CN102722088A

CN102722088A - Non-contact coarse-fine motion layer positioning system and motion control method thereof

Info

Publication number: CN102722088A
Application number: CN2012101801402A
Authority: CN
Inventors: 杨开明; 朱煜; 李鑫; 苏哲欣; 尹文生; 胡金春; 张鸣; 徐登峰; 穆海华; 余东东; 崔乐卿
Original assignee: Tsinghua University
Current assignee: Tsinghua University; U Precision Tech Co Ltd
Priority date: 2011-06-28
Filing date: 2012-06-01
Publication date: 2012-10-10
Anticipated expiration: 2032-06-01
Also published as: CN102722088B

Abstract

A non-contact coarse-fine motion lamination positioning system and its motion control method, the positioning device includes a micro-motion stage and two coarse motion stages symmetrically arranged on both sides of the micro-motion stage, and the micro-motion stage is suspended by a voice coil motor Above the two coarse motion tables, there is no mechanical connection between each coarse motion table and between each coarse motion table and the fine motion table. The micro-motion table can realize six-degree-of-freedom movement, and the two coarse motion tables move along the Y-axis direction. In the control method of moving along the Y-axis direction, the laser encoder signal is used as the position feedback of the micro-motion table along the Y-axis direction, and the voice coil motor is used to drive the micro-motion table to move along the Y-axis direction. The signal of the eddy current sensor is used as the position deviation between the coarse motion table and the fine motion table along the Y-axis direction, and the deviation is used as the controller feedback to realize the synchronous movement of the coarse motion table and the micro-motion table along the Y-axis direction.

Description

A non-contact coarse and fine motion lamination positioning system and its motion control method

技术领域 technical field

本发明涉及一种无接触式粗精动叠层定位装置运动控制系统，属于半导体光刻设备领域。The invention relates to a motion control system of a non-contact coarse and fine motion lamination positioning device, which belongs to the field of semiconductor photolithography equipment.

背景技术 Background technique

具有纳米级运动定位精度的超精密微动台是半导体装备关键部件之一，如光刻机中的硅片台、掩模台等。为实现超精密定位要求，以气浮和磁浮约束为支撑方式的执行单元作为一种超精密运动台被广泛应用。气浮约束作为支撑和导向作用时，减小了机械结构传动引起的摩擦力等作用，提高了系统运动定位精度。以直线电机为驱动单元时，由通电线圈在永磁阵列气隙磁场中产生的洛仑兹力提供驱动力，通过控制线圈中电流大小来改变执行单元的推力，具有结构简单等优点。The ultra-precise micro-motion stage with nanometer-level motion positioning accuracy is one of the key components of semiconductor equipment, such as silicon wafer stages and mask stages in lithography machines. In order to meet the requirements of ultra-precise positioning, the execution unit supported by air suspension and magnetic suspension is widely used as an ultra-precision motion table. When the air flotation constraint acts as a support and guide, it reduces the friction caused by the transmission of the mechanical structure and improves the positioning accuracy of the system. When the linear motor is used as the drive unit, the Lorentz force generated by the energized coil in the air-gap magnetic field of the permanent magnet array provides the drive force, and the thrust of the execution unit is changed by controlling the current in the coil, which has the advantages of simple structure.

目前光刻设备中通常采用粗精动叠层的结构，包括两个粗动台和一个微动台，两个粗动台之间通过一个横梁连接，微动台安装在横梁上，通过横梁实现两个粗动台与微动台的同步运动。一方面连接横梁增加了结构设计的复杂性，增加了系统结构质量，较大的质量将影响系统运动响应性能，另一方面，当结构运动时，如果两个粗动台沿Y轴方向存在位置偏差，由于连接梁的作用，使得两个粗动平台之间产生作用力与反作用力的耦合，使得两个粗动平台的性能相互影响，将影响系统的运动定位精度。因此设计出无机械连接的粗精动叠层定位装置并设计出针对该定位装置的控制方法具有重要意义。At present, lithography equipment usually adopts a coarse-fine motion lamination structure, including two coarse motion tables and a fine motion table. The two coarse motion tables are connected by a beam, and the micro motion table is installed on the beam. Synchronous movement of two coarse and fine motion stages. On the one hand, connecting the beam increases the complexity of the structural design and increases the structural quality of the system. The larger mass will affect the motion response performance of the system. On the other hand, when the structure is moving, if the two coarse motion tables have a position Due to the action of the connecting beam, the coupling of the action force and the reaction force between the two coarse motion platforms will cause the performance of the two coarse motion platforms to affect each other, which will affect the motion positioning accuracy of the system. Therefore, it is of great significance to design a rough and fine lamination positioning device without mechanical connection and to design a control method for the positioning device.

发明内容 Contents of the invention

本发明的目的是提供一种应用于半导体装备的定位装置以及位置测量与运动控制算法，不仅满足六自由度运动定位要求，同时解决目前掩模台粗精动叠层结构中由机械结构耦合作用引起的结构复杂、运动性能相互影响等问题。The purpose of the present invention is to provide a positioning device and a position measurement and motion control algorithm applied to semiconductor equipment, which not only meet the six-degree-of-freedom motion positioning requirements, but also solve the mechanical structure coupling effect in the current mask table rough and fine motion lamination structure. The problems caused by the complex structure and mutual influence of sports performance.

本发明的技术方案如下：Technical scheme of the present invention is as follows:

一种无接触式粗精动叠层定位系统，该控制系统包括定位装置、位置测量装置、驱动装置和控制单元；A non-contact coarse and fine motion lamination positioning system, the control system includes a positioning device, a position measuring device, a driving device and a control unit;

定位装置包括基架、一个微动台和两个对称布置在微动台两侧的粗动台，两个粗动台之间、粗动台与微动台之间无机械连接；The positioning device includes a base frame, a micro-motion table and two coarse motion tables arranged symmetrically on both sides of the micro-motion table, and there is no mechanical connection between the two coarse motion tables or between the coarse motion table and the micro-motion table;

位置测量装置包括：Position measuring devices include:

1）一个激光尺，用于测量微动台质心沿Y轴的绝对位置；1) A laser ruler for measuring the absolute position of the center of mass of the micro-motion stage along the Y-axis;

2）两个光栅测量装置，每个光栅测量装置包括一个光栅尺和一个读数头，用于测量粗动台沿Y轴方向的位移；2) Two grating measuring devices, each grating measuring device includes a grating ruler and a reading head, used to measure the displacement of the coarse motion table along the Y-axis direction;

3）七个电涡流传感器，其中：3) Seven eddy current sensors, of which:

第一电涡流传感器和第二电涡流传感器安装在第一粗动台上，布置于一条沿Y轴的直线上，用于测量微动台沿X轴与粗动台的相对位置，第一和第二电涡流传感器测量值的差动作为微动台绕Z轴的转角；The first eddy current sensor and the second eddy current sensor are installed on the first coarse motion table, arranged on a straight line along the Y axis, and used to measure the relative position of the fine motion table and the coarse motion table along the X axis, the first and The differential action of the measured value of the second eddy current sensor is used as the rotation angle of the micro-motion table around the Z axis;

第三电涡流传感器安装在第一粗动台上，测量第一粗动台与微动台之间沿Y轴方向的相对位置；第四电涡流传感器安装在第二粗动台上，测量第二粗动台与微动台之间沿Y轴方向的相对位置；The third eddy current sensor is installed on the first coarse motion table to measure the relative position between the first coarse motion table and the fine motion table along the Y-axis direction; the fourth eddy current sensor is installed on the second coarse motion table to measure the first coarse motion table. 2. The relative position between the coarse motion table and the fine motion table along the Y-axis direction;

第五电涡流传感器和第六电涡流传感器安装在第一粗动台上，且位于一条沿Y轴的直线上，第七电涡流传感器安装在第二粗动台上，且与第五电涡流传感器位于一条沿X轴的直线上；该三个电涡流传感器用于测量微动台沿Z轴的绝对位置，第五电涡流传感器和第六电涡流传感器测量值的差动作为微动台绕X轴的转角，第五电涡流传感器和第七电涡流传感器测量值的差动作为微动台绕Y轴的转角；The fifth eddy current sensor and the sixth eddy current sensor are installed on the first coarse motion table and are located on a straight line along the Y axis, and the seventh eddy current sensor is installed on the second coarse motion table and connected to the fifth eddy current sensor The sensors are located on a straight line along the X-axis; the three eddy-current sensors are used to measure the absolute position of the micro-motion stage along the Z-axis, and the difference between the measured values of the fifth eddy-current sensor and the sixth eddy-current sensor is used as the The rotation angle of the X-axis, the difference between the measured values of the fifth eddy-current sensor and the seventh eddy-current sensor is taken as the rotation angle of the micro-motion table around the Y-axis;

驱动装置包括：Drives include:

1）十个音圈电机1) Ten voice coil motors

微动台包括四个沿Y轴方向驱动的音圈电机、两个沿X轴方向驱动的音圈电机和四个沿Z轴方向驱动的音圈电机；第一音圈电机、第二音圈电机、第五音圈电机的线圈组件固定在第一粗动台上，永磁体组件固定在微动台上，第三音圈电机、第四音圈电机、第六音圈电机的线圈组件固定在第二粗动台上，永磁体组件固定在微动台上；The micro-motion stage includes four voice coil motors driven along the Y axis, two voice coil motors driven along the X axis, and four voice coil motors driven along the Z axis; the first voice coil motor, the second voice coil The coil assembly of the motor and the fifth voice coil motor is fixed on the first coarse motion table, the permanent magnet assembly is fixed on the fine motion table, the coil assemblies of the third voice coil motor, the fourth voice coil motor, and the sixth voice coil motor are fixed On the second coarse motion stage, the permanent magnet assembly is fixed on the fine motion stage;

第七音圈电机、第八音圈电机、第九音圈电机、第十音圈电机结构相同，包括外磁环、内磁环、圆柱线圈组件、重力平衡磁柱；外磁环与内磁环的轴线沿Z轴方向，外磁环与内磁环充磁方向相同，沿径向方向且由圆环外表面指向圆心；圆柱线圈位于内磁环与外磁环之间，绕线轴线沿Z轴方向；磁柱的轴线沿Z轴方向，充磁方向沿Z轴正方向；第七音圈电机、第八音圈电机的圆柱线圈组件固定在第一粗动台上，第九音圈电机、第十音圈电机的圆柱线圈组件固定在第二粗动台上；The seventh voice coil motor, the eighth voice coil motor, the ninth voice coil motor, and the tenth voice coil motor have the same structure, including an outer magnetic ring, an inner magnetic ring, a cylindrical coil assembly, and a gravity balance magnetic column; the outer magnetic ring and the inner magnetic ring The axis of the ring is along the Z-axis direction, the outer magnetic ring and the inner magnetic ring are magnetized in the same direction, along the radial direction and pointing from the outer surface of the ring to the center of the circle; the cylindrical coil is located between the inner magnetic ring and the outer magnetic ring, and the winding axis is along the Z-axis direction; the axis of the magnetic column is along the Z-axis direction, and the magnetization direction is along the positive direction of the Z-axis; the cylindrical coil assemblies of the seventh voice coil motor and the eighth voice coil motor are fixed on the first coarse motion table, and the ninth voice coil The motor and the cylindrical coil assembly of the tenth voice coil motor are fixed on the second coarse motion table;

2）两个直线电机2) Two linear motors

两个直线电机分别用于驱动第一粗动台和第二粗动台；Two linear motors are respectively used to drive the first coarse motion table and the second coarse motion table;

所述控制单元包括含有控制程序的工控机、计数卡、A/D卡、D/A卡和驱动器，计数卡采集光栅尺和激光尺的增量信号，A/D卡采集电涡流传感器的信号，计数卡和A/D卡将采集到的信号输入至工控机，工控机以所述信号作为位置反馈信号对微动台以及粗动台进行控制，控制指令通过D/A卡输出至驱动器，驱动力输出电流给电机，实现微动台以及粗动台的运动。The control unit includes an industrial computer containing a control program, a counting card, an A/D card, a D/A card and a driver, the counting card collects the incremental signals of the grating ruler and the laser ruler, and the A/D card collects the signals of the eddy current sensor , the counting card and the A/D card input the collected signal to the industrial computer, and the industrial computer uses the signal as a position feedback signal to control the micro-motion table and the coarse motion table, and the control command is output to the driver through the D/A card. The driving force outputs current to the motor to realize the movement of the micro-motion table and the coarse motion table.

基于所述的粗精动叠层定位系统，采用了一种运动控制方法，该控制方法包括如下步骤：Based on the described coarse-fine motion lamination positioning system, a motion control method is adopted, and the control method includes the following steps:

1）在伺服周期开始，设定微动台的六自由度位移量，其中x_d为沿X轴的位移量，y_d为沿Y轴的位移量，z_d为沿Z轴的位移量，θ_xd为绕X轴的转角位移量，θ_yd为绕Y轴的转角位移量，θ_zd为绕Z轴的转角位移量；然后将计数卡采集的激光尺信号和A/D卡采集的电涡流传感器信号作为微动台控制环路的反馈信号，将A/D卡采集的电涡流传感器信号作为粗动台控制环路的反馈信号；1) At the beginning of the servo cycle, set the six-degree-of-freedom displacement of the micro-motion table, where x _d is the displacement along the X-axis, y _d is the displacement along the Y-axis, z _d is the displacement along the Z-axis, θ _xd is the angular displacement around the X axis, θ _yd is the angular displacement around the Y axis, and θ _zd is the angular displacement around the Z axis; The signal of the eddy current sensor is used as the feedback signal of the control loop of the micro-motion stage, and the signal of the eddy current sensor collected by the A/D card is used as the feedback signal of the control loop of the coarse motion stage;

2）根据设定的微动台六自由度位移量以及反馈信号求解每个音圈电机相应出力，其中第一音圈电机、第二音圈电机、第三音圈电机和第四音圈电机控制微动台沿Y方向移动和绕Z轴旋转的自由度，第五音圈电机和第六音圈电机控制微动台沿X方向移动的自由度，第七音圈电机、第八音圈电机、第九音圈电机和第十音圈电机控制微动台沿Z方向移动、绕X轴旋转和绕Y轴旋转的自由度，电机输出力按以下公式计算：2) Solve the corresponding output of each voice coil motor according to the set six-degree-of-freedom displacement of the micro-motion table and the feedback signal, among which the first voice coil motor, the second voice coil motor, the third voice coil motor and the fourth voice coil motor Control the degree of freedom of the micro-motion table moving along the Y direction and rotating around the Z-axis, the fifth voice coil motor and the sixth voice coil motor control the degree of freedom of the micro-motion table moving along the X direction, the seventh voice coil motor, the eighth voice coil The motor, the ninth voice coil motor and the tenth voice coil motor control the degree of freedom of the micro-motion table moving in the Z direction, rotating around the X axis and rotating around the Y axis. The output force of the motor is calculated according to the following formula:

${F f}_{301301} = = {F f}_{302302} = = {k k}_{p p 301301} {e e}_{y the y} + + {k k}_{d d 301301} {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {c c}_{301301} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {a a}_{301301} {e e}_{y the y}}{| | {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {e e}_{y the y} | | + + {b b}_{301301}} + + {k k}_{301301} {e e}_{{θ θ}_{z z}} + + {k k}_{301301} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{z z}}$

${F f}_{303303} = = {F f}_{304304} = = {k k}_{p p 303303} {e e}_{y the y} + + {k k}_{d d 303303} {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {c c}_{303303} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {a a}_{303303} {e e}_{y the y}}{| | {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {e e}_{y the y} | | + + {b b}_{303303}} - - {k k}_{303303} {e e}_{{θ θ}_{z z}} - - {k k}_{303303} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{z z}}$

${F f}_{305305} = = {F f}_{306306} = = {k k}_{p p 305305} {e e}_{x x} + + {k k}_{d d 305305} {\overset{\cdot &Center Dot;}{e e}}_{x x} + + {c c}_{305305} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{x x} + + {a a}_{305305} {e e}_{x x}}{| | {\overset{\cdot &Center Dot;}{e e}}_{x x} + + {{a a}_{305305} e e}_{x x} | | + + {b b}_{305305}}$

${F f}_{307307} = = {k k}_{p p 307307} {e e}_{z z} + + {k k}_{d d 307307} {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {c c}_{307307} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{307307} {e e}_{z z}}{| | {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{307307} {e e}_{y the y} | | + + {b b}_{307307}} + + {k k}_{307307} {e e}_{{θ θ}_{x x}} + + {k k}_{307307} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{x x}} + + {k k}_{307307} {e e}_{{θ θ}_{y the y}} + + {k k}_{307307} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{y the y}}$

${F f}_{308308} = = {k k}_{p p 308308} {e e}_{z z} + + {k k}_{d d 308308} {\overset{\cdot \cdot}{e e}}_{z z} + + {c c}_{308308} \cdot &Center Dot; \frac{{\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{308308} {e e}_{z z}}{| | {\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{308308} {e e}_{z z} | | + + {b b}_{308308}} + + {k k}_{308308} {e e}_{{θ θ}_{x x}} + + {k k}_{308308} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{x x}} - - {k k}_{308308} {e e}_{{θ θ}_{y the y}} - - {k k}_{308308} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{y the y}}$

${F f}_{309309} = = {k k}_{p p 309309} {e e}_{z z} + + {k k}_{d d 309309} {\overset{\cdot \cdot}{e e}}_{z z} + + {c c}_{309309} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{309309} {e e}_{z z}}{| | {\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{309309} {e e}_{z z} | | + + {b b}_{309309}} - - {k k}_{309309} {e e}_{{θ θ}_{x x}} - - {k k}_{309309} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{x x}} + + {k k}_{309309} {e e}_{{θ θ}_{y the y}} + + {k k}_{309309} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{y the y}}$

${F f}_{30103010} = = {k k}_{p p 30103010} {e e}_{z z} + + {k k}_{d d 30103010} {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {c c}_{30103010} \cdot \cdot \frac{{\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{30103010} {e e}_{z z}}{| | {\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{30103010} {e e}_{z z} | | + + {b b}_{30103010}} - - {k k}_{30103010} {e e}_{{θ θ}_{x x}} - - {k k}_{30103010} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{x x}} - - {k k}_{30103010} {e e}_{{θ θ}_{y the y}} - - {k k}_{30103010} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{y the y}}$

其中：F₃₀₁为第一音圈电机输出力，F₃₀₂为第二音圈电机输出，F₃₀₃为第三音圈电机输出力，F₃₀₄为第四音圈电机输出力，F₃₀₅为第五音圈电机输出力，F₃₀₆为第六音圈电机输出，F₃₀₇为第七音圈电机输出力，F₃₀₈为第八音圈电机输出力，F₃₀₉为第九音圈电机输出力，F₃₀₁₀为第十音圈电机输出力；Among them: F ₃₀₁ is the output force of the first voice coil motor, F ₃₀₂ is the output force of the second voice coil motor, F ₃₀₃ is the output force of the third voice coil motor, F ₃₀₄ is the output force of the fourth voice coil motor, F ₃₀₅ is the output force of the fifth voice coil motor The output force of the voice coil motor, F ₃₀₆ is the output force of the sixth voice coil motor, F ₃₀₇ is the output force of the seventh voice coil motor, F ₃₀₈ is the output force of the eighth voice coil motor, F ₃₀₉ is the output force of the ninth voice coil motor, F ₃₀₁₀ is the output force of the tenth voice coil motor;

k_p301、k_p303、k_p305、k_p307、k_p308、k_p309、k_p3010、k_d301、k_d303、k_d305、k_d307、k_d308、k_d309、k_d3010、c₃₀₁、c₃₀₃、c₃₀₅、c₃₀₇、c₃₀₈、c₃₀₉、c₃₀₁₀、a₃₀₁、a₃₀₃、a₃₀₅、a₃₀₇、a₃₀₈、a₃₀₉、a₃₀₁₀、b₃₀₁、b₃₀₃、b₃₀₅、b₃₀₇、b₃₀₈、b₃₀₉、b₃₀₁₀、k₃₀₁、k₃₀₃、k₃₀₅、k₃₀₇、k₃₀₈、k₃₀₉、k₃₀₁₀为控制器比例系数；k _p301 , k _p303 , k _p305 , k _p307 , k _p308 , k _p309 , k _p3010 , k _d301 , k _d303 , k _d305 , k _d307 , k _d308 , k _d309 , k _d3010 , c ₃₀₁ , c ₃₀₃ , c ₃₀₅ , c ₃₀₇ , c ₃₀₈ , c ₃₀₉ , c ₃₀₁₀ , a ₃₀₁ , a ₃₀₃ , a ₃₀₅ , a ₃₀₇ , a ₃₀₈ , a ₃₀₉ , a ₃₀₁₀ , b ₃₀₁ , b ₃₀₃ , b ₃₀₅ , b ₃₀₇ , b ₃₀₈ , b ₃₀₉ , b ₃₀₁₀ , k ₃₀₁ , k ₃₀₃ , k ₃₀₅ , k ₃₀₇ , k ₃₀₈ , k ₃₀₉ , k ₃₀₁₀ are controller proportional coefficients;

e_y=y_d-y，y_d为微动台沿Y轴方向目标位置，y为激光尺反馈信号，

为e_y对时间的一阶导数；e_x=x_d-x，x_d为微动台沿X轴的目标位置，x为反馈信号，

为e_x对时间的一阶倒数；e_z=z_d-z，z_d为微动台沿Z轴的目标位置，z为反馈信号，

为e_z对时间的一阶倒数；

θ_xd为微动台绕X轴的目标位置，θ_x为反馈信号，

为对时间的一阶倒数；

θ_yd为微动台绕Y轴的目标位置，θ_y为反馈信号，

为对时间的一阶倒数；

θ_zd为微动台绕Z轴的目标转角，θ_z为反馈信号，

为

对时间的一阶倒数；e _y =y _d -y, y _d is the target position of the micro-motion table along the Y-axis direction, y is the feedback signal of the laser encoder,

is the first derivative of e _y to time; e _x =x _d -x, x _d is the target position of the micro-motion stage along the X axis, x is the feedback signal,

is the first-order reciprocal of e _x to time; e _z =z _d -z, z _d is the target position of the micro-motion stage along the Z axis, z is the feedback signal,

is the first-order reciprocal of e _z to time;

θ _xd is the target position of the micro-motion table around the X-axis, θ _x is the feedback signal,

for first-order reciprocal of time;

θ _yd is the target position of the micro-motion table around the Y axis, θ _y is the feedback signal,

for first-order reciprocal of time;

θ _zd is the target rotation angle of the micro-motion table around the Z axis, θ _z is the feedback signal,

for

first-order reciprocal of time;

粗动台仅具有y方向的自由度，其控制系统要保持粗动台与微动台在y方向的相对位置不变，设第一粗动台与微动台相对位置保持y_cd1不变，第二粗动台与微动台相对位置保持y_cd2不变。在两个粗动台的运动控制方法中，第一粗动台以第一音圈电机和第二音圈电机的输出力作为前馈，第三电涡流传感器信号为微动台与第一粗动台之间的位置偏差，以该偏差为反馈实现第一粗动台沿Y轴的运动；第二粗动台以第三音圈电机和第四音圈电机的输出力作为前馈，第四电涡流传感器信号为微动台与第二粗动台之间的位置偏差，以该偏差为反馈实现第二粗动台沿Y轴的运动，粗动台直线电机输出力按照以下公式计算：The coarse motion table only has the degree of freedom in the y direction, and its control system should keep the relative position of the coarse motion table and the fine motion table in the y direction unchanged, assuming that the relative position of the first coarse motion table and the micro motion table remains unchanged in y _cd1 , The relative position of the second coarse motion table and the fine motion table remains y _cd2 unchanged. In the motion control method of two coarse motion tables, the first coarse motion table uses the output force of the first voice coil motor and the second voice coil motor as feedforward, and the signal of the third eddy current sensor is the output force of the fine motion table and the first coarse motion table. The position deviation between the moving stages is used as feedback to realize the movement of the first coarse moving stage along the Y axis; the second coarse moving stage uses the output force of the third voice coil motor and the fourth voice coil motor as feedforward, and the second coarse moving stage The signal of the four-current eddy-current sensor is the position deviation between the micro-motion table and the second coarse motion table. The deviation is used as feedback to realize the movement of the second coarse motion table along the Y-axis. The output force of the linear motor of the coarse motion table is calculated according to the following formula:

${F f}_{10011001} = = {F f}_{302302} + + {F f}_{301301} + + {k k}_{p p 10011001} {e e}_{y the y 10011001} + + {k k}_{d d 10011001} {\overset{\cdot \cdot}{e e}}_{y the y 10011001} + + {c c}_{10011001} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{y the y 10011001} + + {a a}_{10011001} {e e}_{y the y 10011001}}{| | {\overset{\cdot &Center Dot;}{e e}}_{y the y 10011001} + + {a a}_{10011001} {e e}_{y the y 10011001} | | + + {b b}_{10011001}}$

${F f}_{10021002} = = {F f}_{304304} + + {F f}_{303303} + + {k k}_{p p 10021002} {e e}_{y the y 10021002} + + {k k}_{d d 10021002} {\overset{\cdot &Center Dot;}{e e}}_{y the y 10021002} + + {c c}_{10021002} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{y the y 10021002} + + {a a}_{10021002} {e e}_{y the y 10021002}}{| | {\overset{\cdot \cdot}{e e}}_{y the y 10021002} + + {a a}_{10021002} {e e}_{y the y 10021002} | | + + {b b}_{10021002}}$

其中：F₁₀₀₁为第一粗动台直线电机输出力、F₁₀₀₂为第二粗动台直线电机输出力；Among them: F ₁₀₀₁ is the output force of the linear motor of the first coarse motion table, and F ₁₀₀₂ is the output force of the linear motor of the second coarse motion table;

k_p1001、k_p1002、k_d1001、k_d1002、c₁₀₀₁、c₁₀₀₂、a₁₀₀₁、a₁₀₀₂、b₁₀₀₁、b₁₀₀₂为控制器比例系数；k _p1001 , k _p1002 , k _d1001 , k _d1002 , c ₁₀₀₁ , c ₁₀₀₂ , a ₁₀₀₁ , a ₁₀₀₂ , b ₁₀₀₁ , b ₁₀₀₂ are controller proportional coefficients;

e_y1001=y_cd1-y_c1，y_cd1为第一粗动台与微动台目标相对位置，y_c1第三电涡流传感器反馈信号；

为e_y1001第三电涡流传感器信号对时间的导数；e _y1001 =y _cd1 -y _c1 , y _cd1 is the relative position of the target of the first coarse motion table and the fine motion table, y _{c1 is} the feedback signal of the third eddy current sensor;

is the derivative of e _y1001 third eddy current sensor signal to time;

e_y1002=y_cd2-y_c2，y_cd2为第二粗动台与微动台目标相对位置，y_c2第四电涡流传感器反馈信号；为e_y1002对时间的导数；e _y1002 =y _cd2 -y _c2 , y _cd2 is the target relative position between the second coarse motion stage and the micro motion stage, y _{c2 is} the feedback signal of the fourth eddy current sensor; is the derivative of e _y1002 with respect to time;

3）根据求解的每个驱动电机的输出力得到每个电机的控制指令，该控制指令由D/A卡进行数模转换后输入至驱动器，驱动器成比例地输出电流驱动相应电机，进而实现微动台以及粗动台的运动。3) According to the solved output force of each drive motor, the control command of each motor is obtained. The control command is input to the driver after digital-to-analog conversion by the D/A card, and the driver outputs the current in proportion to drive the corresponding motor, thereby realizing micro The movement of the moving table and the coarse moving table.

本发明具有以下优点及突出性的技术效果：本发明解决了目前粗精动叠层结构中有机械结构耦合作用引起的结构复杂、运动性能相互影响等问题，所设计的叠层定位装置结构简单，无接触消除了摩擦，同时本发明提供了六自由度结算方法，以及一种控制方法，具有较好的控制效果。The present invention has the following advantages and outstanding technical effects: the present invention solves the problems of complex structure and mutual influence of motion performance caused by mechanical structure coupling in the coarse and fine motion lamination structure, and the designed lamination positioning device has a simple structure , non-contact eliminates friction, and at the same time, the invention provides a six-degree-of-freedom settlement method and a control method, which have a better control effect.

附图说明 Description of drawings

图1为本发明定位装置结构原理示意图（轴测图）。Fig. 1 is a schematic diagram (axonometric view) of the structure and principle of the positioning device of the present invention.

图2为本发明粗动台轴测图。Fig. 2 is an axonometric view of the coarse motion table of the present invention.

图3为本发明粗动台侧视图。Fig. 3 is a side view of the coarse motion table of the present invention.

图4为本发明微动台结构示意图（轴测图）。Fig. 4 is a structural schematic diagram (axonometric view) of the micro-motion stage of the present invention.

图5为本发明第一音圈电机剖视图。Fig. 5 is a sectional view of the first voice coil motor of the present invention.

图6为本发明第五音圈电机结构示意图（轴测图）。Fig. 6 is a structural schematic diagram (axonometric view) of the fifth voice coil motor of the present invention.

图7为第五音圈电机剖视图。Fig. 7 is a sectional view of the fifth voice coil motor.

图8为本发明第七音圈电机结构示意图（轴测图）。Fig. 8 is a structural schematic diagram (axonometric view) of the seventh voice coil motor of the present invention.

图9为本发明第七音圈电机外磁环图。Fig. 9 is a diagram of the outer magnetic ring of the seventh voice coil motor of the present invention.

图10为本发明第七音圈电机内磁环图。Fig. 10 is a magnetic ring diagram of the seventh voice coil motor of the present invention.

图11为本发明第七音圈电机磁柱图。Fig. 11 is a magnetic column diagram of the seventh voice coil motor of the present invention.

图12为本发明音圈电机线圈位置示意图。Fig. 12 is a schematic diagram of the coil position of the voice coil motor according to the present invention.

图13为本发明光栅尺示意图（轴测图）。Fig. 13 is a schematic diagram (axonometric view) of the grating ruler of the present invention.

图14为本发明光栅尺主视图。Fig. 14 is a front view of the grating ruler of the present invention.

图15为本发明第一电涡流传感器-第四电涡流传感器位置示意图。Fig. 15 is a schematic diagram of the positions of the first eddy current sensor and the fourth eddy current sensor in the present invention.

图16为本发明第五电涡流传感器-第七电涡流传感器位置示意图。FIG. 16 is a schematic diagram of the positions of the fifth eddy current sensor and the seventh eddy current sensor according to the present invention.

图17为本发明激光尺位置示意图。Fig. 17 is a schematic diagram of the position of the laser encoder of the present invention.

图18为本发明激光尺测量示意图。Fig. 18 is a schematic diagram of the measurement of the laser ruler of the present invention.

图19为本发明激光尺测量示意图。Fig. 19 is a schematic diagram of the measurement of the laser ruler of the present invention.

图20为本发明控制原理流程图。Fig. 20 is a flowchart of the control principle of the present invention.

图中：In the picture:

001-基架；001-base frame;

1001-第一粗动台，1002-第二粗动台1001-the first coarse motion table, 1002-the second coarse motion table

101-直线电机，102-支撑元件，103-导向元件，104-连接元件101-linear motor, 102-supporting element, 103-guiding element, 104-connecting element

200-微动台200-Micro motion table

201-第一音圈电机，202-第二音圈电机，203-第三音圈电机，204-第四音圈电机201-first voice coil motor, 202-second voice coil motor, 203-third voice coil motor, 204-fourth voice coil motor

211-第一线圈组件，212-第一永磁体组件，213-第二永磁体组件211-the first coil assembly, 212-the first permanent magnet assembly, 213-the second permanent magnet assembly

2121-第一主永磁体，2142-第二主永磁体，2125第三主永磁体，2131-第四主永磁体，2133-第五主永磁体，2135-第六主永磁体，2122-第一附永磁体，2124-第二附永磁体，2132-第三附永磁体，2134-第四附永磁体，2142-第一铁轭2121-the first main permanent magnet, 2142-the second main permanent magnet, 2125 the third main permanent magnet, 2131-the fourth main permanent magnet, 2133-the fifth main permanent magnet, 2135-the sixth main permanent magnet, 2122-the first A permanent magnet, 2124-the second permanent magnet, 2132-the third permanent magnet, 2134-the fourth permanent magnet, 2142-the first iron yoke

205-第五音圈电机，206-第六音圈电机205-fifth voice coil motor, 206-sixth voice coil motor

221-第二线圈组件，222-第三永磁体组件，223第四永磁体组件，2221-第七主永磁体，2222-第八主永磁体，2231-第九主永磁体，2232-第十主永磁体，2241-第三铁轭，2242-第四铁轭221-the second coil assembly, 222-the third permanent magnet assembly, 223 the fourth permanent magnet assembly, 2221-the seventh main permanent magnet, 2222-the eighth main permanent magnet, 2231-the ninth main permanent magnet, 2232-the tenth Main permanent magnet, 2241-third iron yoke, 2242-fourth iron yoke

207-第七音圈电机，208-第八音圈电机，209-第九音圈电机，2010第十音圈电机207-7th voice coil motor, 208-8th voice coil motor, 209-9th voice coil motor, 2010 10th voice coil motor

231-第三线圈组件，232-外磁环，233-内磁环，234磁柱231-the third coil assembly, 232-outer magnetic ring, 233-inner magnetic ring, 234 magnetic column

401-第一电涡流传感器，402-第二电涡流传感器，403-第三电涡流传感器，404-第四电涡流传感器，405-第五电涡流传感器，406-第六电涡流传感器，407-第七电涡流传感器401-first eddy current sensor, 402-second eddy current sensor, 403-third eddy current sensor, 404-fourth eddy current sensor, 405-fifth eddy current sensor, 406-sixth eddy current sensor, 407- Seventh eddy current sensor

300-光栅尺测量系统300- grating ruler measuring system

301-光栅尺，301-光栅尺安装架，302-光栅尺调整装置，303-光栅尺，304-读数头，305-光栅尺零点标记301- grating ruler, 301- grating ruler mounting frame, 302- grating ruler adjusting device, 303- grating ruler, 304-reading head, 305- grating ruler zero mark

900-激光尺，901-反射镜900-Laser ruler, 901-Reflector

具体实施方式 Detailed ways

下面结合附图对本发明的原理、结构和工作过程来进一步说明本发明。The present invention will be further described below in conjunction with the accompanying drawings to the principle, structure and working process of the present invention.

图1为本发明定位装置的结构示意图（轴测图）。本发明定位装置包括基架001、一个微动平台200、第一粗动台1001、第二粗动台1002，该两个粗动台对称布置在微动平台200两侧。Fig. 1 is a structural schematic diagram (axonometric view) of the positioning device of the present invention. The positioning device of the present invention includes a base frame 001 , a fine movement platform 200 , a first coarse movement platform 1001 , and a second coarse movement platform 1002 , and the two coarse movement platforms are symmetrically arranged on both sides of the fine movement platform 200 .

第一粗动台1001与第二粗动台1002结构相同，图2为第二粗动台1002结构轴测图，图3为第二粗动台1002侧视图。第二粗动1002包括一个直线电机101、一个连接元件104、一个气浮支撑元件102和一个气浮导向元件103。连接元件104与直线电机固接，气浮支撑元件102与直线电机固连，气浮导向元件103与气浮支撑元件102固连。The structure of the first coarse motion table 1001 is the same as that of the second coarse motion table 1002 , FIG. 2 is an isometric view of the structure of the second coarse motion table 1002 , and FIG. 3 is a side view of the second coarse motion table 1002 . The second coarse movement 1002 includes a linear motor 101 , a connecting element 104 , an air bearing supporting element 102 and an air bearing guiding element 103 . The connecting element 104 is fixedly connected to the linear motor, the air-floating supporting element 102 is fixedly connected to the linear motor, and the air-floating guiding element 103 is fixedly connected to the air-floating supporting element 102 .

气浮支撑元件102的下表面与基架001的上表面正面相对，支撑元件102下表面有气孔，气孔轴线沿Z轴方向，气浮支撑元件102与基架001之间形成沿Z轴方向的气浮支撑，气浮支撑方式采用真空预载的方式；气浮导向元件103的侧面与基架001的侧面正面相对，气浮导向元件103的侧面有气孔，气孔的轴线沿X轴方向，气浮导向元件103与基架001之间形成气浮导向，导向方向沿Y轴方向，气浮方式为真空预载的方式。The lower surface of the air bearing support element 102 is opposite to the upper surface of the base frame 001. There are air holes on the lower surface of the support element 102. Air-floating support, the air-floating support method adopts the vacuum preloading method; the side of the air-floating guiding element 103 is opposite to the side of the base frame 001, and the side of the air-floating guiding element 103 has air holes, and the axis of the air holes is along the X-axis direction. An air-floating guide is formed between the floating guide element 103 and the base frame 001, the guiding direction is along the Y-axis direction, and the air-floating method is a vacuum preloading method.

图4为微动台200结构轴测图，微动台200由沿Y轴方向驱动的第一音圈电机201、第二音圈电机202、第三音圈电机203、第四音圈电机204实现沿Y轴方向的运动及绕Z轴的转动。由沿X轴方向驱动的第五音圈电机205、第六音圈电机206实现沿X轴的运动。由沿Z轴驱动的第七音圈电机207、第八音圈电机208、第九音圈电机209、第十音圈电机2010实现微动台200沿Z轴的运动和绕X轴、Y轴的转动。因此通过这十个音圈电机实现微动平台200的六自由度运动。Fig. 4 is a structural axonometric view of the micro-motion stage 200, the micro-motion stage 200 is driven by a first voice coil motor 201, a second voice coil motor 202, a third voice coil motor 203, and a fourth voice coil motor 204 along the Y-axis direction Realize movement along the Y axis and rotation around the Z axis. The movement along the X-axis is realized by the fifth voice coil motor 205 and the sixth voice coil motor 206 driven along the X-axis direction. By the seventh voice coil motor 207, the eighth voice coil motor 208, the ninth voice coil motor 209, and the tenth voice coil motor 2010 driven along the Z axis, the movement of the micro-motion stage 200 along the Z axis and the movement around the X and Y axes are realized. rotation. Therefore, the six-degree-of-freedom movement of the micro-motion platform 200 is realized by the ten voice coil motors.

第一音圈电机201、第二音圈电机202、第三音圈电机203、第四音圈电机204结构相同，图5为第一音圈电机201结构剖视图。第一音圈电机201包括第一永磁体组件212、第二永磁体组件213、第一线圈组件211。第一线圈组件211位于第一永磁体组件212与第二永磁体组件213之间，并保留间隙。The first voice coil motor 201 , the second voice coil motor 202 , the third voice coil motor 203 , and the fourth voice coil motor 204 have the same structure. FIG. 5 is a cross-sectional view of the first voice coil motor 201 . The first voice coil motor 201 includes a first permanent magnet assembly 212 , a second permanent magnet assembly 213 , and a first coil assembly 211 . The first coil assembly 211 is located between the first permanent magnet assembly 212 and the second permanent magnet assembly 213 with a gap.

如图12所示，第一音圈电机201与第二音圈电机202的线圈组件固定在第一粗动台1001上，第一音圈电机201与第二音圈电机202的永磁体组件固定在微动平台200上。第三音圈电机203与第四音圈电机204的线圈组件固定在第二粗动台1002上，第三音圈电机203与第四音圈电机204的永磁体组件固定在微动平台200上。当第一音圈电机201、第二音圈电机202、第三音圈电机203、第四音圈电机204沿Y轴方向驱动力相同时，实现微动平台200沿Y轴运动，当该四个音圈电机沿Y轴方向驱动力不相同时，实现微动平台200绕Z轴的转动。As shown in Figure 12, the coil assembly of the first voice coil motor 201 and the second voice coil motor 202 is fixed on the first coarse motion table 1001, and the permanent magnet assembly of the first voice coil motor 201 and the second voice coil motor 202 is fixed On the micro-motion platform 200. The coil assemblies of the third voice coil motor 203 and the fourth voice coil motor 204 are fixed on the second coarse motion platform 1002 , and the permanent magnet assemblies of the third voice coil motor 203 and the fourth voice coil motor 204 are fixed on the micro motion platform 200 . When the first voice coil motor 201, the second voice coil motor 202, the third voice coil motor 203, and the fourth voice coil motor 204 have the same driving force along the Y-axis direction, the micro-motion platform 200 can move along the Y-axis. When the driving forces of the two voice coil motors are different along the Y-axis direction, the rotation of the micro-motion platform 200 around the Z-axis is realized.

如图4所示，第五音圈电机205与第六音圈电机206结构相同，且位于沿X轴的同一条直线上。图6为第五音圈电机220轴测图，图7为第五音圈电机220剖视图。如图12所示，第五音圈电机205的线圈组件固定在第一粗动台1001上，其永磁体组件固定在微动台200上，第六音圈电机206的线圈组件固定在第二粗动台1002上，其永磁体组件固定在微动台200上。线圈通电时，第五音圈电机205与第六音圈电机206驱动微动台200沿X轴方向运动。As shown in FIG. 4 , the fifth voice coil motor 205 and the sixth voice coil motor 206 have the same structure and are located on the same straight line along the X axis. FIG. 6 is a perspective view of the fifth voice coil motor 220 , and FIG. 7 is a cross-sectional view of the fifth voice coil motor 220 . As shown in Figure 12, the coil assembly of the fifth voice coil motor 205 is fixed on the first coarse motion table 1001, its permanent magnet assembly is fixed on the micro motion table 200, and the coil assembly of the sixth voice coil motor 206 is fixed on the second coarse motion table 1001. On the coarse motion table 1002 , its permanent magnet assembly is fixed on the fine motion table 200 . When the coil is energized, the fifth voice coil motor 205 and the sixth voice coil motor 206 drive the micro-motion stage 200 to move along the X-axis direction.

第七音圈电机207、第八音圈电机208、第九音圈电机209、第十音圈电机2010的结构相同。图8为第七音圈电机207结构轴测图。第七音圈电机207包括外磁环232、内磁环233、圆柱线圈组件231、重力平衡磁柱234。The structures of the seventh voice coil motor 207 , the eighth voice coil motor 208 , the ninth voice coil motor 209 , and the tenth voice coil motor 2010 are the same. FIG. 8 is a structural isometric view of the seventh voice coil motor 207 . The seventh voice coil motor 207 includes an outer magnetic ring 232 , an inner magnetic ring 233 , a cylindrical coil assembly 231 , and a gravity balance magnetic column 234 .

图9为第七音圈电机207中外磁环232主视图。图10为第七音圈电机207中内磁环233主视图。图11为第七音圈电机207中磁柱234主视图。外磁环232与内磁环233的轴线沿Z轴方向，外磁环232与内磁环233充磁方向相同，沿径向方向且由圆环外表面指向圆心。圆柱线圈231位于内磁环233与外磁环232之间，绕线轴线沿Z轴方向。磁柱234的轴线沿Z轴方向，充磁方向沿Z轴正方向。如图4所示，第七音圈电机207与第八音圈电机208的线圈组件固定于第一粗动台1001上，且位于同一条沿Y轴的直线上，第九音圈电机209与第十音圈电机2010的线圈组件固定于第二粗动台1002上，且位于同一条沿Y轴的直线上。该四个音圈电机的外磁环232、内磁环233和磁柱234固定在微动平台200上。圆柱线圈231通电时，通电线圈231与内磁环233、外磁环232之间产生洛仑兹力，当该四个音圈电机产生的沿Z轴洛仑兹力大小相同时，实现微动平台200沿Z轴方向运动，当该四个音圈电机产生的洛仑兹力大小不同时，实现微动平台200绕X轴转动与绕Y轴转动。线圈通电时，通电线圈231与磁柱234之间产生洛仑兹力，改变电流的大小使得产生的洛仑兹力与微动台200的重力相等，达到微动台200重力平衡的目的。FIG. 9 is a front view of the outer magnetic ring 232 in the seventh voice coil motor 207 . FIG. 10 is a front view of the inner magnetic ring 233 in the seventh voice coil motor 207 . FIG. 11 is a front view of the magnetic column 234 in the seventh voice coil motor 207 . The axes of the outer magnetic ring 232 and the inner magnetic ring 233 are along the Z-axis direction, and the magnetization direction of the outer magnetic ring 232 and the inner magnetic ring 233 is the same, along the radial direction and pointing from the outer surface of the ring to the center of the circle. The cylindrical coil 231 is located between the inner magnetic ring 233 and the outer magnetic ring 232 , and the winding axis is along the Z axis. The axis of the magnetic column 234 is along the Z-axis direction, and the magnetization direction is along the positive direction of the Z-axis. As shown in Figure 4, the coil assemblies of the seventh voice coil motor 207 and the eighth voice coil motor 208 are fixed on the first coarse motion table 1001, and are located on the same straight line along the Y axis, and the ninth voice coil motor 209 and The coil assembly of the tenth voice coil motor 2010 is fixed on the second coarse motion table 1002 and located on the same straight line along the Y axis. The outer magnetic ring 232 , the inner magnetic ring 233 and the magnetic column 234 of the four voice coil motors are fixed on the micro-motion platform 200 . When the cylindrical coil 231 is energized, a Lorentz force is generated between the energized coil 231, the inner magnetic ring 233, and the outer magnetic ring 232. When the Lorentz forces generated by the four voice coil motors along the Z axis are the same in size, micro-motion is realized. The platform 200 moves along the Z axis. When the Lorentz forces generated by the four voice coil motors are different in magnitude, the micro-motion platform 200 can rotate around the X axis and around the Y axis. When the coil is energized, a Lorentz force is generated between the energized coil 231 and the magnetic column 234, and the magnitude of the current is changed to make the generated Lorentz force equal to the gravity of the micro-motion table 200, so as to achieve the purpose of gravity balance of the micro-motion table 200.

第一粗动台1001、第二粗动台1002、微动台200的位置测量方案如下：The position measurement schemes of the first coarse motion table 1001, the second coarse motion table 1002, and the micro motion table 200 are as follows:

光栅尺测量装置包括结构相同的第一光栅尺3001测量装置和第二光栅尺测量装置3002，图13为第一光栅尺测量装置3001轴测图，图14为第一光栅尺测量装置3001主视图。该两个光栅测量装置沿X轴方向对称布置在两个粗动台的两侧。每个光栅测量装置包括一个光栅尺303、一个光栅尺安装架301、一个读数头304和光栅尺调整装置302。光栅尺调整装置302固定于基架001上，光栅尺安装架301与光栅尺调整装置302固定连接，通过调整光栅尺调整架302使光栅尺安装架301的长边方向沿Y轴方向。光栅尺303粘贴固定于光栅尺安装架301表面上，光栅条纹沿Y轴方向。光栅读数头304与直线电机101连接，当直线电机101沿Y轴运动时，光栅尺测量装置用来检测第一粗动台1001与第二粗动台1002沿Y轴方向的位置。The grating ruler measuring device includes a first grating ruler measuring device 3001 and a second grating ruler measuring device 3002 with the same structure. Fig. 13 is an axonometric view of the first grating ruler measuring device 3001, and Fig. 14 is a front view of the first grating ruler measuring device 3001 . The two grating measuring devices are symmetrically arranged on both sides of the two coarse motion tables along the X-axis direction. Each grating measuring device includes a grating ruler 303 , a grating ruler mounting frame 301 , a reading head 304 and a grating ruler adjusting device 302 . The grating scale adjustment device 302 is fixed on the base frame 001, and the grating scale installation frame 301 is fixedly connected with the grating scale adjustment device 302. By adjusting the grating scale adjustment frame 302, the long side direction of the grating scale installation frame 301 is along the Y-axis direction. The grating ruler 303 is pasted and fixed on the surface of the grating ruler mounting frame 301, and the grating stripes are along the Y-axis direction. The grating reading head 304 is connected with the linear motor 101. When the linear motor 101 moves along the Y axis, the grating measuring device is used to detect the positions of the first coarse motion table 1001 and the second coarse motion table 1002 along the Y axis.

如图15、图16所示，微动台200与第一粗动台1001、第二粗动台1002的相对位置测量系统中包括七个电涡流传感器，每个电涡流传感器安装在第一粗动台1001、第二粗动台1002上，测量金属导体安装在微动台200上。第一电涡流传感器401、第二电涡流传感器402安装在第一粗动台1001上，并位于沿Y轴的一条直线上，测量微动台200与粗动台100之间沿x轴方向相对距离，第一电涡流传感器401与第二电涡流传感器402信号的差动可测量微动台200与两个粗动台之间绕Z轴的相对转角。第三电涡流传感器403、第四电涡流传感器404分别安装在第一粗动台1001与第二粗动台1002上，并位于一条沿X轴方向的直线上，分别测量微动台200相对于第一粗动台1001、第二粗动台1002沿Y轴方向的距离。第五电涡流传感器405、第六电涡流传感器406安装在第一粗动台1001上，并位于一条沿Y轴方向的直线上，第七电涡流传感器407安装在第二粗动台1002上，且与第五电涡流传感器405位于一条沿X轴的直线上。第五电涡流传感器405、第六电涡流传感器406、第七电涡流传感器407用于测量微动台200与第一粗动台1001、第二粗动台1002之间沿Z轴方向距离，第五电涡流传感器405与第六电涡流传感器406的差动测量微动台200绕X轴转角，第五电涡流传感器405、第七电涡流传感器407的差动测量微动台200绕Y轴的转角。As shown in Fig. 15 and Fig. 16, the relative position measurement system of the micro-motion table 200 and the first coarse motion table 1001 and the second coarse motion table 1002 includes seven eddy current sensors, and each eddy current sensor is installed on the first coarse motion table. On the moving stage 1001 and the second coarse moving stage 1002 , the measuring metal conductor is installed on the fine moving stage 200 . The first eddy current sensor 401 and the second eddy current sensor 402 are installed on the first coarse motion table 1001, and are located on a straight line along the Y axis, and measure the relative distance between the fine motion table 200 and the coarse motion table 100 along the x-axis direction. The distance, the signal difference between the first eddy current sensor 401 and the second eddy current sensor 402 can measure the relative rotation angle around the Z axis between the micro motion table 200 and the two coarse motion tables. The third eddy current sensor 403 and the fourth eddy current sensor 404 are installed on the first coarse motion table 1001 and the second coarse motion table 1002 respectively, and are located on a straight line along the X-axis direction, respectively measure the relative The distance between the first coarse motion table 1001 and the second coarse motion table 1002 along the Y-axis direction. The fifth eddy current sensor 405 and the sixth eddy current sensor 406 are installed on the first coarse motion table 1001 and are located on a straight line along the Y-axis direction, the seventh eddy current sensor 407 is installed on the second coarse motion table 1002, And it is located on a straight line along the X-axis with the fifth eddy current sensor 405 . The fifth eddy-current sensor 405, the sixth eddy-current sensor 406, and the seventh eddy-current sensor 407 are used to measure the distance between the micro-motion table 200 and the first coarse motion table 1001 and the second coarse motion table 1002 along the Z-axis direction. The differential measurement of the five eddy current sensors 405 and the sixth eddy current sensor 406 rotates around the X-axis, and the differential measurement of the fifth eddy current sensor 405 and the seventh eddy current sensor 407 rotates around the Y axis. corner.

图17为激光测量装置示意图，激光尺900测量微动台200沿Y轴方向绝对位置。FIG. 17 is a schematic diagram of a laser measuring device. The laser ruler 900 measures the absolute position of the micro-motion table 200 along the Y-axis direction.

两个粗动台以光栅尺测量装置为测量传感器，将整体定位装置移动到光栅尺零点标记305处，如图18所示，以此时微动台200的质心为坐标系并记录激光尺读数A。The two coarse motion tables use the grating ruler measuring device as the measurement sensor, and move the overall positioning device to the zero point mark 305 of the grating ruler, as shown in Figure 18, take the centroid of the micro motion stage 200 as the coordinate system and record the reading of the laser ruler a.

微动台200六自由度位置计算如下：The six-degree-of-freedom position of the micro-motion stage 200 is calculated as follows:

Y轴方向位置：微动台200沿Y轴位置采用激光尺测量，如图19所示，当微动台由初始点运动到某一位置时，激光尺读数为B，则微动台200在全局坐标系下的沿Y轴方向位置为Position in the Y-axis direction: the position of the micro-motion stage 200 along the Y-axis is measured by a laser ruler, as shown in Figure 19, when the micro-motion stage moves from the initial point to a certain position, the reading of the laser ruler is B, and the micro-motion stage 200 is at The position along the Y axis in the global coordinate system is

y=B-Ay=B-A

X轴方向位置：微动台200沿X轴方向位置由第一电涡流传感器401、第二电涡流传感器402测得，第一电涡流传感器401信号为x₄₀₁，第二电涡流传感器402信号为x₄₀₂，微动台200沿X轴方向位置为：X-axis direction position: the position of the micro-motion table 200 along the X-axis direction is measured by the first eddy current sensor 401 and the second eddy current sensor 402, the signal of the first eddy current sensor 401 is x ₄₀₁ , and the signal of the second eddy current sensor 402 is x ₄₀₂ , the position of the micro-motion stage 200 along the X-axis direction is:

X=(x₄₀₁+x₄₀₂)/2X=(x ₄₀₁ +x ₄₀₂ )/2

Z轴方向位置：微动台200沿Z轴方向位置由第五电涡流传感器405、第六电涡流传感器406与第七电涡流传感器407测得，第五电涡流传感器405信号为x₄₀₅，第六电涡流传感器406信号为x₄₀₆，第七电涡流传感器407信号为x₄₀₇，即微动台200沿Z轴方向位置为：Z-axis direction position: the position of the micro-motion table 200 along the Z-axis direction is measured by the fifth eddy current sensor 405, the sixth eddy current sensor 406 and the seventh eddy current sensor 407, the signal of the fifth eddy current sensor 405 is x ₄₀₅ , the The signal of the six eddy current sensors 406 is x ₄₀₆ , and the signal of the seventh eddy current sensor 407 is x ₄₀₇ , that is, the position of the micro-motion table 200 along the Z axis is:

Z=(x₄₀₅+x₄₀₆+x₄₀₇)/3Z=(x ₄₀₅ +x ₄₀₆ +x ₄₀₇ )/3

绕X轴转角：以逆时针为正，微动台200绕X轴转角由第五电涡流传感器405、第六电涡流传感器406测得，即：Rotation angle around the X-axis: positive counterclockwise, the rotation angle of the micro-motion stage 200 around the X-axis is measured by the fifth eddy current sensor 405 and the sixth eddy current sensor 406, namely:

θ_X=(x₄₀₆-x₄₀₅)/L₂ θ _X =(x ₄₀₆ -x ₄₀₅ )/L ₂

绕Y轴转角：以逆时针为正，微动台200绕Y轴转角由第五电涡流传感器405、第七电涡流传感器407测得，即：Rotation angle around the Y axis: positive counterclockwise, the rotation angle of the micro-motion table 200 around the Y axis is measured by the fifth eddy current sensor 405 and the seventh eddy current sensor 407, namely:

θ_Y=(x₄₀₇-x₄₀₅)/L₃ θ _Y =(x ₄₀₇ -x ₄₀₅ )/L ₃

绕Z轴转角：以逆时针为正，微动台200绕Z轴转角由第一电涡流传感器401、第二电涡流传感器402测得，即：Rotation angle around the Z axis: positive counterclockwise, the rotation angle of the micro-motion table 200 around the Z axis is measured by the first eddy current sensor 401 and the second eddy current sensor 402, namely:

θ_Z=(x₄₀₂-x₄₀₁)/L₁ θ _Z =(x ₄₀₂ -x ₄₀₁ )/L ₁

第一粗动台1001与微动台200之间沿Y轴相对位置由第三电涡流传感器403测得，即：The relative position between the first coarse motion table 1001 and the fine motion table 200 along the Y axis is measured by the third eddy current sensor 403, namely:

x_相1＝x₄₀₃ x _{phase 1} = x ₄₀₃

第二粗动台1002与微动台200之间沿Y轴相对位置由第四电涡流传感器404测得，即：The relative position between the second coarse motion table 1002 and the fine motion table 200 along the Y axis is measured by the fourth eddy current sensor 404, namely:

x_相2＝x₄₀₄ x _{phase 2} = x ₄₀₄

各粗动台与微动台200的控制框图如图所示。测量装置测量得到的信号通过A/D转化将数字量输入到计算机中，利用设计的控制方法处理这些数字信号，并将计算得到的数字量输出给D/A卡，经过D/A转化后的模拟量输入到各音圈电机和直线电机的驱动器中，驱动器根据这些模拟量值给各音圈电机的线圈输入电流，根据洛仑兹力法则各音圈电机和直线电机驱动微动台和各粗动台运动，微动台与各粗动台的位置由测量装置测量得到。The control block diagrams of each coarse motion stage and the fine motion stage 200 are shown in the figure. The signal measured by the measuring device is input into the computer through A/D conversion, and the digital signal is processed by the designed control method, and the calculated digital value is output to the D/A card, and the D/A converted The analog values are input to the drivers of the voice coil motors and linear motors, and the drivers input currents to the coils of the voice coil motors according to these analog values, and the voice coil motors and linear motors drive the micro-motion stage and each The movement of the coarse motion table, the positions of the fine motion table and each coarse motion table are measured by the measuring device.

在微动台以及粗动台的运动控制中，采用了一种运动控制方法，该控制方法包括如下步骤：In the motion control of the fine motion table and the coarse motion table, a motion control method is adopted, and the control method includes the following steps:

${F f}_{301301} = = {F f}_{302302} = = {k k}_{p p 301301} {e e}_{y the y} + + {k k}_{d d 301301} {\overset{\cdot \cdot}{e e}}_{y the y} + + {c c}_{301301} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{y the y} + + {a a}_{301301} {e e}_{y the y}}{| | {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {e e}_{y the y} | | + + {b b}_{301301}} + + {k k}_{301301} {e e}_{{θ θ}_{z z}} + + {k k}_{301301} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{z z}}$

${F f}_{305305} = = {F f}_{306306} = = {k k}_{p p 305305} {e e}_{x x} + + {k k}_{d d 305305} {\overset{\cdot \cdot}{e e}}_{x x} + + {c c}_{305305} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{x x} + + {a a}_{305305} {e e}_{x x}}{| | {\overset{\cdot \cdot}{e e}}_{x x} + + {{a a}_{305305} e e}_{x x} | | + + {b b}_{305305}}$

${F f}_{307307} = = {k k}_{p p 307307} {e e}_{z z} + + {k k}_{d d 307307} {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {c c}_{307307} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{307307} {e e}_{z z}}{| | {\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{307307} {e e}_{y the y} | | + + {b b}_{307307}} + + {k k}_{307307} {e e}_{{θ θ}_{x x}} + + {k k}_{307307} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{x x}} + + {k k}_{307307} {e e}_{{θ θ}_{y the y}} + + {k k}_{307307} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{y the y}}$

${F f}_{308308} = = {k k}_{p p 308308} {e e}_{z z} + + {k k}_{d d 308308} {\overset{\cdot \cdot}{e e}}_{z z} + + {c c}_{308308} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{308308} {e e}_{z z}}{| | {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{308308} {e e}_{z z} | | + + {b b}_{308308}} + + {k k}_{308308} {e e}_{{θ θ}_{x x}} + + {k k}_{308308} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{x x}} - - {k k}_{308308} {e e}_{{θ θ}_{y the y}} - - {k k}_{308308} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{y the y}}$

${F f}_{309309} = = {k k}_{p p 309309} {e e}_{z z} + + {k k}_{d d 309309} {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {c c}_{309309} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{309309} {e e}_{z z}}{| | {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{309309} {e e}_{z z} | | + + {b b}_{309309}} - - {k k}_{309309} {e e}_{{θ θ}_{x x}} - - {k k}_{309309} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{x x}} + + {k k}_{309309} {e e}_{{θ θ}_{y the y}} + + {k k}_{309309} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{y the y}}$

${F f}_{30103010} = = {k k}_{p p 30103010} {e e}_{z z} + + {k k}_{d d 30103010} {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {c c}_{30103010} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{30103010} {e e}_{z z}}{| | {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{30103010} {e e}_{z z} | | + + {b b}_{30103010}} - - {k k}_{30103010} {e e}_{{θ θ}_{x x}} - - {k k}_{30103010} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{x x}} - - {k k}_{30103010} {e e}_{{θ θ}_{y the y}} - - {k k}_{30103010} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{y the y}}$

e_y=y_d-y，y_d为微动台沿Y轴方向目标位置，y为激光尺反馈信号，为e_y对时间的一阶导数；e_x=x_d-x，x_d为微动台沿X轴的目标位置，x为反馈信号，

为e_z对时间的一阶倒数；

θ_xd为微动台绕X轴的目标位置，θ_x为反馈信号，

为

对时间的一阶倒数；

θ_yd为微动台绕Y轴的目标位置，θ_y为反馈信号，

为

对时间的一阶倒数；

θ_zd为微动台绕Z轴的目标转角，θ_z为反馈信号，

为

对时间的一阶倒数；e _y =y _d -y, y _d is the target position of the micro-motion table along the Y-axis direction, y is the feedback signal of the laser encoder, is the first derivative of e _y to time; e _x =x _d -x, x _d is the target position of the micro-motion stage along the X axis, x is the feedback signal,

is the first-order reciprocal of e _z to time;

for

first-order reciprocal of time;

for

first-order reciprocal of time;

for

first-order reciprocal of time;

粗动台仅具有y方向的自由度，其控制系统要保持粗动台与微动台在y方向的相对位置不变，设第一粗动台与微动台相对位置保持y_cd1不变，第二粗动台与微动台相对位置保持y_cd2不变。在两个粗动台的运动控制方法中，第一粗动台以第一音圈电机和第二音圈电机的输出力作为前馈，第三电涡流传感器信号为微动台与第一粗动台之间的位置偏差，以该偏差为反馈实现第一粗动台沿Y轴的运动；第二粗动台以第三音圈电机和第四音圈电机的输出力作为前馈，第四电涡流传感器信号为微动台与第二粗动台之间的位置偏差，以该偏差为反馈实现第二粗动台沿Y轴的运动，粗动台直线电机输出力按照以下公式计算：The coarse motion table only has the degree of freedom in the y direction, and its control system should keep the relative position of the coarse motion table and the fine motion table in the y direction unchanged, assuming that the relative position of the first coarse motion table and the micro motion table remains unchanged in y _cd1 , The relative position of the second coarse motion table and the fine motion table remains y _cd2 unchanged. In the motion control method of two coarse motion tables, the first coarse motion table uses the output force of the first voice coil motor and the second voice coil motor as feedforward, and the signal of the third eddy current sensor is the output force of the fine motion table and the first coarse motion table. The position deviation between the moving stages is used as feedback to realize the movement of the first coarse moving stage along the Y axis; the second coarse moving stage uses the output force of the third voice coil motor and the fourth voice coil motor as feedforward, and the first coarse moving stage The signal of the four-current eddy current sensor is the position deviation between the micro-motion table and the second coarse motion table, and the deviation is used as feedback to realize the movement of the second coarse motion table along the Y-axis. The output force of the linear motor of the coarse motion table is calculated according to the following formula:

${F f}_{10011001} = = {F f}_{302302} + + {F f}_{301301} + + {k k}_{p p 10011001} {e e}_{y the y 10011001} + + {k k}_{d d 10011001} {\overset{\cdot &Center Dot;}{e e}}_{y the y 10011001} + + {c c}_{10011001} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{y the y 10011001} + + {a a}_{10011001} {e e}_{y the y 10011001}}{| | {\overset{\cdot &Center Dot;}{e e}}_{y the y 10011001} + + {a a}_{10011001} {e e}_{y the y 10011001} | | + + {b b}_{10011001}}$

e_y1001=y_cd1-y_c1，y_cd1为第一粗动台与微动台目标相对位置，y_c1第三电涡流传感器反馈信号；为e_y1001第三电涡流传感器信号对时间的导数；e _y1001 =y _cd1 -y _c1 , y _cd1 is the relative position of the target of the first coarse motion table and the fine motion table, y _{c1 is} the feedback signal of the third eddy current sensor; is the derivative of e _y1001 third eddy current sensor signal to time;

e_y1002=y_cd2-y_c2，y_cd2为第二粗动台与微动台目标相对位置，y_c2第四电涡流传感器反馈信号；

为e_y1002对时间的导数；e _y1002 =y _cd2 -y _c2 , y _cd2 is the target relative position between the second coarse motion stage and the micro motion stage, y _{c2 is} the feedback signal of the fourth eddy current sensor;

is the derivative of e _y1002 with respect to time;

Claims

1. A non-contact coarse and fine motion lamination positioning system, characterized in that: the control system includes a positioning device, a position measuring device, a driving device and a control unit;

The positioning device includes a base frame, a fine movement stage and two coarse movement stages symmetrically arranged on both sides of the fine movement stage, and there is no mechanical connection between the two coarse movement stages, or between the coarse movement stage and the fine movement stage;

The position measuring device includes:

1) A laser ruler for measuring the absolute position of the center of mass of the micro-motion stage along the Y-axis;

2) Two grating measuring devices, each grating measuring device includes a grating ruler and a reading head, used to measure the displacement of the coarse motion table along the Y-axis direction;

3) Seven eddy current sensors, of which:

The first eddy current sensor and the second eddy current sensor are installed on the first coarse motion table, arranged on a straight line along the Y axis, and used to measure the relative position of the fine motion table and the coarse motion table along the X axis, the first and The differential action of the measured value of the second eddy current sensor is used as the rotation angle of the micro-motion table around the Z axis;

The third eddy current sensor is installed on the first coarse motion table to measure the relative position between the first coarse motion table and the fine motion table along the Y-axis direction; the fourth eddy current sensor is installed on the second coarse motion table to measure the first coarse motion table 2. The relative position between the coarse motion table and the fine motion table along the Y-axis direction;

The fifth eddy current sensor and the sixth eddy current sensor are installed on the first coarse motion table and are located on a straight line along the Y axis, and the seventh eddy current sensor is installed on the second coarse motion table and connected to the fifth eddy current sensor The sensors are located on a straight line along the X-axis; the three eddy-current sensors are used to measure the absolute position of the micro-motion stage along the Z-axis, and the difference between the measured values of the fifth eddy-current sensor and the sixth eddy-current sensor is used as the The rotation angle of the X-axis, the difference between the measured values of the fifth eddy-current sensor and the seventh eddy-current sensor is taken as the rotation angle of the micro-motion table around the Y-axis;

The drive unit includes:

1) Ten voice coil motors

The micro-motion stage includes four voice coil motors driven along the Y axis, two voice coil motors driven along the X axis, and four voice coil motors driven along the Z axis; the first voice coil motor, the second voice coil The coil assembly of the motor and the fifth voice coil motor is fixed on the first coarse motion table, the permanent magnet assembly is fixed on the fine motion table, the coil assemblies of the third voice coil motor, the fourth voice coil motor, and the sixth voice coil motor are fixed On the second coarse motion stage, the permanent magnet assembly is fixed on the fine motion stage;

The seventh voice coil motor, the eighth voice coil motor, the ninth voice coil motor, and the tenth voice coil motor have the same structure, including an outer magnetic ring, an inner magnetic ring, a cylindrical coil assembly, and a gravity balance magnetic column; the outer magnetic ring and the inner magnetic ring The axis of the ring is along the Z-axis direction, the outer magnetic ring and the inner magnetic ring are magnetized in the same direction, along the radial direction and pointing from the outer surface of the ring to the center of the circle; the cylindrical coil is located between the inner magnetic ring and the outer magnetic ring, and the winding axis is along the Z-axis direction; the axis of the magnetic column is along the Z-axis direction, and the magnetization direction is along the positive direction of the Z-axis; the cylindrical coil assemblies of the seventh voice coil motor and the eighth voice coil motor are fixed on the first coarse motion table, and the ninth voice coil The motor and the cylindrical coil assembly of the tenth voice coil motor are fixed on the second coarse motion table;

2) Two linear motors

Two linear motors are respectively used to drive the first coarse motion table and the second coarse motion table;

The control unit includes an industrial computer containing a control program, a counting card, an A/D card, a D/A card and a driver, the counting card collects the incremental signals of the grating ruler and the laser ruler, and the A/D card collects the signals of the eddy current sensor , the counting card and the A/D card input the collected signal to the industrial computer, and the industrial computer uses the signal as a position feedback signal to control the micro-motion table and the coarse motion table, and the control command is output to the driver through the D/A card. The driving force outputs current to the motor to realize the movement of the micro-motion table and the coarse motion table.

2. A motion control method of the non-contact coarse and fine motion lamination positioning system as claimed in claim 1, characterized in that said control method comprises the following steps:

1) At the beginning of the servo cycle, set the six-degree-of-freedom displacement of the micro-motion table, where x _d is the displacement along the X-axis, y _d is the displacement along the Y-axis, z _d is the displacement along the Z-axis, θ _xd is the angular displacement around the X axis, θ _yd is the angular displacement around the Y axis, and θ _zd is the angular displacement around the Z axis; The signal of the eddy current sensor is used as the feedback signal of the control loop of the micro-motion stage, and the signal of the eddy current sensor collected by the A/D card is used as the feedback signal of the control loop of the coarse motion stage;

2) Solve the corresponding output of each voice coil motor according to the set six-degree-of-freedom displacement of the micro-motion table and the feedback signal, among which the first voice coil motor, the second voice coil motor, the third voice coil motor and the fourth voice coil motor Control the degree of freedom of the micro-motion table moving along the Y direction and rotating around the Z-axis, the fifth voice coil motor and the sixth voice coil motor control the degree of freedom of the micro-motion table moving along the X direction, the seventh voice coil motor, the eighth voice coil The motor, the ninth voice coil motor and the tenth voice coil motor control the degree of freedom of the micro-motion table moving in the Z direction, rotating around the X axis and rotating around the Y axis. The output force of the motor is calculated according to the following formula:

{F f}_{301301} = = {F f}_{302302} = = {k k}_{p p 301301} {e e}_{y the y} + + {k k}_{d d 301301} {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {c c}_{301301} \cdot \cdot \frac{{\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {a a}_{301301} {e e}_{y the y}}{| | {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {e e}_{y the y} | | + + {b b}_{301301}} + + {k k}_{301301} {e e}_{{θ θ}_{z z}} + + {k k}_{301301} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{z z}}

{F f}_{303303} = = {F f}_{304304} = = {k k}_{p p 303303} {e e}_{y the y} + + {k k}_{d d 303303} {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {c c}_{303303} \cdot &Center Dot; \frac{{\overset{\cdot \cdot}{e e}}_{y the y} + + {a a}_{303303} {e e}_{y the y}}{| | {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {e e}_{y the y} | | + + {b b}_{303303}} - - {k k}_{303303} {e e}_{{θ θ}_{z z}} - - {k k}_{303303} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{z z}}

{F f}_{305305} = = {F f}_{306306} = = {k k}_{p p 305305} {e e}_{x x} + + {k k}_{d d 305305} {\overset{\cdot &Center Dot;}{e e}}_{x x} + + {c c}_{305305} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{x x} + + {a a}_{305305} {e e}_{x x}}{| | {\overset{\cdot &Center Dot;}{e e}}_{x x} + + {{a a}_{305305} e e}_{x x} | | + + {b b}_{305305}}

{F f}_{307307} = = {k k}_{p p 307307} {e e}_{z z} + + {k k}_{d d 307307} {\overset{\cdot &Center Dot;}{e e}}_{y the y} + + {c c}_{307307} \cdot &Center Dot; \frac{{\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{307307} {e e}_{z z}}{| | {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{307307} {e e}_{y the y} | | + + {b b}_{307307}} + + {k k}_{307307} {e e}_{{θ θ}_{x x}} + + {k k}_{307307} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{x x}} + + {k k}_{307307} {e e}_{{θ θ}_{y the y}} + + {k k}_{307307} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{y the y}}

{F f}_{308308} = = {k k}_{p p 308308} {e e}_{z z} + + {k k}_{d d 308308} {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {c c}_{308308} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{308308} {e e}_{z z}}{| | {\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{308308} {e e}_{z z} | | + + {b b}_{308308}} + + {k k}_{308308} {e e}_{{θ θ}_{x x}} + + {k k}_{308308} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{x x}} - - {k k}_{308308} {e e}_{{θ θ}_{y the y}} - - {k k}_{308308} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{y the y}}

{F f}_{309309} = = {k k}_{p p 309309} {e e}_{z z} + + {k k}_{d d 309309} {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {c c}_{309309} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{309309} {e e}_{z z}}{| | {\overset{\cdot &Center Dot;}{e e}}_{z z} + + {a a}_{309309} {e e}_{z z} | | + + {b b}_{309309}} - - {k k}_{309309} {e e}_{{θ θ}_{x x}} - - {k k}_{309309} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{x x}} + + {k k}_{309309} {e e}_{{θ θ}_{y the y}} + + {k k}_{309309} {\overset{\cdot &Center Dot;}{e e}}_{{θ θ}_{y the y}}

{F f}_{30103010} = = {k k}_{p p 30103010} {e e}_{z z} + + {k k}_{d d 30103010} {\overset{\cdot \cdot}{e e}}_{z z} + + {c c}_{30103010} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{30103010} {e e}_{z z}}{| | {\overset{\cdot \cdot}{e e}}_{z z} + + {a a}_{30103010} {e e}_{z z} | | + + {b b}_{30103010}} - - {k k}_{30103010} {e e}_{{θ θ}_{x x}} - - {k k}_{30103010} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{x x}} - - {k k}_{30103010} {e e}_{{θ θ}_{y the y}} - - {k k}_{30103010} {\overset{\cdot \cdot}{e e}}_{{θ θ}_{y the y}}

Among them: F ₃₀₁ is the output force of the first voice coil motor, F ₃₀₂ is the output force of the second voice coil motor, F ₃₀₃ is the output force of the third voice coil motor, F ₃₀₄ is the output force of the fourth voice coil motor, F ₃₀₅ is the output force of the fifth voice coil motor The output force of the voice coil motor, F ₃₀₆ is the output force of the sixth voice coil motor, F ₃₀₇ is the output force of the seventh voice coil motor, F ₃₀₈ is the output force of the eighth voice coil motor, F ₃₀₉ is the output force of the ninth voice coil motor, F ₃₀₁₀ is the output force of the tenth voice coil motor;

k _p301 , k _p303 , k _p305 , k _p307 , k _p308 , k _p309 , k _p3010 , k _d301 , k _d303 , k _d305 , k _d307 , k _d308 , k _d309 , k _d3010 , c ₃₀₁ , c ₃₀₃ , c ₃₀₅ , c ₃₀₇ , c ₃₀₈ , c ₃₀₉ , c ₃₀₁₀ , a ₃₀₁ , a ₃₀₃ , a ₃₀₅ , a ₃₀₇ , a ₃₀₈ , a ₃₀₉ , a ₃₀₁₀ , b ₃₀₁ , b ₃₀₃ , b ₃₀₅ , b ₃₀₇ , b ₃₀₈ , b ₃₀₉ , b ₃₀₁₀ , k ₃₀₁ , k ₃₀₃ , k ₃₀₅ , k ₃₀₇ , k ₃₀₈ , k ₃₀₉ , k ₃₀₁₀ are controller proportional coefficients;

e _y =y _d -y, y _d is the target position of the micro-motion table along the Y-axis direction, y is the feedback signal of the laser encoder,

is the first-order reciprocal of e _x to time; e _z =z _d -z, z _d is the target position of the micro-motion stage along the Z axis, z is the feedback signal, is the first-order reciprocal of e _z to time; θ _xd is the target position of the micro-motion table around the X-axis, θ _x is the feedback signal,

for

first-order reciprocal of time;

for

first-order reciprocal of time;

for

first-order reciprocal of time;

The coarse motion table only has the degree of freedom in the y direction, and its control system should keep the relative position of the coarse motion table and the fine motion table in the y direction unchanged, assuming that the relative position of the first coarse motion table and the micro motion table remains unchanged in y _cd1 , The relative position of the second coarse motion table and the fine motion table remains y _cd2 unchanged. In the motion control method of two coarse motion tables, the first coarse motion table uses the output force of the first voice coil motor and the second voice coil motor as feedforward, and the signal of the third eddy current sensor is the output force of the fine motion table and the first coarse motion table. The position deviation between the moving stages is used as feedback to realize the movement of the first coarse moving stage along the Y axis; the second coarse moving stage uses the output force of the third voice coil motor and the fourth voice coil motor as feedforward, and the second coarse moving stage The signal of the four-current eddy-current sensor is the position deviation between the micro-motion table and the second coarse motion table. The deviation is used as feedback to realize the movement of the second coarse motion table along the Y-axis. The output force of the linear motor of the coarse motion table is calculated according to the following formula:

{F f}_{10011001} = = {F f}_{302302} + + {F f}_{301301} + + {k k}_{p p 10011001} {e e}_{y the y 10011001} + + {k k}_{d d 10011001} {\overset{\cdot \cdot}{e e}}_{y the y 10011001} + + {c c}_{10011001} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{y the y 10011001} + + {a a}_{10011001} {e e}_{y the y 10011001}}{| | {\overset{\cdot &Center Dot;}{e e}}_{y the y 10011001} + + {a a}_{10011001} {e e}_{y the y 10011001} | | + + {b b}_{10011001}}

{F f}_{10021002} = = {F f}_{304304} + + {F f}_{303303} + + {k k}_{p p 10021002} {e e}_{y the y 10021002} + + {k k}_{d d 10021002} {\overset{\cdot &Center Dot;}{e e}}_{y the y 10021002} + + {c c}_{10021002} \cdot \cdot \frac{{\overset{\cdot \cdot}{e e}}_{y the y 10021002} + + {a a}_{10021002} {e e}_{y the y 10021002}}{| | {\overset{\cdot &Center Dot;}{e e}}_{y the y 10021002} + + {a a}_{10021002} {e e}_{y the y 10021002} | | + + {b b}_{10021002}}

Among them: F ₁₀₀₁ is the output force of the linear motor of the first coarse motion table, F ₁₀₀₂ is the output force of the linear motor of the second coarse motion table; k _p1001 , k _p1002 , k _d1001 , k _d1002 , c ₁₀₀₁ , c ₁₀₀₂ , a ₁₀₀₁ , a ₁₀₀₂ , b ₁₀₀₁ , and b ₁₀₀₂ are controller proportional coefficients; e _y1001 =y _cd1 -y _c1 , y _cd1 is the target relative position between the first coarse motion table and the fine motion table, and y _{c1 is} the feedback signal of the third eddy current sensor;

is the derivative of e _y1001 third eddy current sensor signal to time;

e _y1002 =y _cd2 -y _c2 , y _cd2 is the target relative position between the second coarse motion stage and the micro motion stage, y _{c2 is} the feedback signal of the fourth eddy current sensor;

is the derivative of e _y1002 with respect to time;

3) According to the solved output force of each drive motor, the control command of each motor is obtained. The control command is input to the driver after digital-to-analog conversion by the D/A card, and the driver outputs the current proportionally to drive the corresponding motor, thereby realizing micro The movement of the moving table and the coarse moving table.