CN102528183A - Columnar body and its forming device and forming method - Google Patents

Abstract

The present invention relates to a columnar body and its forming device and forming method. The forming device comprises a tank body, a holding unit, a rotating unit and a power supply unit. The tank body has an electrolyte and an electrode. The electrode is located in the electrolyte. The holding unit holds a processing section of a substrate in the tank body and is adjacent to the electrode. The rotating unit rotates the holding unit to rotate the substrate. The power supply unit couples the electrode and the substrate to provide a power supply, thereby rotating the substrate and providing power to the electrode and the substrate. The substrate is subjected to an electrolytic processing, so that the substrate can be formed into a columnar body, and the processing section of the substrate is formed into a thin-diameter portion. The overall structure of the columnar body is integrally formed. Since the forming device and method of the present invention are simple, the structure of the forming device can be simplified, and the device precision requirements, setting costs and manufacturing time can be reduced. Moreover, the columnar body is integrally formed so that its mechanical properties can be improved.

Description

Columnar body and its forming device and forming method

technical field

The invention relates to a forming device and a forming method thereof, in particular to a columnar body forming device and a forming method thereof which can reduce device precision and installation cost.

Background technique

Nowadays, with the rapid development of science and technology, many electronic products have been developed, which bring a lot of convenience to the people. Therefore, many electronic devices have become indispensable daily life equipment for the people, such as mobile phones, personal computers and televisions. From the beginning of production to the delivery of electronic devices to the market, many test levels must be passed to test whether the manufactured electronic products are good products. Today's electronic devices are all controlled by chips, so chips are the core components of electronic devices, and chip testing is therefore an important part.

The process of testing chips includes wafer testing, and chip testing probes must be used during wafer testing. After the wafer is manufactured (Wafer Fabrication), but before it is packaged, the probes are used to contact the contacts on the chip or the internal circuit of the chip, so as to directly input signals to the chip or detect the output value for testing and distinguishing The dies on the outgoing wafer are good or bad. In addition, during the packaging operation, a metal wire pull test is carried out, which uses the hook-shaped needle tip of the probe to hook the metal wire and applies an upward pulling force to test whether the metal wire is easy to fall off, which is applied to online reliability testing. . Because the contacts on the chip or wafer and the guiding circuit of the packaging operation are very fine, so that the above-mentioned electrical test must be carried out with a thin needle-shaped probe, so it is often easy to cause the probe to be damaged due to improper operation during the test. The breakage caused the test to be stopped and replaced, so the probe was greatly worn out. In addition, since the probes are not easy to form and produce, a lot of equipment costs are incurred.

Currently, there are various devices and methods for manufacturing rod-shaped probes, but these devices and methods are not perfect at present, and the following will describe these existing methods. China Taiwan Announcement No. I239401 Invention Patent, which is "A Novel Probe Forming Method for Wafer or Chip Testing", which uses a high-frequency heating method to make the 0.1mm wire rapidly reach the temperature suitable for red heat, and then wire cut Cutting the wire, the cut wire diameter is a straight probe base material, and the base material is formed into a needle-point shape by an electrolytic treatment method, and then the sharp point is formed into a ball shape by electric discharge machining. And the part below the needle point is subjected to electroplating treatment, so as to facilitate laser welding on the holding part to form a test probe that can be held on the machine part.

However, the above-mentioned existing method is to separately manufacture and shape the needle tip part and the holding part of the probe, and then weld them into one body. Such a welding process will increase the resistance of the joint interface between the needle tip part and the holding part. value and reduce the mechanical strength of the probe, so it will reduce the reliability of the probe for electrical testing, and it is easy to break and damage. In addition, the manufacturing process is long and complicated, so the production cost and man-hours are increased and the production efficiency is reduced, which in turn leads to probes. Needles are expensive. In addition, due to the small diameter of the needle tip, it is not easy to be correctly aligned and welded to the predetermined position of the holder. Therefore, the positions where the needle tip of each probe is welded to the holder cannot be fixed and the same, so that these probes are clamped. When testing with needles, it is difficult for the tip of the probe to accurately align with the circuit on the wafer or chip, thus reducing the testing efficiency and accuracy.

China Taiwan Announcement No. I225921 Invention Patent "Probe Forming Method for Wafer or Chip Testing", this invention is to improve the single molding method of the above-mentioned Taiwan No. I239401 Invention Patent, because the processing method production speed is relatively slow, so it has not been granted The shortcomings of mass production, so the I225921 invention patent is still based on the I239401 invention patent, and the wire heating method is changed to use the resistance of the wire itself as the conductive heating structure, and wire cutting is used as an auxiliary, and the clamping device clamps most A wire is subjected to electrolytic processing, and a cathode metal plate for electrolysis is provided on the bottom end surface of the electrolytic cell for electrolytic processing of the tip of the probe. Although the I225921 invention patent further improves part of its manufacturing process on the basis of the previous I239401 invention patent, so that it can be mass-produced to make probes, but its manufacturing procedures are still the same as the previous I239401 invention patent, such as the need to weld the tip of the needle and hold it Therefore, it still has the disadvantages of the previous I239401 invention patent during manufacture, such as reducing the reliability of the probe electrical test, easy to break and damage, increasing production costs and man-hours, reducing production efficiency and welding the tip of each probe to the handle. The position of holder cannot all be fixed and other shortcomings.

China Taiwan Announcement No. I292479 Invention Patent "Circuit Test Probe Forming Device", this invention is to improve the mechanical single grinding and forming method, because the manufacture of the grinding method is time-consuming, and as the diameter of the probe is becoming smaller, it is difficult to use the grinding method to process high. The invention patent No. I292479 uses electrolytic machining to process probes. The device is equipped with a cathode plate at the bottom of the electrolytic cell, and at the same time uses a clamp to clamp and fix multiple probes to be processed, and uses a linear actuation structure to drive the clamp. Up and down movement is made to soak the probe processing section in the electrolyte by using the principle of electrolysis, and the processing voltage is adjusted, and the fixture is moved to form the tip of the probe into a tip. However, the probe molding process method is still the same as the above two invention patents, the needle tip of the probe and the holding part are separately manufactured and molded, and then welded into one, so it also has the disadvantages of the above two invention patents. Moreover, the processing device also needs to be equipped with a precise linear actuator structure and driving device, a vertical displacement control device, and a complex modulation processing voltage adjustment device, which will increase the installation cost of the device, and the processing process is time-consuming and cumbersome.

China Taiwan Publication No. 200946283 Invention Patent Application "Microprobe Automatic Continuous Grinding Machine", this invention is to solve the problem that the traditional mechanical grinding probe can only grind one at a time, and the grinding operation cannot be continuous, and the electrolytic processing method It takes a long time, so the processing speed is greatly limited, so an automatic continuous grinding machine is proposed to process multiple probes at the same time, and the conveying operation and grinding operation are continuously and synchronously completed. However, the mechanical grinding method of this invention patent application can only process probe substrates with the same diameter, so it is still necessary to carry out the processing steps of welding the needle tip of the probe and the holding part, and the accuracy of the needle tip is limited, so the invention The patent application still has the disadvantages of the above three invention patents. In addition, the processing method uses mechanical force to sharpen the end of the probe substrate, so the probe substrate needs to have a certain strength, so that the diameter of the probe is limited to a certain extent, and a probe with a high diameter-to-length ratio is required. Needle processing has a certain degree of difficulty.

From the above description of the existing device and method for forming probes, several disadvantages can be known, mainly in that the needle tip of the probe and the holding part must be separately manufactured and molded in the above methods, and then processed into one, which will reduce the cost of the probe. The reliability of the electrical test of the probe is easy to be broken and damaged, which increases the production cost and man-hours, reduces the production efficiency, and has disadvantages such as poor probe shape accuracy, and the processing process of the above-mentioned forming device and method is long and complicated, so the device requires high precision. However, the cost is increased, and probes with a high diameter-to-length ratio cannot be manufactured.

Therefore, the present invention proposes a columnar body and its molding device and its molding method in response to the above problems, which can not only improve the above existing shortcomings, but also simplify the processing device, reduce the accuracy requirements of the device and the installation cost, so as to solve the above problems .

Contents of the invention

One of the objectives of the present invention is to provide a columnar body molding device and its molding method, which rotates the base material and performs electrolytic processing on the base material, so that the base material can be integrally formed into a columnar body, and achieve The purpose of simplifying the processing device and processing steps, reducing the processing time and setting cost, increasing the shape accuracy of the probe, and being able to manufacture a high-diameter-length ratio probe.

One of the objectives of the present invention is to provide a columnar body in which the handle portion, the thin diameter portion and the needle tip are integrally formed, so that the mechanical properties such as electrical conductivity and strength of the probe can be improved.

Technical solution of the present invention: a forming device of a columnar body, which includes:

A tank body has an electrolyte and an electrode, and the electrode is located in the electrolyte;

a holding unit, holding a processing section of a substrate in the tank and adjacent to the electrode;

a rotating unit, rotating the holding unit to rotate the substrate; and

a power supply unit, the two poles of which are respectively connected to the electrode and the substrate;

Wherein, the rotation unit rotates the base material, the power supply unit supplies a power to the electrode and the base material, and performs an electrolytic machining on the base material, so that the base material is formed into a columnar body, and the The processing section is shaped as a small diameter portion.

In the present invention, the cell body further includes an electrolyte inlet and an electrolyte outlet, the electrolyte flows into the cell through the electrolyte inlet, and flows out of the cell through the electrolyte outlet to take away A plurality of air bubbles generated by this electrolytic machining.

In the present invention, the flow direction of the electrolytic solution flowing out of the cell body is the same as the upward movement direction of the bubbles.

The present invention further includes:

A magnetic component includes a magnetic field for generating a traction force on the dissociated ions on the surface of the substrate to separate from the surface of the substrate.

In the present invention, the electrode includes at least one protruding portion, and when the substrate is subjected to the electrolytic machining, the protruding portion of the electrode further shapes the end of the thin-diameter portion into a needle point.

In the present invention, a non-processed section of the base material is a handle portion, the thin diameter portion is located below the handle portion, the handle portion, the thin diameter portion and the needle tip are integrally formed, the thin diameter portion It has a uniform diameter, and the thin diameter part is located in the axial center direction of the handle part.

The present invention also discloses a method for forming a columnar body, which includes:

providing a tank, the tank has an electrolyte and an electrode, the electrode is located in the electrolyte;

holding a processing section of a substrate in the tank adjacent to the electrode;

coupling two poles of a power supply unit to the electrode and the substrate to supply a power supply to the electrode and the substrate;

rotating the substrate; and

An electrolytic machining is performed on the base material to form the base material into a columnar body, and the processed section of the base material is formed into a thin-diameter portion.

In the present invention, the electrode includes at least one protruding portion, and when the substrate is subjected to the electrolytic machining, the protruding portion of the electrode further shapes the end of the thin-diameter portion into a needle point.

In the present invention, a non-processed section of the base material is a handle portion, the thin diameter portion is located below the handle portion, the handle portion, the thin diameter portion and the needle tip are integrally formed, the thin diameter portion It has a uniform diameter, and the thin diameter part is located in the axial center direction of the handle part.

The invention also discloses a columnar body, which is a probe, which includes:

a handle;

a thin portion with a uniform diameter, located below the handle portion, and located in the direction of the shaft center of the handle portion; and

a needle tip portion located at the end of the thin diameter portion;

Wherein, the handle portion, the narrow portion and the needle tip are integrally formed, and the diameters of the handle portion, the narrow portion and the needle tip are sequentially reduced.

The beneficial effect of the present invention: the forming device and forming method of the columnar body described in the present invention uses the power supply unit to supply power to the electrode and the base material, and electrolytically processes the base material so that the base material is formed into a columnar body , and shape the processed section of the base material into a small-diameter section. The forming device and forming method of the present invention are simple, so the purpose of simplifying the structure of the device, reducing the accuracy requirement of the device, setting cost and processing time can be achieved, and the columnar body with high diameter-to-length ratio can be processed and the processing accuracy can be improved.

In addition, the columnar body of the present invention includes a handle part, a thin diameter part with a uniform diameter and a needle tip part, the thin diameter part is located below the handle part, and is located in the direction of the shaft center of the handle part, and the needle tip part is located at the center of the handle part. The end of the diameter part, and the handle part, the thin diameter part and the needle tip part are integrally formed, so that the mechanical properties of the columnar body can be improved, and the use efficiency of the columnar body can be improved.

Description of drawings

Fig. 1 is the three-dimensional schematic view of a preferred embodiment of the cylindrical body forming device of the present invention;

Fig. 2 is a cross-sectional view of a preferred embodiment of the columnar body forming device of the present invention;

Fig. 3 is a cross-sectional view of another preferred embodiment of the columnar body forming device of the present invention;

Fig. 4 is a cross-sectional view of another preferred embodiment of the columnar body forming device of the present invention;

Figure 5 is a perspective view of a preferred embodiment of the columnar body of the present invention; and

Fig. 6 is a perspective view of another preferred embodiment of the columnar body of the present invention.

[Description of drawing number comparison]

1 tank body 3 holding unit

4 tank body 5 rotating unit

6 power supply unit 7 poles

8 Electrolyte 9 Substrate

10 Bubbles 12 Electrolyte inlet

14 Electrolyte outlet 21 Control circuit

31 Base 33 Holder

42 Electrolyte inlet 44 Electrolyte outlet

71 protruding part 90 thin diameter part

91 Needle Point 92 Handle

93 needle tip 100 magnetic assembly

Detailed ways

In order to have a further understanding and understanding of the structural features of the present invention and the achieved effects, the preferred embodiments and accompanying drawings are used for a detailed description, as follows:

Please refer to FIG. 1 and FIG. 2 , which are schematic perspective views and cross-sectional views of a preferred embodiment of the columnar body forming device of the present invention. As shown in the figure, the cylindrical body forming device of the present invention includes a tank body 1, a holding unit 3, a rotating unit 5 and a power supply unit 6. The electrodes 7 and the electrolyte 8 are located in the tank body 1, and the tank body 1 is further A substrate 9 to be processed is placed. Both the electrode 7 and the base material 9 are immersed in the electrolyte solution 8, but the base material 9 is not located in the electrolyte solution 8 as a whole, but only a processing segment to be electrolytically processed is located in the electrolyte solution 8, and the cross-sectional shape of the base material 9 is a round or non-round. The holding unit 3 is used to hold the substrate 9 so that the processed section of the substrate 9 is located in the tank 1 , and is also used to hold the electrode 7 in the tank 1 . The sidewall of the substrate 9 is adjacent to the electrode 7 . In an embodiment of the present invention, the holding unit 3 further includes a base 31 and a plurality of holders 33, the base material 9 passes through the perforation of the base 31 and the base material 9 is held by the holders 33, so that the base material 9 It is not easy to move during processing. The above-mentioned holding unit 3 is only an embodiment of the present invention, and its holding method will be different according to the processing requirements. This embodiment does not limit the holding unit 3 of the present invention to this only.

Referring back to FIG. 1 and FIG. 2 , the rotating unit 5 is used to drive the holding unit 3 to rotate, thereby rotating the substrate 9 . In an embodiment of the present invention, the rotating unit 5 is a rotating motor. The negative pole of the power supply unit 6 is connected to the electrode 7 , and the anode is connected to the substrate 9 to supply power to the electrode 7 and the substrate 9 , so as to perform electrolytic machining on the sidewall of the substrate 9 . When the substrate 9 is electrolytically processed, the rotating unit 5 will drive the substrate 9 to rotate, so that the side wall of the processing section of the substrate 9 adjacent to the electrode 7 will be gradually electrolyzed, so that the substrate 9 is formed into a columnar body, and The processed section in the electrolytic solution 8 becomes uniform in diameter, and is formed into a thin diameter portion 90 . In this embodiment, the end of the narrow portion 90 can be further formed into a needle point, which is a needle point portion 91 . In addition, the base material 9 is held by the holding unit 3 and is not located in the unprocessed section of the electrolytic solution 8, that is, the original size is maintained to serve as the handle portion 92. Therefore, the base material 9 can be integrally formed by the molding device of the present invention. Columnar body, and the end of the columnar body can be formed into a needle-point shape, so that the purpose of integral molding can be achieved.

In this embodiment, the whole electrode 7 of the present invention is not the same size, because the end of the columnar body needs to be formed into a needle point 91, so the bottom of the electrode 7 has a protruding portion 71, so as to be closer to the bottom end of the substrate 9 , when electrolytic machining is performed in this way, the protruding portion 71 of the electrode 7 will electrolytically remove the bottom end sidewall of the substrate 9 deeply, and at the same time the substrate 9 will be rotated, so the needle tip portion 91 will be formed. It can be seen that the shape of the electrode 7 of the present invention will be different according to the shapes of the thin diameter portion 90 and the needle tip portion 91 to be formed. In addition, the forming device of the present invention is not limited to only forming the tip portion 91 at the bottom of the columnar body, but to make a probe, which can form any shape of columnar body, and only need to change the geometric shape of the electrode 7 to form the desired shape. columnar body.

As can be seen from the above description, the present invention uses chemical electrolytic machining to form an integrally formed columnar body as shown in Figure 5, which can be used as a probe, and its thin diameter part 90, needle tip part 91 and handle part 92 are integrated Therefore, unlike the prior art, the small diameter part 90, the needle tip part 91 and the handle part 92 of the probe must be processed in sections. Therefore, the present invention can reduce welding processing steps and processing time, thereby reducing the defective rate of processing and manufacturing, and At the same time, it can increase production efficiency. In addition, the method can form a columnar body with a high diameter-to-length ratio, and at the same time increase the shape accuracy of the columnar body. In addition, due to the simplification of the processing steps, the processing device is thus simplified, and the requirements for device accuracy and installation costs are reduced, making the manufactured columnar body more competitive.

Referring back to Fig. 1, the front and rear ends of the tank body 1 of the present invention are further provided with an electrolyte inflow port 12 and an electrolyte solution outflow port 14, for allowing the electrolyte solution 8 to flow into the cell body 1 through the electrolyte solution inflow port 12, and The electrolyte solution 8 flows out of the tank body 1 through the outlet 14, so that the electrolyte solution 8 can be flowed and renewed, so as to avoid the continuous use of the reacted electrolyte solution 8 and affect the machining accuracy, and the flowing and renewed electrolyte solution 8 can be further taken away for the electrolytic machining process The resulting bubbles 10. Because the bubbles 10 will rise and gather in the processing section where the base material 9 is located at the liquid level of the electrolyte 8, this will cause the speed of the electrolysis processing section to be accelerated, which is different from the speed of the other electrolysis processing sections, so that it cannot be processed into a predetermined shape. The processing size affects the processing accuracy. In the present invention, by allowing the electrolyte solution 8 to flow into/out of the tank body 1, in addition to renewing the electrolyte solution 8, it can also take away the air bubbles 10 generated during the electrolytic machining process, so that the air bubbles 10 can be prevented from rising and accumulating on the substrate 9, so that the machining accuracy and processing efficiency can be increased. At the same time, the base material 9 will rotate simultaneously during the electrolytic machining process, which can also improve the shape accuracy of the formed columnar body. The electrode 7 of the present invention can be in the form of a non-surrounding substrate 9 to make it easier for the electrolyte 8 to renew and take away the air bubbles 10 .

In addition, an electrolyte storage tank (not shown) is externally connected to the electrolyte inlet 12 to transmit the electrolyte to the tank body 1, and a filter unit (not shown) is externally connected to the electrolyte outlet 14 to filter the reacted electrolytic solution. The solution 8 is then stored back into the electrolyte storage tank. In addition, as shown in FIG. 2, the columnar body forming device of the present invention further includes a control circuit 21, the control circuit 21 is coupled to the power supply unit 6 to control the power supplied by the power supply unit 6, such as the power transmitted to the electrode 7 and the substrate 9. The size of the current is used to control the speed and precision of electrolytic machining.

Please refer to FIG. 3 , which is a cross-sectional view of another preferred embodiment of the columnar body forming device of the present invention. As shown in the figure, the tank body 4 of this embodiment is different from the tank body 1 of the previous embodiment. The tank body 4 of this embodiment has 6 side walls, and the electrolyte inlet 42 of this embodiment is connected with the electrolyte solution. The setting position of the outflow port 44 is different from that of the previous embodiment. The electrolyte inlet 42 of this embodiment is arranged below the bottom side wall of the tank body 4, and the two electrolyte outlets 44 are respectively arranged on the top of the two opposite side walls of the tank body 4, so the electrolyte solution 8 passes through the electrolyte solution inlet. 42 flows into the tank body 4, and then flows out of the tank body 4 through two electrolyte outlets 44. The location of the electrolyte inlet 42 and the electrolyte outlet 44 in this embodiment is such that the direction in which the electrolyte 8 flows out of the cell body 4 is the same as the upward movement direction of the bubbles 10, so that the flow direction of the electrolyte 8 can follow the direction of the bubbles. 10 will move upwards, so as to improve the efficiency of the electrolytic solution 8 to take away the air bubbles 10, so that the speed at which the air bubbles 10 are taken away from the processing substrate 7 is increased, and the precision of electrolytic machining can be improved. In addition, the electrode 7 of this embodiment is disposed on the top sidewall of the tank body 4 , and the top sidewall of the tank body 4 is provided with holes for the processing section of the substrate 9 to pass through and be located in the tank body 4 .

Please refer to FIG. 4 , which is a cross-sectional view of a third embodiment of the columnar body forming device of the present invention. As shown in the figure, the present invention further includes a magnetic component 100 that includes a magnetic field and is positioned above the substrate 9 . The magnetic component 100 can be disposed on the holding unit 3 or the substrate 9 to be positioned above the substrate 9 . The present invention uses the magnetic field of the magnetic component 100 to generate a Lorentz force (Lorentz force) on the surface dissociated ions of the substrate 9, so as to generate a traction force on the dissociated ions on the surface of the substrate 9, so that the dissociated ions The ions are detached from the surface of the substrate 9 as quickly as possible, and further carried away by the flow of the electrolyte 8, so that the dissociated ions can be prevented from concentrating on the surface of the substrate 9, thereby improving the processing efficiency of electrochemical electrolysis. The magnetic component 100 of the present invention is not limited to be disposed on the holding unit 3 , but can also be disposed at different positions according to different usages.

Please refer to FIG. 5 , which is a perspective view of a preferred embodiment of the columnar body of the present invention. As shown in the figure, the columnar body of this embodiment is a probe, which includes a small diameter portion 90, a needle point portion 91 and a handle portion 92, the needle point portion 91 is located at the end of the small diameter portion 90, and the small diameter portion 90 is located at the handle The portion 92 is below and has a uniform diameter shape, and the diameters of the handle portion, the narrow diameter portion and the needle tip portion decrease in sequence. The handle portion 92 is an unprocessed section of the base material 9 without chemical electrolytic processing, so it is integrally formed with the thin-diameter portion 90 and the needle tip portion 91 formed in the processed section of the base material 9 without welding, so that its Mechanical strength and reduce its resistance, while increasing conductivity. In addition, the small-diameter portion 90 and the tip portion 91 are parts adjacent to the electrode 7, that is, the processing section. Therefore, when using the molding method and molding device of the present invention to perform probe molding processing, the base material 9 does not need to be displaced, only the base needs to be rotated. The material 9 can be used to form the small-diameter portion 90 and the tip portion 91 of the probe, so the shape accuracy of the small-diameter portion 90 and the tip portion 91 of the probe can be improved. In addition, the forming device and the forming method of the present invention are simple, thereby reducing equipment setting costs, reducing processing steps and processing time, reducing the defective rate of the processing process, and increasing production capacity. In addition, since the base material 9 can rotate without displacement during the electrolytic machining process, the thin-diameter portion 90 of the molded probe will be located in the axial center direction of the handle portion 92, so the position of the small-diameter portion 90 is fixed. When the probe of the present invention is used for detection, it can facilitate positioning and improve positioning accuracy.

Please refer to FIG. 6 , which is a perspective view of another preferred embodiment of the columnar body of the present invention. As shown in the figure, the tip portion 93 of the probe of this embodiment can be in the shape of a hook needle for testing the reliability of the metal wire. This type of probe only needs to process the probe in FIG. 5 at a later stage, and bend the tip portion 91 of FIG. 5 upwards to form a hook-like tip portion 93 .

In summary, the forming device of the columnar body of the present invention includes a tank body, a holding unit, a rotating unit and a power supply unit, the electrolyte and electrodes are arranged in the tank body, and the holding unit is used to hold the processing section of the base material in the tank body Adjacent to the electrode, the rotating unit is used to rotate the holding unit to rotate the substrate, and the two poles of the power supply unit are respectively coupled to the electrode and the substrate. In the forming method of the present invention, when the base material is electrolytically processed by the power supply unit to supply power to the electrodes and the base material, the base material is rotated, so that the base material can be easily formed into an integrally formed columnar body, and the base material The processing section is formed into a small diameter section. Because the molding device and molding method of the present invention are simple, the structure of the molding device can be simplified, the precision requirement and installation cost of the device can be reduced, and the defect rate of the columnar body can be reduced to improve the precision, and because the molding time is short, the production efficiency can be improved . In addition, because the overall structure of the columnar body of the present invention is integrally formed, it has good mechanical properties such as strength, electrical conductivity, and heat resistance.

In summary, these are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. All equivalent changes and modifications are made in accordance with the shape, structure, characteristics and spirit described in the scope of the claims of the present invention. , should be included in the scope of the claims of the present invention.

Claims (10)

1. A forming device of a columnar body, characterized in that it comprises: A tank body has an electrolyte and an electrode, and the electrode is located in the electrolyte; a holding unit, holding a processing section of a substrate in the tank and adjacent to the electrode; a rotating unit, rotating the holding unit to rotate the substrate; and a power supply unit, the two poles of which are respectively connected to the electrode and the substrate; Wherein, the rotation unit rotates the base material, the power supply unit supplies a power to the electrode and the base material, and performs an electrolytic machining on the base material, so that the base material is formed into a columnar body, and the The processing section is shaped as a small diameter portion. 2. The cylindrical body forming device according to claim 1, wherein the tank body further comprises an electrolyte inlet and an electrolyte outlet, and the electrolyte flows into the tank through the electrolyte inlet, And flow out of the tank body through the electrolyte outlet, and take away the plurality of air bubbles generated by the electrolytic processing. 3 . The cylindrical body forming device according to claim 1 , wherein the flow direction of the electrolyte out of the tank is the same as the upward movement direction of the bubbles. 4 . 4. The cylindrical body forming device according to claim 1, further comprising: A magnetic component includes a magnetic field for generating a traction force on the dissociated ions on the surface of the substrate to separate from the surface of the substrate. 5. The cylindrical body forming device according to claim 1, wherein the electrode comprises at least one protruding portion, and when the base material is subjected to the electrolytic machining, the protruding portion of the electrode makes the end of the thin diameter portion It is further shaped into a needle point. 6. The cylindrical body forming device according to claim 5, wherein a non-processed section of the base material is a handle portion, the thin diameter portion is located below the handle portion, the handle portion, the handle portion The small-diameter part and the needle tip part are integrally formed, the small-diameter part has a uniform diameter, and the small-diameter part is located in the axis center direction of the handle part. 7. A molding method of a columnar body, characterized in that it comprises: providing a tank, the tank has an electrolyte and an electrode, the electrode is located in the electrolyte; holding a processing section of a substrate in the tank and adjacent to the electrode; coupling two poles of a power unit to the electrode and the substrate to supply a power to the electrode and the substrate; rotating the substrate; and An electrolytic machining is performed on the base material to form the base material into a columnar body, and the processed section of the base material is formed into a thin-diameter portion. 8. The columnar body forming method according to claim 7, wherein the electrode comprises at least one protruding portion, and when the base material is subjected to the electrolytic machining, the protruding portion of the electrode makes the end of the thin diameter portion It is further shaped into a needle point. 9. The columnar body forming method according to claim 7, wherein a non-processed section of the base material is a handle portion, the thin diameter portion is located below the handle portion, the handle portion, the handle portion The small-diameter part and the needle tip part are integrally formed, the small-diameter part has a uniform diameter, and the small-diameter part is located in the axis center direction of the handle part. 10. A columnar body, which is a probe, characterized in that it comprises: a handle; a thin portion with a uniform diameter, located below the handle portion, and located in the direction of the shaft center of the handle portion; and a needle tip portion located at the end of the thin diameter portion; Wherein, the handle portion, the narrow portion and the needle tip are integrally formed, and the diameters of the handle portion, the narrow portion and the needle tip are sequentially reduced.

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