CN102419517B - Exchange apparatus and method for double-workpiece stage based on double-guide rail double-drive step scanning - Google Patents

Abstract

A device and method for exchanging double workpiece platforms based on dual guide rails, dual drives, and step-scanning belongs to the technical field of semiconductor manufacturing equipment. There are 4 Y-direction linear motion units and 2 X-direction linear motion units preset above, and the docking of the linear motor stator of the Y-direction linear motion unit and the Y-direction transition linear motion unit completes the workpiece table between the pre-alignment area and the exposure area. In addition, the Y-direction first linear motor mover 1 is fixedly connected with the first workpiece table, the Y-direction fourth linear motor mover is fixedly connected with the second workpiece table, and the Y-direction linear motion unit and the X-direction The linear motion unit forms a double guide rail and double drive structure at the exposure station; the present invention adopts three beats in the process of changing the stage, which improves the efficiency of the stage change. Exposure station centroid drive and other advantages.

Description

A double-workpiece table exchange device and method based on double-rail double-drive step-scanning

technical field

The invention belongs to semiconductor manufacturing equipment, and mainly relates to a double-workpiece table exchange device and method based on double guide rails, double drives, stepping and scanning. the

Background technique

The lithography machine is one of the important ultra-precision system engineering equipment in semiconductor chip manufacturing. As the current mainstream lithography technology, the step-and-scan type puts forward higher requirements for the motion performance of the workpiece table. The main function of the workpiece table is to carry the wafer under the condition of high speed and high acceleration to achieve nanoscale positioning, complete the processes of loading and unloading, pre-alignment, and alignment in the photolithography process, and cooperate with the mask table to complete the exposure action. Worktable technology plays a vital role in improving the resolution, overlay accuracy and productivity of lithography machines. the

Productivity is one of the main goals of the industrial development of lithography machines. There are two main measures to improve productivity: one is to increase the diameter of the wafer to increase the utilization rate of the wafer; the other is to increase the movement speed of the workpiece table and mask table to reduce the processing time of a single wafer. At present, the wafer diameter has gradually increased from 150m and 200mm to 300mm. While the diameter of the wafer increases, the movement speed and acceleration of the workpiece table are also increased accordingly. The improvement of the motion speed and motion acceleration of the workpiece table poses a greater challenge to nano-level positioning, which has a great impact on the overall performance. For this reason, the double worktable technology is proposed, that is, the exposure station and the pre-alignment station are set on the worktable, and the two worktables are respectively located at the exposure station and the pre-alignment station, and the pre-alignment is realized in this way Simultaneously with exposure, thereby shortening the overall time and improving processing efficiency. the

Improving the operating efficiency of the dual-workpiece table is one of the goals of the current technology development of the lithography machine workpiece table. Improving the operating efficiency of the double-workpiece table involves the switching of the workpiece table between the exposure station and the pre-alignment station. The efficiency of changing the stage has a direct impact on the operating efficiency of the double workpiece stage and the productivity of the lithography machine. In the dual-stage patent WO98/40791, there are two exchangeable and coordinated units in each workpiece table structure to realize the exchange of the double-stages, realize the independent work of pretreatment and exposure at the same time, and improve the production efficiency. However, because the workpiece table and the guide rail adopt a coupling connection mode, there will be a short separation between the workpiece table and the drive unit during the exchange process, which will affect the positioning accuracy of the workpiece table. In the patent US2001/0004105A1, the dual-table exchange technology is adopted to increase the productivity without increasing the movement speed of the workpiece table. The temporary separation of the workpiece table and the drive unit occurs, which affects the positioning accuracy of the workpiece table. At the same time, the motion unit and the guide rail are longer, and the motion mass is larger, which has adverse effects on the improvement of the motion speed and acceleration. The patent CN101571676 avoids the coupling structure between the workpiece table and the guide rail, which has a favorable impact on the accuracy of the system. However, this platform-changing solution takes up a large space, and there are certain restrictions on the lithography machine that requires a relatively high space size. The patent CN1485694 not only avoids the separation of the workpiece table and the guide rail in the process of changing the table, but also saves the use of space, and solves the above-mentioned problems, but the structure in this patent cannot reduce the force transmitted from the moving parts to the abutment , thus adversely affecting the overall dynamic performance. In the above schemes, the influence of the movement of the guide device on the efficiency is not taken into account when the channel is changed. During the stage change process, the two workpiece stages need to stay for a period of time so that the stage change action can be completed smoothly, that is, five motion beats are required in the stage change process. In the case of higher and higher productivity requirements, the residence time of the workpiece table will also have a great impact on the productivity. In the patent CN101201555, the conveyor belt and the docking slider are used to complete the stage changing process, the movement rhythm is small, and the operation and maintenance are simple. However, the conveyor belt mechanism and the docking slider are fixed on the abutment, so there will be a large force during the stage changing process On the abutment, it has a great influence on the overall dynamic performance. In the patent CN1485694, the table-changing operation is completed by the docking of the Y-direction linear motor and the linear guide rail. However, due to the excessive gap in the middle of the abutment, a bridging device is introduced, which increases the movement rhythm and increases the time for table-changing. At the same time, the X-direction linear motor magnetically The steel part is fixed on the abutment, and the movement of the moving parts will generate a large reaction force on the abutment when changing the stage, which in turn affects the dynamic performance of the entire system. In the patent CN101770181, the docking of the replacement unit is used to complete the table changing work, but its guide device is fixed on the abutment. During the table changing movement, the moving parts will generate a large reaction force on the abutment, which in turn affects the dynamic performance of the entire system. Therefore, the current dual-platform solution needs to be improved. the

Contents of the invention

Aiming at the deficiencies in the above-mentioned prior art, the present invention proposes a double-workpiece table exchange device and method based on double guide rails, double-drive stepping scanning, and uses the X-direction linear motion unit and the Y-direction linear motion unit to realize three workpiece tables In the step-by-step changeover process, the Y-direction dual-rail double-drive step-scanning technology is adopted, which can significantly save the change-over time, increase productivity, and significantly improve the structural rigidity and angular stiffness of the exposure system, which is conducive to improving the step-scanning accuracy. . the

The purpose of the present invention is achieved like this:

A method for exchanging double workpiece tables based on double guide rails, double drives, stepping and scanning, the steps are as follows:

a) In the initial working state, the second workpiece table at the pre-alignment station is loaded with new wafers, the first workpiece table at the exposure station is pre-aligned, and then the second workpiece table at the pre-processing station starts to process Pre-alignment processing, at the same time, the first workpiece table in the exposure station starts exposure processing. Since the time for completing pre-alignment processing and exposure processing is different, the exposure time is longer than the pre-processing time, so it is located in the pre-processing station. After the second workpiece stage at the exposure station completes the pre-alignment operation, wait for the first workpiece stage at the exposure station to complete the exposure operation and then perform the workpiece stage exchange;

b) The first workpiece stage, the first linear motion unit in the Y direction and the second linear motion unit in the Y direction after exposure are driven by the first linear motion unit in the X direction to the predetermined position for changing tables. At this time, the first linear motion unit in the Y direction The motor stator, the third linear motor stator in the Y direction and the second transition linear motor stator in the Y direction complete the docking operation, and then the second linear motion unit in the Y direction moves to the upper top, and the second workpiece table in the waiting state after pre-alignment and The fourth linear motion unit in the Y direction is driven by the second linear motion unit in the X direction to the predetermined position for changing the platform. At this time, the stator of the fourth linear motor in the Y direction, the stator of the second linear motor in the Y direction and the stator of the first transitional linear motor in the Y direction are docked. operate;

c) The first workpiece stage after exposure is driven by the Y-direction first linear motor mover along the Y-direction first linear motor stator, Y-direction second transition linear motor stator and Y-direction third linear motor stator Moving to the pre-alignment area, the pre-aligned second workpiece table is driven by the Y-direction fourth linear motor mover along the Y-direction fourth linear motor stator, the Y-direction first transition linear motor stator and the Y-direction The second linear motor stator moves to the exposure area, and at the same time, the Y-direction first linear motion unit moves upwards so that the Y-direction first linear motor mover 2 is electromagnetically coupled with the second workpiece table to complete the table-changing action;

d) The first workpiece stage and the fourth linear motion unit in the Y direction after exposure are driven to the unloading station by the second linear motion unit in the X direction. At this time, the stator of the first linear motor in the Y direction and the second transition linear motor in the Y direction The stator and the stator of the third linear motor in the Y direction release the docking relationship. After the unloading and loading of the wafer are completed, the first workpiece table moves to the pre-alignment station, and the pre-aligned second workpiece table and the second workpiece table in the Y direction The linear motion unit and the first linear motion unit in the Y direction are driven by the second linear motion unit in the X direction to the exposure station to start exposure. At this time, the system returns to the initial state and completes a working cycle. the

A dual-rail, dual-drive, step-and-scan dual-stage exchange device, the system includes a base, which is set on the base and runs on the first workpiece of the exposure station and the second of the pre-alignment station. The workpiece table is equipped with the first static pressure air bearing guide rail along the X direction, the first linear motor stator in the X direction, the first linear motor mover in the X direction, and the second static pressure air bearing guide rail in the X direction along the exposure station of the base table. , the X-direction first linear motion unit composed of the X-direction second linear motor stator and the X-direction second linear motor mover, the X-direction first linear motion unit is provided with a Y-direction first linear motor mover 1. The Y-direction first linear motion unit composed of the Y-direction first linear motor stator, the Y-direction first static pressure air bearing guide rail and the Y-direction first linear motor mover 2 and the Y-direction second static pressure air The Y-direction second linear motion unit composed of the floating guide rail, the Y-direction second linear motor stator and the Y-direction second linear motor mover; the base station pre-alignment station is equipped with the X-direction third static pressure air bearing guide rail, X-direction third linear motor stator, X-direction third linear motor mover, X-direction fourth static pressure air bearing guide rail, X-direction fourth linear motor stator, X-direction fourth linear motor mover constitute the X-direction second straight line The motion unit is provided with the third linear motion unit in the Y direction consisting of the third static pressure air bearing guide rail in the Y direction, the third linear motor stator in the Y direction, and the third linear motor mover in the Y direction on the second linear motion unit in the X direction. And the fourth linear motion unit in the Y direction composed of the fourth linear motor mover in the Y direction, the fourth linear motor stator in the Y direction and the fourth static pressure air bearing guide rail in the Y direction, the first linear motion unit in the Y direction and the first linear motion unit in the Y direction The second linear motion unit and the first linear motion unit in the X direction are arranged in a well shape, and the third linear motion unit in the Y direction and the fourth linear motion unit in the Y direction are arranged in an H shape with the second linear motion unit in the X direction; The station and the exposure station are set on the balance mass unit and positioned on the Y direction composed of the first transition static pressure air bearing guide rail, the first Y transition linear motor stator, and the Y direction first transition linear motion unit fixing piece. To the first transition linear motion unit and the Y to the second transition linear motion unit composed of the Y to the second transition static pressure air bearing guide rail, the Y to the second transition linear motor stator and the Y to the second transition linear motion unit fixing piece, The first linear motion unit in the Y direction, the third linear motion unit in the Y direction, and the second transitional linear motion unit in the Y direction share the first linear motor mover one in the Y direction; the second linear motion unit in the Y direction, and the fourth linear motion unit in the Y direction The motion unit and the first transition linear motion unit in the Y direction share the fourth linear motor mover in the Y direction; the first linear motor mover in the Y direction is fixedly connected to the first workpiece table, and the fourth linear motor mover in the Y direction is connected to the second workpiece The table is fixedly connected, the Y-direction first linear motor mover 2 and the Y-direction second linear motor mover can be electromagnetically coupled or separated from the first workpiece table or the second workpiece table; the X-direction first linear motion unit and the X-direction The second linear motion unit is arranged on the balance mass unit, the bottom of the balance mass unit is an air-floating surface, and the balance mass unit is air-floated on the base; the upper surface of the balance mass unit is coplanar with the upper surface of the base, and the first workpiece table and the second The second workpiece table can move on the upper surface of the base and the balance mass unit; Y moves to the first linear movement unit, and Y moves to the second linear movement unit. The moving unit is fixedly connected with the first linear motor mover in the X direction, and is driven by the first linear motion unit in the X direction; the third linear motion unit in the Y direction, the fourth linear motion unit in the Y direction and the fourth linear motion unit in the X direction The linear motor mover is fixedly connected, and is driven by the second linear motion unit in the X direction; the first transition linear motion unit in the Y direction is fixed on the balance mass unit through the fixing piece of the first transition linear motion unit in the Y direction, and the second linear motion unit in the Y direction is fixed on the balance mass unit. The second transitional linear motion unit is fixed on the balance mass unit through the Y-direction second transitional linear motion unit fixing piece. the

The linear motors in the first and second linear motion units in the X direction and the first, second, third, and fourth linear motion units in the Y direction are flat or U-shaped motors, and the linear motors are arranged vertically or horizontally. the

Compared with the existing linear motion channel changing scheme, the innovations and significant advantages of the present invention are:

1. This device realizes the parallel cross-bridge three-beat channel change. The workpiece table is fixedly connected with the y-direction air-floating guide rail sleeve and the linear motor mover. In the process of changing the table, the card exchange action can complete the exchange of the positions of the two workpiece tables in three beats, which is better than the existing double-work table exchange scheme. Save two beats; at the same time, during the exchange process, the first beat moves to the side and the third beat to the exposure position. Both actions are x-direction double-rail dual-drive mode, with a large driving force, and the driven body, that is, the y-direction rail (less than y 1/2) of the total length and the workpiece table, the mass and inertia are small, and the driving speed is fast. Integrating the above-mentioned technical advantages, the table changing time of this scheme can be significantly shorter than the existing method and device scheme, which is an innovative point of the present invention and one of the significant advantages;

2. Propose the structural scheme of the parallel bridge-type double workpiece platform system. Place two air-floating guide rails and linear motors in parallel on the bridge, and two sets (4 pieces) of y-direction air-floating guide rail sliding sleeves and linear motor movers are installed in conjunction with them. During exposure, the work table at the exposure position, the two y-direction air bearing guide rails and the linear motor form a step-scanning system; Film loading, measurement and adjustment). When the positions of the two workpiece platforms are exchanged, the corresponding upper air-floating guide rails and linear motors of the two systems slide quickly to the bottom edge, forming a long air-floating guide rail and linear motors on the bridge that run through the upper bottom edge of the y-direction platform; similarly, the composition A long air bearing guide rail and a linear motor running through the bottom edge of the platform in the y direction. The two workpiece tables slide to the opposite side along the upper and lower bottom edge air bearing guide rails and linear motors on the bridge, and form a new step scanning system and pre-alignment system with two sets of y-direction air bearing guide rails on the two stations. This structure can ensure that the two workpiece tables can realize the x-direction and y-direction double guide rails and double drive form in the form of short guide rails when they are working. The moving mass and inertia are small, and the overall structural rigidity and angular rigidity are significantly improved, which doubles the driving force. The speed of platform change and step scanning is significantly improved, and the productivity is significantly improved; at the same time, the step scanning accuracy and accuracy stabilization time are significantly improved. This is the second innovative point and significant advantage of this program. the

3. Propose the integrated structure scheme of the x-direction motion unit. The workpiece table is fixedly connected with the y-direction linear motor to realize the integrated design of the workpiece table, the y-direction air bearing guide rail and the linear motor, which makes the structure more compact, and the structural rigidity is significantly improved, which is conducive to the improvement of control characteristics. This can not only significantly increase the speed of the long-stroke driving of the two workpiece stages when changing stages, but also significantly increase the stepping and scanning speeds during the exposure process. Combining the above technical advantages, this solution can significantly shorten the single-chip processing cycle compared with the existing technology, which is the third innovation point and significant advantage of the present invention;

4. The x-direction and y-direction of the step scanning are both double guide rails and double drives. When the working position of the double workpiece table is exchanged, the exposure process adopts the double guide rail and double linear motor drive method, which can give full play to the advantages of the double drive and double guide rail method, such as large driving force, large angular rigidity, and small disturbance torque, and can improve the driving speed. , and can improve the smoothness and stability of the movement; when stepping and scanning at the exposure position, it adopts double guide rails and double linear motor drive mode, which can integrate large driving force, large angular rigidity, large overall structural rigidity, small disturbance moment and The combination of many advantages, such as the mass of the driving body and small inertia, is not only conducive to the improvement of the speed of changing the platform, the speed of step scanning, but also the improvement of the accuracy of step scanning. This is the innovation point and the fourth of the remarkable advantages of the present invention. the

Description of drawings

Fig. 1 is a schematic diagram of the overall structure of the present invention. the

Fig. 2 is a bottom view of Fig. 1 . the

Figures 3, 4, 5, and 6 are schematic diagrams of the process of changing the workpiece table. the

Fig. 7 shows that the X-direction second linear motor 4d, the X-direction fourth linear motor 7d, the Y-direction first transition linear motion unit 10 and the Y-direction second linear motion unit 11 are removed from the X-direction linear drive unit. Top view of the unit. the

Figure 8 shows the X-direction second linear motor 4d, the X-direction second static pressure air bearing guide rail 4c, the X-direction fourth linear motor 7d, the X-direction fourth static pressure air bearing guide rail, and the Y-direction second linear motor 4d in the X-direction linear drive unit are removed. The top view of the first transitional linear motion unit 10 and the Y-direction second linear motion unit 11 of the double-workpiece table changing device. the

Part number in the figure: 1-base platform; 2-balance mass unit; 3a-first workpiece table; 3b-second workpiece table; 4-X to the first linear motion unit; 4a-X to the first static pressure gas Floating guide rail; 4b-X to the first linear motor stator; 4c-X to the second hydrostatic air bearing guide rail; 4d-X to the second linear motor stator; 4e-X to the first linear motor mover; 4f- X to the second linear motor mover; 5-Y to the first linear motion unit; 5a-Y to the first linear motor mover one; 5b-Y to the first linear motor stator; 5c-Y to the first linear motor Static pressure air bearing guide rail; 5d-Y to the first linear motor mover 2; 6-Y to the second linear motion unit; 6a-Y to the second static pressure air bearing guide rail; 6b-Y to the second linear motor stator ; 6c-Y to the second linear motor mover; 7-X to the second linear motion unit; 7a-X to the third static pressure air bearing guide rail; 7b-X to the third linear motor stator; 7c-X to the fourth Static pressure air bearing guide rail; 7d-X to the fourth linear motor stator; 7e-X to the third linear motor mover; 7f-X to the fourth linear motor mover; 8-Y to the third linear motion unit; 8a- Y to the third static pressure air bearing guide rail; 8b-Y to the third linear motor stator; 8c-Y to the third linear motor mover; 9-Y to the fourth linear motion unit; 9a-Y to the fourth linear motor motor 9b-Y to the fourth linear motor stator; 9c-Y to the fourth static pressure air bearing guide rail; 10-Y to the first transition linear motion unit; 10a-Y to the first transition static pressure air bearing guide rail; 10b- Y to the first transition linear motor stator; 10c-Y to the first transition linear motion unit fixture; 11-Y to the second transition linear motion unit; 11a-Y to the second transition static pressure air bearing guide rail; 11b-Y to the Y direction The second transitional linear motor stator; 11c-Y to the second transitional linear motion unit fixing piece. the

Detailed ways

Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. the

Example 1:

A dual-rail dual-drive step-scanning double-workpiece exchange device, the system includes a base 1, a first workpiece 3a set on the base 1 and running on an exposure station, and a pre-alignment station The second workpiece table 3b is provided with the first static pressure air bearing guide rail 4a in the X direction, the first linear motor stator 4b in the X direction, the first linear motor mover 4e in the X direction, and the X direction along the exposure station of the base 1. To the first linear motion unit 4 in the X direction composed of the second static pressure air bearing guide rail 4c, the second linear motor stator 4d in the X direction, and the second linear motor mover 4f in the X direction, the first linear motion unit 4 in the X direction It is provided with the Y-direction first linear motor mover 1 5a, the Y-direction first linear motor stator 5b, the Y-direction first static pressure air bearing guide rail 5c and the Y-direction first linear motor mover 2 5d. The Y-direction first linear motion unit 5 and the Y-direction second linear motion unit 6 composed of the Y-direction second static pressure air bearing guide rail 6a, the Y-direction second linear motor stator 6b and the Y-direction second linear motor mover 6c ;In the base station 1 pre-alignment station is provided with the third static pressure air bearing rail 7a in the X direction, the third linear motor stator 7b in the X direction, the third linear motor mover 7e in the X direction, and the fourth static pressure air bearing in the X direction. The X-direction second linear motion unit 7 composed of the floating guide rail 7c, the X-direction fourth linear motor stator 7d, and the X-direction fourth linear motor mover 7f is provided with the Y-direction third linear motion unit 7 on the X-direction second linear motion unit 7. The third linear motion unit 8 in the Y direction composed of the static pressure air bearing guide rail 8a, the third linear motor stator 8b in the Y direction, and the third linear motor mover 8c in the Y direction, and the fourth linear motor mover 9a in the Y direction, the third linear motor mover 9a in the Y direction, and the third linear motor mover 8c in the Y direction. Four linear motor stators 9b and the Y-direction fourth linear motion unit 9 composed of the Y-direction fourth static pressure air bearing guide rail 9c, the Y-direction first linear motion unit 5 and the Y-direction second linear motion unit 6 and the X-direction first linear motion unit The linear motion unit 4 is arranged in a well shape, the third linear motion unit 8 in the Y direction, the fourth linear motion unit 9 in the Y direction, and the second linear motion unit 7 in the X direction are arranged in an H shape; The position is arranged on the balance mass unit 2 and positioned in the Y direction composed of the first transition static pressure air bearing guide rail 10a in the Y direction, the first transition linear motor stator 10b in the Y direction, and the first transition linear motion unit fixing piece 10c in the Y direction. The first transitional linear motion unit 10 and the Y-to-second transition line composed of the Y-to-second transition static pressure air bearing guide rail 11a, the Y-to-second transition linear motor stator 11b, and the Y-to-second transition linear motion unit fixing piece 11c Motion unit 11, Y to the first linear motion unit 5, Y to the third linear motion unit 8 and Y to the second transition linear motion unit 11 share the Y to the first linear motor mover 5a; Y to the second linear motion unit The motion unit 6, the fourth linear motion unit 9 in the Y direction and the first transitional linear motion unit 10 in the Y direction share the fourth linear motor mover 9a in the Y direction; the first linear motor mover 5a in the Y direction is fixed to the first workpiece table 3a The Y-direction fourth linear motor mover 9a is fixedly connected with the second workpiece table 3b, the Y-direction first linear motor mover 2 5d and the Y-direction second linear motor mover 6c can be connected with the first workpiece table 3a or the second work table 3b The two workpiece tables 3b are electromagnetically connected or separated; X The first linear motion unit 4 and the X-direction second linear motion unit 7 are arranged on the balance mass unit 2, the bottom of the balance mass unit 2 is an air-floating surface, and the balance mass unit 2 is air-floated on the base 1; the balance mass unit 2 The upper surface is coplanar with the upper surface of the base 1, and the first workpiece table 3a and the second workpiece table 3b can move on the upper surface of the base 1 and the balance mass unit 2; the first linear motion unit 5 in the Y direction, and the Y direction The second linear motion unit 6 is fixedly connected to the first linear motor mover 4e in the X direction, and is driven by the first linear motion unit 4 in the X direction; the third linear motion unit 8 in the Y direction, and the fourth linear motion unit in the Y direction The motion unit 9 is fixedly connected with the fourth linear motor mover 7e in the X direction, and is driven along the X direction by the second linear motion unit 7 in the X direction; the first transition linear motion unit 10 in the Y direction is fixed by the first transition linear motion unit in the Y direction The piece 10c is fixed on the balance mass unit 2, and the Y-to-second transition linear motion unit 11 is fixed on the balance mass unit 2 through the Y-to-second transition linear motion unit fixing piece 11c. the

The linear motors in the first and second linear motion units 4 and 7 in the X direction and the first, second, third and fourth linear motion units 5, 6, 8 and 9 in the Y direction are flat-plate or U-shaped motors, and the arrangement of the linear motors adopts Vertical or horizontal. the

The work flow of the station changing scheme of the present invention is as follows:

As shown in Figure 3, in the initial working state, the second workpiece table 3b in the pre-alignment station is loaded with new wafers, the first workpiece table 3a in the exposure station is pre-aligned, and then in the pre-processing station. The second workpiece table 3b starts to perform pre-alignment processing, and at the same time the first workpiece table 3a in the exposure station starts to perform exposure processing. Since the time for completing the pre-alignment processing and exposure processing is different, the exposure time is relative to the pre-processing time. It is longer, so the second workpiece stage 3b located at the pre-processing station completes the pre-alignment operation and waits for the first workpiece stage 3a located at the exposure station to complete the exposure operation before performing workpiece stage exchange. the

As shown in FIG. 4, the exposed first workpiece stage 3a, the Y-direction first linear motion unit 5, and the Y-direction second linear motion unit 6 are driven by the X-direction first linear motion unit 4 to the predetermined position for changing the stage. At this time, the first linear motor stator 5b of Y direction, the third linear motor stator 8b of Y direction and the second transitional linear motor stator 11b of Y direction complete the docking operation, and then Y moves to the upper top part of the second linear motion unit 6 for pre-alignment The second workpiece table 3b and the fourth linear motion unit 9 in the waiting state after the preparation is completed are driven by the second linear motion unit 7 in the X direction to the predetermined position for changing tables. At this time, the fourth linear motor stator 9b in the Y direction and The second linear motor stator 6b and the Y-to-first transition linear motor stator 10b complete the docking operation. the

As shown in Figure 5, the first work table 3a that has been exposed is driven by the first linear motor mover 5a from Y to the first linear motor stator 5b and the Y to the second transition linear motor stator 11b. and Y direction to the third linear motor stator 8b to move to the pre-alignment area, and the pre-aligned second workpiece table 3b is driven by the Y direction to the fourth linear motor stator 9a along the Y direction to the fourth linear motor stator 9b. , Y to the first transition linear motor stator 10bY moves to the exposure area to the second linear motor stator (6b), and Y moves upwards to the first linear motion unit 5 so that Y moves upwards to the first linear motor mover 2 5d and the second The workpiece table 3b is electromagnetically connected to complete the table changing action. 

As shown in Figure 6, the first workpiece table 3a and the fourth linear motion unit 9 of the Y direction after exposure are driven to the unloading station by the second linear motion unit 7 of the X direction. At this time, the first linear motor stator 5b of the Y direction Disconnect the docking relationship with the second transition linear motor stator 11b in the Y direction and the third linear motor stator 8b in the Y direction. After the unloading and loading of the wafer is completed, the first workpiece table 3a moves to the pre-alignment station, and the pre-alignment The completed second workpiece stage 3b, the second Y-direction linear motion unit 6 and the Y-direction first linear motion unit 5 are driven to the exposure station by the X-direction second linear motion unit 7, and exposure starts, and the system returns to In the initial state, a working cycle is completed. the

Example 2:

Removing the X-direction second linear motor 4d, X-direction fourth linear motor 7d, Y-direction first transition linear motion unit 10 and Y-direction second linear motion unit 11 in the X-direction linear drive unit in Embodiment 1 can be implemented Example 2, as shown in Figure 7. The station exchange process of the two workpiece tables in embodiment 2 is exactly the same as in embodiment 1. The difference is that the X-direction driving form of the two workpiece tables is driven by a double guide rail and a single motor. Compared with Embodiment 1, the problem of inconsistency in driving the dual motors in the X direction can be avoided under the premise of ensuring the angular rigidity of the X direction movement. At the same time, due to the removal of the transitional linear motion unit, the range of motion of the double workpiece table can be increased, but the size of the X-direction linear motor will increase due to the X-direction driving force. the

Example 3:

Remove the X-direction second linear motor 4d, the X-direction second static pressure air bearing guide rail 4c, the X-direction fourth linear motor 7d, the X-direction fourth static pressure air bearing guide rail, and the X-direction linear drive unit in the first embodiment. Embodiment 3 can be obtained for the first transition linear motion unit 10 in the Y direction and the second linear motion unit 11 in the Y direction, as shown in FIG. 8 . The station exchange process of the two workbenches in embodiment 3 is exactly the same as that in embodiment 1. Compared with Embodiment 1, Embodiment 2 reduces the number of the X-direction second linear motor 4d, the X-direction second static pressure air bearing guide rail 4c, the X-direction fourth linear motor 7d, and the X-direction fourth linear motor 7d in the X-direction linear drive unit. The four static pressure air bearing guide rails, the first transition linear motion unit 10 in the Y direction and the second linear motion unit 11 in the Y direction can also realize the station exchange of the double workpiece table, but because the X-direction driving form of the two workpiece tables is single The guide rail is driven by a single motor, and there will be non-centroid drive problems. the

Claims (2)

1. one kind is driven the double-workpiece-table switches of step-scan based on two guide rails pair, this system comprises base station (1), be set in base station (1) and go up and run on exposure first work stage (3a) of station and the second workpiece platform (3b) of prealignment station, it is characterized in that: along base station (1) exposure station, be provided with by X-direction the first static pressure air-float guide rail (4a), X-direction the first linear motor stator electric (4b), X-direction the first linear motor rotor (4e), X-direction the second static pressure air-float guide rail (4c), X-direction the second linear motor stator electric (4d), X-direction the first linear motion unit (4) that X-direction the second linear motor rotor (4f) forms, on X-direction the first linear motion unit (4), be provided with by Y-direction the first linear motor rotor one (5a), Y-direction the first linear motor stator electric (5b), Y-direction the first linear motion unit (5) that Y-direction the first static pressure air-float guide rail (5c) and Y-direction the first linear motor rotor two (5d) forms and by Y-direction the second static pressure air-float guide rail (6a), Y-direction the second linear motion unit (6) that Y-direction the second linear motor stator electric (6b) and Y-direction the second linear motor rotor (6c) form, at base station (1) prealignment station, be provided with by X-direction the 3rd static pressure air-float guide rail (7a), X-direction the 3rd linear motor stator electric (7b), X-direction the 3rd linear motor rotor (7e), X-direction the 4th static pressure air-float guide rail (7c), X-direction the 4th linear motor stator electric (7d), X-direction the second linear motion unit (7) that X-direction the 4th linear motor rotor (7f) forms, on X-direction the second linear motion unit (7), be provided with by Y-direction the 3rd static pressure air-float guide rail (8a), Y-direction the 3rd linear motor stator electric (8b), Y-direction the 3rd linear motion unit (8) that Y-direction the 3rd linear motor rotor (8c) forms and by Y-direction the 4th linear motor rotor (9a), Y-direction the 4th linear motion unit (9) that Y-direction the 4th linear motor stator electric (9b) and Y-direction the 4th static pressure air-float guide rail (9c) form, Y-direction the first linear motion unit (5) and Y-direction the second linear motion unit (6) are the configuration of well type with X-direction the first linear motion unit (4), Y-direction the 3rd linear motion unit (8) and Y-direction the 4th linear motion unit (9) are the configuration of well type with X-direction the second linear motion unit (7), between prealignment station and exposure station, be arranged on balance mass unit (2) and be positioned by Y-direction First Transition static pressure air-float guide rail (10a), the Y-direction First Transition linear motion unit (10) that Y-direction First Transition linear motor stator electric (10b) and Y-direction First Transition linear motion unit fixture (10c) form and by Y-direction the second transition static pressure air-float guide rail (11a), Y-direction the second transition linear motion unit (11) that Y-direction the second transition linear motor stator electric (11b) and Y-direction the second transition linear motion unit fixture (11c) form, Y-direction the first linear motion unit (5), Y-direction the 3rd linear motion unit (8) and Y-direction the second transition linear motion unit (11) share Y-direction the first linear motor rotor one (5a), Y-direction the second linear motion unit (6), Y-direction the 4th linear motion unit (9) and Y-direction First Transition linear motion unit (10) share Y-direction the 4th linear motor rotor (9a), Y-direction the first linear motor rotor (5a) connects firmly with the first work stage (3a), Y-direction the 4th linear motor rotor (9a) connects firmly with second workpiece platform (3b), and Y-direction the first linear motor rotor two (5d) can connect with the first work stage (3a) or second workpiece platform (3b) electromagnetism with Y-direction the second linear motor rotor (6c) or be separated, X-direction the first linear motion unit (4) and X-direction the second linear motion unit (7) are arranged on balance mass unit (2), bottom, balance mass unit (2) is air bearing surface, and balance mass unit (2) air supporting is on base station (1), balance mass unit (2) upper surface and base station (1) upper surface are coplanar, and the first work stage (3a) and second workpiece platform (3b) can be in the upper surface motions of base station (1) and balance mass unit (2), Y-direction the first linear motion unit (5), Y-direction the second linear motion unit (6) connect firmly with X-direction the first linear motor rotor (4e), and are driven along X-direction by X-direction the first linear motion unit (4), Y-direction the 3rd linear motion unit (8), Y-direction the 4th linear motion unit (9) connect firmly with X-direction the 4th linear motor rotor (7e), and are driven along X-direction by X-direction the second linear motion unit (7), it is upper that Y-direction First Transition linear motion unit (10) is fixed on balance mass unit (2) by Y-direction First Transition linear motion unit fixture (10c), and Y-direction the second transition linear motion unit (11) is fixed on balance mass unit (2) by Y-direction the second transition linear motion unit fixture (11c).

2. according to claim 1 a kind of based on the two double-workpiece-table switches of step-scan that drive of two guide rails, it is characterized in that: the linear electric motors in first and second linear motion unit of X-direction (4,7) and first, second, third and fourth linear motion unit of Y-direction (5,6,8,9) are plate or U-shaped motor, the layout of linear electric motors adopts vertical or horizontal.