism is improved electronically, there is no need to strengthen the mechanical structure, so the system structure is compact and convenient, and is suitable for application in production lines with limited space;

Description of drawings

FIG. 1 is a three-dimensional schematic diagram of a piezoelectric ceramic vibration-suppressed XY precision motion platform of the present invention and the defined XY axis direction.

Figure 2 is a three-dimensional exploded view of the base plate assembly;

Fig. 3 is a three-dimensional exploded view of the X-axis linear motor assembly;

Figure 4 is a three-dimensional exploded view of the Y-axis linear motor assembly;

Fig. 5 is a three-dimensional exploded view of the kinematic link assembly.

In Fig. 1, specific reference numerals represent: 1-base plate assembly; 2-X-axis linear motor assembly; 3-Y-axis linear motor assembly 4-movement connector assembly;

In Fig. 2, the specific reference numerals indicate: 5-base plate, 6-X-axis grating ruler reading head bracket mounting screws, 7-X-axis grating ruler reading head angle bracket, 8-X-axis grating ruler reading head, 9-X-axis Grating ruler reading head mounting screws, 10-X axis precision motion guide rail fixed rail mounting screws, 11-X axis precision motion guide rails, 12-X axis precision motion guide rail sliding rail mounting screws;

In Fig. 3, specific reference numerals indicate: 13-X-axis linear motor mounting seat, 14-X-axis linear motor mounting seat screw, 15-X-axis mover piezoelectric ceramic film, 16-X-axis linear motor mover assembly , 17-X-axis linear motor stator and housing;

In Fig. 4, specific reference numerals indicate: 18-Y-axis linear motor mounting seat, 19-Y-axis linear motor mounting seat screw, 20-Y-axis mover piezoelectric ceramic film, 21-Y-axis linear motor mover assembly , 22-Y-axis linear motor stator and housing;

In Fig. 5, the specific reference numerals indicate: 23-X-axis grating frame, 24-X-axis grating frame mounting screws, 25-X-axis movement connecting frame, 26-X-axis direction connection screws, 27-Y-axis precision Motion guide rail fixing rail mounting screws, 28-Y-axis precision motion guide rail, 29-Y-axis precision motion guide rail sliding rail mounting screws, 30-Y-axis motion connection frame, 31-Y-axis direction connection screw, 32-Y-axis grating ruler reading Head mounting screw, 33-Y-axis grating ruler reading head, 34-Y-axis grating ruler reading head angle frame, 35-Y-axis grating ruler reading head angle frame mounting screw, 36-Y-axis grating ruler frame mounting screw, 37-Y-axis grating ruler frame.

Detailed ways

The present invention will be further described in conjunction with accompanying drawing:

Referring to the accompanying drawings, the XY precision motion platform for piezoelectric ceramic vibration suppression of the present invention includes: a base plate assembly 1, an X-axis linear motor assembly 2, a Y-axis linear motor assembly 3, a motion connector assembly 4, a base plate 5, and an X-axis Angle frame mounting screw for grating ruler reading head 6, angle frame for X-axis grating ruler reading head 7, X-axis grating ruler reading head 8, mounting screw for X-axis grating ruler reading head 9, X-axis precision motion rail fixing rail mounting screw 10, X-axis precision Motion guide rail 11, X-axis precision motion guide rail sliding rail mounting screw 12, X-axis linear motor mounting seat 13, X-axis linear motor mounting seat screw 14, X-axis mover piezoelectric ceramic film 15, X-axis linear motor mover assembly 16 , X-axis linear motor stator and housing 17, Y-axis linear motor mounting seat 18, Y-axis linear motor mounting seat screws 19, Y-axis mover piezoelectric ceramic film 20, Y-axis linear motor mover assembly 21, Y-axis linear motor Motor stator and housing 22, X-axis grating ruler frame 23, X-axis grating ruler frame mounting screw 24, X-axis motion connecting frame 25, X-axis direction connecting screw 26, Y-axis precision motion guide rail sliding rail mounting screw 27, Y-axis Precision motion guide rail 28, Y-axis precision motion guide rail fixing rail mounting screw 29, Y-axis motion connection frame 30, Y-axis direction connection screw 31, Y-axis grating ruler reading head mounting screw 32, Y-axis grating ruler reading head 33, Y-axis Grating ruler reading head angle frame 34, Y axis grating ruler reading head angle frame mounting screw 35, Y axis grating ruler frame mounting screw 36, Y axis grating ruler frame 37.

The base plate assembly 1 includes a base plate 5 on which an X-axis linear motor assembly 2, a Y-axis linear motor assembly 3, and a motion connector assembly 4 are installed; wherein, the X-axis linear motor assembly 2 passes through the X-axis linear motor mounting seat screws 14 Installed on the X-axis installation plane of the base plate 5; the Y-axis linear motor assembly 3 is installed on the Y-axis installation plane of the base plate 5 through the Y-axis linear motor mounting seat screw 19; the X-axis precision motion guide rail 11 and the Y-axis precision motion guide rail 28 Both are composed of fixed rails and sliding rails; in the motion connector assembly 4, mounting holes are provided on the fixed rails in the X-axis precision motion guide rail 11, and the fixed rails are installed on the X-axis precision motion guide rail fixed rail mounting screws 10. On the installation plane of the X-axis guide rail of the bottom plate 5.

In the base plate assembly 1, the X-axis grating ruler reading head angle bracket 7 is installed on the outer side of the installation plane of the X-axis guide rail of the base plate 5 through the X-axis grating ruler reading head angle bracket mounting screws 6; the X-axis grating ruler reading head 8 passes through the X-axis The grating ruler reading head mounting screw 9 is installed on the corresponding position of the X-axis grating ruler reading head angle frame 7; the fixed rails in the two sets of X-axis precision motion guide rails 11 are installed on the X-axis of the base plate 5 through the X-axis precision motion guide rail fixed rail mounting screws 10. on the mounting plane of the shaft guide.

In the X-axis linear motor assembly 2, the X-axis linear motor mount 13 is mounted on the X-axis mounting plane of the bottom plate 5 through the X-axis linear motor mount screw 14; the X-axis linear motor stator and housing 17 are mounted on the On the installation plane of the X-axis linear motor mounting base 13; the X-axis linear motor mover assembly 16 is installed in the X-axis linear motor stator and housing 17; two sets of X-axis mover piezoelectric ceramic membranes 15 are prefabricated on the X-axis linear On the upper and lower surfaces of the motor mover 16; on the exposed end of the X-axis linear motor mover 16, there is a connecting hole connecting the X-axis motion connecting frame 25; the mover of the X-axis linear motor assembly 2 can only move along the X-axis direction. Perform linear motion within a certain range. Except for the coil and the steel core, the remaining components of the X-axis linear motor rotor assembly 16 are made of carbon fiber.

In the Y-axis linear motor assembly 3, the Y-axis linear motor mount 18 is installed on the Y-axis mounting plane of the base plate 5 through the Y-axis linear motor mount screw 19; the Y-axis linear motor stator and housing 22 are mounted on the On the installation plane of the Y-axis linear motor mounting seat 18; the Y-axis linear motor mover assembly 21 is installed in the Y-axis linear motor stator and housing 22; two sets of Y-axis mover piezoelectric ceramic films 20 are prefabricated on the Y-axis linear motor respectively On the upper and lower surfaces of the motor mover 21; on the exposed end of the Y-axis linear motor mover 21, there is a connecting hole for connecting the Y-axis motion connecting frame 30; the Y-axis linear motor assembly 3 is an adaptive decoupling linear motor , in addition to linear motion within a certain range along the Y-axis direction, its mover can also passively move arbitrarily within a certain range in the X-axis direction in an adaptive manner, and this method is used as the patent Decoupling method. Except for the coil and the steel core, the remaining components of the Y-axis linear motor rotor assembly 21 are made of carbon fiber.

In the motion connector assembly 4, the X-axis motion connecting frame 25 is connected to the X-axis linear motor mover 16 through the X-axis direction connecting screw 26; the X-axis motion connecting frame 25 is connected to the X-axis precision motion guide rail sliding rail mounting screw 12 The sliding rails in the two sets of X-axis precision motion guide rails 11 are connected to each other, so that the X-axis motion connecting frame 25 can be driven by the X-axis linear motor mover 16 to move in the X direction; on the X-axis motion connecting frame 25, through The fixed rails of the Y-axis precision motion guide rail fixed rail mounting screws 29 are installed on the corresponding positioning planes with the fixed rails of the two groups of Y-axis precision motion guide rails 28; The sliding rails of the Y-axis precision motion guide rail 28 are connected; the connecting end of the Y-axis motion connecting frame 30 is connected with the Y-axis linear motor mover 21 through the Y-axis direction connecting screw 31, so that the Y-axis motion connecting frame 30 can be connected to the Y-axis through the Y-axis. The linear motor mover 21 is driven to move in the Y direction; due to the unique decoupling characteristics of the Y-axis linear motor assembly 3, the X-axis linear motor mover 16 can drive the X-axis motion connecting frame 25 to move in the X direction At the same time, the Y-axis motion connecting frame 30 can be driven by the Y-axis linear motor mover 21 to move in the Y direction and decouple in the X direction; the Y-axis grating frame 37 is installed by the Y-axis grating frame mounting screw 36 On the side of the Y-axis motion connecting frame 30; the Y-axis grating ruler reading head angle frame 34 is installed on the upper side of the X-axis motion connecting frame 25 by the Y-axis grating ruler reading head angle frame mounting screw 35 on the outer plane; the Y-axis grating ruler The reading head 32 is installed on the corresponding position of the angle bracket 34 of the Y-axis grating ruler reading head through the Y-axis grating ruler reading head mounting screw 33 .

The working principle of the piezoelectric ceramic vibration-suppressed XY precision motion platform of the present invention is: whether it is the X-axis linear motor mover 16 in the X-axis linear motor assembly 2 or the Y-axis linear motor mover 16 in the Y-axis linear motor assembly 3 Sub 21, when the mechanism vibrates, it must follow the center line of the mover section, one side produces stretching movement, and the other side produces compression movement; at this time, the piezoelectric ceramic film prefabricated on the upper and lower sides of the mover carbon fiber Among them, the piezoelectric ceramic membrane below is used as a sensor. Once it senses the stretching or compression movement on the lower end surface of the mover, it will immediately feed back the electrical signal to the control computer; The opposite current is applied to the ceramics, so that the piezoelectric ceramics on the upper end of the mover produce a reverse force to reduce or offset the stretching or compression movement that occurs on the lower end, and realize the vibration of the linear motor mover in an intelligent way. Respond quickly and achieve the purpose of reducing vibration; the X-axis linear motor assembly 2 installed on the base plate assembly 1 is provided with a driving force by the X-axis linear motor mover 16, and drives the X-axis motion connecting frame 25 to move in the X direction; The Y-axis linear motor assembly 3 installed on the base plate assembly 1 is an adaptive decoupling linear motor, and the driving force is provided by the Y-axis linear motor mover 21 to drive the Y-axis motion connecting frame 30 to move along the Y direction. Perform decoupling motion along the X direction in an adaptive manner; the Y-axis motion connecting frame 30 is installed on the X-axis motion connecting frame 25 and can slide along the Y-axis direction. Due to the above-mentioned X-axis and Y-axis motion components, In this way, the workpiece clamped on the moving connector assembly 4 can reach any point on the XY plane within the range of motion; the motion accuracy of the platform is based on the precise measurement and feedback of the grating ruler installed in the X-axis and Y-axis directions, and is controlled by a computer. Completed.

Claims (10)

1. An XY precision motion platform for piezoelectric ceramic vibration suppression is characterized in that the base plate assembly (1) includes a base plate (5), and an X-axis linear motor assembly (2), a Y-axis linear motor assembly (2), and a Y-axis linear motor assembly (2) are installed on the base plate (5). The motor assembly (3), the motion connector assembly (4); wherein, the X-axis linear motor assembly (2) is installed on the X-axis mounting plane of the base plate (5) through the X-axis linear motor mounting seat screws (14); the Y-axis The linear motor assembly (3) is installed on the Y-axis mounting plane of the base plate (5) through the Y-axis linear motor mounting seat screw (19); the X-axis precision motion guide rail (11) and the Y-axis precision motion guide rail (28) are fixed by rail and sliding rail; in the motion connector assembly (4), the fixed rail in the X-axis precision motion guide rail (11) is installed on the X-axis of the base plate (5) through the X-axis precision motion guide rail fixed rail mounting screw (10). on the mounting plane of the guide rail; In the base plate assembly (1), the X-axis grating ruler reading head angle bracket (7) is installed on the outer side of the installation plane of the X-axis guide rail of the base plate (5) through the X-axis grating ruler reading head angle bracket mounting screws (6); The grating ruler reading head (8) is installed on the corresponding position of the X-axis grating ruler reading head angle bracket (7) through the X-axis grating ruler reading head mounting screw (9); In the X-axis linear motor assembly (2), the X-axis linear motor mount (13) is installed on the X-axis mounting plane of the base plate (5) through the X-axis linear motor mount screw (14); the X-axis linear motor stator and The housing (17) is mounted on the installation plane of the X-axis linear motor mounting seat (13) by positioning and inlaying; the X-axis linear motor mover assembly (16) is installed in the X-axis linear motor stator and housing (17); The upper and lower surfaces of the X-axis linear motor mover assembly (16) are respectively provided with X-axis mover piezoelectric ceramic films (15); the exposed end of the X-axis linear motor mover assembly (16) is provided with a The connection hole of motion connection frame (25); In the Y-axis linear motor assembly (3), the Y-axis linear motor mount (18) is installed on the Y-axis mounting plane of the base plate (5) through the Y-axis linear motor mount screw (19); the Y-axis linear motor stator and The housing (22) is mounted on the installation plane of the Y-axis linear motor mounting seat (18) by positioning and inlaying; the Y-axis linear motor mover assembly (21) is installed in the Y-axis linear motor stator and the housing (22); The upper and lower surfaces of the Y-axis linear motor mover assembly (21) are respectively provided with a Y-axis mover piezoelectric ceramic film (20); the exposed end of the Y-axis linear motor mover assembly (21) is provided with a Y-axis The connection hole of motion connection frame (30); In the motion connecting body assembly (4), the X-axis motion connecting frame (25) is connected with the X-axis linear motor rotor assembly (16) through the X-axis direction connecting screw (26); the X-axis motion connecting frame (25) is connected through The X-axis precision motion guide rail slide rail mounting screw (12) is connected with the slide rail in the X-axis precision motion guide rail (11); the Y-axis precision motion guide rail (28) is connected to the Y-axis precision motion guide rail through the Y-axis precision motion guide rail fixing rail mounting screw (29). The fixed rail is installed on the corresponding positioning plane on the X-axis motion connecting frame (25); the Y-axis motion connecting frame (30) is connected with the Y-axis precision motion guide rail (28) through the Y-axis precision motion guide rail sliding rail installation screw (27) ) is connected to the slide rail; the connecting end of the Y-axis motion connecting frame (30) is connected with the Y-axis linear motor subassembly (21) through the Y-axis direction connecting screw (31); the Y-axis grating ruler frame (37) passes The Y-axis grating ruler mounting screw (36) is installed on the side of the Y-axis motion connecting frame (30); the Y-axis grating ruler reading head angle frame (34) is installed on the X The upper side of the shaft movement connecting frame (25) is on the outer plane; the Y-axis grating ruler reading head (32) is installed on the corresponding Y-axis grating ruler reading head angle bracket (34) through the Y-axis grating ruler reading head mounting screw (33). position. 2. The XY precision motion platform according to claim 1, characterized in that, except for the coil and the steel core, the remaining components of the X-axis linear motor mover subassembly (16) are made of carbon fiber. 3. The XY precision motion platform according to claim 1, characterized in that, except for the coil and the steel core, the remaining components of the Y-axis linear motor mover subassembly (21) are made of carbon fiber. 4. The XY precision motion platform according to claim 1, characterized in that, the X-axis mover piezoelectric ceramic film (15) is prefabricated on the upper and lower surfaces of the X-axis linear motor mover assembly (16), and the Y The piezoelectric ceramic film (20) of the axis mover is prefabricated on the upper and lower surfaces of the Y-axis linear motor mover assembly (21). 5. The XY precision motion platform according to claim 1, characterized in that there are two sets of X-axis precision motion guide rails (11) and Y-axis precision motion guide rails (28). 6. The XY precision motion platform according to claim 1, characterized in that the X-axis linear motor assembly (2) is an ordinary linear motor, and its mover can only move linearly within a certain range along the X-axis direction. 7. The XY precision motion platform according to claim 6, characterized in that the X-axis linear motor assembly (2) mounted on the base plate assembly (1) is driven by the X-axis linear motor rotor assembly (16), Drive the X-axis motion connecting frame (25) to move along the X direction. 8. The XY precision motion platform as claimed in claim 1, characterized in that, the Y-axis linear motor assembly (3) is an adaptive decoupling linear motor, and its mover performs linear motion within a certain range along the Y-axis direction In addition, it can also passively move freely within a certain range in the X-axis direction. 9. The XY precision motion platform according to claim 8, characterized in that, the Y-axis linear motor assembly (3) installed on the base plate assembly (1) is driven by the Y-axis linear motor rotor assembly (21), Drive the Y-axis movement connecting frame (30) to move along the Y direction, and also perform decoupling movement along the X direction in an adaptive manner. 10. The XY precision motion platform according to one of claims 1-9, characterized in that the motion accuracy of the platform is based on precise measurement and feedback of grating scales installed in the X-axis and Y-axis directions, and is controlled by the computer Control is done.