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CN102513899A - Single-direction inclined-shaft profiling precision grinding method of array optical elements of micro circular troughs - Google Patents

Single-direction inclined-shaft profiling precision grinding method of array optical elements of micro circular troughs Download PDF

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CN102513899A
CN102513899A CN201110459923XA CN201110459923A CN102513899A CN 102513899 A CN102513899 A CN 102513899A CN 201110459923X A CN201110459923X A CN 201110459923XA CN 201110459923 A CN201110459923 A CN 201110459923A CN 102513899 A CN102513899 A CN 102513899A
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profiling
grinding
arc groove
emery wheel
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CN102513899B (en
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郭兵
赵清亮
赵毅
张海南
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Harbin Institute of Technology Shenzhen
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Abstract

微圆弧槽阵列光学元件的单方向斜轴仿形精密磨削方法,它涉及一种微圆弧槽阵列光学元件的精密磨削方法。本发明为解决现有的微圆弧槽阵列光学元件磨削方法不同进给方向磨削的微圆弧槽表面粗糙度相差较大以及加工中砂轮易磨损、磨削加工效率低的问题。步骤一、使仿形砂轮旋转轴线与待磨削工件上表面成45度夹角,使仿形砂轮的第一最低点成为磨削中心点;步骤二、使待磨削工件随精密磨床工作台沿X轴反方向进给单方向加工所有阵列的微圆弧槽;步骤三、使砂轮旋转轴线与工件表面所在平面成135度夹角,使砂轮的第二最低点成为磨削中心点,然后按照步骤二所述加工圆弧槽。本发明的精密磨削方法用于加工微圆弧槽阵列光学元件。

Figure 201110459923

The invention discloses a single-direction oblique-axis profiling precision grinding method for a micro-arc groove array optical element, which relates to a precision grinding method for a micro-arc groove array optical element. The invention aims to solve the problems that the surface roughness of the micro-arc grooves ground in different feeding directions by the existing micro-arc groove array optical element grinding method is quite different, the grinding wheel is easy to wear during processing, and the grinding processing efficiency is low. Step 1. Make the rotation axis of the profiling grinding wheel form an angle of 45 degrees with the upper surface of the workpiece to be ground, so that the first lowest point of the profiling grinding wheel becomes the grinding center point; Step 2. Make the workpiece to be ground follow the precision grinding machine table Feed along the X-axis in the opposite direction and process all micro-arc grooves of the array in one direction; Step 3: Make the rotation axis of the grinding wheel form an angle of 135 degrees with the plane where the workpiece surface is located, so that the second lowest point of the grinding wheel becomes the grinding center point, and then Process arc grooves as described in Step 2. The precision grinding method of the invention is used for processing the micro-arc groove array optical element.

Figure 201110459923

Description

微圆弧槽阵列光学元件的单方向斜轴仿形精密磨削方法Single-direction oblique-axis profiling precision grinding method for micro-arc groove array optical elements

技术领域 technical field

本发明涉及一种微圆弧槽阵列光学元件的精密磨削方法。The invention relates to a precision grinding method for micro-arc groove array optical elements.

背景技术 Background technique

微圆弧槽阵列光学元件是制造高能二极管激光发生器、手机高性能背光组件及高端投影仪等产品的关键元件,圆弧形的透镜阵列通过折射作用可对光路进行调整,最终达到准直光路的作用。复制加工技术是制造高性能微圆弧槽阵列光学元件的常用方法,其中具有微圆弧槽阵列表面的模具的精密加工质量对最终的产品性能和成本控制起着决定性的作用。The micro-arc groove array optical element is a key element in the manufacture of high-energy diode laser generators, high-performance backlight components for mobile phones, and high-end projectors. The arc-shaped lens array can adjust the optical path through refraction, and finally achieve a collimated optical path. role. Replication processing technology is a common method for manufacturing high-performance micro-arc groove array optical components, in which the precision machining quality of the mold with micro-arc groove array surface plays a decisive role in the final product performance and cost control.

目前,微圆弧槽阵列光学元件模具采用双方向平行轴仿形磨削方法加工,即加工时仿形砂轮旋转轴与待加工工件表面平行。加工时金刚石砂轮先沿磨粒切削方向进给磨削第一条圆弧槽,第一条圆弧槽磨削完毕后砂轮沿轴向移动到第二条圆弧槽处,再沿磨粒切削反方向磨削第二条圆弧槽,同理依次加工所有的圆弧槽,如图2所示。仿形磨削微圆弧槽阵列时,砂轮旋转轴与待加工表面的平行布置,砂轮上轴向分布的磨粒切削轨迹始终相互平行,导致砂轮上磨粒切削微刃的高低起伏会直接复印到圆弧槽表面,使得加工后的圆弧槽表面磨削痕迹明显,表面粗糙度较高;同时,砂轮始终以最大直径点A为中心对圆弧槽进行磨削加工,砂轮磨损后需马上进行修整才能继续加工。At present, the micro-arc groove array optical element mold is processed by a double-direction parallel axis profiling grinding method, that is, the rotational axis of the profiling grinding wheel is parallel to the surface of the workpiece to be processed during processing. During processing, the diamond grinding wheel first feeds and grinds the first arc groove along the cutting direction of the abrasive grains. After the first arc groove is ground, the grinding wheel moves axially to the second arc groove, and then cuts along the abrasive grains. Grind the second arc groove in the opposite direction, and process all the arc grooves sequentially in the same way, as shown in Figure 2. When profiling the micro-arc groove array, the rotation axis of the grinding wheel is arranged parallel to the surface to be machined, and the cutting tracks of the abrasive grains distributed in the axial direction on the grinding wheel are always parallel to each other, resulting in the ups and downs of the abrasive cutting micro-edges on the grinding wheel will be directly copied to the surface of the arc groove, so that the grinding marks on the surface of the arc groove after processing are obvious, and the surface roughness is high; at the same time, the grinding wheel always grinds the arc groove with the maximum diameter point A as the center. After the grinding wheel is worn, it needs to be immediately Trimming is required to continue processing.

综上,现有的微圆弧槽阵列光学元件磨削方法磨削痕迹明显,表面粗糙度较高,并且不同进给方向磨削的微圆弧槽表面粗糙度相差较大,达到14%~55%;加工中砂轮易磨损,需要进行多次修整,磨削加工效率低。In summary, the existing micro-arc groove array optical element grinding method has obvious grinding marks and high surface roughness, and the surface roughness of the micro-arc grooves ground in different feeding directions varies greatly, reaching 14%~ 55%; the grinding wheel is easy to wear during processing, and needs to be trimmed many times, and the grinding efficiency is low.

发明内容 Contents of the invention

本发明为解决现有的微圆弧槽阵列光学元件磨削方法不同进给方向磨削的微圆弧槽表面粗糙度相差较大以及加工中砂轮易磨损、磨削加工效率低的问题,进而提供了一种微圆弧槽阵列光学元件的单方向斜轴仿形精密磨削方法。The present invention aims to solve the problems that the surface roughness of the micro-arc grooves ground in different feeding directions by the existing micro-arc groove array optical element grinding method is relatively different, the grinding wheel is easy to wear during processing, and the grinding processing efficiency is low, and further A single-direction oblique-axis profiling precision grinding method for micro-arc groove array optical elements is provided.

本发明为解决上述技术问题采取的技术方案是:The technical scheme that the present invention takes for solving the problems of the technologies described above is:

本发明的微圆弧槽阵列光学元件的单方向斜轴仿形精密磨削方法是按照以下步骤实现的:The single-direction oblique-axis profiling precision grinding method of the micro-arc groove array optical element of the present invention is realized according to the following steps:

步骤一、将待磨削工件固定在精密磨床工作台的上端面上,旋转仿形砂轮使仿形砂轮旋转轴线与待磨削工件表面所在平面成45度夹角,使仿形砂轮的第一最低点成为磨削中心点;Step 1. Fix the workpiece to be ground on the upper surface of the precision grinding machine table, rotate the profiling grinding wheel so that the rotation axis of the profiling grinding wheel forms an angle of 45 degrees with the plane of the surface of the workpiece to be ground, so that the first The lowest point becomes the grinding center point;

步骤二、将仿形砂轮调整到第一条待加工圆弧槽初始点,使待磨削工件随精密磨床工作台沿X轴反方向进给,控制仿形砂轮旋转方向逆时针旋转,当加工完第一条待加工圆弧槽后,然后将仿形砂轮沿Y轴方向提起后移回到第一条待加工圆弧槽初始点处,再将仿形砂轮沿Z轴反方向移动到相邻的第二待加工沟槽初始点处,使待磨削工件随精密磨床工作台沿X轴反方向进给,控制仿形砂轮旋转方向逆时针旋转,加工完成第二待加工沟槽,同理依次加工下一条待加工圆弧槽;Step 2. Adjust the profiling grinding wheel to the initial point of the first arc groove to be processed, so that the workpiece to be ground is fed along the X-axis in the opposite direction with the worktable of the precision grinding machine, and the rotation direction of the profiling grinding wheel is controlled to rotate counterclockwise. When processing After finishing the first arc groove to be processed, lift the profiling grinding wheel along the Y axis and move it back to the initial point of the first arc groove to be processed, then move the profiling grinding wheel to the opposite direction along the Z axis. At the initial point of the adjacent second groove to be processed, the workpiece to be ground is fed along the X-axis in the opposite direction with the worktable of the precision grinding machine, and the rotation direction of the profiling grinding wheel is controlled to rotate counterclockwise, and the second groove to be processed is processed. Process the next arc groove to be processed sequentially;

步骤三、当以仿形砂轮上的第一最低点为中心的磨削工作区由于磨损需要修整时,再次旋转仿形砂轮,使砂轮旋转轴线与待磨削工件表面所在平面成135度夹角,使仿形砂轮的第一最低点变为与第一最低点对称的第二最低点成为磨削中心点,然后按照步骤二所述加工圆弧槽,待仿形砂轮上以第二最低点为中心的磨削工作区也因磨损需要修整时,再对仿形砂轮进行修整,仿形砂轮修整后继续按照步骤一~步骤三进行磨削加工直至磨削完全部圆弧槽阵列。Step 3. When the grinding work area centered on the first lowest point on the profiling grinding wheel needs to be trimmed due to wear, rotate the profiling grinding wheel again so that the rotation axis of the grinding wheel forms an included angle of 135 degrees with the plane of the surface of the workpiece to be ground , so that the first lowest point of the profiling grinding wheel becomes the second lowest point symmetrical to the first lowest point as the grinding center point, and then process the arc groove according to step 2, and the second lowest point on the profiling grinding wheel When the grinding work area centered at the center also needs to be trimmed due to wear, the profiling grinding wheel is then trimmed. After the profiling grinding wheel is trimmed, continue to grind according to steps 1 to 3 until the entire array of arc grooves is ground.

本发明具有以下有益效果:本发明的圆弧槽阵列光学元件的单方向斜轴仿形精密磨削方法采用了单方向磨削方法,与现有的微圆弧槽阵列光学元件模具改变往返式的磨削方法相比,保证了每一条圆弧槽都是砂轮在沿磨粒切削方向进给的情况下磨削而成,表面粗糙度降低了10%~15%,大大提高了加工精度;The present invention has the following beneficial effects: the single-direction oblique-axis profiling precision grinding method of the arc groove array optical element of the present invention adopts the single direction grinding method, and changes the reciprocating type from the existing micro-arc groove array optical element mold Compared with the advanced grinding method, it is guaranteed that each arc groove is ground by the grinding wheel feeding along the cutting direction of the abrasive grains, and the surface roughness is reduced by 10% to 15%, which greatly improves the machining accuracy;

本发明的精密磨削方法的砂轮旋转轴与待加工工件表面保持45度夹角,砂轮以B点为中心对圆弧槽进行磨削加工,砂轮磨损后以C点为中心继续对圆弧槽进行磨削加工,待砂轮B点和C点都磨损后再进行修整,一次修整两次磨削,从而减少了微圆弧槽阵列光学元件模具精密磨削过程中的修整次数,磨削加工效率提高了一倍。In the precision grinding method of the present invention, the rotation axis of the grinding wheel maintains an angle of 45 degrees with the surface of the workpiece to be processed, and the grinding wheel grinds the arc groove centered on point B, and continues to grind the arc groove centered on point C after the grinding wheel is worn. Carry out the grinding process, and then trim after the grinding wheel is worn at point B and point C, one trimming and two grindings, thereby reducing the trimming times during the precision grinding process of the micro-arc groove array optical element mold, and the grinding process efficiency doubled.

附图说明 Description of drawings

图1是本发明的微圆弧槽阵列光学元件的单方向斜轴仿形精密磨削方法的原理示意图,图2是现有的微圆弧槽阵列光学元件磨削方法的原理示意图。Fig. 1 is a schematic diagram of the principle of the single-direction oblique-axis profiling precision grinding method of the micro-arc groove array optical element of the present invention, and Fig. 2 is a schematic diagram of the principle of the existing micro-arc groove array optical element grinding method.

具体实施方式 Detailed ways

具体实施方式一:结合图1说明,本实施方式所述的微圆弧槽阵列光学元件的单方向斜轴仿形精密磨削方法是按照以下步骤实现的:Specific embodiment 1: In conjunction with Fig. 1, the single-direction oblique-axis profiling precision grinding method of the micro-arc groove array optical element described in this embodiment is realized according to the following steps:

步骤一、将待磨削工件4固定在精密磨床工作台5的上端面上,旋转仿形砂轮3使仿形砂轮3旋转轴线1与待磨削工件4表面所在平面成45度夹角,使仿形砂轮3的第一最低点B成为磨削中心点;Step 1. Fix the workpiece 4 to be ground on the upper surface of the workbench 5 of the precision grinding machine, and rotate the profiling grinding wheel 3 so that the rotation axis 1 of the profiling grinding wheel 3 forms an angle of 45 degrees with the plane where the surface of the workpiece 4 to be ground is located, so that The first lowest point B of the profiling grinding wheel 3 becomes the grinding center point;

步骤二、将仿形砂轮3调整到第一条待加工圆弧槽初始点,使待磨削工件4随精密磨床工作台5沿X轴反方向进给,控制仿形砂轮3旋转方向逆时针旋转,当加工完第一条待加工圆弧槽后,然后将仿形砂轮3沿Y轴方向提起后移回到第一条待加工圆弧槽初始点处,再将仿形砂轮3沿Z轴反方向移动到相邻的第二待加工沟槽初始点处,使待磨削工件4随精密磨床工作台5沿X轴反方向进给,控制仿形砂轮3旋转方向逆时针旋转,加工完成第二待加工沟槽,同理依次加工下一条待加工圆弧槽;Step 2. Adjust the profiling grinding wheel 3 to the initial point of the first arc groove to be processed, so that the workpiece 4 to be ground is fed in the opposite direction of the X axis along with the precision grinding machine table 5, and the rotation direction of the profiling grinding wheel 3 is controlled counterclockwise Rotate, when the first arc groove to be processed is finished, then the profiling grinding wheel 3 is lifted along the Y axis and moved back to the initial point of the first arc groove to be processed, and then the profiling grinding wheel 3 is moved along the Z axis The axis moves in the opposite direction to the initial point of the adjacent second groove to be processed, so that the workpiece 4 to be ground is fed along the X-axis in the opposite direction with the precision grinding machine table 5, and the rotation direction of the profiling grinding wheel 3 is controlled to rotate counterclockwise. Complete the second groove to be processed, and process the next arc groove to be processed in sequence in the same way;

步骤三、当以仿形砂轮3上的第一最低点B为中心的磨削工作区由于磨损需要修整时,再次旋转仿形砂轮3,使砂轮旋转轴线1与待磨削工件4表面所在平面成135度夹角,使仿形砂轮3的第一最低点B变为与第一最低点B对称的第二最低点C成为磨削中心点,然后按照步骤二所述加工圆弧槽,待仿形砂轮3上以第二最低点C为中心的磨削工作区也因磨损需要修整时,再对仿形砂轮3进行修整,仿形砂轮3修整后继续按照步骤一~步骤三进行磨削加工直至磨削完全部圆弧槽阵列。Step 3. When the grinding work area centered on the first lowest point B on the profiling grinding wheel 3 needs to be trimmed due to wear, the profiling grinding wheel 3 is rotated again so that the axis of rotation of the grinding wheel 1 is in the same plane as the surface of the workpiece 4 to be ground. Form an included angle of 135 degrees, so that the first lowest point B of the profiling grinding wheel 3 becomes the second lowest point C symmetrical to the first lowest point B and becomes the grinding center point, and then process the arc groove according to step 2. When the grinding work area centered on the second lowest point C on the profiling grinding wheel 3 also needs to be trimmed due to wear, the profiling grinding wheel 3 is then trimmed, and after the profiling grinding wheel 3 is trimmed, continue to grind according to steps 1 to 3 Machining until all arc groove arrays are ground.

本发明所述微圆弧槽阵列的圆弧半径为0.1mm~1.5mm,槽深不大于((20.5-1)R/2);The arc radius of the micro-arc groove array of the present invention is 0.1 mm to 1.5 mm, and the groove depth is not greater than ((2 0.5 -1)R/2);

本发明选用的磨具为400#~2000#粒度的树脂结合或金属结合剂金刚石14F1或1FF1型仿形砂轮;The grinding tool used in the present invention is a resin bonded or metal bonded diamond 14F1 or 1FF1 type profiling grinding wheel with a particle size of 400# to 2000#;

本发明所述微圆弧槽阵列光学元件模具材料包括:精密碳化硅陶瓷、精密氮化硅陶瓷和碳化钨硬质合金等。The micro-arc groove array optical element mold material of the present invention includes: precision silicon carbide ceramics, precision silicon nitride ceramics, tungsten carbide hard alloy and the like.

工作原理:working principle:

由于微圆弧槽阵列光学元件模具材料的硬脆性,磨削过程中引起的微裂纹会随磨粒切削方向生长,砂轮沿磨粒切削反方向进给磨削加工时,微裂纹会引入已加工表面,从而导致表面粗糙度增加,不同进给方向磨削的微圆弧槽阵列表面质量不相同,采用单方向磨削方法,避免了微裂纹对已加工表面的破坏,阵列中每条圆弧槽都在相同的磨削情况下加工而成,消除了微圆弧槽阵列表面质量不均一现象,磨削后的相邻两条圆弧槽平均表面粗糙度基本相同(偏差小于10%);Due to the hardness and brittleness of the micro-arc groove array optical element mold material, the micro-cracks caused during the grinding process will grow along with the cutting direction of the abrasive grains. surface, resulting in increased surface roughness, and the surface quality of micro-arc groove arrays ground in different feed directions is not the same. The single-directional grinding method avoids the damage of micro-cracks to the processed surface. Each arc in the array The grooves are all processed under the same grinding conditions, which eliminates the uneven surface quality of the micro-arc groove array, and the average surface roughness of two adjacent arc grooves after grinding is basically the same (the deviation is less than 10%);

本发明采用仿形精密磨削方法,磨削过程中,随砂轮的进给,砂轮轴向分布的磨粒切削轨迹会相互干涉叠加,减小砂轮上磨粒切削微刃的高低起伏对圆弧槽磨削形貌的影响,通过试验后SEM观察,磨削痕迹明显减弱,与现有的加工方法相比,表面粗糙度降低了10%~15%,提高了加工精度;同时,砂轮以B点(C点)为中心对圆弧槽进行磨削加工,砂轮磨损后可以C点(B点)为中心继续对圆弧槽进行磨削加工,待砂轮B点和C点都磨损后在进行修整,一次修整两次磨削,从而减少了微圆弧槽阵列光学元件模具精密磨削过程中的修整次数,加工效率提高了一倍;The invention adopts the profiling precision grinding method. During the grinding process, with the feeding of the grinding wheel, the abrasive grain cutting tracks distributed in the axial direction of the grinding wheel will interfere with each other and superimpose, reducing the impact of the ups and downs of the abrasive grain cutting micro-blade on the grinding wheel on the circular arc. The impact of the groove grinding morphology, through the SEM observation after the test, the grinding marks are significantly weakened, compared with the existing processing method, the surface roughness is reduced by 10% to 15%, and the processing accuracy is improved; at the same time, the grinding wheel is B Point (C) as the center to grind the arc groove. After the grinding wheel is worn, you can continue to grind the arc groove centered at point C (B). After both points B and C of the grinding wheel are worn, proceed Trimming, one trimming and two grindings, thereby reducing the number of trimmings during the precision grinding process of micro-arc groove array optical element molds, and doubling the processing efficiency;

由以上可知,本发明为一种针对微圆弧槽阵列光学元件模具的单方向斜轴仿形精密磨削方法,可消除微圆弧槽阵列表面质量不相同的现象,有效降低磨削后的表面表面粗糙度、改善磨削痕迹、减少砂轮修整次数,获得良好的加工质量和高加工效率。From the above, it can be seen that the present invention is a single-direction oblique-axis profiling precision grinding method for micro-arc groove array optical element molds, which can eliminate the phenomenon that the surface quality of micro-arc groove arrays is not the same, and effectively reduce the surface quality of the micro-arc groove array. Improve surface roughness, improve grinding marks, reduce grinding wheel dressing times, and obtain good processing quality and high processing efficiency.

Claims (1)

1. the folk prescription synclinal axis profiling precise grinding process of a little arc groove array optical element, it is characterized in that: the folk prescription synclinal axis profiling precise grinding process of said little arc groove array optical element is realized according to following steps:
Step 1, workpiece to be ground (4) is fixed on the upper surface of precision grinder workbench (5); Rotation profiling emery wheel (3) makes profiling emery wheel (3) rotation (1) and workpiece to be ground (4) surface belong to the plane in angle of 45 degrees, makes first minimum point (B) of profiling emery wheel (3) become the grinding center point;
Step 2, profiling emery wheel (3) is adjusted to article one arc groove initial point to be processed; Make workpiece to be ground (4) with precision grinder workbench (5) along the feeding in the other direction of X axle; Control profiling emery wheel (3) direction of rotation is rotated counterclockwise; After processing article one arc groove to be processed, then profiling emery wheel (3), Y direction is moved back into article one arc groove initial point to be processed place after mentioning, again profiling emery wheel (3) is moved to the second adjacent groove initial point to be processed place in the other direction along the Z axle; Make workpiece to be ground (4) with precision grinder workbench (5) along the feeding in the other direction of X axle; Control profiling emery wheel (3) direction of rotation is rotated counterclockwise, and machines second groove to be processed, in like manner processes next bar arc groove to be processed successively;
Step 3, when being that the grinding workspace at center is because wearing and tearing when need repairing with first minimum point (B) on the profiling emery wheel (3); Rotate profiling emery wheel (3) once more; Make emery wheel rotation (1) become 135 degree angles with plane, place, workpiece to be ground (4) surface; Second minimum point (C) that first minimum point (B) of profiling emery wheel (3) is become with first minimum point (B) symmetry becomes the grinding center point; Then according to the said processing arc groove of step 2; Treat that it be the grinding workspace at center when also needing finishing because of wearing and tearing that profiling emery wheel (3) is gone up with second minimum point (C), again profiling emery wheel (3) repaired that profiling emery wheel (3) is repaired continued and carried out grinding according to step 1~step 3 and finish whole arc groove arrays until grinding.
CN 201110459923 2011-12-31 2011-12-31 Single-direction inclined-shaft profiling precision grinding method of array optical elements of micro circular troughs Expired - Fee Related CN102513899B (en)

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CN112372379B (en) * 2020-11-12 2022-04-01 中国航发南方工业有限公司 Grinding method for complex curved surface type blade tip for aero-engine
CN113290428A (en) * 2021-06-16 2021-08-24 无锡微研股份有限公司 Blade fixing plate forming process
CN113290428B (en) * 2021-06-16 2023-07-04 无锡微研股份有限公司 Blade fixing plate forming process
CN116038438A (en) * 2023-01-07 2023-05-02 东莞市东佶新材料制带科技有限公司 A High Friction Coefficient Conveying Flat Belt Subsequent Processing Technology

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