CN102671730A - Polymeric microfluidic chip integrating nickel column microarrays and preparation method thereof - Google Patents
Polymeric microfluidic chip integrating nickel column microarrays and preparation method thereof Download PDFInfo
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- CN102671730A CN102671730A CN2012101590581A CN201210159058A CN102671730A CN 102671730 A CN102671730 A CN 102671730A CN 2012101590581 A CN2012101590581 A CN 2012101590581A CN 201210159058 A CN201210159058 A CN 201210159058A CN 102671730 A CN102671730 A CN 102671730A
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 131
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 66
- 238000002493 microarray Methods 0.000 title claims abstract description 62
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 76
- 239000011521 glass Substances 0.000 claims abstract description 46
- 238000000034 method Methods 0.000 claims abstract description 32
- 229920000642 polymer Polymers 0.000 claims abstract description 17
- 238000005530 etching Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 6
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 4
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 238000001020 plasma etching Methods 0.000 claims description 3
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 claims 2
- -1 polydimethylsiloxane Polymers 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 239000006249 magnetic particle Substances 0.000 abstract description 22
- 238000011160 research Methods 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract description 3
- 238000009776 industrial production Methods 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 7
- 229920005573 silicon-containing polymer Polymers 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000008367 deionised water Substances 0.000 description 5
- 229910021641 deionized water Inorganic materials 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 210000004027 cell Anatomy 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229920001486 SU-8 photoresist Polymers 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000012940 design transfer Methods 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 208000005443 Circulating Neoplastic Cells Diseases 0.000 description 1
- PQMOXTJVIYEOQL-UHFFFAOYSA-N Cumarin Natural products CC(C)=CCC1=C(O)C(C(=O)C(C)CC)=C(O)C2=C1OC(=O)C=C2CCC PQMOXTJVIYEOQL-UHFFFAOYSA-N 0.000 description 1
- FSOGIJPGPZWNGO-UHFFFAOYSA-N Meomammein Natural products CCC(C)C(=O)C1=C(O)C(CC=C(C)C)=C(O)C2=C1OC(=O)C=C2CCC FSOGIJPGPZWNGO-UHFFFAOYSA-N 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- 241000080590 Niso Species 0.000 description 1
- RCEAADKTGXTDOA-UHFFFAOYSA-N OS(O)(=O)=O.CCCCCCCCCCCC[Na] Chemical compound OS(O)(=O)=O.CCCCCCCCCCCC[Na] RCEAADKTGXTDOA-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- RRIWRJBSCGCBID-UHFFFAOYSA-L nickel sulfate hexahydrate Chemical compound O.O.O.O.O.O.[Ni+2].[O-]S([O-])(=O)=O RRIWRJBSCGCBID-UHFFFAOYSA-L 0.000 description 1
- 229940116202 nickel sulfate hexahydrate Drugs 0.000 description 1
- SPIFDSWFDKNERT-UHFFFAOYSA-N nickel;hydrate Chemical compound O.[Ni] SPIFDSWFDKNERT-UHFFFAOYSA-N 0.000 description 1
- 210000003924 normoblast Anatomy 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920001184 polypeptide Polymers 0.000 description 1
- 102000004196 processed proteins & peptides Human genes 0.000 description 1
- 108090000765 processed proteins & peptides Proteins 0.000 description 1
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- 102000004169 proteins and genes Human genes 0.000 description 1
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- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
本发明公开了一种集成镍柱微阵列的聚合物微流控芯片及其制备方法，本发明的聚合物微流控芯片包括玻璃基片、玻璃芯片上的电极、电极上的镍柱微阵列和具有微通道的芯片基片，芯片基片固定于玻璃基片上，且电极和镍柱微阵列位于芯片基片的微通道中。本发明方法包括步骤：在玻璃基片上制备电极，并在电极上制备镍柱微阵列；制备具有微通道的聚合物微流控芯片基片；将得玻璃基片和芯片基片键合。本发明微流控芯片能够对磁性颗粒实现可控的分离与释放，具有较高的分离效率，且易释放，在细胞研究领域具有很大的应用前景。本发明方法实现了镍柱微阵列在微流控芯片中的集成，过程简单，成本低，适于工业化生产。
The invention discloses a polymer microfluidic chip integrated with a nickel column microarray and a preparation method thereof. The polymer microfluidic chip of the invention comprises a glass substrate, electrodes on the glass chip, and nickel column microarrays on the electrodes. and a chip substrate with a microchannel, the chip substrate is fixed on the glass substrate, and the electrode and the nickel column microarray are located in the microchannel of the chip substrate. The method of the invention comprises the steps of: preparing electrodes on a glass substrate, and preparing a nickel column microarray on the electrodes; preparing a polymer microfluidic chip substrate with microchannels; and bonding the obtained glass substrate and the chip substrate. The microfluidic chip of the present invention can realize controllable separation and release of magnetic particles, has high separation efficiency and is easy to release, and has great application prospects in the field of cell research. The method of the invention realizes the integration of the nickel column microarray in the microfluidic chip, has simple process and low cost, and is suitable for industrial production.
Description
Technical field
The invention belongs to the micro-total analysis system field, polymeric micro-fluidic chip of particularly a kind of integrated nickel post microarray and preparation method thereof.
Background technology
The micro-fluidic chip technique functions comes from the nineties in 20th century, is applied to the analytical chemistry field at first, and it is architectural feature with the microchannel; With life science is main research object, through micro-electromechanical processing technology (MEMS), whole breadboard function is comprised that print preliminary treatment, reaction, separation, detection etc. are integrated on the chip of a micro-meter scale; Analysis speed is greatly improved, has the integrated level height, reagent consumption is few; Cost of manufacture is low, characteristics such as analysis efficiency height.Magnetic-particle since its intrinsic property and with the crosslinkable property of cell, controlling of magnetic-particle had very big application potential in cell research.
Control in the technology based on the magnetic-particle of micro-fluidic chip at present; Be employed in mainly that chip applies or remove the method for external magnetic field outward or the method for integrated electromagnet in chip; The former directly controls the magnetic-particle in the chip channel in chip exterior with permanent magnet; Though this method is simple,, be difficult under minute yardstick, accurately control along with the quick decay of magnetic field in passage; The latter is with micro-machined method less electromagnet of integrated volume outside chip channel; To realize under the minute yardstick to the controlling of magnetic-particle, though this method integrated level is high, the process complicacy; And the Joule heat that on electromagnet, produces is difficult to disperse, to such an extent as to burn out circuit.
Summary of the invention
The objective of the invention is to the problem that prior art exists provide that a kind of cost is low, the polymeric micro-fluidic chip of the integrated nickel post microarray that do not produce Joule heat and preparation method thereof.
For achieving the above object, the present invention adopts following technical scheme:
One, a kind of polymeric micro-fluidic chip of integrated nickel post microarray; This chip comprises: the electrode on glass substrate, the glass-chip, the nickel post microarray on the electrode and have the chip substrate of microchannel; Described chip substrate is fixed on the glass substrate, and described electrode and described nickel post microarray are arranged in the microchannel of described chip substrate.
Above-mentioned nickel post is cylindrical, and it highly is 10 μ m, and diameter is 30 μ m.
Above-mentioned electrode is a cr-au electrode, and thickness is 50-100nm.
Two, the preparation method of above-mentioned polymeric micro-fluidic chip comprises step:
1, on glass substrate, prepares electrode, and on electrode, prepare nickel post microarray;
2, preparation has the polymeric micro-fluidic chip substrate of microchannel, and described chip substrate adopts dimethyl silicone polymer (PDMS) to prepare;
3, step 1 gained glass substrate and step 3 gained chip substrate are carried out bonding, promptly obtain the polymeric micro-fluidic chip of integrated nickel post microarray.
The process that on glass substrate, prepares electrode in the step 1 is specially:
Adopt soft etching method that electrode pattern is transferred on the glass substrate, adopt vapour deposition method or magnetron sputtering method on the electrode pattern on the glass substrate, to prepare electrode then.
Above-mentioned electrode is a cr-au electrode, and its thickness is 50-100nm.
The process that on electrode, prepares nickel post microarray in the step 1 is specially:
Adopt soft etching method with the microarray design transfer to electrode, at the microarray pattern of the electrode metal plated nickel that powers on, promptly obtain nickel post microarray then.
Above-mentioned nickel post is cylindrical, and it highly is that 10 μ m, diameter are 30 μ m.
Adopt soft etching method or reactive ion etching legal system to be equipped with the formpiston template of polymer fluidic chip, liquid dimethyl silicone polymer is poured on the formpiston template, after the curing,, promptly obtain having the chip substrate of microchannel through the demoulding.
Above-mentioned formpiston template is the silicon mold template.
When external magnetic field that the prepared micro-fluidic chip of this method is applied, the single nickel post that is integrated on the micro-fluidic chip produces strong induced magnetic field gradient around all, through regulating the size of external magnetic field, thus the size of indirect regulation induced magnetic field gradient.When having the induced magnetic field gradient around the nickel post; The magnetic-particle that flows through the nickel post can be adsorbed onto on the nickel post by the magnetic field force effect; When the induced magnetic field gradient disappeared, magnetic-particle can be washed away by flowing fluid again, thereby had realized magnetic-particle is realized controlled catch and discharging.The prepared micro-fluidic chip of this method can be widely used in controlling and screening of cell; For example; Can be through in the surface-crosslinked different biomolecule of magnetic-particle (protein, polypeptide etc.), the micro-fluidic chip that this method is prepared is used for that circulating tumor cell, erythroblast are isocellular catches and discharge.
Compared with prior art, the present invention has the following advantages and beneficial effect:
1, the inventive method has realized integrated in micro-fluidic chip of nickel post microarray, and process is simple, and cost is low, is suitable for suitability for industrialized production;
2, micro-fluidic chip of the present invention can be realized controlled catch and discharging to magnetic-particle, has higher capture rate, and is prone to discharge; And this chip in when work owing to there is not electric current to get into, therefore do not have Joule heat and produce.
Description of drawings
Fig. 1 is the whole vertical view of micro-fluidic chip of the present invention;
Fig. 2 is the vertical section sketch map of vapor deposition glass substrate that cr-au electrode is arranged;
The vertical section sketch map of the glass substrate of Fig. 3 is integrated nickel post microarray;
Fig. 4 is the vertical section sketch map of silicon mold template;
Fig. 5 has been down the vertical section sketch map of the formpiston template of dimethyl silicone polymer;
Fig. 6 is the A-A cutaway view among Fig. 1;
Fig. 7 is that nickel post microarray among Fig. 1 is at the design sketch of microscopically;
Fig. 8 is the effect figure that micro-fluidic chip of the present invention is caught magnetic-particle;
Fig. 9 is the effect figure that micro-fluidic chip of the present invention discharges magnetic-particle.
Among the figure: 1-glass substrate, 2-polymeric micro-fluidic chip substrate, 3-electrode, 4-nickel post microarray, 5-monocrystalline silicon piece, 6-SU8-2050 model photoresist, 7-injection port, 8-outlet.
The specific embodiment
Fig. 1 is the vertical view of the polymeric micro-fluidic chip of the integrated nickel post of the present invention microarray, and Fig. 6 is the A-A cutaway view among Fig. 1, as can be seen from the figure; Electrode 3 is on glass substrate 1; Nickel post microarray 4 is on electrode, and the design sketch at microscopically of nickel post microarray 4 is as shown in Figure 7, and polymeric micro-fluidic chip substrate 2 has microchannel 5; Electrode 3 is arranged in microchannel 5 with nickel post microarray 4, and injection port 7 is used for respectively feeding and the pass-out magnetic-particle with outlet 8.
Be further described below with reference to the accompanying drawing specific embodiments of the invention:
The preparation method of the polymeric micro-fluidic chip of a kind of integrated nickel post microarray that the present invention proposes comprises step:
1, on glass substrate, prepares electrode, and on electrode, prepare nickel post microarray
This step further comprises following substep:
1) adopt soft etching method that electrode pattern is transferred on the glass substrate; This substep is specially: on the washed glass substrate, coat the AZ-5214 photoresist; Cover the one side that scribbles photoresist at glass substrate to the mask that is printed on electrode pattern then, wherein, electrode pattern is the rectangle of long 5mm, wide 500 μ m; Place under the ultraviolet light exposure after 250 seconds glass substrate; The glass substrate that finishes exposure is put in the AZ photoresist developing liquid and was developed 40 seconds, take out rinse well and dry up with deionized water after, promptly obtain having the glass substrate of electrode pattern
2) adopt vapour deposition method on the electrode pattern of glass substrate, to prepare electrode; Prepared electrode is a cr-au electrode in this practical implementation; This substep is specially: the glass substrate that will have electrode pattern placed vacuum coating equipment vapor deposition chromium billon 3 hours; Dissolve the remaining photoresist of glass substrate surface with acetone soln then, promptly on glass substrate, obtain the cr-au electrode of long 5mm, wide 500 μ m, thick 50-100nm.Fig. 2 has the schematic cross section of the glass substrate of cr-au electrode for vapor deposition.
Above-mentionedly also can adopt magnetron sputtering method of the prior art to prepare electrode, not do at this and give unnecessary details.
3) adopt soft etching method that the microarray pattern is moved on on the cr-au electrode; This substep is specially: have the one side of electrode to coat the AZ-4620 photoresist on the glass substrate; Comprise also being coated with the last layer photoresist on the electrode, the mask that will be printed on the microarray pattern then covers the one side that scribbles photoresist at glass substrate, and makes microarray pattern and electrode alignment; Glass substrate is placed under the ultraviolet light exposure 380 seconds; The glass substrate that finishes exposure is put in the AZ photoresist developing liquid and was developed 4 minutes, take out rinse well and dry up with deionized water after, be about to the microarray design transfer to electrode.Microarray pattern in this practical implementation is a circle evenly distributed, diameter 30 μ m.
4) at the microarray pattern of the cr-au electrode metal plated nickel that powers on, promptly obtain nickel post microarray, this substep is specially: glass substrate and nickel sheet are placed electrolyte; The negative electrode of one direct current power supply is linked to each other with cr-au electrode; Anode connects the nickel sheet, and the setting electroplating current is 0.03A, after electroplating 3 minutes; Taking-up dissolves the remaining photoresist of glass substrate surface with acetone soln; After rinsing well and dry up with deionized water, promptly on the microarray pattern, prepare height 10 μ m, diameter 30 μ m, columned nickel post microarray, Fig. 7 is the design sketch of nickel post microarray at microscopically.At the electrolyte that this step adopted is with 300 gram nickel sulfate hexahydrate (NiSO
46H
2O), 35 grams, six water nickel chloride (NiCl6H
2O), 40 gram boric acid (H
3BO
3), 0.04 gram lauryl sodium sulfate (NaC
12H
25O
4S), 2 gram asccharin (C
7H
5NO
3S), 0.4 gram cumarin (C
9H
6O
2) add to dispose in 1 liter of deionized water and form.The schematic cross section of the glass substrate of Fig. 3 is integrated nickel post microarray.
2, preparation has the polymeric micro-fluidic chip substrate of microchannel, and the material of described preparation chip substrate is dimethyl silicone polymer (PDMS)
This step further comprises following substep:
1) adopt soft etching method to prepare the formpiston template of polymeric micro-fluidic chip; Formpiston template in this practical implementation is the silicon mold template, and this substep is specially: on clean monocrystalline silicon piece, coat SU-8 2050 model photoresists, the thickness of the photoresist of coating is 30～35 μ m; Cover the one side that scribbles photoresist at silicon chip to the mask that is printed on polymeric micro-fluidic chip substrate pattern then; And exposure 350 seconds under ultraviolet light, the silicon chip that finishes exposure is put in the SU-8 photoresist developing liquid and was developed 5 minutes, takes out after the back rinses well and dry up with deionized water; Obtain the silicon mold template of polymeric micro-fluidic chip, as shown in Figure 4.Polymeric micro-fluidic chip substrate pattern and electrode pattern are complementary, and the polymeric micro-fluidic chip substrate pattern in this practical implementation is a rectangle, but length and width are slightly larger than 5mm and 500 μ m respectively.
Above-mentionedly also can adopt reactive ion etching method of the prior art to prepare the formpiston template, not do at this and give unnecessary details.
2) utilize the preparation of formpiston template to have the polymeric micro-fluidic chip substrate of microchannel; This substep is specially: dimethyl silicone polymer and its curing agent are pressed (5 ~ 20): 1 mixed; After stirring, removing bubble, be poured on the silicon formpiston template; After solidifying 3 hours under 80 ℃, the dimethyl silicone polymer that solidifies is peeled off from silicon formpiston template, be polymeric micro-fluidic chip substrate with microchannel.The cross-sectional figure that has been down the formpiston template of dimethyl silicone polymer shown in Figure 5.
3, step 1 gained glass substrate and step 3 gained chip substrate are carried out bonding, promptly obtain the polymeric micro-fluidic chip of integrated nickel post microarray.
On chip substrate, punch with card punch; The hole of being beaten is the injection port 7 and outlet 8 among Fig. 1; Then with the surface 2 minute of oxygen plasma treatment chip substrate with the glass substrate that is integrated with nickel post microarray; Chip substrate and glass substrate are aimed at and bonding at microscopically, promptly obtained the polymeric micro-fluidic chip of integrated nickel post microarray.Structural representation such as Fig. 1 and shown in Figure 6 of the polymeric micro-fluidic chip of the integrated nickel post of gained microarray.
With the nanometer Fe 3 O 4 magnetic particle solution that obtains containing magnetic-particle soluble in water; The solution that will contain magnetic-particle continues to feed from the on-chip injection port 7 of polymeric micro-fluidic chip; The solution that then contains magnetic-particle is filled in around the nickel post microarray, under the effect of outside magnetic field, examines under a microscope nano magnetic particle and is adsorbed to nickel post surface; Realized the catching of magnetic-particle, as shown in Figure 8; After removing external magnetic field, be adsorbed on the liquid state that the nano magnetic particle on nickel post surface flow through and wash away, realized release magnetic-particle, as shown in Figure 9.
Claims (10)
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| CN106480039A (en) * | 2016-10-13 | 2017-03-08 | 南京大学 | A kind of method that utilization micro-fluidic chip screens aptamers |
| CN112121874A (en) * | 2020-09-27 | 2020-12-25 | 南京南智先进光电集成技术研究院有限公司 | Preparation method of micro-channel structure chip and micro-channel structure chip |
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| CN103908306A (en) * | 2014-04-17 | 2014-07-09 | 山东师范大学 | Circulating tumor cell in-vivo capturing device and circulating tumor cell in-vivo capturing method on basis of indwelling needles |
| CN105268491A (en) * | 2015-10-26 | 2016-01-27 | 中国工程物理研究院激光聚变研究中心 | Method for preparing micro-fluidic/milli-fluidic chip by using detachable template |
| CN106480039A (en) * | 2016-10-13 | 2017-03-08 | 南京大学 | A kind of method that utilization micro-fluidic chip screens aptamers |
| CN106480039B (en) * | 2016-10-13 | 2019-11-12 | 南京大学 | A method for screening aptamers using microarray microfluidic chip |
| CN112121874A (en) * | 2020-09-27 | 2020-12-25 | 南京南智先进光电集成技术研究院有限公司 | Preparation method of micro-channel structure chip and micro-channel structure chip |
| CN112121874B (en) * | 2020-09-27 | 2021-12-10 | 南京南智先进光电集成技术研究院有限公司 | Preparation method of micro-channel structure chip and micro-channel structure chip |
| CN112725417A (en) * | 2020-12-14 | 2021-04-30 | 苏州拉索生物芯片科技有限公司 | Chip electroplating device for improving micro-bead hole-entering rate and electroplating method thereof |
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Application publication date: 20120919 |