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CN102666890B - Cu-Co-Si-based alloy sheet, and process for production thereof - Google Patents

Cu-Co-Si-based alloy sheet, and process for production thereof Download PDF

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CN102666890B
CN102666890B CN201180003593.1A CN201180003593A CN102666890B CN 102666890 B CN102666890 B CN 102666890B CN 201180003593 A CN201180003593 A CN 201180003593A CN 102666890 B CN102666890 B CN 102666890B
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CN102666890A (en
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桑垣宽
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JX Nippon Mining and Metals Corp
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    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/06Alloys based on copper with nickel or cobalt as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/08Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
    • HELECTRICITY
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    • H01B1/026Alloys based on copper

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Abstract

本发明提供适宜用于各种电子部件、特别是镀覆的均一附着性优异的Cu-Co-Si系合金板。电子材料用铜合金板是含有Co:0.5~3.0质量%、Si:0.1~1.0质量%、剩余部分由Cu和不可避免的杂质构成的电子材料用铜合金板,板厚中心的平均结晶粒径为20μm以下,相对于轧制方向长度1mm,与表面相接且长径为45μm以上的晶粒为5个以下。The present invention provides a Cu-Co-Si-based alloy plate which is suitable for use in various electronic components, and in particular has excellent uniform adhesion for plating. The copper alloy sheet for electronic materials is a copper alloy sheet for electronic materials that contains Co: 0.5 to 3.0% by mass, Si: 0.1 to 1.0% by mass, and the remainder is composed of Cu and unavoidable impurities. The average crystal grain size at the center of the plate thickness 20 μm or less, and 5 or less crystal grains with a major axis of 45 μm or more in contact with the surface relative to a length of 1 mm in the rolling direction.

Description

Cu-Co-Si系合金板及其制造方法Cu-Co-Si alloy plate and its manufacturing method

技术领域 technical field

本发明涉及作为优选用于各种电子部件的析出硬化型铜合金的Cu-Co-Si系合金板,特别是涉及镀覆的均一附着性优异的Cu-Co-Si系合金板。 The present invention relates to a Cu—Co—Si based alloy sheet that is a precipitation hardening type copper alloy preferably used in various electronic components, and particularly relates to a Cu—Co—Si based alloy sheet excellent in uniform adhesion of plating.

背景技术 Background technique

对于连接器、开关、继电器、管脚、端子、引线框等各种电子部件中使用的电子材料用铜合金而言,作为基本特性要求兼具高强度和高导电性(或导热性)。近年来,随着电子部件的高集成化和小型化・薄化急速地发展,与其相对应,对电子机器部件中使用的铜合金的要求水平也越来越高。 Copper alloys for electronic materials used in various electronic components such as connectors, switches, relays, pins, terminals, and lead frames require both high strength and high electrical conductivity (or thermal conductivity) as basic characteristics. In recent years, high integration and miniaturization and thinning of electronic components have been rapidly advanced, and correspondingly, the level of demand for copper alloys used in electronic equipment components has also increased.

从高强度及高导电性的观点出发,作为电子材料用铜合金,代替以往的磷青铜、黄铜等所代表的固溶强化型铜合金,析出硬化型铜合金的使用量正在增加。在析出硬化型铜合金中,通过对经固溶处理的过饱和固溶体进行时效处理,微细的析出物均匀地分散,在合金强度增高的同时,铜中的固溶元素量减少、导电性提高。因而,可获得强度、弹性等机械性质优异且导电性、导热性良好的材料。 From the standpoint of high strength and high conductivity, precipitation-hardening copper alloys are increasingly used as copper alloys for electronic materials instead of solid-solution-strengthened copper alloys such as conventional phosphor bronze and brass. In the precipitation hardening copper alloy, by aging the solution-treated supersaturated solid solution, the fine precipitates are uniformly dispersed, and the strength of the alloy is increased while the amount of solid solution elements in the copper is reduced and the conductivity is improved. Therefore, a material having excellent mechanical properties such as strength and elasticity and good electrical and thermal conductivity can be obtained.

析出硬化型铜合金中,通常被称作科森合金的Ni-Si系铜合金是兼具较高导电性、强度及弯曲加工性的代表性铜合金,是在业界中目前正在活跃地进行开发的合金之一。该铜合金中,通过使微细的Ni-Si系金属间化合物粒子在铜基质中析出,可实现强度和导电率的提高。 Among precipitation-hardening copper alloys, Ni-Si-based copper alloys generally called Corson alloys are representative copper alloys with high electrical conductivity, strength, and bending workability, and are currently being actively developed in the industry. one of the alloys. In this copper alloy, the strength and electrical conductivity can be improved by precipitating fine Ni—Si-based intermetallic compound particles in the copper matrix.

以科森合金的特性的进一步提高为目的,进行了以下各种技术开发:Ni及Si以外的合金成分的添加、对特性造成不良影响的成分的排除、结晶组织的最优化、析出粒子的最优化等。例如,已知通过添加Co或者控制析出至母相中的第二相粒子,特性有所提高,作为Ni-Si-Co系铜合金的最近的改良技术,可以举出以下技术。 For the purpose of further improving the properties of Corson alloys, various technological developments have been carried out: addition of alloy components other than Ni and Si, exclusion of components that adversely affect properties, optimization of crystal structure, and optimization of precipitated particles. optimization etc. For example, it is known that the properties are improved by adding Co or controlling the second phase particles precipitated into the matrix, and the following technologies are mentioned as recent improvement technologies of Ni-Si-Co-based copper alloys.

在日本特表2005-532477号公报(专利文献1)中为了获得弯曲加工性、导电率、强度及抗应力松弛性优异的Ni-Si-Co系铜合金,对Ni、Si、Co量及其相互之间的关系进行控制,对20μm以下的平均结晶粒径也进行了记载。而且,其特征在于,在其制造工序中,第一时效退火温度高于第2时效退火温度(段落0045~0047)。 In Japanese National Publication No. 2005-532477 (Patent Document 1), in order to obtain a Ni-Si-Co-based copper alloy excellent in bending workability, electrical conductivity, strength and stress relaxation resistance, the amount of Ni, Si, Co and its The relationship between them is controlled, and the average crystal grain size of 20 μm or less is also described. Furthermore, it is characterized in that in the manufacturing process, the first aging annealing temperature is higher than the second aging annealing temperature (paragraphs 0045 to 0047).

日本特开2007-169765号公报(专利文献2)中,以提高Ni-Si-Co系铜合金的弯曲加工性为目的而控制第2相粒子的分布状态、抑制晶粒的粗大化。该专利文献中,对于在科森合金中添加了钴的铜合金,明确了具有抑制高温热处理时的晶粒粗大化的效果的析出物与其分布状态的关系,通过控制结晶粒径来提高强度、导电性、应力松弛特性、弯曲加工性(段落0016)。结晶粒径越小越优选,通过达到10μm以下来提高弯曲加工性(段落0021)。 In JP-A-2007-169765 (Patent Document 2), for the purpose of improving the bending workability of a Ni—Si—Co-based copper alloy, the distribution state of the second phase particles is controlled to suppress the coarsening of crystal grains. In this patent document, for a copper alloy in which cobalt is added to a Corson alloy, the relationship between precipitates having the effect of suppressing grain coarsening during high-temperature heat treatment and their distribution state is clarified, and the strength, strength, and Electrical conductivity, stress relaxation properties, bendability (paragraph 0016). The smaller the crystal grain size is, the more preferable it is, and bending workability is improved by being 10 μm or less (paragraph 0021).

日本特开2008-248333号公报(专利文献3)中公开了抑制Ni-Si-Co系铜合金中的粗大的第二相粒子产生的电子材料用铜合金。该专利文献中,通过在特定条件下进行热轧及固溶处理来抑制粗大的第二相粒子的产生时,可实现目标的优异特性(段落0012)。 Japanese Unexamined Patent Publication No. 2008-248333 (Patent Document 3) discloses a copper alloy for electronic materials that suppresses the generation of coarse second-phase particles in a Ni—Si—Co-based copper alloy. In this patent document, when the generation of coarse second-phase particles is suppressed by performing hot rolling and solution treatment under specific conditions, the desired excellent characteristics can be achieved (paragraph 0012).

现有技术文献 prior art literature

专利文献 patent documents

专利文献1:日本特表2005-532477号公报 Patent Document 1: Japanese PCT Publication No. 2005-532477

专利文献2:日本特开2007-169765号公报 Patent Document 2: Japanese Patent Laid-Open No. 2007-169765

专利文献3:日本特开2008-248333号公报。 Patent Document 3: Japanese Unexamined Patent Publication No. 2008-248333.

发明内容 Contents of the invention

发明要解决的技术问题 The technical problem to be solved by the invention

通常在连接器、开关、继电器、管脚、端子、引线框等各种电子部件中使用的电子材料用铜合金板上多实施有镀Au,但此时作为基底通常实施镀Ni。对于该Ni基底镀覆,其也随着近年来部件的轻量化・薄化而进一步变薄。 Copper alloy boards for electronic materials used in various electronic components such as connectors, switches, relays, pins, terminals, and lead frames are usually plated with Au, but in this case, Ni plating is usually applied as a base. This Ni-based plating is also further thinned along with weight reduction and thinning of parts in recent years.

因而,以前不为问题的镀Ni的状况不良、具体即镀Ni部分变得不均一的状况不良变得明显化。 Therefore, the poor condition of Ni plating, which was not a problem until now, specifically, the poor condition of the Ni-plating portion becoming non-uniform, becomes apparent.

上述专利文献1~3所记载的铜合金均对结晶粒径进行了记载,但完全没有意识到深度方向上的结晶粒径的不均、特别是形成于表面的粗大结晶与镀覆的附着性的关系。 The copper alloys described in the aforementioned Patent Documents 1 to 3 all describe the crystal grain size, but they are completely unaware of the unevenness of the crystal grain size in the depth direction, especially the adhesion between the coarse crystals formed on the surface and the plating. Relationship.

本发明的课题在于提供基底镀覆、特别是镀Ni可均一地附着的Cu-Co-Si系合金板。 An object of the present invention is to provide a Cu—Co—Si alloy plate to which base plating, particularly Ni plating, can be uniformly adhered.

用于解决技术问题的方法 Methods used to solve technical problems

本发明人为了解决上述技术问题反复进行了研究,结果发现在Cu-Ni-Si系合金板中通过将Ni置换成Co制成Cu-Co-Si系合金,可以追求进一步改善与基底镀覆的密合性。而且发现,该Cu-Co-Si系合金板的表层与内部(板厚中心)相比,结晶粒径易于局部地粗大化、表面存在粗大化结晶,因而即便整体的平均结晶粒径小、镀覆(均一附着)性也会降低。本发明具有下述构成。 In order to solve the above-mentioned technical problems, the inventors of the present invention have repeatedly conducted studies, and as a result, found that by substituting Ni for Co in a Cu-Ni-Si alloy plate to make a Cu-Co-Si alloy, it is possible to further improve the relationship with the substrate plating. tightness. Furthermore, it has been found that the surface layer of the Cu-Co-Si alloy sheet is more prone to locally coarsened crystal grains than the interior (thickness center), and coarsened crystals exist on the surface. Coverage (uniform adhesion) will also be reduced. The present invention has the following constitutions.

(1)一种电子材料用铜合金板,其为含有Co:0.5~3.0质量%、Si:0.1~1.0质量%、剩余部分由Cu及不可避免的杂质构成的电子材料用铜合金板,其特征在于,板厚中心的平均结晶粒径为20μm以下、相对于轧制方向长度1mm,与表面相接且长径为45μm以上的晶粒为5个以下。 (1) A copper alloy sheet for electronic materials, which is a copper alloy sheet for electronic materials containing Co: 0.5 to 3.0% by mass, Si: 0.1 to 1.0% by mass, and the remainder consisting of Cu and unavoidable impurities, wherein It is characterized in that the average crystal grain size at the thickness center is 20 μm or less, the length with respect to the rolling direction is 1 mm, and the number of crystal grains in contact with the surface with a major diameter of 45 μm or more is 5 or less.

(2)(1)所述的电子材料用铜合金板,其还含有最大0.5质量%的Cr。 (2) The copper alloy sheet for electronic materials as described in (1), which further contains a maximum of 0.5% by mass of Cr.

(3)(1)或(2)所述的电子材料用铜合金板,其还含有总计最大2.0质量%的选自Mg、P、As、Sb、Be、B、Mn、Sn、Ti、Zr、Al、Fe、Zn和Ag中的1种或2种以上。 (3) The copper alloy sheet for electronic materials described in (1) or (2), which further contains a total of up to 2.0% by mass of Mg, P, As, Sb, Be, B, Mn, Sn, Ti, Zr , Al, Fe, Zn and Ag in one or two or more.

(4)(1)~(3)任一项所述的电子材料用铜合金板的制造方法,其包括依次进行以下工序: (4) The method for producing a copper alloy sheet for electronic materials according to any one of (1) to (3), comprising sequentially performing the following steps:

将铸锭熔炼铸造的工序; The process of melting and casting ingots;

使材料温度为950℃以上且1050℃以下加热1小时以上后进行热轧,热轧结束温度为700℃以上的工序; The process of heating the material at a temperature of not less than 950°C and not more than 1050°C for more than 1 hour, then hot rolling, and ending the hot rolling at a temperature of not less than 700°C;

以最终道次为8%以上的加工度进行的固溶前的中间轧制工序; The intermediate rolling process before solid solution is carried out with the processing degree of the final pass being 8% or more;

使材料温度为850℃以上且1050℃以下加热0.5分钟~1小时的中间固溶工序; Intermediate solid solution process of heating the material at a temperature above 850°C and below 1050°C for 0.5 minutes to 1 hour;

在400℃以上且600℃以下进行加热的时效工序;和 Aging process with heating at 400°C or more and 600°C or less; and

加工度10~50%的最终轧制工序。 The final rolling process with a working degree of 10-50%.

附图说明 Description of drawings

[图1]为实施了镀Ni的本发明铜合金板(发明例1)的镀覆表面的显微镜照片(倍率:×200)。 [ Fig. 1 ] is a micrograph (magnification: × 200) of a plated surface of a copper alloy sheet of the present invention (invention example 1) subjected to Ni plating.

[图2]为实施了镀Ni的比较例铜合金板(比较例11)的镀覆表面的显微镜照片(倍率:×200)。 [ Fig. 2] Fig. 2 is a photomicrograph (magnification: × 200) of a plated surface of a comparative example copper alloy plate (Comparative Example 11) subjected to Ni plating.

[图3]为图2的镀覆表面的放大显微镜照片(倍率:×2500)。 [ Fig. 3 ] is an enlarged micrograph (magnification: × 2500) of the plated surface of Fig. 2 .

具体实施方式 Detailed ways

(1)Co及Si的添加量 (1) The amount of Co and Si added

所添加的Co及Si通过实施适当的热处理,在铜合金内形成金属间化合物,即便存在铜以外的添加元素也不会使导电率恶化,通过析出强化效果可实现高强度化。 The added Co and Si form an intermetallic compound in the copper alloy by performing appropriate heat treatment, and even if there are additive elements other than copper, the electrical conductivity is not deteriorated, and high strength can be achieved by the precipitation strengthening effect.

Co及Si的添加量分别为Co:小于0.5质量%、Si:小于0.1质量%时,无法获得所需强度。相反,当Co:超过3.0质量%、Si:超过1.0质量%时,虽然可实现高强度化但导电率明显降低、而且热加工性恶化。因而,Co及Si的添加量为Co:0.5~3.0质量%、Si:0.1~1.0质量%。Co及Si的添加量优选为Co:0.5~2.0质量%、Si:0.1~0.5质量%。 When the addition amounts of Co and Si are respectively Co: less than 0.5% by mass and Si: less than 0.1% by mass, desired strength cannot be obtained. Conversely, when Co: exceeds 3.0% by mass and Si: exceeds 1.0% by mass, although high strength can be achieved, electrical conductivity significantly decreases and hot workability deteriorates. Therefore, the addition amount of Co and Si is Co: 0.5-3.0 mass %, Si: 0.1-1.0 mass %. The amounts of Co and Si added are preferably Co: 0.5 to 2.0% by mass and Si: 0.1 to 0.5% by mass.

(2)Cr的添加量 (2) The amount of Cr added

Cr在熔炼铸造时的冷却过程中,由于在晶界优先析出,因而可强化晶界、热加工时不易产生裂痕、可以抑制制造时的合格率降低。即,在熔炼铸造时发生晶界析出的Cr通过固溶处理等发生再固溶,接着在时效析出时产生以Cr为主成分的bcc结构的析出粒子或与Si的化合物(硅化物)。在通常的Ni-Si系铜合金中添加的Si量中,不对时效析出起作用的Si以固溶于母相的状态残留,成为导电率下降的原因。因而,通过添加作为硅化物形成元素的Cr、使不对时效析出起作用的Si作为硅化物进一步析出,可以减少固溶Si量,在不损害强度的情况下防止导电率下降。但是,当Cr浓度超过0.5质量%时,由于易于形成粗大的第二相粒子,因而会损害产品特性。因此,本发明所涉及的Cu-Co-Si系合金中可添加最大0.5质量%的Cr 。但由于小于0.01质量%时其效果小,因而优选添加0.01~0.5质量%、更优选0.09~0.3质量%。 During the cooling process of smelting and casting, Cr is preferentially precipitated at the grain boundaries, so that the grain boundaries can be strengthened, cracks are less likely to occur during hot working, and the decrease in yield during manufacturing can be suppressed. That is, Cr that precipitated at the grain boundary during smelting and casting is re-dissolved by solution treatment or the like, and then precipitated particles with a bcc structure containing Cr as the main component or a compound (silicide) with Si are generated during aging precipitation. Among the amounts of Si added to ordinary Ni—Si-based copper alloys, Si that does not contribute to aging precipitation remains in a solid-solution state in the matrix phase, causing a decrease in electrical conductivity. Therefore, by adding Cr as a silicide-forming element and further precipitating Si that does not contribute to aging precipitation as silicide, the amount of solid-solution Si can be reduced, and a decrease in electrical conductivity can be prevented without impairing strength. However, when the Cr concentration exceeds 0.5% by mass, coarse second-phase particles tend to be formed, thereby deteriorating product characteristics. Therefore, a maximum of 0.5% by mass of Cr can be added to the Cu—Co—Si alloy according to the present invention. However, since the effect is small when it is less than 0.01% by mass, it is preferably added in an amount of 0.01 to 0.5% by mass, more preferably 0.09 to 0.3% by mass.

(3)第3元素的添加量 (3) Addition amount of the third element

a)Mg、Mn、Ag及P的添加量 a) Addition of Mg, Mn, Ag and P

Mg、Mn、Ag及P通过微量的添加,在不损害导电率的情况下,改善强度、应力松弛特性等产品特性。添加效果主要通过在母相中的固溶得以发挥,但通过含有在第二相粒子中,还可进一步发挥效果。但是,当Mg、Mn、Ag及P的总浓度超过2.0质量%时,不仅特性改善效果饱和,而且会损害制造性。因此,本发明所涉及的Cu-Co-Si系合金板中,优选添加总计最大2.0质量%的选自Mg、Mn、Ag及P中的1种或2种以上。但由于小于0.01质量%时其效果小,因而更优选添加总计0.01~2.0质量%、进一步优选添加总计0.02~0.5质量%、典型地添加总计0.04~0.2质量%。 Mg, Mn, Ag, and P are added in small amounts to improve product characteristics such as strength and stress relaxation characteristics without compromising electrical conductivity. The effect of addition is mainly exhibited by solid solution in the matrix phase, but further effects can be exhibited by being contained in the second phase particles. However, when the total concentration of Mg, Mn, Ag, and P exceeds 2.0% by mass, not only the property improvement effect is saturated, but also manufacturability is impaired. Therefore, in the Cu—Co—Si alloy sheet according to the present invention, it is preferable to add one or two or more kinds selected from Mg, Mn, Ag, and P in a total of up to 2.0% by mass. However, since the effect is small when it is less than 0.01% by mass, it is more preferable to add 0.01 to 2.0% by mass in total, further preferably to add 0.02 to 0.5% by mass in total, and typically to add 0.04 to 0.2% by mass in total.

b)Sn及Zn的添加量 b) Addition amount of Sn and Zn

Sn及Zn也通过微量的添加而在不损害导电率的情况下改善强度、应力松弛特性、镀覆性等产品特性。添加效果主要通过在母相中的固溶得以发挥。但是,当Sn及Zn总计超过2.0质量%时,不仅特性改善效果饱和,而且会损害制造性。因此,本发明所涉及的Cu-Co-Si系合金板中,优选添加总计最大2.0质量%的选自Sn及Zn中的1种或2种。但由于小于0.05质量%时其效果小,因而优选添加总计0.05~2.0质量%、更优选添加总计0.5~1.0质量%。 Sn and Zn are also added in small amounts to improve product properties such as strength, stress relaxation properties, and platability without impairing electrical conductivity. The addition effect is mainly exerted by solid solution in the parent phase. However, when the total of Sn and Zn exceeds 2.0% by mass, not only the property improvement effect is saturated, but also the manufacturability is impaired. Therefore, in the Cu—Co—Si alloy sheet according to the present invention, it is preferable to add one or two selected from Sn and Zn at a maximum of 2.0% by mass in total. However, since the effect is small when it is less than 0.05% by mass, it is preferable to add 0.05 to 2.0% by mass in total, more preferably 0.5 to 1.0% by mass in total.

c)As、Sb、Be、B、Ti、Zr、Al及Fe的添加量 c) Addition amount of As, Sb, Be, B, Ti, Zr, Al and Fe

As、Sb、Be、B、Ti、Zr、Al及Fe中,通过根据所要求的产品特性来调整添加量,改善导电率、强度、应力松弛特性、镀覆性等产品特性。添加效果主要通过在母相中的固溶得以发挥,通过含有在第二相粒子中或者形成全新组成的第二相粒子,还可以发挥进一步的效果。但是,当这些元素总计超过2.0质量%时,不仅特性改善效果饱和,而且会损害制造性。因此,本发明所涉及的Cu-Co-Si系合金板中,可以添加总计最大2.0质量%的选自As、Sb、Be、B、Ti、Zr、Al及Fe中的1种或2种以上。但由于小于0.001质量%时其效果小,因而优选添加总计0.001~2.0质量%、更优选添加总计0.05~1.0质量%。 Among As, Sb, Be, B, Ti, Zr, Al, and Fe, the addition amount is adjusted according to the required product characteristics to improve product characteristics such as electrical conductivity, strength, stress relaxation characteristics, and platability. The addition effect is mainly exhibited by solid solution in the matrix, and further effects can be exhibited by being contained in the second phase particles or by forming second phase particles of a completely new composition. However, when the total of these elements exceeds 2.0% by mass, not only the property improvement effect is saturated, but also manufacturability is impaired. Therefore, in the Cu-Co-Si alloy sheet according to the present invention, one or more kinds selected from As, Sb, Be, B, Ti, Zr, Al, and Fe may be added in a total of up to 2.0% by mass. . However, since the effect is small when it is less than 0.001% by mass, it is preferable to add 0.001 to 2.0% by mass in total, more preferably 0.05 to 1.0% by mass in total.

上述Mg、P、As、Sb、Be、B、Mn、Sn、Ti、Zr、Al、Fe、Zn及Ag的添加量总计超过2.0质量%时,由于易于损害制造性,因而优选使它们总计为2.0质量%以下、更优选为1.5质量%以下、进一步优选为1.0质量%以下。 When the total addition amount of the above-mentioned Mg, P, As, Sb, Be, B, Mn, Sn, Ti, Zr, Al, Fe, Zn and Ag exceeds 2.0% by mass, since manufacturability is liable to be impaired, it is preferable to make them total 2.0 mass % or less, more preferably 1.5 mass % or less, still more preferably 1.0 mass % or less.

(4)结晶粒径 (4) Crystal particle size

结晶粒径小则可获得高强度,这是以往所公知的,本发明中,轧制方向截面的板厚中心的平均结晶粒径也为20μm以下。这里,板厚中心的平均结晶粒径根据JIS H 0501(截断法)进行测定。本发明的铜合金板的板厚中心的平均结晶粒径在加工度10~50%的最终轧制的前后不会发生明显的相对变化。因而,只要是在最终轧制前为20μm以下的平均结晶粒径,则在最终轧制后仍然维持较平均结晶粒径20μm的样品铜合金更为微细的结晶结构。因此,即便是结晶结构过于微细、无法在数值上正确地测定最终轧制后的平均结晶粒径,通过以在相同条件下对最终轧制前为平均结晶粒径20μm的样品进行最终轧制的产物为标准进行比较,也可判断平均结晶粒径是否超过20μm。予以说明,本发明的“板厚中心处平均结晶粒径20μm以下”是用于确定与现有技术相同的高强度的规定,“板厚中心”是用于表示测定位置的用语。 It is conventionally known that high strength is obtained when the crystal grain size is small, and in the present invention, the average crystal grain size at the thickness center of the cross-section in the rolling direction is also 20 μm or less. Here, the average grain size at the thickness center is based on JIS H 0501 (truncation method) for determination. The average crystal grain size at the thickness center of the copper alloy sheet of the present invention does not undergo significant relative changes before and after final rolling with a working degree of 10 to 50%. Therefore, as long as the average crystal grain size is 20 μm or less before final rolling, the crystal structure is still finer than that of the sample copper alloy with an average crystal grain size of 20 μm after final rolling. Therefore, even if the crystal structure is too fine to numerically and accurately measure the average grain size after final rolling, by performing final rolling on a sample with an average grain size of 20 μm before final rolling under the same conditions, The product is used as a standard for comparison, and it can also be judged whether the average crystal grain size exceeds 20 μm. In the present invention, "the average crystal grain size at the thickness center of 20 μm or less" is a regulation for confirming the same high strength as in the prior art, and "thickness center" is a term used to indicate the measurement position.

在现有技术中,结晶粒径的不均、特别是表面的粗大化结晶并未被特别地关注,表面的粗大化晶粒对镀覆的均一附着性所造成的不良影响是完全未知的。但是,表层在轧制工序中最易积存应变能、在通常的制造条件下相较于内部(板厚中心),结晶更易局部地粗大化。另外,在热处理工序中,也有表层与内部的热经历不同的情况,相较于内部(板厚中心),也有结晶局部地发生粗大化的情况。此时,予以说明,这里所说的“表层”是距离表面25μm的范围。 In the prior art, the non-uniformity of crystal grain size, especially the coarsening of crystals on the surface has not been paid special attention, and the adverse effect of the coarsening of crystal grains on the surface on the uniform adhesion of plating is completely unknown. However, the surface layer is the most likely to accumulate strain energy during the rolling process, and the crystals are more likely to be locally coarsened than the inside (thickness center) under normal manufacturing conditions. In addition, in the heat treatment process, the heat histories of the surface layer and the inside may be different, and the crystals may be locally coarsened compared to the inside (thickness center). At this time, it should be noted that the "surface layer" referred to here refers to the range of 25 μm from the surface.

本发明人等发现通过减少Cu-Co-Si系合金板表面的粗大化的晶粒、可获得镀覆均一地附着的电子材料用铜合金板。 The inventors of the present invention have found that by reducing the coarsened crystal grains on the surface of the Cu—Co—Si alloy sheet, it is possible to obtain a copper alloy sheet for electronic materials in which plating uniformly adheres.

具体地说,相对于轧制方向的长度1mm,与表面相接且最终轧制后的长径为45μm以上的晶粒为5个以下、优选为4个以下、更优选为2个以下。超过5个时,镀覆不会均一地附着、成为用肉眼观察镀覆表面时发生模糊不清状态的次品。 Specifically, the number of crystal grains in contact with the surface and having a major diameter of 45 μm or more after final rolling is 5 or less, preferably 4 or less, more preferably 2 or less, with respect to a length of 1 mm in the rolling direction. When the number exceeds 5, the plating does not adhere uniformly and becomes a defective product in which the plating surface is blurred when observed with the naked eye.

另外,晶粒个数是在显微镜照片(倍率:×400)中对与轧制方向的截面的表面相接的45μm以上的晶粒个数进行测定,用晶粒个数除以多个(10次)测定视野中表面的长度2000μm范围的总长度,作为1mm单位。 In addition, the number of crystal grains is measured by measuring the number of crystal grains of 45 μm or more in contact with the surface of the cross-section in the rolling direction in a microscopic photograph (magnification: ×400), and dividing the number of crystal grains by the number (10 b) Measure the total length of the surface in the field of view in the range of 2000 μm, and take it as a unit of 1 mm.

本发明的铜合金板由于表面上长径45μm以上的晶粒为5个以下,因而镀覆的均一附着性优异。本发明的铜合金板可以适用各种镀覆材料,例如可举出在镀Au的基底中通常使用的Ni基底镀覆或Cu基底镀覆、镀Sn。 Since the copper alloy sheet of the present invention has five or less crystal grains having a major diameter of 45 μm or more on the surface, it is excellent in uniform adhesion of plating. Various plating materials can be applied to the copper alloy sheet of the present invention, and examples thereof include Ni-based plating, Cu-based plating, and Sn-based plating that are generally used for Au-plated substrates.

本发明的镀覆厚度在通常使用的2~5μm的厚度下是当然的、即便在0.5~2.0μm的厚度下也显示充分的均一附着性。 The plating thickness of the present invention is of course generally used at a thickness of 2 to 5 μm, and shows sufficient uniform adhesion even at a thickness of 0.5 to 2.0 μm.

(5)制造方法 (5) Manufacturing method

本发明的铜合金板的制造方法使用铜合金板中通常的制造工艺(熔炼·铸造→热轧→中间冷轧→中间固溶→最终冷轧→时效),但在其工序内调整下述条件来制造目标的铜合金板。予以说明,对于中间轧制、中间固溶而言,还可根据需要反复进行数次。 The manufacturing method of the copper alloy sheet of the present invention uses the usual manufacturing process for copper alloy sheets (smelting and casting→hot rolling→intermediate cold rolling→intermediate solid solution→final cold rolling→aging), but the following conditions are adjusted in the process To manufacture target copper alloy plates. In addition, intermediate rolling and intermediate solid solution may be repeated several times as needed.

本发明中严格地控制热轧、中间冷轧、中间固溶处理的条件是重要的。其原因在于,在本发明的铜合金板中添加第二相粒子易于粗大化的Co,第二相粒子的生成及成长速度会大大影响热处理时的保持温度和冷却速度。 In the present invention, it is important to strictly control the conditions of hot rolling, intermediate cold rolling, and intermediate solution treatment. The reason for this is that when Co, which is easy to coarsen the second phase particles, is added to the copper alloy sheet of the present invention, the formation and growth rate of the second phase particles greatly affect the holding temperature and cooling rate during heat treatment.

熔炼·铸造工序中将电解铜、Si、Co等原料熔化、获得所需组成的熔融液。然后将该熔融液铸造成铸锭。在之后的热轧中,有必要的是进行均一的热处理、尽量除去铸造中所产生的Co-Si等析晶物。例如,在950℃~1050℃下保持1小时以上后进行热轧。热轧前的保持温度小于950℃时,固溶不充分;而超过1050℃时,材料有可能熔解。 In the smelting/casting process, raw materials such as electrolytic copper, Si, and Co are melted to obtain a molten solution with a desired composition. The melt is then cast into an ingot. In subsequent hot rolling, it is necessary to perform a uniform heat treatment to remove crystallized substances such as Co-Si generated during casting as much as possible. For example, hot rolling is performed after holding at 950° C. to 1050° C. for 1 hour or more. When the holding temperature before hot rolling is less than 950°C, the solid solution is insufficient; and when it exceeds 1050°C, the material may melt.

另外,热轧结束时的温度小于700℃的情况,是指热轧的最终道次或包含最终道次的数道次的加工在小于700℃下进行。热轧结束时的温度小于700℃时,则会变得在内部为重结晶状态,而表层为承受加工形变的状态下结束。在该状态下经过冷轧、在通常的条件下进行固溶时,则变得内部为正常重结晶组织、而表层形成粗大化晶粒。因此,为了防止表层的粗大化结晶的形成,理想的是在700℃以上、优选850℃以上结束热轧,理想的是在热轧结束后进行骤冷。骤冷可通过水冷达成。 In addition, when the temperature at the end of hot rolling is less than 700°C, it means that the last pass of hot rolling or the processing of several passes including the last pass is performed at less than 700°C. When the temperature at the end of the hot rolling is lower than 700° C., the inside is in a recrystallized state, and the surface layer ends in a state of receiving working strain. In this state, after cold rolling and solid solution under normal conditions, the inside becomes a normal recrystallized structure, and the surface layer forms coarse grains. Therefore, in order to prevent the formation of coarse crystals in the surface layer, it is desirable to finish hot rolling at 700°C or higher, preferably 850°C or higher, and it is desirable to perform rapid cooling after hot rolling. Quenching can be achieved by water cooling.

热轧后,在目标范围内适当选择次数和顺序来进行中间轧制及中间固溶。中间轧制的最终道次的加工度小于5%时,由于仅在材料表面蓄积加工形变能量,因而会在表层产生粗大的晶粒。特别是,优选使最终道次的中间轧制加工度为8%以上。另外,控制中间轧制所使用的轧制油的粘度及中间轧制的速度也对均匀地施加加工形变能量是有效的。 After hot rolling, intermediate rolling and intermediate solution are performed by appropriately selecting the number of times and order within the target range. When the processing degree of the final pass of intermediate rolling is less than 5%, since the processing deformation energy is only accumulated on the surface of the material, coarse grains will be generated on the surface layer. In particular, it is preferable to set the intermediate rolling working degree of the final pass to be 8% or more. In addition, controlling the viscosity of rolling oil used for intermediate rolling and the speed of intermediate rolling is also effective for uniformly applying processing deformation energy.

中间固溶用于使熔炼铸造时的析晶粒子或热轧后的析出粒子固溶、尽量除去粗大的Co-Si等析出物而充分地进行。例如,固溶处理温度小于850℃时,固溶不充分,无法获得所需的强度。而固溶处理温度超过1050℃时,则有材料发生熔解的可能。因此,优选进行将材料温度加热至850℃~1050℃的固溶处理。固溶处理的时间优选为0.5分钟~1小时。 The intermediate solid solution is performed sufficiently to dissolve the crystallized particles during smelting and casting or the precipitated particles after hot rolling, and to remove as much coarse Co-Si and other precipitates as possible. For example, when the solution treatment temperature is lower than 850° C., the solution is insufficient, and desired strength cannot be obtained. When the solution treatment temperature exceeds 1050°C, there is a possibility that the material will melt. Therefore, it is preferable to perform solution treatment in which the temperature of the material is heated to 850°C to 1050°C. The time for solution treatment is preferably 0.5 minutes to 1 hour.

予以说明,作为温度与时间的关系,为了获得相同的热处理效果(例如相同的结晶粒径),常识上是高温的情况下时间必须缩短、低温的情况下时间必须延长。例如,本发明中,在950℃的情况下理想的是1~2分钟、在1000℃的情况下理想的是0.5~1分钟。 It should be noted that, as a relationship between temperature and time, in order to obtain the same heat treatment effect (for example, the same crystal grain size), it is common knowledge that the time must be shortened at high temperatures and extended at low temperatures. For example, in the present invention, it is preferably 1 to 2 minutes at 950°C, and preferably 0.5 to 1 minute at 1000°C.

对于固溶处理后的冷却速度,一般为了防止固溶的第二相粒子的析出,会进行骤冷。 Regarding the cooling rate after solution treatment, rapid cooling is generally performed in order to prevent the precipitation of solid-solved second-phase particles.

接着,在400℃以上且600℃以下的温度条件下进行时效处理,使微细的第二相粒子均一地析出。时效温度小于400℃时,第二相粒子的析出不充分,具有无法获得所需强度和导电率的问题;而超过600℃时,析出的第二相粒子则会发生粗大化,具有无法获得所需强度的问题。时效温度优选为450℃以上且550℃以下。 Next, aging treatment is performed at a temperature of 400° C. to 600° C. to uniformly precipitate fine second-phase particles. When the aging temperature is lower than 400°C, the precipitation of the second phase particles is insufficient, and there is a problem that the desired strength and electrical conductivity cannot be obtained; while when the aging temperature exceeds 600°C, the precipitated second phase particles are coarsened, and there is a problem that the desired strength and electrical conductivity cannot be obtained. A question of strength. The aging temperature is preferably not less than 450°C and not more than 550°C.

最终轧制的加工度优选为10~50%、更优选为30~50%。小于10%时,无法获得所需的强度。而超过50%时,则弯曲加工性变差。 The working degree of the final rolling is preferably 10 to 50%, more preferably 30 to 50%. When it is less than 10%, desired strength cannot be obtained. On the other hand, when it exceeds 50%, bending workability will deteriorate.

本发明的铜合金板由于表面不存在粗大结晶粒子,因而镀覆的均一附着性优异,可适宜地用于引线框、连接器、管脚、端子、继电器、开关、二次电池用箔材料等电子部件。 The copper alloy sheet of the present invention has excellent uniform adhesion of plating since there are no coarse crystal particles on the surface, and can be suitably used for lead frames, connectors, pins, terminals, relays, switches, foil materials for secondary batteries, etc. electronic components.

实施例 Example

以下和比较例一起示出本发明的实施例,但这些实施例是为了更好地理解本发明及其优点而提供,并不意欲限定发明。 Examples of the present invention are shown below together with comparative examples, but these examples are provided for better understanding of the present invention and its advantages, and are not intended to limit the invention.

(1)测定方法 (1) Measurement method

(a)板厚中心的结晶粒径:在固溶处理后,制造最终轧制前的、轧制方向的板厚中心的平均结晶粒径为20μm的标准样品(Co:1.0质量%、Si:0.66质量%、剩余部分为铜)。平均结晶粒径根据JIS H 0501(切断法)测定。对标准样品进行最终冷轧(加工度15%),拍摄轧制方向截面的板厚中心的光学显微镜照片(倍率:×400)作为基准。然后,目视比较各实施例(发明例及比较例)的最终冷轧后的板厚中心的光学显微镜照片(与基准同倍率)与基准的大小,大时表示为大于20μm(>20μm)、同等或者小时表示为20μm以下(≤20μm)。 (a) Grain diameter at center of plate thickness: After solution treatment, a standard sample (Co: 1.0% by mass, Si: 0.66% by mass, the remainder being copper). Average grain size according to JIS H 0501 (cutting method) determination. The standard sample was subjected to final cold rolling (processing ratio 15%), and an optical microscope photograph (magnification: ×400) of the plate thickness center of the section in the rolling direction was taken as a reference. Then, visually compare the size of the optical microscope photos (same magnification as the standard) and the standard size of the thickness center after the final cold rolling of each Example (inventive example and comparative example), and when it is large, it is indicated as greater than 20 μm (> 20 μm), Equivalent or hour is expressed as 20 μm or less (≤20 μm).

(b)表层附近的晶粒的观察 (b) Observation of grains near the surface

对于表层,使用轧制方向表层截面的显微镜照片,在距离表层深10μm的位置上引平行于表面的线,求出线的长度的同时通过线段法求得与表面哪怕是一部分相接的45μm以上的结晶粒径的个数,在10个视野中进行,将45μm以上的结晶粒径的总个数除以总线段,求得相对于1mm的45μm以上的结晶粒径的个数。 For the surface layer, use the microscope photograph of the cross section of the surface layer in the rolling direction, draw a line parallel to the surface at a position 10 μm deep from the surface layer, find the length of the line, and obtain at least 45 μm in contact with the surface by the line segment method The number of grains with a diameter of 45 μm or more was divided in 10 fields of view by the total number of grains with a grain size of 45 μm or more to obtain the number of grains with a grain size of 45 μm or more relative to 1 mm.

(c)镀覆附着的均一性 (c) Uniformity of plating adhesion

(电解脱脂顺序) (Electrolytic Degreasing Sequence)

在碱水溶液中以试样为负极进行电解脱脂。 Electrolytic degreasing is carried out in alkaline aqueous solution with the sample as the negative electrode.

使用10质量%硫酸水溶液进行酸洗。 Pickling was performed using a 10% by mass sulfuric acid aqueous solution.

(Ni基底镀覆条件) (Ni base plating conditions)

・镀覆浴组成:硫酸镍250g/L、氯化镍45g/L、硼酸30g/L ・Composition of plating bath: nickel sulfate 250g/L, nickel chloride 45g/L, boric acid 30g/L

・镀覆浴温度:50℃ ・Coating bath temperature: 50°C

・电流密度:5A/dm2 ・Current density: 5A/dm 2

・镀Ni厚度利用电沉积时间进行调整,设为1.0μm。镀覆厚度测定使用CT-1型电解式膜厚计(电测株式会社制)使用コクール社制电解液 R-54来进行。 ・Ni plating thickness is adjusted by electrodeposition time and set to 1.0μm. The plating thickness was measured using a CT-1 electrolytic film thickness meter (manufactured by Densek Co., Ltd.) using electrolyte solution R-54 manufactured by Kokull Corporation.

(镀覆附着均一性评价) (Plating adhesion uniformity evaluation)

拍摄镀覆表面的光学显微镜照片(倍率:×200、视野面积0.1mm2),测定观察岛状镀覆的个数及分布状态。评价如下所述。 Take an optical microscope photo of the plated surface (magnification: ×200, field of view: 0.1 mm 2 ), and measure and observe the number and distribution state of the plated islands. Evaluations are as follows.

S:无、 S: None,

A:岛状镀覆的个数为50个/mm2以下、 A: The number of island-shaped plating is 50 pieces/mm 2 or less,

B:岛状镀覆的个数为100个/mm2以下、 B: The number of island-shaped plating is 100 pieces/mm 2 or less,

C:岛状镀覆的个数超过100个/mm2C: The number of plated islands exceeds 100/mm 2 .

予以说明,图1为本发明例1的镀覆表面的光学显微镜照片、相当于“S”级,图2为比较例11的镀覆表面的光学显微镜照片、相当于“C” 级。图3为在镀覆表面上观察到的“岛状镀覆”的放大照片(倍率:×2500),使这样的岛形状为1个而测定视野中的岛状镀覆的个数。 In addition, FIG. 1 is an optical micrograph of the plated surface of Example 1 of the present invention, corresponding to "S" class, and Fig. 2 is an optical micrograph of the plated surface of Comparative Example 11, corresponding to "C" class. FIG. 3 is an enlarged photograph (magnification: ×2500) of “island-like plating” observed on the plated surface, and the number of island-like plating in the field of view was measured by counting such an island shape as one.

(d)强度 (d) Strength

进行轧制平行方向的拉伸试验,测定0.2%屈服强度(YS:MPa)。 A tensile test in the rolling direction was performed to measure the 0.2% yield strength (YS: MPa).

(e)导电率(EC;%IACS) (e) Conductivity (EC; %IACS)

通过利用双电桥的体积电阻测定求得。 It can be obtained by measuring the volume resistance using a double bridge.

(f)弯曲加工性 (f) Bending workability

根据JIS H 3130,进行Badway(弯曲轴与轧制方向为同一方向)的W弯曲试验,测定未发生断裂的最小半径(MBR)相对于板厚(t)的比值MBR/t值。弯曲加工性通过以下的基准进行评价。 According to JIS H 3130, the W bending test of Badway (the bending axis is in the same direction as the rolling direction) is carried out, and the ratio MBR/t value of the minimum radius (MBR) without fracture to the plate thickness (t) is measured. Bending workability was evaluated by the following criteria.

MBR/t≤2.0  良好 MBR/t≤2.0 Good

2.0<MBR/t  不良 2.0<MBR/t Poor

(2)制造方法 (2) Manufacturing method

利用高频率熔解炉在1300℃下冶炼表1记载各成分组成的铜合金,铸造厚30mm的铸锭。接着,在表1记载的条件下加热该铸锭3小时后,作为热轧结束温度(结束温度)热轧至板厚10mm,在热轧结束后迅速地水冷至室温。接着,为了除去表面的水锈,实施平面切削至厚度9mm后,适当进行最终道次的加工度为5~15%的冷轧、材料温度900℃下0.5分钟~1小时的中间固溶工序,制成厚度0.15mm的板。固溶处理结束后迅速通过水冷冷却至室温。接着,在惰性环境中520℃下进行3小时的时效处理。然后进行加工度15%的最终冷轧制造各试验片。将各试验片的测定结果示于表1。 Copper alloys having the compositions listed in Table 1 were smelted at 1300° C. in a high-frequency melting furnace, and cast into ingots with a thickness of 30 mm. Next, after heating the ingot for 3 hours under the conditions described in Table 1, it was hot-rolled to a plate thickness of 10 mm at the hot-rolling finish temperature (finish temperature), and water-cooled to room temperature immediately after the hot-rolling was finished. Next, in order to remove the scale on the surface, after performing flat cutting to a thickness of 9 mm, the cold rolling of the final pass with a processing degree of 5 to 15%, and the intermediate solid solution process at a material temperature of 900°C for 0.5 minutes to 1 hour are appropriately carried out. A plate with a thickness of 0.15 mm was produced. After the solution treatment, it was quickly cooled to room temperature by water cooling. Next, an aging treatment was performed at 520° C. for 3 hours in an inert atmosphere. Thereafter, each test piece was produced by final cold rolling with a working degree of 15%. Table 1 shows the measurement results of each test piece.

[表1] [Table 1]

Figure 2011800035931100002DEST_PATH_IMAGE001
Figure 2011800035931100002DEST_PATH_IMAGE001

相对于发明例1的最终道次中的中间轧制的加工度15%,同一组成的发明例2中由于低达10%因而在表面产生粗大粒子、镀覆均一附着性稍差。发明例4与5的关系也同样。 Compared with the 15% working degree of intermediate rolling in the final pass of Invention Example 1, Invention Example 2 with the same composition was as low as 10%, resulting in the generation of coarse particles on the surface and slightly poor plating uniformity and adhesion. The relationship between Invention Examples 4 and 5 is also the same.

相对于发明例1的结束温度(热轧结束时的温度)750℃,同一组成的发明例3中由于低达700℃因而镀覆均一附着性差。发明例4与6的关系也同样。 Compared with the finish temperature (temperature at the end of hot rolling) of 750° C. in Invention Example 1, Invention Example 3 having the same composition was as low as 700° C., so the plating uniform adhesion was poor. The relationship between Invention Examples 4 and 6 is also the same.

相对于发明例1的热轧开始温度950℃、结束温度750℃,同一组成的比较例11中由于低达800℃及500℃因而在表面产生粗大粒子、镀覆均一附着性差。予以说明,当以3.0μm厚度在比较例11的铜合金表面上实施镀Ni时,镀覆后的表面的岛状镀覆变得不明显、成为接近“S”级的状态。 Compared with the hot rolling start temperature of 950°C and finish temperature of 750°C in Invention Example 1, Comparative Example 11 with the same composition was as low as 800°C and 500°C, resulting in coarse particles on the surface and poor plating uniformity. In addition, when Ni plating was performed on the surface of the copper alloy of Comparative Example 11 with a thickness of 3.0 μm, island-like plating on the plated surface became inconspicuous and was in a state close to “S” class.

发明例4与比较例14的关系也同样。 The relationship between Inventive Example 4 and Comparative Example 14 is also the same.

相对于比较例11的最终道次中的中间轧制的加工度15%,同一组成的比较例12中由于低达5%因而在表面产生粗大粒子、镀覆均一附着性差。 In Comparative Example 11, the working degree of intermediate rolling in the final pass was 15%, but in Comparative Example 12 with the same composition, it was as low as 5%, so coarse particles were generated on the surface, and the plating uniformity was poor.

相对于发明例7的热轧开始温度950℃、结束温度750℃、最终道次中的中间轧制的加工度15%,同一组成的比较例17中由于均较低、为800℃、500℃及5%,因而在表面产生粗大粒子、镀覆均一附着性差。发明例8与比较例18的关系也同样。 Compared to Inventive Example 7, which had a hot rolling start temperature of 950°C, an end temperature of 750°C, and a working degree of intermediate rolling in the final pass of 15%, Comparative Example 17 with the same composition was lower at 800°C and 500°C. And 5%, so coarse particles are produced on the surface, and the uniform adhesion of plating is poor. The relationship between Inventive Example 8 and Comparative Example 18 is also the same.

Claims (4)

1. a copper alloy for electronic material plate, it is to contain Co:0.5~3.0 quality %, Si:0.1~1.0 quality %, remainder by Cu and copper alloy for electronic material plate that inevitably impurity forms, it is characterized in that, the average crystallite particle diameter at thickness of slab center is below 20 μ m, with respect to rolling direction length 1mm, join with surface and major diameter is that more than 45 μ m crystal grain is below 5.
2. copper alloy for electronic material plate according to claim 1, it also contains the Cr of maximum 0.5 quality %.
3. copper alloy for electronic material plate according to claim 1 and 2, it also contains one kind or two or more in Mg, P, As, Sb, Be, B, Mn, Sn, Ti, Zr, Al, Fe, Zn and Ag of being selected from that amounts to maximum 2.0 quality %.
4. according to the manufacture method of the copper alloy for electronic material plate described in claim 1~3 any one, it comprises and carries out successively following operation:
By the operation of ingot casting melting and casting;
Making material temperature is that 950 ℃ of above and 1050 ℃ of following heating 1 hour are carried out hot rolling after above, and hot rolling end temp is 700 ℃ of above operations;
Intermediate rolling operation take final passage before the solid solution that more than 8% degree of finish carries out;
Making material temperature is 850 ℃ of above and 1050 ℃ of following heating middle solid solution operations of 0.5 minute~1 hour;
More than 400 ℃ and 600 ℃ of timeliness operations that heat below; With
The final rolling process of degree of finish 10~50%.
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