CN102612188B - Luminescent device embedded with self-assembled air-vent photonic crystal film and preparation method thereof - Google Patents
Luminescent device embedded with self-assembled air-vent photonic crystal film and preparation method thereof Download PDFInfo
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- 238000001771 vacuum deposition Methods 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 2
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Abstract
一种嵌入自组装光子晶体薄膜的发光器件,由玻璃层、ITO层、空气孔光子晶体层和金属阴电极叠加构成,其中空气孔光子晶体层由发光材料和填满其中的空气孔构成并在空气孔表面设有发光材料层;其制备方法是:首先用数值模拟方法计算发光器件中空气孔的直径,并选取与空气孔直径相等的聚苯乙烯纳米微球或聚甲基丙烯酸甲酯纳米微球;在ITO玻璃上自组装光子晶体结构;在纳米微球薄膜层上填充发光材料,经高温除去纳米微球形成空气孔,最后蒸镀金属阴电极。本发明的优点是:该光电器件嵌入一层光子晶体结构,利用光子带隙提高垂直方向的出光,减少全内反射,提高发光器件的发光效率;该制备方法工艺简单、成本低,有利于实现工业化生产。
A light-emitting device embedded in a self-assembled photonic crystal film, which is composed of a glass layer, an ITO layer, an air-hole photonic crystal layer and a metal cathode electrode, wherein the air-hole photonic crystal layer is composed of a light-emitting material and air holes filled in it The surface of the air hole is provided with a luminescent material layer; the preparation method is as follows: firstly, the diameter of the air hole in the light-emitting device is calculated by numerical simulation method, and polystyrene nanospheres or polymethyl methacrylate nanospheres having the same diameter as the air hole are selected. Microspheres; self-assembled photonic crystal structure on ITO glass; filling the luminescent material on the nano-microsphere film layer, removing the nano-microspheres at high temperature to form air holes, and finally evaporating metal cathode electrodes. The invention has the advantages that: the optoelectronic device is embedded in a layer of photonic crystal structure, and the photonic bandgap is used to increase the light output in the vertical direction, reduce total internal reflection, and improve the luminous efficiency of the light emitting device; the preparation method is simple in process and low in cost, and is conducive to realizing Industrial production.
Description
技术领域 technical field
本发明属于平板发光器件领域,具体涉及一种嵌入自组装空气孔光子晶体薄膜的发光器件及其制备方法。The invention belongs to the field of flat light-emitting devices, and in particular relates to a light-emitting device embedded in a self-assembled air hole photonic crystal film and a preparation method thereof.
背景技术 Background technique
光子晶体是一种介电常数在空间周期性变化的电介质材料,在其中传播的光波的色散曲线将成带状结构,带与带之间出现类似于半导体禁带的光子带隙(photonic band gap),频率位于带隙中的光不能在光子晶体中传播。A photonic crystal is a dielectric material whose dielectric constant changes periodically in space. The dispersion curve of the light wave propagating in it will form a band structure, and a photonic band gap (photonic band gap) similar to the semiconductor band gap appears between the bands. , light whose frequency lies in the band gap cannot propagate in the photonic crystal.
发光二极管(Light Emitting Diode,LED)因其小体积、高效能以及长寿命等特点,日益成为吸引人的传统光源替代品。高亮度LED一直以来都是人们追求的目标。为了达到高亮度,必须提高LED的内量子效率和外量子效率。借助先进的制造工艺可以显著提高内量子效率,而外量子效率却因为全反射的缘故,难以得到有效的提高。光子晶体的周期性结构可以造成布拉格散射,进而减少全反射,同时还可以利用光子晶体的带隙将LED中的导模引导出来,提高外量子效率。因此,如何在LED中利用光子晶体以提高发光效率,已成为国内外研究的热点之一。光子晶体提升电致发光器件发光效率的主要机制有两个:一为利用表面周期性结构造成的布拉格散射,以减少全反射情形的发生;二为利用光子晶体能隙将传导态引导出来以提升外部量子效应。Light Emitting Diode (LED) is increasingly becoming an attractive alternative to traditional light sources due to its small size, high efficiency, and long life. High-brightness LEDs have always been the goal pursued by people. In order to achieve high brightness, the internal quantum efficiency and external quantum efficiency of LED must be improved. With the help of advanced manufacturing technology, the internal quantum efficiency can be significantly improved, but the external quantum efficiency is difficult to be effectively improved because of total reflection. The periodic structure of photonic crystals can cause Bragg scattering, thereby reducing total reflection. At the same time, the band gap of photonic crystals can be used to guide the guided mode in LEDs to improve external quantum efficiency. Therefore, how to use photonic crystals in LEDs to improve luminous efficiency has become one of the hot spots of research at home and abroad. There are two main mechanisms for photonic crystals to improve the luminous efficiency of electroluminescent devices: one is to use the Bragg scattering caused by the surface periodic structure to reduce the occurrence of total reflection; the other is to use the photonic crystal energy gap to guide the conduction state out to improve External Quantum Effects.
自组装法是制备光子晶体的一种简单有效的方法,由于自组装光子晶体的晶格常数通常在亚微米量级,是制备可见光及近红外波段光子晶体的一条重要途径。在本发明借助自组装法制备单层纳米微球胶体晶体薄膜,结合数值模拟计算出最佳参数,将按设计制备的胶体晶体薄膜嵌入发光器件中,利用光子晶体薄膜提高发光器件的发光效率。The self-assembly method is a simple and effective method to prepare photonic crystals. Because the lattice constant of self-assembled photonic crystals is usually on the submicron scale, it is an important way to prepare photonic crystals in the visible and near-infrared bands. In the present invention, a single-layer nano-microsphere colloidal crystal film is prepared by self-assembly method, the optimal parameters are calculated in combination with numerical simulation, the colloidal crystal film prepared according to the design is embedded in a light-emitting device, and the photonic crystal film is used to improve the luminous efficiency of the light-emitting device.
发明内容 Contents of the invention
本发明的目的是针对LED普遍存在发光效率低的问题,提供一种嵌入自组装空气孔光子晶体薄膜的发光器件及其制备方法,在该光电器件中嵌入一层光子晶体结构,利用光子带隙提高垂直方向的出光,减少全内反射,提高发光器件的发光效率。The purpose of the present invention is to address the common problem of low luminous efficiency of LEDs, to provide a light-emitting device embedded in a self-assembled air-hole photonic crystal film and its preparation method. A layer of photonic crystal structure is embedded in the optoelectronic device to utilize the The light output in the vertical direction is improved, the total internal reflection is reduced, and the luminous efficiency of the light-emitting device is improved.
本发明的技术方案:Technical scheme of the present invention:
一种嵌入自组装空气孔光子晶体薄膜的发光器件,由玻璃层、ITO层、空气孔光子晶体层和金属阴电极叠加构成,其中空气孔光子晶体层由发光材料和填满其中的空气孔构成并在空气孔表面设有一层厚度为50-200纳米的发光材料层,ITO层厚度为100-200纳米,空气孔光子晶体层厚度为100纳米-1微米,金属阴电极的厚度为100-200纳米。A light-emitting device embedded in a self-assembled air-hole photonic crystal film, which is composed of a glass layer, an ITO layer, an air-hole photonic crystal layer and a metal cathode electrode, wherein the air-hole photonic crystal layer is composed of a light-emitting material and air holes filled therein And there is a layer of luminescent material layer with a thickness of 50-200 nanometers on the surface of the air hole, the thickness of the ITO layer is 100-200 nanometers, the thickness of the photonic crystal layer of the air hole is 100 nanometers-1 micron, and the thickness of the metal cathode electrode is 100-200 nanometers. Nano.
所述发光材料为硫化铅、硫化锌或氧化锌。The luminescent material is lead sulfide, zinc sulfide or zinc oxide.
所述金属阴电极为铝、银或金。The metal cathode is aluminum, silver or gold.
一种所述嵌入自组装空气孔光子晶体薄膜的发光器件的制备方法,步骤如下:A method for preparing a light-emitting device embedded in a self-assembled air hole photonic crystal film, the steps are as follows:
1)利用开源软件MPB计算光子晶体材料的能带结构:首先用数值模拟方法计算出要制备的发光器件中光子结构带隙的位置ωmin-ωmax,其中ωmin为带隙最低位置,ωmax为带隙最高位置,得到带隙位置平均值ωm=1/2(ωmax-ωmin),已知器件发射光谱峰值为λ,由公式ωm=a/λ计算出光子晶体晶格常数a,即空气孔的直径,并选取与空气孔直径相等的聚苯乙烯纳米微球或聚甲基丙烯酸甲酯纳米微球;1) Use the open source software MPB to calculate the energy band structure of the photonic crystal material: first use the numerical simulation method to calculate the position ω min -ω max of the photonic structure band gap in the light-emitting device to be prepared, where ω min is the lowest position of the band gap, ω max is the highest position of the bandgap, and the average value of the bandgap position is ω m = 1/2(ω max -ω min ), and the peak emission spectrum of the device is known to be λ, and the photonic crystal lattice is calculated by the formula ω m = a/λ The constant a is the diameter of the air hole, and select polystyrene nanospheres or polymethyl methacrylate nanospheres equal to the diameter of the air hole;
2)在预清理的ITO玻璃上自组装光子晶体结构:自组装法是将上述纳米微球超声分散在无水乙醇溶液中形成纳米微球的乙醇悬浮液,该悬浮液的质量百分比浓度为0.5-3%,把两块ITO玻璃叠放在一起,在两片ITO玻璃片之间的一端放入一块厚度为0.2毫米的玻璃垫片,然后将制备好的悬浮液注入两ITO玻璃片之间,在恒温30摄氏度的干燥箱中静放2天后,即可在下面的一块ITO玻璃表面得到单层自组装的纳米微球薄膜;2) Self-assembled photonic crystal structure on pre-cleaned ITO glass: the self-assembly method is to ultrasonically disperse the above-mentioned nano-microspheres in anhydrous ethanol solution to form an ethanol suspension of nano-microspheres, and the mass percentage concentration of the suspension is 0.5 -3%, stack two pieces of ITO glass together, put a glass gasket with a thickness of 0.2 mm at one end between the two ITO glass pieces, and then inject the prepared suspension between the two ITO glass pieces , after 2 days in a drying oven at a constant temperature of 30 degrees Celsius, a single-layer self-assembled nano-microsphere film can be obtained on the surface of a piece of ITO glass below;
3)电致发光器件发光层和阴电极的制备:在纳米微球薄膜层上采用真空蒸发方法或旋涂方法填充发光材料,形成纳米微球薄膜与发光材料的复合层,然后在250-450℃下保温2-3小时,以除去纳米微球形成空气孔,最后在空气孔光子晶体层上蒸镀金属阴电极。3) Preparation of the light-emitting layer and negative electrode of the electroluminescence device: on the nano-microsphere thin film layer, vacuum evaporation method or spin coating method is used to fill the light-emitting material to form a composite layer of the nano-microsphere film and the light-emitting material, and then in 250-450 The temperature is kept at ℃ for 2-3 hours to remove the air holes formed by the nanometer microspheres, and finally the metal cathode electrode is evaporated on the photonic crystal layer of the air holes.
本发明的原理与依据:Principle and basis of the present invention:
在光子晶体中,折射率是周期变化的,其周期大小在光波长量级。当光在光子晶体中传播时,受到周期性散射会出现光子禁带,频率落在光子带隙内的光子将不能传播。通过改变空气孔的大小,光子晶体晶格常数发生变化,带隙发生变化,可以对不同的发光材料进行限制其水平方向出光,使更多的光从垂直基底方向发射出来,提高了器件的出光效率和方向性。In photonic crystals, the refractive index changes periodically, and its period size is on the order of the wavelength of light. When light propagates in photonic crystals, photon band gap will appear due to periodic scattering, and photons whose frequency falls within the photonic band gap will not be able to propagate. By changing the size of the air hole, the lattice constant of the photonic crystal changes, and the band gap changes, which can limit the light output in the horizontal direction of different luminescent materials, so that more light can be emitted from the direction vertical to the substrate, and the light output of the device can be improved. efficiency and directionality.
本发明的优点是:该光电器件嵌入一层空气孔光子晶体结构,利用光子带隙提高垂直方向的出光,减少全内反射,提高发光器件的发光效率,可应用于无机发光器件或有机电致发光器件;该制备方法工艺简单、易于实施、成本低,有利于实现工业化生产。The advantages of the present invention are: the optoelectronic device is embedded in a layer of air hole photonic crystal structure, and the photonic band gap is used to improve the light output in the vertical direction, reduce total internal reflection, and improve the luminous efficiency of the light emitting device, which can be applied to inorganic light emitting devices or organic electroluminescent devices. A light-emitting device; the preparation method is simple in process, easy to implement and low in cost, and is conducive to realizing industrialized production.
附图说明 Description of drawings
附图为该发光器件结构示意图。The accompanying drawing is a structural schematic diagram of the light emitting device.
图中:1.玻璃层 2.ITO层 3.空气孔 4.发光材料In the figure: 1. Glass layer 2. ITO layer 3. Air holes 4. Luminescent material
5.金属阴电极5. Metal cathode electrode
具体实施方式 Detailed ways
实施例:Example:
一种嵌入自组装空气孔光子晶体薄膜的发光器件,如附图所示,由玻璃层1、ITO层2、空气孔光子晶体层和金属阴电极5叠加构成,其中空气孔光子晶体层由发光材料4和填满其中的空气孔3构成并在空气孔表面设有一层厚度为100纳米的发光材料层,ITO层2厚度为180纳米,空气孔光子晶体层厚度为540纳米,金属阴电极5的厚度为150纳米。A light-emitting device embedded in a self-assembled air-hole photonic crystal film, as shown in the accompanying drawing, is composed of a glass layer 1, an ITO layer 2, an air-hole photonic crystal layer and a metal cathode electrode 5, wherein the air-hole photonic crystal layer consists of a light-emitting The material 4 and the air hole 3 filled therein constitute and are provided with a luminescent material layer with a thickness of 100 nm on the surface of the air hole, the thickness of the ITO layer 2 is 180 nm, the thickness of the photonic crystal layer of the air hole is 540 nm, and the metal cathode electrode 5 The thickness is 150 nm.
一种所述嵌入自组装空气孔光子晶体薄膜的发光器件的制备方法,步骤如下:A method for preparing a light-emitting device embedded in a self-assembled air hole photonic crystal film, the steps are as follows:
1)利用开源软件MPB计算由PbS(折射率为3.912)形成的空气孔二维光子晶体能带结构,带隙频率范围从到0.175到0.358,得到不同PbS填充比的带隙值见表2,取ωm=0.267,针对PbS的发光峰为1100纳米,计算出光子晶体晶格常数a,即空气孔的直径为440纳米,并选取与空气孔直径相等的聚苯乙烯纳米微球(PS);1) Use the open source software MPB to calculate the energy band structure of the air-hole two-dimensional photonic crystal formed by PbS (refractive index 3.912). Get ω m =0.267, be 1100 nanometers for the luminescence peak of PbS, calculate the photonic crystal lattice constant a, promptly the diameter of air hole is 440 nanometers, and select the polystyrene nano-microsphere (PS) equal to air hole diameter ;
2)把ITO玻璃切成12×30mm的玻璃片,用H2SO4与H2O2的体积比为4∶1的混合溶液在80℃下浸泡10min,然后用去离子水冲洗干净在预清理的ITO玻璃上,利用方法制备直径d为440纳米的单分散PS微球,微球粒径大小偏差小于5%,方法是将纳米微球超声分散在无水乙醇溶液中形成纳米微球的乙醇悬浮液,该悬浮液的质量百分比浓度为1%,在超声仪中超声,使其均匀分散,得到单分散的悬浮液,把两块ITO玻璃叠放在一起,在两片ITO玻璃片之间的一端放入一块厚度为0.2毫米的玻璃垫片,然后将制备好的悬浮液注入两ITO玻璃片之间,在恒温30摄氏度的干燥箱中静放2天后,即可在下面的一块ITO玻璃表面自组装得到单层自组装的纳米微球薄膜(所述自组装纳米微球单层薄膜采用的是文献T.Yamasaki and T.Tsutsui,″Fabrication and optical properties oftwo-dimensional ordered arrays of silica microspheres,″Japanese Journalof Applied Physics,vol.38,p.5916,1999.所公开的方法);2) Cut the ITO glass into 12×30mm glass pieces, soak them in a mixed solution of H 2 SO 4 and H 2 O 2 with a volume ratio of 4:1 at 80°C for 10 min, and then rinse them with deionized water. Clean up the ITO glass, using The method prepares monodisperse PS microspheres with a diameter d of 440 nanometers, and the particle size deviation of the microspheres is less than 5%. The method is to ultrasonically disperse the nanospheres in an absolute ethanol solution to form an ethanol suspension of the nanospheres. The mass percent concentration is 1%, and it is ultrasonically dispersed in an ultrasonic instrument to obtain a monodisperse suspension. Two pieces of ITO glass are stacked together, and a piece of thick ITO glass is placed at one end between the two ITO glass pieces. 0.2mm glass spacer, and then inject the prepared suspension between two ITO glass sheets, and after standing for 2 days in a drying oven at a constant temperature of 30 degrees Celsius, a monolayer can be self-assembled on the surface of the ITO glass below Self-assembled nano-microsphere film (the self-assembled nano-microsphere monolayer film adopts literature T.Yamasaki and T.Tsutsui, "Fabrication and optical properties of two-dimensional ordered arrays of silica microspheres," Japanese Journal of Applied Physics, vol.38, p.5916, 1999. disclosed method);
3)电致发光器件发光层和阴电极的制备:在匀胶机上把PbS纳米晶填充到PS胶体晶体薄膜间隙中,并在PS胶体晶体薄膜表面形成50纳米厚的PbS层,将长有PS胶体晶体薄膜的玻璃片放置在马弗炉中,以升温速度0.2℃/min升温至250℃并保温3小时除去PS模板形成空气孔,得到单层PbS阵列材料,然后用电子束蒸发一层厚度为100纳米的金属铝薄膜作为器件阴电极。3) Preparation of the light-emitting layer and negative electrode of the electroluminescent device: PbS nanocrystals are filled in the gap of the PS colloidal crystal film on the homogenizer, and a 50-nanometer thick PbS layer is formed on the surface of the PS colloidal crystal film, and PS will grow. The glass sheet of the colloidal crystal film is placed in a muffle furnace, and the temperature is raised to 250°C at a heating rate of 0.2°C/min and kept for 3 hours to remove the PS template to form air holes to obtain a single-layer PbS array material, and then evaporate a layer of thickness with an electron beam A 100nm aluminum film is used as the cathode electrode of the device.
该发光器件中硫化铅二维光子晶体带隙值如表1所示。The bandgap values of lead sulfide two-dimensional photonic crystals in this light-emitting device are shown in Table 1.
表1Table 1
表1中r/a为二维光子晶体介质柱半径与晶格常数之比,ωmin和ωmax分别为带隙频率的最小值和最大值,ωm带隙频率的中间值,Δω/ωm为带隙相对大小。In Table 1, r/a is the ratio of the radius of the two-dimensional photonic crystal dielectric column to the lattice constant, ω min and ω max are the minimum and maximum values of the bandgap frequency, ωm is the median value of the bandgap frequency, and Δω/ω m is the relative size of the band gap.
由上表可知硫化铅空心孔光子晶体结构在平行玻璃层方向有光子带隙,利用光子带隙能够提高垂直方向的出光;空心结构降低了发光层的等效折射率,减少光在器件内的全反射,提高发光器件的出光效率。It can be seen from the above table that the lead sulfide hollow hole photonic crystal structure has a photonic band gap in the direction parallel to the glass layer, and the photonic band gap can be used to improve the light output in the vertical direction; the hollow structure reduces the equivalent refractive index of the light-emitting layer and reduces the light in the device. Total reflection improves the light extraction efficiency of the light emitting device.
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