CN102654117A - Air exhausting device for vacuum pump - Google Patents
Air exhausting device for vacuum pump Download PDFInfo
- Publication number
- CN102654117A CN102654117A CN2011100527745A CN201110052774A CN102654117A CN 102654117 A CN102654117 A CN 102654117A CN 2011100527745 A CN2011100527745 A CN 2011100527745A CN 201110052774 A CN201110052774 A CN 201110052774A CN 102654117 A CN102654117 A CN 102654117A
- Authority
- CN
- China
- Prior art keywords
- outer cover
- vacuum pump
- inlet flange
- outlet pipe
- outer housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 claims abstract description 22
- 238000013022 venting Methods 0.000 claims description 16
- 238000012545 processing Methods 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 238000012423 maintenance Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 239000002245 particle Substances 0.000 abstract 1
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 34
- 238000005086 pumping Methods 0.000 description 12
- 238000005265 energy consumption Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Reciprocating Pumps (AREA)
Abstract
The invention relates to vacuum pump equipment, in particular to an air exhausting device for a vacuum pump. The air exhausting device comprises an outer housing, an exhaust pipe, a conveying pipe and an air inlet flange, wherein the exhaust pipe is arranged in the outer housing, and the top end of the exhaust pipe penetrates out of the outer housing and is connected with a tail gas treatment device; the conveying pipe is arranged in the outer housing; the air inlet flange is arranged on the outer surface of the outer housing, one end of the air inlet flange is connected with the vacuum pump, and the other end of the air inlet flange is communicated with the interior of the outer housing; and a gas entering the outer housing through the air inlet valve passes through the conveying pipe, and is discharged to the tail gas treatment device through the exhaust pipe. By the air exhausting device, an exhaust gas of the vacuum pump circuitously flows in the outer housing, passes through the conveying pipe at first, and then is discharged to the tail gas treatment device through the exhaust pipe 3, so that dust contained in the gas falls to the bottom of the outer housing, the dust content in the exhaust gas is reduced, an exhaust port is prevented from being blocked by dust particles generated in a process procedure, the machine set maintenance time is prolonged, and the noise of a high-pumping-speed dry pump set is reduced.
Description
Technical field
The present invention relates to vaccum pump unit, specifically a kind of vacuum pump is used venting gas appliance.
Background technique
Homemade vacuum pump is through vicennial fast development, and its main performance index (compressing when pressure reduction etc. like pumping speed, ultimate pressure, energy consumption, zero delivery) all reaches or near external advanced level.This big pumping speed dry vacuum pump does not still have manufacturer at home, and external product structure is complicated, price is quite expensive again; What form contrast therewith is that the demand to big pumping speed dry vacuum pump under rugged environment is very urgent along with the developing rapidly of industries such as domestic photovoltaic, medicine, petrochemical industry.At present, homemade dried pump assembly pumping speed is single, and the dried pump assembly kind that satisfies big pumping speed is few, and poor-performing.In addition, existing vacuum pump is when outside exhaust, and noise is big, and dust is piled up serious, when the outlet pipe exhaust, adopts one-way valve or ball structure, owing to contain dust in the gas, can stop up outlet pipe when directly discharging, and causes that maintenance period is short, energy consumption is big.Therefore, the pumping equipment industry development lags behind, and has influenced the development of domestic other industry.
Summary of the invention
In order to solve the problem of above-mentioned existence, the object of the present invention is to provide a kind of vacuum pump to use venting gas appliance.This venting gas appliance utilizes the circuitous exhaust bucket that reaches vast capacity that flows of gas can reduce the dust content of discharging gas, reduces the unit noise, shortens the unit maintenance cycle.
Another object of the present invention is to provide the vacuum pump that a kind of energy consumption is low, vacuum degree in vacuum chamber is high to use venting gas appliance.
The objective of the invention is to realize through following technological scheme:
The present invention includes outer cover, outlet pipe, transport tube and inlet flange, wherein outlet pipe is arranged in the outer cover, and the top of outlet pipe is passed, is connected with exhaust gas processing device by outer cover; Said transport tube is installed in the outer cover, is provided with inlet flange at the outer surface of outer cover, and an end of this inlet flange links to each other with vacuum pump, the internal communication of the other end and outer cover; Get into gas in the outer cover through transport tube, be expelled to exhaust gas processing device by inlet flange through outlet pipe.
Wherein: be respectively equipped with upper backup pad and lower supporting plate in the said outer cover, outlet pipe and transport tube are installed in respectively on the upper and lower dunnage, wherein have a plurality of air holes on the upper backup pad; The bottom of said outlet pipe is positioned at the below of lower supporting plate, and the top of said transport tube is positioned at the below that the top of upper backup pad, bottom are positioned at lower supporting plate; The other end of said inlet flange and outer cover internal communication is between upper and lower dunnage; One end of said inlet flange links to each other with vacuum pump through vacuum line, on vacuum line, is parallel with diaphragm pump; The top of said outlet pipe is provided with and the corresponding stop valve of diaphragm pump, and outlet pipe is connected with exhaust gas processing device through said stop valve; The bottom of said outer cover has dust cleaning mouth, and this dust cleaning mouth is through the sealing of anaerobic copper band; Said inlet flange is fixed on the outer cover through fixing gusset.
Advantage of the present invention and good effect are:
1. the present invention makes vacuum pump discharge gas circuitous flowing in outer cover; Earlier through being expelled to exhaust gas processing device by outlet pipe 3 again behind the transport tube; Make the dust that contains in the gas fall the outer cover bottom, reduced and discharged the dust content in the gas, avoid producing in the manufacturing process dust granules and stop up relief opening; Prolong the unit maintenance time, reduced the dried pump assembly noise of big pumping speed.
2. be parallel with diaphragm pump on the vacuum line that the present invention is connected between inlet flange and vacuum pump, correspondingly on the exhaust flange on outer cover top, connected stop valve, because the big dried pump assembly energy consumption of pumping speed is bigger; Be generally 40KW/h, relief opening, introducing prime diaphragm pump through increasing a parallel connection can get into low-power mode when normal working; Effectively lower energy consumption to 6～8KW; Reduce to originally 20%, and improve vacuum degree in vacuum chamber, have huge economic value and social value.
3. the present invention has welded upper and lower dunnage in outer cover, and outer cover has been divided into three spaces, upper, middle and lower, has offered air hole on the upper backup pad, has increased the gas flow distance, makes the dust in the gas fall the outer cover bottom.
4. inlet flange of the present invention is fixed through fixing gusset, welds together with outer cover, installs firmly.
5. outer cover of the present invention bottom has dust cleaning mouth, is convenient to clean the dust in the outer cover.
Description of drawings
Fig. 1 is the structural representation of vacuum pump unit of the present invention;
Fig. 2 is a structural representation of the present invention;
Fig. 3 is the left view of Fig. 2;
Fig. 4 is the A-A sectional view among Fig. 2;
Wherein: 1 is exhaust flange, and 2 is upper backup pad, and 3 is outlet pipe, and 4 is transport tube; 5 is outer cover, and 6 is lower supporting plate, and 7 are fixing gusset, and 8 is inlet flange; 9 are dust cleaning mouth, and 10 is stop valve, and 11 is vacuum line, and 12 is diaphragm pump; A is a venting gas appliance, and B is a suction booster, and C is the dried pump of big pumping speed.
Embodiment
Below in conjunction with accompanying drawing the present invention is made further detailed description.
Shown in Fig. 2～4, the present invention includes outer cover 5, outlet pipe 3, transport tube 4, upper backup pad 2, lower supporting plate 6 and inlet flange 8, outer cover 5 inner hollow wherein, inner radial cross section be a circle; In outer cover 5; Be provided with upper backup pad 2 and lower supporting plate 6 from top to bottom successively; Upper and lower dunnage 2,6 is discoid; Wherein have a plurality of air holes on the upper backup pad 2, the external peripheral surface of upper and lower dunnage 2,6 is welded on respectively on the inwall of outer cover 5, and upper and lower dunnage 2,6 inside with outer cover 5 are divided into upper, middle, and lower part.Outlet pipe 3 is positioned at outer cover 5, is welded on the upper and lower dunnage 2,6; The bottom of outlet pipe 3 is positioned at the bottom of outer cover 5, the below of lower supporting plate 6; The top of outlet pipe 3 passes and is provided with exhaust flange 1 by outer cover 5, and the top of outlet pipe 3 is connected with exhaust gas processing device through exhaust flange 1.Transport tube 4 is positioned at outer cover 5, is welded on the upper and lower dunnage 2,6, and the top of transport tube 4 is positioned at the top of outer cover 5, the top of upper backup pad 2, and the bottom is positioned at the bottom of outer cover 5, the below of lower supporting plate 6.At the outer surface of outer cover 5, upper and lower dunnage 2, be provided with inlet flange 8 between 6, this inlet flange 8 is welded on the outer cover 5 through fixing gusset 7.One end of inlet flange 8 links to each other with vacuum pump through vacuum line 11, and the other end is communicated with outer cover 5 interior middle parts; Get into gas in the outer covers 5 through transport tube 4, be expelled to exhaust gas processing device by inlet flange 8 through outlet pipe 3.The bottom of outer cover 5 has dust cleaning mouth 9, and this dust cleaning mouth 9 is through the sealing of anaerobic copper band, and this anaerobic copper band is heat-resisting to be reached more than 150 ℃.
On the vacuum line 11 that inlet flange 8 links to each other with vacuum pump, be parallel with diaphragm pump 12, correspondingly, the exhaust flange 1 on outlet pipe 3 tops is connected with stop valve 10, and outlet pipe 3 is connected with exhaust gas processing device through said stop valve 10.
Working principle of the present invention is:
As shown in Figure 1, the vacuum pump of present embodiment is made up of the suction booster B and the dried pump C of big pumping speed that increase pumping speed, and the inlet flange 8 on the venting gas appliance A links to each other parallelly connected diaphragm pump 12 on vacuum line 11 through vacuum line 11 with the dried pump C of big pumping speed; The exhaust flange 1 on outer cover 5 tops among the venting gas appliance A connects the stop valve 10 and then the gas disposal device that truncates earlier and is connected.Outer surface and upper and lower dunnage 2,6 with outlet pipe 3 and transport tube 4 welds together earlier, and the external peripheral surface with upper and lower dunnage 2,6 is welded on respectively on the inwall of outer cover 5 again, at last outer cover 5 is welded into sealed hollow.
The gas that vacuum pump is discharged through vacuum line 11 by inlet flange 8 be introduced in the outer cover 5, between two dunnages; Then, through the top of the entering of the air hole on the upper backup pad 2 transport tube 4, the lower space that gets into lower supporting plates 6 through transport tube 4 again; At last, be expelled to exhaust gas processing device through outlet pipe 3, exhaust flange 1, stop valve 10.
When the pressure of relief opening is lower than barometric pressure; When no a large amount of gases were discharged during technology was carried out, get into low-power mode, this moment, stop valve 10 was closed; Gas in the vacuum pump is discharged through diaphragm pump 12; The power of the assembling unit will be reduced to 20% of rated power, and energy efficient the time, process chamber degree of vacuum can also be improved accordingly greatly.
Venting gas appliance of the present invention makes vacuum pump discharge gas make a circulation to be expelled to exhaust gas processing device, and the dust in the gas drops on the lower space of outer cover 5, and these dust can be cleared up through the dust cleaning mouth 9 of outer cover bottom.
The present invention is applicable to industries such as semiconductor, solar energy, petrochemical industry, metallurgy, food, medicine, electronics, packing, printing.
Claims (7)
1. a vacuum pump is used venting gas appliance; It is characterized in that: comprise outer cover (5), outlet pipe (3), transport tube (4) and inlet flange (8); Wherein outlet pipe (3) is arranged in the outer cover (5), and the top of outlet pipe (3) is passed, is connected with exhaust gas processing device by outer cover (5); Said transport tube (4) is installed in the outer cover (5), is provided with inlet flange (8) at the outer surface of outer cover (5), and an end of this inlet flange (8) links to each other with vacuum pump, the internal communication of the other end and outer cover (5); Get into gas in the outer cover (5) through transport tube (4), be expelled to exhaust gas processing device by inlet flange (8) through outlet pipe (3).
2. use venting gas appliance by the described vacuum pump of claim 1; It is characterized in that: be respectively equipped with upper backup pad (2) and lower supporting plate (6) in the said outer cover (5); Outlet pipe (3) and transport tube (4) are installed in respectively on the upper and lower dunnage (2,6), wherein have a plurality of air holes on the upper backup pad (2).
3. use venting gas appliance by the described vacuum pump of claim 2, it is characterized in that: the bottom of said outlet pipe (3) is positioned at the below of lower supporting plate (6), and top, the bottom that the top of said transport tube (4) is positioned at upper backup pad (2) is positioned at the below of lower supporting plate (6).
4. use venting gas appliance by the described vacuum pump of claim 2, it is characterized in that: the other end of said inlet flange (8) and outer cover (5) internal communication is positioned between the upper and lower dunnage (2,6).
5. use venting gas appliance by the described vacuum pump of claim 1, it is characterized in that: an end of said inlet flange (8) links to each other with vacuum pump through vacuum line (11), on vacuum line (11), is parallel with diaphragm pump (12); The top of said outlet pipe (3) is provided with and the corresponding stop valve of diaphragm pump (12) (10), and outlet pipe (3) is connected with exhaust gas processing device through said stop valve (10).
6. use venting gas appliance by the described vacuum pump of claim 1, it is characterized in that: the bottom of said outer cover (5) has dust cleaning mouthful (9), and this dust cleaning mouthful (9) is through the sealing of anaerobic copper band.
7. use venting gas appliance by the described vacuum pump of claim 1, it is characterized in that: said inlet flange (8) is fixed on the outer cover (5) through fixing gusset (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110052774.5A CN102654117B (en) | 2011-03-04 | 2011-03-04 | Air exhausting device for vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110052774.5A CN102654117B (en) | 2011-03-04 | 2011-03-04 | Air exhausting device for vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102654117A true CN102654117A (en) | 2012-09-05 |
| CN102654117B CN102654117B (en) | 2014-10-22 |
Family
ID=46729812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110052774.5A Active CN102654117B (en) | 2011-03-04 | 2011-03-04 | Air exhausting device for vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102654117B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025209207A1 (en) * | 2024-04-03 | 2025-10-09 | 北京北方华创微电子装备有限公司 | Semiconductor process apparatus and exhaust gas treatment device thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3816034A (en) * | 1971-03-12 | 1974-06-11 | Dorr Oliver Inc | Diaphragm pumps and actuating system therefor |
| CN2076204U (en) * | 1990-02-10 | 1991-05-01 | 单国良 | Enclosed dual-cyclone high-efficiency dust-collector |
| JPH09243145A (en) * | 1996-03-01 | 1997-09-16 | Tomoko Uchiyama | Drain discharge pump for air conditioner |
| JPH11307456A (en) * | 1998-04-20 | 1999-11-05 | Rohm Co Ltd | Exhauster in semiconductor substrate surface treatment equipment |
| US20020131870A1 (en) * | 2001-03-19 | 2002-09-19 | Alcatel | System for pumping low thermal conductivity gases |
| EP1596066A1 (en) * | 2004-05-14 | 2005-11-16 | Varian, Inc. | Light gas vacuum pumping system |
| CN201934278U (en) * | 2011-03-04 | 2011-08-17 | 中国科学院沈阳科学仪器研制中心有限公司 | Exhaust device for vacuum pump |
-
2011
- 2011-03-04 CN CN201110052774.5A patent/CN102654117B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3816034A (en) * | 1971-03-12 | 1974-06-11 | Dorr Oliver Inc | Diaphragm pumps and actuating system therefor |
| CN2076204U (en) * | 1990-02-10 | 1991-05-01 | 单国良 | Enclosed dual-cyclone high-efficiency dust-collector |
| JPH09243145A (en) * | 1996-03-01 | 1997-09-16 | Tomoko Uchiyama | Drain discharge pump for air conditioner |
| JPH11307456A (en) * | 1998-04-20 | 1999-11-05 | Rohm Co Ltd | Exhauster in semiconductor substrate surface treatment equipment |
| US20020131870A1 (en) * | 2001-03-19 | 2002-09-19 | Alcatel | System for pumping low thermal conductivity gases |
| EP1596066A1 (en) * | 2004-05-14 | 2005-11-16 | Varian, Inc. | Light gas vacuum pumping system |
| CN201934278U (en) * | 2011-03-04 | 2011-08-17 | 中国科学院沈阳科学仪器研制中心有限公司 | Exhaust device for vacuum pump |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025209207A1 (en) * | 2024-04-03 | 2025-10-09 | 北京北方华创微电子装备有限公司 | Semiconductor process apparatus and exhaust gas treatment device thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102654117B (en) | 2014-10-22 |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |