CN102540455B - Micro motor mechanism and driving method thereof - Google Patents
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- CN102540455B CN102540455B CN201010618415.7A CN201010618415A CN102540455B CN 102540455 B CN102540455 B CN 102540455B CN 201010618415 A CN201010618415 A CN 201010618415A CN 102540455 B CN102540455 B CN 102540455B
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Abstract
The invention discloses a micro motor mechanism, which is used for adjusting the position of an element to be adjusted. The micro motor mechanism comprises a frame, a driving shaft, a primary driving device and a secondary driving device, wherein the driving shaft is arranged in the frame; the primary driving device is used for driving the driving shaft to move relative to the frame; the secondary driving device is arranged on the top of the driving shaft; the element to be adjusted is arranged on the secondary driving device; the element to be adjusted is driven by the secondary driving device to move relative to the top of the driving shaft; thus, a large driving travel can be realized by using the primary driving device, and high resolution can be realized by using the secondary driving; meanwhile, the invention also discloses a driving method of the micro motor mechanism; in the method, large driving travel is realized by using the primary driving device, and high resolution is realized by using the secondary driving; and the method is simple and convenient.
Description
Technical field
The present invention relates to the piezoelectricity field of micro electromechanical technology in precision optical machinery, relate in particular to a kind of high resolving power micro motor mechanism and driving method thereof of adjusting for optical element.
Background technology
Along with the raising of SIC (semiconductor integrated circuit) integrated level, the characteristic dimension of semiconductor devices is more and more less, and the requirement of the projection optical system resolution in advanced photo-etching machine exposal equipment is also more and more higher, to the image quality of optical system, requires also higher.And the image quality of optical system is determined by the index of optics conventionally, be mainly reflected on various aberrations, such as distortion, spherical aberration or wave aberration.
Improve the image quality of optical system, not only require the stability of the index of raising Cold Mirrors head (off working state), the more important thing is the stability of the index that will improve the camera lens under duty.When Performance of Optical System is affected because of camera lens working environment or other factors, often adopt the method for aberration compensation to carry out real time correction to system index.The method of real time correction is generally: control certain or certain several optical elements, by changing the position relationship of optical element, such as inclination or the bias of airspace, element, reach the object of aberration compensation.Aberration compensation is generally realized by adjusting the mode of eyeglass, by driving mechanism, eyeglass is adjusted.
In the process of aberration compensation, very high to the requirement of driving mechanism, not only require high resolution, little volume, more from stroke and load and can self-locking etc. aspect have higher requirement.
Therefore, be necessary to provide a kind of micro motor mechanism that can meet above-mentioned requirements.
Summary of the invention
The object of the present invention is to provide a kind of micro motor mechanism and driving method thereof, more to solve the required piezoelectric ceramics quantity of existing driving mechanism, the problem that cost is too high.
For addressing the above problem, the present invention proposes a kind of micro motor mechanism, for regulating the position of element to be regulated, comprising:
Framework, described framework is provided with the first through hole of its top and the bottom of break-through;
Driving shaft, described driving shaft is movably arranged in described the first through hole;
One-level drive unit, is arranged in described framework, described driving shaft is locked or is unclamped, and when unclamping, drive described driving shaft to move with respect to described framework;
Secondary drive device, is arranged on described driving shaft top, and described element to be regulated is arranged on described secondary drive device, and described secondary drive device drives described elements relative to be regulated to move in described driving shaft top.
Optionally, described one-level drive unit comprises movable block unitized construction and the framework combined structure being connected with described movable block unitized construction; Described framework combined structure locks or unclamps described driving shaft, and when unclamping, drives described driving shaft and described movable block unitized construction to move with respect to described framework; Described movable block unitized construction locks or unclamps described driving shaft, and when unclamping, with respect to described driving shaft, moves.
Optionally, described movable block unitized construction comprises:
Movable block, the second through hole that has the first V-type groove, the first circular hole on described movable block and match with described the first through hole, the second through hole described in described driving shaft break-through;
The first scotch, its first end embeds in described V-type groove, and driving shaft described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft;
The first piezoelectric ceramics, is arranged in described the first circular hole, and the top of described the first piezoelectric ceramics contacts with the bottom of described first scotch the second end;
The first spring, its one end is connected with the top of described first scotch the second end, and the other end is connected with one end of one first spring fixed block, and the other end of described the first spring fixed block is connected with described movable block; And
The second spring, its one end is connected with the top of described framework, and the other end is connected with the top of described movable block.
Optionally, the bottom of described framework has the second V-type groove, the second circular hole, and described framework combined structure comprises:
The second scotch, its first end embeds in described the second V-type groove, and driving shaft described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft;
The second piezoelectric ceramics, is arranged in described the second circular hole, and the top of described the second piezoelectric ceramics contacts with the bottom of described second scotch the second end;
The 3rd spring, its one end is connected with the top of described second scotch the second end, and the other end is connected with one end of one second spring fixed block, and the other end of described the second spring fixed block is connected with described framework; And
The 3rd piezoelectric ceramics, its bottom is connected with the bottom of described framework, and top is connected with the bottom of described movable block.
Optionally, described secondary drive device is one the 4th piezoelectric ceramics.
Optionally, described element to be regulated is eyeglass.
Meanwhile, for addressing the above problem, the present invention also proposes a kind of driving method of above-mentioned micro motor mechanism, and the method comprises the steps:
Described one-level drive unit drives described driving shaft to move with respect to described framework, until the position of described element to be regulated is less than the step pitch of described one-level drive unit far from the distance of target location;
Described in described secondary drive device drives, elements relative to be adjusted moves in described driving shaft top, until the arrival target location, position of described element to be regulated.
Optionally, described one-level drive unit comprises movable block unitized construction and the framework combined structure being connected with described movable block unitized construction; Described framework combined structure locks or unclamps described driving shaft, and when unclamping, drives described driving shaft and described movable block unitized construction to move with respect to described framework; Described movable block unitized construction locks or unclamps described driving shaft, and when unclamping, with respect to described driving shaft, moves.
Optionally, described movable block unitized construction comprises:
Movable block, the second through hole that has the first V-type groove, the first circular hole on described movable block and match with described the first through hole, the second through hole described in described driving shaft break-through;
The first scotch, its first end embeds in described V-type groove, and driving shaft described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft;
The first piezoelectric ceramics, is arranged in described the first circular hole, and the top of described the first piezoelectric ceramics contacts with the bottom of described first scotch the second end;
The first spring, its one end is connected with the top of described first scotch the second end, and the other end is connected with one end of one first spring fixed block, and the other end of described the first spring fixed block is connected with described movable block; And
The second spring, its one end is connected with the top of described framework, and the other end is connected with the top of described movable block.
Optionally, the bottom of described framework has the second V-type groove, the second circular hole, and described framework combined structure comprises:
The second scotch, its first end embeds in described the second V-type groove, and driving shaft described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft;
The second piezoelectric ceramics, is arranged in described the second circular hole, and the top of described the second piezoelectric ceramics contacts with the bottom of described second scotch the second end;
The 3rd spring, its one end is connected with the top of described second scotch the second end, and the other end is connected with one end of one second spring fixed block, and the other end of described the second spring fixed block is connected with described framework; And
The 3rd piezoelectric ceramics, its bottom is connected with the bottom of described framework, and top is connected with the bottom of described movable block.
Optionally, described one-level drive unit drives described driving shaft to move and comprise the steps: with respect to described framework
Described the second piezoelectric ceramics energising is extended, and described the second scotch overcomes the pressure of described the 3rd spring, take described first end as fulcrum rotation, unclamps described driving shaft;
The first distance is extended in described the 3rd piezoelectric ceramics energising, described movable block overcomes the pressure of described the second spring, drive up mobile the first distance of described the first scotch, the first piezoelectric ceramics and driving shaft integral body, wherein, described the first distance equals the step pitch of described one-level drive unit;
Described the second piezoelectric ceramics power-off restoration, under the elastic force effect of described the 3rd spring, described the second scotch be take described first end as fulcrum rotation, locks described driving shaft;
Described the first piezoelectric ceramics energising is extended, and described the first scotch overcomes the pressure of described the first spring, take described first end as fulcrum rotation, unclamps described driving shaft;
Described the 3rd piezoelectric ceramics power-off restoration, under the elastic force effect of described the second spring, described movable block drives described the first scotch, the first piezoelectric ceramics integral body first distance that moves down;
Described the first piezoelectric ceramics power-off restoration, described the first scotch, under the elastic force effect of described the first spring, be take described first end as fulcrum rotation, locks described driving shaft.
Optionally, described secondary drive device is one the 4th piezoelectric ceramics.
Optionally, described element to be regulated is eyeglass.
The present invention, owing to adopting above-mentioned technical scheme, makes it compared with prior art, has following advantage and good effect:
1) element that micro motor mechanism provided by the invention adopts is few, and volume is little, and its volume can be controlled within the scope of 20mm * 30mm * 30mm, and because the piezoelectric ceramics quantity adopting is few, thereby saved cost;
2) micro motor mechanism provided by the invention drives by the circulation of one-level drive unit, realizes coarse adjustment, and adjustment stroke is large, can reach tens millimeters in its adjustment stroke;
3) micro motor mechanism provided by the invention is directly realized fine adjustment by piezoelectric ceramics, makes the resolution of this micro motor mechanism high, can realize nanoscale and drive adjusting;
4) micro motor mechanism provided by the invention adopts scotch to carry out self-locking, is rotated and is pinned driving shaft, thereby have larger confining force by scotch.
Accompanying drawing explanation
The structural representation of the micro motor mechanism that Fig. 1 provides for the embodiment of the present invention;
The micro motor mechanism that Fig. 2 to Fig. 7 provides for the embodiment of the present invention respectively use constitutional diagram.
Embodiment
The micro motor mechanism and the driving method thereof that the present invention are proposed below in conjunction with the drawings and specific embodiments are described in further detail.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only for convenient, the object of the aid illustration embodiment of the present invention lucidly.
Core concept of the present invention is, a kind of micro motor mechanism is provided, for regulating the position of element to be regulated, described micro motor mechanism comprises framework, is arranged on driving shaft, one-level drive unit and secondary drive device in described framework, and described one-level drive unit drives described driving shaft to move with respect to described framework; Described secondary drive device is arranged on described driving shaft top, and described element to be regulated is arranged on described secondary drive device, and described secondary drive device drives described elements relative to be regulated to move in described driving shaft top; Thereby can utilize described one-level drive unit to realize the large stroke that drives, utilize described secondary drive to realize high resolving power; Meanwhile, the present invention also provides a kind of driving method of above-mentioned micro motor mechanism, and the method utilizes described one-level drive unit to realize the large stroke that drives, and utilizes described secondary drive to realize high resolving power, and simple and convenient.
Please refer to Fig. 1, the structural representation of the micro motor mechanism that Fig. 1 provides for the embodiment of the present invention, as shown in Figure 1, the micro motor mechanism that the embodiment of the present invention provides comprises
Framework 1, described framework 1 is provided with the first through hole of its top and the bottom of break-through;
Driving shaft 11, described driving shaft 11 is movably arranged in described the first through hole;
One-level drive unit, is arranged in described framework 1, described driving shaft 11 is locked or is unclamped, and when unclamping, drive described driving shaft 11 to move with respect to described framework 1;
Secondary drive device 14, is arranged on described driving shaft 11 tops, and described element to be regulated is arranged on described secondary drive device 14, and described secondary drive device 14 drives described elements relative to be regulated to move in described driving shaft 11 tops.
The micro motor mechanism that the embodiment of the present invention provides is realized large stroke by one-level drive unit and is driven adjusting, realizes high resolving power regulate by secondary drive device.
Further, described one-level drive unit comprises movable block unitized construction and the framework combined structure being connected with described movable block unitized construction; Described framework combined structure locks or unclamps described driving shaft 11, and when unclamping, drives described driving shaft 11 and described movable block unitized construction to move with respect to described framework 1; Described movable block unitized construction locks or unclamps described driving shaft 11, and when unclamping, with respect to described driving shaft 11, moves.
Further, described movable block unitized construction comprises:
Movable block 9, the second through hole that has the first V-type groove, the first circular hole on described movable block 9 and match with described the first through hole, the second through hole described in described driving shaft 11 break-through;
The first scotch 3, its first end embeds in described V-type groove, and driving shaft 11 described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft 11;
The first piezoelectric ceramics 4, is arranged in described the first circular hole, and the top of described the first piezoelectric ceramics contacts with the bottom of described the first scotch 3 second ends;
The first spring 2, its one end is connected with the top of described the first scotch 3 second ends, and the other end is connected with one end of one first spring fixed block 12, and the other end of described the first spring fixed block 12 is connected with described movable block 9; And
The second spring 8, its one end is connected with the top of described framework 1, and the other end is connected with the top of described movable block 9.
Further, the bottom of described framework 1 has the second V-type groove, the second circular hole, and described framework combined structure comprises:
The second scotch 6, its first end embeds in described the second V-type groove, and driving shaft 11 described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft 11;
The second piezoelectric ceramics 7, is arranged in described the second circular hole, and the top of described the second piezoelectric ceramics 7 contacts with the bottom of described the second scotch 6 second ends;
The 3rd spring 5, its one end is connected with the top of described the second scotch 6 second ends, and the other end is connected with one end of one second spring fixed block 13, and the other end of described the second spring fixed block 13 is connected with described framework 1; And
The 3rd piezoelectric ceramics 10, its bottom is connected with the bottom of described framework 1, and top is connected with the bottom of described movable block 9.
The micro motor mechanism that the embodiment of the present invention provides is pinned or is unclamped driving shaft 11 by the first scotch 3 and the second scotch 6 rotations, thereby has larger confining force.
Further, described secondary drive device 14 is one the 4th piezoelectric ceramics, because the minimum step of single piezoelectric ceramics can reach nanoscale, thereby can realize high resolving power and drives and regulate.
Further, described element to be regulated is eyeglass.
Please continue to refer to Fig. 2 to Fig. 7, the micro motor mechanism that Fig. 2 to Fig. 7 provides for the embodiment of the present invention respectively use constitutional diagram, as shown in Figures 2 to 7, the driving method of the micro motor mechanism that the embodiment of the present invention provides comprises the steps:
Described one-level drive unit drives described driving shaft 11 to move with respect to described framework 1, until the position of described element to be regulated is less than the step pitch of described one-level drive unit far from the distance of target location;
Described in described secondary drive device 14 drives, elements relative to be adjusted moves in described driving shaft 11 tops, until the arrival target location, position of described element to be regulated.
Further, described one-level drive unit comprises movable block unitized construction and the framework combined structure being connected with described movable block unitized construction; Described framework combined structure locks or unclamps described driving shaft 11, and when unclamping, drives described driving shaft 11 and described movable block unitized construction to move with respect to described framework 1; Described movable block unitized construction locks or unclamps described driving shaft 11, and when unclamping, with respect to described driving shaft 11, moves.
Further, described movable block unitized construction comprises:
Movable block 9, the second through hole that has the first V-type groove, the first circular hole on described movable block 9 and match with described the first through hole, the second through hole described in described driving shaft 11 break-through;
The first scotch 3, its first end embeds in described V-type groove, and driving shaft 11 described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft 11;
The first piezoelectric ceramics 4, is arranged in described the first circular hole, and the top of described the first piezoelectric ceramics contacts with the bottom of described the first scotch 3 second ends;
The first spring 2, its one end is connected with the top of described the first scotch 3 second ends, and the other end is connected with one end of one first spring fixed block 12, and the other end of described the first spring fixed block 12 is connected with described movable block 9; And
The second spring 8, its one end is connected with the top of described framework 1, and the other end is connected with the top of described movable block 9.
Further, the bottom of described framework 1 has the second V-type groove, the second circular hole, and described framework combined structure comprises:
The second scotch 6, its first end embeds in described the second V-type groove, and driving shaft 11 described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft 11;
The second piezoelectric ceramics 7, is arranged in described the second circular hole, and the top of described the second piezoelectric ceramics 7 contacts with the bottom of described the second scotch 6 second ends;
The 3rd spring 5, its one end is connected with the top of described the second scotch 6 second ends, and the other end is connected with one end of one second spring fixed block 13, and the other end of described the second spring fixed block 13 is connected with described framework 1; And
The 3rd piezoelectric ceramics 10, its bottom is connected with the bottom of described framework 1, and top is connected with the bottom of described movable block 9.
Further, described one-level drive unit drives described driving shaft 11 to move and comprise the steps: with respect to described framework 1
Described the second piezoelectric ceramics 7 energisings are extended, and described the second scotch 6 overcomes the pressure of described the 3rd spring 5, take described first end as fulcrum rotation, unclamps described driving shaft 11, as shown in Figure 2;
The first distance is extended in described the 3rd piezoelectric ceramics 10 energisings, described movable block 9 overcomes the pressure of described the second spring 8, drive up mobile the first distance of described the first scotch 3, the first piezoelectric ceramics 4 and driving shaft 11 integral body, wherein, described the first distance equals the step pitch of described one-level drive unit, as shown in Figure 3;
Described the second piezoelectric ceramics 7 power-off restorations, under the elastic force effect of described the 3rd spring 5, described the second scotch 6 be take described first end as fulcrum rotation, locks described driving shaft 11, as shown in Figure 4;
Described the first piezoelectric ceramics 4 energisings are extended, and described the first scotch 3 overcomes the pressure of described the first spring 2, take described first end as fulcrum rotation, unclamps described driving shaft 11, as shown in Figure 5;
Described the 3rd piezoelectric ceramics 10 power-off restorations, under the elastic force effect of described the second spring 8, described movable block 9 drives described the first scotch 3, the first piezoelectric ceramics 4 integral body first distance that moves down, as shown in Figure 6;
Described the first piezoelectric ceramics 4 power-off restorations, described the first scotch 3, under the elastic force effect of described the first spring 2, be take described first end as fulcrum rotation, locks described driving shaft 11, as shown in Figure 7; So far, described driving shaft 11 is with respect to described framework first distance that moved up.
Circulation above-mentioned steps, until the position of described element to be regulated is less than described the first distance far from the distance of target location.
Further, after adjustment process finishes, control described secondary drive device 14 reduction; Described the second piezoelectric ceramics 7 energisings are extended, and described the second scotch 6 overcomes the pressure of described the 3rd spring 5, take described first end as fulcrum rotation, unclamps described driving shaft 11, and described driving shaft 11 is got back to initial position.Described the second piezoelectric ceramics 7 power-off restorations, under the elastic force effect of described the 3rd spring 5, described the second scotch 6 be take described first end as fulcrum rotation, locks described driving shaft 11.
Further, described secondary drive device 14 is one the 4th piezoelectric ceramics.
Further, described element to be regulated is eyeglass.
In a specific embodiment of the present invention, described element to be regulated is eyeglass, yet should be realized that, according to actual needs, described element to be regulated can also need for other element of minute adjustment, and is not limited to eyeglass.
In sum, the invention provides a kind of micro motor mechanism, for regulating the position of element to be regulated, described micro motor mechanism comprises framework, is arranged on driving shaft, one-level drive unit and secondary drive device in described framework, and described one-level drive unit drives described driving shaft to move with respect to described framework; Described secondary drive device is arranged on described driving shaft top, and described element to be regulated is arranged on described secondary drive device, and described secondary drive device drives described elements relative to be regulated to move in described driving shaft top; Thereby can utilize described one-level drive unit to realize the large stroke that drives, utilize described secondary drive to realize high resolving power; Meanwhile, the present invention also provides a kind of driving method of above-mentioned micro motor mechanism, and the method utilizes described one-level drive unit to realize the large stroke that drives, and utilizes described secondary drive to realize high resolving power, and simple and convenient.
Obviously, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.
Claims (5)
1. a micro motor mechanism, for regulating the position of element to be regulated, is characterized in that, comprising:
Framework, described framework is provided with the first through hole of its top and the bottom of break-through;
Driving shaft, described driving shaft is movably arranged in described the first through hole;
One-level drive unit, be arranged in described framework, described driving shaft is locked or unclamped, and when unclamping, drive described driving shaft to move with respect to described framework, described one-level drive unit comprises movable block unitized construction and the framework combined structure being connected with described movable block unitized construction; Described framework combined structure locks or unclamps described driving shaft, and when unclamping, drives described driving shaft and described movable block unitized construction to move with respect to described framework; Described movable block unitized construction locks or unclamps described driving shaft, and when unclamping, with respect to described driving shaft, moves;
Described movable block unitized construction comprises:
Movable block, the second through hole that has the first V-type groove, the first circular hole on described movable block and match with described the first through hole, the second through hole described in described driving shaft break-through;
The first scotch, its first end embeds in described V-type groove, and driving shaft described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft;
The first piezoelectric ceramics, is arranged in described the first circular hole, and the top of described the first piezoelectric ceramics contacts with the bottom of described first scotch the second end;
The first spring, its one end is connected with the top of described first scotch the second end, and the other end is connected with one end of one first spring fixed block, and the other end of described the first spring fixed block is connected with described movable block; And
The second spring, its one end is connected with the top of described framework, and the other end is connected with the top of described movable block;
The bottom of described framework has the second V-type groove, the second circular hole, and described framework combined structure comprises:
The second scotch, its first end embeds in described the second V-type groove, and driving shaft described in the second end in contact, by take described first end as fulcrum rotates, locks or unclamps described driving shaft;
The second piezoelectric ceramics, is arranged in described the second circular hole, and the top of described the second piezoelectric ceramics contacts with the bottom of described second scotch the second end;
The 3rd spring, its one end is connected with the top of described second scotch the second end, and the other end is connected with one end of one second spring fixed block, and the other end of described the second spring fixed block is connected with described framework; And
The 3rd piezoelectric ceramics, its bottom is connected with the bottom of described framework, and top is connected with the bottom of described movable block;
Secondary drive device, is arranged on described driving shaft top, and described element to be regulated is arranged on described secondary drive device, and described secondary drive device drives described elements relative to be regulated to move in described driving shaft top;
Described secondary drive device is one the 4th piezoelectric ceramics.
2. micro motor mechanism as claimed in claim 1, is characterized in that, described element to be regulated is eyeglass.
3. a driving method for micro motor mechanism as claimed in claim 1, is characterized in that, comprises the steps:
Described one-level drive unit drives described driving shaft to move with respect to described framework, until the position of described element to be regulated is less than the step pitch of described one-level drive unit far from the distance of target location;
Described in described secondary drive device drives, elements relative to be adjusted moves in described driving shaft top, until the arrival target location, position of described element to be regulated.
4. the driving method of micro motor mechanism as claimed in claim 3, is characterized in that, described one-level drive unit drives described driving shaft to move and comprise the steps: with respect to described framework
Described the second piezoelectric ceramics energising is extended, and described the second scotch overcomes the pressure of described the 3rd spring, take described first end as fulcrum rotation, unclamps described driving shaft;
The first distance is extended in described the 3rd piezoelectric ceramics energising, described movable block overcomes the pressure of described the second spring, drive up mobile the first distance of described the first scotch, the first piezoelectric ceramics and driving shaft integral body, wherein, described the first distance equals the step pitch of described one-level drive unit;
Described the second piezoelectric ceramics power-off restoration, under the elastic force effect of described the 3rd spring, described the second scotch be take described first end as fulcrum rotation, locks described driving shaft;
Described the first piezoelectric ceramics energising is extended, and described the first scotch overcomes the pressure of described the first spring, take described first end as fulcrum rotation, unclamps described driving shaft;
Described the 3rd piezoelectric ceramics power-off restoration, under the elastic force effect of described the second spring, described movable block drives described the first scotch, the first piezoelectric ceramics integral body first distance that moves down;
Described the first piezoelectric ceramics power-off restoration, described the first scotch, under the elastic force effect of described the first spring, be take described first end as fulcrum rotation, locks described driving shaft.
5. the driving method of the micro motor mechanism as described in claim 3 to 4 any one, is characterized in that, described element to be regulated is eyeglass.
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| CN201010618415.7A CN102540455B (en) | 2010-12-30 | 2010-12-30 | Micro motor mechanism and driving method thereof |
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| CN103308093A (en) * | 2013-06-13 | 2013-09-18 | 哈尔滨理工大学 | Automatic adjusting set for encoder grating eccentricity |
| CN103730984B (en) * | 2013-12-25 | 2016-04-06 | 惠州市桑莱士光电有限公司 | A kind of high pixel driver motor |
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| CN101410742A (en) * | 2005-03-21 | 2009-04-15 | 物理设备（Pi）两合公司 | Optical objective module |
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|---|---|---|---|---|
| US7574126B2 (en) * | 2003-12-09 | 2009-08-11 | Panasonic Corporation | Lens driving apparatus, imaging apparatus, and lens barrel and camera main body used for this |
-
2010
- 2010-12-30 CN CN201010618415.7A patent/CN102540455B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101410742A (en) * | 2005-03-21 | 2009-04-15 | 物理设备（Pi）两合公司 | Optical objective module |
| CN101541472A (en) * | 2007-06-27 | 2009-09-23 | 株式会社爱发科 | Coarse-fine movement device and fluid supply device with the same |
| CN101539655A (en) * | 2008-03-19 | 2009-09-23 | 德昌电机(深圳)有限公司 | Lens driving device |
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| Publication number | Publication date |
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| CN102540455A (en) | 2012-07-04 |
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