CN102593303A - Light emitting element with plug - Google Patents
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- CN102593303A CN102593303A CN2011100011553A CN201110001155A CN102593303A CN 102593303 A CN102593303 A CN 102593303A CN 2011100011553 A CN2011100011553 A CN 2011100011553A CN 201110001155 A CN201110001155 A CN 201110001155A CN 102593303 A CN102593303 A CN 102593303A
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- 239000004065 semiconductor Substances 0.000 claims abstract description 49
- 239000000758 substrate Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 239000011368 organic material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 208000005189 Embolism Diseases 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 229960001296 zinc oxide Drugs 0.000 description 2
- 235000014692 zinc oxide Nutrition 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- GSWGDDYIUCWADU-UHFFFAOYSA-N aluminum magnesium oxygen(2-) Chemical compound [O--].[Mg++].[Al+3] GSWGDDYIUCWADU-UHFFFAOYSA-N 0.000 description 1
- 239000011153 ceramic matrix composite Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011156 metal matrix composite Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000011160 polymer matrix composite Substances 0.000 description 1
- 229920013657 polymer matrix composite Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- AXWLFOKLQGDQFR-UHFFFAOYSA-N zinc iron(2+) manganese(2+) oxygen(2-) Chemical compound [O-2].[Fe+2].[Zn+2].[Mn+2].[O-2].[O-2] AXWLFOKLQGDQFR-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Abstract
Description
技术领域 technical field
本发明主要是涉及固态发光元件,此固态发光元件可为常见的发光二极管、激光器等利用半导体材料制造而成的固态光源。The present invention mainly relates to a solid-state light-emitting element, which can be a solid-state light source made of common light-emitting diodes, lasers, and the like using semiconductor materials.
背景技术 Background technique
固态发光元件的应用性逐渐提高,越来越多人将可节能的固态发光元件使用在各个不同的领域。而为了增加其功能,也会透过外部线路连接的方式将发光元件与其他的元件做进一步的电性连结,以达到整合的功效。然而,透过外部线路连结常会因为发光元件与其他元件之间的相对位置或高低差的问题而造成断线或接触不良。另外,当需要将不同元件以堆叠方式组合时,也无法以外部线路连接方式串接。因此,如何更有效地将固态发光元件与其他的元件电性连结是一个亟欲解决的问题。The applicability of solid-state light-emitting devices is gradually increasing, and more and more people use energy-saving solid-state light-emitting devices in various fields. In order to increase its function, the light-emitting element will be further electrically connected with other elements through external circuit connections, so as to achieve the integrated effect. However, connection through external lines often leads to disconnection or poor contact due to the relative position or height difference between the light-emitting element and other elements. In addition, when it is necessary to combine different elements in a stacked manner, they cannot be connected in series by means of external circuit connections. Therefore, how to more effectively electrically connect the solid-state light-emitting device with other devices is an urgent problem to be solved.
发明内容 Contents of the invention
本发明主要是关于发光元件,其包含发光单元、结构体以及多个栓塞。其中发光单元为叠层结构并具有第一半导体层、发光层以及第二半导体层。多个栓塞中至少有一栓塞贯穿结构体并与发光单元电连结;又至少有一栓塞贯穿该发光单元并与发光单元电连结。其中,结构体可包含基板或多个发光二极管。透过栓塞的电连结,将发光单元与结构体结合成整合元件。The present invention mainly relates to a light-emitting element, which includes a light-emitting unit, a structure and a plurality of plugs. Wherein the light emitting unit is a laminated structure and has a first semiconductor layer, a light emitting layer and a second semiconductor layer. Among the plurality of plugs, at least one plug penetrates the structure and is electrically connected to the light-emitting unit; and at least one plug penetrates the light-emitting unit and is electrically connected to the light-emitting unit. Wherein, the structure may include a substrate or a plurality of light emitting diodes. Through the electrical connection of the plug, the light emitting unit and the structure are combined into an integrated component.
附图说明 Description of drawings
图1显示为本发明实施例;Fig. 1 shows an embodiment of the present invention;
图2为栓塞的放大图;Figure 2 is an enlarged view of the embolism;
图3~图8分别代表本发明所披露的不同实施例;3 to 8 respectively represent different embodiments disclosed in the present invention;
附图标记说明Explanation of reference signs
100:发光单元100: light emitting unit
101:第一半导体层101: first semiconductor layer
102:第二半导体层102: Second semiconductor layer
103:发光层103: Luminescent layer
104,104a-b:第一电极104, 104a-b: first electrodes
200a~d:栓塞200a~d: embolism
210:绝缘壁210: insulating wall
220:导电层220: conductive layer
300:结构体300: Structure
310a~b:发光二极管310a~b: light emitting diodes
304,304a-d:第二电极304, 304a-d: second electrodes
400:绝缘层400: insulating layer
具体实施方式 Detailed ways
本发明所述的实施例其结构如图1所示,发光元件10包含发光单元100,此发光单元100为叠层结构,包含第一半导体层101、第二半导体层102以及发光层103,其中发光层103位于第一半导体层101与第二半导体层102之间;发光单元100亦包含多个第一电极104a~104b。此外,发光元件10还进一步包含结构体300以及多个栓塞200。在本实施例中,多个栓塞200中至少有一个栓塞200a贯穿发光单元100的部分叠层(在此实施例中为第一半导体层101)以及结构体300,并与第一电极104a电连结。而多个栓塞200中至少有一个栓塞200b贯穿发光单元100以及结构体300并与第一电极104b电连结。透过多个栓塞200,发光单元100可以与结构体300的表面302上的多个第二电极304电连结。当电流经由第二电极304或第一电极104a、104b输入时,发光单元100就会发亮。The structure of the embodiment of the present invention is shown in FIG. 1. The
发光单元100的第一半导体层101、第二半导体层102以及发光层103,其个别的主要组成材料可为由单一元素所组成,例如硅、锗等具有半导体能隙(energy gap)的元素;也可以为由一种以上的元素材料所组成,包含III族氮化物所组成的化合物,其组成可以化学式AlxGayInzN1-aMa表示(其中x+y+z=1,且0≤x≤1;0≤y≤1;0≤z≤1),M表示除氮以外的V族元素(其中0≤a≤1)。此一种以上的元素材料组合也可由AlxGayAs所组成(其中x+y=1,且0≤x≤1;0≤y≤1;0≤z≤1),或者是AlxGayInzP(其中x+y+z=1,且0≤x≤1;0≤y≤1;0≤z≤1)。在本发明的各实施例中,第一半导体层101与第二半导体层102分别代表位于发光层103不同侧的两半导体层,第一与第二在此只是代表具有不同极性的掺杂,其半导体层的组成材料可为相同或彼此相异。例如,当第一半导体层101为p型半导体时,第二半导体层102则为n型半导体,反之亦然。发光单元100的主要特征为,当第一半导体层101与第二半导体层102之间存在电压差时,发光层103会发出具有特定波长区间的光线。另外在此特别要提出的是,本发明各实施例中所提及的“发光二极管”一词,若于各实施例中未另加描述,则其组成结构与材料与上述描述发光单元100的内容相同。若于各实施例中另加定义,则以该实施例的定义为准。The
栓塞200的结构剖面如图2所示,具有绝缘壁210以及导电层220。其中绝缘壁210主要是用来阻隔导电层220与发光单元的半导体层或发光层,以避免电流通过导电层220时,对发光单元产生干扰。在本发明的各实施例中,所提及的栓塞200其制作方式有许多不同的方法,主要的步骤是在栓塞200欲通过之处,透过蚀刻、机械穿凿等方法形成孔洞,再以如半导体工艺中的薄膜工艺如PECVD(plasma enhanced chemical vapor deposition)、HDPCVD(high density plasma enhanced chemical vapor deposition)、旋涂(spincoating)等方式将绝缘材料覆盖在孔洞的侧壁,接着可透过如PVD(physicalvapor deposition)、溅镀、电子束(E-Beam)、电镀等方式将导电材料填充在孔洞之中。The structural section of the
发光元件10中的结构体300可为基板。在本发明的各实施例中,所述的基板一词可以是发光单元100的生长基板或者是用来承载的载板。当结构体300为发光单元100的生长基板时,其材料可为蓝宝石(sapphire),碳化硅(SiC),硅(silicon),金属氧化物例如氧化铝(aluminum oxide),氧化锌(zincoxide),氧化镁(magnesium oxide),氧化锰(manganese oxide),氧化锆(zirconiumoxide),氧化锌镁铁(manganese zinc iron oxide),氧化铝镁(magnesiumaluminum oxide),氮化铝(aluminum nitride)等。当结构体300为发光单元100的承载基板时,其材料可为高分子聚合物(polymer),金属,合金,金属基复合材(metal matrix composite),陶瓷基复合材(ceramic matrix composite),高分子聚合物复合材(polymer matrix composite)。又当结构体300为发光单元100的承载基板时可为印刷电路板(PCB)。The
图3表示本发明的另一实施例,在此实施例中,发光元件20包含发光单元100,此发光单元100包含第一半导体层101、第二半导体层102、发光层103以及多个第一电极104,其中发光层103位于第一半导体层101与第二半导体层102之间。在本实施例中,发光单元100为垂直式的发光二极管,但在本发明的其他实施例中,也可为水平式的发光二极管。发光元件20进一步包含结构体300以及多个栓塞200。在本实施例中,结构体300为发光二极管堆叠在发光单元100上。多个栓塞200中至少有一个栓塞200a贯穿结构体300并与结构体300上所对应的第二电极304a电连结。多个栓塞200中至少有一个栓塞200b贯穿发光单元100,并与结构体300上第二电极304b电连结。透过多个栓塞200,发光单元100与结构体300可形成电连结。本实施例中,当电流经由第二电极304或第一电极104输入时,发光单元100与结构体300同时发亮。本实施例又可在发光单元100与结构体300之间,加入绝缘层400。绝缘层400的目的是为了能电性隔离发光单元100与结构体300,以避免彼此的半导体层之间产生短路的现象。绝缘层400的材料可包括高介电有机材料、含硅的氧化物或含硅的氮化物等。FIG. 3 shows another embodiment of the present invention. In this embodiment, the
图4为本发明又一实施例,发光元件30中的结构体300包含发光二极管310a与310b,在本实施例中,发光二极管310a与310b为垂直式的发光二极管,但在本发明的其他实施例中,也可为水平式的发光二极管。发光二极管310a与310b分别堆叠在发光单元100的相异侧。结构体300又包含多个第二电极304a~304d。发光元件30又具有多个栓塞200,包含栓塞200a与栓塞200b。发光单元100透过栓塞200a与发光二极管310a的第二电极304a以及发光二极管310b的第二电极304b电连结。发光单元100透过栓塞200b与发光二极管310a的第二电极304d以及发光二极管310b的第二电极304c电连结。透过发光元件30中的多个栓塞200可以将发光单元100与结构体300电连结,因此,当有电流经由结构体300的第二电极304a~304d或发光单元100的第一电极104导入发光元件30时,发光单元100与结构体300中的发光二极管310a与发光二极管310b会同时发出光线。发光单元100与发光二极管310a与310b之间,也可加入绝缘层400。绝缘层400的目的是为了能电性隔离发光单元100与结构体300,以避免半导体层之间产生短路。FIG. 4 is another embodiment of the present invention. The
在此实施例中,发光单元100可发出具有第一波长范围的光线,结构体300中的发光二极管310a与发光二极管310b分别会发出与第一波长范围相异的第二波长范围以及第三波长范围的光线,此三种波长范围的光线混合之后,会发射出第四波长范围的光线。具体而言,当驱动电流导入发光元件30中时,发光单元100会发出波长范围大约介于440~480nm的蓝光,结构体300中的发光二极管310a发出波长范围大约介于500~560nm的绿光,发光二极管310b发出波长范围大约介于600~650nm的红光。三种光线混合后,会产生白光。In this embodiment, the
图5A表示本发明的另一实施例,图5B为沿AA’线的剖面图。发光元件40具有发光单元100、结构体300以及多个栓塞200a~200b。发光单元100与结构体300之间,可加入绝缘层400。发光单元100为叠层结构,包含第一半导体层101、发光层103、第二半导体层102以及多个第一电极104。结构体300在本实施例中是一个发光二极管,具体而言,为水平式的发光二极管,但在本发明的其他实施例中,也可为垂直式的发光二极管。结构体300进一步包含多个第二电极304。栓塞200a贯穿发光单元100并进一步延伸与所对应的第二电极304电连结,栓塞200b贯穿发光单元100的部分叠层并与所对应的结构体300的第二电极304电连结。因此,当有电流经由结构体300的第二电极304或发光单元100的第一电极104导入发光元件40时,发光单元100与结构体300会同时发出光线。Fig. 5A shows another embodiment of the present invention, and Fig. 5B is a sectional view along line AA'. The
图6表示本发明的另一实施例,发光元件50具有与图5中的发光元件40相似的结构,但进一步地,结构体300可包含至少两个发光二极管310a与310b与多个第二电极304a~304d。发光元件50又有多个栓塞200a~200d。栓塞200a贯穿发光单元100并进一步延伸与发光二极管310a上所对应的第二电极304a电连结,栓塞200b贯穿发光单元100的部分叠层并与发光二极管310a上所对应的第二电极304c电连结,栓塞200c贯穿发光单元100、发光二极管310a与发光二极管310b并与第二电极304b电连结,栓塞200d贯穿发光单元100的部分叠层与发光二极管310a并进一步延伸与发光二极管310b上所对应的第二电极304d电连结。多个栓塞200并与发光单元100上的多个第一电极104电连结。当有电流经由结构体300的第二电极304a~304d或发光单元100的第一电极104进入发光元件50时,发光单元100与结构体300中的发光二极管310a与发光二极管310b会同时发出光线。发光单元100与发光二极管310a、发光二极管310a与发光二极管310b之间,也可加入绝缘层400。绝缘层400的目的是为了能电性隔离发光单元100与结构体300,以避免半导体层之间产生短路。FIG. 6 shows another embodiment of the present invention. The
在此实施例中,发光单元100可发出具有第一波长范围的光线,结构体300中的发光二极管310a与发光二极管310b分别会发出与第一波长范围相异的第二波长范围以及第三波长范围的光线,此三种波长范围的光线混合之后,会发射出第四波长范围的光线。例如,但本发明并不限于,当驱动电流导入发光元件30中时,发光单元100会发出波长范围大约介于440~480nm的蓝光,结构体300中的发光二极管310a发出波长范围大约介于500~560nm的绿光,发光二极管310b发出波长范围大约介于600~650nm的红光。三种光线混合后,会产生白光。In this embodiment, the
图7为本发明又一实施例,发光元件60具有发光单元100,结构体300,以及多个栓塞200。发光单元100与结构体300之间,可加入绝缘层400,以避免在半导体层之间产生短路。发光单元100为叠层结构包含,第一半导体层101、发光层103、第二半导体层102以及多个第一电极104。结构体300包含至少两个发光二极管310a与310b,结构体300进一步包含多个第二电极304a~304d。多个栓塞包含栓塞200a、栓塞200b与栓塞200c。栓塞200a贯穿发光单元100并进一步延伸与发光二极管310a上的第二电极304a电连结。栓塞200b与发光单元100的第一电极104b电连结并贯穿发光二极管310a并与发光二极管310a上的第二电极304d电连结。更进一步地,栓塞200b贯穿发光二极管310b并与发光二极管310b上所对应的第二电极304c电连结。栓塞200c贯穿发光单元100并进一步延伸且贯穿发光二极管310a,并与发光二极管310b上的第二电极304b电连结。由于多个栓塞200a~200c同时与发光单元100上的多个第一电极104电连结,因此当有电流经由结构体的第二电极304a~304d或发光单元100的第一电极104导入发光元件60时,发光单元100与结构体300中的发光二极管310a与发光二极管310b会同时发出光线。发光二极管310a与发光二极管310b之间,也可加入绝缘层400。绝缘层400的目的是为了能电性隔离发光单元100与结构体300,以避免半导体层之间产生短路。FIG. 7 is another embodiment of the present invention. A light emitting element 60 has a
在此实施例中,发光单元100可发出具有第一波长范围的光线,结构体300中的发光二极管310a与发光二极管310b分别会发出与第一波长范围相异的第二波长范围以及第三波长范围的光线,此三种波长范围的光线混合之后,会发射出第四波长范围的光线。例如,但本发明并不限于,当驱动电流导入发光元件30中时,发光单元100会发出波长范围大约介于440~480nm的蓝光,结构体300中的发光二极管310a发出波长范围大约介于500~560nm的绿光,发光二极管310b发出波长范围大约介于600~650nm的红光。三种光线混合后,会产生白光。In this embodiment, the
另外,图3至图7所示的各实施例中所包含的结构体300可再进一步包含基板320,如图8所示的实施例70即为将图7所示的实施例60进一步包含基板320。上述的栓塞200a~200d在贯穿各发光二极管后,进一步贯穿基板320,并与基板320底端的第二电极304电连结。而电流可透过基板320底端的第二电极304与栓塞200同时点亮结构体300中的各发光二极管以及发光单元100。In addition, the
此外,结构体300除了可为上述各实施例中所述的基板或发光二极管外,还可为肖特基二极管(Schottky diode)、齐纳二极管(Zener diode)、集成电路元件(Integrated Circuit)、印刷电路板或其组合。In addition, the
本发明所列举的各实施例仅用以说明本发明,并非用以限制本发明的范围。任何人对本发明所作的任何显而易知的修饰或变更皆不脱离本发明的精神与范围。The various embodiments listed in the present invention are only used to illustrate the present invention, and are not intended to limit the scope of the present invention. Any obvious modifications or changes made by anyone to the present invention will not depart from the spirit and scope of the present invention.
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