CN102529376A - Nozzle device and flow dividing element for nozzle device - Google Patents
Nozzle device and flow dividing element for nozzle device Download PDFInfo
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- CN102529376A CN102529376A CN2010106232841A CN201010623284A CN102529376A CN 102529376 A CN102529376 A CN 102529376A CN 2010106232841 A CN2010106232841 A CN 2010106232841A CN 201010623284 A CN201010623284 A CN 201010623284A CN 102529376 A CN102529376 A CN 102529376A
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- nozzle
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Abstract
本发明提供一种喷嘴装置及用于喷嘴装置的分流元件，其中：一种喷嘴装置，包括一流体喷嘴；以及一膨胀腔，具有一第一端与该流体喷嘴连接，该膨胀腔还具有一第二端，使来自该流体喷嘴的流体离开该膨胀腔，该第二端设有一分流元件，该分流元件具有一流通空间，是自该第二端朝向该流体喷嘴的方向呈渐缩状。
The invention provides a nozzle device and a flow diverting element for the nozzle device, wherein: a nozzle device includes a fluid nozzle; and an expansion chamber having a first end connected to the fluid nozzle, and the expansion chamber also has a The second end allows the fluid from the fluid nozzle to leave the expansion chamber. The second end is provided with a diverter element. The diverter element has a flow space that is tapered from the second end toward the fluid nozzle.
Description
Technical field
This case refers to a kind of spray nozzle device that supplies supercritical fluid to use especially about spray nozzle device.
Background technology
Because the increasing demand for carbon reduction, the renewable sources of energy increases in recent years; Also make science and technology towards will more seldom coming the applied solar energy technology on the equipment of applied solar energy originally, make the application of present solar panel on flexible base plate and organic material substrate, to use.Owing to be soft or the substrate of organic material; Make that coating technique is improper on original substrate, because be to utilize PVD (PVD) technology in early days, its processing temperature is very high and can destroy flexible base plate or organic material substrate; Therefore many modes with rotary coating form film after; But the shortcoming of rotary coating is that thickness is wayward, and thickness distribution also is difficult for evenly.Thereafter just there is the film forming technology of the mode of utilizing nozzle to occur.
See also Fig. 1, be existing spray nozzle device sketch map.Spray nozzle device mainly is to comprise an expansion chamber 2; Define through a cavity 20, fluid tip 1 is arranged on first end 21 of an expansion chamber 2, usually on cavity 20 apart from fluid tip 1 position farthest; Promptly normally face the position of fluid tip 1; Be provided with fluid outlet 22, it also can be considered is second nozzle, because of it has the effect of nozzle.Again, be provided with a cover body 3 again,, can in checkly be distributed on the workpiece 4 after making fluid 10 leave fluid issuing 22 in order to be covered on the workpiece 4 at fluid issuing 22 places.Cover body 3 also has a side wall 30, in order to unnecessary fluid enforced guiding is arrived the below.Then have a bleed opening 31 near between side wall 30 and the workpiece 4, make unnecessary fluid can leave workpiece 4 and be unlikely to backflow body outlet 22.Can screen the particulate in the fluid 10 through expansion chamber 2; Make the bigger particulate of particle rest in the expansion chamber 2; In addition, since supercritical fluid leave behind the fluid tip 1 can be because pressure drop rapidly and crystallization nucleation immediately, so expansion chamber 2 also has the effect of keeping somewhere ice crystal.But; The existing apparatus of Fig. 1 still can cause ice crystal and big particulate to concentrate to the fluid issuing 22 of centre; So must be regular stop operation will build up a certain amount of retained thing cleaning; Otherwise will cause ice crystal or big particulate to leave and arrive on the workpiece 4, and cause filming inhomogeneous even cause the damage on workpiece 4 surfaces from fluid outlet 22.
See also Fig. 2, be the existing spray nozzle device sketch map of another kind.Its structure haply is identical with Fig. 1 person.The spray nozzle device of Fig. 2 mainly is to comprise an expansion chamber 2; Define through a cavity 20, fluid tip 1 is arranged on first end 21 of an expansion chamber 2, usually on cavity 20 apart from fluid tip 1 position farthest; Promptly normally face the position of fluid tip 1; Be provided with fluid outlet 22, it also can be considered is second nozzle, because of it has the effect of nozzle.Be with the difference of Fig. 1; The prior art of Fig. 2 also is provided with a coating hood 5 at fluid issuing 22 places; It has stop part 50 and outlet 51, because the cover body 3 of Fig. 1 is the sides that are coated to workpiece 4, so workpiece 4 is not more than the technology that cover body 3 just can use Fig. 1.But the stop part 50 of Fig. 2 only has the effect of limit fluid lateral flow, and unnecessary fluid is then discharged through the outlet 51 of coating hood 5 tops.Therefore workpiece 4 can move for 5 times at coating hood, so can make an area still can be applied than the coating hood 5 big workpiece that many 4.But; The device of Fig. 2 still can cause ice crystal and big particulate to concentrate to the fluid issuing 22 of centre; So must be regular stop operation will build up a certain amount of retained thing cleaning; Otherwise will cause ice crystal or big particulate to leave and arrive on the workpiece 4, and cause filming inhomogeneous even cause the damage on workpiece 4 surfaces from fluid outlet 22.
This shows that the cycle that the prior art of Fig. 1 and Fig. 2 can cause producing the utensil shut-down (breakdown) mainteance shortens, promptly repair rate increases, be exactly total the time number that is used in general producing reduced.Then possibly cause the fraction defective of product to rise if elongate the time between overhauls(TBO) by force.Moreover, owing to need shut-down (breakdown) mainteance, and a film shaped working terminal that belongs to usually on the production line, it is underproduce that frequent shut-down like this certainly will cause, and the producer is lacked competitiveness.
The whence be so, the applicant is because the disappearance of prior art, invents out this case " spray nozzle device and be used for the vent diverter of spray nozzle device ", in order to improve the disappearance of above-mentioned existing means.
Summary of the invention
The objective of the invention is the more effective solute size that carries with supercritical fluid of controlling, promptly get rid of the bigger solute of particle and the less solute of particle can be deposited on the substrate uniformly.Therefore further effect is exactly can be effectively and simply control the thickness of the film on the substrate, thereby promotes the yield of substrate film forming, and the field of using for supercritical fluid has suggestive meaning.
In order to reach above-mentioned purpose, the present invention provides a kind of spray nozzle device, comprises a fluid nozzle; An and expansion chamber; Having one first end is connected with this fluid tip; This expansion chamber also has one second end, makes the fluid from this fluid tip leave this expansion chamber, and this second end is provided with a vent diverter; This vent diverter has a circulation space, is to be gradually-reducing shape from this second end towards the direction of this fluid tip.
Aforesaid spray nozzle device, wherein this free air space be according to a diffusion angle from this second end towards the direction of this fluid tip and convergent, this diffusion angle is determined by the size of the fluid particles desiring to choose.
Aforesaid spray nozzle device; Wherein this vent diverter is a coniform housing, and the vertex of a cone has one first opening, then has one second opening at the awl end; Wherein the diameter of this second opening equals to bore end internal diameter and is connected in this second end, and the diameter of this first opening is less than awl end internal diameter.
Aforesaid spray nozzle device, wherein this expansion chamber is adjacent to this first end place and also is provided with a stop element.
Aforesaid spray nozzle device, wherein this expansion chamber is a plurality of, and first end of one of them expansion chamber is communicated in second end of another expansion chamber.
In order to reach above-mentioned purpose; The present invention provides a kind of vent diverter that is used for a spray nozzle device again; Wherein this spray nozzle device has the expansion chamber that a nozzle and has one first end and second end, and this first end is connected in this nozzle, wherein; This vent diverter has an outlet and is connected in this second end, so that have only from this outlet of flowing through of the center a fluid stream of this nozzle ejection.
In order to reach above-mentioned purpose; The present invention provides a kind of vent diverter that is used for spray nozzle device again; Be to be arranged on the ejection path of nozzle of a spray nozzle device; Wherein this vent diverter is a tubular shell, has one first opening and one second opening, and this ejection path is to leave from this first opening this vent diverter of entering and in this second opening.
Like aforesaid vent diverter, be to be located at one to belong in the expansion chamber of spray nozzle device, this expansion chamber has one first end and one second end, and wherein second opening of this vent diverter is to be located at this second end, and the nozzle of this spray nozzle device then is to be located at this first end.
Like aforesaid vent diverter, wherein the internal diameter of this first opening is less than the internal diameter of this second opening, and makes the said vent diverter that is tubular shell have an expansion angle.
Like aforesaid vent diverter, wherein this expansion angle is by the size decision of the fluid particles desiring to choose.
Like aforesaid vent diverter, be that a plurality of being located in this spray nozzle device arranged, second opening of one of them vent diverter is first opening facing to another vent diverter.
Description of drawings
Fig. 1 is existing spray nozzle device sketch map;
Fig. 2 is another kind of existing spray nozzle device sketch map;
Fig. 3 is another embodiment sketch map of runner layer of liquid cooling heat radiator of the present invention;
Fig. 4 is the application sketch map of vent diverter of the present invention;
Fig. 5 is the Another Application sketch map of vent diverter of the present invention;
Fig. 6 is a spray nozzle device sketch map of the present invention; And
Fig. 7 is another embodiment sketch map of spray nozzle device of the present invention.
[main element symbol description]
1: fluid tip
10: fluid
10a: path particle
10b: middle footpath particle
10c: big footpath particle
2: expansion chamber
20: cavity
21: the first ends
22: the second ends
267: spaced slot
3: cover body
30: side wall
31: bleed opening
4: workpiece
5: coating hood
50: stop part
51: outlet
6: vent diverter
6a: first vent diverter
6b: second vent diverter
60: the fluid passage
61: the first openings
62: the second openings
6A: expansion angle
7: stop element
H: heating
The specific embodiment
Below describe to the spray nozzle device of this case and each embodiment of being used for the vent diverter of spray nozzle device; Please refer to accompanying drawing; But actual configuration and the method that is adopted must not meet described content fully; Have the knack of this art when under the situation of practicalness that does not break away from this case and scope, making many variations and modification.
See also Fig. 3, be the fluid jet flow sketch map of fluid after the nozzle ejection.Wherein disclose fluid 10 after fluid tip 1 ejection; Owing to can produce surface tension between this body structure of fluid tip 1 and the fluid 10; Thereby make that the particle diameter of particle of fluid 10 Outboard Sections leave fluid tip 1 is maximum and be big footpath particle 10c; And the particle diameter of the particle of fluid 10 mid portions is minimum and be path particle 10a, is the medium middle footpath particle 10b of particle diameter as for 10 of marginal fluids.
See also Fig. 4, be the application sketch map of vent diverter of the present invention.Wherein vent diverter 6 is the object of a up-narrow and down-wide tubulose, tubular haply, the middle circulation space 60 that forms.Vent diverter 6 has one first opening 61 and one second opening 62, and the periphery of first opening 61 is less than second opening.Because fluid tip mostly 1 is the pipe shape, therefore two openings also are circular hole hole shape, cause the diameter of the diameter of first opening 61 less than second opening 62.Because the diffusion of meeting nature when fluid 10 leaves fluid tip 1 is so in order to adapt to, vent diverter 6 has an expansion angle 6A; The size of this angle depends on that the particle of which kind of big small particle diameter will be spaced; And the particle of which kind of size can pass through from the free air space 60 of vent diverter 6, please cooperate Fig. 3, if footpath particle 10b in can accepting; Expansion angle 6A just can be greatly so; The diameter of the first relative opening 61 also can be greatly, if will only allow path particle 10a through vent diverter 6, expansion angle 6A just can be littler so.When the particle of suitable particle diameter through behind the vent diverter 6, will arrive at workpiece (disclose among the figure, please refer to the label 4 of Fig. 1, Fig. 2), through vent diverter 6, make the particle of particle diameter of non-demand broken away from original jet path by shunting and can not arrive at workpiece.Because fluid tip 1 is the object of a pipe shape normally; So in order to cooperate the formed diffusion phenomena in fluid 10 effluent fluid nozzles, 1 back; Vent diverter 6 is exactly a coniform housing usually; But be a vertex of a cone and the awl untight housing in the end (body), that is have one first opening 61, then have one second opening 62 at the awl end at the vertex of a cone.And the diameter of second opening 62 equals to bore end internal diameter, and the diameter of first opening 61 is less than awl end internal diameter, and the diameter of first opening 61 can less than, more than or equal to the bore of this fluid tip 1.
See also Fig. 5, be the Another Application sketch map of vent diverter of the present invention.Wherein disclosed two vent diverters, be the first vent diverter 6a, with the second vent diverter 6b.Because fluid 10 is when actual ejection, the particle diameter distribution of particle outwards being increased gradually by fluid 10 central authorities no all roses therefore can be through two or more vent diverters with the comparatively meticulous screening of particle do.That is on the practice; By the first vent diverter 6a big footpath particle 10c among Fig. 3 is separated earlier; Then separate as for middle footpath particle 10b and path particle 10a by the second vent diverter 6b; For the diffusion phenomena that cooperate fluid 10 reaching shunting effect, first opening 61 of each vent diverter all near fluid tip 1, the second opening 62 then away from fluid tip 1.
See also Fig. 6, be spray nozzle device sketch map of the present invention.Comprising a fluid nozzle 1, be located at first end 21 of the cavity 20 of an expansion chamber 2, and the cavity 20 of expansion chamber 2 also has second end 22, makes the fluid 10 from fluid tip 1 leave expansion chamber 2.And vent diverter 6 shown in Figure 4 promptly is located at second end, 22 places, and vent diverter 6 has a circulation space 60, presents gradually-reducing shape from bottom to top, that is free air space 60 is narrower and away from fluid tip 1 part broad near fluid tip 1 part.And vent diverter 6 makes free air space 60 be able to connect vent diverter 6 through first opening 61 and second opening 62, and second opening 62 promptly is located at second end 22 of cavity 20.Furthermore, vent diverter 6 can be a cavity 20 to the own inner a kind of works that forms that extends, and and then produces a circulation space 60.And in order to cooperate the diffusion phenomena of fluid 10, vent diverter 6 more then more dwindles its internal diameter in cavity 20.In other words, more the internal diameter away from the free air space 60 of nozzle 1 is just bigger, and this has also met fluid 10 and has left nozzle 1 back more away from locating the situation that more diffusion is come.
Please continue to consult Fig. 6; Wherein also have a stop element 7 in the expansion chamber 2, it is first end, 21 places that are located at contiguous cavity 20 usually, and stop element 7 leaves the jet flow behind the nozzle 1 in order to stop material and airflow influence in the expansion chamber 2 to fluid 10; Because have the residual of some particles and dry ice in the expansion chamber 2; And nozzle 1 can produce air-flow, so these residuals will be by disturbance, and then possibly have influence on flowing of fluid 10; So stop element 7 just can separate these residuals and nozzle 1; That is, between the material that is separated by vent diverter 6 is via spaced slot 267, behind the entering expansion chamber 2, just only can rest on the space between cavity 20 and the stop element 7.And stop element 7 a tubular object normally; The one of which end is that the upper end of the stop element 7 of Fig. 6 is to be connected with first end 21 of cavity 20; The lower end of stop element 7 then can be low first opening 61 of vent diverter 6, make residuals be difficult for getting back to the jet path of fluid 10 from spaced slot 267.In addition, be piled up in the expansion chamber 2, more can heat H, can let dry ice gasify through heating H to expansion chamber 2 in order to reduce dry ice, and the discharge carbon dioxide of can bleeding separately.
See also Fig. 7, be another embodiment sketch map of spray nozzle device of the present invention.Wherein visible expansion chamber 2 is a plurality of; With Fig. 7; Two expansion chambers 2 are repeatedly put up and down; First end 21 of the expansion chamber 2 of below is communicated in second end 22 of the expansion chamber 2 of top, owing to have this connection to close, so the openings of sizes size of first end 21 of the expansion chamber 2 of below equals second end 22 of the expansion chamber 2 of top.The main effect one of the embodiment of Fig. 7 is as person shown in Figure 5, can reach the more particle diameter screening effect of carefulization through the expansion chamber 2 of two or above quantity.Please refer to explanation before as for vent diverter 6 and stop element 7, repeat no more in this.
In sum; Spray nozzle device of the present invention can filter out the particle of suitable particle diameter more accurately through vent diverter; Be easy to control more so use the present invention can let the spraying of film form operation, make film thickness more evenly, for film shaped technology; Especially film forming technology on heat labile base material, the present invention has greatest contribution.
The foregoing description has been merely convenience explanation and give an example, though be familiar with the personage Ren Shi craftsman of this skill to think be all as modification, so neither take off such as claims desire Protector.
Claims (11)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW099144334A TW201226061A (en) | 2010-12-16 | 2010-12-16 | Nozzle device and flow divider used for the same |
| TW099144334 | 2010-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102529376A true CN102529376A (en) | 2012-07-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010106232841A Pending CN102529376A (en) | 2010-12-16 | 2010-12-29 | Nozzle device and flow dividing element for nozzle device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102529376A (en) |
| TW (1) | TW201226061A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359723A (en) * | 2014-11-21 | 2015-02-18 | 中国环境科学研究院 | Fog liquid absorption device for collecting peroxides in atmosphere |
| CN106563286A (en) * | 2016-11-03 | 2017-04-19 | 中北大学 | Crystallization hanging basket used for preparing nanometer and micrometer particles through supercritical atomization and crystallization process |
| CN107745581A (en) * | 2017-10-13 | 2018-03-02 | 纳晶科技股份有限公司 | Drain component and its application method and application |
| CN112009101A (en) * | 2020-08-05 | 2020-12-01 | Tcl华星光电技术有限公司 | Print head and ink jet printing apparatus |
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| CN1796006A (en) * | 2004-12-30 | 2006-07-05 | 财团法人金属工业研究发展中心 | Method and apparatus for forming organic thin film on a substrate using dense phase fluid |
| EP1702690A2 (en) * | 2005-03-15 | 2006-09-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for dispersion and treatment of particles |
| CN1931420A (en) * | 2005-09-15 | 2007-03-21 | 财团法人工业技术研究院 | Method and device for producing nanoparticles |
| CN1938106A (en) * | 2004-03-31 | 2007-03-28 | 伊斯曼柯达公司 | Deposition of uniform layer of particulate material |
| CN101503792A (en) * | 2009-03-13 | 2009-08-12 | 厦门大学 | Size controllable metal and alloy nanoparticle gas-phase synthesizing method and apparatus |
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2010
- 2010-12-16 TW TW099144334A patent/TW201226061A/en unknown
- 2010-12-29 CN CN2010106232841A patent/CN102529376A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1938106A (en) * | 2004-03-31 | 2007-03-28 | 伊斯曼柯达公司 | Deposition of uniform layer of particulate material |
| CN1796006A (en) * | 2004-12-30 | 2006-07-05 | 财团法人金属工业研究发展中心 | Method and apparatus for forming organic thin film on a substrate using dense phase fluid |
| EP1702690A2 (en) * | 2005-03-15 | 2006-09-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for dispersion and treatment of particles |
| CN1931420A (en) * | 2005-09-15 | 2007-03-21 | 财团法人工业技术研究院 | Method and device for producing nanoparticles |
| CN101503792A (en) * | 2009-03-13 | 2009-08-12 | 厦门大学 | Size controllable metal and alloy nanoparticle gas-phase synthesizing method and apparatus |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359723A (en) * | 2014-11-21 | 2015-02-18 | 中国环境科学研究院 | Fog liquid absorption device for collecting peroxides in atmosphere |
| CN106563286A (en) * | 2016-11-03 | 2017-04-19 | 中北大学 | Crystallization hanging basket used for preparing nanometer and micrometer particles through supercritical atomization and crystallization process |
| CN106563286B (en) * | 2016-11-03 | 2019-04-05 | 中北大学 | A kind of overcritical atomization crystallization processes preparation receives micron particles and crystallizes hanging basket |
| CN107745581A (en) * | 2017-10-13 | 2018-03-02 | 纳晶科技股份有限公司 | Drain component and its application method and application |
| WO2019072102A1 (en) * | 2017-10-13 | 2019-04-18 | 纳晶科技股份有限公司 | Liquid guiding component, method for using same, and applications thereof |
| US11839886B2 (en) | 2017-10-13 | 2023-12-12 | Najing Technology Corporation Limited | Liquid guiding component and using method and application thereof |
| CN112009101A (en) * | 2020-08-05 | 2020-12-01 | Tcl华星光电技术有限公司 | Print head and ink jet printing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201226061A (en) | 2012-07-01 |
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Application publication date: 20120704 |