CN102623647A - Manufacturing method and substrate for organic electroluminescence device - Google Patents
Manufacturing method and substrate for organic electroluminescence device Download PDFInfo
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- CN102623647A CN102623647A CN2012100984923A CN201210098492A CN102623647A CN 102623647 A CN102623647 A CN 102623647A CN 2012100984923 A CN2012100984923 A CN 2012100984923A CN 201210098492 A CN201210098492 A CN 201210098492A CN 102623647 A CN102623647 A CN 102623647A
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- 239000000758 substrate Substances 0.000 claims description 78
- 239000011521 glass Substances 0.000 claims description 68
- 239000010410 layer Substances 0.000 claims description 46
- 238000005401 electroluminescence Methods 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 12
- 238000013459 approach Methods 0.000 claims description 11
- 239000012044 organic layer Substances 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
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- 244000137852 Petrea volubilis Species 0.000 claims description 4
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- 238000000576 coating method Methods 0.000 claims description 4
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- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention relates to a manufacturing method and a substrate for an organic electroluminescence device. The manufacturing method comprises the following steps of: polishing the surface of at least one side of a glass substrate of the organic electroluminescence device substrate into a rough surface; passivating the rough surface by using glass etching liquid, and forming an arc groove on the rough surface; and arranging a flat layer, a conductive layer, an organic layer and a cathode at the inner side of the glass substrate. The manufacturing method and the substrate for the organic electroluminescence device have the advantages of simple manufacturing process; the light emitting efficiency of an OLED (Organic Light Emitting Diode) device can be greatly improved, and complicated and expensive equipment are not needed, so that the manufacturing method and the substrate for the organic electroluminescence device are particularly suitable for large-scale manufacture, the production cost can be effectively reduced, and the output can be increased.
Description
Technical field
The present invention relates to the manufacturing approach and the substrate of organic electroluminescence device (OLED).
Background technology
Organic electroluminescence device (OLED) has advantages such as wide visual angle, response is fast, colour gamut is wide during as display device, has characteristics such as complanation, no mercury pollution, high efficiency during as illuminating device, is the development trend that shows and throw light on of future generation.But in typical OLED device architecture, the refractive index of each film material is roughly: glass 1.46, ITO (tin indium oxide): 1.85, organic layer: 1.75.Because the refractive index of each film material is inconsistent, the wide part that makes the reflection back send through the device emission layer is limited in can not effectively outputing in the device device outer (being that the bright dipping coupling efficiency is low).
According to of dissemination and the optical computing of its light that sends, can be divided into (1) external schema: promptly shine airborne light, account for 17.93% inside and outside of device; (2) substrate pattern:, account for 26.93% promptly in glass substrate and air interface generation total reflection and be limited in the light in the substrate; (3) waveguide mode: promptly at glass substrate/metal electrode and ITO/ organic layer interface total reflection takes place and be limited in the light of ITO/ organic layer, account for 55.13%, the light that is limited to is finally because of absorption disappear (accounting for 82.06%).It is exactly the ratio of external schema in all patterns that what is called goes out coupling efficiency.
Be that the typical oled light of substrate propagates with plate glass shown in Figure 1 be example, light sends from metallic cathode 6, and the conductive layer 4 that constitutes through organic layer 5 and ITO (tin indium oxide) is through the air in the glass substrate 1 directive external world.If the incidence angle of light during greater than the critical angle (42.8 °) of glass-air, will be returned in the device by total reflection, this part light accounts for entire device and sends 30% of light.Equally, if from the light of ITO directive glass, incidence angle is during greater than the critical angle (about 44～54 °) of ITO-glass, and light will be by the conductive layer 4 and organic layer 5 of whole reflected back ITO, and this part light accounts for entire device and sends about 51% of light.The light that is reflected back toward will come back reflective, refraction between each rete, finally can disappear because of absorption.Output to outside the device less than 20% luminous energy and only have an appointment.
Be to improve the coupling efficiency of OLED device, to different light limit mechanism, developed the light even summation efficient that several different methods improves OLED.People such as H.J.Peng (SID; 04, DIGEST, 11.4) reported that with glass of high refractive index (n=1.7) be substrate; Utilize photo etching process to make microlens array at substrate back; Glass of high refractive index has increased the critical angle between ITO-glass, and lenticular hemispherical interface has reduced the incidence angle of light from glass to the air, thereby can improve light extraction efficiency.Although the optical coupling factor of this device improves 1.65 times than the OLED device of standard, increased complicated photo etching process, increased the difficulty of producing.Other method includes people such as M.Kitamur (Jpn.J.Appl.Phys., Part14,2844; 2005) between organic layer and substrate, pass through to insert people (J.Appl.Phys., vol.80 such as photonic crystal (photonic crystal) and A.Dodablapur; No.12, pp.6954-6964, Dec.1996); Utilize microcavity (microcavity) structure to improve and coupling efficiency; Although these class methods have improved light extraction efficiency to a certain extent, complex structure, and it is serious with the angle variation to go out light color.Chinese patent CN101647134A discloses low-index material that a kind of utilization is lower than substrate or organic material refractive index and has improved by limit with the organic emitter region of rasterizing and between ITO/ organic material and negative electrode, go out coupling efficiency; Bonded substrate back of the body surface micro lens arra again, the coupling efficiency that goes out of this device is 2～3 times of standard OLED.But the preparation of the grid of intensive low-index material, photoetching process has increased process complexity on the one hand, has also reduced the efficient lighting area of panel on the other hand.
Summary of the invention
Complex process, optical coupling rate to above-mentioned appearance be low, go out light color with problems such as visual angle change; The invention provides a kind of manufacturing approach and substrate of organic electroluminescence device; With simple technology, improve the light extraction efficiency of OLED device, do not need cost and complex equipment; Be fit to large-area manufacturing, can effectively reduce production costs and increase output.
The manufacturing approach of organic electroluminescence device of the present invention comprises:
At least one side surface of the glass substrate of organic electroluminescence device substrate is polished into rough surface, and roughness Ra is 0.1～100 μ m;
With the described rough surface of glass etching liquid passivation, and on described rough surface, form the cambered surface groove;
In the inboard of glass substrate flatness layer, conductive layer, organic layer and negative electrode are set.
Usually can form a plurality of uneven cambered surface grooves on the surface of glass substrate.When light incides institute's glass substrate surperficial, because its surperficial cambered surface grooves contact face has reduced the incidence angle of light, thereby can make the light of original substrate pattern become the light of external schema, shine in the external world; The light that belongs to waveguide mode; Be reflected back toward glass substrate inside on the surface of cambered surface groove; Because the asymmetry (asymmetry of interface, both sides groove at interface, glass substrate both sides; Or the asymmetry of the fluted side plane of a side), light shuttles in device and once will be converted into external schema light.Thereby improved the coupling efficiency that of organic electroluminescence device.Through the contrast that l-G simulation test goes out coupling efficiency, the glass substrate both sides have the glass substrate inboard of cambered surface groove＞only to have that the cambered surface groove＞only there is the cambered surface groove in the glass substrate outside.
Concrete, if only at the inner surface of glass substrate or simultaneously at surfaces externally and internally formation matsurface, described matsurface is being provided with flatness layer formation before.If only the outer surface in glass substrate forms matsurface, this matsurface also can have OLED after vapor deposition, encapsulation are accomplished, to form.
Further, the polishing or the device of abrading glass substrate can have the object of particle for sand paper, emery wheel, diamond or other, and the diameter of polishing object surfaces coarse particles is 5～100 μ m, is preferably 25 μ m.
Further, when with glass etching liquid the glass substrate surface passivation being become rough surface, the concentration of glass etching liquid is 5%～40%, preferably 10%.The component of glass etching liquid can be the hydrofluoric acid and the deionized water of 10% concentration, also can be phosphoric acid or other glass etching liquid, and 60 seconds time of passivation is advisable under the normal temperature.
Concrete, described flatness layer forms through a kind of mode in coating, sol-gel, sputter or the deposition, and wherein deposition can be physics or chemical vapour deposition (CVD).Because organic luminescent device has certain requirement to the roughness of substrate surface; Require roughness Ra≤15
(dust) of conductive layer surface; The internal electric field that coarse conductive layer surface can influence OLED distributes; The spike of conductive layer surface can be at the high electric field of the local formation of device, and exciton is dissociated becomes both positive and negative polarity, and high electric field will speed up the deterioration of organic material; Thereby reduce efficient, the stability of OLED, even make component failure.Described exciton is a kind of basic elementary excitation in the solid, is the electron-hole pair that under the effect of Coulomb attraction, is being fettered mutually by positron and negatron.The effect of flatness layer is exactly in order to make relatively flat between glass substrate and the conductive layer, and so-called here planarization is not that contact surface is definitely smooth, and the surface after smooth has suitable fluctuating, more helps the raising that OLED goes out coupling efficiency.Sol-gel process prepares the film material and belongs to a kind of in the wet chemistry method.Generally refer to metallic compound (comprising metal alkoxide and metal inorganic salt) and catalyst, chelating agent and water etc. are processed colloidal sol; Through whirl coating, spraying or impregnating method alkoxide sol is coated in then and makes film on the substrate; Hydrolysis and polymerization take place after absorbing airborne moisture in alkoxide; Become gel gradually, the process of handling through super-dry, sintering etc. at last.
The present invention also provides a kind of substrate that passes through the organic electroluminescence device of said method manufacturing; Include glass substrate; Inboard in glass substrate is provided with conductive layer, and at least one side of glass substrate is a rough surface, on described rough surface, is provided with the cambered surface groove.Usually can be provided with a plurality of uneven cambered surface grooves on the surface of glass substrate.
Preferably, for better depositing conducting layer, between glass substrate and conductive layer, be provided with the flatness layer that constitutes by the electrically conducting transparent material.Here so-called smooth be not that contact surface is definitely smooth, surface, smooth back should have suitable roughness, this more helps the raising of device light extraction efficiency.
Further, in order further to eliminate the light reflection between flatness layer and the conductive layer, flatness layer can preferentially use have high index of refraction, low light absorbing material, be preferably Ta
2O
5Or photoresist, also can use other electrically conducting transparent material, ITO (tin indium oxide) etc. is preferably arranged.
Test is learnt, the manufacturing approach of organic electroluminescence device of the present invention and substrate, and manufacture craft is simple; Can significantly improve the light extraction efficiency of OLED device; And do not need cost and complex equipment, and be particularly suitable for large-area manufacturing, can effectively reduce production cost and increase output.
Below in conjunction with embodiment, foregoing of the present invention is remake further detailed description by the accompanying drawing illustrated embodiment.But should this be interpreted as that the scope of the above-mentioned theme of the present invention only limits to following instance.Do not breaking away under the above-mentioned technological thought situation of the present invention, various replacements or change according to ordinary skill knowledge and customary means are made all should comprise within the scope of the invention.
Description of drawings
Fig. 1 is the structural representation of conventional substrate.
Fig. 2 is a kind of structural representation of the substrate of organic electroluminescence device of the present invention.
Fig. 3 is the rough surface microscope figure of glass substrate among Fig. 2.
Fig. 4 a is for having the front microscope figure of the glass substrate of cambered surface groove among Fig. 2.
Fig. 4 b is for having the side microscope figure of the glass substrate of cambered surface groove among Fig. 2.
Fig. 5 is the bright dipping sketch map of Fig. 2.
Embodiment
Embodiment 1:
The manufacturing approach of organic electroluminescence device of the present invention as shown in Figure 2 comprises:
According to the direction of beam projecting, be disposed with negative electrode 6, organic layer 5, conductive layer 4, flatness layer 3 and glass substrate 1 from inside to outside.
Use sand paper or emery wheel that the inside and outside both side surface of the glass substrate 1 of organic electroluminescence device substrate all is polished into the rough surface that roughness Ra is 0.1～100 μ m, shown in the rough surface microscope figure of Fig. 3.Matsurface formed before flatness layer 3 is set.The coarse particles diameter of sand paper or wheel face is 25 μ m.
With the hydrofluoric acid of total concentration 10% and the mixed liquor of deionized water, the described rough surface of passivation at normal temperatures 60 seconds forms cambered surface groove 2 on described rough surface.Fig. 4 a has demonstrated the front microscope figure of the glass substrate 1 that has cambered surface groove 2, and Fig. 4 b has demonstrated the side microscope figure of Fig. 4 a, and the edge of the white portion among Fig. 4 b has demonstrated the concavity structure that differs in size, and is cambered surface groove 2.
Material character according to flatness layer 3 uses suitable depositing operation to form; Like coating, sol-gel, sputter or physical/chemical vapour deposition; The effect of flatness layer 3 is exactly in order to make relatively flat between glass substrate 1 and the conductive layer 4; Here so-called smooth be not that contact surface is definitely smooth, the surface after smooth has suitable fluctuating, more helps the raising that OLED goes out coupling efficiency.Form conductive layer 4 through the sputtering technology that has patterned mask again.Include a plurality of sublayers in the organic layer 5, include hole injection layer, transport layer usually, luminescent layer, electron injecting layer and transport layer, the normally opaque metallic reflector of negative electrode 6.
Embodiment 2:
The substrate of organic electroluminescence device according to embodiment 1 manufacturing as shown in Figure 2 includes glass substrate 1, the preferential glass with high index of refraction that uses of light effect for strengthening, and considers cost factor, uses common soda glass in the present embodiment.Be provided with flatness layer 3 and conductive layer 4 in the inboard of glass substrate 1, flatness layer 3 uses have high index of refraction, low light absorbing Ta2O5 forms transparency conducting layer, and conductive layer 4 is for sputtering at ITO (tin indium oxide) layer of flatness layer 3 inner surface 200nm thickness.All polish and be on described rough surface, to be provided with cambered surface groove 2 by rough surface in the inside and outside both sides of glass substrate 1.Usually can be provided with a plurality of uneven cambered surface grooves 2 on the surface of glass substrate 1.
With shown in Figure 5 is example, and the castering action that goes out coupling efficiency of the substrate of organic electroluminescence device of the present invention is described.The parallel dotted line in glass substrate 1 inside and outside both sides is represented the surface of common smooth glass among Fig. 5, glass substrate 1 surface among cambered surface groove 2 expression the present invention of solid line; Dotted arrow representes to incide the light route of common smooth glass surface, and solid line representes to incide the light route on cambered surface groove of the present invention 2 surfaces.When light incides institute's glass substrate 1 surperficial, because the contact-making surface of its surperficial cambered surface groove 2 has reduced the incidence angle of light, thereby can make the light of original substrate pattern become the light of external schema, shine in the external world; The light that belongs to waveguide mode; Be reflected back toward glass substrate 1 inside on the surface of cambered surface groove 2; Because the asymmetry (asymmetry of interface, both sides cambered surface groove 2) at interface, glass substrate 1 both sides, light shuttles in device and once will be converted into external schema light.Thereby improved the coupling efficiency that of organic electroluminescence device.
OLED device to glass substrate 1 with rough surface carries out the optics l-G simulation test, only find a outer surface in glass substrate 1 carry out coarse with form cambered surface groove 2, the enhancer that goes out coupling efficiency of device
(L
0, L
1Under same test condition, the luminous flux of being surveyed with the processing back before handling) greater than 40%, test with actual OLED device, at 20mA/cm
2Condition under, the actual measurement enhancer be 46.54%; Also learn through l-G simulation test, the rough inner surfaceization of glass substrate 1 with form cambered surface groove 2, enhancer is greater than 50%, and increases with the increase of roughness; On the inside and outside surface of glass substrate 1 simultaneously roughening with form cambered surface groove 2, enhancer is greater than 100%, the raising of highly significant luminous flux.
Claims (9)
1. the manufacturing approach of organic electroluminescence device is characterized by and comprises:
At least one side surface of the glass substrate (1) of organic electroluminescence device substrate is polished into rough surface;
With the described rough surface of glass etching liquid passivation, and on described rough surface, form cambered surface groove (2);
Flatness layer (3), conductive layer (4), organic layer (5) and negative electrode (6) are set in the inboard of glass substrate (1).
2. the manufacturing approach of organic electroluminescence device as claimed in claim 1 is characterized by: if only at the inner surface of glass substrate (1) or form matsurface at surfaces externally and internally simultaneously, described matsurface forms in that flatness layer (3) is set before.
3. the manufacturing approach of organic electroluminescence device as claimed in claim 1 is characterized by: the device of polishing glass substrate (1) is sand paper, emery wheel or diamond.
4. the manufacturing approach of organic electroluminescence device as claimed in claim 1, it is characterized by: the concentration of said glass etching liquid is 5%～40%.
5. like the manufacturing approach of the described organic electroluminescence device of one of claim 1 to 4, it is characterized by: described flatness layer (3) forms through a kind of mode in coating, sol-gel, sputter or the deposition.
6. the substrate of the organic electroluminescence device made of the said method of claim 1; Include glass substrate (1); Be provided with conductive layer (4) in the inboard of glass substrate (1), it is characterized by: at least one side of glass substrate (1) is a rough surface, on described rough surface, is provided with cambered surface groove (2).
7. the substrate of organic electroluminescence device as claimed in claim 6 is characterized by: between glass substrate (1) and conductive layer (4), be provided with the flatness layer (3) that is made up of the electrically conducting transparent material.
8. the substrate of organic electroluminescence device as claimed in claim 6, it is characterized by: the component of described flatness layer (3) is Ta
2O
5Or photoresist.
9. the substrate of organic electroluminescence device as claimed in claim 8, it is characterized by: described electrically conducting transparent material is ITO.
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| CN103681484A (en) * | 2012-08-31 | 2014-03-26 | 三星显示有限公司 | Flexible display device manufacturing method and carrier substrate for manufacturing same |
| CN103700782A (en) * | 2013-12-26 | 2014-04-02 | 合肥京东方光电科技有限公司 | OLED (organic light emitting diode) display panel and preparing method thereof |
| CN103887237A (en) * | 2014-03-17 | 2014-06-25 | 京东方科技集团股份有限公司 | Array substrate, preparation method thereof and organic electroluminescence display device |
| CN104823296B (en) * | 2012-11-09 | 2017-05-17 | Oled工厂有限责任公司 | Light emitting device with improved internal out-coupling and method of providing same |
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| CN103887237A (en) * | 2014-03-17 | 2014-06-25 | 京东方科技集团股份有限公司 | Array substrate, preparation method thereof and organic electroluminescence display device |
| CN109196715A (en) * | 2016-05-30 | 2019-01-11 | 瑞士十二公司 | Waveguide including thick conductive layer |
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| CN109196715B (en) * | 2016-05-30 | 2021-04-20 | 瑞士十二公司 | Waveguide comprising thick conductive layer |
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