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CN102628177A - Electrical etching machine of metal cutter template - Google Patents

Electrical etching machine of metal cutter template Download PDF

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Publication number
CN102628177A
CN102628177A CN2012101307111A CN201210130711A CN102628177A CN 102628177 A CN102628177 A CN 102628177A CN 2012101307111 A CN2012101307111 A CN 2012101307111A CN 201210130711 A CN201210130711 A CN 201210130711A CN 102628177 A CN102628177 A CN 102628177A
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liquid
lower electrode
electrode
frame
etching machine
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CN2012101307111A
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CN102628177B (en
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周丁政
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CHANGZHOU ZHENGCHENG Co
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CHANGZHOU ZHENGCHENG Co
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Abstract

The invention discloses an electrical etching machine of a metal cutter template, which comprises a machine frame, an upper electrode, a lower electrode and an electrolyte collecting tank. A translation frame is further matched on the machine frame in moving mode, the upper electrode is installed and connected onto the translation frame, at least two liquid outlet devices communicated with a liquid supplying device are arranged on the translation frame and beside the upper electrode, a liquid outlet of each liquid outlet device faces toward the bottom of the upper electrode and toward a space under the bottom face of the upper electrode, an insulating workpiece support piece is arranged on the upper surface of the lower electrode and provided with a liquid passageway, or a plurality of insulating workpiece support strips are arranged on the upper surface of the lower electrode, the gaps between adjacent workpiece support strips form the liquid passageway, a liquid flow passage communicated with the upper surface of the lower electrode is arranged inside the lower electrode or on the lateral face of the lower electrode, and the liquid flow passage is communicated with the liquid passageway. The electrical etching machine generates no erosion and can meet the metal cutter template etching requirements for large etching depth, high evenness and high accuracy.

Description

Steel edge template electrolytic etching apparatus
Technical field
The present invention relates to a kind of device that the steel edge template is carried out electrolytically etching.
Background technology
The Chinese patent document number is that the document of CN2220372 discloses a kind of metal graphic engraving machine; This device comprises electrode (negative electricity), moving contact and the hoisting appliance and the liquid supplying device on cabinet top; The liquid supplying device output terminal be positioned at moving contact electrode (positive electricity) above or below; Its working process is: at first, metal products to be etched is placed on the electrode on cabinet top, and keep the good electrical contact; Make the electrode difference positively charged and the negative electricity on moving contact electrode, cabinet top, start the liquid absorbing pump switch, the electrolytic solution in the liquid-storing box is transported in the reservoir through liquid pushing tube.When the electrolytic solution in the reservoir reaches a certain amount of, close the liquid absorbing pump switch; Then; Shake force application rod and make the moving contact electrode be displaced downwardly to metal products to be etched surface, electrolytic solution is flow on the homogenizing plate through catheter, flow on the liquid storage piece through the equally distributed aperture on the homogenizing plate; See through uniform distribution aperture on the moving contact electrode by the liquid storage piece again; Flow to metal products to be etched surface, thereby make between moving contact electrode and metal products to be etched electrolytic action takes place, the metal products surface does not have the part of protective membrane by electrolytic etching; The depth according to the pattern and character of required formation is different, as long as adjust moving contact electrode duration of contact surperficial with metal products through unclamping force application rod, promptly controls the electrolytic time.It is not enough below this device and method of use exist: because metal products to be etched all contacts with negative potential and positive electrode; And that the upper and lower surfaces of metal products to be etched is difficult to guarantee is very smooth; Therefore; Be easy to generate the loose contact of metal products to be etched and positive electrode, very easily cause the ablation of metal products to be etched and scrap; Anti-electrolytic protection need be done in the back side of metal products to be etched, otherwise the back side also will consume, and has increased production cost, influences working (machining) efficiency; Because electrolytic solution sees through uniform distribution aperture on the moving contact electrode by the liquid storage piece; Flow on the surface of metal products to be etched, therefore, local etching corresponding with aperture on metal products to be etched is than very fast; Other local etching is slow; Very easily make the surface generation of metal products to be etched uneven, inhomogeneous, rough, can't satisfy the steel edge template of big etching depth, high evenness, high-precision requirement at all; In addition, this device difficult is accurately located metal products to be etched on electrode, is not easy to adorn workpiece and in the electrolytically etching process, observes the etching situation.
Summary of the invention
The object of the present invention is to provide a kind of ablation that in the electrolytically etching process, do not produce, the back side of metal products to be etched need not protection, can satisfy the steel edge template electrolytic etching apparatus of big etching depth, high evenness, high-precision requirement.
In order to achieve the above object, technical scheme of the present invention is a kind of steel edge template electrolytic etching apparatus; Comprise frame, top electrode, lower electrode and electrolytic solution receiving tank, wherein said electrolytic solution receiving tank is positioned on the frame, and said lower electrode is arranged in the electrolytic solution receiving tank; Also move on the said frame and be combined with pan carriage, said top electrode is installed on the pan carriage, has at least two drain apparatus on the said pan carriage and by being positioned at top electrode; The liquid outlet of said drain apparatus is all towards the bottom of top electrode and the space below the bottom surface, and when pan carriage moved, top electrode and drain apparatus can pass through from the lower electrode top; The upper surface of said lower electrode is provided with the insulating workpiece support; Have liquid passageway on the workpiece support, perhaps the upper surface of said lower electrode is provided with several insulating workpiece support bars, and the gap between the adjacent workpiece support bar constitutes liquid passageway; Said lower electrode inside or side have towards the flow passage of lower electrode upper surface, and flow passage is communicated with said liquid passageway.
The pan carriage drive unit is housed on the said frame, the pan carriage drive unit pan carriage that is in transmission connection, said pan carriage moves with frame through translation slide block and translation guide rail and cooperates.
Said pan carriage drive unit comprises servomotor step-down gear, chain and sprocket wheel, and wherein the servomotor step-down gear connects chain through chain sprocket drive, and chain is connected with the pan carriage bottom.
Lifting support and lifting drive thereof also are housed on the said pan carriage, and said top electrode and drain apparatus are fixed on the lifting support.
Said workpiece support is plate shape and has the flat part all around and the countersink at middle part that the countersink bottom has some fence bars, the liquid passageway of the gap formation workpiece support between the fence bar.
Be fitted with some downward opening first gas collection arms on the said pan carriage; Also there is the second gas collection arm of some openings in the electrolytic solution receiving tank said electrolytic solution receiving tank top; The first gas collection arm and the second gas collection arm are all towards gas gathering manifold, and said electrolytic solution receiving tank top also is coated with flexible gas skirt.
Said gas gathering manifold is communicated with the gas collection washer.
Also comprise liquid feed device, supply unit and electric control gear, said top electrode, lower electrode and electric control gear are electrically connected with supply unit respectively, and liquid feed device is communicated with the flow passage of drain apparatus and lower electrode.
Said liquid feed device comprises infusion pump, liquid-storing box and tubing, and wherein infusion pump is contained on the liquid-storing box, and an end of tubing is communicated with infusion pump, and the other end leads to top electrode and lower electrode place respectively.
The liquid discharge pipe that said electrolytic solution receiving tank bottom is provided with the liquid-storing box that leads to liquid feed device is equipped with heat exchange element in the liquid-storing box, heat exchange element is connected to thermostat, and liquid-storing box also is connected with sedimeter.
Liquid blocking strip all is equipped with in the both sides parallel with the pan carriage travel direction of said top electrode, and the lower end of liquid blocking strip extends to the respective sides place of lower electrode respectively.
Said lower electrode is provided with electro-magnet or PM.
After adopting technique scheme,, has liquid passageway on the workpiece support owing on the upper surface of said lower electrode the insulating workpiece support is housed; Said lower electrode inside or side have towards the flow passage of lower electrode upper surface, and flow passage one end is communicated with liquid feed device, and the other end is communicated with the workpiece support liquid passageway; Therefore, metal products to be etched only contacts with workpiece support, does not contact with lower electrode and top electrode; In the electrolytically etching process, metal products to be etched and lower electrode and top electrode all produce through electrolytic solution and electrically contact, so there is not poor contact phenomenon; Do not produce ablation; Yield rate is high, and workpiece support can guarantee the accurate location of metal products to be etched on lower electrode, is convenient to cooperate and accurate electrolytically etching with top electrode and drain apparatus; Because the back side of metal products to be etched does not contact with lower electrode; Therefore the back side of metal products to be etched is through electrolyte flow and electronegative; Therefore the back side forms galvanic protection and can etching; So need not protection, and ablation problem that loose contact is produced when having avoided because of direct contacts electrode; Be combined with pan carriage owing to also moving on the said frame again, said top electrode is installed on the pan carriage, has at least two drain apparatus that are communicated with liquid feed device on the said pan carriage and by being positioned at top electrode; The liquid outlet of said drain apparatus is all towards the bottom of top electrode and the space below the bottom surface; When pan carriage moved, top electrode and drain apparatus can pass through from lower electrode top scan-type, therefore; The electrolytic solution that has overcome the prior art existence fixedly flows to the deficiency of certain position, metal products to be etched surface; When the present invention used, top electrode can be along with the reciprocal translation of pan carriage, at least two other drain apparatus of top electrode can take turns fluid and/or fluid simultaneously; Electrolytic solution can be ejected into whole positions on metal products to be etched surface; In time remove electrolysate, upgrade the electrolysis interface, therefore can satisfy big etching depth, high evenness, the high-precision cutting die plate electrolytically etching requirement of faster etching speed; In addition, moving of pan carriage is convenient to install workpiece and in the electrolytically etching process, observed the etching situation.The present invention also has the saving cost, and production efficiency is high, is suitable for the characteristics of suitability for industrialized production.
Description of drawings
The embodiment that provides below in conjunction with accompanying drawing does explanation in further detail to the present invention.
Fig. 1 is the structure front elevational schematic of steel edge template electrolytic etching apparatus of the present invention;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the partial enlarged drawing of the electrolytically etching work area of Fig. 1;
Fig. 4 is the vertical view of Fig. 3;
Fig. 5 is another (work) state graph of Fig. 3;
Fig. 6 is the vertical view of Fig. 5;
Fig. 7 is the right view of Fig. 5;
Fig. 8 is the left view of Fig. 5;
Fig. 9 is the rear view of Fig. 3;
Figure 10 is the sectional view of Fig. 6 along the A-A line;
Figure 11 is the C portion partial enlarged drawing of Figure 10;
Figure 12 is the analyse and observe rotation diagram of Fig. 6 along the B-B line;
Figure 13 is the fundamental diagram of electrolytically etching of the present invention;
Figure 14 is the structure vertical view of top electrode when being connected with tubing among Figure 11;
Figure 15 is that the F of Figure 14 is to view;
Figure 16 is that the G of Figure 14 is to revolved view;
Figure 17 is the structure front view of the lower electrode among Figure 11;
Figure 18 is the left view of Figure 17;
Figure 19 is the vertical view of Figure 17;
Figure 20 is the vertical view of the workpiece support (plate) among Figure 11;
Figure 21 is the cutaway view Amplified image of Figure 20 along the D-D line;
Figure 22 is the packaging assembly front view of frame, pan carriage and lifting support among Fig. 1;
Figure 23 is the vertical view of Figure 22;
Figure 24 is the right view of Figure 22;
Figure 25 is the perspective view of the frame among Fig. 1;
Figure 26 is the perspective view of the pan carriage among Fig. 1;
Figure 27 is the perspective view of the lifting support among Fig. 1;
Figure 28 is the E portion partial enlarged drawing among Fig. 3;
Figure 29 is the vertical view of Figure 28;
Figure 30 is the right view of Figure 28;
Figure 31 is the sectional view of Figure 29 along the H-H line.
Embodiment
Like Fig. 1 ~ 12,22,23, shown in 24, a kind of steel edge template electrolytic etching apparatus comprises frame 1, top electrode 7, lower electrode 8 and electrolytic solution receiving tank 9; Wherein said electrolytic solution receiving tank 9 is positioned on the frame 1; Said lower electrode 8 is arranged in electrolytic solution receiving tank 9, also moves on the said frame 1 and is combined with pan carriage 11, and said top electrode 7 is installed on the pan carriage 11; Have at least two drain apparatus 7-1 on the said pan carriage 11 and by being positioned at top electrode 7; The liquid outlet of said drain apparatus 7-1 is all towards the bottom of top electrode 7 and the space below the bottom surface, and when pan carriage 11 moved, top electrode 7 can pass through from lower electrode 8 tops with drain apparatus 7-1; The upper surface of said lower electrode 8 is provided with insulating workpiece support 8-1; Have liquid passageway 8-1-1 on the workpiece support 8-1, said lower electrode 8 inside or side have the flow passage 8-2 towards the lower electrode upper surface, and flow passage 8-2 is communicated with the liquid passageway (8-1-1) of workpiece support 8-1.
Workpiece support 8-1 can be a back up pad; Also can be several insulating workpiece support bars, the gap between the adjacent workpiece support bar constitutes liquid passageway 8-1-1.
Like Fig. 1,3,5,8,9,10,22,23,24,25, shown in 26; For the ease of driving pan carriage 11 to-and-fro movements automatically; On the said frame 1 pan carriage drive unit 12 is housed; Pan carriage drive unit 12 pan carriage 11 that is in transmission connection, said pan carriage 11 move with frame 1 through translation slide block 13 ' and translation guide rail 13 and cooperate.
Like Fig. 1,3,5,8,9,10,22,23, shown in 24; In order to make pan carriage drive unit 12 simple and reasonable for structure; Said pan carriage drive unit 12 comprises servomotor step-down gear 12-1, chain 12-2 and sprocket wheel 12-3; Wherein servomotor step-down gear 12-1 is through the sprocket wheel 12-3 chain 12-2 that is in transmission connection, and chain 12-2 is connected with pan carriage 11 bottoms.Certainly, also can adopt motor, gear and rack drives or hydraulic oil cylinder driving mode.
Like Fig. 1 ~ 10,22,23,24, shown in 27; For top electrode 7 and drain apparatus 7-1 can be moved up and down; So that can keep best electrolytically etching distance with workpiece; Lifting support 14 and lifting drive 15 thereof also are housed on the said pan carriage 11, and said top electrode 7 is fixed on the lifting support 14 with drain apparatus 7-1.
Like Fig. 3,4,5,6,7,8,9,10,22,23,24,26, shown in 27; Move up and down for the ease of lifting support 14; Said lifting drive 15 comprises handwheel 15-1, up-down transmission case 15-2 and elevating lever 15-3; The handwheel 15-1 up-down transmission case 15-2 that is in transmission connection wherein, the up-down transmission case 15-2 elevating lever 15-3 that is in transmission connection connects elevating lever 15-3 and is connected with lifting support 14; Up-down transmission case 15-2 is fixed on the pan carriage 11, and said lifting support 14 moves with pan carriage 11 through lifting slider 16 ' and riser guide 16 and cooperates.
Like Figure 20,21,11, shown in 12; In order to fix better and location workpiece and rational in infrastructure; Said workpiece support 8-1 is plate shape and has the flat part 8-1-2 all around and the countersink 8-1-3 at middle part; Countersink 8-1-3 bottom has some fence bar 8-1-4, and the gap between the fence bar 8-1-4 constitutes the liquid passageway 8-1-1 of workpiece support 8-1.
Like Fig. 1,3,4,5,6,9,10, shown in 12; In order to collect the waste gas that produces in the electrolytically etching process; Prevent the pollution of the environment, be fitted with some downward opening first gas collection arm 5-1 on the said pan carriage 11, also there is the second gas collection arm 5-1 ' of some openings in electrolytic solution receiving tank 9 said electrolytic solution receiving tank 9 tops; The first gas collection arm 5-1 and the second gas collection arm 5-1 ' are all towards gas gathering manifold 5, and said electrolytic solution receiving tank 9 tops also are coated with flexible gas skirt 18.
Like Fig. 1, shown in 2, for can qualified discharge, prevent the pollution of the environment, said gas gathering manifold 5 is communicated with gas collection washer 16.
Like Fig. 1, shown in 2; In order to make structure of the present invention more reasonable; The present invention also comprises liquid feed device 10, supply unit 2 and electric control gear 3; Said top electrode 7, lower electrode 8 and electric control gear 3 are electrically connected with supply unit 2 respectively, and liquid feed device 10 is communicated with the flow passage 8-2 of drain apparatus 7-1 and lower electrode 8.
Like Fig. 1 ~ 10, shown in 12; Said liquid feed device 10 comprises infusion pump 10-1, liquid-storing box 10-2 and tubing 10-3; Wherein infusion pump 10-1 is contained on the liquid-storing box 10-2, and the end of tubing 10-3 is communicated with infusion pump 10-1, and the other end leads to top electrode 7 and lower electrode 8 places respectively.
Like Figure 10,12,1, shown in 2; In order to recycle electrolytic solution and homothermic electrolytic solution to be provided; Improve electrolytically etching efficient, the liquid discharge pipe 9-1 that said electrolytic solution receiving tank 9 bottoms are provided with the liquid-storing box 10-2 that leads to liquid feed device 10 is equipped with heat exchange element 4-1 in the liquid-storing box 10-2; Heat exchange element 4-1 is connected to thermostat 4, and liquid-storing box 10-2 also is connected with sedimeter 6.
Like Figure 11,12,15, shown in 16; In order to prolong the residence time of electrolytic solution on workpiece; Improve electrolytically etching efficient, liquid blocking strip 7-2 all is equipped with in the both sides parallel with pan carriage 11 travel directions of said top electrode 7, and the lower end of liquid blocking strip 7-2 extends to the respective sides place of lower electrode 8 respectively.
Like Figure 11, shown in 12, for the ease of the secure workpiece, said lower electrode 8 is provided with electro-magnet 19 or PM.
Like Fig. 3,28,29,30, shown in 31; For the lifting distance of observing lifting support 14 be convenient to lock lifting support 14; Scale 17, one holding screws 22 that are fixed with band slippage slot 17-1 on the said lifting support 14 are threaded with pan carriage 11 after passing the slippage slot 17-1 of scale 17.
Like Fig. 2,4,6,8,9,11, shown in 12, said top electrode 7 is electrically connected with supply unit 2 through corresponding cable 20 respectively with lower electrode 8,
Like Figure 14,15,16, shown in 12, said top electrode 7 is fixedly connected with lifting support 14 through being connected and installed plate 7-3.
Like Fig. 1,3,4,5,6,11,12, shown in 13; Working process of the present invention is following; Cutting die plate 21 to be etched is placed on the workpiece support 8-1 of lower electrode 8 tops; And make embedding among the countersink 8-1-3 at workpiece support 8-1 middle part of cutting die plate 21 all around, the electro-magnet 19 on the lower electrode 8 is given cutting die plate 21 suction, makes cutting die plate 21 strong fixs; Pan carriage 11 drives the top of top electrode 7 and drain apparatus 7-1 arrival cutting die plate 21, at this moment can adjust the height of lifting support 14 as required, so that make top electrode 7 lower surfaces and cutting die plate 21 upper surfaces keep suitable electrolytically etching distance; Make lower electrode 8 and top electrode 7 be with positive and negative electricity or negative, positive respectively; Liquid feed device 10 beginning electrolysis liquid, the other drain apparatus 7-1 of top electrode 7 spray electrolytic solution in the gap between cutting die plate 21 upper surfaces and the top electrode 7, simultaneously; Also flow out electrolytic solution among lower electrode 8 inside or the lateral flow passage 8-2; The liquid passageway 8-1-1 of electrolytic solution process workpiece support flows to the lower surface of cutting die plate 21, and at this moment, top electrode 7 passes through electrolytic solution and 21 conductings of cutting die plate with lower electrode 8; Pan carriage 11 drives top electrode 7 and drain apparatus 7-1 to-and-fro movement; Cutting die plate 21 upper surfaces are able to electrolytically etching, and certainly, pan carriage 11 also can geneva motion or fixed; Electrolytically etching can be removed pan carriage 11 after accomplishing, and cutting die plate 21 is taken away.

Claims (12)

1.一种金属刀模板电解蚀刻机,包括机架(1)、上电极(7)、下电极(8)和电解液收集槽(9),其中所述电解液收集槽(9)位于机架(1)上,所述下电极(8)位于电解液收集槽(9)中,其特征在于: 1. An electrolytic etching machine for metal knife templates, including a frame (1), an upper electrode (7), a lower electrode (8) and an electrolyte collection tank (9), wherein the electrolyte collection tank (9) is located on the machine On the frame (1), the lower electrode (8) is located in the electrolyte collection tank (9), which is characterized in that: a、所述机架(1)上还移动配合有平移架(11),所述上电极(7)装连在平移架(11)上,所述平移架(11)上且位于上电极(7)旁具有至少两个出液器(7-1),所述出液器(7-1)的出液口均朝向上电极(7)的底部及底面下方的空间,平移架(11)移动时,上电极(7)和出液器(7-1)能够从下电极(8)上方通过, a. The frame (1) is also equipped with a translation frame (11), the upper electrode (7) is connected to the translation frame (11), and the translation frame (11) is located on the upper electrode ( 7) There are at least two liquid outlets (7-1) on the side, and the liquid outlets of the liquid outlets (7-1) are all facing the bottom of the upper electrode (7) and the space below the bottom surface, and the translation frame (11) When moving, the upper electrode (7) and liquid outlet (7-1) can pass above the lower electrode (8), b、所述下电极(8)的上表面上设有绝缘的工件支撑件(8-1),工件支撑件(8-1)上具有液体过道(8-1-1),或者所述下电极(8)的上表面上设有若干个绝缘的工件支撑条,相邻的工件支撑条之间的间隙构成液体过道(8-1-1), b. An insulating workpiece support (8-1) is provided on the upper surface of the lower electrode (8), and a liquid channel (8-1-1) is provided on the workpiece support (8-1), or the lower electrode (8) The upper surface of the electrode (8) is provided with several insulating workpiece support bars, and the gap between adjacent workpiece support bars forms a liquid channel (8-1-1), c、所述下电极(8)内部或侧面具有通往下电极上表面的液流通道(8-2),液流通道(8-2)与所述液体过道(8-1-1)连通。 c. The inside or side of the lower electrode (8) has a liquid flow channel (8-2) leading to the upper surface of the lower electrode, and the liquid flow channel (8-2) communicates with the liquid channel (8-1-1) . 2.根据权利要求1所述的金属刀模板电解蚀刻机,其特征在于:所述机架(1)上装有平移架驱动装置(12),平移架驱动装置(12)传动连接平移架(11),所述平移架(11)通过平移滑块(13’)和平移导轨(13)与机架(1)移动配合。 2. The metal knife template electrolytic etching machine according to claim 1, characterized in that: the frame (1) is equipped with a translation frame driving device (12), and the translation frame driving device (12) is connected to the translation frame (11 ), the translation frame (11) cooperates with the frame (1) through translation sliders (13') and translation guide rails (13). 3.根据权利要求2所述的金属刀模板电解蚀刻机,其特征在于:所述平移架驱动装置(12)包括伺服电机减速机(12-1)、链条(12-2)和链轮(12-3),其中伺服电机减速机(12-1)通过链轮(12-3)传动连接链条(12-2),链条(12-2)与平移架(11)底部连接。 3. The metal knife plate electrolytic etching machine according to claim 2, characterized in that: the translation frame driving device (12) includes a servo motor reducer (12-1), a chain (12-2) and a sprocket ( 12-3), wherein the servo motor reducer (12-1) is connected to the chain (12-2) through the sprocket (12-3), and the chain (12-2) is connected to the bottom of the translation frame (11). 4.根据权利要求1所述的金属刀模板电解蚀刻机,其特征在于:所述平移架(11)上还装有升降架(14)及其升降驱动装置(15),所述上电极(7)和出液器(7-1)固定在升降架(14)上。 4. The metal knife template electrolytic etching machine according to claim 1, characterized in that: the translation frame (11) is also equipped with a lifting frame (14) and its lifting drive device (15), and the upper electrode ( 7) and the liquid outlet (7-1) are fixed on the lifting frame (14). 5.根据权利要求1所述的金属刀模板电解蚀刻机,其特征在于:所述工件支撑件(8-1)为板形并具有四周的平直部(8-1-2)和中部的沉陷部(8-1-3),沉陷部(8-1-3)底部具有若干栅栏条(8-1-4),栅栏条(8-1-4)之间的间隙构成工件支撑件(8-1)的液体过道(8-1-1)。 5. The metal knife plate electrolytic etching machine according to claim 1, characterized in that: the workpiece support (8-1) is plate-shaped and has a straight part (8-1-2) around it and a central part The sinking part (8-1-3), the bottom of the sinking part (8-1-3) has several fence bars (8-1-4), and the gaps between the fence bars (8-1-4) form the workpiece support ( 8-1) Liquid channel (8-1-1). 6.根据权利要求1所述的金属刀模板电解蚀刻机,其特征在于:所述平移架(11)上装连有若干开口朝下的第一集气支管(5-1),所述电解液收集槽(9)上方也有若干开口朝向电解液收集槽(9)内的第二集气支管(5-1’), 第一集气支管(5-1)和第二集气支管(5-1’)均通往集气总管(5),所述电解液收集槽(9)上方还覆盖有柔性集气罩(18)。 6. The metal knife template electrolytic etching machine according to claim 1, characterized in that: the translation frame (11) is equipped with a number of first gas-collecting branch pipes (5-1) with openings facing downwards, and the electrolyte There are also several openings above the collection tank (9) facing the second gas collection branch (5-1') in the electrolyte collection tank (9), the first gas collection branch (5-1) and the second gas collection branch (5- 1') lead to the gas collection main pipe (5), and the electrolyte collection tank (9) is also covered with a flexible gas collection cover (18). 7.根据权利要求6所述的金属刀模板电解蚀刻机,其特征在于:所述集气总管(5)与集气洗涤器(16)连通。 7. The metal knife template electrolytic etching machine according to claim 6, characterized in that: the gas collecting main pipe (5) communicates with the gas collecting scrubber (16). 8.根据权利要求1所述的金属刀模板电解蚀刻机,其特征在于:还包括供液装置(10)、电源装置(2)和电控装置(3),所述上电极(7)、下电极(8)和电控装置(3)分别与电源装置(2)电连接,供液装置(10)与出液器(7-1)及下电极(8)的液流通道(8-2)连通。 8. The metal knife template electrolytic etching machine according to claim 1, characterized in that it also includes a liquid supply device (10), a power supply device (2) and an electric control device (3), the upper electrode (7), The lower electrode (8) and the electric control device (3) are respectively electrically connected to the power supply device (2), and the liquid supply device (10) is connected to the liquid outlet (7-1) and the liquid flow channel (8-1) of the lower electrode (8). 2) Connectivity. 9.根据权利要求8所述的金属刀模板电解蚀刻机,其特征在于:所述供液装置(10)包括输液泵(10-1)、储液箱(10-2)和输液管(10-3),其中输液泵(10-1)装在储液箱(10-2)上,输液管(10-3)的一端与输液泵(10-1)连通,另一端分别通往上电极(7)和下电极(8)处。 9. The metal knife plate electrolytic etching machine according to claim 8, characterized in that: the liquid supply device (10) includes an infusion pump (10-1), a liquid storage tank (10-2) and an infusion tube (10 -3), wherein the infusion pump (10-1) is installed on the liquid storage tank (10-2), one end of the infusion tube (10-3) communicates with the infusion pump (10-1), and the other end leads to the upper electrode respectively (7) and lower electrode (8). 10.根据权利要求9所述的金属刀模板电解蚀刻机,其特征在于:所述电解液收集槽(9)底部设有通向供液装置(10)的储液箱(10-2)的排液管(9-1),储液箱(10-2)内装有换热元件(4-1),换热元件(4-1)连接到恒温装置(4),储液箱(10-2)还与液体过滤装置(6)相连接。 10. The metal knife template electrolytic etching machine according to claim 9, characterized in that: the bottom of the electrolyte collection tank (9) is provided with a liquid storage tank (10-2) leading to the liquid supply device (10) The drain pipe (9-1), the liquid storage tank (10-2) is equipped with a heat exchange element (4-1), and the heat exchange element (4-1) is connected to the thermostat (4), the liquid storage tank (10- 2) It is also connected with the liquid filter device (6). 11.根据权利要求1所述的金属刀模板电解蚀刻机,其特征在于:所述上电极(7)的与平移架(11)移动方向平行的两侧均装有挡液条(7-2),挡液条(7-2)的下端分别延伸到下电极(8)的相应两侧处。 11. The metal knife template electrolytic etching machine according to claim 1, characterized in that: the upper electrode (7) is equipped with a liquid barrier (7-2) on both sides parallel to the moving direction of the translation frame (11). ), the lower ends of the liquid retaining strip (7-2) respectively extend to the corresponding two sides of the lower electrode (8). 12.根据权利要求1所述的金属刀模板电解蚀刻机,其特征在于:所述下电极(8)上设有电磁铁(19)或永久磁铁。 12. The metal knife template electrolytic etching machine according to claim 1, characterized in that: the lower electrode (8) is provided with an electromagnet (19) or a permanent magnet.
CN201210130711.1A 2012-04-29 2012-04-29 Electrical etching machine of metal cutter template Expired - Fee Related CN102628177B (en)

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