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CN102708788B - Pixel circuit - Google Patents

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CN102708788B
CN102708788B CN201110376530.2A CN201110376530A CN102708788B CN 102708788 B CN102708788 B CN 102708788B CN 201110376530 A CN201110376530 A CN 201110376530A CN 102708788 B CN102708788 B CN 102708788B
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amorphous silicon
pole
transistor
silicon transistor
drain
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CN102708788A (en
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梁逸南
龙春平
马占洁
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BOE Technology Group Co Ltd
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Abstract

The invention provides a pixel circuit, which relates to the technical field of the display device. The pixel circuit is invented in order to solve the technical problem that the pixel circuit in the prior art has difficulty in realizing high-quality display. The pixel circuit comprises a driving unit, a switch unit, an energy storage unit and an organic light emitting diode (OLED), wherein the first input end of the driving unit is connected with a voltage drain drain (VDD); the second input end of the driving unit is connected with the output end of the switch unit; the output end of the driving unit is connected with the first end of the OLED; the driving unit consists of polysilicon transistors; the first input end of the switch unit inputs a line scanning signal (SCAN); the second input end of the switch unit inputs data voltage (Vdata); the switch unit consists of polysilicon transistors; two ends of the energy storage unit are connected with the driving unit for storing voltage; and the second end of the OLED is earthed. According to the pixel circuit disclosed by the invention, the display quality of the pixel circuit can be improved.

Description

像素电路pixel circuit

技术领域 technical field

本发明涉及显示器件技术领域,尤其涉及一种像素电路。The present invention relates to the technical field of display devices, in particular to a pixel circuit.

背景技术 Background technique

采用OLED(Organic Light-Emitting Diode,有机发光二极管)有机电致发光显示器是一种新兴的平板显示器件,由于其制备工艺简单、成本低、响应速度快、易于实现彩色显示和大屏幕显示、功耗低、容易实现和集成电路驱动器的匹配、发光亮度高、工作温度适应范围广、体积轻薄且易于实现柔性显示等优点,具有广阔的应用前景。OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) organic electroluminescent display is an emerging flat-panel display device. It has the advantages of low power consumption, easy matching with integrated circuit driver, high luminous brightness, wide range of working temperature adaptability, light and thin volume and easy realization of flexible display, etc., and has broad application prospects.

按照驱动方式的不同,OLED可以分为无源矩阵驱动(Passive MatrixOrganic Light Emission Display,PMOLED)和有源矩阵驱动(Active MatrixOrganic Light Emission Display,AMOLED)两种。无源矩阵驱动虽然工艺简单,成本较低,但因存在交叉串扰、高功耗、低寿命等缺点,不能满足高分辨率大尺寸显示的需要。相比之下,有源矩阵驱动因为在面板上加入了薄膜晶体管(Thin Film Transistor,TFT),使得像素单元在一帧时间内都能够发光,所以其所需要的驱动电流小,功耗低,寿命更长,可以满足高分辨率、多灰度的大尺寸显示的需要。According to different driving methods, OLED can be divided into two types: Passive Matrix Organic Light Emission Display (PMOLED) and Active Matrix Organic Light Emission Display (AMOLED). Although the passive matrix driver has a simple process and low cost, it cannot meet the needs of high-resolution and large-size displays due to shortcomings such as crosstalk, high power consumption, and low lifespan. In contrast, the active matrix drive adds thin film transistors (Thin Film Transistor, TFT) to the panel, so that the pixel unit can emit light within a frame time, so it requires a small drive current and low power consumption. It has a longer lifespan and can meet the needs of large-size displays with high resolution and multiple grayscales.

目前,AMOLED显示屏的驱动电路,主要有两种解决技术。一种是利用非晶硅(a-Si,Amorphous-Silicon)TFT技术;另一种是利用多晶硅(p-Si,poly-Silicon)TFT技术。At present, there are mainly two solutions for the driving circuit of the AMOLED display. One is to use amorphous silicon (a-Si, Amorphous-Silicon) TFT technology; the other is to use polysilicon (p-Si, poly-Silicon) TFT technology.

a-Si TFT技术虽然工艺简单,成本低廉,但是其载流子的迁移率非常小(典型值通常小于1cm2/Vs),无法提供足够的驱动电流;同时,非晶硅TFT只能提供N型器件,并且其稳定性在长期应力作用下也存在问题。而多晶硅TFT,由于其载流子迁移率高(典型值通常大于50cm2/Vs),响应速度快,易于实现大面积的动态视频显示。同时,高的载流子迁移率可以利用多晶硅TFT将外围驱动电路集成在显示背板之上,大大减少了外接引线,降低了外围驱动电路的复杂性。目前,国际上普遍采用多晶硅TFT进行AMOLED背板的研究与开发。Although a-Si TFT technology is simple in process and low in cost, its carrier mobility is very small (typically less than 1cm 2 /Vs), which cannot provide sufficient driving current; at the same time, amorphous silicon TFT can only provide N type devices, and their stability under long-term stress is also problematic. The polysilicon TFT, because of its high carrier mobility (typically greater than 50cm 2 /Vs), has a fast response speed and is easy to realize large-area dynamic video display. At the same time, the high carrier mobility can use polysilicon TFT to integrate the peripheral driving circuit on the display backplane, which greatly reduces the external leads and reduces the complexity of the peripheral driving circuit. At present, polysilicon TFTs are commonly used in the research and development of AMOLED backplanes in the world.

多晶硅TFT的沟道区是通过在衬底上形成非晶硅层,对非晶硅层进行再结晶从而形成多晶硅层而制备的。再结晶的方法例如可以包括:准分子激光退火(Excimer Laser Annealing,ELA)方法,顺序横向晶化(Sequential LateralSolidification,SLS)方法,金属诱导结晶(Metal Induced Crystallization,MIC)方法,或者金属诱导侧向结晶(Metal Induced Lateral Crystallization,MILC)方法。The channel region of a polysilicon TFT is prepared by forming an amorphous silicon layer on a substrate, recrystallizing the amorphous silicon layer to form a polysilicon layer. The method of recrystallization can include, for example: excimer laser annealing (Excimer Laser Annealing, ELA) method, sequential lateral crystallization (Sequential Lateral Solidification, SLS) method, metal induced crystallization (Metal Induced Crystallization, MIC) method, or metal induced lateral Crystallization (Metal Induced Lateral Crystallization, MILC) method.

在这些方法中,MILC技术与ELA以及SLS技术相比,TFT器件的均匀性更好,更容易实现大尺寸AMOLED显示的需要,同时,利用MILC技术的成本也更为低廉。而且与MIC技术相比,MILC技术可以有效的降低沟道区残留金属的污染。Among these methods, compared with ELA and SLS technologies, MILC technology has better uniformity of TFT devices, and it is easier to realize the needs of large-size AMOLED display. At the same time, the cost of using MILC technology is also lower. Moreover, compared with the MIC technology, the MILC technology can effectively reduce the pollution of residual metal in the channel region.

目前采用MILC技术的AMOLED背板的主要瓶颈在于:无法降低TFT的泄漏电流,为了保证每个像素点在一帧时间的正常显示,需要保证开关晶体管在关断时通过其的泄漏电流不会使存储电容上的电压值下降超过1个灰度级。但是,由于MILC法得到的多晶硅TFT中仍存在少量金属残留,TFT的泄漏电流过高,制约了实现高灰度、高质量的显示。At present, the main bottleneck of the AMOLED backplane using MILC technology is that the leakage current of the TFT cannot be reduced. In order to ensure the normal display of each pixel in one frame time, it is necessary to ensure that the leakage current passing through the switching transistor when it is turned off will not make the The voltage value on the storage capacitor drops by more than 1 gray level. However, since there is still a small amount of metal residue in the polysilicon TFT obtained by the MILC method, the leakage current of the TFT is too high, which restricts the realization of high gray scale and high quality display.

发明内容 Contents of the invention

本发明要解决的技术问题是提供一种像素电路,能够降低开关晶体管的泄漏电流,提高了像素电路的显示质量。The technical problem to be solved by the present invention is to provide a pixel circuit, which can reduce the leakage current of the switch transistor and improve the display quality of the pixel circuit.

为解决上述技术问题,本发明提供技术方案如下:In order to solve the problems of the technologies described above, the present invention provides technical solutions as follows:

一种像素电路,包括:驱动单元、开关单元、储能单元以及有机发光二极管;A pixel circuit, comprising: a drive unit, a switch unit, an energy storage unit, and an organic light emitting diode;

所述驱动单元的第一输入端连接电源电压,所述驱动单元的第二输入端与所述开关单元的输出端连接,所述驱动单元的输出端连接所述有机发光二极管的第一端,用于输出驱动所述有机发光二极管发光的电流信号;所述驱动单元由多晶硅晶体管组成;The first input end of the drive unit is connected to the power supply voltage, the second input end of the drive unit is connected to the output end of the switch unit, the output end of the drive unit is connected to the first end of the organic light emitting diode, Used to output a current signal for driving the organic light emitting diode to emit light; the driving unit is composed of a polysilicon transistor;

所述开关单元的第一输入端输入行扫描信号,所述开关单元的第二输入端输入数据电压;所述开关单元由非晶硅晶体管组成;The first input terminal of the switch unit inputs a row scan signal, and the second input terminal of the switch unit inputs a data voltage; the switch unit is composed of an amorphous silicon transistor;

所述储能单元的两端与所述驱动单元连接,用于存储电压;及Both ends of the energy storage unit are connected to the drive unit for storing voltage; and

所述有机发光二极管的第二端接地。The second end of the OLED is grounded.

所述驱动单元包括:多晶硅晶体管;The drive unit includes: a polysilicon transistor;

所述驱动单元的第一输入端为所述多晶硅晶体管的第一极,所述驱动单元的第二输入端为所述多晶硅晶体管的栅极,所述驱动单元的输出端为所述多晶硅晶体管的第二极。The first input end of the driving unit is the first pole of the polysilicon transistor, the second input end of the driving unit is the gate of the polysilicon transistor, and the output end of the driving unit is the gate of the polysilicon transistor. second pole.

所述开关单元包括:非晶硅晶体管;The switch unit includes: an amorphous silicon transistor;

所述开关单元的第一输入端为所述非晶硅晶体管的栅极;所述开关单元的第二输入端为所述非晶硅晶体管的第一极,所述开关单元的输出端为所述非晶硅晶体管的第二极。The first input terminal of the switch unit is the gate of the amorphous silicon transistor; the second input terminal of the switch unit is the first pole of the amorphous silicon transistor, and the output terminal of the switch unit is the gate of the amorphous silicon transistor. The second pole of the amorphous silicon transistor.

所述多晶硅晶体管的第一极为漏极,所述多晶硅晶体管的第二极为源极;或者,所述多晶硅晶体管的第二极为漏极,所述多晶硅晶体管的第一极为源极;The first pole of the polysilicon transistor is the drain, and the second pole of the polysilicon transistor is the source; or, the second pole of the polysilicon transistor is the drain, and the first pole of the polysilicon transistor is the source;

所述非晶硅晶体管的第二极为漏极,所述非晶硅晶体管的第一极为源极;或者,所述非晶硅晶体管的第一极为漏极,所述非晶硅晶体管的第二极为源极。The second pole of the amorphous silicon transistor is the drain, and the first pole of the amorphous silicon transistor is the source; or, the first pole of the amorphous silicon transistor is the drain, and the second pole of the amorphous silicon transistor is Very source.

所述开关单元包括:第一非晶硅晶体管、第二非晶硅晶体管、第三非晶硅晶体管;The switch unit includes: a first amorphous silicon transistor, a second amorphous silicon transistor, and a third amorphous silicon transistor;

所述开关单元的第一输入端包括第一子输入端和第二子输入端;The first input terminal of the switch unit includes a first sub-input terminal and a second sub-input terminal;

所述开关单元的第一子输入端为所述第一非晶硅晶体管的栅极和所述第二非晶硅晶体管的栅极,分别连接第一行扫描信号;The first sub-input terminal of the switch unit is the gate of the first amorphous silicon transistor and the gate of the second amorphous silicon transistor, respectively connected to the first row scanning signal;

所述开关单元的第二子输入端为所述第三非晶硅晶体管的栅极,连接第二行扫描信号;The second sub-input terminal of the switch unit is the gate of the third amorphous silicon transistor, connected to the second row scanning signal;

所述开关单元的第二输入端分别为所述第一非晶硅晶体管的第一极和所述第三非晶硅晶体管的第一极;The second input terminals of the switch unit are respectively the first pole of the first amorphous silicon transistor and the first pole of the third amorphous silicon transistor;

所述开关单元的输出端为所述第一非晶硅晶体管的第二极;The output end of the switch unit is the second pole of the first amorphous silicon transistor;

所述第三非晶硅晶体管的第二极连接所述第二非晶硅晶体管的第一极,所述第二非晶硅晶体管的第二极连接所述驱动单元的输出端。The second pole of the third amorphous silicon transistor is connected to the first pole of the second amorphous silicon transistor, and the second pole of the second amorphous silicon transistor is connected to the output terminal of the driving unit.

所述第一非晶硅晶体管的第一极为漏极,所述第一非晶硅晶体管的第二极为源极;或者,所述第一非晶硅晶体管的第二极为漏极,所述第一非晶硅晶体管的第一极为源极;The first pole of the first amorphous silicon transistor is the drain, and the second pole of the first amorphous silicon transistor is the source; or, the second pole of the first amorphous silicon transistor is the drain, and the second pole of the first amorphous silicon transistor is the drain. a first electrode of an amorphous silicon transistor;

所述第二非晶硅晶体管的第一极为漏极,所述第二非晶硅晶体管的第二极为源极;或者,所述第二非晶硅晶体管的第二极为漏极,所述第二非晶硅晶体管的第一极为源极;The first pole of the second amorphous silicon transistor is the drain, and the second pole of the second amorphous silicon transistor is the source; or, the second pole of the second amorphous silicon transistor is the drain, and the second pole of the second amorphous silicon transistor is the drain. The first pole of the two amorphous silicon transistors is the source;

所述第三非晶硅晶体管的第一极为漏极,所述第三非晶硅晶体管的第二极为源极;或者,所述第三非晶硅晶体管的第二极为漏极,所述第三非晶硅晶体管的第一极为源极。The first pole of the third amorphous silicon transistor is the drain, and the second pole of the third amorphous silicon transistor is the source; or, the second pole of the third amorphous silicon transistor is the drain, and the second pole of the third amorphous silicon transistor is the drain. The first pole of the three amorphous silicon transistors is the source.

所述驱动单元包括:第一多晶硅晶体管、第二多晶硅晶体管;The driving unit includes: a first polysilicon transistor and a second polysilicon transistor;

所述开关单元包括:第一非晶硅晶体管、第二非晶硅晶体管;The switch unit includes: a first amorphous silicon transistor, a second amorphous silicon transistor;

所述驱动单元的第一输入端为所述第二多晶硅晶体管的第一极;所述驱动单元的第二输入端为所述第二多晶硅晶体管的栅极;所述驱动单元的输出端为所述第二多晶硅晶体管的第二极;The first input terminal of the driving unit is the first pole of the second polysilicon transistor; the second input terminal of the driving unit is the gate of the second polysilicon transistor; The output terminal is the second pole of the second polysilicon transistor;

所述开关单元的第一输入端为所述第一非晶硅晶体管的栅极;所述开关单元的第二输入端为所述第一非晶硅晶体管的第一极;The first input terminal of the switch unit is the gate of the first amorphous silicon transistor; the second input terminal of the switch unit is the first pole of the first amorphous silicon transistor;

所述开关单元的输出端为所述第二非晶硅晶体管的第二极;The output terminal of the switch unit is the second pole of the second amorphous silicon transistor;

所述第二非晶硅晶体管的第一极与所述第一非晶硅晶体管的第一极连接;所述第二非晶硅晶体管的栅极与所述第一非晶硅晶体管的栅极连接;The first pole of the second amorphous silicon transistor is connected to the first pole of the first amorphous silicon transistor; the gate of the second amorphous silicon transistor is connected to the gate of the first amorphous silicon transistor connect;

所述第二多晶硅晶体管的栅极与所述第一多晶硅晶体管的栅极连接,所述第二多晶硅晶体管的第一极与所述第一多晶硅晶体管的第一极连接;The gate of the second polysilicon transistor is connected to the gate of the first polysilicon transistor, and the first pole of the second polysilicon transistor is connected to the first pole of the first polysilicon transistor. connect;

第一非晶硅晶体管的第二极与所述第一多晶硅晶体管的第二极连接。The second pole of the first amorphous silicon transistor is connected to the second pole of the first polysilicon transistor.

所述第一多晶硅晶体管的第一极为漏极,所述第一多晶硅晶体管的第二极为源极;或者,所述第一多晶硅晶体管的第二极为漏极,所述第一多晶硅晶体管的第一极为源极;The first pole of the first polysilicon transistor is the drain, and the second pole of the first polysilicon transistor is the source; or, the second pole of the first polysilicon transistor is the drain, and the second pole of the first polysilicon transistor is the drain. a first pole source of a polysilicon transistor;

所述第二多晶硅晶体管的第一极为漏极,所述第二多晶硅晶体管的第二极为源极;或者,所述第二多晶硅晶体管的第二极为漏极,所述第二多晶硅晶体管的第一极为源极;The first pole of the second polysilicon transistor is the drain, and the second pole of the second polysilicon transistor is the source; or, the second pole of the second polysilicon transistor is the drain, and the second pole of the second polysilicon transistor is the drain. The first pole of the polysilicon transistor is the source;

所述第一非晶硅晶体管的第一极为漏极,所述第一非晶硅晶体管的第二极为源极;或者,所述第一非晶硅晶体管的第二极为漏极,所述第一非晶硅晶体管的第一极为源极;The first pole of the first amorphous silicon transistor is the drain, and the second pole of the first amorphous silicon transistor is the source; or, the second pole of the first amorphous silicon transistor is the drain, and the second pole of the first amorphous silicon transistor is the drain. a first electrode of an amorphous silicon transistor;

所述第二非晶硅晶体管的第一极为漏极,所述第二非晶硅晶体管的第二极为源极;或者,所述第二非晶硅晶体管的第二极为漏极,所述第二非晶硅晶体管的第一极为源极。The first pole of the second amorphous silicon transistor is the drain, and the second pole of the second amorphous silicon transistor is the source; or, the second pole of the second amorphous silicon transistor is the drain, and the second pole of the second amorphous silicon transistor is the drain. The first pole of the two amorphous silicon transistors is the source.

所述储能单元包括以下电容的一个或者多个的任意组合:The energy storage unit includes any combination of one or more of the following capacitors:

第一电容,所述第一电容的第一端连接电源电压,所述第一电容的第二端连接所述驱动单元的第二输入端;a first capacitor, the first end of the first capacitor is connected to a power supply voltage, and the second end of the first capacitor is connected to the second input end of the drive unit;

第二电容,所述第二电容的第一端连接电源电压,所述第二电容的第二端连接所述驱动单元的输出端;a second capacitor, the first end of the second capacitor is connected to a power supply voltage, and the second end of the second capacitor is connected to the output end of the drive unit;

第三电容,所述第三电容的第一端连接所述驱动单元的第二输入端,所述第三电容的第二端连接所述驱动单元的输出端。A third capacitor, the first terminal of the third capacitor is connected to the second input terminal of the driving unit, and the second terminal of the third capacitor is connected to the output terminal of the driving unit.

所述储能单元包括以下电容的一个或者多个的任意组合:The energy storage unit includes any combination of one or more of the following capacitors:

第一电容,所述第一电容的第一端连接所述驱动单元的第二输入端;所述第一电容的第二端连接所述第三非晶硅晶体管的第二极;a first capacitor, the first end of the first capacitor is connected to the second input end of the drive unit; the second end of the first capacitor is connected to the second pole of the third amorphous silicon transistor;

第二电容,所述第二电容的第一端连接所述电源电压;所述第二电容的第二端连接所述第三非晶硅晶体管的第二极。A second capacitor, the first end of the second capacitor is connected to the power supply voltage; the second end of the second capacitor is connected to the second pole of the third amorphous silicon transistor.

所述多晶硅晶体管由金属诱导侧向结晶MILC工艺形成。The polysilicon transistor is formed by a metal-induced lateral crystallization MILC process.

本发明具有以下有益效果:The present invention has the following beneficial effects:

上述方案中,像素电路包括:驱动单元、开关单元、储能单元以及有机发光二极管OLED;所述驱动单元的第一输入端连接电源电压VDD,所述驱动单元的第二输入端与所述开关单元的输出端连接,所述驱动单元的输出端连接所述OLED的第一端,用于输出驱动所述OLED发光的电流信号;所述开关单元的第一输入端输入行扫描信号SCAN,所述开关单元的第二输入端输入数据电压Vdata;所述储能单元的两端与所述驱动单元连接,用于存储电压;所述OLED的第二端接地。由于所述驱动单元由多晶硅晶体管组成;所述开关单元由非晶硅晶体管组成;非晶硅晶体管的泄漏电流通常小于10-13A,从而有效地降低了开关晶体管的泄漏电流,从而提高了像素电路的显示质量。In the above solution, the pixel circuit includes: a drive unit, a switch unit, an energy storage unit, and an organic light emitting diode OLED; the first input terminal of the drive unit is connected to the power supply voltage VDD, and the second input terminal of the drive unit is connected to the switch The output end of the unit is connected, the output end of the driving unit is connected to the first end of the OLED, and is used to output the current signal for driving the OLED to emit light; the first input end of the switching unit inputs the row scanning signal SCAN, so The second input end of the switch unit inputs data voltage Vdata; the two ends of the energy storage unit are connected to the drive unit for storing voltage; the second end of the OLED is grounded. Since the driving unit is composed of polysilicon transistors; the switching unit is composed of amorphous silicon transistors; the leakage current of amorphous silicon transistors is usually less than 10 -13 A, thereby effectively reducing the leakage current of switching transistors, thereby improving the pixel The display quality of the circuit.

附图说明 Description of drawings

图1为本发明所述的一种像素电路的第一实施例的连接示意图;FIG. 1 is a schematic connection diagram of a first embodiment of a pixel circuit according to the present invention;

图2为本发明所述的一种像素电路的第二实施例的连接示意图;FIG. 2 is a schematic connection diagram of a second embodiment of a pixel circuit according to the present invention;

图3为本发明所述的一种像素电路的第二实施例的时序图;FIG. 3 is a timing diagram of a second embodiment of a pixel circuit according to the present invention;

图4为本发明所述的一种像素电路的第三实施例的连接示意图;FIG. 4 is a schematic connection diagram of a third embodiment of a pixel circuit according to the present invention;

图5为本发明所述的一种像素电路的第四实施例的连接示意图;5 is a schematic connection diagram of a fourth embodiment of a pixel circuit according to the present invention;

图6-13为本发明所述的一种像素电路的第二实施例对应的工艺流程中的俯视图;6-13 are top views in the process flow corresponding to the second embodiment of a pixel circuit according to the present invention;

图14为本发明所述的一种像素电路的第二实施例的对应的截面图。FIG. 14 is a corresponding cross-sectional view of the second embodiment of a pixel circuit according to the present invention.

具体实施方式 Detailed ways

为使本发明的实施例要解决的技术问题、技术方案和优点更加清楚,下面将结合附图及具体实施例进行详细描述。In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

如图1所示,为本发明所述的一种像素电路,包括:驱动单元10、开关单元20、储能单元30以及有机发光二极管OLED 40。As shown in FIG. 1 , it is a pixel circuit according to the present invention, including: a driving unit 10 , a switching unit 20 , an energy storage unit 30 and an organic light emitting diode OLED 40 .

所述驱动单元10的第一输入端连接电源电压VDD,所述驱动单元10的第二输入端与所述开关单元20的输出端连接,所述驱动单元10的输出端连接所述OLED 40的第一端,用于输出驱动所述OLED发光的电流信号;所述驱动单元10由多晶硅晶体管组成。The first input end of the drive unit 10 is connected to the power supply voltage VDD, the second input end of the drive unit 10 is connected to the output end of the switch unit 20, and the output end of the drive unit 10 is connected to the OLED 40. The first end is used to output a current signal for driving the OLED to emit light; the driving unit 10 is composed of polysilicon transistors.

所述开关单元20的第一输入端输入行扫描信号SCAN,所述开关单元20的第二输入端输入数据电压Vdata;所述开关单元20由非晶硅晶体管组成。The first input terminal of the switch unit 20 inputs the row scan signal SCAN, and the second input terminal of the switch unit 20 inputs the data voltage Vdata; the switch unit 20 is composed of an amorphous silicon transistor.

所述储能单元30的两端与所述驱动单元连接,用于存储电压。Both ends of the energy storage unit 30 are connected to the drive unit for storing voltage.

所述OLED的第二端接地GND。The second terminal of the OLED is grounded to GND.

以下描述本发明的第一实施例。A first embodiment of the present invention is described below.

如图2所示,所述驱动单元10包括:多晶硅晶体管T1;As shown in FIG. 2, the driving unit 10 includes: a polysilicon transistor T1;

所述驱动单元10的第一输入端为所述多晶硅晶体管T1的第一极,所述驱动单元10的第二输入端为所述多晶硅晶体管T1的栅极,所述驱动单元10的输出端为所述多晶硅晶体管T1的第二极。The first input terminal of the driving unit 10 is the first pole of the polysilicon transistor T1, the second input terminal of the driving unit 10 is the gate of the polysilicon transistor T1, and the output terminal of the driving unit 10 is The second pole of the polysilicon transistor T1.

所述开关单元20包括非晶硅晶体管T2。The switch unit 20 includes an amorphous silicon transistor T2.

所述开关单元20的第一输入端为所述非晶硅晶体管T2的栅极;所述开关单元20的第二输入端为所述非晶硅晶体管T2的第一极,所述开关单元20的输出端为所述非晶硅晶体管T2的第二极。The first input terminal of the switch unit 20 is the gate of the amorphous silicon transistor T2; the second input terminal of the switch unit 20 is the first pole of the amorphous silicon transistor T2, and the switch unit 20 The output terminal of is the second pole of the amorphous silicon transistor T2.

可选的,所述多晶硅晶体管T1的第一极为漏极,所述多晶硅晶体管T1的第二极为源极;或者,所述多晶硅晶体管T1的第二极为漏极,所述多晶硅晶体管T1的第一极为源极。Optionally, the first pole of the polysilicon transistor T1 is a drain, and the second pole of the polysilicon transistor T1 is a source; or, the second pole of the polysilicon transistor T1 is a drain, and the first pole of the polysilicon transistor T1 is a drain. Very source.

所述非晶硅晶体管T2的第二极为漏极,所述非晶硅晶体管T2的第一极为源极;或者,所述非晶硅晶体管T2的第一极为漏极,所述非晶硅晶体管T2的第二极为源极。The second electrode of the amorphous silicon transistor T2 is the drain, and the first electrode of the amorphous silicon transistor T2 is the source; or, the first electrode of the amorphous silicon transistor T2 is the drain, and the amorphous silicon transistor The second pole of T2 is the source.

所述储能单元包括以下电容的一个或者多个的任意组合:The energy storage unit includes any combination of one or more of the following capacitors:

第一电容CS,所述第一电容CS的第一端连接电源电压VDD,所述第一电容CS的第二端连接所述驱动单元的第二输入端;A first capacitor C S , the first end of the first capacitor C S is connected to the power supply voltage VDD, and the second end of the first capacitor C S is connected to the second input end of the driving unit;

第二电容C1(图2未示出),所述第二电容C1的第一端连接电源电压VDD,所述第二电容C1的第二端连接所述驱动单元的输出端;A second capacitor C1 (not shown in FIG. 2 ), the first end of the second capacitor C1 is connected to the power supply voltage VDD, and the second end of the second capacitor C1 is connected to the output end of the driving unit;

第三电容C2(图2未示出),所述第三电容C2的第一端连接所述驱动单元的第二输入端,所述第三电容C2的第二端连接所述驱动单元的输出端。A third capacitor C2 (not shown in FIG. 2 ), the first end of the third capacitor C2 is connected to the second input end of the drive unit, and the second end of the third capacitor C2 is connected to the output of the drive unit end.

在该实施例中,多晶硅晶体管T1作为驱动管,其作用在于提供驱动OLED发光的电流信号;非晶硅晶体管T2作为开关管,行扫描信号施加在T2管的栅极,以控制数据电压的流通;电容CS以电压形式对数据电压进行存储。In this embodiment, the polysilicon transistor T1 is used as a driving tube, and its function is to provide a current signal for driving the OLED to emit light; the amorphous silicon transistor T2 is used as a switching tube, and the row scanning signal is applied to the gate of the T2 tube to control the flow of the data voltage. ; The capacitor CS stores the data voltage in the form of a voltage.

其中,多晶硅TFT管T1的栅极与非晶硅TFT管T2的漏极相连,多晶硅TFT管T1的源极与具有一定电位的第一电源相连,多晶硅TFT管T1的漏极与有机发光二极管OLED的第一电极相连;非晶硅TFT管T2的栅极与行扫描信号线SCAN相连,非晶硅TFT管T2的漏极与多晶硅TFT管T1的栅极相连,非晶硅TFT管T2的源极与数据信号线DATA相连;有机发光二极管OLED的第一电极与多晶硅TFT管T1的漏极相连,有机发光二极管OLED的第二电极接地;存储电容CS的第一电极与多晶硅TFT管T1的栅极相连,存储电容CS的第二电极与VDD相连。Wherein, the gate of the polysilicon TFT T1 is connected to the drain of the amorphous silicon TFT T2, the source of the polysilicon TFT T1 is connected to the first power supply with a certain potential, and the drain of the polysilicon TFT T1 is connected to the organic light emitting diode OLED The gate of the amorphous silicon TFT transistor T2 is connected to the row scanning signal line SCAN, the drain of the amorphous silicon TFT transistor T2 is connected to the gate of the polysilicon TFT transistor T1, and the source of the amorphous silicon TFT transistor T2 The pole is connected with the data signal line DATA; the first electrode of the organic light emitting diode OLED is connected with the drain of the polysilicon TFT tube T1, and the second electrode of the organic light emitting diode OLED is grounded; the first electrode of the storage capacitor CS is connected with the polysilicon TFT tube T1 The gate is connected, and the second electrode of the storage capacitor CS is connected to VDD.

图3为图2所示的像素电路的时序图。像素电路的工作方式如下:FIG. 3 is a timing diagram of the pixel circuit shown in FIG. 2 . The pixel circuit works as follows:

在选通阶段,SCAN信号使开关晶体管T2管导通,数据电压线DATA上的电压信号通过晶体管T2被施加到驱动晶体管T1的栅极,同时数据电压线DATA对存储电容CS充电。在稳定阶段,受数据电压Vdata的控制,晶体管T1输出至OLED的电流等于:In the gate phase, the SCAN signal turns on the switching transistor T2, and the voltage signal on the data voltage line DATA is applied to the gate of the driving transistor T1 through the transistor T2, and at the same time, the data voltage line DATA charges the storage capacitor CS . In the stable stage, controlled by the data voltage Vdata, the current output from the transistor T1 to the OLED is equal to:

IOLED=1/2unCOX(W/L)T1(Vdata-VTH)2I OLED = 1/2 u n COX(W/L) T1 (Vdata-V TH ) 2 ;

式中,IOLED为晶体管T1输出至OLED的电流值;un为晶体管T1的载流子迁移率;COX为晶体管T1的栅绝缘层单位面积电容;W为晶体管T1的沟道宽度;L为晶体T1的管沟道长度;VTH为晶体管T1的阈值电压;VDD是由外部电源给出的5V左右的第一电源值。In the formula, I OLED is the current value output by the transistor T1 to the OLED; u n is the carrier mobility of the transistor T1; C OX is the capacitance per unit area of the gate insulating layer of the transistor T1; W is the channel width of the transistor T1; L is the tube channel length of the crystal T1; V TH is the threshold voltage of the transistor T1; VDD is the first power supply value of about 5V given by the external power supply.

在保持阶段,SCAN信号使开关晶体管T2关断,此时,由于存储电容CS的存在,使驱动晶体管T1的栅极信号不受T2关断的影响,仍然为Vdata,从而保证在整个关断阶段,有电流能够对OLED进行持续驱动。In the holding phase, the SCAN signal turns off the switching transistor T2. At this time, due to the existence of the storage capacitor CS , the gate signal of the driving transistor T1 is not affected by the turning off of T2, and is still Vdata, so as to ensure that it is in the whole off stage, there is current to continuously drive the OLED.

但是,由于晶体管T2在关断时存在泄漏电流Ileakage。因此在保持阶段,随着电荷从晶体管T2的泄漏,晶体管T2的栅极电位逐渐降低,驱动OLED的电流也逐渐减小。However, there is a leakage current I leakage when the transistor T2 is turned off. Therefore, in the holding phase, as the charge leaks from the transistor T2, the gate potential of the transistor T2 gradually decreases, and the current driving the OLED also gradually decreases.

栅极电位的下降值V可以由以下公式计算:The drop value V of the gate potential can be calculated by the following formula:

V=Q/CS=Ileakage*t/CSV=Q/C s =I leakage *t/C s .

其中,Cs为存储电容的电容值;Q为由于电荷泄漏所损失的电荷量;t为保持阶段所持续的时间。Among them, Cs is the capacitance value of the storage capacitor; Q is the amount of charge lost due to charge leakage; t is the duration of the hold phase.

通常屏幕的刷新率为60Hz,因此t=1/60s=16.67ms。为了实现高质量、高灰阶的显示,就需要保证OLED的亮度下降量在不高于人眼的可识别范围(通常为10个灰阶),需要T2的泄漏电流大于10-12A。本发明采用非晶硅TFT的泄漏电流小于10-13A,其关断特性好,满足了该设计要求。Usually the refresh rate of the screen is 60Hz, so t=1/60s=16.67ms. In order to achieve high-quality, high-gray-scale display, it is necessary to ensure that the brightness drop of the OLED is not higher than the recognizable range of the human eye (usually 10 gray-scale), and the leakage current of T2 is required to be greater than 10 -12 A. The leakage current of the amorphous silicon TFT used in the invention is less than 10 -13 A, and the turn-off characteristic is good, which meets the design requirement.

另外,本发明采用MILC方法制备低温多晶硅TFT,其载流子迁移率大,作为OLED的驱动晶体管。本发明利用MILC技术,实现分区域晶化,结合了MILC低温多晶硅TFT与非晶硅TFT的优点,将驱动管T1利用MILC晶化技术制作成低温多晶硅TFT,而开关管T2设计为为非晶硅TFT,在保证其能够驱动OLED的同时,有效的降低了泄漏电流,提高了电路在保持阶段的稳定性。In addition, the present invention adopts the MILC method to prepare low-temperature polysilicon TFTs, which have high carrier mobility and are used as driving transistors for OLEDs. The present invention utilizes MILC technology to realize regional crystallization, combines the advantages of MILC low-temperature polysilicon TFTs and amorphous silicon TFTs, and uses MILC crystallization technology to make the drive tube T1 into a low-temperature polysilicon TFT, while the switch tube T2 is designed to be amorphous Silicon TFT, while ensuring that it can drive OLED, effectively reduces the leakage current and improves the stability of the circuit in the holding phase.

以下描述本发明的第二实施例。A second embodiment of the present invention is described below.

如图4所示,所述驱动单元10的第一输入端为所述多晶硅晶体管A1的第一极,所述驱动单元10的第二输入端为所述多晶硅晶体管T1的栅极,所述驱动单元10的输出端为所述多晶硅晶体管T1的第二极。As shown in FIG. 4, the first input end of the driving unit 10 is the first pole of the polysilicon transistor A1, the second input end of the driving unit 10 is the gate of the polysilicon transistor T1, and the driving The output terminal of the unit 10 is the second pole of the polysilicon transistor T1.

所述开关单元20包括:第一非晶硅晶体管A2、第二非晶硅晶体管A3、第三非晶硅晶体管A4;The switch unit 20 includes: a first amorphous silicon transistor A2, a second amorphous silicon transistor A3, and a third amorphous silicon transistor A4;

所述开关单元20的第一输入端包括第一子输入端和第二子输入端;The first input terminal of the switch unit 20 includes a first sub-input terminal and a second sub-input terminal;

所述开关单元20的第一子输入端为所述第一非晶硅晶体管A2的栅极和所述第二非晶硅晶体管A3的栅极,分别连接第一行扫描信号SCAN1;The first sub-input terminal of the switch unit 20 is the gate of the first amorphous silicon transistor A2 and the gate of the second amorphous silicon transistor A3, respectively connected to the first row scanning signal SCAN1;

所述开关单元20的第二子输入端为所述第三非晶硅晶体管A4的栅极,连接第二行扫描信号SCAN2;The second sub-input terminal of the switch unit 20 is the gate of the third amorphous silicon transistor A4, which is connected to the second row scanning signal SCAN2;

所述开关单元20的第二输入端分别为所述第一非晶硅晶体管A2的第一极和所述第三非晶硅晶体管A4的第一极;The second input terminals of the switch unit 20 are respectively the first pole of the first amorphous silicon transistor A2 and the first pole of the third amorphous silicon transistor A4;

所述开关单元20的输出端为所述第一非晶硅晶体管A2的第二极;The output end of the switch unit 20 is the second pole of the first amorphous silicon transistor A2;

所述第三非晶硅晶体管A4的第二极连接所述第二非晶硅晶体管A3的第一极,所述第二非晶硅晶体管A3的第二极连接所述驱动单元的输出端。The second pole of the third amorphous silicon transistor A4 is connected to the first pole of the second amorphous silicon transistor A3, and the second pole of the second amorphous silicon transistor A3 is connected to the output end of the driving unit.

所述第一非晶硅晶体管A2的第一极为漏极,所述第一非晶硅晶体管A2的第二极为源极;或者,所述第一非晶硅晶体管A2的第二极为漏极,所述第一非晶硅晶体管A2的第一极为源极;The first pole of the first amorphous silicon transistor A2 is the drain, and the second pole of the first amorphous silicon transistor A2 is the source; or, the second pole of the first amorphous silicon transistor A2 is the drain, The first pole of the first amorphous silicon transistor A2 is the source;

所述第二非晶硅晶体管A3的第一极为漏极,所述第二非晶硅晶体管A3的第二极为源极;或者,所述第二非晶硅晶体管A3的第二极为漏极,所述第二非晶硅晶体管A3的第一极为源极;The first electrode of the second amorphous silicon transistor A3 is a drain, the second electrode of the second amorphous silicon transistor A3 is a source; or, the second electrode of the second amorphous silicon transistor A3 is a drain, The first pole of the second amorphous silicon transistor A3 is the source;

所述第三非晶硅晶体管A4的第一极为漏极,所述第三非晶硅晶体管A4的第二极为源极;或者,所述第三非晶硅晶体管A4的第二极为漏极,所述第三非晶硅晶体管A4的第一极为源极。The first pole of the third amorphous silicon transistor A4 is the drain, the second pole of the third amorphous silicon transistor A4 is the source; or, the second pole of the third amorphous silicon transistor A4 is the drain, The first pole of the third amorphous silicon transistor A4 is the source.

所述储能单元包括以下电容的一个或者多个的任意组合:The energy storage unit includes any combination of one or more of the following capacitors:

第一电容CS(图4未示出),所述第一电容CS的第一端连接电源电压VDD,所述第一电容CS的第二端连接所述驱动单元的第二输入端;A first capacitor CS (not shown in FIG. 4 ), the first end of the first capacitor CS is connected to the power supply voltage VDD, and the second end of the first capacitor CS is connected to the second input end of the drive unit ;

第二电容C1(图4未示出),所述第二电容C1的第一端连接电源电压VDD,所述第二电容C1的第二端连接所述驱动单元的输出端;A second capacitor C1 (not shown in FIG. 4 ), the first end of the second capacitor C1 is connected to the power supply voltage VDD, and the second end of the second capacitor C1 is connected to the output end of the driving unit;

第三电容C2(图4未示出),所述第三电容C2的第一端连接所述驱动单元的第二输入端,所述第三电容C2的第二端连接所述驱动单元的输出端。A third capacitor C2 (not shown in FIG. 4 ), the first end of the third capacitor C2 is connected to the second input end of the drive unit, and the second end of the third capacitor C2 is connected to the output of the drive unit end.

或者,所述储能单元包括以下电容的一个或者多个的任意组合:Alternatively, the energy storage unit includes any combination of one or more of the following capacitors:

第一电容,所述第一电容C1的第一端连接所述驱动单元的第二输入端;所述第一电容的第二端连接所述第三非晶硅晶体管A4的第二极;A first capacitor, the first end of the first capacitor C1 is connected to the second input end of the drive unit; the second end of the first capacitor is connected to the second pole of the third amorphous silicon transistor A4;

第二电容,所述第二电容C2的第一端连接所述电源电压;所述第二电容的第二端连接所述第三非晶硅晶体管A4的第二极。A second capacitor, the first end of the second capacitor C2 is connected to the power supply voltage; the second end of the second capacitor is connected to the second pole of the third amorphous silicon transistor A4.

在上述实施例中,三个TFT A2、A3、A4组成开关单元,可以由非晶硅TFT组成;TFTA1组成驱动单元,可以由低温多晶硅TFT组成。In the above embodiment, the three TFTs A2, A3, and A4 form a switching unit, which may be composed of amorphous silicon TFTs; TFTA1 forms a driving unit, which may be composed of low-temperature polysilicon TFTs.

以下描述本发明的第三实施例。A third embodiment of the present invention is described below.

如图5所示,所述驱动单元10包括:第一多晶硅晶体管DR1、第二多晶硅晶体管DR2;As shown in FIG. 5, the driving unit 10 includes: a first polysilicon transistor DR1, a second polysilicon transistor DR2;

所述开关单元20包括:第一非晶硅晶体管SW1、第二非晶硅晶体管SW2;The switch unit 20 includes: a first amorphous silicon transistor SW1, a second amorphous silicon transistor SW2;

所述驱动单元10的第一输入端为所述第二多晶硅晶体管DR2的第一极;所述驱动单元的第二输入端为所述第二多晶硅晶体管DR2的栅极;所述驱动单元的输出端为所述第二多晶硅晶体管DR2的第二极;The first input terminal of the driving unit 10 is the first pole of the second polysilicon transistor DR2; the second input terminal of the driving unit is the gate of the second polysilicon transistor DR2; the The output end of the driving unit is the second pole of the second polysilicon transistor DR2;

所述开关单元20的第一输入端为所述第一非晶硅晶体管SW1的栅极;所述开关单元的第二输入端为所述第一非晶硅晶体管SW1的第一极;The first input terminal of the switch unit 20 is the gate of the first amorphous silicon transistor SW1; the second input terminal of the switch unit is the first pole of the first amorphous silicon transistor SW1;

所述开关单元20的输出端为所述第二非晶硅晶体管SW2的第二极;The output terminal of the switch unit 20 is the second pole of the second amorphous silicon transistor SW2;

所述第二非晶硅晶体管SW2的第一极与所述第一非晶硅晶体管SW1的第一极连接;所述第二非晶硅晶体管SW2的栅极与所述第一非晶硅晶体管SW1的栅极连接;The first pole of the second amorphous silicon transistor SW2 is connected to the first pole of the first amorphous silicon transistor SW1; the gate of the second amorphous silicon transistor SW2 is connected to the first pole of the first amorphous silicon transistor SW2 Gate connection of SW1;

所述第二多晶硅晶体管DR2的栅极与所述第一多晶硅晶体管DR1的栅极连接,所述第二多晶硅晶体管DR2的第一极与所述第一多晶硅晶体管DR1的第一极连接;The gate of the second polysilicon transistor DR2 is connected to the gate of the first polysilicon transistor DR1, and the first pole of the second polysilicon transistor DR2 is connected to the first pole of the first polysilicon transistor DR1. The first pole connection;

第一非晶硅晶体管SW1的第二极与所述第一多晶硅晶体管DR1的第二极连接。The second pole of the first amorphous silicon transistor SW1 is connected to the second pole of the first polysilicon transistor DR1 .

可选的,所述第一多晶硅晶体管DR1的第一极为漏极,所述第一多晶硅晶体管DR1的第二极为源极;或者,所述第一多晶硅晶体管DR1的第二极为漏极,所述第一多晶硅晶体管DR1的第一极为源极;Optionally, the first pole of the first polysilicon transistor DR1 is the drain, and the second pole of the first polysilicon transistor DR1 is the source; or, the second pole of the first polysilicon transistor DR1 is The pole is the drain, and the first pole of the first polysilicon transistor DR1 is the source;

所述第二多晶硅晶体管DR2的第一极为漏极,所述第二多晶硅晶体管DR2的第二极为源极;或者,所述第二多晶硅晶体管DR2的第二极为漏极,所述第二多晶硅晶体管DR2的第一极为源极;The first pole of the second polysilicon transistor DR2 is the drain, and the second pole of the second polysilicon transistor DR2 is the source; or, the second pole of the second polysilicon transistor DR2 is the drain, The first pole of the second polysilicon transistor DR2 is the source;

所述第一非晶硅晶体管SW1的第一极为漏极,所述第一非晶硅晶体管SW1的第二极为源极;或者,所述第一非晶硅晶体管SW1的第二极为漏极,所述第一非晶硅晶体管SW1的第一极为源极;The first pole of the first amorphous silicon transistor SW1 is the drain, and the second pole of the first amorphous silicon transistor SW1 is the source; or, the second pole of the first amorphous silicon transistor SW1 is the drain, The first pole of the first amorphous silicon transistor SW1 is the source;

所述第二非晶硅晶体管SW2的第一极为漏极,所述第二非晶硅晶体管SW2的第二极为源极;或者,所述第二非晶硅晶体管SW2的第二极为漏极,所述第二非晶硅晶体管SW2的第一极为源极。The first pole of the second amorphous silicon transistor SW2 is the drain, the second pole of the second amorphous silicon transistor SW2 is the source; or, the second pole of the second amorphous silicon transistor SW2 is the drain, The first pole of the second amorphous silicon transistor SW2 is the source.

所述储能单元包括以下电容的一个或者多个的任意组合:The energy storage unit includes any combination of one or more of the following capacitors:

第一电容CS(图5未示出),所述第一电容CS的第一端连接电源电压VDD,所述第一电容CS的第二端连接所述驱动单元的第二输入端;The first capacitor CS (not shown in FIG. 5 ), the first terminal of the first capacitor CS is connected to the power supply voltage VDD, and the second terminal of the first capacitor CS is connected to the second input terminal of the driving unit ;

第二电容C1,所述第二电容C1的第一端连接电源电压VDD,所述第二电容C1的第二端连接所述驱动单元的输出端;A second capacitor C1, the first terminal of the second capacitor C1 is connected to the power supply voltage VDD, and the second terminal of the second capacitor C1 is connected to the output terminal of the driving unit;

第三电容C2,所述第三电容C2的第一端连接所述驱动单元的第二输入端,所述第三电容C2的第二端连接所述驱动单元的输出端。The third capacitor C2, the first terminal of the third capacitor C2 is connected to the second input terminal of the driving unit, and the second terminal of the third capacitor C2 is connected to the output terminal of the driving unit.

在上述实施例中,TFT SW1、SW2组成开关单元,可以由非晶硅TFT组成;TFT DR1、DR2为驱动单元,由低温多晶硅TFT组成。In the above embodiment, the TFTs SW1 and SW2 form the switching unit, which may be composed of amorphous silicon TFTs; the TFTs DR1 and DR2 are the driving units, which are composed of low-temperature polysilicon TFTs.

其中,本发明所述的多晶硅晶体管由金属诱导侧向结晶MILC工艺形成。Wherein, the polysilicon transistor described in the present invention is formed by a metal-induced lateral crystallization MILC process.

上面各个实施例中,晶体管的控制极对应为TFT的栅极,第一电流导通极和第二电流导通极是可以互易的,即,第一电流导通极可以是源极也可以是漏极,对应地,第二电流导通极可以是漏极也可以是源极。In each of the above embodiments, the control electrode of the transistor corresponds to the gate of the TFT, and the first current conduction electrode and the second current conduction electrode are reciprocal, that is, the first current conduction electrode can be the source or is the drain, and correspondingly, the second current conduction electrode may be the drain or the source.

本发明提出一种有机电致发光显示装置的像素电路,利用MILC技术可以制备具有高一致性的TFT晶体管,并通过像素设计有效地降低TFT晶体管的泄漏电流,从而提高OLED显示装置的图像灰度级以及画面的显示质量。本发明在保持MILC低温多晶硅TFT高均匀性以及低成本优点的基础上,通过控制晶化区域的技术手段,达到降低开关晶体管泄漏电流的技术效果,从而解决了利用MILC技术制备的AMOLED背板无法实现高灰度显示的技术问题。本发明的像素电路可以利用金属侧向诱导晶化(MILC)技术制备。通过控制晶化区域的技术手段,达到降低开关晶体管泄漏电流的技术效果,从而解决了利用MILC技术制备的AMOLED背板无法实现高灰度显示的技术问题。The present invention proposes a pixel circuit of an organic electroluminescent display device, using MILC technology to prepare a TFT transistor with high consistency, and effectively reducing the leakage current of the TFT transistor through pixel design, thereby improving the image grayscale of the OLED display device level and display quality of the screen. On the basis of maintaining the advantages of high uniformity and low cost of MILC low-temperature polysilicon TFT, the present invention achieves the technical effect of reducing the leakage current of switching transistors by controlling the technical means of the crystallization area, thereby solving the problem that the AMOLED backplane prepared by MILC technology cannot Technical problems in realizing high gray scale display. The pixel circuit of the present invention can be prepared by using metal lateral induced crystallization (MILC) technology. Through the technical means of controlling the crystallization area, the technical effect of reducing the leakage current of the switching transistor is achieved, thereby solving the technical problem that the AMOLED backplane prepared by MILC technology cannot realize high grayscale display.

可以利用MILC技术制备本发明述的像素电路,下面结合如图6至图13所示的单元像素电路版图,以及图14所示的电路截面图,对本发明所述的像素电路的制备方法进行介绍。The pixel circuit described in the present invention can be prepared by using MILC technology. The method for preparing the pixel circuit described in the present invention will be introduced below in conjunction with the layout of the unit pixel circuit shown in FIGS. 6 to 13 and the circuit cross-sectional view shown in FIG. 14 .

图6至图13为如图2所示的像素电路在工艺流程中的俯视图。制造工艺包括以下步骤:6 to 13 are top views of the pixel circuit shown in FIG. 2 in the process flow. The manufacturing process includes the following steps:

首先,如图6所示,在玻璃基板上生长缓冲层1;生长有源层(非晶硅(a-Si)薄膜);刻蚀有源层,形成由非晶硅薄膜构成的有源沟道区2-1。First, as shown in Figure 6, a buffer layer 1 is grown on a glass substrate; an active layer (a-Si thin film) is grown; the active layer is etched to form an active trench made of an amorphous silicon thin film Road District 2-1.

然后,如图7所示,光刻并沉积诱导先驱金属层3,在本实施中,优选Ni作为先驱金属;MILC技术形成的诱导先驱金属层3可以是Ni、Cu等金属,利用金属诱导降低晶化温度。Then, as shown in Figure 7, photolithography and deposition of the induced precursor metal layer 3, in this implementation, Ni is preferred as the precursor metal; the induced precursor metal layer 3 formed by MILC technology can be metals such as Ni, Cu, etc. crystallization temperature.

然后,如图8所示,利用MILC技术实现对有源区的结晶化,形成由低温多晶硅构成的有源沟道区2-2;生长栅绝缘层;沉积第一金属层;刻蚀第一金属层与栅绝缘层,形成晶体管T1的栅极绝缘层、晶体管T2的栅极绝缘层、晶体管T1的栅电极5-1、晶体管T2的栅电极5-2、存储电容Cs的第一电极5-3,扫描信号线VSEL5-4;Then, as shown in FIG. 8, the active region is crystallized using MILC technology to form an active channel region 2-2 made of low-temperature polysilicon; grow a gate insulating layer; deposit the first metal layer; etch the first The metal layer and the gate insulating layer form the gate insulating layer of the transistor T1, the gate insulating layer of the transistor T2, the gate electrode 5-1 of the transistor T1, the gate electrode 5-2 of the transistor T2, and the first electrode 5 of the storage capacitor Cs -3, scanning signal line VSEL5-4;

然后,如图9所示,源漏区离子注入,形成晶体管源漏区,晶体管源漏区包括:晶体管T1的源漏区和晶体管T2的源漏区;其中,晶体管T1的源漏区包括晶体管T1的源区6-11和晶体管T1的漏区6-12;晶体管T2的源漏区包括晶体管T2的源区6-21和晶体管T2的漏区6-22;退火以激活注入离子;沉积介质层;刻蚀形成接触孔8;Then, as shown in FIG. 9 , the source and drain regions are ion-implanted to form the transistor source and drain regions, and the transistor source and drain regions include: the source and drain regions of the transistor T1 and the source and drain regions of the transistor T2; wherein, the source and drain regions of the transistor T1 include transistors Source region 6-11 of T1 and drain region 6-12 of transistor T1; source-drain region of transistor T2 includes source region 6-21 of transistor T2 and drain region 6-22 of transistor T2; annealing to activate implanted ions; deposition of dielectric layer; etching to form a contact hole 8;

然后,如图10所示,沉积第二金属层;刻蚀源漏金属,形成T1晶体管的源漏电极、晶体管T2的源漏电极、存储电容CS的第二电极9-3、数据信号线Vdata 9-4、电源信号线VDD 9-5;T1晶体管的源漏电极包括:晶体管T1的源极电极9-11、晶体管T1的漏极电极9-12;晶体管T2的源漏电极2包括:晶体管T2的源极电极9-21,晶体管T2的漏极电极9-22;Then, as shown in FIG. 10, deposit a second metal layer; etch the source and drain metal to form the source and drain electrodes of the T1 transistor, the source and drain electrodes of the transistor T2, the second electrode 9-3 of the storage capacitor CS , and the data signal line Vdata 9-4, power signal line VDD 9-5; the source and drain electrodes of the T1 transistor include: the source electrode 9-11 of the transistor T1, the drain electrode 9-12 of the transistor T1; the source and drain electrodes 2 of the transistor T2 include: The source electrode 9-21 of the transistor T2, the drain electrode 9-22 of the transistor T2;

然后,如图11所示,生长平坦化层,刻蚀行程过孔11;Then, as shown in FIG. 11 , grow a planarization layer, and etch a stroke via hole 11;

然后,如图12所示,沉积透明导电电极ITO层,刻蚀ITO,形成ITO区12;Then, as shown in FIG. 12 , a transparent conductive electrode ITO layer is deposited, and the ITO is etched to form an ITO region 12;

然后,如图13所示,蒸镀OLED层13。Then, as shown in FIG. 13 , an OLED layer 13 is vapor-deposited.

完成的像素电路的截面图如图14所示。A cross-sectional view of the completed pixel circuit is shown in FIG. 14 .

图14中,缓冲层1可以为二氧化硅SiO2、氮化硅SiNX,或者由两者交叠构成的双层结构。In FIG. 14, the buffer layer 1 can be silicon dioxide SiO2, silicon nitride SiNX, or a double-layer structure formed by overlapping the two.

晶体管的有源层包括:由非晶硅(a-Si)构成的晶体管有源沟道区2-1和通过MILC晶化技术形成的低温多晶硅(LTPS)构成的晶体管有源沟道区2-2。The active layer of the transistor includes: a transistor active channel region 2-1 made of amorphous silicon (a-Si) and a transistor active channel region 2-1 made of low-temperature polysilicon (LTPS) formed by MILC crystallization technology 2.

栅绝缘层可以为二氧化硅SiO2、氮化硅SiNX,或者由两者交叠构成的双层结构。栅绝缘层包括:T1晶体管的栅极绝缘层、T2晶体管的栅极绝缘层、第一金属层。The gate insulating layer can be silicon dioxide SiO2, silicon nitride SiNX, or a double-layer structure formed by overlapping the two. The gate insulating layer includes: a gate insulating layer of the T1 transistor, a gate insulating layer of the T2 transistor, and a first metal layer.

第一金属层用于形成栅极电极与VSEL图形以及存储电容Cs的第一电极,可以是Mo等其他金属或合金材料。第一金属层包括:晶体管T1的栅电极5-1、晶体管T2的栅电极5-2、存储电容Cs的第一电极5-3、扫描信号线VSEL5-4。The first metal layer is used to form the gate electrode, the VSEL pattern and the first electrode of the storage capacitor Cs, and may be other metal or alloy materials such as Mo. The first metal layer includes: a gate electrode 5-1 of the transistor T1, a gate electrode 5-2 of the transistor T2, a first electrode 5-3 of the storage capacitor Cs, and a scanning signal line VSEL5-4.

晶体管的源区与漏区(通过离子注入形成的重参杂晶体管源漏区)包括晶体管T1的源漏区、晶体管T2的源漏区、介质层7、源漏接触孔8、第二金属层。The source and drain regions of the transistor (heavily doped transistor source and drain regions formed by ion implantation) include the source and drain regions of the transistor T1, the source and drain regions of the transistor T2, the dielectric layer 7, the source and drain contact holes 8, and the second metal layer .

晶体管T1的源漏区包括晶体管T1的源区6-11、晶体管T1的漏区6-12。The source and drain regions of the transistor T1 include a source region 6-11 of the transistor T1 and a drain region 6-12 of the transistor T1.

晶体管T2的源漏区包括晶体管T2的源区6-21、晶体管T2的漏区6-22。The source and drain regions of the transistor T2 include a source region 6-21 of the transistor T2 and a drain region 6-22 of the transistor T2.

介质层7可以为二氧化硅SiO2、氮化硅SiNX,或者由两者交叠构成的双层结构。The dielectric layer 7 can be silicon dioxide SiO2, silicon nitride SiNX, or a double-layer structure formed by overlapping the two.

源漏接触孔8通过在指定区域刻蚀绝缘层,实现上下两层金属的连接。The source-drain contact hole 8 realizes the connection of the upper and lower metal layers by etching the insulating layer in a designated area.

第二金属层用于形成源漏电极与Vdata、VDD图形以及存储电容Cs的第二电极,可以是Mo等其他金属或合金材料。The second metal layer is used to form the source-drain electrodes, Vdata, VDD patterns, and the second electrode of the storage capacitor Cs, and may be other metals or alloy materials such as Mo.

第二金属层包括T1晶体管的源漏电极、晶体管T2的源漏电极9-2、存储电容CS的第二电极9-3、数据信号线Vdata 9-4、电源信号线VDD9-5、平坦化层10、平坦化层过孔11、透明导电电极ITO层12、有机发光层13。The second metal layer includes the source-drain electrodes of the T1 transistor, the source-drain electrodes 9-2 of the transistor T2, the second electrode 9-3 of the storage capacitor CS, the data signal line Vdata 9-4, the power signal line VDD9-5, and planarization Layer 10, planarization layer via hole 11, transparent conductive electrode ITO layer 12, organic light emitting layer 13.

T1晶体管的源漏电极包括:晶体管T1的源极电极9-11、晶体管T1的漏极电极9-12。The source and drain electrodes of the T1 transistor include: the source electrode 9-11 of the transistor T1, and the drain electrode 9-12 of the transistor T1.

晶体管T2的源漏电极包括晶体管T2的源极电极9-21、晶体管T2的漏极电极9-22。The source and drain electrodes of the transistor T2 include the source electrode 9-21 of the transistor T2 and the drain electrode 9-22 of the transistor T2.

平坦化层10可以为二氧化硅SiO2、氮化硅SiNX,或者由两者交叠构成的双层结构。The planarization layer 10 can be silicon dioxide SiO2, silicon nitride SiNX, or a double-layer structure formed by overlapping them.

平坦化层过孔11通过在指定区域刻蚀平坦化层以实现ITO层与第二金属层的连接。The planarization layer via hole 11 realizes the connection between the ITO layer and the second metal layer by etching the planarization layer in a designated area.

透明导电电极ITO层12为透明导电薄膜氧化铟锡(Indium-Tin Oxide,ITO)。The transparent conductive electrode ITO layer 12 is a transparent conductive thin film indium tin oxide (Indium-Tin Oxide, ITO).

有机发光层13为多层有机薄膜组成的有机发光二极管(Organic LightEmitting Diode,OLED)。The organic light emitting layer 13 is an organic light emitting diode (Organic Light Emitting Diode, OLED) composed of multilayer organic thin films.

本发明利用MILC技术实现区域晶化的技术手段,结合低温多晶硅TFT与非晶硅TFT各自的优点,利用MILC技术可以制备具有高一致性TFT晶体管,并通过像素设计有效地降低TFT晶体管的泄漏电流,从而提高OLED显示装置图像灰度级以及画面的显示质量。The present invention utilizes the technical means of MILC technology to realize regional crystallization, combines the respective advantages of low-temperature polysilicon TFT and amorphous silicon TFT, utilizes MILC technology to prepare TFT transistors with high consistency, and effectively reduces the leakage current of TFT transistors through pixel design , so as to improve the image gray level and the display quality of the picture of the OLED display device.

以上所述是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明所述原理的前提下,还可以作出若干改进,这些改进也应视为本发明的保护范围。The above description is a preferred embodiment of the present invention. It should be pointed out that for those of ordinary skill in the art, some improvements can be made without departing from the principle of the present invention, and these improvements should also be regarded as the present invention. protection scope of the invention.

Claims (7)

1.一种像素电路,其特征在于,包括:驱动单元、开关单元、储能单元以及有机发光二极管;1. A pixel circuit, comprising: a drive unit, a switch unit, an energy storage unit, and an organic light emitting diode; 所述驱动单元的第一输入端连接电源电压,所述驱动单元的第二输入端与所述开关单元的输出端连接,所述驱动单元的输出端连接所述有机发光二极管的第一端,用于输出驱动所述有机发光二极管发光的电流信号;所述驱动单元由多晶硅晶体管组成;The first input end of the drive unit is connected to the power supply voltage, the second input end of the drive unit is connected to the output end of the switch unit, the output end of the drive unit is connected to the first end of the organic light emitting diode, Used to output a current signal for driving the organic light emitting diode to emit light; the driving unit is composed of a polysilicon transistor; 所述开关单元的第一输入端输入行扫描信号,所述开关单元的第二输入端输入数据电压;The first input terminal of the switch unit inputs a row scan signal, and the second input terminal of the switch unit inputs a data voltage; 所述储能单元的两端与所述驱动单元连接,用于存储电压;及Both ends of the energy storage unit are connected to the drive unit for storing voltage; and 所述有机发光二极管的第二端接地;The second terminal of the organic light emitting diode is grounded; 所述驱动单元包括:多晶硅晶体管;The drive unit includes: a polysilicon transistor; 所述驱动单元的第一输入端为所述多晶硅晶体管的第一极,所述驱动单元的第二输入端为所述多晶硅晶体管的栅极,所述驱动单元的输出端为所述多晶硅晶体管的第二极;The first input end of the driving unit is the first pole of the polysilicon transistor, the second input end of the driving unit is the gate of the polysilicon transistor, and the output end of the driving unit is the gate of the polysilicon transistor. second pole; 所述开关单元包括:第一非晶硅晶体管、第二非晶硅晶体管、第三非晶硅晶体管;The switch unit includes: a first amorphous silicon transistor, a second amorphous silicon transistor, and a third amorphous silicon transistor; 所述开关单元的第一输入端包括第一子输入端和第二子输入端;The first input terminal of the switch unit includes a first sub-input terminal and a second sub-input terminal; 所述开关单元的第一子输入端为所述第一非晶硅晶体管的栅极和所述第二非晶硅晶体管的栅极,分别连接第一行扫描信号;The first sub-input terminal of the switch unit is the gate of the first amorphous silicon transistor and the gate of the second amorphous silicon transistor, respectively connected to the first row scanning signal; 所述开关单元的第二子输入端为所述第三非晶硅晶体管的栅极,连接第二行扫描信号;The second sub-input terminal of the switch unit is the gate of the third amorphous silicon transistor, connected to the second row scanning signal; 所述开关单元的第二输入端分别为所述第一非晶硅晶体管的第一极和所述第三非晶硅晶体管的第一极;The second input terminals of the switch unit are respectively the first pole of the first amorphous silicon transistor and the first pole of the third amorphous silicon transistor; 所述开关单元的输出端为所述第一非晶硅晶体管的第二极;The output end of the switch unit is the second pole of the first amorphous silicon transistor; 所述第三非晶硅晶体管的第二极连接所述第二非晶硅晶体管的第一极,所述第二非晶硅晶体管的第二极连接所述驱动单元的输出端。The second pole of the third amorphous silicon transistor is connected to the first pole of the second amorphous silicon transistor, and the second pole of the second amorphous silicon transistor is connected to the output terminal of the driving unit. 2.根据权利要求1所述的像素电路,其特征在于,所述开关单元包括:非晶硅晶体管;2. The pixel circuit according to claim 1, wherein the switch unit comprises: an amorphous silicon transistor; 所述开关单元的第一输入端为所述非晶硅晶体管的栅极;所述开关单元的第二输入端为所述非晶硅晶体管的第一极,所述开关单元的输出端为所述非晶硅晶体管的第二极。The first input terminal of the switch unit is the gate of the amorphous silicon transistor; the second input terminal of the switch unit is the first pole of the amorphous silicon transistor, and the output terminal of the switch unit is the gate of the amorphous silicon transistor. The second pole of the amorphous silicon transistor. 3.根据权利要求2所述的像素电路,其特征在于,3. The pixel circuit according to claim 2, characterized in that, 所述多晶硅晶体管的第一极为漏极,所述多晶硅晶体管的第二极为源极;或者,所述多晶硅晶体管的第二极为漏极,所述多晶硅晶体管的第一极为源极;The first pole of the polysilicon transistor is the drain, and the second pole of the polysilicon transistor is the source; or, the second pole of the polysilicon transistor is the drain, and the first pole of the polysilicon transistor is the source; 所述非晶硅晶体管的第二极为漏极,所述非晶硅晶体管的第一极为源极;或者,所述非晶硅晶体管的第一极为漏极,所述非晶硅晶体管的第二极为源极。The second pole of the amorphous silicon transistor is the drain, and the first pole of the amorphous silicon transistor is the source; or, the first pole of the amorphous silicon transistor is the drain, and the second pole of the amorphous silicon transistor is Very source. 4.根据权利要求1所述的像素电路,其特征在于,4. The pixel circuit according to claim 1, characterized in that, 所述第一非晶硅晶体管的第一极为漏极,所述第一非晶硅晶体管的第二极为源极;或者,所述第一非晶硅晶体管的第二极为漏极,所述第一非晶硅晶体管的第一极为源极;The first pole of the first amorphous silicon transistor is the drain, and the second pole of the first amorphous silicon transistor is the source; or, the second pole of the first amorphous silicon transistor is the drain, and the second pole of the first amorphous silicon transistor is the drain. a first electrode of an amorphous silicon transistor; 所述第二非晶硅晶体管的第一极为漏极,所述第二非晶硅晶体管的第二极为源极;或者,所述第二非晶硅晶体管的第二极为漏极,所述第二非晶硅晶体管的第一极为源极;The first pole of the second amorphous silicon transistor is the drain, and the second pole of the second amorphous silicon transistor is the source; or, the second pole of the second amorphous silicon transistor is the drain, and the second pole of the second amorphous silicon transistor is the drain. The first pole of the two amorphous silicon transistors is the source; 所述第三非晶硅晶体管的第一极为漏极,所述第三非晶硅晶体管的第二极为源极;或者,所述第三非晶硅晶体管的第二极为漏极,所述第三非晶硅晶体管的第一极为源极。The first pole of the third amorphous silicon transistor is the drain, and the second pole of the third amorphous silicon transistor is the source; or, the second pole of the third amorphous silicon transistor is the drain, and the second pole of the third amorphous silicon transistor is the drain. The first pole of the three amorphous silicon transistors is the source. 5.根据权利要求1所述的像素电路,其特征在于,所述储能单元包括以下电容的一个或者多个的任意组合:5. The pixel circuit according to claim 1, wherein the energy storage unit comprises any combination of one or more of the following capacitors: 第一电容,所述第一电容的第一端连接电源电压,所述第一电容的第二端连接所述驱动单元的第二输入端;a first capacitor, the first end of the first capacitor is connected to a power supply voltage, and the second end of the first capacitor is connected to the second input end of the drive unit; 第二电容,所述第二电容的第一端连接电源电压,所述第二电容的第二端连接所述驱动单元的输出端;a second capacitor, the first end of the second capacitor is connected to a power supply voltage, and the second end of the second capacitor is connected to the output end of the drive unit; 第三电容,所述第三电容的第一端连接所述驱动单元的第二输入端,所述第三电容的第二端连接所述驱动单元的输出端。A third capacitor, the first terminal of the third capacitor is connected to the second input terminal of the driving unit, and the second terminal of the third capacitor is connected to the output terminal of the driving unit. 6.根据权利要求1所述的像素电路,其特征在于,所述储能单元包括以下电容的一个或者多个的任意组合:6. The pixel circuit according to claim 1, wherein the energy storage unit comprises any combination of one or more of the following capacitors: 第一电容,所述第一电容的第一端连接所述驱动单元的第二输入端;所述第一电容的第二端连接所述第三非晶硅晶体管的第二极;a first capacitor, the first end of the first capacitor is connected to the second input end of the drive unit; the second end of the first capacitor is connected to the second pole of the third amorphous silicon transistor; 第二电容,所述第二电容的第一端连接所述电源电压;所述第二电容的第二端连接所述第三非晶硅晶体管的第二极。A second capacitor, the first end of the second capacitor is connected to the power supply voltage; the second end of the second capacitor is connected to the second pole of the third amorphous silicon transistor. 7.根据权利要求1所述的像素电路,其特征在于,所述多晶硅晶体管由金属诱导侧向结晶MILC工艺形成。7. The pixel circuit according to claim 1, wherein the polysilicon transistor is formed by a metal-induced lateral crystallization (MILC) process.
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