CN102586860A - Single-crystal furnace crystal bar positioning device and single-crystal furnace using same - Google Patents
Single-crystal furnace crystal bar positioning device and single-crystal furnace using same Download PDFInfo
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- CN102586860A CN102586860A CN2011103848964A CN201110384896A CN102586860A CN 102586860 A CN102586860 A CN 102586860A CN 2011103848964 A CN2011103848964 A CN 2011103848964A CN 201110384896 A CN201110384896 A CN 201110384896A CN 102586860 A CN102586860 A CN 102586860A
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- right cylinder
- resettlement section
- cylinder resettlement
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- 239000013078 crystal Substances 0.000 title claims abstract description 114
- 239000000126 substance Substances 0.000 claims description 4
- 230000004308 accommodation Effects 0.000 abstract 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000036461 convulsion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
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Abstract
The invention provides a single-crystal furnace crystal bar positioning device and a single-crystal furnace using the same. The single-crystal furnace crystal bar positioning device comprises a connecting part, a cylinder accommodation part, a retractable part, a longitudinal guiding part and a fixed part, wherein one end of the connecting part is connected with the middle part of the cylinder accommodation part, and the other end of the connecting part has a positioning hole; the connecting part is vertical to the side wall of the cylinder accommodation part; the retractable part is arranged in the cylinder accommodation part, and one end of the retractable part is extended out of the cylinder accommodation part; one end of the retractable part, which is extended out of the cylinder accommodation part, is provided with a positioning rocker arm for positioning a crystal bar; the positioning rocker arm is vertical to the axis of the cylinder accommodation part; the other end of the retractable part, which is accommodated in the cylinder accommodation part, has a fixing hole; the longitudinal guiding part is arranged in a guiding hole of the cylinder accommodation part, is contacted with the retractable part and is vertical to the axis of the cylinder accommodation part; and the fixed part is arranged in the fixing hole of the cylinder accommodation part.
Description
Technical field:
The present invention relates to the silicon single crystal manufacturing apparatus technical field, the single crystal growing furnace of particularly a kind of single crystal growing furnace crystal bar locating device and employing single crystal growing furnace crystal bar locating device.
Background technology:
Single crystal growing furnace is that polysilicon is converted into the indispensable equipment in the silicon single crystal technological process, and silicon single crystal is the basic material in photovoltaic generation and the semicon industry.Silicon single crystal is as the critical support material of advanced information society, is one of most important monocrystal material in the world at present, and it is not only the major function material of development computingmachine and unicircuit, also is the major function material that photovoltaic generation utilizes sun power.
The effect of single crystal growing furnace crystal bar locating device is following: after silicon single-crystal draws completion, use the crystal bar locating device can locate crystal bar, prevent that in the body of heater rotation process, crystal bar collides on the upper furnace body inwall, causes damage.General single crystal growing furnace crystal bar locating device, all adopt the fastening mode to realize that there is following problem in above-mentioned traditional way: boule growth and placement space are little, cause in the boule growth process crystal bar fragile.
Summary of the invention:
In view of this, be necessary to provide a kind of single crystal growing furnace crystal bar locating device that increases boule growth and placement space.
Also be necessary to provide a kind of single crystal growing furnace that adopts single crystal growing furnace crystal bar locating device.
A kind of single crystal growing furnace crystal bar locating device comprises connection section, right cylinder resettlement section, pars contractilis, longitudinal guide spare and mounting block.Connection section one end is connected with the middle part of right cylinder resettlement section, and the other end of connection section is provided with pilot hole, and connection section is vertical with the sidewall of right cylinder resettlement section.Pars contractilis is arranged in the right cylinder resettlement section and an end of pars contractilis stretches out the right cylinder resettlement section, and an end that stretches out the right cylinder resettlement section of pars contractilis is provided with the location rocking arm that is used to locate crystal bar, the axis normal of location rocking arm and right cylinder resettlement section; The other end setting that is housed in the right cylinder resettlement section of pars contractilis is used fixed orifices.Bullport, fixed orifices are set on the sidewall of right cylinder resettlement section, and bullport is provided with near the bottom of right cylinder resettlement section near the opening part setting of right cylinder resettlement section, fixed orifices.Longitudinal guide spare is arranged in the bullport of right cylinder resettlement section and with pars contractilis and contacts, longitudinal guide spare also with the axis normal of right cylinder resettlement section.Mounting block is arranged in the fixed orifices of right cylinder resettlement section, and can be along the direction advance and retreat perpendicular to the axis of right cylinder resettlement section, and when advancing, penetrates the fixed orifices on the other end of pars contractilis.
A kind of single crystal growing furnace that adopts single crystal growing furnace crystal bar locating device comprises upper furnace body, is installed in lower flange on the upper furnace body, is installed in the single crystal growing furnace crystal bar locating device on the lower flange.Single crystal growing furnace crystal bar locating device comprises connection section, right cylinder resettlement section, pars contractilis, longitudinal guide spare and mounting block.Connection section one end is connected with the middle part of right cylinder resettlement section, and the other end of connection section is fixedly connected with lower flange, and connection section is vertical with the sidewall of right cylinder resettlement section.Pars contractilis is arranged in the right cylinder resettlement section and an end of pars contractilis stretches out the right cylinder resettlement section; And an end that stretches out the right cylinder resettlement section of pars contractilis is provided with the location rocking arm that is used to locate crystal bar; The axis normal of location rocking arm and right cylinder resettlement section, and the location rocking arm is parallel with lower flange; The other end setting that is housed in the right cylinder resettlement section of pars contractilis is used fixed orifices.Bullport, fixed orifices are set on the sidewall of right cylinder resettlement section, and bullport is provided with near the bottom of right cylinder resettlement section near the opening part setting of right cylinder resettlement section, fixed orifices.Longitudinal guide spare is arranged in the bullport of right cylinder resettlement section and with pars contractilis and contacts, longitudinal guide spare also with the axis normal of right cylinder resettlement section.Mounting block is arranged in the fixed orifices of right cylinder resettlement section, and can be along the direction advance and retreat perpendicular to the axis of right cylinder resettlement section, and when advancing, penetrates the fixed orifices on the other end of pars contractilis.
The single crystal growing furnace of single crystal growing furnace crystal bar locating device provided by the invention and employing single crystal growing furnace crystal bar locating device; When needing to increase boule growth length and placement space; Twitch mounting block; Make mounting block transversely the guide direction operation of guiding piece satisfy the requirement of boule growth and placement space increase through the distance of adjustment right cylinder resettlement section and pad so that mounting block and slide shaft break away from pars contractilis moves up and down along the guide direction of longitudinal guide spare.
Description of drawings:
Accompanying drawing 1 is the structural representation of the single crystal growing furnace crystal bar locating device of a preferred embodiments.
Accompanying drawing 2 is structural representations of another angle of single crystal growing furnace crystal bar locating device among Fig. 1.
Accompanying drawing 3 is cross-sectional view of single crystal growing furnace crystal bar locating device among Fig. 1.
Accompanying drawing 4 is the structural representations after single crystal growing furnace crystal bar locating device stretches among Fig. 3.
Accompanying drawing 5 is cross-sectional view of another angle of single crystal growing furnace crystal bar locating device among Fig. 1.
Accompanying drawing 6 is application synoptic diagram of single crystal growing furnace crystal bar locating device among Fig. 1.
Among the figure: single crystal growing furnace crystal bar locating device 10; Connection section 11; Pilot hole 111; Right cylinder resettlement section 12; Bullport 121; Bullport 123; Fixed orifices 122; Pars contractilis 13; Location rocking arm 131; rocking arm 1311; pad 1312; handle 1313; handlebar 1314; handle ball 1315; slide shaft 132; guiding groove 1321; fixed orifices 1322; first cylindrical portion 1323; second cylindrical portion 1324; three cylinders portion 1325; bottom plate 133; longitudinal guide spare 14; mounting block 15; guiding groove 151; lateral guides 16; lower flange 20; crystal bar shift mechanism 21; crystal bar 22
Embodiment:
Please be simultaneously referring to Fig. 1, Fig. 2, single crystal growing furnace crystal bar locating device 10 comprises connection section 11, right cylinder resettlement section 12, pars contractilis 13, longitudinal guide spare 14 and mounting block 15.
Please be simultaneously referring to Fig. 3 to Fig. 5, connection section 11 1 ends are connected with the middle part of right cylinder resettlement section 12, and the other end of connection section 11 is provided with pilot hole 111, and connection section 11 is connected on the upper furnace body lower flange of polycrystalline furnace through pilot hole 111.Connection section 11 is vertical with the sidewall of right cylinder resettlement section 12.Pars contractilis 13 is arranged in the right cylinder resettlement section 12 and an end of pars contractilis 13 stretches out right cylinder resettlement section 12; And an end that stretches out right cylinder resettlement section 12 of pars contractilis 13 is provided with the location rocking arm 131 that is used to locate crystal bar, the axis normal of location rocking arm 131 and right cylinder resettlement section 12; The other end that is housed in the right cylinder resettlement section 12 of pars contractilis 13 is provided with fixed orifices 1322.Bullport 121, fixed orifices 122 are set on the sidewall of right cylinder resettlement section 12, and bullport 121 is provided with near the bottom of right cylinder resettlement section 12 near the opening part setting of right cylinder resettlement section 12, fixed orifices 122.Longitudinal guide spare 14 is arranged in the bullport 121 of right cylinder resettlement section 12 and with pars contractilis 13 and contacts, longitudinal guide spare 14 also with the axis normal of right cylinder resettlement section 12.Mounting block 15 is arranged in the fixed orifices 122 of right cylinder resettlement section 12, and can be along the direction advance and retreat perpendicular to the axis of right cylinder resettlement section 12, and when advancing, penetrates the fixed orifices 122 on the other end of pars contractilis 13.
In this embodiment, pars contractilis 13 comprises goes up rheme rocking arm 131 surely, also comprises slide shaft 132, bottom plate 133.Slide shaft 132 comprises successively first cylindrical portion 1323 that connects, second cylindrical portion 1324, three cylinders portion 1325; And the diameter of the bottom surface of first cylindrical portion 1323, second cylindrical portion 1324, three cylinders portion 1325 reduces successively; And the diameter of the bottom surface of first cylindrical portion 1323 is identical with the internal diameter of right cylinder resettlement section 12, offers radially fixed orifices 1322 on the sidewall of first cylindrical portion 1323; The bottom surface diameter of second cylindrical portion 1324 is identical with the diameter of the opening of right cylinder resettlement section 12; Offer guiding groove 1321 on the sidewall of second cylindrical portion 1324, the parallel axes of the bearing of trend of guiding groove 1321 and right cylinder resettlement section 12; First cylindrical portion 1323, second cylindrical portion 1323 are housed in the right cylinder resettlement section 12; Three cylinders portion 1325 exposes outside the right cylinder resettlement section 12; The sidewall of three cylinders portion 1325 is connected with location rocking arm 131, and an end that is not connected with second cylindrical portion 1325 of three cylinders portion 1325 is fixedly connected with bottom plate 133.Can carry out Milling Process to metalwork and obtain slide shaft 132.
Bullport 123 is set on the bottom of right cylinder resettlement section 12, the fixed orifices 122 on the bullport 123 on the bottom of right cylinder resettlement section 12 and the sidewall of right cylinder resettlement section 12 over against and be communicated with; The sidewall of mounting block 15 is provided with guiding groove 151, and the bearing of trend of guiding groove 151 is perpendicular to the axis of right cylinder resettlement section 12; This crystalline substance stove crystal bar locating device 10 also comprises lateral guides 16; Lateral guides 16 penetrates the bullport 123 of right cylinder resettlement section 12 and contacts with mounting block 15 in the fixed orifices that is arranged on right cylinder resettlement section 12 122, and the end of lateral guides 16 is stretched in the guiding groove 151.
Please referring to Fig. 6; It is the application synoptic diagram of single crystal growing furnace crystal bar locating device 10, and the upper furnace body of single crystal growing furnace is equipped with lower flange 20, and single crystal growing furnace crystal bar locating device 10 is installed on the lower flange 20 through connection section 11; The axis normal of location rocking arm 131 and right cylinder resettlement section 12; And location rocking arm 131 is parallel with lower flange 20, and locatees rocking arm 131 and be positioned at lower flange 20 belows, and the pad 1312 of so locating rocking arm 131 can hold crystal bar 22 ends that crystal bar shift mechanism 21 lifts.When needing to increase boule growth length and placement space; Twitch mounting block 15; Transversely the guide direction operation of guiding piece 16 is so that mounting block 15 and slide shaft 132 break away from pars contractilis 13 moves up and down along the guide direction of longitudinal guide spare 14 to make mounting block 15, and the distance through adjustment right cylinder resettlement section 12 and pad 1312 satisfies the requirement that boule growth and placement space increase.
Claims (10)
1. single crystal growing furnace crystal bar locating device, it is characterized in that: this crystalline substance stove crystal bar locating device comprises connection section, right cylinder resettlement section, pars contractilis, longitudinal guide spare and mounting block; Connection section one end is connected with the middle part of right cylinder resettlement section, and the other end of connection section is provided with pilot hole, and connection section is vertical with the sidewall of right cylinder resettlement section; Pars contractilis is arranged in the right cylinder resettlement section and an end of pars contractilis stretches out the right cylinder resettlement section, and an end that stretches out the right cylinder resettlement section of pars contractilis is provided with the location rocking arm that is used to locate crystal bar, the axis normal of location rocking arm and right cylinder resettlement section; The other end setting that is housed in the right cylinder resettlement section of pars contractilis is used fixed orifices.Bullport, fixed orifices are set on the sidewall of right cylinder resettlement section, and bullport is provided with near the bottom of right cylinder resettlement section near the opening part setting of right cylinder resettlement section, fixed orifices; Longitudinal guide spare is arranged in the bullport of right cylinder resettlement section and with pars contractilis and contacts, longitudinal guide spare also with the axis normal of right cylinder resettlement section; Mounting block is arranged in the fixed orifices of right cylinder resettlement section, and can be along the direction advance and retreat perpendicular to the axis of right cylinder resettlement section, and when advancing, penetrates the fixed orifices on the other end of pars contractilis.
2. single crystal growing furnace crystal bar locating device according to claim 1; It is characterized in that: pars contractilis also comprises bottom plate, slide shaft; Slide shaft comprises first cylindrical portion, second cylindrical portion, the three cylinders portion that connects successively; And the diameter of the bottom surface of first cylindrical portion, second cylindrical portion, three cylinders portion reduces successively, and the diameter of the bottom surface of first cylindrical portion is identical with the internal diameter of right cylinder resettlement section, offers radially fixed orifices on the sidewall of first cylindrical portion; The bottom surface diameter of second cylindrical portion is identical with the diameter of the opening of right cylinder resettlement section; Offer guiding groove on the sidewall of second cylindrical portion, the parallel axes of the bearing of trend of guiding groove and right cylinder resettlement section; First cylindrical portion, second cylindrical portion are housed in the right cylinder resettlement section; Three cylinders portion exposes outside the right cylinder resettlement section; The sidewall of three cylinders portion is connected with the location rocking arm, and an end that is not connected with second cylindrical portion of three cylinders portion is fixedly connected with bottom plate.
3. single crystal growing furnace crystal bar locating device according to claim 1 and 2 is characterized in that: on the bottom of right cylinder resettlement section bullport is set, the fixed orifices on the sidewall of the bullport on the bottom of right cylinder resettlement section and right cylinder resettlement section over against and be communicated with; The sidewall of mounting block is provided with guiding groove, and the bearing of trend of guiding groove is perpendicular to the axis of right cylinder resettlement section; This crystalline substance stove crystal bar locating device also comprises lateral guides, and lateral guides penetrates the bullport of right cylinder resettlement section and contacts with mounting block in the fixed orifices that is arranged on the right cylinder resettlement section, and the end of lateral guides is stretched in the guiding groove.
4. single crystal growing furnace crystal bar locating device according to claim 2 is characterized in that: the location rocking arm comprises rocking arm, pad and handle, and an end of rocking arm is socketed on the sidewall of three cylinders portion and with handle and is connected, and the other end of rocking arm is connected with pad.
5. single crystal growing furnace crystal bar locating device according to claim 4, it is characterized in that: handle comprises handlebar, handle ball, and handle ball is spun on the handlebar, and the end on the sidewall that is socketed in three cylinders portion of handlebar and rocking arm is connected.
6. single crystal growing furnace crystal bar locating device according to claim 1 is characterized in that: longitudinal guide spare, lateral guides are guider screw; Mounting block is a latch.
7. single crystal growing furnace that adopts single crystal growing furnace crystal bar locating device; Comprise upper furnace body, be installed in lower flange on the upper furnace body, be installed in the single crystal growing furnace crystal bar locating device on the lower flange, it is characterized in that: single crystal growing furnace crystal bar locating device comprises connection section, right cylinder resettlement section, pars contractilis, longitudinal guide spare and mounting block; Connection section one end is connected with the middle part of right cylinder resettlement section, and the other end of connection section is fixedly connected with lower flange, and connection section is vertical with the sidewall of right cylinder resettlement section; Pars contractilis is arranged in the right cylinder resettlement section and an end of pars contractilis stretches out the right cylinder resettlement section; And an end that stretches out the right cylinder resettlement section of pars contractilis is provided with the location rocking arm that is used to locate crystal bar; The axis normal of location rocking arm and right cylinder resettlement section, and the location rocking arm is parallel with lower flange; The other end setting that is housed in the right cylinder resettlement section of pars contractilis is used fixed orifices; Bullport, fixed orifices are set on the sidewall of right cylinder resettlement section, and bullport is provided with near the bottom of right cylinder resettlement section near the opening part setting of right cylinder resettlement section, fixed orifices; Longitudinal guide spare is arranged in the bullport of right cylinder resettlement section and with pars contractilis and contacts, longitudinal guide spare also with the axis normal of right cylinder resettlement section; Mounting block is arranged in the fixed orifices of right cylinder resettlement section, and can be along the direction advance and retreat perpendicular to the axis of right cylinder resettlement section, and when advancing, penetrates the fixed orifices on the other end of pars contractilis.
8. the single crystal growing furnace of employing single crystal growing furnace crystal bar locating device according to claim 7; It is characterized in that: pars contractilis also comprises bottom plate, slide shaft; Slide shaft comprises first cylindrical portion, second cylindrical portion, the three cylinders portion that connects successively; And the diameter of the bottom surface of first cylindrical portion, second cylindrical portion, three cylinders portion reduces successively, and the diameter of the bottom surface of first cylindrical portion is identical with the internal diameter of right cylinder resettlement section, offers radially fixed orifices on the sidewall of first cylindrical portion; The bottom surface diameter of second cylindrical portion is identical with the diameter of the opening of right cylinder resettlement section; Offer guiding groove on the sidewall of second cylindrical portion, the parallel axes of the bearing of trend of guiding groove and right cylinder resettlement section; First cylindrical portion, second cylindrical portion are housed in the right cylinder resettlement section; Three cylinders portion exposes outside the right cylinder resettlement section; The sidewall of three cylinders portion is connected with the location rocking arm, and an end that is not connected with second cylindrical portion of three cylinders portion is fixedly connected with bottom plate.
9. the single crystal growing furnace of employing single crystal growing furnace crystal bar locating device according to claim 7; It is characterized in that: on the bottom of right cylinder resettlement section bullport is set, the fixed orifices on the sidewall of the bullport on the bottom of right cylinder resettlement section and right cylinder resettlement section over against and be communicated with; The sidewall of mounting block is provided with guiding groove, and the bearing of trend of guiding groove is perpendicular to the axis of right cylinder resettlement section; This crystalline substance stove crystal bar locating device also comprises lateral guides, and lateral guides penetrates the bullport of right cylinder resettlement section and contacts with mounting block in the fixed orifices that is arranged on the right cylinder resettlement section, and the end of lateral guides is stretched in the guiding groove.
10. the single crystal growing furnace of employing single crystal growing furnace crystal bar locating device according to claim 7; It is characterized in that: the location rocking arm comprises rocking arm, pad and handle; an end of rocking arm is socketed on the sidewall of three cylinders portion and with handle and is connected, and the other end of rocking arm is connected with pad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110384896.4A CN102586860B (en) | 2011-11-28 | 2011-11-28 | Single-crystal furnace crystal bar positioning device and single-crystal furnace using same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110384896.4A CN102586860B (en) | 2011-11-28 | 2011-11-28 | Single-crystal furnace crystal bar positioning device and single-crystal furnace using same |
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| Publication Number | Publication Date |
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| CN102586860A true CN102586860A (en) | 2012-07-18 |
| CN102586860B CN102586860B (en) | 2015-02-11 |
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| CN201110384896.4A Active CN102586860B (en) | 2011-11-28 | 2011-11-28 | Single-crystal furnace crystal bar positioning device and single-crystal furnace using same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109023507A (en) * | 2018-09-26 | 2018-12-18 | 锐捷芯盛（天津）电子科技有限公司 | A kind of single crystal growing furnace crystal bar locating device |
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| CN102586860B (en) | 2015-02-11 |
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Address after: Sheng Road Economic Development Zone Shizuishan city the Ningxia Hui Autonomous Region Xin 753000 Patentee after: Ningxia Rijing New Energy Euipment Co., Ltd. Address before: Sheng Road Economic Development Zone Shizuishan city the Ningxia Hui Autonomous Region Xin 753000 Patentee before: Ningxia Rijing New Energy Euipment Co., Ltd. |