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CN102693928A - Non-contact type suction cup - Google Patents

Non-contact type suction cup Download PDF

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Publication number
CN102693928A
CN102693928A CN2011101892407A CN201110189240A CN102693928A CN 102693928 A CN102693928 A CN 102693928A CN 2011101892407 A CN2011101892407 A CN 2011101892407A CN 201110189240 A CN201110189240 A CN 201110189240A CN 102693928 A CN102693928 A CN 102693928A
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Prior art keywords
air
seat
flow channel
suction cup
groove
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CN2011101892407A
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Chinese (zh)
Inventor
王瑞贤
许义胜
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Chroma ATE Inc
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Chroma ATE Inc
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Abstract

A non-contact type sucker comprises an air guide seat and an air disturbing seat; the air guide seat is provided with an adsorption surface, a gradually reducing groove and an air inlet flow channel, the adsorption surface is positioned below the air guide seat, the gradually reducing groove is arranged from the adsorption surface to the inside of the air guide seat in a mode of reducing the aperture gradually, and the air inlet flow channel is communicated with the gradually reducing groove; the air disturbing seat is covered in the reducing groove, an air chamber communicated with the air inlet flow passage is defined by the air disturbing seat and the reducing groove, and at least one air outlet gap is formed between at least one edge of the air disturbing seat and the reducing groove; when external air enters the air chamber from the air inlet flow channel, the external air is ejected from the air outlet gap along a wall surface of the tapered groove.

Description

非接触式吸盘Non-contact suction cup

技术领域 technical field

本发明涉及一种吸盘结构,尤其涉及一种非接触式吸盘。The invention relates to a sucker structure, in particular to a non-contact sucker.

背景技术 Background technique

由于半导体工艺与许多制造加工业在生产时都需要移动加工对象,因此如何吸附与运送加工对象已经成为一项重要课题,而在业界中,较为主流的方式是使用吸盘来吸附加工对象。Since semiconductor technology and many manufacturing industries need to move processing objects during production, how to absorb and transport processing objects has become an important issue. In the industry, the more mainstream method is to use suction cups to absorb processing objects.

在过去,最简易的吸盘是以吸气的方式来吸附加工对象,此一方式原理简单,然而在吸附过程中,吸盘会与加工对象直接接触,对于一些较为脆弱的加工对象如圆片与太阳能板,则容易造成所吸附的加工对象因弯折或碰撞而损坏。In the past, the simplest suction cup was used to absorb the processing object in the way of suction. The principle of this method is simple. However, during the adsorption process, the suction cup will directly contact the processing object. For some relatively fragile processing objects such as wafers and solar energy plate, it is easy to cause the adsorbed processing object to be damaged due to bending or collision.

为了改善接触型吸盘的缺点,现有技术开始发展出出气型的非接触式吸盘,如日本专利编号JP,2009-073646,A揭露一种非接触式吸盘,是由主盘体与喷气件结合而成,主盘体的上方是开设有进气通道,喷气件的周围是钻设有许多细孔,当喷气件自主盘体的下方与主盘体结合后即可使用,使用时是将气体自主盘体上方的进气通道灌入,气体则会由喷气件周围的细孔朝非接触式吸盘的下方外侧喷出,并藉以于非接触式吸盘下方中心处产生真空吸力以吸附加工对象。In order to improve the shortcomings of the contact sucker, the existing technology began to develop a non-contact sucker of the air outlet type, such as Japanese Patent No. JP, 2009-073646, A discloses a non-contact sucker, which is a combination of the main disc body and the air jet Formed, the upper part of the main disc body is provided with an air intake channel, and many fine holes are drilled around the air jet part. When the air jet part is combined with the main disc body under the main disc body, it can be used. The gas is poured into the air intake channel above the main disk body, and the gas will be ejected from the pores around the air jet towards the outside of the bottom of the non-contact suction cup, and thereby generate vacuum suction at the center of the bottom of the non-contact suction cup to absorb the processing object.

然而此一结构也存在多个缺点,首先是由主盘体上方进气会使非接触式吸盘的厚度大幅增加,因此在接口的选择上容易受限,周边的空间利用也受到限制,再者,喷气件由于需要钻孔,加工上的难度也较高,制造成本也就随之上升。However, this structure also has many disadvantages. Firstly, the air intake from above the main disc body will greatly increase the thickness of the non-contact suction cup, so the selection of the interface is easily limited, and the use of surrounding space is also limited. In addition, due to the need for drilling, the air-jet parts are more difficult to process, and the manufacturing cost will increase accordingly.

发明内容 Contents of the invention

本发明所欲解决的技术问题与目的:Technical problem and purpose that the present invention intends to solve:

缘此,本发明的主要目的在于提供一种非接触式吸盘,该非接触式吸盘是利用导气座与扰气座间产生的缝隙出气,因此制作时不需额外钻孔制作喷气出口。Therefore, the main purpose of the present invention is to provide a non-contact suction cup, which uses the gap formed between the air guiding seat and the air disturbing seat to discharge air, so no additional drilling is required to make the air jet outlet during manufacture.

本发明解决问题的技术手段:The technical means of the present invention to solve the problem:

一种非接触式吸盘包含一导气座与一扰气座;导气座具有一吸附面、一渐缩槽与一入气流道,吸附面位于该导气座的下方,渐缩槽自该吸附面朝该导气座内部呈孔径渐缩的方式开设,入气流道与该渐缩槽相连通;扰气座盖设于该渐缩槽内,与该渐缩槽定义出连通该入气流道的一气室,且该扰气座的至少一边缘与该渐缩槽存在至少一出气间隙;其中,当一外部气体自该入气流道进入该气室,该外部气体自该出气间隙沿该渐缩槽的一壁面喷出。A non-contact suction cup includes an air guide seat and an air disturbing seat; the air guide seat has an adsorption surface, a tapered groove and an air inlet flow channel, the adsorption surface is located below the air guide seat, and the tapered groove starts from the The adsorption surface is opened in a manner that the aperture is tapered toward the inside of the air guide seat, and the air inlet flow channel is connected with the tapered groove; There is an air chamber in the channel, and there is at least an air outlet gap between at least one edge of the air disturbing seat and the tapered groove; wherein, when an external air enters the air chamber from the air inlet channel, the external air passes through the air outlet gap along the One wall surface of the tapered groove is sprayed out.

于本发明的一较佳实施例中,该吸附面还具有至少一防撞垫,而较佳者该防撞垫为一海绵材质。In a preferred embodiment of the present invention, the adsorption surface further has at least one anti-collision pad, and preferably the anti-collision pad is made of a sponge material.

于本发明的一较佳实施例中,该扰气座利用至少一螺丝锁固于该导气座。In a preferred embodiment of the present invention, the air disturbing seat is locked to the air guiding seat by at least one screw.

于本发明的一较佳实施例中,其中该入气流道连通于该渐缩槽的径向处。In a preferred embodiment of the present invention, the inlet air passage communicates with the radial direction of the tapered groove.

于本发明的一较佳实施例中,其中该扰气座为一方形结构。In a preferred embodiment of the present invention, the air disturbing seat is a square structure.

于本发明的一较佳实施例中,其中该扰气座具有朝向该渐缩槽的一扰气面,该扰气面自该边缘朝内渐凹。In a preferred embodiment of the present invention, the air disturbing seat has an air disturbing surface facing the tapered groove, and the air disturbing surface is gradually concave inward from the edge.

本发明对照现有技术的功效:The present invention compares the effect of prior art:

相较于现有的非接触型吸盘,本发明的非接触式吸盘由于是利用导气座与扰气座结合时产生的缝隙出气,因此不需额外钻孔制作喷气出口,结构较为简单置作成本也较低,此外入气流道能够设置于渐缩槽的径向处,因此不会增加非接触式吸盘的厚度,能够实现薄型化的目标。Compared with the existing non-contact suction cup, the non-contact suction cup of the present invention utilizes the gap generated when the air-guiding seat and the air-disturbing seat are combined to discharge air, so no additional drilling is required to make the air-jet outlet, and the structure is relatively simple. The cost is also low, and the air inlet channel can be arranged in the radial direction of the tapered groove, so the thickness of the non-contact suction cup will not be increased, and the goal of thinning can be achieved.

以下结合附图和具体实施例对本发明进行详细描述,但不作为对本发明的限定。The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

附图说明 Description of drawings

图1为本发明第一实施例的非接触式吸盘倒立分解图;Fig. 1 is an inverted exploded view of the non-contact suction cup according to the first embodiment of the present invention;

图2为沿图1的A-A切线的剖视图;Fig. 2 is a sectional view along the A-A tangent line of Fig. 1;

图3为第一实施例的非接触式吸盘的出气示意图;Fig. 3 is a schematic diagram of the air outlet of the non-contact suction cup of the first embodiment;

图4为本发明第二实施例的非接触式吸盘倒立分解图;Fig. 4 is an inverted exploded view of the non-contact suction cup according to the second embodiment of the present invention;

图5为沿图4的B-B切线的剖视图;以及Figure 5 is a sectional view along the B-B tangent line of Figure 4; and

图6为第二实施例的非接触式吸盘的出气示意图。Fig. 6 is a schematic diagram of the air outlet of the non-contact suction cup of the second embodiment.

其中,附图标记Among them, reference signs

非接触式吸盘100Non-contact suction cup 100

导气座11Air seat 11

吸附面111Adsorption surface 111

渐缩槽112Tapered groove 112

入气流道113Inlet flow channel 113

扰气座12Spoiler seat 12

边缘121Edge 121

扰气面122Disturbance surface 122

螺丝13screw 13

气室H1Air chamber H1

出气间隙G1Air outlet gap G1

外部气体F1External gas F1

非接触式吸盘200Non-contact suction cup 200

导气座21Air seat 21

吸附面211Adsorption surface 211

渐缩槽212Tapered groove 212

入气流道213Inlet flow channel 213

扰气座22Air spoiler 22

边缘221Edge 221

螺丝23screw 23

防撞垫24Crash pad 24

气室H2Air chamber H2

出气间隙G2Air outlet gap G2

具体实施方式Detailed ways

本发明是关于一种吸盘,尤指一种非接触式的非接触式吸盘。以下兹列举一较佳实施例以说明本发明,然本领域技术人员均均知此仅为一举例,而并非用以限定发明本身。有关此较佳实施例的内容详述如下。The invention relates to a suction cup, especially a non-contact non-contact suction cup. A preferred embodiment is listed below to illustrate the present invention, but those skilled in the art know that this is only an example, not intended to limit the invention itself. The content of this preferred embodiment is described in detail as follows.

请参阅图1、图2与图3,图1为本发明第一实施例的非接触式吸盘倒立分解图,图2为沿图1的A-A切线的剖视图,图3为第一实施例的非接触式吸盘的出气示意图。非接触式吸盘100包含一导气座11与一扰气座12。Please refer to Fig. 1, Fig. 2 and Fig. 3, Fig. 1 is an inverted exploded view of the non-contact suction cup of the first embodiment of the present invention, Fig. 2 is a sectional view along the A-A tangent line of Fig. 1, Fig. 3 is a non-contact sucker of the first embodiment Schematic diagram of the air outlet of the contact suction cup. The non-contact suction cup 100 includes an air guiding seat 11 and an air disturbing seat 12 .

导气座11是具有一吸附面111、一渐缩槽112与一入气流道113,吸附面111是位于该导气座11的下方,渐缩槽112是自该吸附面111朝该导气座11内部呈孔径渐缩的方式开设,入气流道113是与该渐缩槽112相连通。The air guide seat 11 has an adsorption surface 111, a tapered groove 112 and an air inlet channel 113, the adsorption surface 111 is located below the air guide seat 11, and the tapered groove 112 is from the adsorption surface 111 toward the air guide The interior of the seat 11 is opened in a manner of tapered aperture, and the air inlet channel 113 communicates with the tapered groove 112 .

扰气座12是盖设于该渐缩槽112内,与该渐缩槽112定义出连通该入气流道113的一气室H1,且该扰气座12的至少一边缘121是与该渐缩槽112存在至少一出气间隙G1,而本实施例中则是以保留四个出气间隙G1来作为示意;其中,当一外部气体F1自该入气流道113进入该气室H1,该外部气体F1是自该出气间隙G1沿该渐缩槽112的一壁面喷出,并据以于该吸附面111的中央处产生真空吸力。The air disturbing seat 12 is covered in the tapered groove 112, and defines an air chamber H1 communicating with the inlet air passage 113 with the tapered groove 112, and at least one edge 121 of the air disturbing seat 12 is in line with the tapered There is at least one air outlet gap G1 in the groove 112, and in this embodiment, four air outlet gaps G1 are reserved for illustration; wherein, when an external air F1 enters the air chamber H1 from the inlet flow channel 113, the external air F1 The gas is ejected from the air outlet gap G1 along a wall surface of the tapered groove 112 , thereby generating vacuum suction at the center of the suction surface 111 .

而于本实施例中的较佳者,该扰气座12可以利用至少一螺丝13锁固于该导气座11,而入气流道113可以是连通于该渐缩槽112的径向处,当然,也可连结于渐缩槽112的底端,但于装设接口时,非接触式吸盘100的厚度即会随的增加。Preferably in this embodiment, the air disturbing seat 12 can be locked on the air guide seat 11 by at least one screw 13, and the air inlet channel 113 can be connected to the radial direction of the tapered groove 112, Of course, it can also be connected to the bottom end of the tapered groove 112 , but when the interface is installed, the thickness of the non-contact suction cup 100 will increase accordingly.

此外,该扰气座12是具有朝向该渐缩槽112的一扰气面122,该扰气面122可以是自该边缘121朝内渐凹,如此一来即可在外部气体F1喷出出气间隙G1前,对外部气体F1进行加速,并加强真空吸力的产生效率。In addition, the air disturbing seat 12 has an air disturbing surface 122 facing the tapered groove 112, and the air disturbing surface 122 may be concave inwardly from the edge 121, so that the air can be ejected in the external air F1. Before the gap G1, the external air F1 is accelerated, and the generation efficiency of vacuum suction is enhanced.

当然,虽然本发明的第一实施例中导气座11与扰气座12均为一方形结构,然而并非一定要制作成方形结构才能产生真空吸力,导气座11与扰气座12的形状也不需相同,其它形状也可顺利产生真空吸力,唯独要强调的是,扰气座12制作为方形结构时,能够使非接触式吸盘在相同的进气量下拥有较强的真空吸力。Of course, although the air guide seat 11 and the air disturbance seat 12 in the first embodiment of the present invention are all a square structure, they do not have to be made into a square structure to generate vacuum suction. The shapes of the air guide seat 11 and the air disturbance seat 12 It does not need to be the same, and other shapes can also generate vacuum suction smoothly. The only thing to emphasize is that when the air disturbance seat 12 is made into a square structure, it can make the non-contact suction cup have a stronger vacuum suction under the same air intake .

请参阅图4、图5与图6,图4为本发明第二实施例的非接触式吸盘倒立分解图,图5为沿图4的B-B切线的剖视图,图6为第二实施例的非接触式吸盘的出气示意图。非接触式吸盘200同样拥有导气座21与扰气座22,并同样可以以螺丝23将扰气座22盖合并固定于导气座21上,以形成气室H2,导气座21同样拥有吸附面211、渐缩槽212与入气流道213,并且于扰气座22结合时可与扰气座22的边缘221形成出气间隙G2,与第一实施例的主要差异仅在于本实施例中的导气座21与扰气座22均为圆形结构,使用时的动作原理均无相异。Please refer to Fig. 4, Fig. 5 and Fig. 6, Fig. 4 is an inverted exploded view of the non-contact suction cup of the second embodiment of the present invention, Fig. 5 is a sectional view along the B-B tangent line of Fig. 4, Fig. 6 is a non-contact sucker of the second embodiment Schematic diagram of the air outlet of the contact suction cup. The non-contact suction cup 200 also has an air guiding seat 21 and an air disturbing seat 22, and can also cover and fix the air disturbing seat 22 on the air guiding seat 21 with screws 23 to form an air chamber H2. The air guiding seat 21 also has The adsorption surface 211, the tapered groove 212 and the air inlet channel 213 can form an air outlet gap G2 with the edge 221 of the air disturbing seat 22 when the air disturbing seat 22 is combined. The main difference from the first embodiment is only in this embodiment The air guiding seat 21 and the disturbing air seat 22 are all circular structures, and there is no difference in the principle of action during use.

此外,为了避免非接触式吸盘200在吸附加工对象的过程中因其它不稳定因素造成加工对象与非接触式吸盘200产生碰撞,因此吸附面211还可以设置至少一防撞垫24,一般来说海绵材质的防撞垫24即可达到很好的效果。In addition, in order to prevent the non-contact suction cup 200 from colliding with the non-contact suction cup 200 due to other unstable factors during the process of absorbing the processing object, the suction surface 211 can also be provided with at least one anti-collision pad 24. Generally speaking, The anti-collision pad 24 of sponge material just can reach very good effect.

综合以上所述,相较于现有的非接触型非接触式吸盘,本发明的非接触式吸盘由于是利用导气座与扰气座结合时产生的出气缝隙出气,因此制作时不需额外钻孔制作喷气出口,结构较为简单,不仅组合容易,制作成本也较低,此外入气流道能够设置于渐缩槽的径向处,因此不会增加非接触式吸盘的厚度,能够实现薄型化的目标。Based on the above, compared with the existing non-contact non-contact suction cup, the non-contact suction cup of the present invention uses the air outlet gap generated when the air guiding seat and the air disturbing seat are combined, so no additional The air jet outlet is made by drilling, the structure is relatively simple, not only easy to assemble, but also the production cost is low. In addition, the air inlet channel can be set in the radial direction of the tapered groove, so the thickness of the non-contact suction cup will not be increased, and the thickness can be realized. The goal.

当然,本发明还可有其它多种实施例,在不背离本发明精神及其实质的情况下,熟悉本领域的技术人员当可根据本发明作出各种相应的改变和变形,但这些相应的改变和变形都应属于本发明所附的权利要求的保护范围。Certainly, the present invention also can have other multiple embodiments, without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and deformations according to the present invention, but these corresponding Changes and deformations should belong to the scope of protection of the appended claims of the present invention.

Claims (7)

1. a contactless sucker is characterized in that, comprises:
One air guiding base has: an adsorption plane, a convergent groove and are gone into flow channel, and this adsorption plane is positioned at the below of this air guiding base; This convergent groove is offered towards the mode that this air guiding base inside is the aperture convergent from this adsorption plane; This is gone into flow channel and is connected with this convergent groove; And
One disturbs the gas seat, is covered in this convergent groove, goes out to be communicated with the air chamber that this goes into flow channel with this convergent slot definition, and there are at least one gap of giving vent to anger in this at least one edge and this convergent groove of disturbing the gas seat;
Wherein, go into flow channel when an extraneous gas from this and get into this air chamber, this extraneous gas is from this wall ejection of gap along this convergent groove of giving vent to anger.
2. contactless sucker according to claim 1 is characterized in that this adsorption plane also has at least one bumper.
3. contactless sucker according to claim 2 is characterized in that, this bumper is a sponge material.
4. contactless sucker according to claim 1 is characterized in that, this is disturbed the gas seat and utilizes at least one screws in this air guiding base.
5. contactless sucker according to claim 1 is characterized in that, this is gone into flow channel and is communicated in radially locating of this convergent groove.
6. contactless sucker according to claim 1 is characterized in that, this disturbs the gas seat is a square structure.
7. contactless sucker according to claim 1 is characterized in that, this is disturbed the gas seat and has towards one of this convergent groove and disturb the gas face, and it is gradually recessed inwardly from this edge that this disturbs the gas face.
CN2011101892407A 2011-03-25 2011-06-30 Non-contact type suction cup Pending CN102693928A (en)

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TW100110310A TWI455241B (en) 2011-03-25 2011-03-25 Non-contact sucker

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CN108598034A (en) * 2018-05-22 2018-09-28 中国电子科技集团公司第二研究所 The contactless draw frame machine of large-sized silicon wafers

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TWI698950B (en) * 2018-01-04 2020-07-11 財團法人工業技術研究院 Non-contact type sucker

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Publication number Priority date Publication date Assignee Title
CN106080825A (en) * 2016-07-20 2016-11-09 浙江大学 A kind of square cyclone adsorbing device and climbing robot based on this device
CN108598034A (en) * 2018-05-22 2018-09-28 中国电子科技集团公司第二研究所 The contactless draw frame machine of large-sized silicon wafers

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Application publication date: 20120926