CN102608168B - Air-sensitive resistance material and preparation method thereof - Google Patents
Air-sensitive resistance material and preparation method thereof Download PDFInfo
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- 238000002360 preparation method Methods 0.000 title abstract description 11
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- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract description 4
- 229910052691 Erbium Inorganic materials 0.000 claims abstract description 4
- 229910052689 Holmium Inorganic materials 0.000 claims abstract description 4
- 229910052765 Lutetium Inorganic materials 0.000 claims abstract description 4
- 229910052775 Thulium Inorganic materials 0.000 claims abstract description 4
- 229910052769 Ytterbium Inorganic materials 0.000 claims abstract description 4
- 229910052738 indium Inorganic materials 0.000 claims abstract description 4
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 4
- 239000013078 crystal Substances 0.000 claims description 7
- 230000004044 response Effects 0.000 abstract description 13
- 238000001514 detection method Methods 0.000 abstract description 8
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- 238000000034 method Methods 0.000 description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 12
- 239000001301 oxygen Substances 0.000 description 12
- 229910052760 oxygen Inorganic materials 0.000 description 12
- 230000008859 change Effects 0.000 description 11
- 229910052786 argon Inorganic materials 0.000 description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 238000001816 cooling Methods 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
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- 238000005245 sintering Methods 0.000 description 5
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- 229910003443 lutetium oxide Inorganic materials 0.000 description 3
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- 238000010791 quenching Methods 0.000 description 3
- 238000001778 solid-state sintering Methods 0.000 description 3
- 101150096058 Erfe gene Proteins 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
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- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
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- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
本发明提供一种气敏电阻材料及其制备方法,该材料为以下通式的化合物:RFe2O4(RFeO3)n,其中R为Y、Dy、Ho、Er、Tm、Yb、Lu或In,n等于0或1。本发明使用上述材料充当探测电阻丝,抗腐蚀,耐高温,响应时间快(响应时间为秒的量级),制备工艺简单,具有很宽广的工作温区(-50℃~200℃)。
The invention provides a gas sensitive resistance material and a preparation method thereof. The material is a compound of the following general formula: RFe 2 O 4 (RFeO 3 ) n , wherein R is Y, Dy, Ho, Er, Tm, Yb, Lu or In, n is equal to 0 or 1. The invention uses the above material as a detection resistance wire, which has corrosion resistance, high temperature resistance, fast response time (on the order of seconds), simple preparation process and wide working temperature range (-50°C to 200°C).
Description
技术领域 technical field
本发明属于气氛探测领域,尤其涉及一种气敏电阻材料及其制备方法。The invention belongs to the field of atmosphere detection, in particular to a gas sensitive resistance material and a preparation method thereof.
背景技术 Background technique
对于某些材料,其电阻值随所处外界气氛的变化而改变。电阻对气氛响应有不同的机理,例如不同气氛中样品表面与气氛气体发生氧化还原反应,导致样品表面能带结构发生变化从而影响样品的电输运性质,或者由于不同气体导热率不同,从而导致在气氛中探测电阻丝的温度不同,通过测量电阻的大小,就可以推算样品所处的气体环境以及其压强。For some materials, the resistance value changes with the change of the external atmosphere. The resistance has different mechanisms in response to the atmosphere. For example, the oxidation-reduction reaction between the sample surface and the atmosphere gas in different atmospheres leads to changes in the energy band structure of the sample surface, which affects the electrical transport properties of the sample, or due to the different thermal conductivity of different gases, resulting in The temperature of the resistance wire is detected in the atmosphere. By measuring the resistance, the gas environment and the pressure of the sample can be calculated.
一种常见的探测气体真空度的元件为皮拉尼电阻规,该电阻规一般使用金属丝,耐腐蚀耐高温性较差,故皮拉尼电阻规具有较窄的工作温区,并且只用于探测给定气体的真空度。其余的气敏探测元件,如SnO2气敏元件可以根据SnO2在不同气氛中电阻值不同而标定探测气体的成分,但其工作响应温度较高,高温下才能与气氛发生化学从而导致元件电阻改变以达到探测气氛的目的。A common component for detecting gas vacuum is the Pirani resistance gauge. This resistance gauge generally uses metal wire, which has poor corrosion resistance and high temperature resistance. Therefore, the Pirani resistance gauge has a narrow working temperature range and is only used It is used to detect the vacuum degree of a given gas. The rest of the gas sensing elements, such as SnO 2 gas sensing elements, can calibrate the components of the detected gas according to the different resistance values of SnO 2 in different atmospheres, but their working response temperature is relatively high, and only at high temperatures can they react with the atmosphere to cause chemical resistance of the element. Change to achieve the purpose of detecting the atmosphere.
发明内容 Contents of the invention
因此,本发明的目的在于解决以上现有技术的至少一个问题,提供一种新的气敏电阻探测材料。Therefore, the object of the present invention is to solve at least one problem of the above prior art, and provide a new gas-sensitive resistor detection material.
本发明的上述目的是通过以下技术方案实现的:Above-mentioned purpose of the present invention is achieved through the following technical solutions:
根据本发明的一方面,提供一种气敏电阻材料,该材料为以下通式的化合物:RFe2O4(RFeO3)n,其中R为Y、Dy、Ho、Er、Tm、Yb、Lu或In,n等于0或1。According to one aspect of the present invention, a gas sensitive resistor material is provided, which is a compound of the following general formula: RFe 2 O 4 (RFeO 3 ) n , wherein R is Y, Dy, Ho, Er, Tm, Yb, Lu Or In, n is equal to 0 or 1.
在上述气敏电阻材料中,其中,所述材料为单晶或多晶。In the gas-sensitive resistor material mentioned above, the material is single crystal or polycrystalline.
根据本发明的另一方面,提供一种制备气敏电阻材料RFe2O4的方法,包括以下步骤:According to another aspect of the present invention, there is provided a method for preparing gas-sensitive resistance material RFe2O4 , comprising the following steps:
步骤1):将R2O3和Fe2O3按照摩尔比1∶2充分混合,在CO2和H2的气氛下烧结,温度为1000℃至1300℃,然后冷却至室温,得到RFe2O4粉末;其中R为Y、Dy、Ho、Er、Tm、Yb、Lu或In;Step 1): Mix R 2 O 3 and Fe 2 O 3 thoroughly according to the molar ratio of 1:2, sinter in the atmosphere of CO 2 and H 2 at a temperature of 1000°C to 1300°C, and then cool to room temperature to obtain RFe 2 O 4 powder; wherein R is Y, Dy, Ho, Er, Tm, Yb, Lu or In;
步骤2):将已得到的多晶粉末置于铂金坩埚中并被加热到1500℃-1700℃,固体被融化,然后冷却至900℃。Step 2): The obtained polycrystalline powder is placed in a platinum crucible and heated to 1500°C-1700°C, the solid is melted, and then cooled to 900°C.
在上述方法中,步骤1)包括在1200℃下烧结,然后随炉冷却至室温。In the above method, step 1) includes sintering at 1200° C. and then cooling to room temperature with the furnace.
在上述方法中,步骤2)包括加热到1620℃。In the above method, step 2) includes heating to 1620°C.
在上述方法中,步骤2)包括以1℃/min的速度冷却至900℃。In the above method, step 2) includes cooling to 900°C at a rate of 1°C/min.
根据本发明的又一方面,提供一种制备气敏电阻材料RFe3O7的方法,包括以下步骤:According to another aspect of the present invention, there is provided a method for preparing gas-sensitive resistance material RFe3O7 , comprising the following steps:
步骤1):将R2O3和Fe2O3按照摩尔比2∶3充分混合,混合均匀后压制成片,放入管式炉中,在CO2与H2混合气氛下烧结;Step 1): Fully mix R 2 O 3 and Fe 2 O 3 according to the molar ratio of 2:3, mix evenly, press into tablets, put them into a tube furnace, and sinter in a mixed atmosphere of CO 2 and H 2 ;
步骤2):当步骤1)得到的产物温度降至900℃时,将产物放入冰水混合物中淬火。Step 2): When the temperature of the product obtained in step 1) drops to 900° C., put the product into an ice-water mixture to quench.
在上述方法中,步骤1)中的烧结时间为48小时。In the above method, the sintering time in step 1) is 48 hours.
在上述方法中,步骤1)中的烧结温度为1200℃。In the above method, the sintering temperature in step 1) is 1200°C.
与现有技术相比,本发明的优点在于:Compared with the prior art, the present invention has the advantages of:
本发明使用氧化物陶瓷材料充当探测电阻丝,抗腐蚀,耐高温,响应时间快(响应时间为秒的量级),制备工艺简单,具有很宽广的工作温区(-50℃~200℃)。在室温范围到400K的温区内都可以对不同气氛(包括真空),产生阻变响应,从而达到探测气氛的目的。本发明的气敏电阻探测材料不仅可以用于探测真空度用于制备真空计,还可以利用常温下的气氛敏感的性质制备成气敏元件。The invention uses an oxide ceramic material as a detection resistance wire, which is corrosion-resistant, high-temperature-resistant, has a fast response time (the response time is on the order of seconds), has a simple preparation process, and has a very wide working temperature range (-50°C to 200°C). . In the temperature range from room temperature to 400K, it can produce resistive response to different atmospheres (including vacuum), so as to achieve the purpose of detecting the atmosphere. The gas sensitive resistance detection material of the invention can not only be used to detect the degree of vacuum to prepare a vacuum gauge, but also can be prepared into a gas sensitive element by utilizing the property of being sensitive to the atmosphere at normal temperature.
附图说明 Description of drawings
以下参照附图对本发明实施例作进一步说明,其中:Embodiments of the present invention will be further described below with reference to the accompanying drawings, wherein:
图1示出了LuFe2O4在不同气氛下得到的电流-电压关系;Fig. 1 shows the current-voltage relationship of LuFe 2 O 4 obtained under different atmospheres;
图2示出了LuFe2O4电阻在气体环境逐渐发生变化时在不同温度下的响应范围;Figure 2 shows the response range of LuFe2O4 resistance at different temperatures when the gas environment changes gradually;
图3示出了LuFe2O4电阻在氧气和真空中周期性的变化; Figure 3 shows the periodic change of LuFe2O4 resistance in oxygen and vacuum;
图4示出了YbFe2O4电阻依次在真空、氩气和氧气中的变化曲线;Fig. 4 has shown YbFe 2 O The change curve of resistance in vacuum, argon and oxygen successively;
图5示出了Yb2Fe3O7电阻依次在真空、氩气和氧气中的变化曲线;Fig. 5 shows the change curve of Yb 2 Fe 3 O 7 resistance in vacuum, argon and oxygen successively;
图6示出了InFe2O4电阻依次在真空、氩气和氧气中的变化曲线。Fig. 6 shows the variation curves of the resistance of InFe 2 O 4 in vacuum, argon and oxygen in sequence.
具体实施方式 Detailed ways
下面通过实施例,具体描述本发明RFe2O4(RFeO3)n(n=0,1)体系中几种典型材料的性能及制备方法。The properties and preparation methods of several typical materials in the RFe 2 O 4 (RFeO 3 ) n (n=0, 1) system of the present invention will be specifically described below through examples.
实施例1:LuFe2O4样品的制备Embodiment 1: Preparation of LuFe 2 O 4 samples
实验中所用的LuFe2O4多晶样品为通过传统的固态烧结法合成。将高纯度的氧化镥Lu2O3(99.99%)和Fe2O3(99.9%)按照摩尔(mol)比1∶2充分混合,放入管式炉中,用CO2和H2不同的体积比例(例如1.9~7)来控制不同的氧化还原气氛,在1200℃下烧结,然后随炉冷却至室温。在已得到的多晶LuFe2O4粉末被置于铂金坩埚中并被加热到1620℃,固体被融化,然后以1℃/min的速度冷却至900℃。生长得到的单晶典型尺寸为1×2×0.5mm3。The LuFe 2 O 4 polycrystalline samples used in the experiment were synthesized by the traditional solid-state sintering method. High-purity lutetium oxide Lu 2 O 3 (99.99%) and Fe 2 O 3 (99.9%) were fully mixed according to the molar (mol) ratio of 1:2, put into a tube furnace, and used different CO 2 and H 2 Volume ratio (for example, 1.9~7) to control different redox atmospheres, sintered at 1200°C, and then cooled to room temperature with the furnace. The obtained polycrystalline LuFe 2 O 4 powder was placed in a platinum crucible and heated to 1620 °C, the solid was melted, and then cooled to 900 °C at a rate of 1 °C/min. The typical size of the grown single crystal is 1×2×0.5 mm 3 .
图1示出了LuFe2O4在不同气氛下得到的电流-电压关系。如图1所示,在不同探测电流下,不同气氛中样品LuFe2O4的压降不同,即样品电阻在不同氛围中不同。由此可见,利用电阻与气氛的对应关系可以制成气敏电阻计。 Figure 1 shows the current-voltage relationship of LuFe2O4 under different atmospheres. As shown in Figure 1, under different detection currents, the voltage drop of the sample LuFe 2 O 4 in different atmospheres is different, that is, the sample resistance is different in different atmospheres. It can be seen that the gas sensitive resistance meter can be made by using the corresponding relationship between resistance and atmosphere.
图2示出了LuFe2O4在气体环境逐渐发生变化时的电阻在不同温度下的响应范围。如图所示,当样品LuFe2O4所处气体环境发生改变时(从氩气变到真空),其电阻响应范围为室温到350K。在其它不同气体中也具有同样的性质。Figure 2 shows the response range of the resistance of LuFe 2 O 4 at different temperatures when the gas environment changes gradually. As shown in the figure, when the gas environment of the sample LuFe 2 O 4 changes (from argon to vacuum), its resistance response ranges from room temperature to 350K. It also has the same properties in other different gases.
图3示出了LuFe2O4电阻在氧气和真空中周期性的变化。由此可见,样品气敏特性具有很好的可重复性和灵敏性,且样品电阻随真空度的增加而减小。Figure 3 shows the periodic change of LuFe2O4 resistance in oxygen and vacuum. It can be seen that the gas-sensing characteristics of the sample have good repeatability and sensitivity, and the resistance of the sample decreases with the increase of the vacuum degree.
实施例2:Lu2Fe3O7样品的制备Embodiment 2: Preparation of Lu 2 Fe 3 O 7 samples
将高纯度的氧化镥Lu2O3(99.99%)和Fe2O3(99.9%)按照摩尔比2∶3充分混合,混合均匀后压制成片,放入管式炉中在CO2与H2混合气氛下控制氧分压,其中CO2∶H2体积比可调节(例如1.9~7),在1200℃下烧结48小时,当样品温度降至900℃左右时将样品放入冰水混合物中淬火,制得Lu2Fe3O7多晶样品。High-purity lutetium oxide Lu 2 O 3 (99.99%) and Fe 2 O 3 (99.9%) were thoroughly mixed according to the molar ratio of 2:3, and after mixing evenly, they were pressed into tablets, and put into a tube furnace under CO 2 and H 2 Control the oxygen partial pressure in a mixed atmosphere, in which the volume ratio of CO 2 : H 2 can be adjusted (for example, 1.9~7), sinter at 1200°C for 48 hours, and put the sample into the ice-water mixture when the temperature of the sample drops to about 900°C Quenching in medium to prepare Lu 2 Fe 3 O 7 polycrystalline samples.
实验测得,当样品LuFe2O4所处气体环境发生改变时(从氩气变到真空),其电阻响应范围为室温到370K,并且在其它不同气体中也具有同样的性质。Experiments have shown that when the gas environment of the sample LuFe 2 O 4 changes (from argon to vacuum), its resistance response ranges from room temperature to 370K, and it also has the same properties in other different gases.
实施例3:YbFe2O4样品的制备Embodiment 3: Preparation of YbFe 2 O 4 samples
实验中所用的YbFe2O4多晶样品为通过传统的固态烧结法合成。将高纯度的氧化钇Yb2O3(99.99%)和Fe2O3(99.9%)按照摩尔(mol)比1∶2充分混合,放入管式炉中,用CO2和H2不同的体积比例(例如1.9~7)来控制不同的氧化还原气氛,在1200℃下烧结,然后随炉冷却至室温。在已得到的多晶YbFe2O4粉末被置于铂金坩埚中并被加热到1620℃,固体被融化,然后以1℃/min的速度冷却至900℃。整个过程中混合气氛CO2∶H2体积比可调节。生长得到的单晶典型尺寸为1×2×0.5mm3。The YbFe 2 O 4 polycrystalline samples used in the experiment were synthesized by the traditional solid-state sintering method. High-purity yttrium oxide Yb 2 O 3 (99.99%) and Fe 2 O 3 (99.9%) are fully mixed according to the molar (mol) ratio of 1:2, put into a tube furnace, and use different CO 2 and H 2 Volume ratio (for example, 1.9~7) to control different redox atmospheres, sintered at 1200°C, and then cooled to room temperature with the furnace. The obtained polycrystalline YbFe 2 O 4 powder was placed in a platinum crucible and heated to 1620 °C, the solid was melted, and then cooled to 900 °C at a rate of 1 °C/min. The volume ratio of CO 2 : H 2 in the mixed atmosphere can be adjusted throughout the process. The typical size of the grown single crystal is 1×2×0.5 mm 3 .
图4示出了YbFe2O4电阻依次在真空、氩气和氧气中的变化曲线。从图中可以看出,不同气氛中,样品电阻有较大差异。Figure 4 shows the change curves of the resistance of YbFe 2 O 4 in vacuum, argon and oxygen in sequence. It can be seen from the figure that in different atmospheres, the sample resistance is quite different.
实施例4:Yb2Fe3O7样品的制备Embodiment 4: Preparation of Yb 2 Fe 3 O 7 samples
将高纯度的氧化镥Yb2O3(99.99%)和Fe2O3(99.9%)按照摩尔比2∶3充分混合,混合均匀后压制成片,放入管式炉中在CO2与H2混合气氛下控制氧分压,其中CO2∶H2体积比可调节(例如1.9~7),在1200℃下烧结48小时,当样品温度降至900℃左右时将样品放入冰水混合物中淬火,制得Yb2Fe3O7多晶样品。High-purity lutetium oxide Yb 2 O 3 (99.99%) and Fe 2 O 3 (99.9%) were thoroughly mixed according to the molar ratio of 2:3, and after mixing evenly, they were pressed into tablets, and placed in a tube furnace under CO 2 and H 2 Control the oxygen partial pressure in a mixed atmosphere, in which the volume ratio of CO 2 : H 2 can be adjusted (for example, 1.9~7), sinter at 1200°C for 48 hours, and put the sample into the ice-water mixture when the temperature of the sample drops to about 900°C Quenching in middle to prepare Yb 2 Fe 3 O 7 polycrystalline samples.
图5示出了Yb2Fe3O7电阻依次在真空、氩气和氧气中的变化曲线。从图中可以看出,不同气氛中,样品电阻有较大差异。Fig. 5 shows the change curve of Yb 2 Fe 3 O 7 resistance in vacuum, argon and oxygen in sequence. It can be seen from the figure that in different atmospheres, the sample resistance is quite different.
实施例5:InFe2O4样品的制备Embodiment 5: Preparation of InFe 2 O 4 samples
实验中所用的InFe2O4多晶样品为通过传统的固态烧结法合成。将高纯度的氧化铟In2O3(99.99%)和Fe2O3(99.9%)按照摩尔(mol)比1∶2充分混合,放入管式炉中,用CO2和H2不同的比例来控制不同的氧化还原气氛,在1200℃下烧结,然后随炉冷却至室温。在已得到的多晶InFe2O4粉末被置于铂金坩埚中并被加热到1620℃,固体被融化,然后以1℃/min的速度冷却至900℃。整个过程中混合气氛CO2∶H2体积比可调节。生长得到的单晶典型尺寸为1×2×0.5mm3。The InFe 2 O 4 polycrystalline samples used in the experiment were synthesized by the traditional solid-state sintering method. High-purity indium oxide In 2 O 3 (99.99%) and Fe 2 O 3 (99.9%) are fully mixed according to the molar (mol) ratio of 1:2, put into a tube furnace, and different CO 2 and H 2 The ratio is used to control different redox atmospheres, sintered at 1200 ° C, and then cooled to room temperature with the furnace. The obtained polycrystalline InFe 2 O 4 powder was placed in a platinum crucible and heated to 1620 °C, the solid was melted, and then cooled to 900 °C at a rate of 1 °C/min. The volume ratio of CO 2 : H 2 in the mixed atmosphere can be adjusted throughout the process. The typical size of the grown single crystal is 1×2×0.5 mm 3 .
图6示出了InFe2O4电阻依次在真空、氩气和氧气中的变化曲线。从图中可以看出,不同气氛中,样品电阻有较大差异。Fig. 6 shows the variation curves of the resistance of InFe 2 O 4 in vacuum, argon and oxygen in sequence. It can be seen from the figure that in different atmospheres, the sample resistance is quite different.
实施例6~10:Embodiment 6~10:
按照实施例1中描述的工艺步骤和条件,把其中的高纯度氧化镥换成氧化钇、氧化镝、氧化钬、氧化铒、氧化铥,分别制备了YFe2O4、DyFe2O4、HoFe2O4、ErFe2O4和TmFe2O4。经测试表明,在不同探测电流下,不同气氛中样品的压降明显不同;当这些产物所处气体环境发生改变时(从氩气变到真空),电阻响应范围为室温到400K。According to the process steps and conditions described in Example 1 , YFe2O4 , DyFe2O4 , HoFe 2 O 4 , ErFe 2 O 4 , and TmFe 2 O 4 . Tests have shown that under different detection currents, the pressure drop of samples in different atmospheres is significantly different; when the gas environment of these products changes (from argon to vacuum), the resistance response ranges from room temperature to 400K.
实施例11~15:Embodiment 11~15:
按照实施例2中描述的工艺步骤和条件,把其中的高纯度氧化镥换成氧化钇、氧化镝、氧化钬、氧化铒、氧化铥,分别制备了YFe3O7、DyFe3O7、HoFe3O7、ErFe3O7和TmFe3O7。经测试,当这些产物所处气体环境发生改变时(从氩气变到真空),电阻响应范围为室温到400K。According to the process steps and conditions described in Example 2, YFe 3 O 7 , DyFe 3 O 7 , HoFe 3 O 7 , ErFe 3 O 7 and TmFe 3 O 7 . After testing, when the gas environment of these products changes (from argon to vacuum), the resistance response ranges from room temperature to 400K.
通过以上实施例可以看出,由于在RFe2O4(RFeO3)n(n=0或1,R=Yb、Lu、In、Y、Dy、Ho、Er或Tm)体系的多晶或单晶材料中发现如下现象:在室温下,材料在不同的气体氛围和真空中(<10-2帕),电阻率具有明显的不同,因此本发明使用RFe2O4(RFeO3)n(n=0,1)体系的多晶或单晶陶瓷材料,充当气敏电阻探测元件。 It can be seen from the above examples that due to the polycrystalline or single The following phenomenon is found in crystal materials: at room temperature, the resistivity of the material is significantly different in different gas atmospheres and vacuum (<10 -2 Pa), so the present invention uses RFe 2 O 4 (RFeO 3 ) n (n = 0, 1) polycrystalline or single crystal ceramic material as a gas sensitive resistance detection element.
本发明的RFe2O4(RFeO3)n体系中,具有如下特性:以在室温空气中的电阻率为标准,在氧化性气氛,如氧气中,样品电阻率会增大(变化率>10%),在真空中(<10-2帕),样品的电阻率变小(变化率>10%)。并且随着通过样品电流密度的增加,在不同气氛下(包括真空)电阻率的变化增加。如典型的LuFe2O4样品,当电流密度为2.5mA/cm2时,氧气氛围下,样品电阻率相对于真空,变化30%。当电流密度为5.0mA/cm2,此变化量增大为70%。另外,在室温范围到400K的温区内都可以对不同气氛(包括真空),产生阻变响应,从而达到探测气氛的目的。In the RFe 2 O 4 (RFeO 3 ) n system of the present invention, it has the following characteristics: taking the resistivity standard in air at room temperature, in an oxidizing atmosphere, such as oxygen, the sample resistivity will increase (change rate > 10 %), in vacuum (<10 -2 Pa), the resistivity of the sample becomes smaller (change rate>10%). And as the current density through the sample increases, the change in resistivity under different atmospheres (including vacuum) increases. For a typical LuFe 2 O 4 sample, when the current density is 2.5mA/cm 2 , the resistivity of the sample changes by 30% relative to the vacuum in an oxygen atmosphere. When the current density is 5.0 mA/cm 2 , the variation increases to 70%. In addition, it can produce resistive response to different atmospheres (including vacuum) in the temperature range from room temperature to 400K, so as to achieve the purpose of detecting the atmosphere.
需要说明的是,以上实施例仅为示意目的,在本发明的制备RFe2O4的其他实施例中,烧结温度也可以在1000℃至1300℃之间,并且可以采用冷水浴等方式冷却。在得到RFe2O4粉末后的加热温度可以介于1500℃-1700℃之间,因为如果温度不够,材料不能充分熔化,不能制备出需要的化合物,然而如果温度过高,会加速稀土元素的挥发,因此介于1500℃-1700℃之间是优选的工艺条件。另外,冷却速度可根据具体冷却方式而有所不同,本领域技术人员可根据冷却装置及方式来决定。在本发明的制备RFe3O7的其他实施例中,烧结温度也可以在1000℃至1300℃之间,因为在此温度范围内,两种化合物混合得更充分。It should be noted that the above examples are for illustrative purposes only, and in other examples of preparing RFe 2 O 4 of the present invention, the sintering temperature may also be between 1000°C and 1300°C, and cooling may be performed by means of a cold water bath or the like. The heating temperature after obtaining RFe 2 O 4 powder can be between 1500°C and 1700°C, because if the temperature is not enough, the material cannot be fully melted and the required compound cannot be prepared, but if the temperature is too high, the rare earth elements will be accelerated. Volatile, so between 1500°C and 1700°C is the preferred process condition. In addition, the cooling rate may vary according to the specific cooling method, and those skilled in the art can determine it according to the cooling device and method. In other embodiments of the present invention for preparing RFe 3 O 7 , the sintering temperature may also be between 1000° C. and 1300° C., because the two compounds are more fully mixed within this temperature range.
尽管参照上述的实施例对于本发明已作出具体描述,但是对于本领域的普通技术人员来说,应该理解可以基于本发明公开的内容进行修改或改进,并且这些修改和改进都在本发明的精神和范围之内。Although the present invention has been specifically described with reference to the above-mentioned embodiments, those of ordinary skill in the art should understand that modifications or improvements can be made based on the disclosure of the present invention, and these modifications and improvements are all within the spirit of the present invention and within the range.
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