CN102540672A - Miniature single-catoptron and single-light-source array type laser scanning projection device - Google Patents
Miniature single-catoptron and single-light-source array type laser scanning projection device Download PDFInfo
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Abstract
The invention discloses a miniature single-catoptron and single-light-source array type laser scanning projection device, which comprises a video processing module, a laser source module, a laser drive modulation module, an optical adjustment module, a primary microelectromechanical system (MEMS) micro scanning mirror module, a secondary MEMS micro scanning mirror module, a micro scanning mirror control module and a screen, wherein the output end of the video processing module is respectively connected with the input ends of the laser drive modulation module and the micro scanning control module; the output end of the laser drive modulation module is connected with the input end of the laser source module; the output end of the micro scanning mirror control module is respectively connected with the input ends of the master MEMS micro scanning mirror module and the secondary MEMS micro scanning mirror module; and laser emitted by the laser source module is modulated by the secondary MEMS micro scanning mirror module, projected on a movable reflection mirror of the primary MEMS micro scanning mirror module through the optical adjustment module, reflected by the movable reflection mirror and then projected on the screen. The laser scanning projection device is simple in structure and low in cost; and by adoption of the laser scanning projection device, a high-definition program is partitioned, and a high-resolution and large-screen projection effect is achieved.
Description
Technical field
The present invention relates to a kind of laser scanning projection device, particularly a kind of miniature single eyeglass single light source array laser scanning projection device.
Background technology
At present, based on the laser scanning micro projection equipment of MEMS (Microelectromechanical Systems, MEMS) micro scanning mirror and LASER Light Source, it is little to have a volume, and brightness is high, advantage such as need not focus on, and tentatively is applied.Wherein, a used core component is exactly the monolithic MEMS micro scanning mirror that is used for two dimensional laser scanning, and it comprises movable catoptron and makes the driver of catoptron around X axle and Y axle high speed rotating.
At present, the laser scanning micro projection equipment limit that can reach is: the resolution of VGA (640X480) or WVGA (848X480) and the refresh rate (field-scanning period) of 60Hz.The resolution of image and refresh rate mainly receive the restriction of the line-scanning frequency and the laser modulation frequency of micro scanning mirror; In general; The sweep frequency of micro scanning mirror is high more, and its scanning angle is more little, and this just means; Application scenario nearer apart from screen can't obtain enough big projected image.Along with popularizing of giant-screen; Resolution is the high definition program emerge in multitude of 1080p (1920X1080) 60Hz and 720p (1280X720) 60Hz; Existing mini laser scanning projector equipment can't satisfy the demand of people to high resolving power, large screen projection; Not only the micro scanning mirror is difficult to obtain enough big practical scanning angle when scanning, simultaneously for microlaser, has also reached the technological limit of its modulating frequency.The laser scanning micro projection equipment of prior art is the high definition program of 1080p (1920X1080) 60Hz and 720p (1280X720) 60Hz when carrying out projection imaging to resolution, can't realize.
MEMS simulation micro scanning lens array and a plurality of miniature RGB that employing comprises a plurality of eyeglasses swash the array projection arrangement description in China's invention (ZL201020588250.9) of closing light source.But process for MEMS, adopt single eyeglass MEMS micro scanning mirror to replace and adopt the MEMS simulation micro scanning lens array that comprises a plurality of eyeglasses can further improve MEMS processed finished products rate, thereby reduce the MEMS device cost.In addition, the cost of present miniature visible laser is still very high, especially green directly light emitting diode, and its photoelectric transformation efficiency is low, is about 3%.Therefore adopt single group RGB microlaser to replace RGB microlaser array and accomplish the array large screen projection, realize high resolving power, large screen projection, become the problem that people need solution badly.
Summary of the invention
The object of the invention just provides a kind of miniature single eyeglass single light source array laser scanning projection device, utilizes single eyeglass miniscanning projection device and single group RGB microlaser, realizes high resolving power, large screen projection.
For realizing above-mentioned purpose; The present invention adopts technical scheme to be: it comprises video processing module, laser light source module, Laser Driven modulation module, optics adjusting module, main MEMS micro scanning mirror module, from MEMS micro scanning mirror module, micro scanning mirror control module and screen; The video processing module output terminal is connected with the input end of Laser Driven modulation module with micro scanning mirror control module respectively; The output terminal of Laser Driven modulation module is connected with the input end of laser light source module; The output terminal of micro scanning mirror control module is connected with input end from MEMS micro scanning mirror module with the input end of main MEMS micro scanning mirror respectively; The laser that laser light source module sends is by modulating after the optics adjusting module is incident upon on the moving reflector face of main MEMS micro scanning mirror module from MEMS micro scanning mirror module; After the reflection of moving reflector face, be incident upon on the screen;
Described video processing module is used for source images is divided into 2*2 small video or image; Described small video or little image are pairing to be the image that is positioned at original image the 1st, 2,3,4 quadrants, and the vision signal that becomes the small video that receives or little image transitions Laser Driven modulation module and micro scanning mirror control module to discern and to control;
Described Laser Driven modulation module is used to accept the vision signal from video processing module output, is used for controlling the laser instrument in the laser light source module;
Described laser light source module is accomplished laser projections work according to the drive control signal of Laser Driven modulation module, and it is by the redgreenblue laser constitution;
Described from the spatial modulation of MEMS micro scanning mirror module according to the control command realization laser beam of micro scanning mirror control module, the laser beam that timesharing ground is corresponding with the pixel of different quadrantal diagram pictures reflexes on the catoptron corresponding in the optics adjusting module;
Described optics adjusting module is used to receive the laser beam through the MEMS micro scanning mirror module modulation of associating; Adjust four laser projections directions respectively, adjusted four bundle laser are formed on screen through main MEMS micro scanning mirror module reflection back four small videos that are the arrangement of 2*2 array way or image can big video of seamless composition or images; It is made up of four catoptrons, and mirror surface is coated with the enhancing reflection plated film of visible-range;
Described micro scanning mirror control module is used to receive the vision signal of sending from video processing module, and controls main MEMS micro scanning mirror module and modulate and scanning work from MEMS micro scanning mirror module according to obtaining vision signal;
Described main MEMS micro scanning mirror module realizes line scanning and field scan according to the control command of micro scanning mirror control module;
Principle of work of the present invention is such: video processing module is divided into a sub-picture the little image that is positioned at four quadrants; The image timesharing ground of each quadrant is projected on the big screen by one group of LASER Light Source and master/slave MEMS micro scanning mirror, forms the image that a width of cloth is accomplished; We are that example is done concrete elaboration with a video; For a video; At first can be divided into 4 small videos, this is the 1st, 2,3,4 quadrants that four small videos lay respectively at image, and the pixel of the small video of each quadrant can be projected the correspondence position of screen in order: first pixel in the upper left corner of the 1st quadrant at first is processed; After the modulation of Laser Driven modulation module, laser light source module sends beam of laser; The mirror of micro scanning simultaneously control module is accepted the signal of video processing module, and control is from MEMS micro scanning mirror deflection and with 1st catoptron of this bundle laser-bounce to the optics adjusting module; Behind the 1st catoptron, this Shu Jiguang is mapped to the correspondence position in the 1st quadrant upper left corner on the screen by main MEMS micro scanning mirror reversal; Then, first pixel in the upper left corner of the 2nd quadrant is processed, and after the modulation of Laser Driven modulation module, laser light source module sends beam of laser; The mirror of micro scanning simultaneously control module is accepted the signal of video processing module, and control is from MEMS micro scanning mirror deflection and with 2nd catoptron of this bundle laser-bounce to the optics adjusting module; Behind the 2nd catoptron, this Shu Jiguang is mapped to the correspondence position in the 2nd quadrant upper left corner on the screen by main MEMS micro scanning mirror reversal; Once more, first pixel in the upper left corner of the 3rd quadrant is processed, and after the modulation of Laser Driven modulation module, laser light source module sends beam of laser; The mirror of micro scanning simultaneously control module is accepted the signal of video processing module, and control is from MEMS micro scanning mirror deflection and with 3rd catoptron of this bundle laser-bounce to the optics adjusting module; Behind the 3rd catoptron, this Shu Jiguang is mapped to the correspondence position in the 3rd quadrant upper left corner on the screen by main MEMS micro scanning mirror reversal; At last, first pixel in the upper left corner of the 4th quadrant is processed, and after the modulation of Laser Driven modulation module, laser light source module sends beam of laser; The mirror of micro scanning simultaneously control module is accepted the signal of video processing module, and control is from MEMS micro scanning mirror deflection and with 4th catoptron of this bundle laser-bounce to the optics adjusting module; Behind the 4th catoptron, this Shu Jiguang is mapped to the correspondence position in the 4th quadrant upper left corner on the screen by main MEMS micro scanning mirror reversal; Because the intensification modulation speed of LASER Light Source and be higher than the sweep velocity of main MEMS micro scanning mirror far away from the spatial modulation speed of MEMS micro scanning mirror, therefore in this process, the moving reflector sheet that is regarded as main MEMS micro scanning mirror is approximate static.After accomplishing above this process; The moving reflector sheet of main MEMS micro scanning mirror is accepted the signal of micro scanning mirror control module, moves a micro displacement, second pixel of beginning sequential projection all quadrants small video; By that analogy, up to accomplishing the complete image of a frame.The videoscanning mode can be two kinds, and hereinafter can be described in detail.Can know that from preceding text with respect to each small video, the mini laser scanning device of prior art is enough to satisfy the projection demand.Therefore even under the very near situation of space length, adopt mini laser scanning projector equipment of the present invention, also can realize the drop shadow effect of high resolving power, giant-screen.Adopt the MEMS simulation micro scanning lens array that comprises a plurality of eyeglasses can further improve MEMS processed finished products rate because the present invention adopts single eyeglass MEMS micro scanning mirror to replace, thereby reduce the MEMS device cost.Through adopting accurate optical adjustment system, therefore the actual gap between four quadrantal diagram pictures can ignore less than 1mm, does not influence imaging effect.Complete machine works together actual just as four platform independent but the little projector of synchronous working.
The present invention has following advantage owing to adopted technique scheme:
1, utilizes the miniscanning projection device and the laser instrument of prior art level, realized high resolving power, large screen projection;
2, reduced the miniscanning projection device of prior art level and the performance requirement of laser instrument;
3, simple in structure, easy and simple to handle, be easy to realize.
4, the MEMS simulation micro scanning lens array that adopts single eyeglass MEMS micro scanning mirror to replace to comprise a plurality of eyeglasses further improves MEMS processed finished products rate, reduces the MEMS device cost.
5, adopt single group RGB microlaser to replace RGB microlaser array, greatly reduce the complete machine cost.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is from MEMS micro scanning mirror module, the plan structure synoptic diagram of optics adjusting module and main MEMS micro scanning mirror module;
The synoptic diagram that Fig. 3 scans under the sawtooth wave drive waveforms for the present invention;
The sawtooth wave oscillogram that Fig. 4 adopts for the present invention;
The synoptic diagram that Fig. 5 scans under the triangular wave drive waveforms for the present invention;
Fig. 6 is the triangular wave oscillogram that the present invention adopted;
Fig. 7 is a structured flowchart of the present invention;
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is described further: shown in Fig. 1-7; It comprises video processing module 1, laser light source module 2, Laser Driven modulation module 3, optics adjusting module 4, main MEMS micro scanning mirror module 5, from MEMS micro scanning mirror module 6, micro scanning mirror control module 7 and screen 8; Video processing module 1 output terminal output terminal is connected with the input end of Laser Driven modulation module 3 with micro scanning mirror control module 7 respectively; The output terminal of Laser Driven modulation module 3 is connected with the input end of laser light source module 2; The output terminal of micro scanning mirror control module 7 is connected with input end from MEMS micro scanning mirror module 6 with the input end of main MEMS micro scanning mirror module 5 respectively; The laser that laser light source module 2 sends is by modulating after optics adjusting module 4 is incident upon on the moving reflector face of main MEMS micro scanning mirror module 5 from MEMS micro scanning mirror module 6; After the reflection of moving reflector face, be incident upon on the screen;
Described video processing module 1 is used for source images is divided into 2*2 small video or image; Described small video or little image are pairing to be the image that is positioned at original image the 1st, 2,3,4 quadrants, and the vision signal that becomes the small video that receives or little image transitions Laser Driven modulation circuit 3 and micro scanning mirror control module 7 to discern and to control;
Described Laser Driven modulation module 3 is used to accept the vision signal from video processing module 1 output, is used for controlling the laser instrument in the laser light source module 2;
Described laser light source module 2 is accomplished laser projections work according to the drive control signal of Laser Driven modulation module 3, and it is by the redgreenblue laser constitution;
Described from the spatial modulation of MEMS micro scanning mirror module 6 according to the control command realization laser beam of micro scanning mirror control module 7, the laser beam that timesharing ground is corresponding with the pixel of different quadrantal diagram pictures reflexes on the catoptron corresponding in the optics adjusting module 4;
Described optics adjusting module 4 is used to receive the laser beam through MEMS micro scanning mirror module 6 modulation of associating; Adjust four laser projections directions respectively, adjusted four bundle laser are formed on screen 8 through main MEMS micro scanning mirror module 5 reflection backs four small videos that are the arrangement of 2*2 array way or image can big video of seamless composition or images; It is made up of four catoptrons, and mirror surface is coated with the enhancing reflection plated film of visible-range;
Described micro scanning mirror control module 7 is used to receive the vision signal of sending from video processing module 1, and controls main MEMS micro scanning mirror module 5 and modulate and scanning work from MEMS micro scanning mirror module 6 according to obtaining vision signal;
Described main MEMS micro scanning mirror module 5 realizes line scanning and field scan according to the control command of micro scanning mirror control module 7;
Principle of work of the present invention is such: video processing module is divided into a sub-picture the little image that is positioned at four quadrants; The image timesharing ground of each quadrant is projected on the big screen by one group of LASER Light Source and master/slave MEMS micro scanning mirror, forms the image that a width of cloth is accomplished; We are that example is done concrete elaboration with a video; For a video; At first can be divided into 4 small videos, this is the 1st, 2,3,4 quadrants that four small videos lay respectively at image, and the pixel of the small video of each quadrant can be projected the correspondence position of screen in order: first pixel in the upper left corner of the 1st quadrant at first is processed; After the modulation of Laser Driven modulation module, laser light source module sends beam of laser; The mirror of micro scanning simultaneously control module is accepted the signal of video processing module, and control is from MEMS micro scanning mirror deflection and with 1st catoptron of this bundle laser-bounce to the optics adjusting module; Behind the 1st catoptron, this Shu Jiguang is mapped to the correspondence position in the 1st quadrant upper left corner on the screen by main MEMS micro scanning mirror reversal; Then, first pixel in the upper left corner of the 2nd quadrant is processed, and after the modulation of Laser Driven modulation module, laser light source module sends beam of laser; The mirror of micro scanning simultaneously control module is accepted the signal of video processing module, and control is from MEMS micro scanning mirror deflection and with 2nd catoptron of this bundle laser-bounce to the optics adjusting module; Behind the 2nd catoptron, this Shu Jiguang is mapped to the correspondence position in the 2nd quadrant upper left corner on the screen by main MEMS micro scanning mirror reversal; Once more, first pixel in the upper left corner of the 3rd quadrant is processed, and after the modulation of Laser Driven modulation module, laser light source module sends beam of laser; The mirror of micro scanning simultaneously control module is accepted the signal of video processing module, and control is from MEMS micro scanning mirror deflection and with 3rd catoptron of this bundle laser-bounce to the optics adjusting module; Behind the 3rd catoptron, this Shu Jiguang is mapped to the correspondence position in the 3rd quadrant upper left corner on the screen by main MEMS micro scanning mirror reversal; At last, first pixel in the upper left corner of the 4th quadrant is processed, and after the modulation of Laser Driven modulation module, laser light source module sends beam of laser; The mirror of micro scanning simultaneously control module is accepted the signal of video processing module, and control is from MEMS micro scanning mirror deflection and with 4th catoptron of this bundle laser-bounce to the optics adjusting module; Behind the 4th catoptron, this Shu Jiguang is mapped to the correspondence position in the 4th quadrant upper left corner on the screen by main MEMS micro scanning mirror reversal; Because the intensification modulation speed of LASER Light Source and be higher than the sweep velocity of main MEMS micro scanning mirror far away from the spatial modulation speed of MEMS micro scanning mirror, therefore in this process, the moving reflector sheet that is regarded as main MEMS micro scanning mirror is approximate static.After accomplishing above this process; The moving reflector sheet of main MEMS micro scanning mirror is accepted the signal of micro scanning mirror control module, moves a micro displacement, second pixel of beginning sequential projection all quadrants small video; By that analogy, up to accomplishing the complete image of a frame.The videoscanning mode can be two kinds, and hereinafter can be described in detail.Can know that from preceding text with respect to each small video, the mini laser scanning device of prior art is enough to satisfy the projection demand.Therefore even under the very near situation of space length, adopt mini laser scanning projector equipment of the present invention, also can realize the drop shadow effect of high resolving power, giant-screen.Adopt the MEMS simulation micro scanning lens array that comprises a plurality of eyeglasses can further improve MEMS processed finished products rate because the present invention adopts single eyeglass MEMS micro scanning mirror to replace, thereby reduce the MEMS device cost.Through adopting accurate optical adjustment system, therefore the actual gap between four quadrantal diagram pictures can ignore less than 1mm, does not influence imaging effect.Complete machine works together actual just as four platform independent but the little projector of synchronous working.
Main MEMS micro scanning mirror module of the present invention and be provided with a transverse axis and a vertical axes from MEMS micro scanning mirror module; Main MEMS micro scanning mirror module controlled by micro scanning mirror control circuit and the moving reflector face on MEMS micro scanning mirror module carries out deflection around transverse axis and vertical axes; When moving reflector face during around transverse axis deflection; Realize line scanning,, realize field scan when moving reflector face during around vertical axes deflection.
The mechanical deflection angle of moving reflector face of the present invention is (0-45) degree.
Main MEMS micro scanning mirror module of the present invention and from the angle between the center line of the center line of MEMS micro scanning mirror module and laser light source module greater than 0 degree and less than 90 degree.
Main MEMS micro scanning mirror module of the present invention and be that 35 degree are to 55 degree from the angle between the center line of the center line of MEMS micro scanning mirror module and laser light source module.
Main MEMS micro scanning mirror module of the present invention and be 40 degree-50 degree from the angle between the center line of the center line of MEMS micro scanning mirror module and laser light source module.
Main MEMS micro scanning mirror module of the present invention and be 45 degree from the angle between the center line of the center line of MEMS micro scanning mirror module and laser light source module.
Driving ripple in the micro scanning mirror control circuit of the present invention is sawtooth wave or triangular wave.
Main MEMS micro scanning mirror module 5 is made up of 1 twin shaft (transverse axis and vertical axes) monolithic MEMS micro scanning mirror.1 twin shaft monolithic MEMS micro scanning its projection angle of mirror and scope but are more than 4 times of monolithic twin shaft monolithic MEMS micro scanning mirror.
As shown in Figure 2, optics adjusting module 4 comprises 4 catoptrons with the different angles assembling.Owing to be vertical view, Fig. 2 has only embodied the angular setting effect in the plane parallel with paper of 4 pairs of incident laser light beams of optics adjusting module.In three-dimensional other two plane orthogonal, 4 pairs of incident laser light beams of optics adjusting module all have the angular setting effect.Incident laser reflexes to 2 catoptrons that angle is different through the modulation of the MEMS micro scanning mirror module 6 of associating, and projects on the main MEMS micro scanning mirror module 5 with different initial angles, and reflexes on the different quadrants of screen.
Each laser instrument comprises red, green, blue three look laser instruments and is used to accomplish the optical element that beam collimation focused on and closed bundle.
Shown in Fig. 3-4: the micro scanning mirror control module in the micro scanning mirror control module adopts the sawtooth wave waveform to drive the transverse axis and the vertical axes of main MEMS micro scanning mirror; Wherein X passage is the line scanning passage; Promptly drive transverse axis deflection, make main MEMS micro scanning mirror accomplish horizontal line scanning, the Y passage is the field scan passage; Promptly drive vertical axes deflection, make main MEMS micro scanning mirror accomplish field scan.Scanning process with second quadrant is an example, and during no drive signal, the LASER Light Source of being responsible for second quadrant is positioned at the lower right corner of screen second quadrant through the incident point of main MEMS micro scanning mirror.After applying drive signal; The projection light that main MEMS micro scanning mirror sends the LASER Light Source of being responsible for second quadrant at first is positioned at the upper left side of each quadrant, and along with the deflection of the movable reflecting surface of main MEMS micro scanning mirror gradually to the scanning of the upper right side of screen, when accomplishing delegation's horizontal scanning; The incident point of main MEMS micro scanning mirror can be got back to the left side of screen fast; And under the effect of Y channels drive signal, move down a fragment position, as the starting point of next bar horizontal scanning line; So repeatedly, until the finishing image scanning of this quadrant.
Shown in Fig. 5-6, main MEMS micro scanning mirror adopts the triangular voltage sweep synoptic diagram; Wherein Fig. 6 is the triangular wave drive waveforms of main MEMS micro scanning mirror, and wherein X passage is the line scanning passage, and the Y passage is the field scan passage.Scanning process with second quadrant is an example, and during no drive signal, the LASER Light Source of being responsible for second quadrant is positioned at the lower right corner of screen second quadrant through the incident point of main MEMS micro scanning mirror.After applying drive signal, the micro scanning mirror at first points to the upper left side of screen second quadrant, accomplishes the horizontal scanning of first row from left to right; After accomplishing a horizontal scanning line, under the driving of sweep signal on the scene, the moving reflector face of micro scanning mirror is around vertical axes deflection; Make the luminous point that is incident upon on the screen move down a position; As the sweep starting point of next line, this moment, main MEMS micro scanning mirror at the uniform velocity was reversed the horizontal scanning (from right to left promptly) of the second row pixel, when the micro scanning mirror is accomplished the second sweep trace; And get back to screen when left side, the forward scan (from left to right) of beginning the third line.So go round and begin again.Like this, the line-scanning frequency of main MEMS micro scanning mirror reduces half the under triangular wave drives.
Video Segmentation module of the present invention can adopt software to realize, also can adopt hardware to realize, has belonged to prior art, so the present invention's this no longer tired stating again.
Claims (8)
1. miniature single eyeglass single light source array laser scanning projection device; It is characterized in that: it comprises video processing module, laser light source module, Laser Driven modulation module, optics adjusting module, main MEMS micro scanning mirror module, from MEMS micro scanning mirror module, micro scanning mirror control module and screen; The video processing module output terminal is connected with the input end of Laser Driven modulation module with micro scanning mirror control module respectively; The output terminal of Laser Driven modulation module is connected with the input end of laser light source module; The output terminal of micro scanning mirror control module is connected with input end from MEMS micro scanning mirror module with the input end of main MEMS micro scanning mirror respectively; The laser that laser light source module sends is by modulating after the optics adjusting module is incident upon on the moving reflector face of main MEMS micro scanning mirror module from MEMS micro scanning mirror module; After the reflection of moving reflector face, be incident upon on the screen;
Described video processing module is used for source images is divided into 2*2 small video or image; Described small video or little image are pairing to be the image that is positioned at original image the 1st, 2,3,4 quadrants, and the vision signal that becomes the small video that receives or little image transitions Laser Driven modulation module and micro scanning mirror control module to discern and to control;
Described Laser Driven modulation module is used to accept the vision signal from video processing module output, is used for controlling the laser instrument in the laser light source module;
Described laser light source module is accomplished laser projections work according to the drive control signal of Laser Driven modulation module, and it is by the redgreenblue laser constitution;
Described from the spatial modulation of MEMS micro scanning mirror module according to the control command realization laser beam of micro scanning mirror control module, the laser beam that timesharing ground is corresponding with the pixel of different quadrantal diagram pictures reflexes on the catoptron corresponding in the optics adjusting module;
Described optics adjusting module is used to receive the laser beam through the MEMS micro scanning mirror module modulation of associating; Adjust four laser projections directions respectively, adjusted four bundle laser are formed on screen through main MEMS micro scanning mirror module reflection back four small videos that are the arrangement of 2*2 array way or image can big video of seamless composition or images; It is made up of four catoptrons, and mirror surface is coated with the enhancing reflection plated film of visible-range;
Described micro scanning mirror control module is used to receive the vision signal of sending from video processing module, and controls main MEMS micro scanning mirror module and modulate and scanning work from MEMS micro scanning mirror module according to obtaining vision signal;
Described main MEMS micro scanning mirror module realizes line scanning and field scan according to the control command of micro scanning mirror control module;
2. a kind of miniature single eyeglass single light source array as claimed in claim 1 laser scanning projection device; It is characterized in that: described main MEMS micro scanning mirror module and be provided with a transverse axis and a vertical axes from MEMS micro scanning mirror module; Main MEMS micro scanning mirror module controlled by micro scanning mirror control circuit and the moving reflector face on MEMS micro scanning mirror module carries out deflection around transverse axis and vertical axes; When moving reflector face during around transverse axis deflection; Realize line scanning,, realize field scan when moving reflector face during around vertical axes deflection.
3. a kind of miniature single eyeglass single light source array as claimed in claim 2 laser scanning projection device, its characteristic exists: the mechanical deflection angle of described moving reflector face is (0-45) degree.
4. like claim 1,2 or 3 described arbitrary miniature single eyeglass single light source array laser scanning projection devices, it is characterized in that: described main MEMS micro scanning mirror module and from the angle between the center line of the center line of MEMS micro scanning mirror module and laser light source module greater than 0 degree and less than 90 degree.
5. a kind of miniature single eyeglass single light source array as claimed in claim 4 laser scanning projection device is characterized in that: described main MEMS micro scanning mirror module and be that 35 degree are to 55 degree from the angle between the center line of the center line of MEMS micro scanning mirror module and laser light source module.
6. a kind of miniature single eyeglass single light source array as claimed in claim 4 laser scanning projection device is characterized in that: described main MEMS micro scanning mirror module and be 40 degree-50 degree from the angle between the center line of the center line of MEMS micro scanning mirror module and laser light source module.
7. a kind of miniature single eyeglass single light source array as claimed in claim 4 laser scanning projection device is characterized in that: described main MEMS micro scanning mirror module and be 45 degree from the angle between the center line of the center line of MEMS micro scanning mirror module and laser light source module.
8. like claim 1,2 or 3 described a kind of miniature single eyeglass single light source array laser scanning projection devices, it is characterized in that: the driving ripple in the described micro scanning mirror control circuit is sawtooth wave or triangular wave.
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| CN109085600A (en) * | 2018-08-21 | 2018-12-25 | 南京华讯方舟通信设备有限公司 | A kind of MEMS scanning laser radar and scan method |
| CN109600536A (en) * | 2018-12-05 | 2019-04-09 | 全普光电科技(上海)有限公司 | Image quick obtaining microchip, preparation method and image fast acquiring method |
| CN109660785A (en) * | 2018-12-05 | 2019-04-19 | 全普光电科技(上海)有限公司 | 3-D image generates chip, preparation method, device and three-dimensional image generating method |
| CN111208961A (en) * | 2019-12-30 | 2020-05-29 | 西安闻泰电子科技有限公司 | Device and method for mapping mirror image to electronic screen |
| CN111751084A (en) * | 2019-03-29 | 2020-10-09 | 安世亚太科技股份有限公司 | Phase calibration system and method of oscillating reflector |
| CN113900328A (en) * | 2021-11-03 | 2022-01-07 | 福州大学 | Device and method for long-distance projection through scattering medium based on spatial light modulation device |
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