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CN102713703A - Waveguide optically pre-amplified detector with passband wavelength filtering - Google Patents

Waveguide optically pre-amplified detector with passband wavelength filtering Download PDF

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CN102713703A
CN102713703A CN200980163274XA CN200980163274A CN102713703A CN 102713703 A CN102713703 A CN 102713703A CN 200980163274X A CN200980163274X A CN 200980163274XA CN 200980163274 A CN200980163274 A CN 200980163274A CN 102713703 A CN102713703 A CN 102713703A
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waveguide
filter
optical
wavelength
waveguides
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瓦莱里·托希凯恩
吴芳
克里斯多夫·沃特森
龙利·隆格维
基里尔·皮梅诺夫
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Onechip Photonics Inc
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004Combinations of two or more optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/131Integrated optical circuits characterised by the manufacturing method by using epitaxial growth
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • H10F77/413Optical elements or arrangements directly associated or integrated with the devices, e.g. back reflectors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12107Grating
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
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Abstract

本发明描述在由III-V半导体所组成并且在一个外延生长流程中生长的多导向垂直集成(MGVI)结构中可实现的集成光子布置,从而允许形成MGVI结构的多个垂直集成波长指定波导的共同波长指定波导中的半导体光学放大器(SOA)和PIN光电检测器(PIN)结构的集成。集成包括在SOA与PIN之间集成的波长滤波器,以便降低发生于由SOA所产生的ASE的PIN中的噪声。在本发明的示范实施例中,波长滤波器集成到共同波长指定波导中或者波长指定波导中的MGVI结构中。此外,在其它实施例中,波长滤波器由对接集成光子布置的端面的薄膜滤波器来提供,其中光信号由光学波导和/或诸如多模干扰装置之类的附加光学元件来耦合。

Figure 200980163274

The present invention describes integrated photonic arrangements achievable in multi-guided vertical integration (MGVI) structures composed of III-V semiconductors and grown in one epitaxial growth flow, thereby allowing the formation of multiple vertically integrated wavelength-specific waveguides of MGVI structures The common wavelength specifies the integration of semiconductor optical amplifier (SOA) and PIN photodetector (PIN) structures in the waveguide. Integration includes integrating a wavelength filter between the SOA and the PIN to reduce noise occurring in the PIN of the ASE generated by the SOA. In an exemplary embodiment of the invention, the wavelength filter is integrated into a common wavelength-specifying waveguide or into an MGVI structure in a wavelength-specifying waveguide. Furthermore, in other embodiments, the wavelength filter is provided by a thin film filter abutting the end face of the integrated photonic arrangement, where the optical signal is coupled by an optical waveguide and/or additional optical elements such as a multimode interference device.

Figure 200980163274

Description

具有通带波长滤波的波导光学前置放大检测器Waveguide Optical Preamplified Detector with Passband Wavelength Filtering

技术领域 technical field

本发明涉及波导光子装置和光子集成电路,以及更具体来说,涉及III-V半导体材料中的波导光学前置放大检测器。The present invention relates to waveguide photonic devices and photonic integrated circuits, and more particularly to waveguide optical preamplified detectors in III-V semiconductor materials.

背景技术 Background technique

光纤到接入网中的深穿透要求推动送往和来自用户的业务的光学接口设备的不平行大规模部署。例如,在一个波长上接收下游信号而在另一波长上发送上游信号(两种波长共享同一光纤)的光学收发器必须部署在每一个光线路终端(OLT)/光网络单元(ONU)处。因此,制造这类组件方面的成本效率和批量缩放性越来越成为主要问题。电信行业中广泛地认可,直到光学收发器和其它大规模部署的光学组件的批量制造达到消费者产品的成本效率和缩放性等级之前,光学接入解决方案不会成为商品服务。The requirement for deep penetration of fiber into the access network is driving a parallel mass deployment of optical interface equipment for traffic to and from subscribers. For example, optical transceivers that receive downstream signals on one wavelength and transmit upstream signals on another wavelength (both wavelengths share the same fiber) must be deployed at each Optical Line Terminal (OLT)/Optical Network Unit (ONU). Therefore, cost-efficiency and batch scalability in manufacturing such components are increasingly becoming major issues. It is widely accepted in the telecommunications industry that optical access solutions will not become a commodity service until volume manufacturing of optical transceivers and other mass-deployed optical components reaches consumer product levels of cost efficiency and scalability.

在主要基于来自现货的分立无源光子装置和有源光子装置的散装光学部件装配(OSA)的当前光学组件制造模式的框架中,问题的根本原因在于劳动密集型的光学对准和高成本的多数量包装。它们不仅限制成本效率,而且还极大地限制制造商提升生产量以及提供制造中的缩放性的能力。解决方案在于降低OSA中的光学对准和包装内容,并且最终采用光子集成电路(PIC)技术来取代光学装配,其中光学电路的所有功能元件单片集成到同一衬底上。然后,人工进行的有源光学对准由通过光刻所限定的自动化无源对准来取代,并且完全消除多组件封装,从而实现基于现有平面技术和半导体晶圆制造技术的复杂光学组件的自动化并且批量可缩放的大规模生产。In the framework of the current optical component manufacturing paradigm based primarily on off-the-shelf discrete passive photonic devices and off-the-shelf optical component assembly (OSA) of active photonic devices, the root cause of the problem lies in labor-intensive optical alignment and costly Packed in multiple quantities. Not only do they limit cost efficiency, but they also greatly limit a manufacturer's ability to increase throughput and provide scalability in manufacturing. The solution lies in reducing the optical alignment and packaging content in the OSA, and eventually replacing the optical assembly with photonic integrated circuit (PIC) technology, where all functional elements of the optical circuit are monolithically integrated on the same substrate. Manually performed active optical alignment is then replaced by automated passive alignment defined by lithography and multi-component packaging is completely eliminated, enabling complex optical components based on existing planar and semiconductor wafer fabrication techniques. Automated and batch-scalable mass production.

在应用的上下文中,供光学传输系统中使用的单片PIC的选择的材料仍然是磷化铟(InP)及其相关III-V半导体,因为它们唯一地允许工作在光学电信的感兴趣谱范围中的有源和无源装置结合到同一InP衬底上。具体来说,InP PIC也许是对大多数大规模部署组件的节省成本并且批量可缩放的解决方案:用于接入无源光网络的工作在1.3μm和1.5μm波长范围的光学收发器,参见例如V.Tolstikhin(“Integrated Photonics:Enabling Optical ComponentTechnologies for Next Generation Access Networks”,Proc.Asia OpticalFiber Communication & Optoelectronic Exposition & Conference,2007年10月)。In the context of the application, the materials of choice for monolithic PICs used in optical transmission systems remain indium phosphide (InP) and its related III-V semiconductors, as they uniquely allow operation in the spectral range of interest for optical telecommunications The active and passive devices in are combined on the same InP substrate. Specifically, InP PICs may be a cost-effective and volume-scalable solution for the most mass-deployed components: optical transceivers operating in the 1.3-μm and 1.5-μm wavelength ranges for access to passive optical networks, see For example V. Tolstikhin ("Integrated Photonics: Enabling Optical Component Technologies for Next Generation Access Networks", Proc. Asia Optical Fiber Communication & Optoelectronic Exposition & Conference, October 2007).

在每一个光学收发器中的是光学光电检测器,光电检测器将所接收光信号转换成电信号,从而允许这个所接收信号被提供给连接到电信网络的电气设备,例如具有基于IP语音(VOIP)电话、计算机或数字电视机顶盒。这类光电检测器设计为具有低反向电压偏置、具有p型半导体与n型半导体区之间的轻掺杂的“近”本征半导体区的PIN二极管,或者设计为具有高反向电压偏置的雪崩光电二极管(APD)。PIN二极管与标准CMOS电子器件的兼容性、典型反向偏压为几伏特而不是采用APD的数十伏特、低电容和高带宽操作,已经使PIN二极管成为网络部署中的优选选择。Within each optical transceiver is an optical photodetector that converts a received optical signal into an electrical signal, allowing this received signal to be provided to electrical equipment connected to a telecommunications network, such as with voice over IP ( VOIP) telephone, computer or digital TV set-top box. This class of photodetectors is designed as a PIN diode with low reverse voltage bias, with a lightly doped "near" intrinsic semiconductor region between the p-type and n-type semiconductor regions, or as a high reverse voltage Biased avalanche photodiode (APD). The compatibility of PIN diodes with standard CMOS electronics, typical reverse bias of a few volts instead of tens of volts with APDs, low capacitance, and high bandwidth operation have made PIN diodes the preferred choice in network deployments.

如前面所述,PIC是实现接入网收发器所需的节省成本并且批量可缩放解决方案的最大希望。在单片PIC中,PIN二极管在波导结构中实现,从而产生波导光电检测器(WPD),波导光电检测器与PIC的无源波导电路兼容,并且由此促进光电检测器与无源波长解复用和路由选择元件的单片集成。相应地,对于PIC兼容、高性能并且仍然低廉的PIN WPD的要求进一步发展,并且对于到订户客户群的这种光纤穿透以及到接入通信系统的所产生PIC穿透是必不可少的。As mentioned earlier, PICs are the best hope for realizing the cost-effective and batch-scalable solutions needed for access network transceivers. In a monolithic PIC, the PIN diode is implemented in a waveguide structure, resulting in a waveguide photodetector (WPD), which is compatible with the passive waveguide circuit of the PIC and thus facilitates photodetectors with passive wavelength decomplexing monolithic integration with and routing elements. Accordingly, the requirement for PIC-compatible, high-performance and still inexpensive PIN WPDs has grown further and is essential for such fiber penetration to the subscriber customer base and the resulting PIC penetration to the access communication system.

虽然用于实现这种PIN WPD的驱动器在接入网中是特别明显的,但是应当理解,它们是在高比特率特别有吸引力的通用装置,其中表面照明的检测器受到载波传输时间吸收效率折衷的限制以及在PIC中受到限制,并且其中任何非波导装置难以集成。While drivers for implementing such PIN WPDs are particularly evident in access networks, it should be understood that they are particularly attractive general-purpose devices at high bit rates, where surface-illuminated detectors suffer from carrier transit time absorption efficiency The tradeoffs are limited and limited in PICs, and any non-waveguide devices in them are difficult to integrate.

任何光电检测器的一个关键性能参数是定义为相对于入射光功率的感应光电流的响应率。它以安培/瓦特(A/W)来测量,并且能够表示为

Figure BDA00001866012800021
其中R是总量子效率,e为电子电荷,以及是光子能量。然而,主要取决于装置设计的芯片上PIN WPD中的η值能够达到相当大的70%,参见例如V.Tolstikhin的“One-Step Growth Optical Transceiver PICs in InP”(Proc.ECOC 2009,2009年9月20-24日,Paper 8.6.2),它仍然始终小于一,并且因此任何PIN检测器的响应率基本上低于
Figure BDA00001866012800031
同时,当今光网络发展的一个明显趋势是要求接收器端的越来越高的响应率。例如,在接入PON的情况下,由网络运营商所推动的不变目标是朝向更高的分流比和更长的延伸架构,因为这降低每个订户的中心局设备和操作成本,由此使其能够向最终客户提供更低价格。因此,一些PON标准,例如GPON B+(ITU-T G.984.2),已经要求检测器响应率对于任何可想像的跨阻抗放大器(TIA)为高于
Figure BDA00001866012800032
光电检测器对其通常加载到接收器电路中。显然,这个要求采用任何PIN光电检测器、甚至单独的PIN WPD无法满足,这通常具有更高的插入损失并且因此具有比其表面照明对应体略低的量子效率。A key performance parameter of any photodetector is the responsivity defined as the induced photocurrent relative to the incident light power. It is measured in Amps/Watt (A/W) and can be expressed as
Figure BDA00001866012800021
where R is the total quantum efficiency, e is the electron charge, and is the photon energy. However, values of η in on-chip PIN WPDs can reach considerable values of 70%, depending mainly on device design, see e.g. "One-Step Growth Optical Transceiver PICs in InP" by V. Tolstikhin (Proc. ECOC 2009, 9 20-24, Paper 8.6.2), it is still always less than one, and thus the response rate of any PIN detector is substantially lower than
Figure BDA00001866012800031
At the same time, an obvious trend in the development of today's optical networks is to require higher and higher response rates at the receiver side. For example, in the case of access PON, constant goals driven by network operators are towards higher split ratios and longer stretch architectures, as this reduces central office equipment and operating costs per subscriber, thereby enabling it to offer lower prices to end customers. Therefore, some PON standards, such as GPON B+ (ITU-T G.984.2), already require detector responsivity for any conceivable transimpedance amplifier (TIA) to be higher than
Figure BDA00001866012800032
A photodetector is usually loaded into the receiver circuit. Clearly, this requirement cannot be met with any PIN photodetector, or even a PIN WPD alone, which typically has higher insertion loss and thus a slightly lower quantum efficiency than its surface-illuminated counterpart.

为了实现总量子效率η>1,必须在来自光纤的入局信号与接收器电路之间添加某种形式的增益。对此有三种芯片上解决方案:To achieve a total quantum efficiency η > 1, some form of gain must be added between the incoming signal from the fiber and the receiver circuitry. There are three on-chip solutions for this:

a)例如通过使用光电晶体管的检测之后的电增益,其中信号在处于电域时经过放大,这不完全是基于波导的PIC兼容解决方案,并且实际上要求光子集成电路(集成到同一衬底上的有源和无源基于波导的光子装置)以基本上更复杂且昂贵的制造过程为代价升级到光电子集成电路(集成在具有有源和无源的基于波导的光子装置的同一衬底上的电子装置);a) Electrical gain after detection, for example by using phototransistors, where the signal is amplified while in the electrical domain, which is not exactly a waveguide-based PIC-compatible solution, and actually requires a photonic integrated circuit (integrated onto the same substrate active and passive waveguide-based photonic devices) to optoelectronic integrated circuits (integrated on the same substrate with active and passive waveguide-based photonic devices) at the expense of a substantially more complex and expensive fabrication process electronic device);

b)例如通过利用雪崩光电二极管(APD)的检测过程中的电增益,其中信号在从光变换到电域的同时经过放大,这在增益带宽积方面、特别是在其基于波导的实现中基本上受到限制,并且因此并不完全适合于集成到大多数网络应用的PIC中;以及b) Electrical gain in the detection process, for example by utilizing an avalanche photodiode (APD), where the signal is amplified while being converted from the optical to the electrical domain, which is fundamental in terms of gain-bandwidth product, especially in its waveguide-based implementation are limited and therefore not well suited for integration into PICs for most networking applications; and

c)例如在半导体光学放大器(SOA)中的检测之前的光增益,其中信号在没有离开光域的情况下经过放大,这是与PIC设计和制造过程的其余部分兼容的基于波导解决方案;以下称作光学前置放大检测器(OPAD)。c) optical gain before detection, for example in semiconductor optical amplifiers (SOAs), where the signal is amplified without leaving the optical domain, a waveguide-based solution compatible with the rest of the PIC design and fabrication process; following It is called an optical preamplified detector (OPAD).

由于它与基于波导的PIC架构和制造过程的兼容性,OPAD好像是高于

Figure BDA00001866012800041
光纤耦合响应性的适当PIC解决方案,被定义为PIC传递到接收器电路中的电流相对于光信号传递到PIC的光功率。这种解决方案没有具体速度限制(除非SOA处于饱和情况下,并且其光增益受到经放大的光信号影响),并且能够提供数十的端对端增益,由此实现优良增益带宽积。由于这些原因,高功能PIC兼容OPAD装置的设计近年来引起了极大关注。Due to its compatibility with waveguide-based PIC architectures and manufacturing processes, the OPAD appears to be superior to
Figure BDA00001866012800041
The proper PIC solution for fiber-coupled responsiveness is defined as the current delivered by the PIC into the receiver circuit relative to the optical power delivered by the optical signal to the PIC. This solution has no specific speed limit (unless the SOA is saturated and its optical gain is affected by the amplified optical signal) and can provide tens of tens of end-to-end gains, thereby achieving a good gain-bandwidth product. For these reasons, the design of highly functional PIC-compatible OPAD devices has attracted considerable attention in recent years.

任何集成OPAD一般来说是基于波导的装置,该装置结合增益波导段(其中光学放大发生)和检测波导段(其中到电域的光学转换发生),其通过向/从OPAD的两个元件传递光信号的无源波导光学连接。具有由不同半导体材料所制成的不同波导核心区域的多个波导装置的单片集成,例如OPAD所需的光学放大器(OA)和光电检测器(PD),能够基本上通过下列三种方式中的一种来实现:Any integrated OPAD is generally a waveguide based device that combines a gain waveguide section (where optical amplification takes place) and a detection waveguide section (where optical conversion to the electrical domain takes place) that passes through to/from the two elements of the OPAD Passive waveguide optical connection of optical signals. Monolithic integration of multiple waveguide devices with different waveguide core regions made of different semiconductor materials, such as optical amplifiers (OA) and photodetectors (PD) required for OPADs, can be basically done in the following three ways: One of the implementations:

1.直接对接耦合;这利用执行外延生长的多个步骤的能力,包括选择性区域蚀刻和再生长,以便提供在空间上与跨PIC管芯的共同垂直平面水平区分的多种半导体材料,并且不同半导体材料水平地相邻生长,使得波导在相互的每个直接对接中形成,以便形成从一种材料到另一种材料的转变;1. Direct butt coupling; this utilizes the ability to perform multiple steps of epitaxial growth, including selective area etch and regrowth, in order to provide multiple semiconductor materials that are spatially differentiated horizontally from a common vertical plane across the PIC die, and different semiconductor materials are grown horizontally adjacent such that waveguides are formed in each direct abutment with each other to form a transition from one material to another;

2.修正对接耦合;这例如通过量子阱混合技术来利用半导体材料的选择性区域后生长修正,而不是蚀刻和再生长,以便形成又在跨PIC管芯的垂直导向的共同平面中空间上区分的所需半导体材料的区域;以及2. Modified docking coupling; this exploits selective area post-growth modification of semiconductor material, for example by quantum well hybrid technology, rather than etch and regrowth, to form yet spatially differentiated in a vertically oriented common plane across the PIC die area of desired semiconducting material; and

3.瞬逝场耦合;其中以核心区域的不同半导体材料为特征的垂直分隔但仍然光学耦合的波导用于提供所需材料差异而无需附加生长步骤,使得它这时在PIC管芯的共同垂直叠层中区分。3. Evanescent Field Coupling; where vertically separated but still optically coupled waveguides featuring different semiconductor materials in the core region are used to provide the required material differentiation without additional growth steps such that it is now in the common vertical of the PIC die Distinguished in the stack.

现有技术的示例能够见于这三种类别的每个中。例如由Haleman等人在美国专利5029297“Optical-Amplifier-Photodetector Device”中、W.Rideout等人在美国专利5299057“Monolithically Integrated OpticalAmplifier and Photodetector Tap”中以及J.Walker等人在美国专利6909536“Optical Receiver indcluding a Linear Semiconductor Optical Amplifier”中报导了使用直接对接耦合的集成OPAD装置。修正对接耦合的一个示例由M.Aoki等人在美国专利5574289“Semiconductor Optical Integrated Deviceand Light Receiver Using Said Device”中呈现。最后,由S.Forrest等人在标题为“Integrated Photonic Amplifier and Detector”的美国专利7343061中报导了基于垂直孪生波导结构中的瞬逝场耦合的集成OPAD。Examples of prior art can be found in each of these three categories. For example, by Haleman et al. in U.S. Patent 5029297 "Optical-Amplifier-Photodetector Device", W. Rideout et al. in U.S. Patent 5299057 "Monolithically Integrated Optical Amplifier and Photodetector Tap" and J.Walker et al. in U.S. Patent 6909536 "Optical Receiver Indcluding a Linear Semiconductor Optical Amplifier" reported an integrated OPAD device using direct butt-coupling. An example of modified butt coupling is presented by M. Aoki et al. in US Patent 5574289 "Semiconductor Optical Integrated Device and Light Receiver Using Said Device". Finally, an integrated OPAD based on evanescent field coupling in a vertical twin waveguide structure was reported by S. Forrest et al. in US Patent 7343061 entitled "Integrated Photonic Amplifier and Detector".

这些设计解决方案的每个具有其有益效果和缺点。考虑直接对接耦合,这允许采用最小垂直拓扑的平面集成,这从平面技术观点来看是一个优点,因为在制造期间处理PIC中不要求或者要求最小平面化。但是,直接对接耦合要求多个外延步骤来提供多种半导体材料,这不仅造成管理来自这些材料界面的光学反射的困难,而且还显著影响制造产率并且由此显著增加最终PIC装置的成本。修正对接耦合潜在地能够去除额外外延步骤,并且通过这种方式改进制造产率,但是涉及到可能的半导体材料修正,其能力受到限制:通常,只有量子阱层的带隙能够是移位一直到100nm的蓝色,而其它层、例如在有源波导段所需要的但因其生成的传播损耗而在无源波导段是非常不合需要的重掺杂接触层保持不变。相比之下,瞬逝场耦合没有上述对接耦合方式的缺点,但是,由于它基于垂直而不是平面集成,所以它通过要求在不同垂直级的多个蚀刻步骤并且创建增加的垂直拓扑,而是基于平面技术的略微更复杂的制造过程。Each of these design solutions has its benefits and drawbacks. Consider direct butt-coupling, which allows planar integration with minimal vertical topology, which is an advantage from a planar technology point of view since no or minimal planarization is required in handling PICs during fabrication. However, direct butt-coupling requires multiple epitaxial steps to provide multiple semiconductor materials, which not only creates difficulties in managing optical reflections from these material interfaces, but also significantly impacts manufacturing yield and thereby significantly increases the cost of the final PIC device. Modified butt-coupling could potentially remove an extra epitaxy step and improve fabrication yield in this way, but its capabilities are limited in relation to possible semiconductor material modification: typically, only the bandgap of the quantum well layer can be shifted up to 100 nm blue, while other layers, such as heavily doped contact layers, which are required in the active waveguide section but are highly undesirable in the passive waveguide section because of the propagation losses they generate, remain unchanged. In contrast, evanescent field coupling does not have the disadvantages of the butt-coupling approach described above, however, since it is based on vertical rather than planar integration, it does so by requiring multiple etch steps at different vertical levels and creating an increased vertical topology, instead A slightly more complex manufacturing process based on planar technology.

因此,瞬逝场耦合是能够在无需半导体材料的任何后生长修正的一步外延生长中实现的唯一实用方式,并且因此与节省成本的制造过程结合来提供最高制造产率的可能性,并且相应地可能提供PIC装置的最低成本。它还提供对基于孪生波导结构的集成OPAD设计的直接解决方案,其中两个垂直耦合波导的下波导是具有大大高于预计送往OPAD的光信号的光子能量的核心层带隙的无源波导,从而允许低损耗传播,而两个垂直耦合波导的上波导是具有与将由OPAD来处理的光信号的谱范围接近的本征材料带隙的PIN结构。这个上波导是对于感兴趣谱范围具有光学放大(在正向电偏压下)或检测(在反向电偏压下)的能力的有源波导。两个波导之间的光学耦合能够采用可选横向锥体来实现,以便促进导向光信号的平滑和可控垂直转变。这样,通过适当的波导和横向锥形设计,光信号能够经由两者之间的无源波导段绝热地从放大波导段传递给检测波导段,在这种情况下,不存在本征活性层和上接触层但存在下接触层的无源波导段还用作波导PIN的正向(放大)与反向(检测)偏压段之间的电绝缘。例如由K.-T.Shiu等人在“A Simple Monolithically Integrated OpticalReceiver Consisting of an Optical Preamplifier and p-i-n Photodiode”(Photon.Technol.Lett.,Vol.18,第956-958页,2006年4月)以及V.Tolstikhin等人在“Optically Pre-Amplified Detectors for Multi-GuideVertical Integration in InP”(Proc.Indium Phosphide and RelatedMaterials,2009年,第155-158页,Newport Beach,2009)中报导了这种方式。Tolstikhin等人报导比

Figure BDA00001866012800061
要大10倍的光纤耦合响应度,其中对于50nm波长带宽的极化灵敏度小于0.4dB,在室温下工作在1490nm附近的OPAD中注入电流大约为150mA。Therefore, evanescent field coupling is the only practical way that can be realized in one-step epitaxial growth without any post-growth modification of semiconductor material, and thus offers the possibility of highest fabrication yield in combination with cost-effective fabrication process, and accordingly Lowest cost possible for PIC devices. It also provides a direct solution to the design of integrated OPADs based on twin waveguide structures, where the lower waveguide of the two vertically coupled waveguides is a passive waveguide with a core layer bandgap much higher than the photon energy of the optical signal expected to be sent to the OPAD , allowing low-loss propagation, while the upper waveguide of the two vertically coupled waveguides is a PIN structure with an intrinsic material bandgap close to the spectral range of the optical signal to be processed by the OPAD. This upper waveguide is an active waveguide with optical amplification (under forward electrical bias) or detection (under reverse electrical bias) capability for the spectral range of interest. Optical coupling between the two waveguides can be achieved with optional lateral tapers to facilitate smooth and controllable vertical transitions of the guided light signal. In this way, with proper waveguide and transverse tapered design, the optical signal can be adiabatically transferred from the amplification waveguide section to the detection waveguide section via the passive waveguide section in between, in this case, there is no intrinsic active layer and The passive waveguide section with the upper contact layer but present with the lower contact layer also serves as electrical isolation between the forward (amplification) and reverse (detection) bias sections of the waveguide PIN. For example by K.-T.Shiu et al. in "A Simple Monolithically Integrated Optical Receiver Consisting of an Optical Preamplifier and pin Photodiode" (Photon. Technol. Lett., Vol. 18, pp. 956-958, April 2006) and This approach was reported by V. Tolstikhin et al. in "Optically Pre-Amplified Detectors for Multi-GuideVertical Integration in InP" (Proc. Indium Phosphide and Related Materials, 2009, pp. 155-158, Newport Beach, 2009). Reported by Tolstikhin et al.
Figure BDA00001866012800061
To have a fiber-coupled responsivity 10 times larger, where the polarization sensitivity for a 50nm wavelength bandwidth is less than 0.4dB, the injection current in an OPAD operating near 1490nm at room temperature is about 150mA.

有源和无源波导的孪生导向集成是基于瞬逝场的垂直集成的最简单和最常见的示例,并且能够以各种形式来实现,例如基于常规定向耦合器(DC)(参见例如Y.Suematsu等人的“Integrated Twin-Guide AlGaAs Laser withMultiheterostructure”(IEEE J.Quantum Electron.,Vol.11,第457-460页,1975年7月))或者通过耦合光学波导之间的阻抗匹配层所增强的DC(参见例如R.J.Deri等人的“Impedance Matching for EnhancedWaveguide/Photodetector Integration”(App.Phys.Lett.,Vol.55,第2712-2714页,1989年12月)-或者具有孪生波导之间的横向锥形辅助耦合的DC参见例如P.V.Studenkov等人的“Efficient Coupling in IntegratedTwin-Waveguide Lasers using Waveguide Tapers”(IEEE Photon.Technol.Lett.,Vol.11,第1096-1098页,1999年11月))中的相位匹配。Twin-guided integration of active and passive waveguides is the simplest and most common example of vertical integration based on evanescent fields, and can be realized in various forms, e.g. based on conventional directional couplers (DC) (see e.g. Y. "Integrated Twin-Guide AlGaAs Laser with Multiheterostructure" by Suematsu et al. (IEEE J. Quantum Electron., Vol. 11, pp. 457-460, July 1975)) or enhanced by an impedance matching layer between coupled optical waveguides (see e.g. "Impedance Matching for Enhanced Waveguide/Photodetector Integration" by R.J.Deri et al. (App. Phys. Lett., Vol. 55, pp. 2712-2714, Dec. 1989) - or with DC for lateral taper assisted coupling see e.g. "Efficient Coupling in Integrated Twin-Waveguide Lasers using Waveguide Tapers" by P.V. Studenkov et al. (IEEE Photon. Technol. Lett., Vol. 11, pp. 1096-1098, Nov. 1999) ) in phase matching.

多导向垂直集成(MGVI)是这种方式朝多功能PIC的扩展,其中具有不同功能的光学波导按照相互耦合的瞬逝场和波导带隙波长的升序垂直堆叠,垂直设置的波导之间的绝热转变受到在必要垂直导向级所限定的并且彼此相关地起作用的横向锥形影响,参见例如V.Tolstikhin等人的“Laterally-Coupled DFB Lasers for One-Step Growth Photonic Integrationin InP”(IEEE Photon.Technol.Lett.,Vol.21,第621-623页,2009年5月)、V.Tolstikhin等人的“Optically Pre-Amplified Detectors forMulti-Guide Vertical Integration in InP”(Proc.Indium Phosphide andRelated Materials 2009 Conference,第155-158页,Newport Beach,2009)以及还有V.Tolstikhin等人的标题为“Integrated-Optics Arrangement forWavelength(De)Multiplexing in a Multi-Guide Vertical Stack”。Multi-guided vertical integration (MGVI) is an extension of this approach towards multifunctional PICs, in which optical waveguides with different functions are stacked vertically in ascending order of mutually coupled evanescent fields and waveguide bandgap wavelengths, and thermal insulation between vertically arranged waveguides The transition is effected by lateral tapers defined at the necessary vertical guide levels and acting in relation to each other, see e.g. "Laterally-Coupled DFB Lasers for One-Step Growth Photonic Integration in InP" by V. Tolstikhin et al. (IEEE Photon. Technol .Lett., Vol.21, pp. 621-623, May 2009), V. Tolstikhin et al. "Optically Pre-Amplified Detectors for Multi-Guide Vertical Integration in InP" (Proc.Indium Phosphide and Related Materials 2009 Conference, pp. 155-158, Newport Beach, 2009) and also V. Tolstikhin et al. entitled "Integrated-Optics Arrangement for Wavelength (De) Multiplexing in a Multi-Guide Vertical Stack".

MGVI方式与前面所述的现有技术在同一多导向垂直叠层中的连续孪生导向集成加以区分的一个关键特征是,具有两个以上重叠堆叠和瞬逝场耦合的光学波导的多功能PIC中的光信号借助于在垂直导向级的至少一部分所限定并且在使用中彼此相关地起作用的横向锥形在这些波导之间绝热地传递的能力。这可适于作并行绝热传递,与串行绝热传递相对,其中不超过两个垂直堆叠导向同时经过瞬逝场耦合,以及如果PIC结构具有两个以上功能并且因此具有两个以上导向垂直级,则它们之间的光信号的转变通过两个相邻波导之间的连续转变来实现,排除过程中的所有其它导向层。多导向垂直叠层中的基于瞬逝场的集成的这类并行和串行方式的示例,分别由V.Tolstikhin等人在标题为“Integrated Vertical Wavelength(De)multiplexer”的美国专利7532784以及S.Forrest等人在标题为“Photonic Integrated Circuits”美国专利6795622中给出。A key feature that distinguishes the MGVI approach from the previously described prior art sequential twin-guided integration in the same multiguided vertical stack is the multifunctional PIC with more than two optical waveguides overlapping the stack and evanescent field coupling The ability for optical signals in the waveguides to be transferred adiabatically between these waveguides by means of transverse tapers defined in at least a portion of the vertically guided stages and acting in relation to each other in use. This may be suitable for parallel adiabatic transfer, as opposed to serial adiabatic transfer, where no more than two vertically stacked guides are simultaneously evanescently field coupled, and if the PIC structure has more than two functions and thus more than two directed vertical stages, The transition of the optical signal between them is then achieved by a continuous transition between two adjacent waveguides, excluding all other guiding layers in the process. Examples of such parallel and serial approaches to evanescent field-based integration in multi-guided vertical stacks are respectively V. Tolstikhin et al. in U.S. Patent 7,532,784 entitled "Integrated Vertical Wavelength (De) multiplexer" and S. Forrest et al. are given in US Patent 6,795,622 entitled "Photonic Integrated Circuits".

不管具体的有源-无源波导集成技术(即平面对接耦合或垂直瞬逝场耦合)或者其具体实现(例如基于瞬逝场耦合的垂直集成的并行或串行方式),任何OPAD装置基本上应当提供增益增强响应率,而没有信噪比的显著退化。在其它方面,作为将要用于接收器中从光到电域的信号传递的组件,OPAD理想地应当将高增益与低噪声相结合。OPAD特定的增加其它而不是通用噪声源(例如接收器电路中的热和散粒噪声)的主要噪声源是OPAD的放大段中产生的放大自发射(ASE)。光学放大器中与单片设计无关的固有ASE,例如OPAD、混合或基于光纤的,例如掺铒光纤放大器(EDFA)。万一ASE相关噪声成为接收器噪声的主要贡献者,则OPAD所提供的光信号放大不会有太大帮助,因为它使信噪比更差,并且最终使接收器灵敏度更差,尽管增加其响应率。OPAD性能的这个方面对装置应用是关键的,特别是在扩展延伸/增加分流比PON中,但是在现有技术OPAD设计中尚未适当解决。Regardless of the specific active-passive waveguide integration technique (i.e. planar butt coupling or vertical evanescent field coupling) or its specific implementation (e.g. parallel or serial approach for vertical integration based on evanescent field coupling), any OPAD device basically Gain-enhanced responsivity should be provided without significant degradation of the signal-to-noise ratio. Among other things, as a component to be used in a receiver for signal transfer from the optical to the electrical domain, an OPAD should ideally combine high gain with low noise. The main noise source specific to OPADs that adds to other, but not general, noise sources such as thermal and shot noise in receiver circuits is amplified spontaneous emission (ASE) generated in the amplifying section of the OPAD. Inherent ASE independent of monolithic design in optical amplifiers such as OPADs, hybrid or fiber-based such as Erbium-Doped Fiber Amplifiers (EDFAs). In case the ASE related noise becomes the main contributor to the receiver noise, the optical signal amplification provided by the OPAD won't help much as it makes the signal to noise ratio worse and ultimately the receiver sensitivity worse despite increasing its response rate. This aspect of OPAD performance is critical to device applications, especially in extended extension/increased split ratio PONs, but has not been adequately addressed in prior art OPAD designs.

为了更好地了解ASE可对接收器灵敏度具有的影响以及降低它的方式,有益的是考虑由ASE所产生的接收器电路中的电流波动。忽略除了热噪声(通常由对其加载检测器的互阻抗放大器的等效输入噪声所确定)之外的所有噪声源的感应光电流的电流均方值的估计,按下式(1)所述写为:In order to better understand the impact that ASE can have on receiver sensitivity and ways to reduce it, it is helpful to consider the current fluctuations in the receiver circuit produced by ASE. Neglecting all noise sources except thermal noise (usually determined by the equivalent input noise of the transimpedance amplifier on which the detector is loaded), an estimate of the current mean square value of the induced photocurrent is given by equation (1) written as:

Figure BDA00001866012800081
Figure BDA00001866012800081

其中,iD是接收器电路中由具有相似PIN检测器但是没有光学放大器的装置所产生的RMS噪声电流,以及右边的第二项说明光学前置放大器所产生的过度ASE相关噪声,这产生于分别由这个等式右边的括号中的第一和第二项所表示的自发-自发和自发-信号拍频的组合(例如N.A.Ollson、J.Lightwave Technol.,Vol.7,第1071-1082页,1991年7月)。在这里,

Figure BDA00001866012800082
是相对于检测段前面的光功率的响应率,EASE是在检测段输入端的ASE功率的谱密度,Be是接收器电路带宽,Bo≈(cΔλPBF)/λ2是相当于从放大到检测波导段的转变中的光波长通带ΔλPBF的频率带宽,G是波导折算(waveguide-referred)合计增益,以及P是信号的时间平均波导耦合光功率。where iD is the RMS noise current in the receiver circuit produced by a device with a similar PIN detector but without an optical amplifier, and the second term on the right accounts for the excess ASE-related noise produced by the optical preamplifier, which arises from Combinations of spontaneous-spontaneous and spontaneous-signal beat frequencies represented by the first and second terms in brackets on the right side of this equation, respectively (eg NAOllson, J. Lightwave Technol., Vol. 7, pp. 1071-1082, July 1991). it's here,
Figure BDA00001866012800082
is the responsivity relative to the optical power in front of the detection section, E ASE is the spectral density of the ASE power at the input of the detection section, Be is the receiver circuit bandwidth, and B o (cΔλ PBF )/λ 2 is equivalent to amplifying from where G is the waveguide-referred aggregate gain, and P is the time-averaged waveguide-coupled optical power of the signal.

如果接收器噪声主要由除了ASE之外的源来确定,即,等式1的第一项为主导,则波导耦合灵敏度按照下式(2)所示来估计:If the receiver noise is dominated by sources other than ASE, i.e., the first term of Equation 1 dominates, then the waveguide coupling sensitivity is estimated as shown in Equation (2):

Figure BDA00001866012800083
Figure BDA00001866012800083

其中,Q是在如下假设下的Q因子:噪声为高斯;接收器判定电路阈值设置成对于数据信号的1或0位均给予相等误差概率(参见G.Agrawal的“Fiber-OpticCommunication Systems”,第二修订版,Wiley,1997),并且1位中的平均功率P1比0位中P0要高许多,即,

Figure BDA00001866012800084
在其它情况下,当等式(1)的第二项主导时,即,在ASE噪声限制情况中,波导耦合接收器灵敏度能够如下式(3)所示来近似计算,以便近似计算最小光功率
Figure BDA00001866012800085
where Q is the Q factor under the following assumptions: the noise is Gaussian; the receiver decision circuit threshold is set to give an equal probability of error for either a 1 or a 0 bit of the data signal (see "Fiber-Optic Communication Systems" by G. Agrawal, p. Second revised edition, Wiley, 1997), and the average power P 1 in 1 bits is much higher than P 0 in 0 bits, that is,
Figure BDA00001866012800084
In other cases, when the second term of equation (1) dominates, i.e., in the ASE noise-limited case, the waveguide-coupled receiver sensitivity can be approximated as shown in equation (3) below, in order to approximate the minimum optical power
Figure BDA00001866012800085

PP minmin ‾‾ ≈≈ hνhν ·· BB ee ·&Center Dot; Ff gg ·&Center Dot; QQ ·· (( QQ ++ BB oo BB ee )) ,, -- -- -- (( 33 ))

其中,hν是光子能量,以及Fg是OPAD放大段的噪声因数(参见R.C.Steele等人的“Sensitivity of Optically Preamplified Receivers with OpticalFiltering”(IEEE Photon.Technol.Lett.,Vol.3,第545-547页,1991年6月)。where hν is the photon energy and Fg is the noise factor of the OPAD amplification section (see "Sensitivity of Optically Preamplified Receivers with Optical Filtering" by RC Steele et al. (IEEE Photon. Technol. Lett., Vol. 3, pp. 545-547) , June 1991).

等式(1)至(3)提供对OPAD性能和优化的极限的有益了解。首先,只要接收器噪声由ASE之外的其它因素来确定,即,当合计增益比较低时,增益的增加降低

Figure BDA00001866012800092
如从等式(2)能够看到,以及由此改进接收器性能。其次,在ASE噪声受限情况中,即,当合计增益变高时,增益的进一步增加没有有益效果,因为这引起
Figure BDA00001866012800093
的饱和,如从等式(3)能够看到。第三,能够通过将波长滤波器插入OPAD段的放大与检测段之间来抑制与自发-自发拍频关联的ASE噪声的至少一部分,使得滤波器的通带足够宽到以允许通过所有信号波长,但是同时比自发-自发拍频带宽要窄。Equations (1) to (3) provide a useful insight into the limits of OPAD performance and optimization. First, as long as the receiver noise is determined by something other than ASE, i.e., when the aggregate gain is relatively low, an increase in gain decreases
Figure BDA00001866012800092
As can be seen from equation (2), and thereby improves receiver performance. Second, in the ASE noise-limited case, i.e., when the aggregate gain becomes high, further increases in gain have no beneficial effect, since this causes
Figure BDA00001866012800093
Saturation of , as can be seen from equation (3). Third, at least a portion of the ASE noise associated with spontaneous-spontaneous beats can be suppressed by inserting a wavelength filter between the amplification and detection sections of the OPAD section such that the passband of the filter is wide enough to allow passage of all signal wavelengths , but at the same time narrower than the spontaneous-spontaneous beat bandwidth.

这样,预定窄波长范围中的光信号通过,并且在光电检测器段中被检测,而ASE噪声则没有。它能够被重新路由远离OPAD的检测段,或者在检测段之前的中间PIC电路中被吸收,或者这两种情况,使得与ASE相关的OPAD噪声限制到所接收信号的预计波长范围中。In this way, optical signals in a predetermined narrow wavelength range pass through and are detected in the photodetector section, while ASE noise does not. It can be rerouted away from the detection section of the OPAD, or absorbed in an intermediate PIC circuit before the detection section, or both, so that the ASE-related OPAD noise is limited to the expected wavelength range of the received signal.

相应地,本发明通过提供以所接收光信号的放大与检测之间的通带滤波为特征的MGVI兼容的设计解决方案,来提供OPAD中的改进。这样,性能改进与一步外延生长MGVI技术的能力和优点相结合,由此提供例如扩展延伸/增加分流比PON中的大规模部署的基于OPAD的接收器的高功能和低成本PIC解决方案Accordingly, the present invention provides an improvement in OPADs by providing an MGVI compliant design solution featuring a passband filtering between amplification and detection of the received optical signal. In this way, performance improvements are combined with the capabilities and advantages of one-step epitaxially grown MGVI technology, thereby providing, for example, a high-function and low-cost PIC solution for OPAD-based receivers for mass deployment in extended extension/increased split ratio PONs

发明目的purpose of invention

本发明的目的是一种与MGVI平台兼容的集成OPAD设计,它通过在信号波长范围外部提供芯片上ASE滤波,并且这样降低ASE相关噪声对基于OPAD的接收器的灵敏度的影响,同时提供大于接收器响应率,来增强装置性能。ASE滤波OPAD在MGVI平台中形成,使得在使用中,放大和检测波导段在同一波导指定的有源波导层中形成,同时无源波导段和波导电路的元件在无源波导层中限定,无源波导层定位在多导向垂直叠层中的有源波导层之下,这还可包括其它波导指定的有源和无源波导层。MGVI光子电路的所有元件在一个外延生长步骤中实现并且单片地集成在一个衬底上。按照MGVI设计原理,参见V.Tolstikhin等人的标题为“Integrated Vertical Wavelength(De)Multiplexer”的美国专利7532784以及标题为“Integrated OpticsArrangement for Wavelength(De)Multiplexing in a Multi-Guide VerticalStack”的7444055,通带波长滤波器可在MGVI结构中内部或者在MGVI结构的外部来实现。The object of the present invention is an integrated OPAD design compatible with the MGVI platform by providing on-chip ASE filtering outside the signal wavelength range and thus reducing the impact of ASE-related noise on the sensitivity of OPAD-based receivers while providing greater than receiver response rate to enhance device performance. The ASE filtering OPAD is formed in the MGVI platform so that in use, the amplification and detection waveguide sections are formed in the same waveguide designated active waveguide layer, while the passive waveguide section and elements of the waveguide circuit are defined in the passive waveguide layer, without The source waveguide layer is positioned below the active waveguide layer in the multi-guide vertical stack, which may also include other waveguide-assigned active and passive waveguide layers. All elements of the MGVI photonic circuit are realized in one epitaxial growth step and monolithically integrated on one substrate. According to the MGVI design principle, see U.S. Patent 7,532,784 titled "Integrated Vertical Wavelength (De) Multiplexer" by V. Tolstikhin et al. and 7,444,055 titled "Integrated Optics Arrangement for Wavelength (De) Multiplexing in a Multiple-Guide VerticalStack". Band wavelength filters can be implemented internally in the MGVI structure or external to the MGVI structure.

发明内容 Contents of the invention

本发明的一个目的是消除或缓解现有技术的至少一个缺点。It is an object of the invention to obviate or alleviate at least one disadvantage of the prior art.

按照本发明的另一个实施例,提供一种光子组件,包括:According to another embodiment of the present invention, a photonic component is provided, comprising:

a)外延半导体结构,在衬底包括用于支持预定第一波长范围中的光信号的传播的共同指定波导以及按照增加波长带隙的顺序垂直设置的多个波长指定波导的至少一个时,在单个生长步骤中III-V半导体材料系统中生长,其中多个波长指定波导的每个支持预定第二波长范围,预定第二波长范围的每个处于预定第一波长范围中;a) an epitaxial semiconductor structure, when the substrate includes at least one of a commonly assigned waveguide for supporting propagation of an optical signal in a predetermined first wavelength range and a plurality of wavelength assigned waveguides vertically arranged in order of increasing wavelength band gap, at growing in a III-V semiconductor material system in a single growth step, wherein each of the plurality of wavelength-specifying waveguides supports a predetermined second wavelength range, each of the predetermined second wavelength range being in the predetermined first wavelength range;

b)光学输入端口,用于接收第一波长范围中的光信号;b) an optical input port for receiving optical signals in the first wavelength range;

c)第一滤波器,至少包括第一输出端口和第二输出端口,并且特征至少在于第一通带宽度,滤波器在光学上耦合到用于接收第一波长范围中的光信号并且用于向第一输出端口提供所接收光信号的第一预定部分的光学输入端口,所接收光信号的第一预定部分至少根据第一通带宽度来确定;c) a first filter comprising at least a first output port and a second output port and characterized by at least a first passband width, the filter is optically coupled to receive optical signals in a first wavelength range and for providing an optical input port with a first predetermined portion of the received optical signal to a first output port, the first predetermined portion of the received optical signal being determined based on at least a first passband width;

d)光学放大器,至少包括在多个波长指定波导之一中形成的增益段、用于使光学放大器正向偏压的第一触点和第三输出端口,光学放大器在光学上耦合到第一输出端口,其用于接收所接收的光信号的第一预定部分并且向第三输出端口提供经放大的滤波光信号;d) an optical amplifier comprising at least a gain section formed in one of a plurality of wavelength-specifying waveguides, a first contact for forward biasing the optical amplifier, and a third output port, the optical amplifier being optically coupled to the first an output port for receiving a first predetermined portion of the received optical signal and providing an amplified filtered optical signal to a third output port;

e)第二滤波器,至少包括第四输出端口和第五输出端口,并且特征至少在于第二通带宽度,滤波器在光学上耦合到光学放大器的第三输出端口并且用于向第四输出端口提供经放大的滤波光信号的第一预定部分以及向第五输出端口提供经放大的滤波光信号的第二预定部分,经放大的滤波光信号的第一和第二预定部分至少根据第二通带宽度来确定;e) a second filter comprising at least a fourth output port and a fifth output port and characterized by at least a second passband width, the filter is optically coupled to the third output port of the optical amplifier and is used to output to the fourth The port provides a first predetermined portion of the amplified filtered optical signal and provides a second predetermined portion of the amplified filtered optical signal to the fifth output port, the first and second predetermined portions of the amplified filtered optical signal according to at least the second The passband width is determined;

f)第一光电检测器,在光学上至少包括用于使第一光电检测器反向偏压的第二触点,第一光电检测器耦合到用于接收经放大的滤波光信号的第一预定部分的第二滤波器的第四输出端口;f) a first photodetector optically comprising at least a second contact for reverse biasing the first photodetector coupled to the first photodetector for receiving the amplified filtered optical signal a fourth output port of the predetermined portion of the second filter;

g)第二光电检测器,在光学上耦合到用于接收经放大的滤波光信号的第二预定部分的第二滤波器的第五输出端口;以及g) a second photodetector optically coupled to a fifth output port of a second filter for receiving a second predetermined portion of the amplified filtered optical signal; and

h)第三光电检测器,在光学上耦合到用于接收从光学放大器传播到第一滤波器的光信号的预定部分的第一滤波器的第二输出端口,光信号的预定部分至少根据第一通带宽度来确定;其中,h) a third photodetector optically coupled to the second output port of the first filter for receiving a predetermined portion of the optical signal propagating from the optical amplifier to the first filter, the predetermined portion of the optical signal according to at least the first filter A passband width is determined; where,

第一触点和第二触点在外延半导体结构的同一层上形成,但是相互电绝缘。The first contact and the second contact are formed on the same layer of the epitaxial semiconductor structure, but are electrically isolated from each other.

按照本发明的另一个实施例,提供According to another embodiment of the present invention, there is provided

一种光子组件,包括:A photonic assembly comprising:

a)外延半导体结构,在衬底包括用于支持预定第一波长范围中的光信号的传播的共同指定波导以及按照增加波长带隙的顺序垂直设置的多个波长指定波导的至少一个时,在单个生长步骤中生长的III-V半导体材料系统中生长,其中多个波长指定波导的每个支持预定第二波长范围,预定第二波长范围的每个处于预定第一波长范围中;a) an epitaxial semiconductor structure, when the substrate includes at least one of a commonly assigned waveguide for supporting propagation of an optical signal in a predetermined first wavelength range and a plurality of wavelength assigned waveguides vertically arranged in order of increasing wavelength band gap, at grown in a III-V semiconductor material system grown in a single growth step, wherein each of the plurality of wavelength-specifying waveguides supports a predetermined second wavelength range, each of the predetermined second wavelength ranges being in the predetermined first wavelength range;

b)光学输入端口,用于接收第一波长范围中的光信号;b) an optical input port for receiving optical signals in the first wavelength range;

c)光学放大器,至少包括在多个波长指定波导之一中形成的增益段、用于使光学放大器正向偏压的第一触点和第一输出端口,光学放大器在光学上耦合到用于接收光信号并且向第一输出端口提供经放大的光信号的光学输入端口;c) an optical amplifier comprising at least a gain section formed in one of a plurality of wavelength-specifying waveguides, a first contact for forward biasing the optical amplifier, and a first output port, the optical amplifier being optically coupled to a an optical input port that receives an optical signal and provides an amplified optical signal to the first output port;

d)第一滤波器,至少包括第二输出端口,并且特征至少在于第一通带宽度,滤波器在光学上耦合到光学放大器的第一输出端口并且用于向第二输出端口提供经放大的光信号的第一预定部分,经放大的光信号的第一预定部分至少根据第一通带宽度来确定;d) a first filter comprising at least a second output port and characterized at least by a first passband width, the filter is optically coupled to the first output port of the optical amplifier and is used to provide the amplified a first predetermined portion of the optical signal, the first predetermined portion of the amplified optical signal is determined based on at least a first passband width;

e)第一光电检测器,在光学上至少包括用于使第一光电检测器反向偏压的第二触点,第一光电检测器耦合到用于接收经放大的光信号的第一预定部分的第一滤波器的第二输出端口;其中e) a first photodetector optically comprising at least a second contact for reverse biasing the first photodetector, the first photodetector being coupled to a first predetermined contact for receiving an amplified optical signal Part of the second output port of the first filter; where

第一触点和第二触点在外延半导体结构的同一层上形成,但是相互电绝缘。The first contact and the second contact are formed on the same layer of the epitaxial semiconductor structure, but are electrically isolated from each other.

通过阅读以下结合附图对本发明的具体实施例的描述,本领域的技术人员将会清楚地知道本发明的其它方面和特征。Those skilled in the art will clearly understand other aspects and features of the present invention by reading the following description of specific embodiments of the present invention in conjunction with the accompanying drawings.

附图说明 Description of drawings

现在仅作为举例、参照附图来描述本发明的实施例,其中:Embodiments of the invention are now described, by way of example only, with reference to the accompanying drawings, in which:

图1A示出按照Tolstikhin等人的“Optically Pre-AmplifiedDetectors for Multi-Guide Vertical Integration in InP”(Proc.IPRM 2009)的现有技术的OPAD;Figure 1A shows a prior art OPAD according to Tolstikhin et al. "Optically Pre-Amplified Detectors for Multi-Guide Vertical Integration in InP" (Proc. IPRM 2009);

图1B示出关于OPAD的Tolstikhin的现有技术所提供的功能性的示意图;Figure 1B shows a schematic diagram of the functionality provided by Tolstikhin's prior art on OPAD;

图2示出OPAD接收器的Q因子与具有变化滤波器带宽的光学增益;Figure 2 shows the Q factor of an OPAD receiver versus optical gain with varying filter bandwidth;

图3示出本发明所提供的功能性的示意图;Figure 3 shows a schematic diagram of the functionality provided by the present invention;

图4A示出按照本发明的一个实施例的OPAD,其中波长滤波通过反射界面以及具有电路边缘的波导界面的薄膜滤波器来实现;Figure 4A shows an OPAD according to one embodiment of the present invention, where wavelength filtering is achieved by a thin-film filter with a reflective interface and a waveguide interface with circuit edges;

图4B示出按照本发明的一个实施例的OPAD,其中波长滤波通过反射界面以及与多模干扰耦合器相结合的薄膜滤波器来实现;Figure 4B shows an OPAD according to one embodiment of the present invention, wherein wavelength filtering is achieved by a reflective interface and a thin-film filter combined with a multimode interference coupler;

图4C示出按照本发明的一个实施例的OPAD,其中波长滤波通过反射界面以及与具有波导号角的薄膜滤波器来实现;Figure 4C shows an OPAD according to one embodiment of the present invention, wherein wavelength filtering is achieved by a reflective interface and a thin-film filter with a waveguide horn;

图5示出按照本发明的一个实施例的OPAD,其中波长滤波通过无源波导层中采用的多模干扰滤波器来实现;Fig. 5 shows an OPAD according to an embodiment of the present invention, wherein wavelength filtering is realized by the multimode interference filter employed in the passive waveguide layer;

图6示出按照本发明的一个实施例的OPAD,其中波长滤波通过在无源波导层中形成的光栅辅助横向定向耦合器来实现;以及Figure 6 shows an OPAD according to one embodiment of the present invention, wherein wavelength filtering is achieved by a grating-assisted lateral directional coupler formed in the passive waveguide layer; and

图7示出按照本发明的一个实施例的OPAD,其中光学放大器与光电检测器之间的波长滤波通过光栅辅助耦合结构来实现,并且第二光栅辅助耦合结构把来自光学放大器的前端面的对应滤波宽带噪声信号耦合到监测光电检测器。7 shows an OPAD according to an embodiment of the present invention, wherein the wavelength filtering between the optical amplifier and the photodetector is realized by a grating-assisted coupling structure, and the second grating-assisted coupling structure combines the corresponding The filtered broadband noise signal is coupled to a monitoring photodetector.

具体实施方式 Detailed ways

本发明针对具有装置的放大与检测段之间的带通波长滤波器的集成光学前置放大检测器(OPAD),该滤波器预计降低装置的放大段中产生的放大自发发射对装置的检测段中产生的宽带噪声的影响,由此增强以光学前置放大检测器为特征的光学接收器中的信噪比并且改进其性能。The present invention is directed to an integrated optical preamplified detector (OPAD) with a bandpass wavelength filter between the amplification and detection sections of the device that is expected to reduce the amplified spontaneous emissions generated in the amplification section of the device to the detection section of the device The effect of broadband noise generated in the optical receiver, thereby enhancing the signal-to-noise ratio and improving the performance of optical receivers featuring optical preamplified detectors.

下面可参照按照附图来编号的特定元件。以下论述应当被理解为实际上是示范的,而不是对本发明的范围的限制。本发明的范围在权利要求书中定义,而不应当被理解为受到以下所述实现细节限制,本领域的技术人员会理解,以下所述实现细节能够通过采用等效功能元件替代元件来修改。Reference may be made below to specific elements numbered according to the figures. The following discussion should be considered exemplary in nature, and not limiting on the scope of the invention. The scope of the present invention is defined in the claims and should not be construed as being limited by the implementation details described below, which can be modified by replacing elements with equivalent functional elements, as those skilled in the art will understand.

通常通过参照蚀刻棱线波导结构来参照光学波导,并且由各蚀刻棱线波导结构的最上层中的棱线元件来标识。这种参考预计简化描述而不是表示任何元件的光学波导只包括所标识的上蚀刻棱线元件。本领域的技术人员理解,本发明的范围因此并不是要局限于这类蚀刻棱线波导,因为它们仅表示可能实施例的一部分。Optical waveguides are typically referenced by reference to etched ridge waveguide structures, and are identified by the ridge element in the uppermost layer of each etched ridge waveguide structure. Such references are intended to simplify the description rather than denote any components. The optical waveguide includes only the identified upper etched ridge elements. Those skilled in the art understand that the scope of the present invention is therefore not intended to be limited to such etched ridge waveguides, as they represent only a part of possible embodiments.

参照图1A,示出按照V.Tolstikhin等人的“OpticallyPre-Amplified Detectors for Multi-Guide Vertical Integration in InP”(Proc.IPRM 2009)的现有技术的集成OPAD 100A。OPAD 100A包括分别由结构110和120所示的无源和有源波导,它们相互之间垂直堆叠,使得无源波导110处于下方,并且设计为在上有源波导120的指定波长范围中是透明的。横向地,波导通过蚀刻无源波导110的浅棱线和有源波导120的深棱线来限定。术语“浅”和“深”棱线此后用于标识棱线波导设计,其中蚀刻终止分别在导向层之上并且经过其中。深蚀刻有源波导120实际上形成台地,其中到波导PIN结构的N触点130除了台地之外还沉积在无源波导110顶面上。P触点在台地的顶面形成,作为有源波导120的上表面。这样,在共享公共地、即N触点的分别经过正向和反向偏压的有源波导PIN的放大段140与检测段150之间的电绝缘通过蚀刻掉这两个段之间的台地的材料来实现。由S.Forrest等人在标题为“PhotonicIntegrated Circuits”的美国专利6795622中报导的如前面所述的类似设计方式。Referring to FIG. 1A , there is shown a prior art integrated OPAD 100A according to V. Tolstikhin et al., "Optically Pre-Amplified Detectors for Multi-Guide Vertical Integration in InP" (Proc. IPRM 2009). OPAD 100A includes passive and active waveguides shown by structures 110 and 120 respectively, which are stacked vertically with respect to each other such that passive waveguide 110 is below and designed to be transparent in the specified wavelength range of upper active waveguide 120 of. Laterally, the waveguides are defined by etching the shallow ridgelines of the passive waveguides 110 and the deep ridgelines of the active waveguides 120 . The terms "shallow" and "deep" ridgelines are hereafter used to identify ridgeline waveguide designs in which the etch terminates above and through the guiding layer, respectively. Etching back the active waveguide 120 actually forms a mesa where the N-contact 130 to the waveguide PIN structure is deposited on the top surface of the passive waveguide 110 in addition to the mesa. The P-contact is formed on the top surface of the mesa as the upper surface of the active waveguide 120 . Thus, the electrical isolation between the amplifying section 140 and the detecting section 150 of the respectively forward and reverse biased active waveguide PINs that share a common ground, ie N contact, is achieved by etching away the mesa between these two sections. material to achieve. A similar design as previously described is reported by S. Forrest et al. in US Patent 6,795,622 entitled "Photonic Integrated Circuits".

尽管两个PIN结构之间的简单绝缘沟槽提供这种电绝缘,但是它还突然中断有源波导,从而对于从放大到检测段的转变产生不希望的光线损失。不仅这种损失是不希望的,因为必须采用将产生更大ASE相关噪声的更大增益来补偿,而且当它涉及PIC环境时,在放大段的输出的过度光散射还将引起对其它光学电路元件的光串扰。因此,经由从放大段到无源波导段以及然后从无源波导段到检测段的绝热转变的有源波导的放大与检测段之间的低插入损耗转变是更优选的解决方案。这仍然提供两个相反偏压有源波导段之间的电绝缘。实际上,这种绝热转变通过有源波导的适当锥体以及可能的转变区域中的无源波导来实现,如图1所示,但是没有明确标识。Although a simple insulating trench between the two PIN structures provides this electrical isolation, it also interrupts the active waveguide abruptly, creating unwanted light loss for the transition from the amplification to the detection segment. Not only is this loss undesirable as it must be compensated with greater gain which will generate greater ASE-related noise, but as it relates to PIC environments, excessive light scattering at the output of the amplified section will also cause damage to other optical circuits Optical crosstalk of components. Therefore, a low insertion loss transition between the amplification and detection sections of the active waveguide via an adiabatic transition from the amplification section to the passive waveguide section and then from the passive waveguide section to the detection section is a more preferred solution. This still provides electrical isolation between the two oppositely biased active waveguide segments. In practice, this adiabatic transition is achieved by appropriate tapers of active waveguides and possibly passive waveguides in the transition region, as shown in Fig. 1, but not clearly identified.

有源波导120与无源波导110之间或者反之的光信号的横向锥形辅助绝热垂直转变是一种设计解决方案,该解决方案能够将电绝缘放大段140与检测段150之间的插入损耗降低到1dB与2dB之间(参见V.Tolstikhin等人的“Optically Pre-Amplified Detectors for Multi-Guide VerticalIntegration in InP”(Proc.IPRM 2009,第155-158页,Newport Beach,2009)。然而,这些垂直转变不是实际波长选择性的,并且因此将放大段140中产生的宽带ASE传递给检测段150,其中它将产生信号-ASE和ASE-ASE拍频噪声,从而以相等效率来产生它们。The lateral taper assisted adiabatic vertical transition of the optical signal between the active waveguide 120 and the passive waveguide 110 or vice versa is a design solution that can reduce the insertion loss between the electrically isolated amplification section 140 and the detection section 150 reduced to between 1dB and 2dB (see V. Tolstikhin et al., "Optically Pre-Amplified Detectors for Multi-Guide Vertical Integration in InP" (Proc. IPRM 2009, pp. 155-158, Newport Beach, 2009). However, these The vertical transition is not actually wavelength selective, and therefore passes the broadband ASE generated in the amplification section 140 to the detection section 150, where it will generate signal-ASE and ASE-ASE beat noise, producing them with equal efficiency.

因此,有效电路配置在图1B中由包括光学增益块180和光电检测器190的电路100B示出。在波长λs的光信号从光学输入170馈入电路100B,并且耦合到光学增益块180。从光学增益块180,在波长λs的经放大的光信号经由转变块185向前传播到光电检测器190,它表示有源与无源波导之间的两个光学转变的效果。还从光学增益块180耦合的是分别向光学输入170和光电检测器190的前向和反向传播ASE信号,这些ASE信号具有波长谱λASE。前向传播ASE信号通过有源与无源波导之间的两个光学转变基本上相对于波长谱不受影响地传播,但是因这些界面的插入损耗而具有降低的光功率(通常为0.5dB1.0dB),各由V.Tolstikhin等人在“Optically Pre-Amplified Detectors forMulti-Guide Vertical Integration in InP”(Proc.IPRM 2009,第155-158页,Newport Beach,2009)中所报道。Thus, an effective circuit configuration is shown in FIG. 1B by circuit 100B including optical gain block 180 and photodetector 190 . An optical signal at wavelength λs is fed into circuit 100B from optical input 170 and coupled to optical gain block 180 . From optical gain block 180, the amplified optical signal at wavelength λs propagates forward via transition block 185 to photodetector 190, which represents the effect of the two optical transitions between active and passive waveguides. Also coupled from optical gain block 180 are forward and reverse propagating ASE signals to optical input 170 and photodetector 190 respectively, these ASE signals having a wavelength spectrum λ ASE . The forward propagating ASE signal propagates essentially unaffected with respect to the wavelength spectrum through the two optical transitions between the active and passive waveguides, but with reduced optical power (typically 0.5dB1. 0 dB), each reported by V. Tolstikhin et al. in "Optically Pre-Amplified Detectors for Multi-Guide Vertical Integration in InP" (Proc. IPRM 2009, pp. 155-158, Newport Beach, 2009).

ASE对接收器信噪比的影响通过图2所示的计算结果示出,其中Q因子作为具有变化ASE滤波谱宽度ΔλPBF的信号的净增益的函数来给出,并且基于前面所示的分析来提供。参照光纤-家庭光学接入中的OPAD的应用,按照GPON ITU标准(ITU-T G.984.2)来考虑接收器的光(波导检测器中的发射器相对强度噪声、散粒和热噪声)和电(由前端放大器中的等效输入噪声i2 EIN所表示)的电路中的所有重要噪声贡献。从图2能够看到,虽然Q因子趋向于作为净增益的函数而饱和,但是当增益段噪声因子Fg较高(即,Fg=7)时,饱和度在较低Q和净光学增益发生。降低增益段噪声因数(即,Fg=5)和/或限制ASE的光学通带(即,滤出通带ΔλPBF外部的ASE)来增加可实现的Q因子。当前端放大器的输入噪声iEIN设置为值

Figure BDA00001866012800151
即50nm或以下的光学通带ΔλPBF的这些计算中采用的市场销售TIA的值时,达到对应于误码率10-12的超过7的Q的值是可行的。对于在1490nm的中心波长适合于2.5Gb/s传输的1.8GHz的电带宽来执行图2中的计算。如图所示,第一至第三曲线210至230分别表示20nm、30nm和50nm的带宽的增益段噪声因数Fg=7的性能曲线。第四至第六240至260分别表示20nm、30nm和50nm的带宽的增益段噪声因子Fg=7的性能曲线。The effect of ASE on the receiver SNR is shown by the calculations shown in Fig. 2, where the Q factor is given as a function of the net gain of a signal with varying ASE filtered spectral width Δλ PBF , and based on the analysis shown previously to provide. With reference to the application of OPADs in fiber-optic access to the home, light at the receiver (emitter relative intensity noise, shot and thermal noise in waveguide detectors) and All significant noise contributions in circuits that are electrically (represented by the equivalent input noise i 2 EIN in the front-end amplifier). It can be seen from Figure 2 that although the Q factor tends to saturate as a function of net gain, when the gain stage noise factor F g is high (i.e., F g =7), the saturation is at lower Q and net optical gain occur. Reducing the gain stage noise figure (ie, F g =5) and/or limiting the optical passband of the ASE (ie, filtering out the ASE outside the passband Δλ PBF ) increases the achievable Q-factor. When the input noise i EIN of the front-end amplifier is set to the value
Figure BDA00001866012800151
Values of Q exceeding 7 corresponding to a bit error rate of 10 −12 are feasible at the values of commercially available TIAs employed in these calculations of the optical passband Δλ PBF of 50 nm or less. The calculations in Figure 2 were performed for an electrical bandwidth of 1.8 GHz suitable for 2.5 Gb/s transmission at a center wavelength of 1490 nm. As shown in the figure, the first to third curves 210 to 230 represent the performance curves of the noise factor Fg=7 of the gain section with bandwidths of 20nm, 30nm and 50nm, respectively. The fourth to sixth 240 to 260 represent the performance curves of the noise factor F g =7 of the gain section with bandwidths of 20nm, 30nm and 50nm respectively.

为了光学通带滤波器对接收器灵敏度具有积极效果,通过降低ASE-ASE拍频噪声,滤波器通带ΔλPBF应当比操作条件下的ASE谱宽度λASE要窄,但是宽于或等于前置放大光信号的波长范围宽度λs。在以大量或量子阱有源层为特征并且提供-5dB    7dB的净增益的典型波导半导体光学放大器中,ASE谱宽度宽于50nm并且可能超过100nm,而信号波长范围宽度通常更窄,例如在EPON或GPON ONU数据接收器的情况下为20nn或者在GPON ONU视频接收器的情况下为10nm,从而为设计人员留下通过适当选择滤波器通带宽度而在不等式λS≤λPBF≤λASE中挤入的某个空间。在这种通带中,信号和ASE均将从放大传送到OPAD的检测段中,而通带外部的所有波长将被拒绝,并且因此将不会对接收器噪声作出贡献。For an optical passband filter to have a positive effect on receiver sensitivity by reducing the ASE-ASE beat noise, the filter passband Δλ PBF should be narrower than the ASE spectral width λ ASE under operating conditions, but wider than or equal to the pre- The wavelength range width λ s of the amplified optical signal. In a typical waveguide semiconductor optical amplifier characterized by a large number or quantum well active layer and providing a net gain of -5dB 7dB, the ASE spectral width is wider than 50nm and may exceed 100nm, while the signal wavelength range width is usually narrower, such as in EPON or 20nm in the case of a GPON ONU data receiver or 10nm in the case of a GPON ONU video receiver, thus leaving the designer with the inequalities λ S ≤ λ PBF ≤ λ ASE A space squeezed into. In such a passband, both the signal and the ASE will pass from the amplification into the OPAD's detection section, while all wavelengths outside the passband will be rejected and thus will not contribute to receiver noise.

因此,从图2显而易见,如果当保持在以最小光学损失来实现有源波导的放大与检测段之间的电绝缘的解决方案的框架中的同时,还提供通带波长滤波以降低放大段中产生的ASE对总接收噪声的影响,则它是集成OPAD设计的改进。进一步有利的是,使这种或这类解决方案与MGVI平台兼容,并且相应地使集成OPAD不仅是高功能装置,而且还是节省成本的PIC接收器和收发器的重要构件块。Thus, it is evident from Fig. 2 that if, while remaining within the framework of a solution to achieve electrical isolation between the amplification and detection sections of the active waveguide with minimal optical losses, also provide passband wavelength filtering to reduce the If the resulting ASE affects the total received noise, then it is an improvement in the integrated OPAD design. It would be further advantageous to make this or such solution compatible with the MGVI platform, and accordingly make the integrated OPAD not only a high-function device, but also an important building block for a cost-effective PIC receiver and transceiver.

参照图3,存在表示按照本发明的实施例的OPAD 300的示意图,其中在OPAD 300的光放大与检测段之间以及前导光学电路或网络与OPAD 300的光放大段之间均采用通带滤波元件。前者是对于本发明的任何实施例是必须的,而后者是可选的,并且因此用于防止不希望的ASE光进入前导光学电路或网络。Referring to Figure 3, there is a schematic diagram representing an OPAD 300 according to an embodiment of the present invention in which passband filtering is employed between the optical amplification and detection sections of the OPAD 300 and between the leading optical circuit or network and the optical amplification section of the OPAD 300 element. The former is mandatory for any embodiment of the invention, while the latter is optional, and thus serves to prevent unwanted ASE light from entering the leading optical circuit or network.

在OPAD 300的放大段的前侧和后侧均采用光学滤波器的情况下,波长范围λs中的光信号在源310进入OPAD 300,并且耦合到前通带滤波器(PBF)320。前PBF 320具有波长通带宽度ΔλF PBF,使得它包括所有信号波长,并且由此将入局光信号传送到放大段(增益元件)330中。通带范围ΔλF PBF外部的波长被拒绝并且重新路由到吸收器350,其中它们携带的光信号被吸收并且由此防止进一步传播到OPAD 300中。由于前PBF 320必须向检测器元件360传送所有入局光信号,所以ΔλF PBF应当包括所有信号波长,即,

Figure BDA00001866012800161
同时,理想地,它应当不包括信号波长范围λs外部的所有波长,表明在适当设计的装置中在没有提供前PBF 320并且相应地在放大段的前侧没有吸收器350的情况下,入局光信号从源310直接传送到增益元件330中。Optical signals in the wavelength range λs enter OPAD 300 at source 310 and are coupled to front passband filter (PBF) 320 with optical filters employed on both the front and rear sides of the amplification section of OPAD 300 . The front PBF 320 has a wavelength passband width Δλ F PBF such that it includes all signal wavelengths, and thus passes the incoming optical signal into the amplification section (gain element) 330 . Wavelengths outside the passband range Δλ F PBF are rejected and rerouted to absorber 350 , where the optical signals they carry are absorbed and thus prevented from propagating further into OPAD 300 . Since the front PBF 320 must transmit all incoming optical signals to the detector element 360, the Δλ F PBF should include all signal wavelengths, i.e.,
Figure BDA00001866012800161
At the same time, ideally, it should exclude all wavelengths outside the signal wavelength range λ s , indicating that in a properly designed setup In the absence of a front PBF 320 and correspondingly no absorber 350 at the front side of the amplification section, the incoming optical signal is passed directly from the source 310 into the gain element 330 .

在任一种情况下,入局光信号在增益元件330中经过放大,并且然后前向耦合到后PBF 350,其中它们按照其通带ΔλB PBF经过滤波,使得这个通带中的波长进一步传播到OPAD 300的检测段,即检测器元件360,而这个通带范围外部的波长被拒绝并且可选地路由到监测元件370,这例如是另一个光电检测器,由此提供允许对放大段中的净增益(增益元件330)的控制的反馈信号。由于后PBF 360必须向检测器元件370传送所有入局光信号,所以ΔλB PBF应当包括所有信号波长,即并且优选地不包括信号波长范围λs外部的所有波长,即,在最佳设计中

Figure BDA00001866012800173
In either case, incoming optical signals are amplified in gain element 330 and then forward coupled to rear PBF 350 where they are filtered according to their passband Δλ B PBF such that wavelengths in this passband propagate further to the OPAD 300, the detector element 360, while wavelengths outside this passband range are rejected and optionally routed to a monitoring element 370, which is, for example, another photodetector, thereby providing a net Feedback signal for control of gain (gain element 330). Since the rear PBF 360 must transmit all incoming optical signals to the detector element 370, the Δλ B PBF should include all signal wavelengths, i.e. and preferably excludes all wavelengths outside the signal wavelength range λs , i.e., in an optimal design
Figure BDA00001866012800173

除了在检测器元件360中对其检测之前提供入局光信号的所需放大之外,增益元件330还产生非预期ASE,该ASE通过在图3所示的框图中添加与增益元件330并联的ASE元件380来表示。这个ASE的特征在于波长范围λASE,它基本上与增益元件330的净增益范围λG重叠,并且从OPAD 300中的ASE元件340前向和后向传播。In addition to providing the required amplification of the incoming optical signal prior to its detection in detector element 360, gain element 330 also produces an unintended ASE by adding an ASE in parallel with gain element 330 in the block diagram shown in FIG. Element 380 is represented. This ASE is characterized by a wavelength range λ ASE , which substantially overlaps the net gain range λ G of gain element 330 , and propagates forward and backward from ASE element 340 in OPAD 300 .

在有前PBF 320的情况下以及当没有存在前BPF 320时,均将信号波长范围λs中的后向传播ASEλASE传送到前导光学电路或网络(由源310示意表示)中。但是,在有前PBF 320的情况下,则信号波长范围λs外部的信号能够被前PBF 320拒绝并且然后在吸收器元件340中被吸收,由此降低到前导电路或网络中的ASE穿透。The backpropagating ASE λ ASE in the signal wavelength range λ s is delivered into the leading optical circuit or network (schematically represented by source 310 ) both with the pre-PBF 320 and when no pre-BPF 320 is present. However, with the pre-PBF 320, then signals outside the signal wavelength range λs can be rejected by the pre-PBF 320 and then absorbed in the absorber element 340, thereby reducing ASE penetration into the preamble circuit or network .

信号波长范围λs中的前向传播ASE连同前置放大入局信号一起由后PBF 360传送到检测器元件360中。但是,信号波长范围λs外部的ASE信号在本发明的所有实施例中被拒绝。可选地,这些被拒绝信号被重新路由到监测元件370并且在其中检测,以便提供对增益元件330的控制,或者以其它方式被吸收、耗散或路由。The forward propagating ASE in the signal wavelength range λ s is transmitted by the rear PBF 360 into the detector element 360 together with the preamplified incoming signal. However, ASE signals outside the signal wavelength range λ s are rejected in all embodiments of the invention. Optionally, these rejected signals are rerouted to and detected by monitoring element 370 to provide control of gain element 330, or otherwise absorbed, dissipated or routed.

按照上式(3),后PBF 350对接收器噪声的影响被估计为ASE-ASE拍频贡献对宽带噪声降低因子

Figure BDA00001866012800181
如果ΔλASE>>ΔλS,例如在具有宽增益谱和窄信号波长范围的装置中,它可以是显著的,由此改进OPAD300性能,但是如果ΔλASE≤λS,则ASE滤波没有实际上改进OPAD性能,并且因而没有意义。According to the above formula (3), the impact of post-PBF 350 on receiver noise is estimated as ASE-ASE beat frequency contribution to wideband noise reduction factor
Figure BDA00001866012800181
If Δλ ASE >> Δλ S , for example in devices with a wide gain spectrum and narrow signal wavelength range, it can be significant, thereby improving OPAD300 performance, but if Δλ ASE ≤ λ S , ASE filtering is not actually improved OPAD performance, and thus meaningless.

相应地,如图3给出的具有ASE滤波的OPAD 300的框图表示对此问题的最普通解决方案和方式,它并不局限于任何特定OPAD设计,也不取决于PBF元件和重新路由波导元件的设计。下面针对图4至图7所示的实施例表示前面针对图3的OPAD 300所述的后PBF 360元件的一些具体设计。这些是使用一系列光学波导电路元件和布置可实现的。这些波导电路和布置是仅用于便于说明的实施例,而不表示落入权利要求书的范围之内的所有潜在实施例。Accordingly, the block diagram of an OPAD 300 with ASE filtering given in Figure 3 represents the most general solution and approach to this problem, which is not limited to any particular OPAD design, nor does it depend on PBF elements and rerouting waveguide elements the design of. Some specific designs of the rear PBF 360 elements described above for the OPAD 300 of FIG. 3 are shown below for the embodiments shown in FIGS. 4 to 7 . These are achievable using a range of optical waveguide circuit elements and arrangements. These waveguide circuits and arrangements are examples for convenience of illustration only, and do not represent all potential embodiments falling within the scope of the claims.

参照图4A至图4C,示出本发明的实施例,其中薄膜滤波器(TFF)提供OPAD中的所需通带滤波。通过前面针对图3所述的功能性,TFF设计为信号波长范围λs的反射滤波器以及这个范围外部的ASE波长的传送滤波器,λASE≤λPBF Lower和λASE≥λPBF_Upper,其中λPBF_Lower和λPBF_Upper表示TFF所提供的PBF的波长下限和上限,其可设置为信号波长范围λs或确定公差以允许诸如温度之类的环境影响。TFF采用例如多层介电叠层设计(例如参见JDS UniphaseInterference Filter Hnadbook,第2修订版,2007)。Referring to Figures 4A-4C, an embodiment of the present invention is shown in which a thin film filter (TFF) provides the required passband filtering in the OPAD. With the functionality previously described for Figure 3, the TFF is designed as a reflective filter for the signal wavelength range λs and as a transmit filter for ASE wavelengths outside this range, λASE ≤ λ PBF Lower and λ ASE ≥ λ PBF_Upper , where λ PBF_Lower and λPBF_Upper represent the lower and upper wavelength limits of the PBF provided by the TFF, which can be set to the signal wavelength range λs or determined to allow for environmental influences such as temperature. TFF employs, for example, a multilayer dielectric stack design (see, for example, JDS Uniphase Interference Filter Hanadbook, Rev. 2, 2007).

在放大与检测段之间包含作为滤波元件的TFF(即后PBF 360)的实施例的基本思路在图4A中由OPAD 400A的示意图所示。相应地,OPAD 400A包括光学衬底410,其上已经生长MGVI波导结构并且形成图案,为了清晰起见没有明确表示。相应地,第一无源波导411从包括接收来自第二无源波导410的入局信号的MGVI的无源和波导层的放大段412接收经放大的光信号。放大段412示意示出,而不是要反映本领域的技术人员显而易见的MGVI平台中的实际有源-无源波导集成。因此,分别在波长λs和λASE中的入局光信号和前向传播ASE朝装置的后端面416传播,其中它们入射到TFF 413。预定波长范围λs中的光信号从TFF 413反射,并且然后耦合到第三无源波导414,第三无源波导414在光学上连接到OPAD 400A的检测段415。如同放大段412一样,检测段415示意示出,而不是要反映MGVI平台中的实际有源-无源波导集成。预定波长范围λs外部的所有波长通过TFF 413传送,并且相应地从包括OPAD 400A的PIC传送出。The basic idea of an embodiment that includes a TFF as a filtering element between the amplification and detection stages (ie, post-PBF 360 ) is illustrated in FIG. 4A by the schematic diagram of OPAD 400A. Accordingly, OPAD 400A includes an optical substrate 410 on which MGVI waveguide structures have been grown and patterned, not explicitly shown for clarity. Accordingly, the first passive waveguide 411 receives an amplified optical signal from the amplifying section 412 comprising the passive and waveguide layers of the MGVI receiving the incoming signal from the second passive waveguide 410 . The enlarged section 412 is shown schematically and is not intended to reflect the actual active-passive waveguide integration in the MGVI platform as would be apparent to those skilled in the art. Thus, incoming optical signals and forward propagating ASE in wavelengths λs and λ ASE respectively propagate towards the rear facet 416 of the device, where they are incident on the TFF 413 . Optical signals in the predetermined wavelength range λs are reflected from the TFF 413 and then coupled to a third passive waveguide 414, which is optically connected to the detection section 415 of the OPAD 400A. Like the amplification section 412, the detection section 415 is shown schematically and is not intended to reflect the actual active-passive waveguide integration in the MGVI platform. All wavelengths outside the predetermined wavelength range λ s are transmitted through the TFF 413 and accordingly out of the PIC comprising the OPAD 400A.

本领域的技术人员显而易见,可选地,光电检测器(在这个示意图中为了清晰起见而未示出)可设置在TFF 413后面,以便测量作为前向ASE光线的信号波长范围外部的所传送光线,由此按照前面图3中的OPAD 300的框图来提供OPAD 400A的放大段的增益控制。It will be apparent to those skilled in the art that optionally a photodetector (not shown in this schematic for clarity) can be placed behind the TFF 413 to measure transmitted light outside the wavelength range of the signal as forward ASE light , thereby providing the gain control of the amplification section of the OPAD 400A according to the block diagram of the OPAD 300 in FIG. 3 above.

在OPAD 400A的后端面416的TFF 413的设计应当调整成第一无源波导411的入射角,使得目标波长范围λs中的光信号在由TFF 413反射之后耦合到第二无源波导414中。不像例如D.H.Cushing在标题为“Multi-Layer ThinFilm Dielectric Bandpass Filter”的美国专利6011652以及P.J.Gasoli在标题为“Interleaving of Similar Thin-Film Stacks for Producing OpticalInterference Coatings”的美国专利5179468中概述的预计用于近似法向(即,0度)入射的常规TFF设计,TFF 413将设计成以较大入射角进行操作,但其仍然保持小于与预定波长范围λs外部的波长中的总内反射角对应的角。The design of the TFF 413 at the rear facet 416 of the OPAD 400A should be tuned to the angle of incidence of the first passive waveguide 411 such that optical signals in the target wavelength range λs are coupled into the second passive waveguide 414 after being reflected by the TFF 413 . Unlike e.g. DHCushing in US Patent 6011652 titled "Multi-Layer ThinFilm Dielectric Bandpass Filter" and PJ Gasoli in US Patent 5179468 titled "Interleaving of Similar Thin-Film Stacks for Producing Optical Interference Coatings" is expected to be used for approximation With a conventional TFF design towards (i.e., 0 degrees) incidence, the TFF 413 would be designed to operate at larger angles of incidence, but still remain smaller than the angle corresponding to the total internal reflection angle in wavelengths outside the predetermined wavelength range λs .

与图4A所述的实施例的设计简单性相对照,实际实现相当棘手,例如,它部分要求分别在第一和第二无源波导411、414的布局预先确定的位置准确分裂涂敷有TFF 413的端面。如果在可与波导宽度比较的容差中,例如在工作于1.3μm或1.5μm波长范围的基于InP的材料中的典型浅蚀刻棱线波导的情况下的微米级的准确分裂不是一个选项,则能够实现某些设计修改以减轻分裂容差。In contrast to the design simplicity of the embodiment depicted in FIG. 4A , the actual implementation is quite tricky, for example, it requires in part to accurately split the coated TFF 413 end faces. If accurate splitting on the micrometer scale is not an option in tolerances comparable to waveguide widths, such as in the case of typical shallow etched ridgeline waveguides in InP-based materials operating in the 1.3 μm or 1.5 μm wavelength range, then Certain design modifications can be implemented to alleviate splitting tolerances.

一种这样的修改如图4B所示,其中示出包含装置端面的TFF 425的OPAD 400B的按照本发明的另一个实施例,其中分裂容差的减轻通过分别将二端口多模干涉计(MMI)421插入第一和第二无源波导422、423与具有TFF 425的装置端面424之间来实现。第一无源波导422把来自放大段426的信号耦合到MMI 421,并且第二无源波导423把来自MMI 421的滤波信号耦合到检测段427。对于由TFF 425反射到PIC芯片中的预定信号波长范围λs中的波长,虽然这个范围外部的波长通过TFF 425并且从PIC芯片来传送,但是包含同一端面421的输入端口421A和输出端口421B的MMI 421的性能相当于具有带有相对端面的输入和输出端口的MMI 421的加倍长度的MMI(这种透射MMI在图4B中未示出)的性能。利用MMI 421由此实现二端口MMI对MMI 421长度的增加容差的设计技术是众所周知,并且实际上降低到提供端口-端口传输谱中的平坦顶部通带,参见例如L.Soldano等人的“Optical Multi-Mode InterferenceDevices Based on Self-Imaging:Principles and Applications”(J.LightwaveTech.,vol.13,No.4,第615-627页,1995年4月)。One such modification is shown in FIG. 4B, which shows another embodiment in accordance with the present invention of an OPAD 400B including a TFF 425 at the end face of the device, wherein the split tolerance is mitigated by separately incorporating a two-port multimode interferometer (MMI ) 421 is inserted between the first and second passive waveguides 422, 423 and the device end face 424 with TFF 425 to achieve. A first passive waveguide 422 couples the signal from the amplification section 426 to the MMI 421 and a second passive waveguide 423 couples the filtered signal from the MMI 421 to the detection section 427 . For wavelengths in the predetermined signal wavelength range λ s reflected by the TFF 425 into the PIC chip, although wavelengths outside this range pass through the TFF 425 and are transmitted from the PIC chip, the input port 421A and the output port 421B including the same end face 421 The performance of the MMI 421 is equivalent to that of a double-length MMI (such a transmissive MMI is not shown in FIG. 4B ) having the MMI 421 with oppositely facing input and output ports. The design technique of utilizing the MMI 421 thereby achieving the increased tolerance of the two-port MMI to the length of the MMI 421 is well known and practically reduced to providing a flat top passband in the port-to-port transmission spectrum, see e.g. L. Soldano et al. Optical Multi-Mode Interference Devices Based on Self-Imaging: Principles and Applications" (J. Lightwave Tech., vol. 13, No. 4, pp. 615-627, April 1995).

这样,在它们对端口-端口传输的影响方面,相当于波长偏差的TFF425和后端面位置(即装置端面424相对MMI 421的前端面)的偏差不太显著,由此减轻分裂容差对装置性能的影响。作为附加有益效果,MMI辅助后端面TFF解决方案允许预计用于法向入射的常规TFF设计的使用,例如D.H.Cushing在标题为“Multi-Layer Thin Film Dielectric Bandpass Filter”的美国专利6011652以及P.J.Gasoli在标题为“Interleaving of Similar Thin-FilmStacks for Producing Optical Interference Coatings”的美国专利5179468中所述。本领域的技术人员会理解,MMI 421还可设计成提供波长滤波的至少某个方面,以便与TFF 424结合起作用。Thus, deviations in TFF 425 and rear facet positions (i.e. device facet 424 relative to MMI 421's front facet) that correspond to wavelength deviations are less significant in their impact on port-to-port transmission, thereby mitigating the impact of split tolerance on device performance Impact. As an added benefit, the MMI-assisted rear TFF solution allows the use of conventional TFF designs intended for normal incidence, such as D.H. Cushing in US Patent 6011652 entitled "Multi-Layer Thin Film Dielectric Bandpass Filter" and P.J. Gasoli in Described in US Patent 5,179,468 entitled "Interleaving of Similar Thin-FilmStacks for Producing Optical Interference Coatings". Those skilled in the art will appreciate that MMI 421 can also be designed to provide at least some aspect of wavelength filtering to function in conjunction with TFF 424.

本领域的技术人员还显而易见,TFF 425可作为接合到装置端面424的分立TFF元件来提供,或者它可沉积到装置端面424。可选地,第三输出光学端口还可添加到MMI 421,并且相应地,所设置的通向第二检测段的第三无源波导在使用中充当监测器,例如前面所述图3的监测元件380,以便向OPAD400B的放大段提供增益控制环,这些元件为了清晰起见而在图4B中未示出。在这种情况下,所产生的PIC的等效光学电路再现前面所述图3给出的通用OPAD300的后端,其中TFF 425以及可选的MMI 421用作后PBF 360以及有源波导的两个检测段用作检测器元件370和监测器元件380。为了使这种功能性可行,树端口MMI这时必须向连接到有源波导的第一检测段(即充当检测元件370的检测段427)的输出无源波导传送波长范围λs中的光信号,并且波长范围λs外部的波长中的ASE光线耦合到通向有源波导的第二检测段(作为监测元件380进行操作)的另一个无源波导段。It will also be apparent to those skilled in the art that the TFF 425 can be provided as a discrete TFF element bonded to the device end face 424 or it can be deposited onto the device end face 424 . Optionally, a third output optical port can also be added to the MMI 421, and accordingly, a third passive waveguide provided leading to the second detection section acts as a monitor in use, such as the monitoring of FIG. 3 described above. Components 380 to provide a gain control loop to the amplifier section of OPAD 400B are not shown in FIG. 4B for clarity. In this case, the resulting PIC's equivalent optical circuit reproduces the backend of the generic OPAD 300 given in Figure 3 previously described, where the TFF 425 and optionally the MMI 421 are used as both rear PBF 360 and active waveguide. A detection section serves as a detector element 370 and a monitor element 380 . In order for this functionality to be feasible, the treeport MMI must then deliver an optical signal in the wavelength range λs to the output passive waveguide connected to the first detection section of the active waveguide, i.e. detection section 427 serving as detection element 370 , and ASE light in wavelengths outside the wavelength range λ s is coupled into another passive waveguide section leading to a second detection section of the active waveguide (operating as monitoring element 380).

另一个设计解决方案在图4C中由OPAD 400C所示,其允许减轻分裂容差对作为装置的放大与检测段之间的PBF的后端面TFF为特征的OPAD性能的影响。在这里,分别耦合来自放大段的光信号以及送往检测段并且为了清晰起见而未示出的第一和第二无源波导431、432配备有平面聚焦元件433、434,例如W.K.Burns等人在“Optical Waveguide Parabolic Coupling Horns”(Appli.Phys.Lett.Vol.30,第28-30页,1977年1月1日)中所述。这些平面聚焦元件433和434预计用于在棱线波导的出口将并行光束提供到平板波导435中,由此降低波导核心的平面中的束发散。平板波导端接于其上接合或沉积了TFF440的装置端面。因此,预定信号范围λs中的波长将由在端面的TFF 440反射到芯片中,而平板波导中的反射束将保持接近平行,而不管分裂端面相对于无源波导的准确位置。平面聚焦元件433和434不需要是相同的,相反,完全可设想的是,它们具有不同形状,例如在第一无源波导431的结束处、级联到OPAD400C的放大段并且在图4C中未示出的发射平面聚焦元件433能够设计成以小入射角提供平行束,而在第二无源波导432的开始处、通向OPAD 400C的检测段并且图4C中类似地未示出的收集平面聚焦元件434能够优化以用于耦合较宽并且发散的二维光束,即,沿垂直于图4C的平面的方向,光线限定在无源波导核心之中和周围。Another design solution is shown in FIG. 4C by OPAD 400C, which allows mitigating the impact of split tolerance on the OPAD performance characterized by the rear facet TFF of the PBF between the amplification and detection sections of the device. Here, first and second passive waveguides 431, 432, respectively coupling the optical signal from the amplification section and to the detection section and not shown for clarity, are equipped with planar focusing elements 433, 434, such as WKBurns et al. Described in "Optical Waveguide Parabolic Coupling Horns" (Appli. Phys. Lett. Vol. 30, pp. 28-30, Jan. 1, 1977). These planar focusing elements 433 and 434 are intended to provide parallel light beams into the slab waveguide 435 at the exit of the ridge waveguide, thereby reducing beam divergence in the plane of the waveguide core. The slab waveguide is terminated to the device end face on which TFF 440 is bonded or deposited. Thus, wavelengths in the predetermined signal range λs will be reflected into the chip by the TFF 440 at the end facet, while the reflected beam in the slab waveguide will remain nearly parallel, regardless of the exact location of the split end facet relative to the passive waveguide. The planar focusing elements 433 and 434 need not be identical, instead it is entirely conceivable that they have different shapes, e.g. The illustrated launch plane focusing element 433 can be designed to provide a parallel beam at small angles of incidence, while at the beginning of the second passive waveguide 432, leading to the detection section of the OPAD 400C and similarly not shown in Figure 4C, the collection plane Focusing element 434 can be optimized for coupling a broad and divergent two-dimensional light beam, ie along a direction perpendicular to the plane of FIG. 4C , the light rays are confined in and around the passive waveguide core.

本领域的技术人员显而易见,前面针对图4A至图4C所述的实施例的每个中,分别通过作为TFF 413、425、440的TFF传播的ASE光线可以可选地通过设置TFF后面的检测器来监测,由此允许OPAD的放大段中的增益的控制。这个附加TFF可外部设置到MGVI结构,或者备选地,其中TFF设置在MGVI结构中形成的凹槽中的情况下,它可随波导互连(例如平面波导结构)外部设置,或者设置在MGVI结构中实现的附加特征中。It will be apparent to those skilled in the art that in each of the embodiments described above with respect to FIGS. 4A to 4C , the ASE rays propagating through the TFFs respectively as TFFs 413, 425, 440 may optionally pass through detectors disposed behind the TFFs. to monitor, thereby allowing control of the gain in the amplification section of the OPAD. This additional TFF can be placed externally to the MGVI structure, or alternatively, where the TFF is placed in a groove formed in the MGVI structure, it can be placed externally with a waveguide interconnect (such as a planar waveguide structure), or placed in the MGVI Among the additional features implemented in the structure.

本领域的技术人员还显而易见,前面所示的实施例采用反射TFF,其中滤波器的通带中的光信号λs和λASE被反射和耦合到光电检测器,以及备选地可采用透射TFF滤波器,使得滤波器的通带中的光信号λs和λASE被传送以及通带外部的被反射。这类透射TFF元件可在按照本发明的实施例中通过检测器元件370的适当布置来实现,与具有或没有之间的平面波导元件的透射TFF相关联检测器元件370具有或没有监测元件380。It will also be apparent to those skilled in the art that the previously shown embodiments employ reflective TFF, where the optical signals λ and λ in the passband of the filter are reflected and coupled to the photodetector , and alternatively may employ transmissive TFF filter such that the optical signals λs and λASE in the passband of the filter are transmitted and those outside the passband are reflected. Such a transmissive TFF element can be realized in an embodiment according to the invention by a suitable arrangement of the detector element 370, with or without the monitoring element 380 associated with a transmissive TFF with or without a planar waveguide element in between. .

最后,还显而易见的是,其它波导元件和结构可结合TFF用于实现预定信号波长范围λs外部的ASE的波长滤波,参见例如T.Augustsson的标题为“Device and Method for Optical Add/Drop Multiplexing”的美国专利7423658以及C.H.Henry等人的标题为“Monolithic Optical Waveguide FiltersBased on Fourier Expansion”的美国专利5596661。Finally, it is also apparent that other waveguide elements and structures can be used in conjunction with TFFs to achieve wavelength filtering of ASE outside the predetermined signal wavelength range λ s , see e.g. T. Augustsson entitled "Device and Method for Optical Add/Drop Multiplexing" US Patent 7,423,658 and US Patent 5,596,661 entitled "Monolithic Optical Waveguide Filters Based on Fourier Expansion" by CH Henry et al.

现在参照图5,示出按照本发明的一个实施例的OPAD 500的示意图,如前面图3示意所示,它包括放大段510(图3中的增益元件330)和检测段520(图3中的检测器元件360)。通过分别将充当后PBF 360的具有关联第一和第二无源波导530和540的MMI 530插入有源波导段515和525之间,从而提供放大段510和检测段520,来实现ASE滤波。与本发明的其它实施例相似,这个集成组件OPAD 500包括衬底505,其上生长并且处理了MGVI结构,为了清晰起见没有明确标识。MGVI结构以及其中的导向光信号传播(例如无源与有源波导之间的横向锥形辅助垂直转换)与V.Tolstikhin等人在“OpticallyPre-Amplified Detectors for Multi-Guide Vertical Integration in InP”(Proc.Indium Phosphide and Related Materials 2009 Conference,第155-158页,Newport Beach,2009)中所报导的相似。Referring now to FIG. 5 , there is shown a schematic diagram of an OPAD 500 according to one embodiment of the present invention, as previously shown schematically in FIG. 3 , which includes an amplification section 510 (gain element 330 in FIG. 3 ) and a detection section 520 ( detector element 360). ASE filtering is achieved by inserting an MMI 530 with associated first and second passive waveguides 530 and 540, acting as a post-PBF 360, between active waveguide sections 515 and 525, respectively, providing an amplification section 510 and a detection section 520. Similar to other embodiments of the present invention, this integrated assembly OPAD 500 includes a substrate 505 on which the MGVI structure is grown and processed, not explicitly identified for clarity. The MGVI structure and the guided optical signal propagation therein (e.g. lateral taper-assisted vertical conversion between passive and active waveguides) are related to V. Tolstikhin et al. in "Optically Pre-Amplified Detectors for Multi-Guide Vertical Integration in InP" (Proc .Indium Phosphide and Related Materials 2009 Conference, pp. 155-158, Newport Beach, 2009).

显而易见的是,OPAD 500与这种现有技术的不同之处在于,这时,MMI 530分别已经结合到有源波导的放大与检测段510和520之间的无源波导的段中,其中MMI 530限定在与无源波导相同的垂直层上,如图5所示。二端口MMI 530设计成按照参照图3的本发明的一般描述、作为光学通带滤波器进行操作。它接收预定波长范围λs中的放大光信号连同通常比信号范围λs要宽的波长范围λASE中的ASE光线。但是,它仅传送与信号波长范围λs一致的范围λPBF中的波长,使得这些波长通过首先传播到MMI 530与检测段520之间的第二无源波导550,并且其次借助于无源和有源波导级处限定的垂直锥形垂直地传递到有源波导525中,进入OPAD 500的检测段520及其有源波导段525。It is obvious that the OPAD 500 differs from this prior art in that the MMI 530 has now been incorporated into the section of the passive waveguide between the amplification and detection sections 510 and 520 of the active waveguide, respectively, wherein the MMI 530 is defined on the same vertical layer as the passive waveguide, as shown in FIG. 5 . The two-port MMI 530 is designed to operate as an optical passband filter according to the general description of the invention with reference to FIG. 3 . It receives an amplified optical signal in a predetermined wavelength range λ s together with ASE light in a wavelength range λ ASE which is generally wider than the signal range λ s . However, it only transmits wavelengths in the range λ PBF that coincides with the signal wavelength range λ s , so that these wavelengths propagate first through the second passive waveguide 550 between the MMI 530 and the detection section 520, and secondly by means of passive and The vertical taper defined at the active waveguide stage propagates vertically into the active waveguide 525 into the detection section 520 of the OPAD 500 and its active waveguide section 525 .

具有预计波长滤波的MMI 530的设计原理是众所周知的,例如L.Soldano等人在“Optical Multi-Mode Interference Devices Based onSelf-Imaging:Principles and Applications”(J.Lightwave Tech.,Vol.13,No.4,第615-627页,1995年4月)以及R.M.Jenkins等人在美国专利5428698“Optical Routing Device”中所述。本领域的技术人员应当显而易见,通过适当选择MMI形状和大小,以及调整进入和离开MMI滤波器的无源波导的布局,对有效和可控无源-有源垂直耦合所优化的MGVI中的无源波导层还适合于所需MMI通带滤波。The design principle of the MMI 530 with estimated wavelength filtering is well known, for example in "Optical Multi-Mode Interference Devices Based on Self-Imaging: Principles and Applications" by L.Soldano et al. (J.Lightwave Tech., Vol.13, No. 4, pp. 615-627, April 1995) and R.M. Jenkins et al. in US Patent 5,428,698 "Optical Routing Device". It should be apparent to those skilled in the art that by proper selection of the MMI shape and size, and by adjusting the layout of the passive waveguides entering and leaving the MMI filter, the passives in the MGVI optimized for efficient and controllable passive-active vertical coupling The source waveguide layer is also suitable for the required MMI passband filtering.

可选地,第二输出光学端口可添加到MMI 560,并且相应地,所设置的通向第二检测段的第二无源波导在使用中充当监测元件308,以便向OPAD的放大段提供增益控制环,为了清晰起见在图5中未示出。在这种情况下,集成组件的等效光学电路再现图3所示的通用OPAD的后端,其中MMI 530用作后PBF 350以及有源波导的两个检测段分别用作检测器元件360和监测器370。为了使这种功能性可行,树端口MMI这时必须向连接到充当检测器元件360的有源波导的第一检测段的输出无源波导传送波长范围λs中的光信号,以及波长范围λs外部的波长中的ASE光线    送往通向有源波导的第二检测段的作为监测器370进行操作的无源波导。Optionally, a second output optical port can be added to the MMI 560 and accordingly a second passive waveguide leading to the second detection section is provided in use as the monitoring element 308 to provide gain to the amplification section of the OPAD The control loop, not shown in Figure 5 for clarity. In this case, the equivalent optical circuit of the integrated assembly reproduces the backend of the generic OPAD shown in Fig. 3, where the MMI 530 serves as the rear PBF 350 and the two detection segments of the active waveguide serve as the detector element 360 and monitor 370 . In order to make this functionality feasible, the treeport MMI must then deliver optical signals in the wavelength range λs to the output passive waveguide connected to the first detection section of the active waveguide acting as detector element 360, and the wavelength range λ ASE light in wavelengths outside s is directed to a passive waveguide operating as a monitor 370 leading to a second detection section of the active waveguide.

现在参照图6,示出按照本发明的一个实施例的OPAD 600的示意图,如前面图3示意所示,它包括放大段610(图3中的增益元件330)和检测段620(图3中的检测器元件360)。通过分别将充当后PBF 360的具有关联第一和第二耦合器波导630、640的光栅辅助定向耦合器650插入放大段610与检测段620之间来实现ASE滤波。第一和第二耦合器波导630、640各分别在其上表面形成第一和第二光栅635、645,使得整个组合充当光栅辅助定向耦合器650。与本发明的其它实施例一样,这个集成组件OPAD 600包括衬底605,其上生长并且处理了MGVI结构,为了清晰起见没有明确标识。MGVI结构以及其中的导向光信号传播,例如无源与有源波导之间的横向锥形辅助垂直转换,与V.Tolstikhin等人在“Optically Pre-Amplified Detectors for Multi-GuideVertical Integration in InP”(Proc.Indium Phosphide and RelatedMaterials 2009 Conference,第155-158页,Newport Beach,2009)中所报导的相似。Referring now to FIG. 6 , there is shown a schematic diagram of an OPAD 600 according to an embodiment of the present invention, as shown schematically in FIG. 3 above, which includes an amplification section 610 (gain element 330 in FIG. 3 ) and a detection section 620 ( detector element 360). ASE filtering is achieved by inserting a grating-assisted directional coupler 650 with associated first and second coupler waveguides 630, 640 acting as post-PBF 360 between the amplification section 610 and the detection section 620, respectively. The first and second coupler waveguides 630 , 640 each form a first and second grating 635 , 645 on their upper surface, respectively, such that the entire combination acts as a grating-assisted directional coupler 650 . As with other embodiments of the invention, this integrated assembly OPAD 600 includes a substrate 605 on which the MGVI structure is grown and processed, not explicitly identified for clarity. The MGVI structure and the guided optical signal propagation therein, such as the lateral taper-assisted vertical conversion between passive and active waveguides, are discussed with V. Tolstikhin et al. in "Optically Pre-Amplified Detectors for Multi-GuideVertical Integration in InP" (Proc .Indium Phosphide and Related Materials 2009 Conference, pp. 155-158, Newport Beach, 2009).

显而易见的是,OPAD 600与这种现有技术的不同之处在于,这时,光栅辅助定向耦合器650分别已经结合到有源波导的放大与检测段610、620之间的无源波导的段中,其中光栅辅助定向耦合器650限定在与无源波导相同的垂直层上,如图6所示。光栅辅助定向耦合器650设计成按照参照图3的本发明的一般描述、作为光学通带滤波器进行操作。它接收预定波长范围λs中的放大光信号连同通常比信号范围λs要宽的波长范围λASE中的ASE光线。它传送与信号波长范围λs一致的范围λPBF中的波长,使得这些波长通过在借助于无源和有源波导级处限定的垂直锥形垂直地传递到有源波导625中之前首先在第一耦合器波导630中传播以及其次耦合到第二耦合器波导640中,进入OPAD 600的检测段620及其有源波导段625。在光栅辅助定向耦合器650的输出处的λPBF外部的信号处于它们设置在其中的第一耦合器波导630中。It will be apparent that the OPAD 600 differs from this prior art in that a grating assisted directional coupler 650 has now been incorporated into the passive waveguide section between the amplification and detection sections 610, 620 of the active waveguide respectively. , where the grating-assisted directional coupler 650 is defined on the same vertical layer as the passive waveguide, as shown in FIG. 6 . The grating assisted directional coupler 650 is designed to operate as an optical passband filter according to the general description of the invention with reference to FIG. 3 . It receives an amplified optical signal in a predetermined wavelength range λ s together with ASE light in a wavelength range λ ASE which is generally wider than the signal range λ s . It transmits wavelengths in the range λ PBF coincident with the signal wavelength range λ s such that these wavelengths pass vertically into the active waveguide 625 first at the Propagated in one coupler waveguide 630 and secondly coupled into a second coupler waveguide 640 into the detection section 620 of the OPAD 600 and its active waveguide section 625 . Signals outside the λ PBF at the output of the grating assisted directional coupler 650 are in the first coupler waveguide 630 in which they are disposed.

具有预计波长滤波的光栅辅助定向耦合器650的设计原理是众所周知的,例如A.Carenco等人在美国专利6549707“Grating-Type OpticalFilter with Apodised Spectral Response”以及Y.Shibata等人在“CouplingCoefficient Modulation of Waveguide Grating using Sample Grating”(IEEEPhot.Tech.,Lett.,Vol.6,第1222-1224页,1994)中所述。本领域的技术人员应当显而易见,通过适当选择光栅结构、定向耦合器波导、耦合器传递特性以及适当地设计和调整设置在光栅辅助定向耦合器650与放大和检测段610和620之间的任何无源波导段的布局,对有效和可控无源-有源垂直耦合所优化的MGVI中的无源和有源波导层还适合于所需光栅辅助定向耦合器滤波,这种无源波导段在图6中未示出。The design principle of the grating-assisted directional coupler 650 with predicted wavelength filtering is well known, for example, A.Carenco et al. Grating using Sample Grating" (IEEE Hot. Tech., Lett., Vol. 6, pp. 1222-1224, 1994). It should be apparent to those skilled in the art that by proper selection of the grating structure, directional coupler waveguide, coupler transfer characteristics, and proper design and adjustment of any non-conductive components disposed between the grating-assisted directional coupler 650 and the amplification and detection sections 610 and 620 The layout of the source waveguide section, the passive and active waveguide layers in the MGVI optimized for efficient and controllable passive-active vertical coupling is also suitable for the required grating-assisted directional coupler filtering, this passive waveguide section is in Not shown in FIG. 6 .

可选地,第二输出无源光学波导可添加到第一耦合器波导630的输出,并且相应地在适当设置时通向第二检测段时在使用中充当监测元件308,以便向OPAD的放大段提供增益控制环,为了清晰起见在图6中未示出。在这种情况下,集成组件的等效光学电路再现图3所示的通用OPAD的后端,其中光栅辅助定向耦合器650用作后PBF 350以及有源波导的两个检测段分别用作检测器元件360和监测器370。为了使这种功能性可行,三端口定向耦合器这时必须向连接到充当检测器元件360的有源波导的第一检测段的输出无源波导传送波长范围λs中的光信号,以及波长范围λs外部的波长中的ASE光线    送往通向有源波导的第二检测段的作为监测器370进行操作的无源波导Optionally, a second output passive optical waveguide may be added to the output of the first coupler waveguide 630 and correspondingly when properly set up leads to the second detection section in use as the monitoring element 308 for amplification to the OPAD stage provides a gain control loop, not shown in Figure 6 for clarity. In this case, the equivalent optical circuit of the integrated assembly reproduces the backend of the generic OPAD shown in Figure 3, where a grating-assisted directional coupler 650 is used as the rear PBF 350 and the two detection sections of the active waveguide are used as the detection device element 360 and monitor 370. To make this functionality feasible, the three-port directional coupler must then deliver an optical signal in the wavelength range λs to the output passive waveguide connected to the first detection section of the active waveguide acting as detector element 360, and the wavelength ASE light in wavelengths outside the range λs is sent to a passive waveguide operating as a monitor 370 leading to a second detection section of the active waveguide

现在参照图7,示出按照本发明的一个实施例的OPAD 700的示意图,如前面图3示意所示,它包括放大段730(图3中的增益元件330)、检测段750(图3中的检测器元件360)和监测段745。用于检测段750的ASE滤波通过插入充当后PBF 360的第一光栅辅助耦合器740来实现,而重新到OPAD 700与其连接的光网络中的ASE滤波通过插入充当前PBF 320的第二光栅辅助耦合器725来实现。如同前面针对图4A至图6所述的本发明的其它实施例那样,OPAD700的这种完全集成实现包括衬底705,其上MGVI结构已经生长和处理,为了清晰起见而没有明确标识。MGVI结构以及其中的导向光信号传播,例如无源与有源波导之间的横向锥形辅助垂直转换与V.Tolstikhin等人在“OpticallyPre-Amplified Detectors for Multi-Guide Vertical Integration in InP”(Proc.Indium Phosphide and Related Materials 2009 Conference,第155-158页,Newport Beach,2009)中所报导的相似。Referring now to FIG. 7, there is shown a schematic diagram of an OPAD 700 according to an embodiment of the present invention, as shown schematically in FIG. 3 above, which includes an amplification section 730 (gain element 330 in FIG. detector element 360) and monitoring section 745. ASE filtering for the detection section 750 is achieved by inserting a first grating assisted coupler 740 acting as a rear PBF 360, while ASE filtering back into the optical network to which the OPAD 700 is connected is assisted by inserting a second grating assisted coupler 740 acting as a front PBF 320 Coupler 725 to achieve. As with the other embodiments of the invention previously described with respect to FIGS. 4A-6 , this fully integrated implementation of OPAD 700 includes a substrate 705 on which MGVI structures have been grown and processed, not explicitly identified for clarity. The MGVI structure and the guided optical signal propagation in it, such as the lateral taper-assisted vertical conversion between passive and active waveguides, and V. Tolstikhin et al. in "Optically Pre-Amplified Detectors for Multi-Guide Vertical Integration in InP" (Proc. Similar to that reported in Indium Phosphide and Related Materials 2009 Conference, pp. 155-158, Newport Beach, 2009).

显而易见,OPAD 700与这种现有技术的不同之处在于,这时,第二光栅辅助耦合器725在无源波导的段中结合了输入710和放大段730,以及第一光栅辅助耦合器740分别插入有源波导的放大与检测段730和750之间,其中第一和第二光栅辅助耦合器740和725分别限定在与无源波导相同的垂直层上,如图7所示。第一和第二光栅辅助耦合器740和725的每个分别设计成按照参照图3的本发明的一般描述、作为光学通带滤波器进行操作。考虑第一光栅辅助耦合器740,它接收预定波长范围λs中放大光信号连同波长范围λASE中的ASE光线,其通常比来自放大段730的信号范围λs更宽。但是,它仅向第一输出端口传送与信号波长范围λs一致的范围λPBF中的那些波长,使得这些波长进入OPAD 700的检测段750及其有源波导段,为了清晰起见没有明确标识。范围λPBF中的这些光信号在借助于无源和有源波导级处限定的垂直锥形垂直传递到检测段750的有源波导中之前,首先在第一光栅辅助耦合器740与检测段750之间的无源波导中传播。It will be apparent that the OPAD 700 differs from this prior art in that a second grating assisted coupler 725 now combines the input 710 and amplification section 730 in a segment of the passive waveguide, and the first grating assisted coupler 740 Inserted between the amplification and detection sections 730 and 750 of the active waveguide, respectively, wherein the first and second grating-assisted couplers 740 and 725 are respectively defined on the same vertical layer as the passive waveguide, as shown in FIG. 7 . Each of the first and second grating-assisted couplers 740 and 725, respectively, is designed to operate as an optical passband filter according to the general description of the invention with reference to FIG. 3 . Consider a first grating assisted coupler 740 that receives an amplified optical signal in a predetermined wavelength range λ s together with ASE light in a wavelength range λ ASE , which is generally wider than the signal range λ s from amplification section 730 . However, it transmits to the first output port only those wavelengths in the range λ PBF coincident with the signal wavelength range λ s , so that these wavelengths enter the detection section 750 of the OPAD 700 and its active waveguide section, not explicitly identified for clarity. These optical signals in the range λ PBF are first passed between the first grating assisted coupler 740 and the detection section 750 before passing vertically into the active waveguide of the detection section 750 by means of the vertical taper defined at the passive and active waveguide stages. propagating in the passive waveguide between them.

类似地,将范围λPBF外部的光信号传送给第一光栅辅助耦合器740的第二输出端口,使得这些信号进入OPAD 700的监测段745及其有源波导段,为了清晰起见没有明确标识。范围λPBF外部的这些光信号在借助于无源和有源波导级处限定的垂直锥形垂直传递到监测段745的有源波导中之前,首先在第一光栅辅助耦合器740与监测段745之间的无源波导中传播。Similarly, optical signals outside the range λ PBF are routed to the second output port of the first grating assisted coupler 740 so that these signals enter the monitoring section 745 of the OPAD 700 and its active waveguide section, not explicitly identified for clarity. These optical signals outside the range λ PBF are first passed between the first grating assisted coupler 740 and the monitoring section 745 before passing vertically into the active waveguide of the monitoring section 745 by means of the vertical taper defined at the passive and active waveguide stages. propagating in the passive waveguide between them.

现在考虑进入OPAD 700的光信号,它们在输入710耦合到输入无源波导715,并且然后耦合到已经结合在输入无源波导715与放大段730之间的第二光栅辅助耦合器725中。因此,第二光栅辅助耦合器725从前导光网络来接收预定波长范围λs的光信号连同任何带外信号。但是,它仅向第一输出端口传送与信号波长范围λs一致的范围λPBF中的那些波长,使得这些波长进入OPAD700的放大段730及其有源波导段,为了清晰起见没有明确标识。从前导光网络所接收的任何信号耦合到第二光栅辅助耦合器725的另一个输出,而没有耦合到放大段730。Considering now the optical signals entering OPAD 700 , they are coupled at input 710 to input passive waveguide 715 and then coupled into second grating assisted coupler 725 that has been incorporated between input passive waveguide 715 and amplification section 730 . Thus, the second grating assisted coupler 725 receives optical signals of the predetermined wavelength range λ s together with any out-of-band signals from the leading optical network. However, it only transmits to the first output port those wavelengths in the range λ PBF coincident with the signal wavelength range λ s , so that these wavelengths enter the amplification section 730 of the OPAD 700 and its active waveguide section, not explicitly identified for clarity. Any signals received from the leading optical network are coupled to the other output of the second grating auxiliary coupler 725 and not coupled to the amplification section 730 .

如前面所述,放大段730双向地发射ASE,以及相应地,如果光学输入710直接连接到放大段730,则这个ASE重新直接耦合到前导光网络中,其中它在发射到主要光学电信网络中之前可以或者可以不经过滤波和衰减。但是,如前面所述的OPAD 700包含第二光栅辅助耦合器725。因此,对应地,它向输入无源波导715传送处于波长范围λPBF中与信号波长范围λs一致的ASE的那个部分,使得这些波长进入输入无源波导715,并且然后耦合到前导光网络中。λPBF外部的ASE耦合到第二光栅辅助耦合器725的另一个输出,并且耦合到反向监测段735。相应地,OPAD 700提供图3的本发明的一般描述的单片实现。来自反向监测段735的信号可与来自监测段745的信号相结合,以便提供对单独的放大段730或者对整个OPAD 700的控制。As previously stated, the amplifying section 730 emits an ASE bi-directionally, and accordingly, if the optical input 710 is connected directly to the amplifying section 730, this ASE is recoupled directly into the leading optical network where it is transmitted into the main optical telecommunications network May or may not be filtered and attenuated before. However, the OPAD 700 includes a second grating assisted coupler 725 as previously described. Accordingly, it transmits to the input passive waveguide 715 that portion of the ASE in the wavelength range λ PBF that coincides with the signal wavelength range λ s , so that these wavelengths enter the input passive waveguide 715 and are then coupled into the leading optical network . The ASE outside the lambda PBF is coupled to the other output of the second grating auxiliary coupler 725 and to the reverse monitoring section 735 . Accordingly, OPAD 700 provides a monolithic implementation of the general description of the invention of FIG. 3 . The signal from the reverse monitoring section 735 can be combined with the signal from the monitoring section 745 to provide control of the amplification section 730 alone or of the OPAD 700 as a whole.

本领域的技术人员显而易见,如前面针对图7所述,第一和第二光栅辅助耦合器725和740示为具有相同的通带,即λPBF。但是,取决于整个OPAD 700及其接收器通路元件(即放大段730和检测段750)的性能要求,可以有利的是,设计具有可包括带通宽度、绝缘等的不同性能特性的这些东西。还显而易见,所示的OPAD 700的设计具有在相同连续无源波导中形成的输入无源波导710、放大段730和检测段750。备选地,设计可调整成使得λPBF中的预期光信号λs处于每个定向耦合器相交,即所谓的交叉状态,而不是直通,即所谓的直通状态。可选地,一个定向耦合器可设计成处于直通状态,而另一个定向耦合器处于交叉状态中。在每种情况下,检测和监测段750和745分别根据需要并置。It will be apparent to those skilled in the art that the first and second grating assisted couplers 725 and 740 are shown to have the same passband, ie, λ PBF , as previously described with respect to FIG. 7 . However, depending on the performance requirements of the overall OPAD 700 and its receiver path elements (ie, amplification section 730 and detection section 750 ), it may be advantageous to design these with different performance characteristics that may include bandpass width, isolation, and the like. It is also apparent that the design of OPAD 700 is shown with input passive waveguide 710, amplification section 730, and detection section 750 formed in the same continuous passive waveguide. Alternatively, the design can be tuned such that the desired optical signal λs in the λ PBF is in each directional coupler intersection, the so-called crossover state, rather than straight-through, the so-called through-state. Alternatively, one directional coupler can be designed to be in the through state while the other directional coupler is in the crossover state. In each case, detection and monitoring segments 750 and 745, respectively, are collocated as desired.

此外,在前面的图6和图7中,各光栅辅助耦合器示为共同传播定向耦合器,使得光信号从定向耦合器的一端传播到另一端。可选地,通过光栅辅助定向耦合器,设计可实现为反向传播定向耦合器,使得滤波光信号不仅耦合到定向耦合器的另一支臂,而且还经过反射,使得它们从与输入相同的定向耦合器的端部耦合。在这类设计中,定向耦合器的另一端处的输出的每个包含不希望的信号,并且各可耦合到分立光电检测器,即重复监测段745或反向监测段735或者耦合到两者的单个大光电检测器。如果在第一光栅辅助耦合器740中实现,则检测段750的位置还经过调整。Furthermore, in the preceding Figures 6 and 7, each grating assisted coupler was shown as a co-propagating directional coupler such that an optical signal propagates from one end of the directional coupler to the other. Alternatively, with a grating-assisted directional coupler, the design can be implemented as a back-propagating directional coupler, such that the filtered optical signals are not only coupled to the other arm of the directional coupler, but are also reflected so that they originate from the same The end coupling of the directional coupler. In such designs, the outputs at the other end of the directional coupler each contain the undesired signal and each can be coupled to a discrete photodetector, either the repeating monitoring section 745 or the reverse monitoring section 735 or both. single large photodetector. If implemented in the first grating assisted coupler 740, the position of the detection section 750 is also adjusted.

显而易见,在前面所示的实施例中,波长滤波元件、光栅辅助定向耦合器和MMI仅表示PIC中可能的波长滤波元件的可能实施例的两个。可选地,波长滤波可包括其它结构,包括但不限于Mach-Zehnder干涉仪(MZI)、中阶梯光栅、定向耦合器和阵列波导光栅(AGW)。此外,本领域的技术人员显而易见,虽然前面所示的实施例采用透射波导滤波元件,例如MMI 530和光栅辅助定向耦合器670,备用设计选项存在,其中包括能够随检测器元件等的同等布置来使用的反射滤波元件。It will be apparent that in the previously shown embodiments the wavelength filtering element, the grating assisted directional coupler and the MMI represent only two of the possible embodiments of a wavelength filtering element possible in a PIC. Optionally, wavelength filtering may include other structures including, but not limited to, Mach-Zehnder interferometers (MZIs), echelle gratings, directional couplers, and arrayed waveguide gratings (AGWs). Furthermore, it will be apparent to those skilled in the art that while the previously shown embodiments employ transmissive waveguide filtering elements, such as MMI 530 and grating-assisted directional coupler 670, alternate design options exist, including the ability to The reflective filter element used.

可选地,可对完全单片波导解决方案中的前PBF 320和后PBF 350实现不同结构,或者这些PBF之一的单片波导解决方案可与另一个的TFF解决方案结合使用。备选地,两种PBF可使用单个TFF或双TFF来实现。具体实现例如通过包括但不限于如下因素来确定:预计OPAD与其配合操作的标准或系统的波长滤波要求、OPAD形成其组成部分的PIC中的其它PIC功能的性能限制、成本、占用面积、性能等。Alternatively, different structures can be implemented for the front PBF 320 and rear PBF 350 in a fully monolithic waveguide solution, or the monolithic waveguide solution of one of these PBFs can be used in combination with the TFF solution of the other. Alternatively, both PBFs can be implemented using a single TFF or dual TFFs. The specific implementation is determined, for example, by factors including but not limited to: wavelength filtering requirements of the standard or system with which the OPAD is expected to operate, performance limitations of other PIC functions in the PIC of which the OPAD forms a part, cost, footprint, performance, etc. .

另外,OPAD的备选实施例是可能的,而没有背离本发明的范围,包括例如提供从波分复用PON、局域网、城域网和长程应用的单个放大段所耦合的多个检测器元件,以及从两个或更多元件的级联来提供波长滤波。Additionally, alternative embodiments of the OPAD are possible without departing from the scope of the invention, including, for example, providing multiple detector elements coupled from a single amplification section for wavelength division multiplexed PON, local area network, metropolitan area network, and long-haul applications , and from a cascade of two or more elements to provide wavelength filtering.

本发明的上述实施例意思是仅作为示例。可由本领域的技术人员对具体实施例实现改变、修改和变更,而没有背离只由所附权利要求书定义的本发明的范围。The above-described embodiments of the present invention are meant to be examples only. Alterations, modifications and alterations to the particular embodiment may be effected by those skilled in the art without departing from the scope of the invention, which is defined only by the appended claims.

Claims (19)

1.一种光子组件,包括:1. A photonic assembly, comprising: a)外延半导体结构,在衬底包括用于支持预定第一波长范围中的光信号的传播的共同指定波导以及按照增加波长带隙的顺序垂直设置的多个波长指定波导的至少一个时,在单个生长步骤中III-V半导体材料系统中生长,其中所述多个波长指定波导的每个支持预定第二波长范围,所述预定第二波长范围的每个处于所述预定第一波长范围中;a) an epitaxial semiconductor structure, when the substrate includes at least one of a commonly assigned waveguide for supporting propagation of an optical signal in a predetermined first wavelength range and a plurality of wavelength assigned waveguides vertically arranged in order of increasing wavelength band gap, at grown in a III-V semiconductor material system in a single growth step, wherein each of said plurality of wavelength-specifying waveguides supports a predetermined second wavelength range, each of said predetermined second wavelength ranges being in said predetermined first wavelength range ; b)光学输入端口,用于接收所述第一波长范围中的光信号;b) an optical input port for receiving optical signals in said first wavelength range; c)第一滤波器,至少包括第一输出端口和第二输出端口,并且特征至少在于第一通带宽度,所述滤波器在光学上耦合到用于接收所述第一波长范围中的光信号并且用于向所述第一输出端口提供所接收光信号的第一预定部分的光学输入端口,所接收光信号的所述第一预定部分至少根据所述第一通带宽度来确定;c) a first filter comprising at least a first output port and a second output port and characterized by at least a first passband width, said filter being optically coupled to receive light in said first wavelength range an optical input port for providing a first predetermined portion of the received optical signal to the first output port, the first predetermined portion of the received optical signal being determined based on at least the first passband width; d)光学放大器,至少包括在所述多个波长指定波导之一中形成的增益段、用于使所述光学放大器正向偏压的第一触点和第三输出端口,所述光学放大器在光学上耦合到用于接收所接收光信号的所述第一预定部分并且向所述第三输出端口提供经放大的滤波光信号的所述第一输出端口;d) an optical amplifier comprising at least a gain section formed in one of said plurality of wavelength-specifying waveguides, a first contact for forward biasing said optical amplifier, and a third output port, said optical amplifier at optically coupled to the first output port for receiving the first predetermined portion of the received optical signal and providing an amplified filtered optical signal to the third output port; e)第二滤波器,至少包括第四输出端口和第五输出端口,并且特征至少在于第二通带宽度,所述滤波器在光学上耦合到所述光学放大器的所述第三输出端口并且用于向所述第四输出端口提供经放大的滤波光信号的第一预定部分以及向所述第五输出端口提供经放大的滤波光信号的第二预定部分,所述经放大的滤波光信号的第一和第二预定部分至少根据所述第二通带宽度来确定;e) a second filter comprising at least a fourth output port and a fifth output port and characterized by at least a second passband width, said filter being optically coupled to said third output port of said optical amplifier and for providing a first predetermined portion of the amplified filtered optical signal to the fourth output port and a second predetermined portion of the amplified filtered optical signal to the fifth output port, the amplified filtered optical signal The first and second predetermined portions of are determined based at least on said second passband width; f)第一光电检测器,在光学上至少包括用于使所述第一光电检测器反向偏压的第二触点,所述第一光电检测器耦合到用于接收所述经放大的滤波光信号的第一预定部分的所述第二滤波器的所述第四输出端口;f) a first photodetector optically comprising at least a second contact for reverse biasing said first photodetector, said first photodetector coupled to a said fourth output port of said second filter for filtering a first predetermined portion of an optical signal; g)第二光电检测器,在光学上耦合到用于接收所述经放大的滤波光信号的第二预定部分的所述第二滤波器的第五输出端口;以及g) a second photodetector optically coupled to a fifth output port of said second filter for receiving a second predetermined portion of said amplified filtered optical signal; and h)第三光电检测器,在光学上耦合到用于接收从所述光学放大器传播到所述第一滤波器的光信号的预定部分的所述第一滤波器的第二输出端口,所述光信号的预定部分至少根据所述第一通带宽度来确定;其中,h) a third photodetector optically coupled to a second output port of said first filter for receiving a predetermined portion of the optical signal propagating from said optical amplifier to said first filter, said The predetermined portion of the optical signal is determined based on at least said first passband width; wherein, 所述第一触点和所述第二触点在外延半导体结构的同一层上形成,但是相互电绝缘。The first contact and the second contact are formed on the same layer of the epitaxial semiconductor structure, but are electrically isolated from each other. 2.如权利要求1所述的光子组件,其中:2. The photonic assembly of claim 1, wherein: 所述第一光电检测器、所述第二光电检测器、所述第三光电检测器和所述光学放大器的至少一个包括垂直元件,所述垂直元件用于把来自共同指定波导的多个波长指定波导之一的预定第二波长范围中的光信号耦合到所述多个波长指定波导之一,所述垂直元件包括至少一个横向锥形,其通过至少一个半导体蚀刻过程在所述共同指定波导的每个、所述多个波长指定波导之一、以及所述共同指定波导与所述多个波长指定波导之一之间的所述多个波长指定波导的任何中间波导中形成。At least one of said first photodetector, said second photodetector, said third photodetector, and said optical amplifier includes a vertical element for combining multiple wavelengths from a commonly designated waveguide an optical signal in a predetermined second wavelength range of one of the designated waveguides is coupled to one of the plurality of wavelength designated waveguides, the vertical element comprising at least one lateral taper formed in the common designated waveguide by at least one semiconductor etching process formed in each of the plurality of wavelength-specifying waveguides, one of the plurality of wavelength-specifying waveguides, and any intermediate waveguides of the plurality of wavelength-specifying waveguides between the common-specifying waveguide and one of the plurality of wavelength-specifying waveguides. 3.如权利要求1所述的光子组件,其中,3. The photonic assembly of claim 1, wherein, 所述第一滤波器和第二滤波器的至少一个包括在所述外延半导体结构中实现的薄膜滤波器和波导滤波器中的至少一个。At least one of the first filter and the second filter includes at least one of a thin film filter and a waveguide filter implemented in the epitaxial semiconductor structure. 4.如权利要求3所述的光子组件,其中,4. The photonic assembly of claim 3, wherein, 当所述至少一个是薄膜滤波器时,它是下述中的至少一个:对接所述外延半导体结构的端面、沉积在所述外延半导体结构的端面上、以及设置在所述外延半导体结构的表面中形成的特征中。When the at least one is a thin-film filter, it is at least one of the following: abutting on the end face of the epitaxial semiconductor structure, deposited on the end face of the epitaxial semiconductor structure, and disposed on the surface of the epitaxial semiconductor structure Among the features formed in . 5.如权利要求3所述的光子组件,其中,5. The photonic assembly of claim 3, wherein, 当所述至少一个是波导滤波器,它至少包括第一元件,该第一元件选自包括多模干扰滤波器、定向耦合器、Mach-Zehnder干涉仪、阵列波导光栅、中阶梯光栅、布拉格光栅和环形谐振器的组。When said at least one is a waveguide filter, it includes at least a first element selected from the group consisting of multimode interference filters, directional couplers, Mach-Zehnder interferometers, arrayed waveguide gratings, echelle gratings, and Bragg gratings and ring resonators. 6.如权利要求3所述的光子组件,其中,6. The photonic assembly of claim 3, wherein, 当所述至少一个是波导滤波器时,所述波导滤波器的第一预定部分在所述共同指定波导以及所述多个波长指定波导的另一个其中之一中实现,所述一个与所述多个波长指定波导之一相邻。When said at least one is a waveguide filter, a first predetermined portion of said waveguide filter is implemented in said common assigned waveguide and another one of said plurality of wavelength assigned waveguides, said one and said One of the plurality of wavelength-designating waveguides is adjacent. 7.一种光子组件,包括:7. A photonic assembly comprising: a)外延半导体结构,在衬底包括用于支持预定第一波长范围中的光信号的传播的共同指定波导以及按照增加波长带隙的顺序垂直设置的多个波长指定波导的至少一个时,在单个生长步骤中生长的III-V半导体材料系统中生长,其中所述多个波长指定波导的每个支持预定第二波长范围,所述预定第二波长范围的每个处于所述预定第一波长范围中;a) an epitaxial semiconductor structure, when the substrate includes at least one of a commonly assigned waveguide for supporting propagation of an optical signal in a predetermined first wavelength range and a plurality of wavelength assigned waveguides vertically arranged in order of increasing wavelength band gap, at Grown in a III-V semiconductor material system grown in a single growth step, wherein each of said plurality of wavelength-specifying waveguides supports a predetermined second wavelength range, each of said predetermined second wavelength range being at said predetermined first wavelength in range; b)光学输入端口,用于接收所述第一波长范围中的光信号;b) an optical input port for receiving optical signals in said first wavelength range; c)光学放大器,至少包括在所述多个波长指定波导之一中形成的增益段、用于使所述光学放大器正向偏压的第一触点和第一输出端口,所述光学放大器在光学上耦合到用于接收所述光信号并且向所述第一输出端口提供经放大的光信号的光学输入端口;c) an optical amplifier comprising at least a gain section formed in one of said plurality of wavelength-specifying waveguides, a first contact for forward biasing said optical amplifier, and a first output port, said optical amplifier at optically coupled to an optical input port for receiving the optical signal and providing an amplified optical signal to the first output port; d)第一滤波器,至少包括第二输出端口,并且特征至少在于第一通带宽度,所述滤波器在光学上耦合到所述光学放大器的第一输出端口并且用于向所述第二输出端口提供经放大的光信号的第一预定部分,所述经放大的光信号的第一预定部分至少根据所述第一通带宽度来确定;d) a first filter comprising at least a second output port and characterized by at least a first passband width, said filter being optically coupled to the first output port of said optical amplifier and configured to provide input to said second an output port providing a first predetermined portion of an amplified optical signal determined based on at least said first passband width; e)第一光电检测器,在光学上至少包括用于使所述第一光电检测器反向偏压的第二触点,所述第一光电检测器耦合到用于接收所述经放大的光信号的第一预定部分的所述第一滤波器的第二输出端口;其中e) a first photodetector optically comprising at least a second contact for reverse biasing said first photodetector, said first photodetector coupled to a a second output port of said first filter of a first predetermined portion of an optical signal; wherein 所述第一触点和所述第二触点在外延半导体结构的同一层上形成,但是相互电绝缘。The first contact and the second contact are formed on the same layer of the epitaxial semiconductor structure, but are electrically isolated from each other. 8.如权利要求7所述的光子组件,其中,8. The photonic assembly of claim 7, wherein, 所述光学放大器、所述第一滤波器以及所述第一光电检测器至少其中之一还包括垂直元件,所述垂直元件用于耦合来自和送往所述共同指定波导的至少一个与送往和来自所述多个波长指定波导之一的至少一个之间的所述多个波长指定波导之一的所述预定第二波长范围中的光信号,所述垂直元件包括至少一个横向锥形,其通过至少一个半导体蚀刻过程在所述共同指定波导的每个、所述多个波长指定波导之一以及所述共同指定波导与所述多个波长指定波导之一之间的所述多个波长指定波导的任何中间波导中形成。At least one of the optical amplifier, the first filter, and the first photodetector further includes a vertical element for coupling at least one of the signals from and to the commonly assigned waveguide and to the and optical signals in said predetermined second wavelength range from one of said plurality of wavelength-specifying waveguides between at least one of said plurality of wavelength-specifying waveguides, said vertical element comprising at least one transverse taper, It passes at least one semiconductor etching process between each of said commonly assigned waveguides, one of said plurality of wavelength assigned waveguides, and said plurality of wavelengths between said commonly assigned waveguide and one of said plurality of wavelength assigned waveguides Formed in any intermediate waveguides of the specified waveguide. 9.如权利要求7所述的光子组件,还包括:9. The photonic assembly of claim 7, further comprising: f)第二光电检测器,在光学上连接到所述第一滤波器,并且用于接收所述经放大的光信号的第二预定部分,所述经放大的光信号的第二预定部分至少根据所述第一通带宽度来确定。f) a second photodetector optically connected to said first filter and adapted to receive a second predetermined portion of said amplified optical signal, said second predetermined portion of said amplified optical signal being at least Determined according to the first passband width. 10.如权利要求7所述的光子组件,还包括:10. The photonic assembly of claim 7, further comprising: f)第二滤波器,设置在所述输入端口与所述光学放大器之间,并且特征至少在于第二通带宽度,所述滤波器用于向所述光学放大器提供所接收光信号的第三预定部分以及向所述输入端口提供由所述光学放电器所产生的噪声的第一预定部分其中之一,所接收光信号的至少一个的所述第三预定部分以及由所述光学放电器所产生的噪声的第一预定部分的至少一个至少根据所述第二通带宽度来确定。f) a second filter, disposed between said input port and said optical amplifier, and characterized at least by a second passband width, said filter for providing said optical amplifier with a third predetermined part and one of the first predetermined part of the noise generated by the optical discharger is provided to the input port, the third predetermined part of at least one of the received optical signal and the noise generated by the optical discharger At least one of the first predetermined portions of noise is determined based at least on the second passband width. 11.如权利要求9所述的光子组件,还包括:11. The photonic assembly of claim 9, further comprising: g)第三光电检测器,在光学上连接到所述第二滤波器,并且用于接收由所述光学放大器所产生的所述噪声的第二预定部分,所述光学放大器所产生的噪声的所述第二预定部分至少根据所述第二通带宽度来确定。g) a third photodetector optically connected to said second filter and adapted to receive a second predetermined portion of said noise generated by said optical amplifier, a portion of said noise generated by said optical amplifier The second predetermined portion is determined based on at least the second passband width. 12.如权利要求7所述的光子组件,其中,12. The photonic assembly of claim 7, wherein, 所述第一滤波器包括在所述外延半导体结构中实现的薄膜滤波器和波导滤波器中的至少一个。The first filter includes at least one of a thin film filter and a waveguide filter implemented in the epitaxial semiconductor structure. 13.如权利要求10所述的光子组件,其中,13. The photonic assembly of claim 10, wherein, 所述第二滤波器包括在所述外延半导体结构中实现的薄膜滤波器和波导滤波器中的至少一个。The second filter includes at least one of a thin film filter and a waveguide filter implemented in the epitaxial semiconductor structure. 14.如权利要求12所述的光子组件,其中,14. The photonic assembly of claim 12, wherein, 当所述至少一个是薄膜滤波器时,它是下述中的至少一个:对接所述外延半导体结构的端面、沉积在所述外延半导体结构的端面上、以及设置在所述外延半导体结构的表面中的特征中。When the at least one is a thin-film filter, it is at least one of the following: abutting on the end face of the epitaxial semiconductor structure, deposited on the end face of the epitaxial semiconductor structure, and disposed on the surface of the epitaxial semiconductor structure Among the features in . 15.如权利要求13所述的光子组件,其中,15. The photonic assembly of claim 13, wherein, 当所述至少一个是薄膜滤波器时,它是下述中的至少一个:对接所述外延半导体结构的端面、沉积在所述外延半导体结构的端面上、以及设置在所述外延半导体结构的表面中的特征中。When the at least one is a thin-film filter, it is at least one of the following: abutting on the end face of the epitaxial semiconductor structure, deposited on the end face of the epitaxial semiconductor structure, and disposed on the surface of the epitaxial semiconductor structure Among the features in . 16.如权利要求12所述的光子组件,其中,16. The photonic assembly of claim 12, wherein, 当所述至少一个是波导滤波器时,它包括下述中的至少一个:在所述共同指定波导之一和所述多个波长指定波导的另一个中实现的所述波导滤波器的第一预定部分,所述一个与所述多个波长指定波导之一相邻,以及从包括多模干扰滤波器、定向耦合器、Mach-Zehnder干涉仪、阵列波导光栅、中阶梯光栅、布拉格光栅和环形谐振器的组中所选的至少一个第一元件。When said at least one is a waveguide filter, it includes at least one of the following: a first of said waveguide filters implemented in one of said commonly assigned waveguides and the other of said plurality of wavelength assigned waveguides. The predetermined portion, said one being adjacent to one of said plurality of wavelength-specifying waveguides, and comprising a multimode interference filter, a directional coupler, a Mach-Zehnder interferometer, an arrayed waveguide grating, an echelle grating, a Bragg grating, and a ring At least one first element selected from the set of resonators. 17.如权利要求13所述的光子组件,其中,17. The photonic assembly of claim 13, wherein, 当所述至少一个是波导滤波器时,它包括下述中的至少一个:在所述共同指定波导和所述多个波长指定波导的另一个其中之一中实现的所述波导滤波器的第一预定部分,所述一个与所述多个波长指定波导之一相邻,以及从包括多模干扰滤波器、定向耦合器、Mach-Zehnder干涉仪、阵列波导光栅、中阶梯光栅、布拉格光栅和环形谐振器的组中所选的至少一个第一元件。When said at least one is a waveguide filter, it includes at least one of the following: a first one of said waveguide filter implemented in another one of said common assigned waveguide and said plurality of wavelength assigned waveguides. a predetermined portion, said one being adjacent to one of said plurality of wavelength-specifying waveguides, and comprising a multimode interference filter, a directional coupler, a Mach-Zehnder interferometer, an arrayed waveguide grating, an echelle grating, a Bragg grating, and At least one first element selected from the group of ring resonators. 18.如权利要求7所述的光子组件,还包括:18. The photonic assembly of claim 7, further comprising: f)设置在所述光学放大器与第一滤波器之间以及所述第一滤波器与第一光检测器之间其中至少一个间的多个光学元件的至少一个光学元件,所述光学元件包括波导滤波器元件、多模干扰波导元件的预定部分、定向耦合器的预定部分、Mach-Zehnder干涉仪的预定部分、抛物线波导元件、平面波导和透镜中的至少一个。f) at least one optical element of a plurality of optical elements disposed between the optical amplifier and the first filter and between at least one of the first filter and the first photodetector, the optical element comprising At least one of a waveguide filter element, a predetermined portion of a multimode interference waveguide element, a predetermined portion of a directional coupler, a predetermined portion of a Mach-Zehnder interferometer, a parabolic waveguide element, a planar waveguide, and a lens. 19.如权利要求11所述的光子组件,还包括:19. The photonic assembly of claim 11, further comprising: h)多个光学元件的至少一个光学元件,设置在所述光学放大器与所述第二滤波器之间、所述输入端口与所述第二滤波器之间、以及所述第二滤波器与第三光电检测器之间的其中至少一个间,所述光学元件包括波导滤波器元件、多模干扰波导元件的预定部分、定向耦合器的预定部分、Mach-Zehnder干涉仪的预定部分、抛物线波导元件、平面波导和透镜中的至少一个。h) at least one optical element of a plurality of optical elements disposed between the optical amplifier and the second filter, between the input port and the second filter, and between the second filter and the second filter Between at least one of the third photodetectors, the optical element comprises a waveguide filter element, a predetermined portion of a multimode interference waveguide element, a predetermined portion of a directional coupler, a predetermined portion of a Mach-Zehnder interferometer, a parabolic waveguide At least one of an element, a planar waveguide, and a lens.
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Application publication date: 20121003