CN102545013B - Laser gain device and method - Google Patents
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Abstract
一种激光增益装置及方法,所述装置包括增益介质、泵浦源、光学元件和控制器,所述增益介质设置在激光的光路上,并接收由泵浦源发出的泵浦光,所述控制器与泵浦源相连接,用于控制泵浦源向增益介质发出泵浦光,所述泵浦光经由光学元件进入增益介质,所述控制器还与光学元件相连接,用于控制经过光学元件的泵浦光的光强分布。所述方法通过控制器来控制泵浦光的光强分布,达到控制增益介质内的增益分布。本发明通过控制器来控制经过光学元件的泵浦光的光强分布,从而改变增益介质内的增益分布,以实现对激光束的光强进行空间调制,解决了激光损失和损伤问题,使得激光束能够成为均匀分布或者高斯型的分布。
A laser gain device and method, the device includes a gain medium, a pump source, an optical element and a controller, the gain medium is arranged on the optical path of the laser, and receives the pump light emitted by the pump source, the The controller is connected with the pump source, and is used to control the pump source to emit pump light to the gain medium, and the pump light enters the gain medium through the optical element, and the controller is also connected with the optical element, and is used to control the The light intensity distribution of the pump light of the optical element. In the method, the light intensity distribution of the pumping light is controlled by a controller, so as to control the gain distribution in the gain medium. The present invention controls the light intensity distribution of the pump light passing through the optical element through a controller, thereby changing the gain distribution in the gain medium to realize spatial modulation of the light intensity of the laser beam, solving the problem of laser loss and damage, and making the laser The beam can be uniform or Gaussian.
Description
技术领域technical field
本发明属于激光光强控制技术领域,特别是涉及一种激光增益装置及方法。The invention belongs to the technical field of laser light intensity control, and in particular relates to a laser gain device and method.
背景技术Background technique
激光由于其亮度高、单色性好、准直和聚焦性能好,已在科学研究、军事国防、工业加工、天文观测和信息传播等领域得到的广泛的应用。在实际应用当中,人们都希望获得均匀光强分布或接近高斯形光强分布的激光光束。例如在激光刻蚀加工领域,就需要得到光强分布尽量均匀的平顶光束以达到最理想的刻蚀效果;而在需要激光聚焦的情况下(如激光焊接、激光打孔、激光的光纤耦合),就希望得到光强分布尽量接近高斯型光束,从而提高激光聚焦后的光强并降低激光在焦点处的光斑大小。Due to its high brightness, good monochromaticity, good collimation and focusing performance, laser has been widely used in scientific research, military defense, industrial processing, astronomical observation and information dissemination and other fields. In practical applications, people hope to obtain a laser beam with uniform light intensity distribution or close to Gaussian light intensity distribution. For example, in the field of laser etching processing, it is necessary to obtain a flat top beam with light intensity distribution as uniform as possible to achieve the best etching effect; and in the case of laser focusing (such as laser welding, laser drilling, laser fiber coupling ), it is hoped that the light intensity distribution will be as close as possible to the Gaussian beam, so as to increase the light intensity after laser focusing and reduce the spot size of the laser at the focal point.
现有的光强分布控制技术都是透射衰减式的,且在实际应用中会受到如激光光强、孔径等因素的限制。申请号为02820338.0的中国专利申请公开了一种薄膜半导体器件及其制造方法,是直接利用具有一定光强透过率分布的掩膜改变光束的强度分布并用于半导体器件的光刻,该方法需要探测激光的强度分布后,设计、加工出对应透过率分布的掩膜,从而实现对激光强度分布的控制,但由于需要曝光、显影、定影等工艺,掩膜的制造时间较长,使该方法对激光的光斑分布的控制的实时性收到影响;另一方面,该方法实际上是对光强衰减的,将会是激光的功率受到损失;此外这种透射式掩膜的损伤阈值比较低,也限制了其应用于高功率激光。专利号为01256697.7的中国专利公开了一种液晶光阀激光束空间整形装置,提到利用液晶光阀对激光的光强分布进行控制,但该方法同样也是只能通过衰减实现对激光光强分布的控制,无法解决激光损失和损伤问题。The existing light intensity distribution control technologies are all transmission attenuation type, and will be limited by factors such as laser light intensity and aperture in practical application. The Chinese patent application with the application number 02820338.0 discloses a thin film semiconductor device and its manufacturing method. It directly uses a mask with a certain light intensity distribution to change the intensity distribution of the light beam and uses it for photolithography of semiconductor devices. The method requires After the intensity distribution of the laser is detected, a mask corresponding to the transmittance distribution is designed and processed, so as to realize the control of the laser intensity distribution. The method affects the real-time performance of the control of the spot distribution of the laser; on the other hand, the method actually attenuates the light intensity, which will cause the power of the laser to be lost; in addition, the damage threshold of this transmissive mask is compared with Low, which also limits its application to high-power lasers. The Chinese patent No. 01256697.7 discloses a liquid crystal light valve laser beam space shaping device, and mentions that the liquid crystal light valve is used to control the light intensity distribution of the laser, but this method can only realize the laser light intensity distribution through attenuation. The control of the laser cannot solve the problem of laser loss and damage.
发明内容Contents of the invention
(一)要解决的技术问题(1) Technical problems to be solved
本发明要解决的技术问题是:现有技术获得均匀光强分布或接近高斯形光强分布的激光光束只能通过衰减实现,无法解决激光损失和损伤问题。The technical problem to be solved by the present invention is that the prior art can obtain a laser beam with uniform light intensity distribution or close to Gaussian light intensity distribution only through attenuation, which cannot solve the problem of laser loss and damage.
(二)技术方案(2) Technical solution
为了解决上述技术问题,本发明提供一种激光增益装置。In order to solve the above technical problems, the present invention provides a laser gain device.
其中,所述装置包括增益介质、泵浦源、光学元件和控制器,所述增益介质设置在激光的光路上,并接收由泵浦源发出的泵浦光,所述控制器与泵浦源相连接,用于控制泵浦源向增益介质发出泵浦光,所述泵浦光经由光学元件进入增益介质,所述控制器还与光学元件相连接,用于控制经过光学元件的泵浦光的光强分布。Wherein, the device includes a gain medium, a pump source, an optical element and a controller, the gain medium is arranged on the optical path of the laser, and receives the pump light emitted by the pump source, and the controller and the pump source Connected, used to control the pump source to send pump light to the gain medium, the pump light enters the gain medium through the optical element, and the controller is also connected to the optical element, used to control the pump light passing through the optical element light intensity distribution.
优选地,所述光学元件包括液晶光阀、透镜组和反射镜,在泵浦源和增益介质之间依次设有液晶光阀、透镜组和反射镜,所述控制器与液晶光阀相连接。Preferably, the optical element includes a liquid crystal light valve, a lens group and a reflector, and a liquid crystal light valve, a lens group and a reflector are sequentially arranged between the pump source and the gain medium, and the controller is connected to the liquid crystal light valve .
优选地,所述光学元件包括变形镜和傅里叶变换镜,在泵浦源和增益介质之间依次设有变形镜和傅里叶变换镜,所述控制器与变形镜相连接。Preferably, the optical element includes a deformable mirror and a Fourier transform mirror, the deformable mirror and the Fourier transform mirror are sequentially arranged between the pump source and the gain medium, and the controller is connected to the deformable mirror.
优选地,所述增益介质为Nd:YVO4。Preferably, the gain medium is Nd:YVO4.
本发明还提供了一种激光增益方法,在激光的光路上设有接收到泵浦光的增益介质,所述泵浦光经由与控制器相连接的光学元件进入增益介质,所述控制器控制经过光学元件的泵浦光的光强分布,使得泵浦光入射进增益介前的光强分布在预设值的容限范围内,以控制增益介质内的增益分布,从而实现将激光的光强分布调制为均匀分布或高斯分布。The present invention also provides a laser gain method, in which a gain medium that receives pumping light is provided on the optical path of the laser, and the pumping light enters the gain medium through an optical element connected to a controller, and the controller controls The light intensity distribution of the pump light passing through the optical element makes the light intensity distribution of the pump light before it enters the gain medium within the tolerance range of the preset value, so as to control the gain distribution in the gain medium, so as to realize the light intensity of the laser The strong distribution is modulated as a uniform distribution or a Gaussian distribution.
优选地,所述控制器控制泵浦光在入射增益介质前的光强在IpH(x,y)容限范围内,Preferably, the controller controls the light intensity of the pump light before it is incident on the gain medium to be within the tolerance range of I pH (x, y),
其中,
式中,A0为激光的光强振幅,Ii(x,y)为激光在增益介质入射面的光强分布,λl为激光波长,λp为泵浦光的波长,h为普朗克常量,c为光速,σ21为增益介质的受激发射截面,τf为激活离子的上能级寿命,α为增益介质对泵浦光的吸收系数,L为增益介质的长度,x、y为空间坐标,e为欧拉系数。In the formula, A 0 is the light intensity amplitude of the laser, I i (x, y) is the light intensity distribution of the laser on the incident surface of the gain medium, λ l is the laser wavelength, λ p is the wavelength of the pump light, h is Planck's constant, c is the speed of light, σ 21 is the stimulated emission cross section of the gain medium, τ f is the upper energy level lifetime of the active ion, and α is The absorption coefficient of the gain medium to the pump light, L is the length of the gain medium, x and y are the space coordinates, and e is the Euler coefficient.
优选地,所述控制器控制泵浦光在入射增益介质前的光强在IpG(x,y)容限范围内,其中,Preferably, the controller controls the light intensity of the pump light before entering the gain medium to be within the tolerance range of I pG (x, y), wherein,
式中,A0为激光的光强振幅,Ii(x,y)为激光在增益介质入射面的光强分布,λl为激光波长,λp为泵浦光的波长,h为普朗克常量,c为光速,σ21为增益介质的受激发射截面,τf为激活离子的上能级寿命,α为增益介质对泵浦光的吸收系数,L为增益介质的长度,x、y为空间坐标,ω为高斯光束的束腰参数,e为欧拉系数。In the formula, A 0 is the light intensity amplitude of the laser, I i (x, y) is the light intensity distribution of the laser on the incident surface of the gain medium, λ l is the laser wavelength, λ p is the wavelength of the pump light, h is Planck's constant, c is the speed of light, σ 21 is the stimulated emission cross section of the gain medium, τ f is the upper energy level lifetime of the activated ion, and α is The absorption coefficient of the gain medium to the pump light, L is the length of the gain medium, x and y are the space coordinates, ω is the beam waist parameter of the Gaussian beam, and e is the Euler coefficient.
优选地,还包括记录激光的入射光强步骤,在泵浦源关闭的情况下,开启激光源,记录此时的增益介质入射面处的光强分布Ii(x,y),再计算出泵浦光在入射增益介质前的光强IpH或IpG的值,由控制器控制经由光学元件的泵浦光的光强,使得泵浦光在入射增益介质前光强在IPH或IPG的容限范围内。Preferably, it also includes the step of recording the incident light intensity of the laser, when the pump source is turned off, turn on the laser source, record the light intensity distribution I i (x, y) at the incident surface of the gain medium at this time, and then calculate The value of the light intensity IpH or IpG of the pump light before it is incident on the gain medium, and the light intensity of the pump light passing through the optical element is controlled by the controller so that the light intensity of the pump light before the incident gain medium is at IPH or IpG within the tolerance range of PG .
优选地,所述光学元件包括液晶光阀、透镜组和反射镜,在泵浦源和增益介质的出射面之间依次设有液晶光阀、透镜组和反射镜,所述控制器与液晶光阀相连接。Preferably, the optical element includes a liquid crystal light valve, a lens group and a reflector, and a liquid crystal light valve, a lens group and a reflector are sequentially arranged between the pump source and the exit surface of the gain medium, and the controller and the liquid crystal light valve is connected.
优选地,所述光学元件包括变形镜和傅里叶变换镜,在泵浦源和增益介质的出射面之间依次设有变形镜和傅里叶变换镜,所述控制器与变形镜相连接。Preferably, the optical element includes a deformable mirror and a Fourier transform mirror, and the deformable mirror and the Fourier transform mirror are sequentially arranged between the pump source and the exit surface of the gain medium, and the controller is connected to the deformable mirror .
(三)有益效果(3) Beneficial effects
上述技术方案具有如下优点:本发明通过控制器来控制经过光学元件的泵浦光的光强分布,从而对激光进行增益,解决了激光损失和损伤问题,使得泵浦光在入射增益介质前的光强在预设值的容限范围内,达到控制增益介质内的增益分布,以实现将激光的光强分布调制为均匀分布或高斯分布,由于改变激光光强分布的过程中不存在对激光的主动衰减,因此很容易实现对高功率激光光束的光强分布控制。The above-mentioned technical solution has the following advantages: the present invention controls the light intensity distribution of the pump light passing through the optical element through the controller, thereby gaining the laser light, solving the problem of laser loss and damage, and making the pumping light before entering the gain medium The light intensity is within the tolerance range of the preset value, so as to control the gain distribution in the gain medium, so as to realize the modulation of the laser light intensity distribution to a uniform distribution or Gaussian distribution, because there is no influence on the laser light in the process of changing the laser light intensity distribution Active attenuation, so it is easy to control the light intensity distribution of high-power laser beams.
附图说明Description of drawings
图1是本发明的透射式激光增益装置的结构示意图;Fig. 1 is a schematic structural view of a transmissive laser gain device of the present invention;
图2是本发明的反射式激光增益装置的结构示意图;Fig. 2 is the structural representation of reflective laser gain device of the present invention;
图3是本发明的用于产生均匀光强激光光束的装置实施例结构示意图;Fig. 3 is a schematic structural view of an embodiment of a device for generating a uniform light intensity laser beam of the present invention;
图4是本发明的用于产生高斯光强激光光束的装置实施例结构示意图;Fig. 4 is the structural representation of the embodiment of the device for producing Gaussian light intensity laser beam of the present invention;
图5是本发明的一种实施例的结构示意图。Fig. 5 is a schematic structural diagram of an embodiment of the present invention.
其中,1:增益介质;2:泵浦源;3:泵浦光;4a:液晶光阀;4b:反射镜;4c:透镜组;4a’:变形镜;4c’:傅里叶变换镜;5:增益介质入射面;6:激光束;7:入射激光;8:控制器;9:增益介质出射面;10:电极线。Among them, 1: gain medium; 2: pump source; 3: pump light; 4a: liquid crystal light valve; 4b: mirror; 4c: lens group; 4a': deformable mirror; 4c': Fourier transform mirror; 5: incident surface of gain medium; 6: laser beam; 7: incident laser; 8: controller; 9: exit surface of gain medium; 10: electrode wire.
具体实施方式Detailed ways
下面结合附图和实施例,对本发明的具体实施方式作进一步详细描述。以下实施例用于说明本发明,但不用来限制本发明的范围。The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
如图1所示,为本发明的透射式激光增益装置的结构示意图,该激光增益装置包括增益介质1、泵浦源2、光学元件和控制器8,所述增益介质1设置在激光的光路上,接收激光和泵浦源2发出的泵浦光,所述控制器与泵浦源2相连接,用于控制泵浦源2向增益介质1发出泵浦光,并可以调节泵浦光3的强弱,所述泵浦光3经由光学元件进入增益介质1,所述控制器8还与光学元件相连接,用于控制经过光学元件的泵浦光3的光强分布。该实施例的增益介质1的入射面用于接收激光束6,该增益介质用于吸收泵浦源发出的泵浦光使自身的激活离子跃迁到激发态。进入增益介质1的激光可以是连续激光也可以是脉冲激光,激光光束可以是一次进入增益介质也可以是多次进入增益介质,形成入射激光,进入增益介质的方式可以是直通透过也可以是进入介质后经过反射后从介质出射。该增益介质1朝向激光束的面为入射面5,朝向泵浦源2的面为出射面。该增益介质1可以为固体、液体或者气体增益介质。本发明的控制器可以为各种适合的控制部件,例如单片机、驱动器。本发明通过控制器来控制经过光学元件的泵浦光的光强大小,从而对激光束进行增益,解决了激光损失和损伤问题,使得激光束能够成为预设的形状,可以是均匀分布或者高斯型的分布。As shown in Figure 1, it is a schematic structural diagram of a transmissive laser gain device of the present invention, the laser gain device includes a
如图2所示,是本发明的反射式激光增益装置的结构示意图,该实施例的增益介质1为反射式,入射激光从增益介质1的入射面5进入并反射出,该实施例中的入射面和出射面都位于激光源的一侧。增益介质1的另一面镀有双色膜层,使得泵浦光能够透射进入增益介质1,而激光则被反射回入射面。该实施例为了提高反射镜4b的反射率,在反射镜4b的表面镀有膜层。As shown in Figure 2, it is a schematic structural diagram of a reflective laser gain device of the present invention. The
本发明的控制器可以为各种适合的控制元件,例如驱动器、单片机等。本发明的光学元件也可以为各种适合的光学部件,只要能实现控制泵浦光的光强分布即可。如图3所示,是本发明用于产生均匀光强激光光束的结构示意图,该装置包括增益介质1、泵浦源2、光学器件和控制器8,所述光学器件包括液晶光阀4a、透镜组4c和反射镜4b,在泵浦源2和增益介质出射面9之间依次设有液晶光阀4a、透镜组4c和反射镜4b,所述控制器8为驱动器,与液晶光阀4a相连接。该实施例的增益介质1为Nd:YVO4(掺钕钒酸钇),为四能级系统,可以忽略其受激吸收效应,并有增益介质入射面5和增益介质出射面9;激光束6进入增益介质入射面5形成入射激光7,该入射激光为激光振荡器发射出的波长为1064nm的激光光束,到达增益介质表面的入射激光光束横截面的光强分布为Ii(x,y);泵浦源2为经过准直的半导体激光器,输出光的波长为808nm;液晶光阀4a可以通过控制其液晶阵列的偏置电压分布u(x,y)改变其透过率分布;反射镜4b的镜面镀有对808nm泵浦光高反射率、对1064nm激光高透过率的膜层;透镜组4c为多个透镜,其作用是对泵浦光3扩束或缩束,使其与入射激光7的孔径相匹配;驱动器通过电极线10与液晶光阀4a相连接,用于通过连接液晶光阀4a的电极线10对液晶光阀施加电压,以达到控制穿过液晶光阀4a的泵浦光3的光强分布。在驱动器的驱动下,连接液晶光阀阵列4a的电极线10上得到一定的电压,使由泵浦源2发射出的泵浦光3经过液晶光阀4a、透镜组4c并经反射镜4b后到达增益介质出射面9,再经过增益介质出射面9垂直入射进增益介质1并产生增益分布g(x,y,z)。作为特例,如果增益介质1是平板型,由于经过准直,增益介质1内的增益分布可以近似视为泵浦光光强分布的指数衰减。如图4所示,是本发明用于产生均匀光强激光光束的结构示意图,该装置与图3所示的装置相同,只是激光束的形状不同,通过驱动器来控制穿过液晶光阀4a的泵浦光3的光强分布,以形成如图4所示的高斯型光束。The controller of the present invention can be various suitable control elements, such as a driver, a single-chip microcomputer, and the like. The optical element of the present invention can also be various suitable optical components, as long as the light intensity distribution of the pumping light can be controlled. As shown in Fig. 3, it is the structure schematic diagram that the present invention is used to produce uniform intensity laser beam, and this device comprises
如图5所示,为本发明的另一种实施例的结构示意图,与图3和图4实施例不同的是,该实施例的光学元件包括变形镜4a’、傅里叶变换镜4c’和反射镜4b,在泵浦源2和增益介质出射面9之间依次设有变形镜4a’和傅里叶变换镜4c’,驱动器与变形镜4a’相连接。该实施例的装置是通过驱动器来控制变形镜4a’,从而改变泵浦光3的位相分布,并通过傅里叶变换镜4c’将泵浦光位相分布的变化投影到光强分布,同样实现了控制泵浦光的光强分布和孔径大小,从而对激光束进行增益,解决了激光损失和损伤问题,使得泵浦光在增益介质的出射面的光强在预定值的容限范围内,达到控制增益介质内的增益分布,以实现将激光束的光强分布调制为均匀分布或高斯分布。As shown in Figure 5, it is a schematic structural diagram of another embodiment of the present invention. The difference from the embodiments in Figures 3 and 4 is that the optical elements of this embodiment include a
本发明还提供了一种激光增益方法,在激光的光路上设有接收到泵浦光的增益介质,所述泵浦光经由与控制器相连接的光学元件进入增益介质,所述控制器控制经过光学元件的泵浦光的光强分布,使得泵浦光入射进增益介前的光强分布在预设值的容限范围内,以控制增益介质内的增益分布,从而实现将激光的光强分布调制为均匀分布或高斯分布。该方法利用控制器来控制经过光学元件的泵浦光的光强大小,从而对激光束进行增益,解决了激光损失和损伤问题,使得激光束能够成为预设的形状,可以是常用的均匀分布或者高斯型的分布。The present invention also provides a laser gain method, in which a gain medium that receives pumping light is provided on the optical path of the laser, and the pumping light enters the gain medium through an optical element connected to a controller, and the controller controls The light intensity distribution of the pump light passing through the optical element makes the light intensity distribution of the pump light before it enters the gain medium within the tolerance range of the preset value, so as to control the gain distribution in the gain medium, so as to realize the light intensity of the laser The strong distribution is modulated as a uniform distribution or a Gaussian distribution. This method uses the controller to control the light intensity of the pump light passing through the optical element, thereby gaining the laser beam and solving the problem of laser loss and damage, so that the laser beam can become a preset shape, which can be a commonly used uniform distribution or a Gaussian distribution.
本发明的激光增益方法在激光的光路上设有接收到泵浦光的增益介质,泵浦光经由驱动器控制的液晶光阀进入增益介质内产生的增益分布为g(x,y,z),所述驱动器控制穿过液晶光阀的泵浦光的光强分布,从而改变增益介质,泵浦光的光强分布于增益分布的关系可以表示为:In the laser gain method of the present invention, a gain medium that receives the pump light is provided on the optical path of the laser, and the gain distribution generated by the pump light entering the gain medium through the liquid crystal light valve controlled by the driver is g(x, y, z), The driver controls the light intensity distribution of the pump light passing through the liquid crystal light valve, thereby changing the gain medium, and the relationship between the light intensity distribution of the pump light and the gain distribution can be expressed as:
本发明的方法可以控制泵浦光的光强分布为任意形状。优选地,使得增益介质的出射面的泵浦光的光强在IpH(x,y)或者IpG(x,y)的容限范围内,即增益介质的出射面的光强在IpH(x,y)或者IpG(x,y)的上限和下限范围内,特例情况下两者相等。The method of the invention can control the light intensity distribution of the pumping light into any shape. Preferably, the light intensity of the pump light on the exit surface of the gain medium is within the tolerance range of IpH (x, y) or IpG (x, y), that is, the light intensity of the exit surface of the gain medium is within IpH (x, y) or the upper and lower limits of IpG (x, y), which are equal in exceptional cases.
其中:in:
式中,A0为激光的光强振幅,Ii(x,y)为入射激光光强分布,x、y为空间坐标,为饱和光强,λl为激光波长,λp为泵浦光的波长,h为普朗克常量,c为光速,σ21为增益介质的受激发射截面,τf为激活离子的上能级寿命,α为增益介质对泵浦光的吸收系数,L为增益介质的长度,ω为高斯光束束腰参数,e为欧拉系数。In the formula, A 0 is the light intensity amplitude of the laser, I i (x, y) is the incident laser light intensity distribution, x, y are the spatial coordinates, is the saturation light intensity, λ l is the laser wavelength, λ p is the wavelength of the pump light, h is Planck’s constant, c is the speed of light, σ 21 is the stimulated emission cross section of the gain medium, τ f is the upper energy of the activated ion α is the absorption coefficient of the gain medium for the pump light, L is the length of the gain medium, ω is the Gaussian beam waist parameter, and e is the Euler coefficient.
本发明的激光增益方法使用光学元件包括液晶光阀、透镜组和反射镜的装置时,该激光增益方法实现激光增益的过程如下:When the laser gain method of the present invention uses an optical element comprising a liquid crystal light valve, a lens group and a reflector, the laser gain method realizes the laser gain process as follows:
首先,在泵浦源不开启的情况下,启动激光源,记录此时的光强分布为Ii(x,y);First, when the pump source is not turned on, start the laser source, and record the light intensity distribution at this time as I i (x, y);
其次,利用公式(2)或(3)计算出应施的到达增益介质出射面的泵浦光的分布Ip(x,y);开启泵浦源,并利用驱动器控制液晶光阀,以改变泵浦光的出射的光强分布,并调节透镜组,使增益介质表面的泵浦光的分布为尽量接近IpH(x,y)或者IpG(x,y),即在IpH(x,y)或者IpG(x,y)容限范围内,就可以得到接近均匀或高斯形的光强分布。Secondly, use the formula (2) or (3) to calculate the distribution I p (x, y) of the pump light that should be applied to the exit surface of the gain medium; turn on the pump source, and use the driver to control the liquid crystal light valve to change The outgoing light intensity distribution of the pump light, and adjust the lens group, so that the distribution of the pump light on the surface of the gain medium is as close as possible to I pH (x, y) or I pG (x, y), that is, at I pH (x , y) or I pG (x, y) within the tolerance range, a nearly uniform or Gaussian light intensity distribution can be obtained.
当从增益介质入射表面的激光光束横截面的光强分布为均匀分布时,此时,
当从增益介质出射表面出射的激光光束横截面的光强分布为高斯型的分布这时增益介质出射面的泵浦光的分布为IpG(x,y)容限范围内。When the light intensity distribution of the cross-section of the laser beam exiting from the exit surface of the gain medium is a Gaussian distribution At this time, the distribution of the pump light on the output surface of the gain medium is within the tolerance range of I pG (x, y).
本发明的激光增益方法使用光学元件包括变形镜、傅里叶变换镜和反射镜时,本发明的方法是通过驱动器控制变形镜改变泵浦光的位相分布,并通过傅里叶变换镜将泵浦光位相分布的变化投影到光强分布Ip(x,y)上,其相互关系为:When the laser gain method of the present invention uses optical elements including deformable mirrors, Fourier transform mirrors and reflection mirrors, the method of the present invention is to change the phase distribution of the pump light through the driver to control the deformable mirrors, and to pump the pump light through the Fourier transform mirrors. The change of the phase distribution of the Pu light is projected onto the light intensity distribution I p (x, y), and the relationship between them is:
其中,FT()为傅里叶变换算符;Ip0(x,y)和φ0(x,y)为泵浦光的出射光强分布和位相分布,可以在装置建立前测得;Δφ(x,y)为变形镜引入的位相分布,i为虚数单位,k为泵浦光波矢。因此,在本实施例中,只需利用调节变形镜引入的位相分布Δφ(x,y),使泵浦光在增益介质处的光强分布Ip(x,y)趋于式(2)、(3)中的IpH(x,y)或者IpG(x,y),就可以实现将入射激光的光强分布转变为均匀分布或高斯分布。Among them, FT() is the Fourier transform operator; I p0 (x, y) and φ 0 (x, y) are the intensity distribution and phase distribution of the pump light, which can be measured before the device is built; Δφ (x, y) is the phase distribution introduced by the deformable mirror, i is the imaginary unit, and k is the pump light wave vector. Therefore, in this embodiment, only by adjusting the phase distribution Δφ(x, y) introduced by the deformable mirror, the light intensity distribution I p (x, y) of the pump light at the gain medium tends to the formula (2) , I pH (x, y) or I pG (x, y) in (3), the light intensity distribution of the incident laser can be transformed into a uniform distribution or a Gaussian distribution.
由以上实施例可以看出,本发明实施例通过控制器来控制经过光学元件的泵浦光的光强分布,从而对激光束进行增益,解决了激光光强分布控制中的激光损失和损伤问题,使得泵浦光在增益介质的出射面的光强在预定值的容限范围内,达到控制增益介质内的增益分布,以实现将激光束的光强分布调制为均匀分布或高斯分布。该方法通过控制泵浦光,使增益介质表面的泵浦光的分布为在IpH(x,y)或者IpG(x,y)容限范围内,就可以得到接近均匀或高斯形的激光光强分布。It can be seen from the above embodiments that the embodiments of the present invention control the light intensity distribution of the pump light passing through the optical element through the controller, thereby gaining the laser beam and solving the problem of laser loss and damage in the control of laser light intensity distribution , so that the light intensity of the pump light on the exit surface of the gain medium is within the tolerance range of a predetermined value, so as to control the gain distribution in the gain medium, so as to realize the modulation of the light intensity distribution of the laser beam to a uniform distribution or a Gaussian distribution. In this method, by controlling the pump light so that the distribution of the pump light on the surface of the gain medium is within the tolerance range of I pH (x, y) or I pG (x, y), a nearly uniform or Gaussian laser can be obtained. light intensity distribution.
以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明技术原理的前提下,还可以做出若干改进和替换,这些改进和替换也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, without departing from the technical principle of the present invention, some improvements and replacements can also be made, these improvements and replacements It should also be regarded as the protection scope of the present invention.
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