CN102455169B - Zero-position sensor - Google Patents
Zero-position sensor Download PDFInfo
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- CN102455169B CN102455169B CN201010530550.6A CN201010530550A CN102455169B CN 102455169 B CN102455169 B CN 102455169B CN 201010530550 A CN201010530550 A CN 201010530550A CN 102455169 B CN102455169 B CN 102455169B
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Abstract
The invention discloses a zero-position sensor, which comprises a host module (1). The host module (1) comprises a base (11). A laser collimating mirror (16) and a light spot position detecting device (17) are arranged on the base (11). The light spot position detecting device (17) is used for receiving parallel beam reflected by a reflective module (2) installed on a work-piece table (3). The reflective module (2) is used for reflecting laser beam emitted by the laser collimating mirror (16) in parallel. The light spot position detecting device (17) is electrically connected with a printed circuit board (15) for converting an inducted optical signal into an electrical signal. The zero-position sensor disclosed by the invention is applied to a position measurement system and has the advantage of being high in measurement precision.
Description
Technical field
The laser interferometer that the present invention relates to a kind of position measuring system for integrated circuit (IC) etching machine provides the null pick-up of initial position.
Background technology
In the position measuring system of integrated circuit (IC) etching machine, the work stage of litho machine adopts laser interferometer with respect to the position measuring system of base station.Laser interferometer is an incremental measuring system, the accurate measurement of relative displacement can only be provided, therefore, utilize before laser interferometer carries out position measurement, need to provide an initial position for laser interferometer with null pick-up, this position is absolute reference position.When using laser interferometer to carry out displacement measurement, take this absolute reference position is reference point.In prior art, the general position transducer of one dimension that adopts is determined reference point.Tested absolute reference position operated by rotary motion has benchmark object of reference, when position transducer has just touched the benchmark object of reference of tested reference position, will record the data message of reference position.And this data message of position transducer record is owing to not being the center of tested reference position benchmark object of reference, the data message of the absolute reference position that therefore position transducer gathers produces deviation, so that the absolute reference position that position transducer gathers is inaccurate.Particularly when the benchmark object of reference of tested reference position is larger, because the distance at the Yu Qi center, benchmark object of reference edge of tested reference position differs greatly, when position transducer gathers its positional information, the data message of reference point will produce larger deviation.Because the data message of reference point is inaccurate, also can there is deviation in the displacement measurement of laser interferometer, thereby affected the accurate measurement of laser interferometer.
Summary of the invention
Technical matters to be solved by this invention is, overcomes above deficiency, and a kind of null pick-up that can improve measuring accuracy is provided.
In order to solve the problems of the technologies described above, technical scheme of the present invention is: a kind of null pick-up, comprise host module, and described host module comprises pedestal, is provided with laser alignment mirror and facula position detection means on described pedestal; Described facula position detection means receives the parallel beam of the reflecting module reflection being arranged in work stage; The laser beam that described in described reflecting module reflected in parallel, laser alignment mirror sends, described facula position detection means is electrically connected with the printed circuit board (PCB) that the light signal of its induction is transferred to electric signal.
Further, described pedestal comprises base plate and swash plate, and described base plate is provided with bottom outlet, is provided with the first opening and the second opening on described swash plate; The medial surface of described swash plate is provided with facula position detection means, and the center of described the second opening is aimed at the photosensitive region center of described facula position detection means.
Further, described pedestal also comprises adjustable plate, described adjustable plate comprises the free wall that fixed head and one end are fixedly connected with described fixed head, the free end of described free wall is fixed on base plate through bottom outlet and the fixed head of base plate, and the free end of described free wall is fixedly connected with locating piece; Described locating piece is provided with pilot hole, and laser alignment mirror is installed in described pilot hole, and the transmitting terminal of described laser alignment mirror is aimed at the first described opening.
Further, described pedestal also comprises at least one block of side plate, and described side plate is all perpendicular to base plate and the swash plate of described pedestal.
Further, described swash plate medial surface is also provided with locating slot, and the second described opening is arranged on described locating slot, and described facula position detection means is arranged in locating slot.
Further, the lateral surface of described swash plate is also installed with shutter, described shutter is provided with the 3rd opening and the 4th opening, and the center of described the first opening is aimed at the center of the 3rd described opening, and the center of two described openings is aimed at the center of the 4th described opening.
Further, one of them side of described locating piece is provided with a gap with the axial centre line parallel of described pilot hole, and described gap and pilot hole connect.
Further, described facula position detection means is two-dimentional.
Further, described reflecting module comprises that one end is fixed on the base in work stage, and the other end of described base is provided with fixed orifice, and the pyramid mirror of energy reflection of parallel beam is installed in described fixed orifice; Described base end to end is penetrated with the 5th opening and the 6th opening, and the 5th described opening and the 6th opening all connect with described fixed orifice; The laser beam that the 5th described opening can send through described laser alignment mirror, the 6th described opening energy acceptance angle axicon lens reflected in parallel laser alignment mirror sends the laser beam of returning.
Further, the ring flange that described base arranges by end face is fixedly mounted in work stage.
Technique effect of the present invention is: zero-bit of the present invention gathers by facula position detection means the light signal that reflecting module reflects the laser beam of being launched by laser alignment mirror at sensor, then records by printed circuit board (PCB) the data message gathering.Facula position detection means can adopt one dimension or two-dimentional.Its specific works process is as follows: the laser alignment mirror of host module is launched laser beam, laser beam is irradiated to the 5th opening of the base of the reflecting module in work stage through the first opening of pedestal, the parallel beam that pyramid mirror by reflecting module reflects is again through the 6th opening of reflecting module, the second opening on pedestal is irradiated in the facula position detection means on pedestal, in facula position detection means, will gather the facula position of laser beam, now, the printed circuit board (PCB) that connects facula position detection means records the data message that hot spot position detection device gathers, and its light signal is converted to electric signal.The installation site of above-mentioned reflecting module is exactly the benchmark object of reference of absolute reference position, the entrance port that the 5th opening of reflecting module is laser beam, the 5th opening that is to say reflecting module is the center of tested absolute reference position reference object of reference, therefore the positional information that, the null pick-up of this kind of structure gathers is accurately higher compared with the data message of the position transducer collection of prior art.The absolute reference initial position message of the null pick-up collection of this kind of structure can provide an initial position reference point accurately for laser interferometer.
The present invention is owing to adopting facula position detection means and laser alignment mirror, the benchmark object of reference of tested absolute reference position is reflecting module, the 5th opening of reflecting module is again benchmark object of reference center, therefore, at measuring workpieces platform during with respect to base station position initial position message, reduce measuring error, improved measuring accuracy.
When null pick-up of the present invention adopts two-dimentional facula position detection means, facula position detects the positional information that information can gather any two degree of freedom in X, Y, Z, Rx, Ry, Rz, now, the data message of printed circuit board (PCB) record is also two-dimentional, more accurate compared with the data message of a point of independent measurement.In the time need to gathering the positional information of six-freedom degree, adopt three groups of null pick-ups that two dimensional spot position detection device is installed, be arranged on diverse location and just can be carried out the measurement of six-degree of freedom position information.This kind of mode, when measuring six-freedom degree, only installs six position transducers of three groups of null pick-ups rather than prior art, therefore, has reduced alignment error, thereby has improved measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the installation site schematic diagram of null pick-up of the present invention;
Fig. 2 is the unitized construction schematic diagram of the host module of null pick-up of the present invention;
Fig. 3 is the disassemblying structure schematic diagram of null pick-up Fig. 2 of the present invention;
Fig. 4 is the local structure for amplifying schematic diagram of A part in Fig. 3 of null pick-up of the present invention;
Fig. 5 is the unitized construction schematic diagram of another angle of the host module of null pick-up of the present invention;
Fig. 6 is the disassemblying structure schematic diagram of null pick-up Fig. 5 of the present invention;
Fig. 7 is the pedestal bottom plate structural representation of the host module of null pick-up of the present invention;
Fig. 8 is the adjustable plate of null pick-up of the present invention and the package assembly schematic diagram of locating piece;
Fig. 9 is the disassemblying structure schematic diagram of the reflecting module of null pick-up of the present invention;
Figure 10 is the unitized construction schematic diagram of the reflecting module of null pick-up of the present invention;
Figure 11 is the understructure schematic diagram of the reflecting module of null pick-up of the present invention.
Shown in figure: 1, host module, 2, reflecting module, 3, work stage, 11, pedestal, 12, adjustable plate, 13, shutter, 14, locating piece, 15, printed circuit board (PCB), 16, laser alignment mirror, 17, facula position detection means, 21, base, 22, pyramid mirror, 111, base plate, 112, swash plate, 113, side plate, 121, free end, 122 free walls, 123 fixed heads, 131, the 3rd opening, 132, the 4th opening, 141, pilot hole, 142, gap, 161, transmitting terminal, 211, fixed orifice, 212, the 5th opening, 213, ring flange, 214, the 6th opening, 1111, bottom outlet, 1121, the first opening, 1122 second openings, 1123, locating slot.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail:
As shown in Fig. 1-11, null pick-up of the present invention, comprises host module 1, and described host module 1 comprises pedestal 11, is provided with laser alignment mirror 16 and facula position detection means 17 on described pedestal 11; Described facula position detection means 17 receives the parallel beam of reflecting module 2 reflections that are arranged in work stage 3; The laser beam that described in described reflecting module 2 reflected in parallel, laser alignment mirror 16 sends, described facula position detection means 17 is electrically connected with the printed circuit board (PCB) 15 that the light signal of its induction is transferred to electric signal.
As shown in Fig. 2, Fig. 3, Fig. 5, Fig. 6, Fig. 7, Fig. 8, the pedestal 11 of described host module 1 comprises base plate 111 and swash plate 112, and described base plate 111 is provided with bottom outlet 1111, is provided with the first opening 1121 and the second opening 1122 on described swash plate 112; It also comprises adjustable plate 12, described adjustable plate 12 comprises the free wall 122 that fixed head 123 and one end are fixedly connected with described fixed head 123, the free end 121 of described free wall 122 is fixed on base plate 111 through bottom outlet 1111 and the fixed head 123 of base plate 111, and the free end 121 of described free wall 122 is fixedly connected with locating piece 14; Described locating piece 14 is provided with pilot hole 141, in described pilot hole 141, laser alignment mirror 16 is installed, and the transmitting terminal 161 of described laser alignment mirror 16 is aimed at the first described opening 1121; The medial surface of described swash plate 112 is also provided with facula position detection means 17, and the center of described the second opening 1122 is aimed at the photosensitive region center of described facula position detection means 17; Described facula position detection means 17 is electrically connected with the printed circuit board (PCB) 15 that light signal is transferred to electric signal.In Fig. 8, at the faying face of adjustable plate 12 and locating piece 14, be provided with the concavo-convex groove matching and projection by behind adjustable plate 12 and locating piece 14 location, then be fixedly connected with bolt.
As shown in Fig. 2, Fig. 3, Fig. 5, Fig. 6, described pedestal 11 also comprises at least one block of side plate 113, and described side plate 113 is all perpendicular to base plate 111 and the swash plate 112 of described pedestal 11; The base plate 111 of described pedestal 11 and swash plate 112 can be integrated, also can combine; The base plate 111 of described pedestal 11, swash plate 112 and at least one block of side plate 113 can be integrated, also can combine.Adopt integrated mode, can reduce in array mode, alignment error when base plate 111, swash plate 112 or side plate 113 combination, has improved the degree of accuracy of pedestal 11.
As shown in Figure 2 and Figure 3, the lateral surface of described swash plate 112 is also installed with shutter 13, described shutter 13 is provided with the 3rd opening 131 and the 4th opening 132, the center of described the first opening 1121 is aimed at the 3rd described opening 131 center, and the center of two described openings 1122 is aimed at the 4th described opening 132 center.Shutter 13 is selectable unit, the object of shutter 13 is set, be in order to adjust the size of the 3rd opening 131 and the 4th opening 132, so that the laser beam of laser alignment mirror 16 transmittings can pass the first opening 1121 of pedestal 11 smoothly, the 5th opening 212 of the 3rd opening 131 of shutter 13, reflecting module 2 passes the 6th opening 214 of reflecting module 2, the second opening 1122 of the 4th opening 132 of shutter 13, pedestal 1 is radiated in the facula position detection means 17 of pedestal 1 smoothly by the parallel beam of reflection on the pyramid mirror 22 of reflecting module 2.
As shown in Figure 4, one of them side of described locating piece 14 is provided with a gap 142 with the axial centre line parallel of described pilot hole 141, and described gap 142 connects with pilot hole 141.Its advantage is: gap 142 can reinforce the installation of the laser alignment mirror 16 in pilot hole 141, and laser alignment mirror 16 can be securely arranged in the pilot hole 141 of locating piece 14.
Described facula position detection means 17 can be one dimension, can be also two-dimentional.The facula position detection means 17 of employing one dimension can only gather the positional information of the one degree of freedom of tested absolute reference position reference object of reference; Adopt two-dimentional facula position detection means 17, can gather the degree of freedom positional information of the both direction of tested absolute reference position reference object of reference simultaneously.
As shown in Fig. 2, Fig. 3, Fig. 5, Fig. 6, the gradient scope of the free wall 122 of adjustable plate 12 that the gradient of the swash plate 112 of described pedestal 11 matches with it is for being greater than 0 degree, being less than 90 degree or being greater than 90 degree, being less than 180 degree.Specifically add the angle that can select man-hour 15 degree, 30 degree, 45 degree, 60 degree, 75 degree, 105 degree, 120 degree, 135 degree, 150 degree, 165 degree etc. to be convenient to processing.Present embodiment adopts 45 degree, because 45 degree can make the adjusting, easier for installation of adjustable plate 12 and pedestal 11.
As shown in Fig. 9, Figure 10, Figure 11, described reflecting module 2 comprises that one end is fixed on the base 21 in work stage 3, and the other end of described base 21 is provided with fixed orifice 211, and the pyramid mirror 22 of energy reflection of parallel beam is installed in described fixed orifice 211; Described base 21 end to end are also penetrated with the 5th opening 212 and the 6th opening 214, and the 5th described opening 212 and the 6th opening 214 all connect with described fixed orifice 211; The laser beam that the 5th described opening 212 can send through described laser alignment mirror 16, the laser beam that the 6th described opening 214 energy acceptance angle axicon lens 22 reflected in parallel laser alignment mirrors 16 send.In this kind of structure, using reflecting module 2 as benchmark object of reference, the 5th opening 212 is the center of benchmark object of reference, and during measurement, laser beam is transmitted directly in the 5th opening 212, makes the measurement data of this null pick-up more accurate.
As shown in Fig. 9, Figure 10, Figure 11, the ring flange 213 that described base 21 arranges by end face is fixedly mounted in work stage 3.Its advantage is: ring flange 213, can increase the base 21 of reflecting module 2 and the contact area of work stage 3, and what make that pyramid mirror 22 can be more stable is arranged in work stage 3.
As shown in Fig. 3, Fig. 5, Fig. 6, Figure 11, described the first opening 1121, the second opening 1122, the 3rd opening 131, the 4th opening 132, the 5th opening 212, the 6th opening 214 can be manhole, can be also the polygon through holes such as triangle, quadrangle.Present embodiment all adopts manhole, is because circular port manufacture is simple, easy to process.
Zero-bit of the present invention gathers by facula position detection means 17 light signal that reflecting module 2 reflects the laser beam of being launched by laser alignment mirror 16 at sensor, then the data message gathering by printed circuit board (PCB) 15 records.Facula position detection means 17 can adopt one dimension or two-dimentional.Its specific works process is as follows: the laser alignment mirror 16 of host module 1 is launched laser beam, laser beam is irradiated to the 5th opening 212 of the base 21 of the reflecting module 2 in work stage 3 through the first opening 1121 of pedestal 11, the parallel beam that pyramid mirror 22 by reflecting module 2 reflects is again through the 6th opening 214 of reflecting module 2, the second opening 1122 on pedestal 11 is irradiated in the facula position detection means 17 on pedestal 11, in facula position detection means 17, will gather the facula position of laser beam, now, the printed circuit board (PCB) 15 that connects facula position detection means 17 records the data message that hot spot position detection device 17 gathers, and its light signal is converted to electric signal.The installation site of above-mentioned reflecting module 2 is exactly the benchmark object of reference of absolute reference position, the entrance port that the 5th opening 212 of reflecting module 2 is laser beam, the 5th opening 212 that is to say reflecting module 2 is the center of tested absolute reference position reference object of reference, therefore the positional information that, the null pick-up of this kind of structure gathers is accurately higher compared with the data message of the position transducer collection of prior art.The absolute reference initial position message of the null pick-up collection of this kind of structure can provide an initial position reference point accurately for laser interferometer.
The present invention is owing to adopting facula position detection means 17 and laser alignment mirror 16, the benchmark object of reference of tested absolute reference position is reflecting module 2, the 5th opening 212 of reflecting module 2 is again benchmark object of reference center, therefore, at measuring workpieces platform 3 during with respect to base station position initial position message, reduce measuring error, improved measuring accuracy.
When null pick-up of the present invention adopts two-dimentional facula position detection means 17, facula position detects the positional information that 17 information can gather any two degree of freedom in X, Y, Z, Rx, Ry, Rz, now, the data message of printed circuit board (PCB) 15 records is also two-dimentional, more accurate compared with the data message of a point of independent measurement.In the time need to gathering the positional information of six-freedom degree, adopt three groups of null pick-ups that two dimensional spot position detection device 17 is installed, be arranged on diverse location and just can be carried out the measurement of six-degree of freedom position information.This kind of mode, when measuring six-freedom degree, only installs six position transducers of three groups of null pick-ups rather than prior art, therefore, has reduced alignment error, thereby has improved measuring accuracy.
Claims (10)
1. a null pick-up, it is characterized in that: comprise host module (1), described host module (1) comprises pedestal (11), is provided with laser alignment mirror (16) and facula position detection means (17) on described pedestal (11); Described facula position detection means (17) receives the parallel beam of reflecting module (2) reflection being arranged in work stage (3); The laser beam that described in described reflecting module (2) reflected in parallel, laser alignment mirror (16) sends, described facula position detection means (17) is electrically connected with the printed circuit board (PCB) (15) that the light signal of its induction is transferred to electric signal; Described reflecting module (2) comprises that one end is fixed on the base (21) in work stage (3), described base (21) end to end is penetrated with the 5th opening (212), the laser beam that the 5th described opening (212) can send through described laser alignment mirror (16).
2. null pick-up according to claim 1, it is characterized in that: described pedestal (11) comprises base plate (111) and swash plate (112), described base plate (111) is provided with bottom outlet (1111), is provided with the first opening (1121) and the second opening (1122) on described swash plate (112); The medial surface of described swash plate (112) is provided with facula position detection means (17), and the center of described the second opening (1122) is aimed at the photosensitive region center of described facula position detection means (17).
3. null pick-up according to claim 2, it is characterized in that: described pedestal (11) also comprises adjustable plate (12), described adjustable plate (12) comprises the free wall (122) that fixed head (113) and one end are fixedly connected with described fixed head (113), the free end (121) of described free wall (122) is fixed on base plate (111) above through bottom outlet (1111) and the fixed head (123) of base plate (111), and the free end (121) of described free wall (122) is fixedly connected with locating piece (14); Described locating piece (14) is provided with pilot hole (141), laser alignment mirror (16) is installed in described pilot hole (141), and the transmitting terminal (161) of described laser alignment mirror (16) is aimed at described the first opening (1121).
4. null pick-up according to claim 2, it is characterized in that: described pedestal (11) also comprises at least one block of side plate (113), described side plate (113) is all perpendicular to base plate (111) and the swash plate (112) of described pedestal (11).
5. null pick-up according to claim 2, it is characterized in that: described swash plate (112) medial surface is also provided with locating slot (1123), it is upper that described the second opening (1122) is arranged on described locating slot (1123), and described facula position detection means (17) is arranged in locating slot (1123).
6. null pick-up according to claim 2, it is characterized in that: the lateral surface of described swash plate (112) is also installed with shutter (13), described shutter (13) is provided with the 3rd opening (131) and the 4th opening (132), the center of described the first opening (1121) is aimed at the center of the 3rd described opening (131), and the center of described two openings (1122) is aimed at the center of the 4th described opening (132).
7. null pick-up according to claim 3, it is characterized in that: one of them side of described locating piece (14) is provided with the gap (142) with the axial centre line parallel of described pilot hole (141), described gap (142) connect with pilot hole (141).
8. null pick-up according to claim 1, is characterized in that: described facula position detection means (17) is two-dimentional.
9. null pick-up according to claim 1, it is characterized in that: described is anti-: penetrate module (2) and comprise that one end is fixed on the base (21) in work stage (3), the other end of described base (21) is provided with fixed orifice (211), and the pyramid mirror (22) of energy reflection of parallel beam is installed in described fixed orifice (211); Described base (21) end to end is penetrated with the 5th opening (212) and the 6th opening (214), and the 5th described opening (212) and the 6th opening (214) all connect with described fixed orifice (211); The laser beam that the 5th described opening (212) can send through described laser alignment mirror (16), the laser beam that the 6th described opening (214) energy acceptance angle axicon lens (22) reflected in parallel laser alignment mirror (16) sends.
10. null pick-up according to claim 9, is characterized in that: the ring flange (213) that described base (21) arranges by end face is fixedly mounted in work stage (3).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010530550.6A CN102455169B (en) | 2010-11-03 | 2010-11-03 | Zero-position sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010530550.6A CN102455169B (en) | 2010-11-03 | 2010-11-03 | Zero-position sensor |
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| CN102455169A CN102455169A (en) | 2012-05-16 |
| CN102455169B true CN102455169B (en) | 2014-02-19 |
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| CN201010530550.6A Active CN102455169B (en) | 2010-11-03 | 2010-11-03 | Zero-position sensor |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102829722B (en) * | 2012-08-29 | 2013-09-18 | 江苏建威电子科技有限公司 | Position sensor |
| CN104677271B (en) * | 2013-11-29 | 2017-12-29 | 上海微电子装备（集团）股份有限公司 | A kind of null pick-up adjusting means and method |
| CN112947007B (en) * | 2021-01-19 | 2024-08-20 | 上海集成电路装备材料产业创新中心有限公司 | Rotating device of rotating platform of photoetching machine |
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|---|---|---|---|---|
| US4566016A (en) * | 1983-03-24 | 1986-01-21 | Dainippon Screen Seizo Kabushiki Kaisha | Dual intensity laser beam picture recording method |
| CN1904548A (en) * | 2005-07-29 | 2007-01-31 | 清华同方威视技术股份有限公司 | Equipment used for space position precise measurement |
| CN101482395A (en) * | 2009-02-10 | 2009-07-15 | 上海微电子装备有限公司 | Position measurement apparatus and method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4500729B2 (en) * | 2005-05-11 | 2010-07-14 | キヤノン株式会社 | Surface shape measuring device |
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- 2010-11-03 CN CN201010530550.6A patent/CN102455169B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4566016A (en) * | 1983-03-24 | 1986-01-21 | Dainippon Screen Seizo Kabushiki Kaisha | Dual intensity laser beam picture recording method |
| CN1904548A (en) * | 2005-07-29 | 2007-01-31 | 清华同方威视技术股份有限公司 | Equipment used for space position precise measurement |
| CN101482395A (en) * | 2009-02-10 | 2009-07-15 | 上海微电子装备有限公司 | Position measurement apparatus and method |
Non-Patent Citations (1)
| Title |
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| JP特开2006-317200A 2006.11.24 |
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Address after: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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