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CN102538892B - Single-section distributed FBG (fiber Bragg grating)-thermal flow sensor - Google Patents

Single-section distributed FBG (fiber Bragg grating)-thermal flow sensor Download PDF

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CN102538892B
CN102538892B CN 201210016726 CN201210016726A CN102538892B CN 102538892 B CN102538892 B CN 102538892B CN 201210016726 CN201210016726 CN 201210016726 CN 201210016726 A CN201210016726 A CN 201210016726A CN 102538892 B CN102538892 B CN 102538892B
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optical fiber
thermal flow
section
fiber
fiber grating
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CN102538892A (en
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程佳
董新永
周艳
周文俊
陈哲敏
沈文新
黄震威
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Zhejiang Province Institute of Metrology
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Zhejiang Province Institute of Metrology
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Abstract

The invention discloses a single-section distributed FBG (fiber Bragg grating)-thermal flow sensor which is characterized in that more than two drill holes are equationally arranged on the wall of a measuring pipeline, the drill holes are arranged on a same radial cross section, the inside of each drill hole is provided with a seal connector, and optical fibers are connected and fixed by the seal connectors. In the drill holes, a tail fiber is led out from an opposite drill hole, the inside of each optical fiber is connected in series with an FBG thermal flow sensing component, the FBG thermal flow sensing components on a same radial cross section are uniformly distributed, and the optical fiber at the temperature compensation section thereof is close to one end of the tail fiber. Through the combination of an FBG and a thermal flow sensor, the single-section distributed FBG-thermal flow sensor realizes the precise measurement on flow quantity, and has the advantages of easiness for manufacturing, small size, high sensitivity, low cost, and the like; meanwhile, an optical signal provided by the invention can be subjected to remote transmission through the optical fibers, so that, the single-section distributed FBG-thermal flow sensor disclosed by the invention can be widely applied to the detection on the flow velocity and flow quantity of various gas transport pipelines, and also suitable for being used in severe environments which are strong in electromagnetic interference and large in humidity, and the like.

Description

单截面分布式光纤光栅热式流量传感器Single-section Distributed Fiber Bragg Grating Thermal Flow Sensor

技术领域 technical field

本发明涉及一种光纤传感器件,具体涉及一种单截面分布式光纤光栅热式流量传感器。 The invention relates to an optical fiber sensor device, in particular to a single-section distributed optical fiber grating thermal flow sensor.

背景技术 Background technique

流速、流量的测量在石油、化工、医药、能源计量、环境监测等工业生产过程中占据着举足轻重的地位。因此,流速、流量传感器是流体检测和控制过程中不可缺少的传感器件。传统的机械式流速、流量传感器测量误差大、精度低。例如,采用超声波的流速测量仪、电磁波的流速仪或声学多普勒效应的流速仪等,虽然测量精度较高,但易受电磁波干扰。 The measurement of flow velocity and flow occupies a pivotal position in industrial production processes such as petroleum, chemical industry, medicine, energy measurement, and environmental monitoring. Therefore, flow rate and flow sensors are indispensable sensor devices in the process of fluid detection and control. Traditional mechanical flow rate and flow sensors have large measurement errors and low precision. For example, flow velocity measuring instruments using ultrasonic waves, electromagnetic wave flow velocity meters, or acoustic Doppler effect flow velocity meters, etc., although the measurement accuracy is high, they are susceptible to electromagnetic wave interference.

随着光纤技术的发展,出现了很多基于光学原理的光纤流速、流量传感器。光纤流量传感器是采用光在光纤中传输时光的特性(如强度、相位、频率、波长等)会受流量的调制并将相应的调制量解调为流体流速的原理实现的。与传统的流量传感器相比,光纤流量传感器具有如下优点: (1)准确度、灵敏度高;(2)耐高压、耐高温、抗电磁干扰,在易燃、易爆环境下安全可靠;(3)频带宽、动态范围广;(4)便于远距离测量和控制;(5)体积小、质量轻。由于具有抗电磁干扰、抗环境噪声,电气绝缘性及自身安全性等特点,因此光纤流量传感器将有着巨大的市场价值。 With the development of optical fiber technology, many optical fiber flow rate and flow sensors based on optical principles have emerged. The optical fiber flow sensor is realized by using the principle that the light characteristics (such as intensity, phase, frequency, wavelength, etc.) of light transmitted in the optical fiber will be modulated by the flow rate and the corresponding modulation amount will be demodulated into the fluid flow rate. Compared with traditional flow sensors, fiber optic flow sensors have the following advantages: (1) High accuracy and sensitivity; (2) High pressure resistance, high temperature resistance, anti-electromagnetic interference, safe and reliable in flammable and explosive environments; (3) ) wide frequency range and wide dynamic range; (4) convenient for long-distance measurement and control; (5) small size and light weight. Due to the characteristics of anti-electromagnetic interference, anti-environmental noise, electrical insulation and self-safety, the optical fiber flow sensor will have a huge market value.

在实际的流体中,无论是再管道内的流动,还是绕物体流动,都会导致流体的能量受到不同程度的损耗,即在同一界面的流速并均匀。 In the actual fluid, whether it is the flow in the pipeline or the flow around the object, the energy of the fluid will be lost to different degrees, that is, the flow velocity at the same interface is not uniform.

发明内容 Contents of the invention

本发明的目的是提供一种单截面分布式光纤光栅热式流量传感器,进行截面上各处的流速分布测量。 The object of the present invention is to provide a single-section distributed optical fiber grating thermal flow sensor, which can measure the flow velocity distribution at various places on the section.

为了达到上述目的,本发明提供的技术方案是: In order to achieve the above object, the technical scheme provided by the invention is:

本发明在测量管道的管壁上等分设有2个以上钻孔,钻孔位于同一径向截面上,每个钻孔中分别安装密封连接件,光纤通过密封连接件固定在钻孔内,尾纤从其中相对的一个钻孔中引出,每个光纤中均串接一个光纤光栅热式流量传感器件, 同一径向截面上光纤光栅热式流量传感器件保持均匀分布,并且光纤光栅热式流量传感器件的温度补偿段光纤靠近尾纤的一端。 In the present invention, two or more boreholes are equally divided on the pipe wall of the measuring pipeline, and the boreholes are located on the same radial section, and a sealing connector is installed in each borehole, and the optical fiber is fixed in the borehole through the seal connector, and the tail The fibers are led out from one of the opposite boreholes, and each fiber is connected in series with a fiber grating thermal flow sensor device, and the fiber grating thermal flow sensor devices are kept evenly distributed on the same radial section, and the fiber grating thermal flow sensor The temperature compensation section of the component is near the end of the pigtail.

所述的测量管壁上等分设有6个钻孔,6个钻孔位于同一径向截面上。 The wall of the measuring tube is equally divided into 6 boreholes, and the 6 boreholes are located on the same radial section.

所述的测量管壁上等分设有3个钻孔,3个钻孔位于同一径向截面上呈三角形布置。 Three boreholes are equally divided on the wall of the measuring tube, and the three boreholes are arranged in a triangular shape on the same radial section.

所述的测量管壁上等分设有4个钻孔,4个钻孔位于同一径向截面上呈正方形布置,并在其中一个对角线上又串接另一个光纤光栅热式流量传感器件。 Four boreholes are equally divided on the wall of the measuring tube, and the four boreholes are arranged in a square on the same radial section, and another optical fiber grating thermal flow sensor device is connected in series on one of the diagonal lines.

所述的光纤光栅热式流量传感器件包括:温度补偿段光纤和流量测量段光纤;温度补偿段光纤纤芯写入第一光纤光栅,流量测量段光纤纤芯写入第二光纤光栅,第二光纤光栅所在光纤的包层表面镀有一层金属离子形成金属膜,错位熔接区的耦合率通过调整温度补偿段光纤和流量测量段光纤端面的横向错位距离来实现。 The fiber Bragg grating thermal flow sensor device includes: a temperature compensation section optical fiber and a flow measurement section optical fiber; the fiber core of the temperature compensation section is written into the first fiber grating, the fiber core of the flow measurement section is written into the second fiber grating, and the second fiber grating is written into the fiber core of the flow measurement section. The cladding surface of the optical fiber where the fiber grating is located is coated with a layer of metal ions to form a metal film, and the coupling rate of the dislocation fusion zone is realized by adjusting the lateral dislocation distance between the optical fiber in the temperature compensation section and the end face of the optical fiber in the flow measurement section.

本发明具有的有益效果是: The beneficial effects that the present invention has are:

本发明通过测量每个FBG的中心波长,可得到FBG所处位置的流量信息,并可分析出测量管道所在平面的流量分布。光纤光栅技术与热式流量传感技术相结合,实现了流量的精确测量,具有制作简单、体积小、灵敏度高、成本较低等优点。同时,此结构提供的光信号可通过光纤远距离传输,广泛应用于各种气体运输管道的流速、流量检测中,可适用于电磁干扰强、湿度大等恶劣环境中。 The invention can obtain the flow information of the location of the FBG by measuring the central wavelength of each FBG, and can analyze the flow distribution of the plane where the measuring pipeline is located. The combination of fiber grating technology and thermal flow sensing technology realizes the accurate measurement of flow, and has the advantages of simple manufacture, small size, high sensitivity and low cost. At the same time, the optical signal provided by this structure can be transmitted over long distances through optical fibers, and is widely used in the flow velocity and flow detection of various gas transportation pipelines, and is suitable for harsh environments such as strong electromagnetic interference and high humidity.

附图说明 Description of drawings

图1是单截面分布式光纤光栅热式流量传感器的剖面图。 Figure 1 is a cross-sectional view of a single-section distributed fiber grating thermal flow sensor.

图2是第一种单截面分布式光纤光栅热式流量传感器的径向视图。 Fig. 2 is a radial view of the first single-section distributed fiber grating thermal flow sensor.

图3是第二种单截面分布式光纤光栅热式流量传感器的径向视图。 Fig. 3 is a radial view of the second single-section distributed fiber grating thermal flow sensor.

图4是第三种单截面分布式光纤光栅热式流量传感器的径向视图。 Fig. 4 is a radial view of the third single-section distributed fiber grating thermal flow sensor.

图5是光纤光栅热式流量传感器件的结构示意图。 Fig. 5 is a structural schematic diagram of a fiber grating thermal flow sensor device.

图中:1、温度补偿段光纤,2、流量测量段光纤,3、第一光纤光栅,4、错位熔接区,5、金属离子形成金属膜,6、第二光纤光栅,7、光纤光栅热式流量传感器件,8、密封连接件,9、尾纤。 In the figure: 1. Optical fiber in the temperature compensation section, 2. Optical fiber in the flow measurement section, 3. The first fiber grating, 4. Dislocation fusion zone, 5. Metal film formed by metal ions, 6. Second fiber grating, 7. Fiber grating thermal Type flow sensor device, 8, sealing connector, 9, pigtail.

具体实施方式 Detailed ways

下面结合附图和具体实施方式对本发明作进一步描述。 The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

单截面分布式光纤光栅热式流量传感器的结构装置有很多种,下面列举三种,但不仅限于此。 There are many structural devices for single-section distributed fiber grating thermal flow sensors, three of which are listed below, but not limited thereto.

如图1所示,本发明在测量管道的管壁上等分设有2个以上钻孔,钻孔位于同一径向截面上,每个钻孔中分别安装密封连接件8,光纤通过密封连接件8固定在钻孔内,尾纤9从其中相对的一个钻孔中引出,每个光纤中均串接一个光纤光栅热式流量传感器件7,同一径向截面上光纤光栅热式流量传感器件保持均匀分布,并且光纤光栅热式流量传感器件7的温度补偿段光纤1靠近尾纤9的一端。 As shown in Figure 1, the present invention is provided with more than 2 boreholes equally on the pipe wall of the measuring pipeline, and the boreholes are located on the same radial section, and sealing connectors 8 are respectively installed in each borehole, and the optical fiber passes through the sealing connectors. 8 is fixed in the borehole, and the pigtail 9 is led out from one of the opposite boreholes, and a fiber grating thermal flow sensor device 7 is connected in series in each optical fiber, and the fiber grating thermal flow sensor device 7 is kept on the same radial section. Evenly distributed, and one end of the fiber optic 1 of the temperature compensation section of the fiber grating thermal flow sensor device 7 is close to the pigtail 9 .

如图2所示,所述的测量管壁上等分设有6个钻孔,6个钻孔位于同一径向平面上。 As shown in FIG. 2 , six boreholes are equally divided on the wall of the measuring tube, and the six boreholes are located on the same radial plane.

如图3所示,所述的测量管壁上等分设有3个钻孔,3个钻孔位于同一径向平面上呈三角形布置。 As shown in FIG. 3 , three boreholes are equally divided on the wall of the measuring tube, and the three boreholes are arranged in a triangular shape on the same radial plane.

如图4所示,所述的测量管壁上等分设有4个钻孔,4个钻孔位于同一径向平面上呈正方形布置,并在其中一个对角线上又串接另一个光纤光栅热式流量传感器件7。 As shown in Figure 4, four boreholes are equally divided on the wall of the measuring tube, and the four boreholes are arranged in a square on the same radial plane, and another fiber grating is connected in series on one of the diagonal lines. Thermal flow sensor device 7.

如图5所示,所述的光纤光栅热式流量传感器件7包括:温度补偿段光纤1和流量测量段光纤2;温度补偿段光纤1纤芯写入第一光纤光栅3,流量测量段光纤2纤芯写入第二光纤光栅6,第二光纤光栅6所在光纤的包层表面镀有一层金属离子形成金属膜5,错位熔接区4的耦合率通过调整温度补偿段光纤1和流量测量段光纤2端面的横向错位距离来实现,横向错位距离可以为7~8微米。 As shown in Figure 5, the fiber grating thermal flow sensor device 7 includes: a temperature compensation section optical fiber 1 and a flow measurement section optical fiber 2; the temperature compensation section fiber 1 core is written into the first fiber grating 3, and the flow measurement section optical fiber 2. The fiber core is written into the second fiber grating 6. The cladding surface of the optical fiber where the second fiber grating 6 is located is coated with a layer of metal ions to form a metal film 5. The coupling rate of the dislocation fusion zone 4 is adjusted by adjusting the temperature compensation section fiber 1 and the flow measurement section. The lateral dislocation distance of the end face of the optical fiber 2 can be realized, and the lateral dislocation distance can be 7-8 microns.

其中,温度补偿段光纤1长度为8cm,写入光纤光栅3为1cm,光纤光栅3离错位端25mm,中心波长为1520nm,反射率为13dB;流量测量段光纤2长度为4cm,写入光纤光栅6为4mm,光纤光栅6离错位端1mm,中心波长为1550nm,反射率为25dB;金属膜5是使用真空蒸发镀膜机进行镀银的,镀银长度为4mm,镀银厚度为25nm,银的外表面镀上SiO2,厚度约为100nm;错位熔接区4约为5dB;激光器7为连续拉曼光纤激光器,中心波长为1455nm,功率0-1.2W可调;波分复用器9为1455/1550nm高功率波分复用器;宽度光源11为带宽1520-1620nm的ASE光源;光谱分析仪为AQ8683。 Among them, the length of optical fiber 1 in the temperature compensation section is 8cm, and the length of fiber grating 3 is 1cm. 6 is 4mm, the fiber grating 6 is 1mm away from the dislocation end, the center wavelength is 1550nm, and the reflectivity is 25dB; the metal film 5 is silver-plated using a vacuum evaporation coating machine, the silver-plating length is 4mm, and the silver-plating thickness is 25nm. The outer surface is coated with SiO 2 , the thickness is about 100nm; the dislocation welding zone 4 is about 5dB; the laser 7 is a continuous Raman fiber laser with a central wavelength of 1455nm, and the power is adjustable from 0-1.2W; the wavelength division multiplexer 9 is 1455 /1550nm high-power wavelength division multiplexer; the width light source 11 is an ASE light source with a bandwidth of 1520-1620nm; the spectrum analyzer is AQ8683.

Claims (4)

1. single cross-sectional distribution formula fiber grating thermal flow rate sensor, it is characterized in that: hole first-class being arranged with more than 2 of measurement tube wall, boring is positioned on the same radial section, in each boring seal connector (8) is installed respectively, optical fiber is fixed in the boring by seal connector (8), tail optical fiber (9) is drawn from a wherein relative boring, all be connected in series a fiber grating thermal flow rate sensor spare (7) in each optical fiber, fiber grating thermal flow rate sensor spare (7) keeps evenly distributing on the same radial section, and the temperature compensation section optical fiber (1) of fiber grating thermal flow rate sensor spare (7) is near an end of tail optical fiber (9);
Described fiber grating thermal flow rate sensor spare (7) comprising: temperature compensation section optical fiber (1) and flow measurement section optical fiber (2); Temperature compensation section optical fiber (1) fibre core writes first fiber grating (3), flow measurement section optical fiber (2) fibre core writes second fiber grating (6), the cladding surface of second fiber grating (6) place optical fiber is coated with the layer of metal ion and forms metal film (5), and the coupling efficiency that is positioned at the dislocation welding area (4) between temperature compensation section optical fiber (1) and the flow measurement section optical fiber (2) is realized by the transversion malposition distance of adjusting temperature compensation section optical fiber (1) and flow measurement section optical fiber (2) end face.
2. a kind of single cross-sectional distribution formula fiber grating thermal flow rate sensor according to claim 1 is characterized in that: described measurement tube wall is first-class to be arranged with 6 borings, and 6 borings are positioned on the same radial section.
3. a kind of single cross-sectional distribution formula fiber grating thermal flow rate sensor according to claim 1 is characterized in that: described measurement tube wall is first-class to be arranged with 3 borings, and 3 borings are positioned on the same radial section and are triangularly arranged.
4. a kind of single cross-sectional distribution formula fiber grating thermal flow rate sensor according to claim 1, it is characterized in that: described measurement tube wall is first-class to be arranged with 4 borings, 4 borings are positioned on the same radial section and are arranged in squares, and are connected in series another fiber grating thermal flow rate sensor spare (7) again on a diagonal line therein.
CN 201210016726 2012-01-19 2012-01-19 Single-section distributed FBG (fiber Bragg grating)-thermal flow sensor Expired - Fee Related CN102538892B (en)

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CN103438946B (en) * 2013-08-22 2016-03-23 浙江省计量科学研究院 Based on the thermal gas flowmeter of coated optical fibre grating
CN105333909A (en) * 2015-10-16 2016-02-17 浙江省计量科学研究院 Pipeline flowmeter of active FBG (Fiber Bragg Grating) Fabry-Perot interferometer
CN112362115B (en) * 2020-09-09 2022-12-20 中国航空工业集团公司沈阳飞机设计研究所 Small flow sensor based on fiber bragg grating and measuring system
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