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CN102692394B - Two-dimensional imaging method and device based on thermal lens effect - Google Patents

Two-dimensional imaging method and device based on thermal lens effect Download PDF

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Publication number
CN102692394B
CN102692394B CN201210197605.5A CN201210197605A CN102692394B CN 102692394 B CN102692394 B CN 102692394B CN 201210197605 A CN201210197605 A CN 201210197605A CN 102692394 B CN102692394 B CN 102692394B
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light
pump
detection
beam group
photodetector
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CN102692394A (en
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吴周令
陈坚
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HEFEI ZHICHANG PHOTOELECTRIC TECHNOLOGY CO LTD
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HEFEI ZHICHANG PHOTOELECTRIC TECHNOLOGY CO LTD
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Abstract

The invention discloses a two-dimensional imaging method and device based on a thermal lens effect. The method comprises the following steps of: equally splitting pump light emitted from a pump light source into pump beam groups which have the equal light intensity and are distributed in an equal distance array, and irradiating the pump beam groups to an area to be tested on a tested sample so as to change the local refractive index of the area to be tested on the tested sample and generate a thermal lens effect; and splitting detection light emitted from a detection light source into detection beam groups which have the equal light intensity and are distributed in an equal distance array, enabling the detection beam groups to penetrate through the area to be tested which is irradiated by the pump beam groups on the tested sample, and introducing the detection beam groups into a photoelectric detector through a spatial filter to measure a two-dimensional thermal lens signal image. Compared with the traditional method for performing point-by-point scanning on the sample, the method has high imaging speed; in addition, because point-by-point scanning is not required to performed, the parts are prevented from moving in imaging detection, the stability of instruments is improved, the cost is reduced, the miniaturization is realized further, and the application field is widened.

Description

A kind of two-dimensional imaging method based on thermal lensing effect and device
Technical field
The present invention relates to and utilize thermal lensing effect to carry out detecting and imaging field, particularly a kind of two-dimentional multiple beam of diffraction light-dividing device light splitting that utilizes excites thermal lens formation method and device.
Background technology
When light beam (hereinafter referred to as pump light) is through material, material can cause local temperature to raise because absorbing luminous energy, thus causes the local indexes of refraction of material to change.Due to the change of refractive index, material can produce to the light propagated effects such as assembling or disperse wherein, is equivalent to increase newly lens, is thus referred to as thermal lensing effect.In this thermal lensing effect, the change of the Refractive Index of Material that photoinduction produces, its space distribution and being closely related with pump light parameter and material behavior over time, utilize thermal lensing effect can carry out determination and analysis to material behavior, this measuring method is a kind of highly sensitive, contactless measuring technique.
The method utilizing thermal lensing effect to carry out material behavior detection the most common utilizes a branch of relatively strong pump light through sample and excites thermal lensing effect wherein, the relatively weak detection light of another bundle also produces the region of thermal lensing effect in material simultaneously, detection light can have certain angle with pump light, also can be coaxial.When detection light thermal lens region light activated by pumping, its spatial characteristic will change, and produces newly-increased convergence or effect weakening.By detecting the outgoing detection convergence of light or the change of divergence characterization, the material behavior producing thermal lensing effect region just can be obtained.
Change because of the spatial characteristic of the detection light caused by thermal lensing effect usually can add a spatial filter by the appropriate location in outgoing detection light light path and detect, and spatial filter allows part detection luminous energy to enter photodetector.When pump light excites thermal lensing effect, thus cause detection light produce newly-increased convergence or disperse, the luminous energy entering into photodetector through spatial filter like this will change accordingly.The detection luminous energy change that the thermal lensing effect that profit detects in this way causes is general fainter, especially when sample is weak absorbing material.Therefore, generally need in practical application to utilize phaselock technique to detect.When needing the two dimensional image obtaining specimen material characteristic, be then by carrying out point by point scanning to obtain to sample.This two-dimensional scan formation method can obtain higher resolution, being limited to the diffraction limit of pump light/detection light, reaching sub-micrometer scale than being easier at far-field measurement condition lower aprons.
But this traditional two-dimensional scan formation method is greatly limited in actual applications.Main cause is that the speed of imaging is too slow.Be because measuring-signal is fainter on the one hand, good signal to noise ratio (S/N ratio) obtained, just need the phase-locked integration each measurement point being carried out to certain hour; On the other hand, carry out point by point scanning, often moving to next measurement point all needs cost certain movement and stand-by period, particularly the latter, and this is to make whole system can reach new balance to guarantee the accuracy measured from mechanical shock to local temperature.The very slow shortcoming of this image taking speed significantly limit the application of thermal lens imaging technique.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of two-dimensional imaging method based on thermal lensing effect and device, solves in thermal lens application and carries out needing point by point scanning formation method long problem consuming time in two-dimensional imaging process.
Technical scheme of the present invention is:
Based on a two-dimensional imaging method for thermal lensing effect, comprise the following steps:
(1), the pump light that pump light source sends is divided into pump beam group that is aplanatic, equally array distribution, pump beam group line focus imaging len is irradiated to the region to be measured on sample after assembling, the to be measured region of every a branch of pump light on sample of pump beam group causes the change of this areas diffract rate;
(2) the detection light, by probe source sent is divided into detecting light beam group that is aplanatic, equally array distribution, and detecting light beam group line focus imaging len to be irradiated on sample after assembling and through the light-struck region to be measured of pumping; And spatially overlap with every a branch of pump light of pump beam group in the equal correspondence of every a branch of detection light of regionally detecting sets of beams to be measured;
(3) the detecting light beam group, after sample enters photodetector again and records 2D signal image.
The pump beam group obtained after pump light diffraction light-dividing device in described step (1) is modulated after modulator again, and this pump beam group irradiates sample surface again after assembling; Described is photodetector array or a photodetector for detecting the photodetector of detection light.
Namely can there be two kinds of different detection methods to the detecting light beam group through spatial filter, specifically describe as follows:
Method one: the detecting light beam group from spatial filter outgoing is detected with same photodetector.Signal like this on single photodetector is the superposition of whole detecting light beam group signal, is the mixing of how each area information simultaneously tested on sample.Want to utilize sets of beams to realize two-dimensional imaging, the signal needing every light beam to produce is distinguishable on the detector.This can realize by carrying out the parallel and modulation that frequency is different to every a branch of pump light.In end of probe, utilize phase lock-in detecting and frequency-scan technique, the thermal lens signal (pixel) that just every a branch of pump light can be caused distinguishes, thus just can not obtain Two-Dimensional Heat lens signal image by Sample Scan.
Method two: correspondence detects from the detecting light beam array photodetector array of spatial filter outgoing, namely detects respectively every a branch of detection light.Every bit on signal counter sample like this on each photodetector, thus just can obtain Two-Dimensional Heat lenticular image without the need to carrying out scanning to sample.Can be identical to the modulating frequency of pump light in this case, also can be different.At detecting terminal, utilize parallel processing circuit to process, the thermal lens signal (pixel) that just every a branch of pump light can be caused distinguishes.
Described pump light source utilizing emitted light path is different with the radiative path of probe source, described pump beam group after the input of dichronic mirror one input end and described detecting light beam group after the input of another input end of dichronic mirror all after dichronic mirror output terminal exports, and successively irradiate in sample surperficial after same focal imaging lens are assembled.
Detecting light beam group in described step (3) after sample via detection light adjustment lens after again through spatial filter and optical filter, finally enter photodetector.
A kind of two-dimension imaging apparatus based on thermal lensing effect, include pump light source and probe source, be positioned at detection light spatial filter, detection light optical filter and photodetector that pump light source and probe source rear end are arranged in turn, between detection light spatial filter, be disposed with pump light diffraction light-dividing device, dichronic mirror and focal imaging lens from described pump light source; Detection optical diffraction light-dividing device, described dichronic mirror and focal imaging lens are disposed with between from described probe source to detection light spatial filter.
Be provided with array photomodulator between described pump light diffraction light-dividing device and dichronic mirror, described photodetector is photodetector array or a photodetector.
The first detection light adjustment lens are provided with between described detection optical diffraction light-dividing device and spectroscope; The second detection light adjustment lens are provided with between described focal imaging lens and described detection light spatial filter.
Detection light convergent lens is provided with between described detection light optical filter and photodetector.
Pump light adjustment lens are provided with between described pump light diffraction light-dividing device and array photomodulator.
The present invention improves a lot to sample point by point scanning method than traditional on image taking speed, in addition due to without the need to carrying out point by point scanning, concrete detection and Image-forming instrument design can be avoided using moving-member, are conducive to improving the stability of instrument, reduce costs, further miniaturization and broaden application field.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention.
Embodiment
See Fig. 1, a kind of two-dimension imaging apparatus based on thermal lensing effect, include pump light source 1, probe source 2, be positioned at pump light source 1, probe source 2, be arranged at the dichronic mirror 3 of pump light source 1 and probe source 2 rear end, be arranged at the pump light diffraction light-dividing device 4 between pump light source 1 to dichronic mirror 3 one input end in turn, pump light adjustment lens 5 and array photomodulator 6, be arranged at the detection optical diffraction light-dividing device 7 between another input end of probe source 2 to dichronic mirror 3 and the first detection light adjustment lens 8 in turn, be arranged at the focal imaging lens 9 after dichronic mirror 3 output terminal in turn, second detection light adjustment lens 10, detection light spatial filter 11, detection light optical filter 12, detection light convergent lens 13 and photodetector 14.Parasitic light is blocked in acting as of detection light optical filter 12, only has detection light to pass through in theory.
See Fig. 1, a kind of two-dimensional imaging method based on thermal lensing effect: comprise the following steps:
(1), sample 15 is positioned between focal imaging lens 9 and the second detection light adjustment lens 10;
(2) pump beam that, pump light source 1 sends is divided into pump beam group that is aplanatic, equally array distribution after pump light diffraction light-dividing device 4; Pump beam group is modulated successively after pump light adjustment lens 5, array photomodulator 6, and the modulating frequency of every light beam is different; Pump beam group after modulation after dichronic mirror 3 transmission and by focal imaging lens 9 after be irradiated on sample 15;
(3) detecting light beam, sent by probe source 9 is divided into detecting light beam group that is aplanatic, equally array distribution after detection optical diffraction light-dividing device 7, detecting light beam group is after the first detection light adjustment lens 8, reflected by dichronic mirror 3, and converged on sample 15 by focal imaging lens 9, and every a branch of detection light of detecting light beam group region to be measured on sample all spatially overlaps with every a branch of pump light of pump beam group;
(4), through the detecting light beam group of sample 15 again through the second detection light adjustment lens 10, detection light spatial filter 11 and detection light optical filter 12, assembled by detection light convergent lens 13 and enter photodetector 14 and record Two-Dimensional Heat lens signal image.Concrete image checking process is: the pump beam group after array photomodulator 6 modulation is irradiated to the region to be measured of sample 15, and every a branch of pump light causes the change of corresponding sample refractive index at sample 15 irradiation area; Due to the change of this refractive index, the propagation characteristic through the detecting light beam group in this region can change, and produces newly-increased convergence or effect weakening; The convergence newly-increased due to these or effect weakening, the energy entering the detection light of photodetector through detection light spatial filter can change accordingly; The change of this energy is relevant to the change of sample refractive index, just can be obtained the change of sample refractive index, thus obtain the material behavior of sample by the change of measuring detection luminous energy.When adopting single photodetector, the signal of acquisition is the superposition of whole detecting light beam group.Phase lock-in detecting technology is utilized to detect the output signal of photodetector.Now, using the AC signal identical with the modulating frequency of a certain modulated pump beam as the reference signal of phase lock-in detecting, only have this pump beam to induce the reflectivity variable signal produced can be measured by lock-in amplifier like this, the signal that the induction of other pump beam produces all is filtered.Change the frequency of reference signal successively, just can obtain the signal that corresponding pump beam induction produces.Again according to the signal that numbering and the correspondence of pump beam record, obtain the two dimensional image of spatial discrimination.
Also multiple analog to digital converter or the every a branch of detecting light beam of lock-in amplifier can be utilized to carry out parallel measurement in actual use, to save the time changing reference signal successively and carry out measuring, improve image taking speed further.
Also photodetector array can be adopted to detect Optical thermo lens signal.Every a branch of detection light enters a photodetector respectively.Every bit on signal counter sample like this on each photodetector, can be identical to the modulating frequency of pump light in this case, also can be different.At detecting terminal, utilize parallel processing circuit to process, the thermal lens signal (pixel) that just every a branch of pump light can be caused distinguishes.

Claims (9)

1. based on a two-dimensional imaging method for thermal lensing effect, it is characterized in that: comprise the following steps:
(1), the pump light that pump light source sends is divided into pump beam group that is aplanatic, equally array distribution, pump beam group line focus imaging len is irradiated to the region to be measured on sample after assembling, the to be measured region of every a branch of pump light on sample of pump beam group causes the change of this areas diffract rate;
(2) the detection light, by probe source sent is divided into detecting light beam group that is aplanatic, equally array distribution, and detecting light beam group line focus imaging len to be irradiated on sample after assembling and through the light-struck region to be measured of pumping; And spatially overlap with every a branch of pump light of pump beam group in the equal correspondence of every a branch of detection light of regionally detecting sets of beams to be measured;
(3) the detecting light beam group, after sample enters photodetector again and records 2D signal image.
2. a kind of two-dimensional imaging method based on thermal lensing effect according to claim 1, it is characterized in that: the pump beam group obtained after pump light diffraction light-dividing device in described step (1) is modulated after modulator again, this pump beam group irradiates sample surface again after assembling; Described is photodetector array or a photodetector for detecting the photodetector of detection light.
3. a kind of two-dimensional imaging method based on thermal lensing effect according to claim 1, it is characterized in that: described pump light source utilizing emitted light path is different with the radiative path of probe source, described pump beam group after the input of dichronic mirror one input end and described detecting light beam group after the input of another input end of dichronic mirror all after dichronic mirror output terminal exports, and successively irradiate in sample surperficial after same focal imaging lens are assembled.
4. a kind of two-dimensional imaging method based on thermal lensing effect according to claim 1, it is characterized in that: the detecting light beam group in described step (3) after sample via detection light adjustment lens after again through spatial filter and optical filter, finally enter photodetector.
5. the two-dimension imaging apparatus based on thermal lensing effect, include pump light source and probe source, be positioned at detection light spatial filter, detection light optical filter and photodetector that pump light source and probe source rear end are arranged in turn, it is characterized in that: between detection light spatial filter, be disposed with pump light diffraction light-dividing device, dichronic mirror and focal imaging lens from described pump light source; Detection optical diffraction light-dividing device, described dichronic mirror and focal imaging lens are disposed with between from described probe source to detection light spatial filter.
6. a kind of two-dimension imaging apparatus based on thermal lensing effect according to claim 5, it is characterized in that: be provided with array photomodulator between described pump light diffraction light-dividing device and dichronic mirror, described photodetector is photodetector array or a photodetector.
7. a kind of two-dimension imaging apparatus based on thermal lensing effect according to claim 5, is characterized in that: be provided with the first detection light adjustment lens between described detection optical diffraction light-dividing device and spectroscope; The second detection light adjustment lens are provided with between described focal imaging lens and described detection light spatial filter.
8. a kind of two-dimension imaging apparatus based on thermal lensing effect according to claim 5, is characterized in that: be provided with detection light convergent lens between described detection light optical filter and photodetector.
9. a kind of two-dimension imaging apparatus based on thermal lensing effect according to claim 6, is characterized in that: be provided with pump light adjustment lens between described pump light diffraction light-dividing device and array photomodulator.
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