A kind of laser indirect impacts soft mode micro-forming method and isolated plant thereof
Technical field
The invention belongs to the manufacturing field, specifically relate to a kind of laser indirect and impact soft mode micro-forming method and isolated plant thereof, be applicable to be difficult to be shaped long-pending shaping of microbody of the complex devices that maybe can't be shaped of conventional method under the minute yardstick.
Background technology
Laser processing technology has solved the limitation of traditional difficult moulding material and micro metal part processing; But directly or indirectly act on the workpiece as the energy with laser and still can bring some defectives to workpiece; As one Chinese patent application number be 01134063.0, name is called " a kind of laser-impact method for precisely forming and device ", utilizes laser directly to impact part to be processed, makes part stress inhomogeneous; Piece surface is produced ablate, surface quality of workpieces is not high.One Chinese patent application number is 200810023264.3, name is called " long-pending manufacturing process of a kind of laser-impact microbody of micro element and device "; Utilize the Laser Driven film flying; Make film flying inherit the energy of laser, thereby avoided laser directly to impact the influence that workpiece brings, but direct impact of film flying belongs to rigid shock; Etching still can take place in piece surface, influences surface quality of workpieces; Simultaneously, the film flying size is bigger than workpiece size, can cause certain damage to mould in the impact process, reduces the intensity and the life-span of mould; And in the rigid shock process, the metal dilution phenomenon is serious, and the part characteristic descends.
Summary of the invention
The objective of the invention is when overcoming existing little shapings of laser-impact soft mode the defective of etching to be arranged and propose a kind of laser indirect to impact soft mode micro-forming method and isolated plant thereof, can reduce metal dilution phenomenon in the punching course, reduce the die surface damage, prolong die life, raising surface quality of workpieces and part characteristic at piece surface.
For realizing above-mentioned purpose; The technical scheme that a kind of laser indirect that the present invention proposes impacts the employing of soft mode micro-forming method is to comprise the steps: 1) send pulse laser by the computer control nanosecond laser; Laser acts on formation system behind two speculums and condenser lens, adjusted the position of formation system simultaneously by the three-dimensional mobile platform of computer control; 2) the optical medium irradiation of laser through formation system is on the film flying upper surface; Cause the ablation of part film flying and produce the HTHP plasma; Plasma continues to absorb laser energy makes plasma expand blast to the splash of film flying direction; Drive the residue film flying and fly behind the segment distance and the collision of elastomeric material soft mode, make elastomeric material soft mode generation deformation; 3) the elastomeric material soft mode is used in the deformation masterpiece on the target workpiece, makes the target workpiece in elastomeric material soft mode and special restriction generation plastic deformation down of putting micro-mould.
The technical scheme that a kind of laser indirect that the present invention proposes impacts the isolated plant employing of the little shaping of soft mode is: be made up of laser loading system, formation system, control system; The laser loading system comprises nanosecond laser, first, second speculum and condenser lens; Formation system comprises sample system, clamp body, three-dimensional mobile platform and L type base; The sample system be arranged on condenser lens under and be placed in the clamp body; The affixed three-dimensional mobile platform of clamp body, three-dimensional mobile platform are placed on the L type base; The control system comprises the laser controller that connects nanosecond laser, three-dimensional mobile platform controller and the computer that connects three-dimensional mobile platform, and the sample system puts mould by optical medium, water or silicone oil, film flying, flight cavity, elastomeric material soft mode, target workpiece and spy and forms; Be that optical medium, flight cavity, target workpiece and spy put mould from top to bottom successively; Film flying is arranged on the inner chamber top of flight cavity; The upper surface of film flying is coated with one deck water or silicone oil and is affixed on the lower surface of optical medium; The elastomeric material soft mode is arranged on to have a segment distance between inner chamber bottom and the film flying of flight cavity and presses close to the upper surface of target workpiece, and target workpiece lower surface is put micro-mould with spy in being fixed on clamp body and contacted.
The present invention adopts the technique effect that produces after the technique scheme to be:
1, use the elastomeric material soft mode to make flexible drift; Avoided directly impacting or striking work caused ablation in surface or etching phenomenon with laser or film flying, simultaneously, elasticity material softer mould and workpiece fit tightly together in the impact process; Make workpiece stressed evenly; And minimum relative slip is only arranged between them,, improved workpiece quality so surface of the work can not abrade; Be applicable to the metal that the drip molding surface quality is had relatively high expectations or the precision form of nonmetal thin plate, also can be used for fields such as micro element manufacturing.
2, use the elastomeric material soft mode to replace film flying to transmit plastic force, workpiece one side is contacted with the elastomeric material soft mode, avoided film flying and mould directly to clash into, prolonged the life-span of mould the damage that mould caused.
3, make the elastomeric material soft mode with polyurethane rubber,, satisfy the various shapings and the quantitative requirement of workpiece, also be applicable to the combination process process, only corresponding counterdie need be set because it has Incoercibility and super-elasticity.
4, elasticity material softer mould and workpiece fit tightly together in the punching course; Minimum relative slip is only arranged; Can increase the radial load of workpiece through the frictional force between control elastomeric material soft mode and the workpiece, make more workpiece material get into die cavity, reduce the dilution phenomenon in the metal punching course; The characteristic that has kept workpiece makes workpiece Accurate Shaping in micro-mould.
Description of drawings
Fig. 1 is the structural representation that a kind of laser indirect of the present invention impacts the soft mode micro-forming device;
Fig. 2 is the structure enlarged diagram of sample system among Fig. 1;
Fig. 3 is the structure enlarged diagram of sample system in impact process of Fig. 2;
Among the figure: 1.L type base; 2. three-dimensional mobile platform; 3. clamp body; 4. sample system; 5. condenser lens; 6. second speculum; 7. first speculum; 8. nanosecond laser; 9. laser controller; 10. three-dimensional mobile platform controller; 11. computer; 12. optical medium; 13. water or silicone oil; 14. film flying; 15. flight cavity; 16. elastomeric material soft mode; 17. target workpiece; 18. the spy puts micro-mould.
The specific embodiment
Specify the specific embodiment of the present invention below in conjunction with accompanying drawing:
Referring to Fig. 1, the isolated plant of the indirect little shaping of laser-impact high molecular polymer of the present invention is made up of laser loading system, formation system, control system.Wherein, The laser loading system comprises nanosecond laser 8, first speculum 7, second speculum 6 and condenser lens 5; Nanosecond laser 8 is equipped with the pilot light system, and its laser that sends changes light path successively and arrives condenser lens 5 after first speculum 7 and 6 reflections of second speculum.Formation system comprises sample system 4, clamp body 3, three-dimensional mobile platform 2 and L type base 1, wherein sample system 4 be arranged on condenser lens 5 under, the laser action after line focus lens 5 focus on is in sample system 4.Sample system 4 is placed in the clamp body 3, clamps and location sample system 4 with clamp body 3, and clamp body 3 is fixed on the three-dimensional mobile platform 2, and three-dimensional mobile platform 2 is placed on the L type base 1.The control system comprises laser controller 9, three-dimensional mobile platform controller 10 and computer 11; Laser controller 9 connects nanosecond laser 8 and computer 11 simultaneously; Computer 11 also connects three-dimensional mobile platform controller 10; Three-dimensional mobile platform controller 10 connects three-dimensional mobile platform 2, controls the displacement that nanosecond laser 8 is sent laser and three-dimensional mobile platform 2 respectively through computer 11.Computer 11 control laser controllers 9, laser controller 9 can be adjusted the pulse laser parameter that nanosecond laser 8 is sent.The pulse laser that nanosecond laser 8 is sent finally is delivered in the sample system 4 via behind first speculum, 7, the second speculums 6 and the condenser lens 5.
Referring to sample system 4 shown in Figure 2, sample system 4 puts mould 18 by optical medium 12, water or silicone oil 13, film flying 14, flight cavity 15, elastomeric material soft mode 16, target workpiece 17 and spy and forms.Sample system 4 is that optical medium 12, flight cavity 15, target workpiece 17 and spy put mould 18 from top to bottom successively.In the inner chamber of flight cavity 15 film flying 14 and elastomeric material soft mode 16; Film flying 14 is arranged on the inner chamber top of flight cavity 15; The upper surface of film flying 14 is attached on the lower surface of optical medium 12 after smearing one deck water or silicone oil 13, and promptly film flying 14 waters or silicone oil 13 stick on optical medium 12 lower surfaces.Elastomeric material soft mode 16 is arranged on the inner chamber bottom of flight cavity 15, and has a segment distance between elastomeric material soft mode 16 and the film flying 14.Elastomeric material soft mode 16 is pressed close to the upper surface of target workpiece 17; Middle very close to each other; Target workpiece 17 lower surfaces are put micro-mould 18 with the spy and are contacted, and the spy puts micro-mould 18 can be provided with difformity or compound die cavity as requested, and the spy puts micro-mould 18 and is fixed in the clamp body 3.
Elastomeric material soft mode 16 adopts polyurethane rubber to process, and also can use elastomers such as other polymer, optimization polyurethane rubber.Film flying 14 is the metal forming plate, adopts the metal foil film material, and the material of optical medium 12 is a K9 glass.The effect of optical medium 12 is dispersing of plasma confinement body and makes its direction high-speed motion towards film flying 14 and target workpiece 17, and simultaneously, the laser of 12 pairs of effects of optical medium on it are transparent, and laser beam does not have obvious energy loss when seeing through optical medium 12.
Referring to Fig. 1-3; The forming process of soft mode micro-forming device of the present invention is following: design the spy according to the forming requirements of the target workpiece 17 of required shaping and put micro-mould 18; By the position of computer 11, make three-dimensional mobile platform 2 reach assigned address through three-dimensional mobile platform 2 adjustment formation systems 4; Send pulse laser by computer 11 control laser controllers 9 with nanosecond laser 8, laser acts on formation system 4 via behind first speculum, 7, the second speculums 6 and the condenser lens 5.Laser at first passes through optical medium 12 irradiation on the upper surface of film flying 14, causes the ablation of part film flying 14, produces the HTHP plasma; At laser pulse width in the time; Plasma continues to absorb laser energy makes the plasma expansion explode, and owing to stopping of optical medium 12, the blast plasma is rapidly to film flying 14 direction splashes; Its recoil active force can form strong shock wave, drives residue film flying 14 at a high speed to 17 flights of target workpiece.Elder generation collides with the elastomeric material soft mode 16 of its underpart behind film flying 14 flights one segment distance, obtains elastomeric material soft mode 16 self-deformation under high speed stamping of kinetic energy, and plastic force is acted on the target workpiece 17 under it.Target workpiece 17 is in elastomeric material soft mode 16 and special restriction generation plastic deformation down of putting micro-mould 18.Elasticity material softer mould 16 fits tightly with target workpiece 17 all the time in the whole process, and distortion back elastomeric material soft mode 16 is full of the die cavity that whole spy puts micro-mould 18 simultaneously with target workpiece 17.