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CN102557626A - Preparation method of honeycomb-structure spherical powder material for rare earth modified zirconia thermal barrier coating - Google Patents

Preparation method of honeycomb-structure spherical powder material for rare earth modified zirconia thermal barrier coating Download PDF

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CN102557626A
CN102557626A CN201110418473XA CN201110418473A CN102557626A CN 102557626 A CN102557626 A CN 102557626A CN 201110418473X A CN201110418473X A CN 201110418473XA CN 201110418473 A CN201110418473 A CN 201110418473A CN 102557626 A CN102557626 A CN 102557626A
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powder material
rare earth
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张鑫
冀晓鹃
于月光
任先京
章德铭
彭浩然
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Beijing General Research Institute of Mining and Metallurgy
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Abstract

本发明提供了一种稀土改性氧化锆热障涂层用蜂窝状结构球形粉末材料及其制备方法,通过采用前驱体直接团聚制粒-烧结致密化的工艺合成稀土改性蜂窝状结构粉末材料。包括将稀土元素与锆元素按照预定重量比例与水混合制成水溶液,加入碱液调节溶液pH值,使水溶液发生共沉淀反应,将白色沉淀陈化数小时得到前驱体凝胶;对前驱体凝胶使用预定介质进行洗涤,直到用硝酸银检测不到氯离子为止;将洗涤后的前驱体凝胶与预定介质按照一定比例进行混合获得混合溶液,向混合溶液中加入适量的分散剂和粘结剂,调制出适用于可控蜂窝状多孔结构的料浆配方,再通过喷雾干燥将浆料制成团聚粉末材料;对团聚粉末材料进行预定时间的致密化处理后,制得蜂窝状结构的球形粉末材料;制备的粉末具有高松装密度、良好流动性等特点,粉末的微观组织为布满均匀孔隙的蜂窝状结构。

Figure 201110418473

The invention provides a honeycomb structure spherical powder material for rare earth modified zirconia thermal barrier coatings and a preparation method thereof. The rare earth modified honeycomb structure powder material is synthesized by adopting the process of direct agglomeration, granulation and sintering densification of the precursor . It includes mixing rare earth elements and zirconium elements with water according to a predetermined weight ratio to make an aqueous solution, adding lye to adjust the pH value of the solution, causing a co-precipitation reaction in the aqueous solution, aging the white precipitate for several hours to obtain a precursor gel; The gel is washed with a predetermined medium until no chloride ions are detected with silver nitrate; the washed precursor gel is mixed with the predetermined medium according to a certain ratio to obtain a mixed solution, and an appropriate amount of dispersant and bonding agent are added to the mixed solution. Prepare a slurry formula suitable for a controllable honeycomb porous structure, and then make the slurry into an agglomerated powder material by spray drying; after densifying the agglomerated powder material for a predetermined time, a spherical honeycomb structure can be obtained Powder material; the prepared powder has the characteristics of high bulk density and good fluidity, and the microstructure of the powder is a honeycomb structure covered with uniform pores.

Figure 201110418473

Description

A kind of rare earth modified Zirconium oxide heat barrier coating is with the preparation method of polynuclear plane spherical powder material
Technical field
The present invention relates to the preparation method of a kind of rare earth modified Zirconium oxide heat barrier coating, belong to field of material preparation with the polynuclear plane spherical powder material.
Background technology
Along with the direction of turbine engine to high flow capacity ratio, high thrust-weight ratio develops, the Service Environment of the high-temperature component of mover is harsh more.Thrust-weight ratio is that the design inlet temperature of 10 aircraft engine has reached 1600-1700 ℃, and existing high temperature alloy and cooling technology are difficult to satisfy the design requirements of modern aeroengine.People begin to attempt using thermal barrier coating (TBCs) technology further to improve the working temperature of mover.Thermal barrier coating is exactly that this coating has the metallic matrix of reduction heating temperature, prevents the matrix alloy oxidation, guarantees these parts works better under higher relatively temperature at the resistant to elevated temperatures material with low thermal conductivity of the surface of component spraying one deck.Be mainly used in various high-temperature heat engines; Like the rotor of internal combustion turbine or jet plane or the surperficial heat insulating coat of stator vane, engine combustion chamber interior walls, gasoline or diesel combustion chamber interior walls; Rocket nozzle; Or some other high-temp combustion device inwall, perhaps heat insulation, the inoxidzable coating material of the metallic element of a few thing under hot environment can effectively prolong the work-ing life of hot-end component and the efficient of raising internal combustion turbine.
Present widely used thermal barrier coating mainly is that employing quality percentage composition is 6-8wt% yttrium oxide (Y 2O 3) PSZ (ZrO 2) material (being called for short YSZ).But; YSZ recycles in the process under being higher than 1200 ℃ of temperature for a long time, and coated material exists phase transformation, grain growth, little pore to shrink phenomenons such as sintering, makes thermal conductivity increase; The interface thermal stresses raises and causes disbonding, causes hot machine to reduce work-ing life.And REE has higher chemicalstability, and high melt point is at ZrO 2In can limited solid solution, rare earth modified ZrO 2Material crystals inside has than the more room of YSZ, more complicated cell configuration; And contain the bigger rare earth atom of quality in the structure cell; Thereby increased the scattering of phonon greatly, cause the mfp of phonon to reduce, thereby make material thermal conductivity lower than YSZ.And under appropriate proportioning, can give full play to the excellent lattice stabilization of rare earth heavy ion radius, make and adopt rare earth codoped ZrO 2The coating of material prepn; Can keep mutually stable more than 1200 ℃ for a long time; Have good thermal shock resistance simultaneously, satisfy more abominable work condition environment, the existence of specific rare earth oxide can be played good catalyst catalysis and the effect that reduces exhaust gas emission in addition.Therefore, rare earth modified zirconia of heat barrier coat material be a kind of have an applications well prospect be used for the high-temperature fuel gas turbine, high-temperature heat engines such as turbo-jet engine are used the new type high temperature heat barrier coat material.
And prepare rare earth modified Zirconium oxide heat barrier coating powdered material at present, mostly for solid construction or be applicable to the hollow structure that can wear and tear application.Density is higher, the thermal barrier coating powdered material of solid construction be difficult for to melt in spraying process, but powder inside do not melt block and in coating structure, forms the defective source, causes the coating inefficacy.The powdered material loose density of hollow structure is lower, is prone to cause flying away of powder in the spraying process, and not only powder utilization is low, and there are defectives such as hole is bigger in the coating of preparation.
And the thermal barrier coating powder inside of polynuclear plane has been covered with a large amount of micro-pores, and the thawing of powder is respond well, possesses suitable loose density, and the spraying coating process window is more wide in range.And can prepare the coating of even dispersion microvoid structure, reduce the coating structure defective, make the inner stress of coating obtain discharging and alleviating, effectively promote the thermal shock resistance of coating.The last employing of preparation method chemical coprecipitation synthesizes the zirconia of heat barrier coat material presoma, can effectively ensure the homodisperse of each component.Adopt rational slip prescription, utilize presoma to carry out directly that slurry is synthetic, the method for agglomeration granulation, prepare the presoma reunion powder of vesicular structure, dehydration reaction generation ZrO takes place in powder in sintering process on the one hand 2,, be prone to realize the low-temperature sintering of powder owing to need heat lower; On the other hand; The powder dehydration reaction is accompanied by the hard aggregation process of old bond rupture, new key formation, when keeping honey-combed, causes the powder volume contraction; Bonding force strengthens between the powder endoparticle, has effectively guaranteed the honeycomb vesicular structure intensity of powder and than high apparent density.
Summary of the invention
The present invention for solve that the rare earth modified Zirconium oxide heat barrier coating powdered material technology of existing preparation exists when the employing solid construction; Do not melt block because of inside and in coating structure, form the defective source, thereby cause coating to lose efficacy, and when adopting hollow structure; The powdered material loose density is lower; Be prone to cause flying away of powder in the spraying process, not only powder utilization is low, and there are problems such as hole is bigger in the coating of preparation; The preparation method of a kind of rare earth modified Zirconium oxide heat barrier coating with the polynuclear plane spherical powder material is provided, comprised:
Step 1; With the salt of REE and salt or the compound of REE and the compound of zr element of zr element; Be mixed and made into the aqueous solution according to predetermined weight ratio and water, in the said aqueous solution, add alkali lye regulator solution pH value, make said aqueous solution generation coprecipitation reaction; And constantly stir until forming white precipitate, said white precipitate ageing number hour is obtained aqueous precursor gel;
Step 2 uses predetermined medium to wash to said aqueous precursor gel, till detecting less than cl ions with Silver Nitrate;
Step 3; Said aqueous precursor gel after the washing is mixed the acquisition mixing solutions according to a certain percentage with predetermined medium; In said mixing solutions, add an amount of dispersion agent and sticker; And disperse to be mixed with slurry in 1~30 hour through ball milling and ultrasonic vibration, through spraying drying said slurry is processed the reunion powder material again;
Step 4, said reunion powder material carried out densification after, make the spherical powder material of cellular porous structure;
Step 5 is sieved said powdered material, and the rare earth modified Zirconium oxide heat barrier coating that obtains the predetermined particle size scope is used the polynuclear plane spherical powder material.
The rare earth modified Zirconium oxide heat barrier coating of cellular porous structure provided by the invention is with polynuclear plane spherical powder material and preparation technology thereof; For the heat barrier coat material of traditional preparation process; Have cellular porous structure through adopting the preparation technology of the synthetic presoma of chemical coprecipitation and the granulations-sintering densification of directly reuniting, can preparing, good sphericity, high apparent density, composition uniformity coefficient and the high temperature rare earth modified Zirconium oxide heat barrier coating powder of maintenance good stability down.
Description of drawings
Fig. 1 is the schematic flow sheet of the rare earth modified Zirconium oxide heat barrier coating that provides of the specific embodiment of the invention with the preparation method of polynuclear plane spherical powder material;
Fig. 2 is the microstructure synoptic diagram of the cerium oxide with cellular porous structure-yttrium oxide co-stabilized Zirconium oxide heat barrier coating reunion powder of providing of the specific embodiment of the invention.
Fig. 3 is the diagrammatic cross-section of the cerium oxide with cellular porous structure-yttrium oxide co-stabilized Zirconium oxide heat barrier coating reunion powder of providing of the specific embodiment of the invention.
Fig. 4 is the minimum crystal grain TEM figure in the cerium oxide with cellular porous structure-yttrium oxide co-stabilized Zirconium oxide heat barrier coating powder agglomerates of providing of the specific embodiment of the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills belong to protection scope of the present invention not making the every other embodiment that is obtained under the creative work prerequisite.
Embodiment of the present invention provides the preparation method of a kind of rare earth modified Zirconium oxide heat barrier coating with the polynuclear plane spherical powder material, and is as shown in Figure 1, comprising:
Step 1; With the salt of REE and salt or the compound of REE and the compound of zr element of zr element; Be mixed and made into the aqueous solution according to predetermined weight ratio and water, in the said aqueous solution, add alkali lye regulator solution pH value, make said aqueous solution generation coprecipitation reaction; And constantly stir until forming white precipitate, said white precipitate ageing number hour is obtained aqueous precursor gel;
Step 2 uses predetermined medium to wash to said aqueous precursor gel, till detecting less than cl ions with Silver Nitrate;
Step 3; Said aqueous precursor gel after the washing is mixed the acquisition mixing solutions according to a certain percentage with predetermined medium; In said mixing solutions, add an amount of dispersion agent and sticker; And disperse to be mixed with slurry in 1~30 hour through ball milling and ultrasonic vibration, through spraying drying said slurry is processed the reunion powder material again;
Step 4, said reunion powder material carried out densification after, make the spherical powder material of cellular porous structure;
Step 5 is sieved said powdered material, and the rare earth modified Zirconium oxide heat barrier coating that obtains the predetermined particle size scope is used the polynuclear plane spherical powder material.
To combine the Figure of description specific embodiments of the invention to do to describe in detail further below.
Embodiment 1:
Be used to produce the preparation method of the spherical cerium oxide-yttrium oxide co-stabilized Zirconium oxide heat barrier coating powdered material of cellular porous structure; Comprise the following steps: to get 100kg zirconium oxychloride, 1.55kg Yttrium trichloride crystal powder and 27.52Kg Cerium II Chloride crystal powder; Add the 595kg deionized water, evenly stir and obtain uniform solution.To add concentration be 40% ammonia soln 145kg the 70min time in solution, and co-precipitation obtains gel and carries out the 10h ageing and handle, and after the filtration washing press filtration, obtains the filter cake of about 715kg.Add 700kg water at 1: 1 according to weight ratio,, obtain uniform and stable slurry through stirring ball-milling 10h.
Adopt centrifugal spraying drying that uniform and stable slurry is carried out spray-drying process, inlet temperature is 320 ℃, and temperature out is 110 ℃, and centrifugal atomizing dish rotating speed is 11000r/min, and cyclonic separator is used to collect the powdered material after the granulation.With the powder 700 ℃ of following thermal treatment 3h in retort furnace after collecting, obtain the cerium oxide-yttrium oxide co-stabilized Zirconium oxide powder of the cellular porous structure of agglomerating.Through the atmospheric plasma densification, make later the instantaneous densification of rare earth modified Zirconium oxide powder of sintering, and collect through powder collection device.The groundwork medium that atmospheric plasma is handled is an argon gas, and temperature is 8000-10000 ℃, and power is 40kW, and powder sending quantity is 6kg/h.
Powder after the plasma densification is sieved (500 order) promptly obtain the cerium oxide of cellular porous structure-yttrium oxide co-stabilized zirconia powder powder material; This powder-product loose density is 2.0g/cm3; Flowability is 38s/50g; The powdered material average grain size is 50nm, has good high-temperature stability, and the micro-structure diagram of powder is as shown in Figure 2.
Embodiment 2:
Be used to produce the spherical gadolinium sesquioxide (Gd of cellular porous structure 2O 3) preparation method of stabilizing zirconia of heat barrier coat powdered material, comprise the following steps: to get 50kg zirconium oxychloride and 2.13Kg Gadolinium trinitrate crystal powder, add the 595kg deionized water, evenly stir and obtain uniform solution.To add concentration be 30% ammonia soln 145kg the 70min time in solution, and co-precipitation obtains gel and carries out the 10h ageing and handle, and after the filtration washing press filtration, obtains the filter cake of about 715kg.Add the 700kg deionized water at 1: 1 according to weight ratio,, obtain uniform and stable slurry through stirring ball-milling 12h.
Adopt centrifugal spraying drying that uniform and stable slurry is carried out spray-drying process, inlet temperature is 330 ℃, and temperature out is 130 ℃, and centrifugal atomizing dish rotating speed is 11000r/min, and cyclonic separator is used to collect the powdered material after the granulation.With the powder 800 ℃ of following thermal treatment 5h in retort furnace after collecting, obtain the gadolinium oxide-stabilized Zirconium oxide powder of the cellular porous structure of agglomerating.
The powder of sintering densification is sieved (500 order) promptly obtain the cerium oxide of cellular porous structure-yttria-stabilized zirconia ceramic powder material product; This powder-product loose density is 1.7g/cm3; Flowability is 42s/50g, and the powdered material average grain size is 90nm.
Embodiment 3:
Be used to produce the spherical Samarium trioxide (Sm of cellular porous structure 2O 3The preparation method of)-stabilizing zirconia of heat barrier coat powdered material comprises the following steps: to get 100kg zirconium oxychloride and 3.5Kg samarium trichloride crystal powder, adds the 610kg deionized water, evenly stirs and obtains uniform solution.To add concentration be 40% ammonia soln 145kg the 70min time in solution, and co-precipitation obtains gel and carries out the 10h ageing and handle, and after the filtration washing press filtration, obtains the filter cake of about 715kg.Add 700kg water at 1: 1 according to weight ratio, through stirring ball-milling 5h, ultrasonic dispersing 3h obtains uniform and stable slurry.
Adopt centrifugal spraying drying that uniform and stable slurry is carried out spray-drying process, inlet temperature is 340 ℃, and temperature out is 130 ℃, and centrifugal atomizing dish rotating speed is 11000r/min, and cyclonic separator is used to collect the powdered material after the granulation.With the powder 700 ℃ of following thermal treatment 5h in retort furnace after collecting, obtain the cerium oxide-yttrium oxide co-stabilized Zirconium oxide powder of the cellular porous structure of agglomerating.Through the atmospheric plasma spray gun, make later the instantaneous densification of yttrium oxide-stabilized zirconium oxide powder of sintering, and collect through powder collection device.The groundwork medium that atmospheric plasma is handled is an argon gas, and temperature is 8000-10000 ℃, and power is 38kW, and powder sending quantity is 5kg/h.
Powder after the plasma densification is sieved (500 order) obtain promptly that the cerium oxide-yttrium oxide of cellular porous structure is apt decides zirconia ceramics powdered material product, this powder-product loose density is 2.1g/cm 3, flowability is 34s/50g, the powdered material average grain size is 70nm.
The rare earth modified Zirconium oxide heat barrier coating of the cellular porous structure that this embodiment provides is with the preparation technology of powdered material; For the heat barrier coat material of traditional preparation process; Have cellular porous structure through adopting the preparation technology of the synthetic presoma of chemical coprecipitation and the granulations-sintering densification of directly reuniting, can preparing, high apparent density, composition are even, the high temperature rare earth modified Zirconium oxide heat barrier coating powder of maintenance good stability down.This method economy, environmental protection, be suitable for industrial large-scale production, be with a wide range of applications.
The above; Be merely the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, any technician who is familiar with the present technique field is in the technical scope that the present invention discloses; The variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.

Claims (10)

1. a rare earth modified Zirconium oxide heat barrier coating is characterized in that with the preparation method of polynuclear plane spherical powder material, comprising:
Step 1; With the salt of REE and salt or the compound of REE and the compound of zr element of zr element; Be mixed and made into the aqueous solution according to predetermined weight ratio and water, in the said aqueous solution, add alkali lye regulator solution pH value, make said aqueous solution generation coprecipitation reaction; And constantly stir until forming white precipitate, said white precipitate ageing number hour is obtained aqueous precursor gel;
Step 2 uses predetermined medium to wash to said aqueous precursor gel, till detecting less than cl ions with Silver Nitrate;
Step 3; Said aqueous precursor gel after the washing is mixed the acquisition mixing solutions according to a certain percentage with predetermined medium; In said mixing solutions, add an amount of dispersion agent and sticker; And disperse to be mixed with slurry in 1~30 hour through ball milling and ultrasonic vibration, through spraying drying said slurry is processed the reunion powder material again;
Step 4, said reunion powder material carried out densification after, make the spherical powder material of cellular porous structure;
Step 5 is sieved said powdered material, and the rare earth modified Zirconium oxide heat barrier coating that obtains the predetermined particle size scope is used the polynuclear plane spherical powder material.
2. method according to claim 1; It is characterized in that; In step 1; Said REE is one or more among Ce, La, Pr, Nb, Nd, Dy, Sm, Gd, Yb, Eu, the Er, and the salt of said REE comprises one or more in muriate, oxide compound, carbonate, nitrate salt, acetate or the Citrate trianion, and the salt of said zr element comprises one or more in zirconium oxychloride, zirconium carbonate, sour slightly zirconium, zirconium chloride, the acetic acid zirconium; The compound of said REE accounts for 1~60% of raw material total mass, and it is 40~99% that the compound of said zr element accounts for mass ratio.
3. method according to claim 1; It is characterized in that said step 1 specifically comprises: the salt of REE and the solubility salt of zr element are mixed by mass ratio 1: 2~40 with water, add strong base solution liquid or weak caustic solution fast; The volumetric concentration of said strong base solution liquid or weak caustic solution is 10%~80%; The adding speed of said strong base solution liquid or weak caustic solution is 0.1~10kg/min, regulates pH value to 8~11, digestion time 2~12 hours.
4. method according to claim 1 is characterized in that, in step 2, the said medium that presoma is washed is water, alcohol or methyl alcohol.
5. method according to claim 1; It is characterized in that; In step 3, said dispersion agent is polyoxyethylene glycol, ROHM or SEPIGEL 305, and said sticker is PVA, PVP or CMC; The weight percentage of said dispersion agent in mixing solutions is 0~15%, and the weight percentage of said sticker in mixing solutions is 0~15%.
6. preparation method according to claim 1; It is characterized in that; In step 3; The said method of processing the reunion powder material comprises one or more in centrifugal spray drying, pressure spray dryer or the two streaming spraying dryings, and said spray-dired inlet temperature is 150~350 ℃, and temperature out is 70~250 ℃.
7. preparation method according to claim 1 is characterized in that, in step 4, the sintering temperature of said reunion powder material is 400~1200 ℃, and sintering time is 2~15 hours.
8. method according to claim 1 is characterized in that, in step 5, the reunion powder material ranges after the said screening is 15~120 μ m.
9. method according to claim 1; It is characterized in that; Said step 4 also comprises: handles through the atmospheric plasma spray gun, makes the instantaneous densification of the spherical agglomerated powdered material of polynuclear plane behind the sintering, and through the polynuclear plane reunion powder material after the powder collection device collection and treatment.
10. method according to claim 9 is characterized in that, in passing through atmospheric plasma spray gun treating processes, working medium is an argon gas, and temperature is 8000~12000 ℃, and power is 30~60KW, and powder sending quantity is 1~15kg/h.
CN201110418473XA 2011-12-14 2011-12-14 Preparation method of honeycomb-structure spherical powder material for rare earth modified zirconia thermal barrier coating Pending CN102557626A (en)

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CN102826848A (en) * 2012-09-12 2012-12-19 河南工程学院 Gadolinium ion-doped La2Ce2O7 nanoscale thermal barrier coating ceramic material and preparation method thereof
CN105236961A (en) * 2014-05-27 2016-01-13 西南科技大学 High temperature stable monoclinic phase-free tetragonal zirconia thermal barrier coating material and preparation method thereof
CN107032788A (en) * 2017-06-06 2017-08-11 北京理工大学 A kind of preparation method of submicron order rare earth zirconate ceramic block material
CN110172690A (en) * 2019-07-03 2019-08-27 西安热工研究院有限公司 A kind of 3D printing Thermal Barrier Coatings composite powder material and preparation method thereof
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CN113233907A (en) * 2021-06-25 2021-08-10 西安热工研究院有限公司 Silicon carbide-calcium oxide stabilized zirconia composite thermal barrier coating and preparation method thereof
CN117658629A (en) * 2023-12-01 2024-03-08 杭钢金属陶瓷(安吉)有限公司 Multi-element composite stable zirconia thermal barrier coating material and preparation method thereof
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CN102826848A (en) * 2012-09-12 2012-12-19 河南工程学院 Gadolinium ion-doped La2Ce2O7 nanoscale thermal barrier coating ceramic material and preparation method thereof
CN105236961A (en) * 2014-05-27 2016-01-13 西南科技大学 High temperature stable monoclinic phase-free tetragonal zirconia thermal barrier coating material and preparation method thereof
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CN110668812A (en) * 2019-09-18 2020-01-10 苏州炻原新材料科技有限公司 Nano zirconium oxide spraying powder and preparation method thereof
CN110668813A (en) * 2019-09-18 2020-01-10 苏州炻原新材料科技有限公司 Preparation method of nano zirconia granulated powder
CN110668812B (en) * 2019-09-18 2021-10-26 苏州炻原新材料科技有限公司 Nano zirconium oxide spraying powder and preparation method thereof
CN112194485A (en) * 2020-10-14 2021-01-08 内蒙古科技大学 A thermal barrier coating ceramic material and its preparation method and application
CN113233893A (en) * 2021-06-25 2021-08-10 西安热工研究院有限公司 Micro-nano silicon carbide/calcium oxide stabilized zirconia spherical feed and preparation method thereof
CN113233907A (en) * 2021-06-25 2021-08-10 西安热工研究院有限公司 Silicon carbide-calcium oxide stabilized zirconia composite thermal barrier coating and preparation method thereof
CN113233893B (en) * 2021-06-25 2022-05-31 西安热工研究院有限公司 Micro-nano silicon carbide/calcium oxide stabilized zirconia spherical feed and preparation method thereof
CN113233907B (en) * 2021-06-25 2022-05-31 西安热工研究院有限公司 A kind of silicon carbide-calcium oxide stabilized zirconia composite thermal barrier coating and preparation method
CN117658629A (en) * 2023-12-01 2024-03-08 杭钢金属陶瓷(安吉)有限公司 Multi-element composite stable zirconia thermal barrier coating material and preparation method thereof
CN118621265A (en) * 2024-07-18 2024-09-10 广东伽瓦纳米科技有限公司 A spray powder for PS-PVD process and preparation method thereof

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Application publication date: 20120711