CN102528539A - Cleaning apparatus - Google Patents

Abstract

The present invention provides a purification device capable of distributing more gas such as oxygen in the used treatment liquid. The purifying device is a purifying device for purifying used processing liquid in processing machines, and it is composed of: a liquid storage tank (10); foam generating mechanisms (40, 44), which make the used processing liquid Foam is generated in the foam, thereby generating the used treatment liquid containing foam; the treatment liquid supply mechanism (41, 50), which sucks the used treatment liquid in the liquid storage tank (10) and supplies the used treatment liquid to the foam generation mechanism; a supply unit (52, 52a, 52b) that guides the used treatment liquid containing foam generated in the foam generation mechanism to the liquid storage tank (10), and supplies the used treatment liquid containing foam The used treatment liquid of the foam is supplied to the liquid storage tank (10); and the treatment liquid circulation mechanism (41, 51) which sucks the used treatment liquid in the liquid storage tank (10) and returns it to Reservoir (10).

Description

Purification device

technical field

The present invention relates to a purifying device for purifying processing liquids such as cooling liquids used in processing machines.

Background technique

In the past, a cooling liquid purification device has been proposed, which purifies the cooling liquid (treatment liquid) used for lubrication and cooling of cutting parts in processing machines such as lathes and milling machines so that it can be used repeatedly (refer to patent Literature 1). In this conventional cleaning device, the used cooling liquid from the processing machine is supplied to the storage tank in a state where the magnetic substance has been removed, so that air bubbles (foam) are generated in the cooling liquid stored in the storage tank, When the air bubbles float up, they adhere to the foreign matter in the cooling liquid, and the foreign matter floats up to the surface of the cooling liquid. The cooling liquid is purified by recovering the foreign matter floating to the surface of the cooling liquid.

Patent Document 1: (Japanese) Unexamined Patent Publication No. 2005-96053

However, in the above-mentioned conventional cleaning device, since the used cooling liquid (processing liquid) is supplied by dropping into the storage tank, air bubbles are generated in the used cooling liquid stored in the storage tank. It is difficult to spread to all corners of the used cooling liquid stored in the storage tank. In addition, because the residence time of the bubbles in the used cooling liquid is relatively short, it is difficult to form used cooling liquid in the storage tank. A state where more oxygen is dissolved in the coolant. Therefore, anaerobic bacteria are more likely to multiply in the used coolant stored in the storage tank, which causes foul odor. In addition, if the surface of the used coolant stored in the storage tank is covered with foreign matter such as oil, bacterial remains, cutting powder, etc., the used coolant will not be able to spread oxygen, which will easily accelerate the growth of anaerobic bacteria.

Contents of the invention

The present invention was made in view of the above circumstances, and provides a purification device capable of spreading more gas such as oxygen in the used treatment liquid.

The purifying device of the present invention is a purifying device for purifying used treatment liquid in a processing machine, which is configured to have: a liquid storage tank for storing the used treatment liquid in the processing machine; liquid; a foam generating mechanism that generates foam in the supplied used treatment liquid, thereby generating a used treatment liquid containing foam; a treatment liquid supply mechanism that sucks the storage liquid the used treatment liquid in the tank and supply the used treatment liquid to the foam generation mechanism; the supply part supplies the used treatment liquid containing foam generated in the foam generation mechanism to the The liquid storage tank is guided, and the foam-containing used treatment liquid is supplied to the liquid storage tank; and a treatment liquid circulation mechanism that sucks the used treatment liquid in the liquid storage tank and return it to the reservoir.

According to the purification device of the present invention, more gas such as oxygen can be distributed in the used treatment liquid.

Description of drawings

FIG. 1 is a diagram showing a purification device according to a first embodiment of the present invention.

Fig. 2 is a diagram showing a detailed structure of a foam generator used in the cleaning device shown in Fig. 1 .

Fig. 3 is a graph showing the relationship between the size of foam in a liquid and the dissolution efficiency.

Fig. 4 is a diagram showing a purification device according to a second embodiment of the present invention.

Fig. 5 is a diagram showing a purification device according to a third embodiment of the present invention.

Fig. 6 is a diagram showing a purification device according to a fourth embodiment of the present invention.

Fig. 7 is a diagram showing a purification device according to a fifth embodiment of the present invention.

Fig. 8 is a diagram showing a treatment liquid recovery mechanism applicable to a purification device.

Fig. 9 is a diagram showing a purification device according to a sixth embodiment of the present invention.

Fig. 10 is a diagram showing a detailed structure of a liquid aspirator used in the purification device shown in Fig. 9 .

Fig. 11 is a diagram showing a purification device according to a seventh embodiment of the present invention.

Fig. 12 is a view showing a state of used coolant containing foam ejected from a foam ejection pipe in the cleaning device shown in Fig. 11 .

Label description

10: Reservoir

11: Introduction tube

12: Delivery tube

13a, 13b: Wall plate components

20: Foam Generator

21: pump

22, 22a, 44: air cylinder

22b: Nitrogen cylinder

23: Flow regulator

24a, 43: suction tube

24b: Liquid delivery tube

25, 45: gas delivery pipe

26: Supply pipe (supply part)

27, 28a, 28b: opening and closing valves

30: Aerator (foam generating mechanism in tank)

31: air cylinder

32: Flow regulator

40: Foam Generator

41: Air driven pump

42: coarse filter

45: Gas delivery pipe

47a: First gas delivery tube

47b: Second gas delivery tube

48a, 48b: flow regulators

49a, 49b: throttle valve

50: first liquid delivery pipe

51: Second liquid delivery pipe

52: Supply pipe

52a: First supply branch

52b: Second supply branch

53, 54: On-off valve

55: Liquid delivery tube

70a, 70b: floating body

71: Supporting part

72: Suction mouth

73: flexible liquid delivery tube

74: coarse filter

75: filter unit

76: mesh body

77: filter paper

80: Aspirator

100: Diffusion unit with foam treatment liquid

101: Treatment liquid ejector

102: Main body of foam generating part

103: plug body

Detailed ways

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

The cleaning device according to the first embodiment of the present invention is configured as shown in FIG. 1 . This purification device is a device capable of purifying and reusing coolant (processing liquid) used in processing machines such as lathes and milling machines.

In Fig. 1, the purification device has a liquid storage tank 10 for storing cooling liquid (treatment liquid) L, and the used cooling liquid from the processing machine is stored in the liquid storage tank 10 through an introduction pipe 11, and in the liquid storage tank 10 The used coolant L whose interior has been purified can be returned to the processing machine through the delivery pipe 12 . In addition, this cleaning device has a foam generator 20 (foam generator body), a pump 21 and an air cylinder 22 . The pump 21 supplies the used coolant L sucked from the liquid storage tank 10 through the suction pipe 24a to the foam generator 20 through the liquid delivery pipe 24b (treatment liquid supply mechanism), and the air from the air cylinder 22 (Oxygen) is pressurized and supplied to the foam generator 20 (gas supply mechanism) through the gas delivery pipe 25 provided with the flow regulator 23 . The foam generator 20 generates bubbles (foam) of air supplied from the air cylinder 22 in the used coolant L supplied by the pump 21 to generate the used coolant L containing foam (foam generating means). Next, the foam-containing used cooling liquid L generated in the foam generator 20 is guided to the liquid storage tank 10 through the supply pipe 26 (supply portion), and the foam-containing used cooling liquid L flows from the supply pipe 26 The front end spouts toward the bottom of the reservoir 10 .

The foam generator 20 is configured, for example, as shown in FIG. 2 . This foam generator 20 has an SPG unit 210 obtained by molding a Shirasu porous glass (SPG) membrane into a cylinder, and both ends of the SPG unit 210 are supported by support members 201 and 202 in the outer cylinder 200 . The liquid delivery pipe 24b (refer to FIG. 1 ) extending from the pump 21 is connected to the liquid inlet 213 at one end of the outer cylinder 200, and the used cooling liquid L supplied through the liquid delivery pipe 24b is supplied from the outside. The SPG unit 210 in the cylinder body 200 passes through the cylinder. The gas delivery pipe 25 extending from the air cylinder 22 is connected to the gas introduction part 211 formed on the outer cylinder 200, and the air (oxygen) supplied from the air cylinder 22 through the gas delivery pipe 25 is introduced under pressure through the gas introduction part 211. Inside the outer cylinder 200. The air introduced into the outer cylindrical body 200 enters the inside of the SPG unit 210 through many fine holes formed in the SPG unit 210 , and the used cooling liquid L passed through the cylinder of the SPG unit 210 is generated in the same manner as the fine holes. The size corresponds to the size of the foam. The liquid discharge port 214 at the other end of the outer cylinder 200 is connected to a supply pipe 26 (refer to FIG. 1 ). The discharged liquid is further supplied to the liquid storage tank 10 through the supply pipe 26 .

In addition, the liquid discharge port 212 is formed in the outer cylindrical body 200 , but the liquid discharge port 212 is normally closed by the on-off valve 27 shown in FIG. 1 .

In this washing apparatus, the used cooling liquid L stored in the liquid storage tank 10 is supplied to the foam generator 20, and the used cooling liquid L containing foam discharged from the foam generator 20 is supplied to the liquid storage. The tank 10, therefore, the used cooling liquid L circulates between the foam generator 20 and the liquid storage tank 10, enabling the amount of foam in the used cooling liquid L of the liquid storage tank 10 to increase during this circulation. In addition, the foam-containing used cooling liquid L discharged from the foam generator 20 passes through the supply pipe 26 and is sprayed from the front end thereof toward the bottom of the liquid storage tank 10, so that the foam-containing used cooling liquid L flows along the The bottom of the reservoir 10 spreads out (see dotted arrow in FIG. 1 ). Therefore, the foam spreads over a wider area in the used cooling liquid L in the reservoir 10, and the residence time of the foam in the used cooling liquid L increases, so that more oxygen (air) is distributed. in used coolant. As a result, the amount of oxygen dissolved in the used coolant L in the liquid storage tank 10 can be increased, and the growth of anaerobic bacteria can be more effectively suppressed.

Regarding the size of the foam generated in the used cooling liquid L by the foam generator 20, it is considered from the viewpoint that the residence time of the foam in the used cooling liquid L can be further increased and that it is easily dissolved in the cooling liquid L. , preferably smaller sizes (microfoam, micro-nanofoam, etc.). Specifically, from the viewpoint of ease of dissolution, as shown in FIG. 3 , it is preferable that the size of the foam is 300 μm or less. In addition, the size of the foam is more preferably 200 μm or less, and still more preferably within a range of 20 μm to 100 μm. The size of the foam generated in the used coolant L depends on the size of pores of Shirasu porous glass (SPG) used in the SPG unit 210 . Therefore, in the SPG unit 210 , a cylinder of Shirasu porous glass (SPG) formed with a large number of pores capable of generating foam of a target size is used.

A purification device according to a second embodiment of the present invention is configured as shown in FIG. 4 . This purification device is characterized in that wall members 13a, 13b are provided in the liquid storage tank 10, and the processed coolant L containing foam is supplied along the wall members 13a, 13b.

In FIG. 4 , the purification device is the same as in the case of the first embodiment (refer to FIG. 1 ). The used coolant L from the processing machine is stored in the liquid storage tank 10 through the introduction pipe 11, and the liquid storage tank 10 The used coolant L whose interior has been purified can be returned to the processing machine through the delivery pipe 12 . Inside the reservoir 10, wall plate members 13a, 13b extending in the vertical direction are provided. In addition, this cleaning device has a foam generator 20 , a pump 21 and an air cylinder 22 as in the case of the first embodiment. The pump 21 supplies the used cooling liquid L sucked from the liquid storage tank 10 through the suction pipe 241a to the foam generator 20 through the liquid delivery pipe 241b, and the air (oxygen) from the air cylinder 22 passes through a flow rate set to The gas delivery pipe 251 of the regulator 23 is supplied to the foam generator 20 under pressure. The foam generator 20 is configured as shown in FIG. 2 for generating the used cooling liquid L containing foam. Further, the foam-containing used coolant L generated in the foam generator 20 is guided to the liquid storage tank 10 through the supply pipe 261 (supply part), and the foam-containing used coolant L is supplied from the liquid storage tank 10 The bottom of is supplied to the liquid storage tank 10 along the wall members 13a, 13b.

In this purification device, since the used coolant L containing foam from the foam generator 20 is supplied to the liquid storage tank 10 from the bottom of the liquid storage tank 10 along the wall plate members 13a, 13b, the , the foam-containing used coolant L can convect along the wall parts 13a, 13b (cf. dotted arrows in FIG. 4). Therefore, the foam spreads over a wider range in the used cooling liquid L in the reservoir 10, and the residence time of the foam in the used cooling liquid L becomes longer, so that more oxygen (air) ) spread throughout the used coolant. As a result, the amount of oxygen dissolved in the used cooling liquid L in the liquid storage tank 10 can be increased, and the growth of anaerobic bacteria can be more effectively suppressed.

A purification device according to a third embodiment of the present invention is configured as shown in FIG. 5 . This purification device is characterized in that, in the purification device of the above-mentioned first embodiment, an aerator (aerator) 30 is provided in the liquid storage tank 10 .

In FIG. 5 , the purification device is the same as that of the first embodiment (refer to FIG. 1 ), and the foam generator 20 generates air (oxygen) supplied from the air cylinder 22 in the used coolant L supplied by the pump 21. bubbles (foam), the foam-containing used coolant L is guided from the foam generator 20 to the liquid storage tank 10 through the supply pipe 26 (supply part), and the foam-containing used coolant L is supplied from the supply pipe 26 The front end of the nozzle sprays out to the bottom of the liquid storage tank 10. In addition to this structure, an aerator 30 is also provided in the liquid storage tank 10 . Air is supplied from the air cylinder 31 to the aerator 30 through the delivery pipe 33 provided with the flow regulator 32, and foam is released from the aerator 30 to the used cooling liquid L in the liquid storage tank 10 (foam generating mechanism in the tank). ). Here, as the aerator 30, for example, an aerator used in an ornamental fish tank can be used. Also, the size of the foam discharged from the aerator 30 is set to be larger than the size of the foam generated in the foam generator 20 .

Regarding the size of the foam contained in the used coolant L generated in the foam generator 20 and supplied to the liquid storage tank 10 through the supply pipe 26, a small size (for example, 300 μm or less) is preferable as described above. The size of the foam discharged from the aerator 30 is set to be larger than the size of the foam generated in the foam generator 20 as described above. Therefore, compared with the foam supplied into the liquid storage tank 10 through the supply pipe 26 and staying in the used cooling liquid L for a longer period of time, the foam released from the aerator 30 has a larger buoyancy, so it will be quickly released. Floats and reaches the liquid surface.

In this cleaning device, as in the first embodiment, the used cooling liquid L stored in the liquid storage tank 10 is supplied to the foam generator 20 , and the liquid containing the foam discharged from the foam generator 20 is supplied to the liquid storage tank 10 . The used cooling liquid L, therefore, the used cooling liquid L circulates between the foam generator 20 and the liquid storage tank 10, and the used cooling liquid L in the liquid storage tank 10 can be made The amount of foam increases. In addition, since the used cooling liquid L containing foam discharged from the foam generator 20 passes through the supply pipe 26 and is sprayed from the front end thereof toward the bottom of the liquid storage tank 10, the used cooling liquid L containing foam flows along the The bottom of the reservoir 10 spreads out (see dotted arrow in FIG. 3 ). In addition, since the foam discharged from the aerator 30 in the liquid storage tank 10 is smaller than the foam contained in the used cooling liquid L sprayed to the bottom of the liquid storage tank 10 through the supply pipe 26 Therefore, the foam released from the aerator 30 rises faster, thereby generating a flow of the used cooling liquid L. Therefore, the foam spreads over a wider range in the used cooling liquid L in the reservoir 10, so that more oxygen (air) spreads in the used cooling liquid. As a result, the amount of dissolved oxygen in the used coolant L in the liquid storage tank 10 can be increased, and the growth of anaerobic bacteria can be more effectively suppressed.

In addition, in the purification device of this embodiment, since the relatively large-sized foam released from the aerator 30 floats quickly, foreign matter (dead remains of bacteria, bacteria, Oil, cutting powder, etc.) float to the liquid surface of the used coolant L more efficiently. Furthermore, foreign matter floating on the liquid surface of the used cooling liquid L in the liquid storage tank 10 can be easily removed.

A purification device according to a fourth embodiment of the present invention is configured as shown in FIG. 6 . This purifier is characterized in that it can switch and supply the used cooling liquid L containing foam generated from two types of (air and nitrogen) gases to the used cooling liquid L stored in the liquid storage tank 10 .

In Fig. 6, the purification device is the same as the above-mentioned purification devices (refer to Fig. 1, Fig. 4 and Fig. 5), and the used cooling liquid L from the processing machine is stored in the liquid storage tank 10 through the introduction pipe 11. The used coolant L purified in the liquid storage tank 10 can be returned to the processing machine through the delivery pipe 12 . The used cooling liquid L sucked from the liquid storage tank 10 by the pump 21 through the suction pipe 24a is supplied to the foam generator 20 through the liquid delivery pipe 24b. The gas delivery pipe 251 combined with the foam generator 20 is branched into a first gas delivery pipe 251a and a second gas delivery pipe 251b. A flow regulator 23 is provided on the gas delivery pipe 251, and the air cylinder 22a is combined with the first gas delivery pipe 251a provided with the on-off valve 28a. Tube 251b is combined.

In this cleaning device, when the on-off valve 28a is opened and the on-off valve 28b is closed, as in the case of the first embodiment, air (oxygen) is supplied under pressure from the air cylinder 22a to the foam generator 20, containing The used cooling liquid L of air (oxygen) foam is discharged from the foam generator 20 , passes through the supply pipe 26 and is sprayed from the front end thereof toward the bottom of the liquid storage tank 10 . In this case, as described above, fine foam stays in the used coolant L in the liquid storage tank 10 for a long time, and the amount of dissolved oxygen in the used coolant increases. Thereby, growth of anaerobic bacteria can be suppressed.

On the other hand, conversely, when the on-off valve 28a is closed and the on-off valve 28b is opened, oxygen-free nitrogen is pressurized and supplied to the foam generator from the nitrogen cylinder 22b through the second gas delivery pipe 251b and the gas delivery pipe 251 20 , and the used cooling liquid L containing foam formed from nitrogen is discharged from the foam generator 20 . In this case, fine bubbles (nitrogen gas) stay in the used coolant L in the liquid storage tank 10 for a long time, and the dissolved amount of nitrogen in the used coolant increases. Thereby, the growth of aerobic bacteria can be suppressed.

By switching the opening and closing of the on-off valves 28a and 28b at appropriate timing, as described above, it is possible to suppress the growth of both anaerobic bacteria and aerobic bacteria in the used cooling liquid L stored in the liquid storage tank 10. reproduce. In addition, this embodiment also has the same effect as that of the first embodiment.

A purification device according to a fifth embodiment of the present invention is configured as shown in FIG. 7 .

In Fig. 7, the purification device is the same as the above-mentioned purification devices (see Fig. 1, Fig. 4, Fig. 5 and Fig. 6), and the used coolant L from the processing machine is stored in the liquid storage tank through the introduction pipe 11. 10. The used coolant L purified in the liquid storage tank 10 can be returned to the processing machine through the delivery pipe 12 . This cleaning device has a foam generator 40 (foam generator main body), an air-driven pump 41 , and an air cylinder 44 . The gas delivery pipe 45 extending from the air cylinder 44 and provided with the on-off valve 46 is branched into a first gas delivery pipe 47a and a second gas delivery pipe 47b. The first gas delivery pipe 47a is provided with a flow regulator 48a and a throttle valve 49a, and the air flowing from the air cylinder 44 through the gas delivery pipe 45 and the first gas delivery pipe 47a is throttled by the throttle valve 49a. It is supplied to the air-driven pump 41 . The suction pipe 43 provided with the coarse filter 42 at the front end is connected to the input port of the air-driven pump 41, and the liquid delivery pipe connected to the output port of the air-driven pump 41 is branched into a first liquid delivery pipe 50 and a second liquid delivery pipe 51 . The coarse filter 42 provided at the front end of the suction pipe 43 is arranged at one corner of the reservoir 10 . In addition, an on-off valve 53 is provided in the first liquid delivery pipe 50 , and an on-off valve 54 is provided in the second liquid delivery pipe 51 . The on-off valves 53 and 54 have a flow regulating function.

A flow regulator 48b and a throttle valve 49b are arranged in the second gas delivery pipe 47b branched from the gas delivery pipe 45 extending from the air cylinder 44, and the air cylinder 44 passes through the gas delivery pipe 45 and the second gas delivery pipe 47b. On the other hand, the circulating air (oxygen) is pressurized and supplied to the foam generator 40 while being throttled by the throttle valve 49b (gas supply means). Regarding the air-driven pump 41 driven by the ejection force of the air supplied through the first air delivery pipe 47a, it passes the used cooling liquid L sucked from the liquid storage tank 10 through the coarse filter 42 and the suction pipe 43. The first liquid delivery pipe 50 supplies the foam generator 40 (treatment liquid supply mechanism). The foam generator 40 is a structure using an SPG unit 210 as shown in FIG. And generate the used coolant L containing foam (foam generating mechanism). Moreover, the used cooling liquid L containing foam generated in the foam generator 40 passes through the supply pipe 52, and is guided in parallel to the storage tank by means of the first supply branch pipe 52a and the second supply branch pipe 52b branched from the supply pipe 52. The liquid tank 10 is sprayed from the front ends of the first supply branch pipe 52a and the second supply branch pipe 52b to the bottom of the liquid storage tank 10 (supply part). The first branch supply pipe 52 a and the second branch supply pipe 52 b are arranged in the approximate center of the reservoir 10 .

The tip of the second liquid delivery pipe 51 extending from the liquid delivery pipe connected to the output port of the air-driven pump 41 is arranged at a corner of the reservoir 10 opposite to the corner where the coarse filter 42 is arranged. Furthermore, the used coolant L sucked by the air-driven pump 41 from the front end portion (coarse filter 42) of the suction pipe 43 arranged at one corner of the reservoir 10 is passed from the air-driven pump 41 through the second The liquid delivery pipe 51 returns to the used cooling liquid L at the other corner of the liquid storage tank 10 (processing liquid circulation mechanism). In addition, in the alignment direction of the position of the suction pipe 43 (coarse filter 42) that sucks the used cooling liquid L and the position where the used cooling liquid L returns from the front end portion of the second liquid delivery pipe 51, here Between the two positions, the used cooling liquid L containing foam is supplied to the used cooling liquid L in the liquid storage tank 10 from the first supply branch pipe 52 a and the second supply branch pipe 52 b. Here, by adjusting the opening of the on-off valves 53 and 54 , it is possible to perform a balance adjustment between two quantities: suction through the coarse filter 42 and return to the liquid storage tank 10 through the second liquid delivery pipe 51 The amount of the used cooling liquid L and the amount of the used cooling liquid L containing foam supplied from the first supply branch pipe 52a and the second supply branch pipe 52b to the used cooling liquid L in the liquid storage tank 10 .

In this cleaning device, the used coolant L sucked by the air-driven pump 41 from the front end (coarse filter 42) of the suction pipe 43 arranged at one corner of the liquid storage tank 10 is driven from the air. The pump 41 returns the used cooling liquid L to the other corner of the liquid storage tank 10 through the second liquid delivery pipe 51 (constituting a piping passage for returning the used cooling liquid L to the liquid storage tank). A circulation flow is generated over a wide range of the used coolant L in the liquid storage tank 10 . Furthermore, the used cooling liquid L containing foam from the foam generator 40 is supplied to the liquid storage tank 10 in which a circulating flow is generated in this wide range through the first supply branch pipe 52a and the second supply branch pipe 52b. in the cooled coolant L. Therefore, the foam spreads over a wider range in the used cooling liquid L in the reservoir 10, and the residence time of the foam in the used cooling liquid L becomes longer, so that more air (oxygen) ) spread throughout the used coolant. As a result, the amount of dissolved oxygen in the used coolant L in the liquid storage tank 10 can be increased, and the growth of anaerobic bacteria can be more effectively suppressed.

In addition, it is used to circulate the used cooling liquid L in the liquid storage tank 10, supply the used cooling liquid L to the foam generator 20, and return the used cooling liquid L containing foam to the liquid storage tank 10. Since the air-driven pump 41 is driven by the injection force of the air supplied from the air cylinder 44, heat generation of the air-driven pump 41 can be greatly suppressed. Therefore, the temperature rise of the used cooling liquid L in the liquid storage tank 10 can be suppressed, and the dissolution rate of oxygen in the used cooling liquid L can be maintained at a high level.

In addition, since the air utilized in the foam generator 40 and the air for driving the air-driven pump 41 for sucking the used cooling water from the liquid storage tank 10 are supplied from the common air cylinder 44 Since the liquid L is supplied to the foam generator 40, the device structure can be further simplified. In addition, the mechanism for sucking the used cooling liquid L from the liquid storage tank 10 to supply it to the foam generator 40 and the mechanism for circulating the used cooling liquid L in the liquid storage tank 10 are composed of common air. Since the driving pump 41 is constituted, the device structure can be further simplified. In addition, since the used coolant L containing foam generated by the foam generator 40 is supplied into the liquid storage tank 10 from a plurality of supply pipes such as the first supply branch pipe 52a and the second supply branch pipe 52b, it is possible to The foamy used coolant L is efficiently supplied to the liquid storage tank 10 over a wider range.

In each of the purification devices described above, a treatment liquid recovery mechanism as shown in FIG. 8 may also be provided.

In FIG. 8 , the used cooling liquid L from the processing machine is stored in the liquid storage tank 10 through the introduction pipe 11, and the used cooling liquid L purified in the liquid storage tank 10 can be returned to the processing machinery. The treatment liquid recovery mechanism includes: a plurality of floating bodies 70a, 70b floating on the used cooling liquid L stored in the liquid storage tank 10; 70b together constitute a floating part); and the suction port 72 supported by the support part 71 and arranged in the vicinity of the liquid surface of the used cooling liquid L. The suction port 72 opens toward the liquid surface of the used cooling liquid L, and can suck the surface part D of the used cooling liquid L. As shown in FIG.

In addition, this processing liquid recovery mechanism has an air-driven pump 60, an air cylinder 61, and a filter unit 75 (processing liquid filtering mechanism). On the gas delivery pipe 62 extending from the air cylinder 61, a flow regulator 63, an on-off valve 64 and a throttle valve 65 are arranged, and the air flowing from the air cylinder 61 through the gas delivery pipe 62 is passed through the throttle valve 65 to be discharged. The throttled state supplies air to drive the pump 60 . Also, the air-driven pump 60 is driven by the ejection force of air supplied from the air cylinder 61 . A suction pipe 66 with a coarse filter 74 at the front end is connected to the input port of the air-driven pump 60 , and a liquid delivery pipe 67 connected to the output port of the air-driven pump 60 extends to the filter unit 75 . The coarse filter 74 disposed in the used coolant L of the liquid storage tank 10 is connected to a flexible liquid delivery pipe 73 extending from the suction port 72 .

A mesh body 76 is laid on the expanded receiving portion of the filter unit 75 , and a filter paper 77 is placed above the mesh body 76 . The liquid delivery pipe 67 extending from the output port of the air-driven pump 60 is arranged such that its front end faces the filter paper 77 of the filter unit 75 .

In this treatment liquid recovery mechanism, when the air-driven pump 60 is operated by the air from the air cylinder 61, the surface portion D of the used cooling liquid L of the floating bodies 70a, 70b is sucked from the suction port 72 , and are recovered through the flexible liquid delivery pipe 73, the coarse filter 74, and the suction pipe 66. That is, the air-driven pump 60 functions as a suction mechanism. Also, the surface portion D of the used cooling liquid L thus recovered is further passed through the liquid delivery pipe 67 by means of the air-driven pump 60 and supplied to the filter unit 75 . The surface portion D of the recovered used coolant L is filtered by the filter unit 75 through the filter paper 77 and the mesh body 76 , and returned to the liquid storage tank 10 .

In this way, since the surface portion D of the used coolant L stored in the liquid storage tank 10 is recovered, oil floating on the liquid surface of the used coolant L, dead bodies of bacteria, and cutting powder can be removed. and other foreign objects. Moreover, since the used coolant L containing foreign matter recovered from the liquid storage tank 10 is filtered and returned to the liquid storage tank 10, it is possible to effectively utilize the used coolant L in the liquid storage tank 10 with less foreign matter. treatment fluid.

In addition, in the above-mentioned treatment liquid recovery mechanism, even if the amount of the treated cooling liquid L in the liquid storage tank 10 fluctuates to cause the height of the liquid surface to fluctuate, the floating bodies 70a, 70b will also fluctuate to the level of the liquid level. Therefore, even if the amount of the treated coolant L in the liquid storage tank 10 fluctuates, the suction port 72 supported by the support part 71 suspended and supported by the floating bodies 70a, 70b can The surface portion D of the used coolant L is reliably sucked.

A purification device according to a sixth embodiment of the present invention is configured as shown in FIG. 9 . In this purification device, the above-mentioned treatment liquid recovery mechanism (refer to FIG. 8 ) is specifically applied to the purification device having the structure shown in FIG. 7 .

In FIG. 9, as in the case of the above-mentioned fifth embodiment (refer to FIG. 7), the cleaning device has a foam generator 40, an air-driven pump 41, and an air cylinder 44, and has a coarse filter 42, a suction pipe 43 , gas delivery pipe 45, on-off valve 46, first gas delivery pipe 47a, second gas delivery pipe 47b, flow regulator 48a, 48b, throttle valve 49a, 49b, first liquid delivery pipe 50, second liquid delivery Pipe 51, supply pipe 52, first supply branch pipe 52a, second supply branch pipe 52b, and on-off valves 53, 54. In this cleaning device, the air from the air cylinder 44 is supplied to the air-driven pump 41 through the first air delivery pipe 47a branched from the air delivery pipe 45, and the air from the air cylinder 44 is supplied to the air drive pump 41 The outgoing second gas delivery pipe 47 b is supplied to the foam generator 40 . Also, the used cooling liquid L sucked from the liquid storage tank 10 through the suction pipe 43 (coarse filter 42) is supplied to the foam generator 40 by the air-driven pump 41 driven by the ejection force of the supplied air, The used cooling liquid L containing foam generated by the foam generator 40 is sprayed into the used cooling liquid L in the liquid storage tank 10 from the first branch supply pipe 52 a and the second branch supply pipe 52 b.

The second liquid delivery branch pipe 51 branched from the first liquid delivery pipe 50 combined with the output port of the air-driven pump 41 to the side opposite to the foam generator 40 side is combined with the liquid introduction part of the liquid aspirator (aspirator) 80, and The liquid delivery pipe 55 combined with the liquid discharge portion of the liquid aspirator 80 extends to the filter unit 75 . As in the example shown in FIG. 8 , the filter unit 75 has a structure in which a mesh body 76 is laid on its expanded receiving portion, and a filter paper 77 is placed above the mesh body 76 . Also, the front end portion of the liquid delivery pipe 55 extending from the liquid aspirator 80 faces the filter paper 77 of the filter unit 75 . The coarse filter 42, the suction pipe 43, the air-driven pump 41, the second liquid transfer branch pipe 51 (pipe passage), the liquid transfer pipe 55 (pipe passage), the liquid aspirator 80, and the filter unit 75 constitute a treatment liquid circulation mechanism.

In addition, the suction port 72 is supported in the support portion 71 suspended and supported by the plurality of floating bodies 70a, 70b so as to be arranged in the vicinity of the liquid surface in the used cooling liquid. 70 b floats on the used cooling liquid L stored in the liquid storage tank 10 . Thereby, the surface part D of the used coolant L can be sucked in from the suction port part 72. As shown in FIG. The plurality of floating bodies 70a, 70b, the support portion 71 and the suction port portion 72 are integrated, and in the direction of arrangement of the first supply branch pipe 52a and the second supply branch pipe 52b for supplying the used coolant L containing foam. Arranged between these supply branch pipes. A flexible liquid delivery tube 73 continuing from the suction port 72 is combined with the suction introduction of the liquid aspirator 80 .

The liquid aspirator 80 introduces the surface of the used coolant L passing through the flexible liquid delivery pipe 73 by utilizing the flow of the used coolant L flowing from the second liquid delivery pipe 51 side to the liquid delivery pipe 55 side inside it. part D and discharge it together with the used coolant L. That is, the liquid aspirator 80 functions as a suction mechanism. Specifically, this liquid aspirator 80 is configured as shown in FIG. 10 .

In FIG. 10 , in the liquid aspirator 80 , a liquid introduction part 81 , a liquid discharge part 82 , and a suction introduction part 83 are combined in a T-shape. As described above, the liquid introduction part 81 is connected to the second liquid delivery pipe 51 extending from the side of the air-driven pump 41, and the liquid introduction part 81 communicates with the liquid discharge part 82 via the throttle part 84, and the liquid discharge part 82 is connected to the liquid discharge part 82 extending to The liquid delivery pipe 55 of the filter unit 75 is connected. The suction introduction part 83 is connected to the flexible liquid delivery tube 73 extending from the suction opening 72, and the suction introduction part 83 continues from the liquid introduction part 81 to the liquid discharge via the mixing part 85 located directly behind the throttle part 84. Port 82 is combined with the passageway. In addition, the liquid discharge portion 82 is formed in a shape such that its cross-section gradually expands from the end portion on the side of the suction introduction portion 83 .

In this cleaning device, when the air-driven pump 41 is operated with air from the air cylinder 44, the used coolant in the liquid storage tank 10 that is sucked through the suction pipe 43 (coarse filter 42) L is supplied to the liquid aspirator 80 through the first liquid delivery pipe 51 . In the liquid aspirator 80 (see FIG. 10 ), the used cooling liquid L supplied from the first liquid delivery pipe 51 passes through the throttle portion 84 from the liquid introduction portion 81 at a high speed and escapes to the liquid discharge portion 82 . In this way, when the used cooling liquid L passes through the throttle portion 84 at a high speed, the region of the mixing portion 85 becomes a negative pressure, whereby the surface portion D of the used cooling liquid L supplied through the flexible liquid delivery pipe 73 is compressed. Introduce from the suction introduction part 83 . Further, at the mixing portion 85 , the surface portion D of the introduced used cooling liquid L is mixed with the used cooling liquid L flowing at high speed from the liquid introduction portion 81 side and discharged from the liquid discharge portion 82 . The used cooling liquid L containing the surface portion D discharged from the liquid aspirator 80 is supplied to the filter unit 75 through the liquid delivery pipe 55 . The surface portion D of the recovered used cooling liquid L is filtered by the filter unit 75 through the filter paper 77 and the mesh body 76 , and then returned to the liquid storage tank 10 .

In this way, the surface portion D of the used coolant L stored in the liquid storage tank 10 is recovered, so foreign matter such as oil, bacterial dead bodies, and cutting powder floating on the liquid surface of the used coolant L can be removed. . In addition, the used cooling liquid L containing foreign matter recovered from the liquid storage tank 10 is filtered and returned to the liquid storage tank 10, so that the used coolant L in the liquid storage tank 10 can be effectively utilized with less foreign matter. liquid.

In addition, the used coolant L sucked from the suction pipe 43 (coarse filter 42 ) passes through the filter unit 75 and returns to the reservoir 10 , so the used coolant L in the reservoir 10 Create a circular flow. The used coolant L in the liquid storage tank 10 that has generated such a circulation flow is supplied with the used coolant L containing foam from the foam generator 40 through the first branch supply pipe 52a and the second supply branch pipe 52b. Therefore, the foam spreads over a wider area in the used cooling liquid L in the reservoir 10, and the residence time of the foam in the used cooling liquid L becomes longer, so that more air (oxygen) ) spread throughout the used coolant. As a result, the amount of dissolved oxygen in the used coolant L in the liquid storage tank 10 can be increased, and the growth of anaerobic bacteria can be more effectively suppressed.

In addition, since the used coolant L sucked from the liquid storage tank 10 is supplied to the liquid aspirator 80, and the used coolant L stored in the liquid storage tank 10 is recovered by the suction action of the liquid aspirator 80 The surface portion of L, therefore, a special power source for this recovery can be omitted, and the device structure can be simplified. In addition, since a part of the used cooling liquid L sucked from the liquid storage tank 10 for supplying to the foam generator 40 is used as the used cooling liquid L supplied to the liquid absorber 80, it is possible to Further simplify the device structure.

In each of the purification devices described above, the foam generator 20 (40) has a structure using the SPG unit 210 obtained by molding a Shirasu porous glass (SPG) membrane into a cylindrical shape. There are no particular limitations on the structure in which the used coolant L in a gaseous state is decompressed, or the structure capable of generating fine foams such as microfoam or micronanofoam.

A purification device according to a seventh embodiment of the present invention is configured as shown in FIG. 11 . The purification device is characterized in that a foam-containing treatment liquid diffusion unit 100 is provided in the liquid storage tank 10, and the foam-containing treatment liquid diffusion unit 100 directs the used cooling liquid L containing foam to be stored in the liquid storage tank 10 for use. Diffusion in the passing coolant.

In FIG. 11 , the purification device is the same as the purification devices in the above-mentioned embodiments. The used coolant L from the processing machine is stored in the liquid storage tank 10 through the introduction pipe 11, and the purified liquid in the liquid storage tank 10 The used coolant L can be returned to the processing machine through the delivery pipe 12 . In this purification device, the suction pipe 43a with the coarse filter 42 at the front end is connected to the input port of the air-driven pump 41, and the operation of the air-driven pump 41 is used to suck the inside of the liquid storage tank 10 from the coarse filter 42 Excessive coolant L. The gas delivery pipe 45 extending from the air cylinder 44 and provided with the on-off valve 46 is branched into a first gas delivery pipe 47a and a second gas delivery pipe 47b. The first gas delivery pipe 47a is connected to the suction pipe 43a extending from the liquid storage tank 10, and the first gas delivery pipe 47a is provided with a flow regulator 48a and a throttle valve 49a. Moreover, the air drive pump 41 is connected to the 2nd gas delivery pipe 47b, and the flow rate regulator 48b and the throttle valve 49b are provided in this 2nd gas delivery pipe 47b. The air-driven pump 41 is driven by the ejection force of the air that flows from the air cylinder 44 through the air delivery pipe 45 and the second air delivery pipe 47b, and the flow rate is regulated by the flow regulator 48b, and the flow rate is adjusted by the throttle valve. 49b is air in a throttled state.

A foam-containing treatment liquid diffusion unit 100 is provided in the liquid storage tank 10 . The foam-containing treatment liquid diffusion unit 100 has: a treatment liquid discharge body 101 formed of a flexible resin cylinder, a foam generating part main body 102 combined with one end of the treatment liquid discharge body 101, and a treatment liquid discharge body. The other end of 101 is a closed plug body 103 . Many (multiple) microscopic holes are formed on the peripheral wall of the treatment liquid discharge body 101 (cylinder body) over the entire range. The foam-containing treatment liquid diffusion unit 100 integrally constituted by the treatment liquid ejection body 101, the foam generating part main body 102, and the plug body 103 is positioned at a predetermined distance from the bottom surface of the liquid storage tank 10 by unillustrated supports supporting both ends thereof. The height position is set to extend approximately parallel to the bottom surface.

The liquid delivery pipe 43b extending from the output port of the above-mentioned air-driven pump 41 is connected to the foam generating part main body 102 of the foam-containing treatment liquid diffusion unit 100 . The foam generating part main body 102 is internally formed with a plurality of orifices, before and after the plurality of orifices, pressure release of the supplied fluid is realized.

In this purification device, when the air-driven pump 41 is operated by the ejection force of the air supplied from the air cylinder 44 through the air delivery pipe 45 and the second air delivery pipe 47b, the used liquid stored in the liquid storage tank 10 is The coolant is sucked up from the coarse filter 42 and sucked to the air-driven pump 41 through the suction pipe 43a. In this process, the air supplied from the air cylinder 44 through the air delivery pipe 45 and the first air delivery pipe 47a is mixed with the used coolant L passing through the suction pipe 43a. The air-driven pump 41 pressurizes the used coolant L mixed with air sucked through the suction pipe 43a and sends it out to the liquid delivery pipe 43b. Thus, the used cooling liquid L mixed with air is pressure-fed to the foam generating part main body 102 of the foam-containing treatment liquid diffusion unit 100 through the liquid delivery pipe 43b.

In the process of pressure-feeding the used cooling liquid L mixed with air along the liquid delivery pipe 43b, the air is dissolved in the used cooling liquid L by its pressurizing action, so that the dissolved air concentration is high. The used cooling liquid L is supplied to the foam generating part main body 102 . In the foam generating part main body 102, the used coolant L in a state with a higher dissolved concentration of air is released from pressure when passing through a plurality of orifices, so that the dissolved air acts as tiny foams (for example, micro foams, micro-nano foam, etc.) and become exposed. The foam-containing used cooling liquid L generated by the generation of such fine foam is sequentially sent from the foam generating part main body 102 to the treatment liquid ejection body 101 . Moreover, the used cooling liquid L containing foam is dispersed into the liquid storage tank 10 as shown by the dotted line arrows in FIG. Spray out of the used coolant L.

In this way, since the used cooling liquid L containing tiny bubbles is dispersed from the treatment liquid ejector 101 of the foam-containing treatment liquid diffusion unit 100 provided along the bottom surface of the liquid storage tank 10, it is cooled into the used cooling liquid L in the liquid storage tank 10. The liquid L is sprayed out, so the tiny bubbles spread over a relatively wide range of the used coolant L in the liquid storage tank 10, and the residence of the tiny bubbles in the used coolant L can be maintained for a long time. time. As a result, the amount of dissolved oxygen in the used coolant L in the liquid storage tank 10 can be increased, and the growth of anaerobic bacteria can be more effectively suppressed. In addition, in order to spread the fine bubbles over a relatively wide range of the used cooling liquid L of the liquid storage tank 10, it is preferable to set the length of the treatment liquid ejection body 101 such that one end and the other end are respectively The degree of proximity to one corner of the reservoir 10 and the corner at the other end.

In addition, since the treatment liquid discharge body 101 (tube body) having many minute holes formed on the peripheral wall is made of flexible resin, it can be arranged in a meandering manner along the bottom surface of the liquid storage tank 10 . In this way, by arranging the processing liquid ejection body 101 in a zigzag manner, the used cooling liquid L containing fine bubbles can be dispersed and ejected from a wider area in the liquid storage tank 10 . In this case, the microfoam can be spread over a wider range of the used coolant L of the liquid storage tank 10 .

In addition, in the above-mentioned purification device, the air cylinder 44, the gas delivery pipe 45, the first gas delivery pipe 47a, the air-driven pump 41, the liquid delivery pipe 43b and the foam generation part main body 102 constitute a foam generating mechanism, and the air cylinder 44 And the suction pipe 43a constitutes a processing liquid supply means for supplying the used cooling liquid L to the foam generating means. With this structure, since the air-driven pump 41 can be utilized for the suction of the used cooling liquid L from the liquid storage tank 10 (function as a processing liquid supply mechanism) and the use of the used cooling liquid L mixed with air to Since both the pressure feeding (function as a foam generating mechanism) of the foam generating part main body 102 can be configured relatively simply.

Claims (13)

1. purifier, the used treatment fluid that it is used for purifying processing equipment is characterized in that, said purifier has:

Reservoir, this reservoir are used for storing the used treatment fluid of said processing equipment;

Foam produces mechanism, and this foam generation mechanism makes in the used treatment fluid that is supplied to and produces foam, thereby generates the used treatment fluid that contains foam;

Treatment fluid feed mechanism, this treatment fluid feed mechanism aspirate the used treatment fluid in the said reservoir and should used treatment fluid be supplied to said foam generation mechanism;

Supply unit, this supply unit will produce the used treatment fluid that contains foam that generates in the mechanism to said reservoir channeling conduct at said foam, and this used treatment fluid that contains foam is supplied to this reservoir; And

Treatment fluid cycling mechanism, this treatment fluid cycling mechanism aspirate the used treatment fluid in the said reservoir and make it be back to this reservoir.

2. purifier according to claim 1, wherein,

The mechanism from said reservoir aspirates said used treatment fluid from said reservoir aspirates mechanism and the said treatment fluid cycling mechanism of said used treatment fluid in the said treatment fluid feed mechanism is shared.

3. purifier according to claim 1, wherein,

The used treatment fluid that contains foam from said supply unit is supplied with in utilizing position that said treatment fluid cycling mechanism aspirates used treatment fluid and utilizing said treatment fluid cycling mechanism to make the orientation of the position that used treatment fluid returns in said reservoir between these two positions.

4. purifier according to claim 3, wherein,

Said supply unit has the many supply pipes that the used treatment fluid that contains foam is supplied with to said reservoir.

5. purifier according to claim 1, wherein,

The mechanism from said reservoir aspirates said used treatment fluid in the said treatment fluid feed mechanism has by the power-actuated pump of the injection of gas.

6. purifier according to claim 5, wherein,

Said foam produces mechanism to have:

Foam generation portion main body, said used treatment fluid is supplied to this foam generation portion main body from said treatment fluid feed mechanism; And

Gas supply mechanism, this gas supply mechanism be to said foam generation portion main body supply gas,

Said foam generation portion main body makes and produces the foam that is formed by the said gas that is supplied in the said used treatment fluid that is supplied to,

Said pump with said foam produce said gas supply mechanism in the mechanism towards the part of said foam generation portion main body gas supplied as power source.

7. purifier according to claim 1, wherein,

Said purifier has the treatment fluid recovering mechanism, and this treatment fluid recovering mechanism reclaims the surface portion of the used treatment fluid of storing in the said reservoir.

8. purifier according to claim 7, wherein,

Said purifier has the treatment fluid filter mechanism, and this treatment fluid filter mechanism filters the used treatment fluid that is reclaimed by said treatment fluid recovering mechanism and makes it be back to said reservoir.

9. purifier according to claim 7, wherein,

Said treatment fluid recovering mechanism has:

Floating portion is on the used treatment fluid that this floating floats on said reservoir;

The suction oral area, this suction oral area is supported on said floating portion with near the mode that is disposed at the said surface portion in the said used treatment fluid, and should aspirate the surface portion opening of oral area towards this used treatment fluid; And

Aspirating mechanism, this aspirating mechanism aspirate the surface portion of said used treatment fluid from said suction oral area.

10. purifier according to claim 9, wherein,

Said aspirating mechanism has the suction pump that the jet power that utilizes gas drives.

11. purifier according to claim 9, wherein,

Said aspirating mechanism has:

Aspirate the used treatment fluid in the said reservoir and make it be back to the mechanism of this reservoir; And

Aspirator; This aspirator utilizes this decompression state the surface portion of said used treatment fluid to be introduced into the flow of said used treatment fluid from said suction oral area through being produced decompression state from the flowing of used treatment fluid of this reservoir suction till turning back to this reservoir.

12. purifier according to claim 11, wherein,

Aspirate the used treatment fluid in the said reservoir and make its mechanism that is back to this reservoir have the pipe arrangement path, this pipe arrangement path makes by said treatment fluid feed mechanism and is back to this reservoir from the part of the used treatment fluid of said reservoir suction.

13. according to each the described purifier in the claim 1 to 12, wherein,

Said purifier makes said used treatment fluid produce between mechanism and the said reservoir at said foam and circulates.

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