CN102554758B - Lapping device - Google Patents

Abstract

The present invention relates to a grinding device that supports a grinding member so as to be able to swing relative to a processing surface of a workpiece, and moves the grinding member toward the workpiece in a state where the grinding member is pressed against the workpiece. The processing surface is relatively moved in a horizontal direction to grind the processing surface of the above-mentioned processed part. The grinding device has: a rotation transmission part that transmits torque from a rotation drive source to the above-mentioned grinding part; and a rotation transmission mechanism that has a laminated rubber The laminated rubber member is clamped between the first mounting member provided on the above-mentioned rotation transmission member and the second mounting member provided on the above-mentioned grinding member in a pressurized manner, transmits the torque of the above-mentioned rotation transmission member, and follows The above-mentioned rocking motion of the grinding member is deformed.

Description

grinding device

technical field

The invention relates to a grinding device.

Background technique

11 and 12 show a conventional polishing device described in Patent Document 1. As shown in FIG. As shown in FIG. 11 , this lapping device 130 has a lapping member support mechanism (hereinafter referred to as an RCC mechanism (remote center compliance structure)) 134 and a torque transmission unit (rotation transmission mechanism) 136 .

The RCC mechanism 134 has four laminated rubber members 137 . The lower end portion of the laminated rubber member 137 is fixed at intervals of 90° to the peripheral surface of the truncated cone 138 formed on the surface of the grinding plate (grinding member) 140 .

As shown in FIG. 12 , the laminated rubber members 137 , 137 , . In this way, the grinding plate 140 is connected to the support plate 143 by means of laminated rubber members 137, 137, . . . . At this time, the extension lines of the four laminated rubber members 137 intersect at a virtual center D point on the central axis of the polishing plate 140 , and the virtual center D is located slightly below the polishing surface of the polishing plate 140 .

The laminated rubber member 137 is not shown, but is formed by embedding a plurality of metal plates in rubber formed in a cylindrical shape at small intervals in the axial direction of the laminated rubber member 137 . And as shown in FIG. 12 , mounting portions 137C, 137D are respectively formed at both ends of the cylindrical laminated rubber member 137 , and the mounting portions 137C, 137D are fixed to the support plate 143 and the grinding plate 140 .

The amount of deformation of the laminated rubber members 137 against the vertical load is very small, and when the pressing force P shown in FIG. In addition, the laminated rubber member 137 has _a large amount of deformation with respect to the horizontal load, and when the frictional reaction force F1 is generated in the polishing plate 140, the polishing plate 140 is retracted upward to prevent the polishing plate 140 from sticking. In this way, uneven grinding is prevented from occurring in the glass plate 142, and the glass plate 142 is polished uniformly.

As shown in FIG. 11 , the torque transmission unit 136 has a rectangular housing 146 , and mounting portions 146A, 146A are formed in the center on the left and right sides forming the housing 146 . Furthermore, mounting portions 146B, 146B are formed at the center of the upper and lower sides forming the casing 146 . One end of the laminated rubber members 148 , 148 is fixed to the mounting portion 146A, and the other end of the laminated rubber members 148 , 148 is fixed to the end of the U-shaped block 150 . At this time, the laminated rubber members 148, 148 are arranged coaxially. And, the U-shaped blocks 150 , 150 are fixed to the grinding plate 140 .

One end of the laminated rubber member 149 , 149 is fixed to the mounting portion 146B, and the other end of the laminated rubber member 149 , 149 is fixed to the end of the U-shaped block 152 . At this time, the laminated rubber members 149 , 149 are arranged coaxially, and the upper surface 152A of the U-shaped block 152 is fixed to the support plate 143 . Therefore, for example, when the support plate 143 revolves, the rotational force of the support plate 143 is transmitted to the laminated rubber members 149 , 149 via the U-shaped blocks 152 , 152 .

At this time, since rotational force acts on the axial direction of laminated rubber members 149 , 149 , the rotational force transmitted to laminated rubber members 149 , 149 is transmitted to mounting portions 146A, 146A through mounting portions 146B, 146B and housing 146 . The rotational force transmitted to mounting parts 146A, 146A acts in the axial direction of laminated rubber members 148 , 148 and is transmitted to polishing plate 140 through laminated rubber members 148 , 148 and U-shaped blocks 150 , 150 . In this way, when a rotational force acts on the support plate 143 , the grinding plate 140 also follows the support plate 143 and moves, preventing the grinding plate 140 from twisting.

Patent Document 1: Japanese Patent Application Laid-Open No. 9-57615

Contents of the invention

In the above-mentioned prior art rotation transmission mechanism using a grinding member, which has two pairs of laminated rubber members 148, 148 and 149, 149, when the size of the grinding object (part to be processed) is increased, only the corresponding The size of the object to be polished increases the size of the unit itself.

However, when the above-mentioned unit is directly enlarged, it is difficult to assemble and manufacture the end face of the cylindrical laminated rubber member without wearing or rotating the laminated rubber member around its central axis, and the durability of the rotation transmission mechanism of the grinding member is limited. problem, there is a problem that it is difficult to scale up.

The present invention was conceived in view of this situation, and its object is to provide a rotation transmission mechanism for a grinding member that transmits torque composed of a laminated rubber member that reduces the problem of damage to the laminated rubber and that can cope with an increase in the size of the device. Grinding device with mounting structure for laminated rubber parts.

In order to achieve the above object, the present invention provides a grinding device, which supports the grinding member so as to be able to swing relative to the processing surface of the workpiece, and in the state where the grinding member is pressed against the workpiece, the grinding member is moved toward the Relatively moving in a direction horizontal to the processing surface of the above-mentioned processed part to grind the processing surface of the above-mentioned processed part, the grinding device has: a rotation transmission part that transmits torque from a rotational drive source to the above-mentioned grinding part; and a rotation transmission mechanism , having a laminated rubber member sandwiched between a first mounting member provided on the above-mentioned rotation transmission member and a second mounting member provided on the above-mentioned grinding member in a pressurized manner, and transmitting the force of the above-mentioned rotation transmission member Torque, and deformed following the rocking motion of the above-mentioned grinding parts.

Therefore, by applying pressure when assembling the laminated rubber, tensile force is not generated in the laminated rubber assembled to the rotation transmission mechanism, preventing the laminated rubber from cracking, and improving the durability of the rotation transmission mechanism using the laminated rubber .

In addition, in the polishing device according to the present invention, it is preferable that the natural length of the laminated rubber member of the rotation transmission mechanism before being mounted between the first mounting member and the second mounting member is larger than that of the first mounting member and the second mounting member. Length between parts.

In this way, pressure can be easily applied to the assembled laminated rubber, and the durability of the rotation transmission mechanism can be improved.

In addition, in the polishing device of the present invention, preferably, in at least any one of between the laminated rubber member and the first mounting member and between the laminated rubber member and the second mounting member of the rotation transmission mechanism, A rotation preventing means for preventing the above-mentioned laminated rubber member from rotating around its central axis is provided.

This prevents the end surfaces of the laminated rubber from being worn out due to friction, and improves the durability of the rotation transmission mechanism.

In addition, in the polishing device according to the present invention, it is preferable that the rotation prevention means of the rotation transmission mechanism is connected between the end surface of the laminated rubber member and the first mounting member and between the laminated rubber member and the second mounting member. Two pins that engage at least either side of the

In this way, rotation of the laminated rubber can be easily prevented, reducing the occurrence of problems caused by abrasion.

Furthermore, in order to achieve the above object as well, the present invention provides a grinding device in which a predetermined number of the above-mentioned rotating parts are arranged corresponding to the size of the above-mentioned grinding member between the above-mentioned grinding member corresponding to any size of the workpiece and the above-mentioned rotation transmitting member. delivery agency.

In this way, for the increase in the size of the grinding part accompanying the increase in the size of the workpiece, a plurality of rotation transmission mechanisms using small laminated rubber parts can be arranged, and a grinding device of any size can be freely installed, and the size of the grinding device can be easily increased. .

Furthermore, in the grinding device of the present invention, it is preferable to have the above-mentioned laminated rubber member that transmits the torque of the above-mentioned rotation transmission member to the above-mentioned grinding member, and to have a plurality of fluid springs for pushing the thrust during grinding. A pressing force pressing the workpiece is applied from the rotation transmission member to the grinding member, and the plurality of fluid springs are arranged between the rotation transmission member and the grinding member so as to make the pressing force on the workpiece uniform. position.

This prevents the grinding parts from floating or vibrating, and grinding can be performed with an appropriate pushing force.

As described above, according to the present invention, by applying pressure when assembling the laminated rubber, the laminated rubber assembled to the rotation transmission mechanism does not generate tensile force, preventing the laminated rubber from breaking, and improving the rotation transmission using the laminated rubber. Mechanism durability. Furthermore, when the anti-rotation means for preventing the above-mentioned laminated rubber member from rotating around its central axis is provided, it is possible to prevent the end faces of the laminated rubber from being worn out due to friction, thereby reducing the problem of damage to the laminated rubber. Furthermore, by arranging a plurality of rotation transmission mechanisms using small laminated rubber members, it is possible to easily increase the size of the polishing apparatus in response to an increase in the size of the workpiece.

Description of drawings

FIG. 1 is a perspective view showing an outline of a polishing line of a polishing apparatus according to the present invention.

Fig. 2 is a plan view of a grinding unit.

FIG. 3 is a cross-sectional view of the grinding unit along line 3A-3A in FIG. 2 .

4(A) and 4(B) are enlarged plan views of a laminated rubber unit.

Fig. 5 is a perspective view showing a laminated rubber member.

6(A) to 6(C) are plan views showing examples in which an air spring and a laminated rubber unit are arranged on a rectangular grinding plate.

Fig. 7 is a schematic perspective view showing another example of the polishing line of the polishing device according to the present invention.

8 is a plan view showing an example of an arrangement of air springs and laminated rubber units provided between the support plate and the grinding plate of the grinding unit.

Fig. 9 is a plan view showing an example in which an air spring and a laminated rubber unit are arranged on a relatively large grinding plate.

Fig. 10 is a plan view showing an example of a laminated rubber unit provided on a large-sized polishing plate.

Fig. 11 is a perspective view showing the outline of a conventional polishing device.

12 is a cross-sectional view showing a polishing pressure applying unit using laminated rubber in a conventional polishing apparatus.

detailed description

The polishing device according to the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a perspective view showing an outline of a polishing line of a polishing apparatus according to the present invention. The grinding line forms a continuous grinding device in which a plurality of grinding units having rectangular grinding plates are arranged.

As shown in Figure 1, the grinding line 1 of this continuous grinding device is composed of the following: a grinding disc 2 is equipped with a glass plate 3 as a workpiece to be processed, and moves in the transfer direction shown by arrow A; grinding units 4, 4... , on the glass plate 3 transferred on the grinding table 2, a plurality of them are arranged along the moving direction A.

To be described in detail later, each grinding unit 4 has a support plate (rotation transmission member) and a grinding plate (grinding component) as an upper and lower fixed plate, and a rotation transmission mechanism and an air spring are arranged between the support plate and the grinding plate. The mechanism can swingably support the grinding part relative to the processing surface of the processed part, and transmit the torque from the supporting plate to the grinding plate, and the air spring applies the grinding pressure to the grinding plate to control the grinding pressure. Among them, the rotation transmission mechanism uses a laminated rubber member (laminated rubber unit), and the grinding member swings due to deformation of the laminated rubber member. Also, the laminated rubber member deforms following the rocking motion of the grinding member.

In addition, a rotational drive shaft 5 for transmitting a rotational driving force from a drive source (not shown) to the grinding unit 4 is disposed on the upper portion of the grinding unit 4 . The rotating drive shaft 5 makes the support plate eccentrically rotate through the eccentric rotation mechanism arranged in the grinding unit 4 (wherein, the eccentric rotation refers to that the support plate maintains a certain posture, and rotates around a certain point deviated from the center of mass of the support plate ( The so-called revolution)).

When the support plate rotates eccentrically, the polishing plate also rotates eccentrically like the support plate by a rotation transmission mechanism (laminated rubber unit) using a laminated rubber member. In this way, the surface (processed surface) of the glass plate 3 is ground by the grinding plate which is supported so as to be swingable with respect to the glass plate 3 and rotates eccentrically.

FIG. 2 shows a plan view of the grinding unit 4 . However, in FIG. 2 , the support plate as the upper platen is omitted, and the air spring 10 and the laminated rubber unit 12 constituting the rotation transmission mechanism are arranged on the grinding plate 7 .

As shown in FIG. 2 , on the rectangular grinding plate 7 , the air springs 10 and the laminated rubber units 12 are arranged in a row along the longitudinal direction thereof. In addition, the grinding plate 7 rotates (revolves) around a point other than the center of mass of the grinding plate 7 while maintaining this posture (the direction thereof is arranged to be long in the horizontal direction in the drawing), but in order to transmit this torque to the grinding plate 7 , the laminated rubber unit 12 is disposed in both the longitudinal direction and the lateral direction.

FIG. 3 shows a cross-sectional view of the grinding unit 4 along line 3A-3A in FIG. 2 . In FIG. 3 , however, the support plate 6 , which was omitted in FIG. 2 , is also shown.

As shown in FIG. 3 , in the grinding unit 4, an air spring 10 and a laminated rubber unit 12 are arranged between the support plate 6 and the grinding plate 7, and the pressing forces (grinding pressure) P1 and P2 when grinding the glass plate 3 are applied by the air spring 10. to the grinding plate 7, and the rotational drive torque from the support plate 6 is transmitted to the grinding plate 7 through the laminated rubber unit 12. Air springs are fluid springs that utilize the elasticity of air and have the function of absorbing vibrations. In addition, a fluid spring using gas other than air may also be used.

Further, a polishing pad made of polyurethane foam is attached to the lower surface of the polishing plate 7 (on the side of the glass plate 3 ), and the surface (processing surface) of the glass plate 3 (not shown here) is polished by the polishing pad 8 .

The grinding units 4 , 4 .

In addition, the laminated rubber unit 12 is configured such that the U-shaped block 13 (second mounting member) is fixed on the grinding plate 7, and the mounting portion 14 (first mounting member) fixed to the support plate 6 is positioned at the opening of the U-shaped block 13. Laminated rubber members 15 , 15 are disposed between the center of the mounting portion 14 and the U-shaped blocks 13 on both sides of the mounting portion 14 .

FIG. 4 shows the laminated rubber unit 12 in an enlarged manner.

As shown in Fig. 4, the structure of the laminated rubber unit 12 is that a U-shaped block 13 is arranged, and a protruding mounting portion 14 is disposed in the approximate center of the opening of the U-shaped block 13, and the mounting portion 14 and the U-shaped block In the two gaps between 13, laminated rubber members 15, 15 are arranged respectively.

When attaching the laminated rubber members 15, 15, the laminated rubber members 15, 15 are conversely compressed so as not to generate tensile force. For this purpose, for example, the laminated rubber members 15, 15, which are larger than the natural length of each gap in the axial direction, can be compressed and shrunk to be fitted into the gap.

For example as shown in Figure 4 (A), suppose the width of the opening of U word block 13 is L1, the width of the protrusion of mounting part 14 is L2, the gap between mounting part 14 and U word block 13 is respectively L3, L4. At this time, the gaps L3 and L4 can be derived as L1-L2=L3+L4 from the width L1 of the opening of the U-shaped block 13 and the width L2 of the protrusion of the mounting part 14. Next, the laminated rubber member 15 whose natural length exceeds the wide length of L3 and L4 is prepared. And as shown in FIG. 4(B), the widths of L3 and L4 always change during polishing.

Therefore, the preferred natural length (shortest shortened length) of the laminated rubber member 15 can be obtained as follows.

For example, FIG. 4(B) shows that when the laminated rubber member 15 provided in L3 is shortened the most (at the time of the shortest shortened length), selection is made so that the natural length L0 of the laminated rubber member 15 provided in L4 is greater than L4, that is, L4 is satisfied. <L0.

In this way, even if the attachment part 14 moves left and right greatly during polishing, the laminated rubber member 15 will not be deformed to a length exceeding its natural length, and damage to the laminated rubber member 15 can be prevented.

When this condition is satisfied, the laminated rubber members 15 , 15 are shrunk and fitted into the gap between the opening of the U-shaped block 13 and the mounting portion 14 , thereby applying pressure to the laminated rubber members 15 , 15 . In this way, no tensile force is generated in the laminated rubber members 15, 15, and the durability of the laminated rubber members 15, 15 can be improved.

FIG. 5 shows a perspective view of the laminated rubber member 15 .

In the conventional laminated rubber parts, there is a risk that the end faces of the laminated rubber parts will be worn and degraded due to rotation around the central axis (slightly deviated in the circumferential direction). To prevent this, in the present embodiment, as shown in FIG. As shown, in addition to the center shaft 16, another pin 17 (rotation preventing unit) is provided. Engaging the pin 17 with at least one of the U-shaped block 13 and the mounting portion 14 prevents the laminated rubber member 15 from rotating around the central axis 16 . That is to say, it is preferable that between the laminated rubber member 15 and the mounting portion 14 of the laminated rubber unit 12, and between at least any one of the laminated rubber member 15 and the U block 13, an anti-lamination rubber is provided. Pin 17 for rotation of part 15 about its central axis.

In addition, instead of providing the central shaft 16 and another pin 17 , two pins may be provided in addition to the central shaft 16 . In this way, the laminated rubber part does not rotate, and abrasion of the end face can be prevented.

In the example of the grinding unit 4 shown in FIG. 2 described above, there are two air springs 10 and three laminated rubber units 12 , and FIG. 6 shows an example of a larger grinding unit 4 .

In all the examples shown in FIG. 6 , an air spring 10 and a laminated rubber unit 12 are disposed on a rectangular grinding plate 7 of the grinding unit 4 . In both figures, the air spring 10 is shown as a circle, and the laminated rubber unit 12 is shown as a rectangle.

The example shown in FIG. 6(A) has three air springs 10 and four laminated rubber units 12 . In the example shown in FIG. 6(B), the grinding plate 7 is larger with seven air springs 10 and four laminated rubber units 12 . Furthermore, in the example shown in FIG. 6(C), the grinding plate 7 is further enlarged, and has ten air springs 10 and eight laminated rubber units.

Therefore, in this embodiment, by using a plurality of laminated rubber units, it is possible to cope with various large polishing devices (polishing units). In addition, in each laminated rubber unit 12, the compact laminated rubber is pressurized to prevent its rotation around the central axis, so that the durability of the grinding unit can be improved.

The example of the polishing apparatus described above uses a rectangular polishing plate, and an example using a circular polishing plate will be described below.

Fig. 7 shows a schematic configuration of a grinding line having a grinding unit having a circular grinding plate.

As shown in FIG. 7, the grinding line 100 is the same as the grinding line 1 shown in FIG. (only one is shown in FIG. 7 )..., and a plurality of them are arranged along the transfer direction A above the glass plate 3 transferred on the grinding table 2 .

Among them, the grinding unit 104 has a support plate and a grinding plate (not shown in the figure) therein, and an eccentric rotation mechanism 106 is arranged on the top thereof. The eccentric rotation mechanism 106 makes the grinding plate rotate (self-rotate) around its central axis as shown by arrow B through the support plate in the grinding unit 104, and rotates the grinding plate around a point deviated from the central axis of the grinding plate as shown by the dotted line and the arrow Rotation as indicated by C (eccentric rotation, so-called revolution). Moreover, although illustration is omitted, a polishing pad is provided on the lower surface of the polishing plate.

And, although illustration is omitted, as shown in FIG. 3 , between the support plate and the grinding plate in the grinding unit 104, a plurality of air springs for supplying grinding pressure from the support plate to the grinding plate are also provided, and Laminated rubber unit for transmitting rotational drive torque to the grinding plate. In addition, the plurality of air springs are arranged between the support plate and the polishing plate at positions where the pressing force on the glass plate becomes equal.

A plurality of polishing units 104 configured in this way are arranged along the polishing line 100 , and the polishing plate of each polishing unit 104 is rotated and revolved respectively, and the glass plate 3 is transferred on the polishing table 2 below it, thereby continuously polishing the glass plate 3 .

FIG. 8 shows an example of an arrangement of air springs and laminated rubber units disposed between the support plate and the grinding plate of the grinding unit 104 .

As shown in FIG. 8 , on the grinding plate 107 , eight air springs 110 and four laminated rubber units 120 are arranged at uniform positions on the circular grinding plate 107 .

9 shows an example in which the air spring 110 and the laminated rubber unit 120 are arranged on the polishing plate 107 when the polishing unit 104 is enlarged.

In the example shown in FIG. 9 , sixteen air springs 110 and four laminated rubber units 120 are arranged at uniform positions on the grinding plate 107 .

In addition, when the size of the polishing unit 104 is increased in this way, the laminated rubber unit 120 that transmits the rotational drive torque from the support plate to the polishing plate must also transmit a large torque, so the number of laminated rubbers is increased to cope.

FIG. 10 shows an example of the laminated rubber unit 120 at this time.

The laminated rubber unit 120 is composed of a quadrangular housing 122 coupled to the polishing plate 107 , an attachment portion 124 coupled to a support plate (not shown), and a laminated rubber member 126 .

The mounting portion 124 is disposed in the central opening of the rectangular housing 122 , and two laminated rubber members 126 are disposed on the left and right between the mounting portion 124 and the housing 122 .

In this way, the torque from the support plate driven by the eccentric rotation mechanism 106 is transmitted from the mounting part 124 to the grinding plate 107 (not shown here) through the laminated rubber member 126 and the housing 122, and the grinding plate 107 rotates and rotates. Eccentric rotation (revolution).

In addition, in this laminated rubber unit 120, as in the above example, when assembling the laminated rubber member 126 to the laminated rubber unit 120, in order not to generate tensile force in the laminated rubber member 126, it is attached so as to apply pressure. . For example, the gap between the mounting part 124 and the housing 122 is prepared and the laminated rubber is longer than the natural length in the axial direction, and the gap between the mounting part 124 and the housing 122 is fitted into the gap between the mounting part 124 and the housing 122 in a contracted state. Can.

Furthermore, in order to prevent the laminated rubber member 126 from rotating around the central axis, for example, a rotation stop member is provided between the end surface of the laminated rubber member 126 and the casing 122 . As the anti-rotation member, for example, two pins may be wedged between the end surface of the laminated rubber member 126 and the casing 122 . Specifically, it is only necessary to provide one pin in addition to the central axis.

As mentioned above, when the workpiece (polishing object) is large and the size of the grinding plate is increased correspondingly, multiple small-sized The laminated rubber unit and air spring are arranged between the support plate and the grinding plate, so that the size of the grinding unit can be easily increased. Therefore, when increasing the size of the grinding unit for grinding a large glass plate, it is preferable to use a plurality of units using small laminated rubber.

In the prior art, when a large laminated rubber unit corresponding to the torque generated with the increase in the size of the polishing device is used, the polishing device itself becomes larger and the structure becomes complicated, making equipment design difficult.

However, in this embodiment, the laminated rubber unit itself is not enlarged, but multiple units using small laminated rubber are used, so the area of the polishing unit can be increased without changing the size of the polishing unit in the height direction. Therefore, the virtual center of the grinding unit can be enlarged without being separated from the material to be ground, so that the variation in grinding pressure on the workpiece can be reduced, and uniform grinding can be performed.

In addition, in the assembly structure of the conventional laminated rubber, when the assembled part has a gap that may cause friction and wear, when it is used, a tensile force is applied to the laminated rubber, which may break. However, in this embodiment, when the laminated rubber is attached to the laminated rubber unit, the laminated rubber is pressurized and at the same time, a member is provided to prevent the laminated rubber from rotating around the central axis, thereby preventing the laminated rubber mounting part from being damaged. Wear of the sliding surface increases the durability of the grinding unit.

In addition, as a member to prevent the laminated rubber from rotating around the central axis, as described above, two pins can be added between the end surface of the laminated rubber and a fixed member such as a casing to prevent rotation, but it is not limited to this, for example, it can also be bonded. The agent is fixed to prevent rotation.

In addition, in the example described above, an air spring was used as means for applying and controlling the grinding pressure to the grinding plate, but the means for applying and controlling the grinding pressure is not limited to the air spring. For example, a device in which a plurality of laminated rubber members 137 are arranged obliquely as described in FIGS. 11 and 12 , a fluid cylinder, or other means may be used.

In addition, the components for applying pressure to the laminated rubber or attaching members for preventing the laminated rubber from rotating around the central axis described in this embodiment can also be applied to the laminated rubber member 148 of the conventional polishing device described in FIG. 11 . , 149. In this way, the durability of the laminated rubber member of the conventional polishing device can be improved.

The polishing apparatus according to the present invention has been described in detail above, but the present invention is not limited to the above examples, and various improvements and modifications can be made without departing from the gist of the present invention.

Although this invention was demonstrated in detail with reference to the specific embodiment, it goes without saying that various corrections and changes can be made without departing from the scope and spirit of this invention for those skilled in the art.

Claims (5)

1. a lapping device, grinding component is supported for and can wave relative to the machined surface of processed parts, when above-mentioned grinding component is pressed to above-mentioned processed parts, make above-mentioned grinding component to the direction relative motion of the machined surface level with above-mentioned processed parts, grinding the machined surface of above-mentioned processed parts, this lapping device has:

Rotation transmission member, the torque of spinning drive source in the future is delivered to above-mentioned grinding component；And

Rotary transfer machine, there is lamination rubber components, this lamination rubber components is clipped in and is arranged between the first installing component of above-mentioned rotation transmission member and the second installing component being arranged at above-mentioned grinding component executing stressed mode, transmit the torque of above-mentioned rotation transmission member, and follow the oscillating motion of above-mentioned grinding component and deform

In described lapping device,

In at least any one party between the above-mentioned lamination rubber components and above-mentioned first installing component of above-mentioned rotary transfer machine and between above-mentioned lamination rubber components and above-mentioned second installing component, it is provided with the rotation prevention unit preventing above-mentioned lamination rubber components to be rotated about its center axis

Natural length before being installed between above-mentioned first installing component and the second installing component of the above-mentioned lamination rubber components of above-mentioned rotary transfer machine is more than the length between above-mentioned first installing component and the second installing component.

2. lapping device according to claim 1, wherein,

The above-mentioned rotation prevention unit of above-mentioned rotary transfer machine is two pins engaged with at least any one party between the end face of above-mentioned lamination rubber components and above-mentioned first installing component and between above-mentioned lamination rubber components and the second installing component.

3. lapping device according to claim 1 and 2, wherein,

And corresponding above-mentioned grinding component and the above-mentioned rotation transmission member of the arbitrary size of processed parts between, the multiple above-mentioned rotary transfer machine that the size configuration of corresponding above-mentioned grinding component is predetermined.

4. lapping device according to claim 1 and 2, wherein,

Described lapping device has the above-mentioned lamination rubber components that the torque of above-mentioned rotation transmission member is delivered to above-mentioned grinding component, and there is multiple fluid spring, this fluid spring is for when grinding, will push against the pushing force of above-mentioned processed parts and be applied to above-mentioned grinding component from above-mentioned rotation transmission member, the plurality of fluid spring is configured between above-mentioned rotation transmission member and above-mentioned grinding component and makes to become on uniform position for the pushing force of above-mentioned processed parts.

5. lapping device according to claim 3, wherein,

Described lapping device has the above-mentioned lamination rubber components that the torque of above-mentioned rotation transmission member is delivered to above-mentioned grinding component, and there is multiple fluid spring, this fluid spring is for when grinding, will push against the pushing force of above-mentioned processed parts and be applied to above-mentioned grinding component from above-mentioned rotation transmission member, the plurality of fluid spring is configured between above-mentioned rotation transmission member and above-mentioned grinding component and makes to become on uniform position for the pushing force of above-mentioned processed parts.