CN102419516B - Illuminating device and illuminating method - Google Patents

Abstract

The present invention provides a light irradiation device and a light irradiation method capable of forming a faithful and high-resolution pattern in a pattern of a mask. The light irradiation device of the present invention is characterized in that it includes: a light emitting part having a light source element row formed by arranging a plurality of light source elements side by side in one direction. A discharge lamp, and a reflector configured to surround the discharge lamp and reflect light from the discharge lamp; A plurality of light-shielding portions and a plurality of light-transmitting portions are alternately arranged side by side in the one direction, and the light from the light emitting portion passes through the mask to irradiate the object to be irradiated.

Description

Light irradiation device and light irradiation method

technical field

The present invention relates to a light irradiation device and a light irradiation method for forming a linear pattern, and more particularly, to a suitable light irradiation device for irradiating a photopolymerizable liquid crystal material or a photoalignment film in a manufacturing process of, for example, a patterned retardation film. Light irradiation device and light irradiation method.

Background technique

A 3D video display device is a device that displays three-dimensional stereoscopic images. As such a 3D video display device, devices for theaters and TV projections have been developed in the past, and are expected to be used in entertainment facilities, store displays, and medical treatment in the future. Therefore, attention in recent years.

FIG. 20 is an explanatory diagram showing a general configuration of an example of a 3D video display device. The structure of this 3D video display device includes: a 3D video transmission unit 80 made of liquid crystal (LCD) in which a right-eye video transmission unit 81 and a left-eye video transmission unit 82 are alternately arranged; , a right-eye video display unit 86 disposed in front of the right-eye video transmission unit 81 and a left-eye video display unit 87 disposed in front of the left-eye video transmission unit 82 a film 85 for forming a 3D video display; and a light source 88 provided behind the 3D video transmission unit 80 . This 3D video display device transmits the video for the right eye from the video transmission unit 81 for the right eye, and sends the video for the left eye from the video transmission unit 82 for the left eye. For example, the video for the right eye is introduced into the video display unit 86 for the right eye and The image for the left eye is sent to the observer as it is, and the image for the left eye is introduced to the image display unit 87 for the left eye and is sent to the observer after the vibration direction of the polarized light is rotated by 90°. In addition, the following configuration is adopted, and the observer passes through polarizing glasses composed of a right-eye lens with a polarizing plate that transmits only an image for the right eye and a left-eye lens with a polarizing plate that transmits only an image for the left eye. By capturing the right-eye video and the left-eye video having different vibration directions of the polarized light, the viewer recognizes the composite video of the left-eye video and the right-eye video as one stereoscopic video. This 3D image display device is described in Patent Document 1, for example.

Furthermore, in the 3D video display device, the left-eye video and the right-eye video are respectively recognized by the left eye and the right eye of the observer to recognize the stereoscopic video in the observer's brain. However, in order to distinguish the left-eye video and images for the right eye, a patterned retardation film is used.

Moreover, in a liquid crystal display device etc., it is proposed to use the patterned retardation film which has a liquid crystal polymer layer as a method of improving the performance (refer patent document 2).

As shown in Figure 21 (a), for the photopolymerizable liquid crystal material layer 92 formed by the alignment film 91 on the film substrate 90, a plurality of linear light-shielding parts 96 and a plurality of light-transmitting parts 97 are respectively alternated. 21 (b), as shown in FIG. 21(b), a liquid crystal polymer layer 93 in a stripe pattern is formed, and then the remaining photopolymerizable liquid crystal material layer 92 is removed to obtain this A patterned retardation film.

In the manufacture of such a patterned retardation film, in order to improve mass productivity by irradiating active energy rays such as ultraviolet rays to the photopolymerizable liquid crystal material layer 92 in a wide range, a light source equipped with a long-arc discharge lamp is generally used. In the irradiation device, the mask 95 is arranged so that the direction in which the light-shielding portion 96 and the light-transmitting portion 97 extend (the direction perpendicular to the paper surface in FIG. 21 ) is perpendicular to the longitudinal direction of the long-arc discharge lamp.

However, such a light irradiation device has the following problems.

That is, since the long-arc discharge lamp is a line light source, the light emitted from the discharge lamp cannot be made into parallel lights parallel to each other in the longitudinal direction of the discharge lamp by an optical system. Therefore, as shown in FIG. 22 , part of the light that passes through the light-transmitting portion 97 of the mask 95 is incident obliquely to the mask 95 in the direction of its surface, and is incident on the photopolymerizable liquid crystal material layer 92 positioned as the object to be irradiated. As a result, it is difficult to form the liquid crystal polymer layer 93 having a faithful and high-resolution pattern in the pattern of the mask 95 .

Patent Document 1: Japanese Patent Laid-Open No. 2002-185983

Patent Document 2: Japanese Patent Laid-Open No. 2009-276664

Contents of the invention

The present invention has been made in view of the above problems, and an object of the present invention is to provide a light irradiation device and a light irradiation method capable of forming a faithful and high-resolution pattern in a pattern of a mask.

The light irradiation device of the present invention is characterized in that it includes: a light emitting part having a light source element row formed by arranging a plurality of light source elements side by side in one direction; A discharge lamp, and a reflector arranged to surround the discharge lamp and reflect light from the discharge lamp; A plurality of light-shielding portions and a plurality of light-transmitting portions are alternately arranged side by side in the one direction, and the light from the light emitting portion is irradiated on the object to be irradiated through the mask.

In the light irradiation device of the present invention, preferably, a polarizing element is disposed on an optical path between the light emitting portion and the mask.

Furthermore, it is preferable to further include a light condensing member that condenses the light from the light emitting portion into a linear shape extending in the one direction, and irradiates the light on the object to be irradiated through the mask.

Also, the reflector may be a member having a paraboloid of revolution light reflection surface centered on its optical axis, and the light converging member may be constituted by a cylindrical reflector having a parabolic light reflection surface in cross section.

Furthermore, the reflector may be a member having a paraboloid-shaped light reflection surface centering on its optical axis, and the light collecting member may have a cylindrical convex lens.

Also, the above-mentioned reflector may be a member having a spheroidal light-reflecting surface centered on its optical axis, and the above-mentioned light-collecting member may be a cylindrical reflector having an elliptical light-reflecting surface in cross section, It is composed of a plurality of cylindrical convex lenses arranged side by side in the above-mentioned one direction corresponding to the light source elements of the above-mentioned light emitting portion.

In addition, it is preferable that the above-mentioned light emitting part has at least two light source element rows respectively extending in the same direction, and these light source element rows are arranged so as to connect between the electrodes of the discharge lamps in the light source elements involved in one light source element row. The straight line between the center point and the center point between the electrodes of the discharge lamp in the light source element of another light source element row closest to the light source element is oblique to the straight line extending in the above-mentioned one direction.

In addition, it is preferable that the light irradiation device of the present invention includes a transport member that transports the object to be irradiated along the direction in which the light-transmitting portion of the mask extends.

In such a light irradiation device, it is preferable that the object to be irradiated is a film-like substance, the conveying member has a roller for conveying in contact with the object to be irradiated, and the object to be irradiated is irradiated to a part in contact with the roller. Light.

In addition, in the light irradiation device of the present invention, the reflector may be a member having a paraboloid of revolution light reflecting surface centering on its optical axis, and may be configured to include a plane reflector that receives light from the above-mentioned reflector. The light from the light emitting portion is reflected toward the mask as strip-shaped light extending in the one direction.

In addition, in the light irradiation device of the present invention, it is preferable that the object to be irradiated is a photopolymerizable liquid crystal material or an alignment film material for producing a retardation film.

The light irradiation method of the present invention is characterized in that: the light emitted from the light emitting part having a light source element row configured by arranging a plurality of light source elements side by side in one direction is irradiated on the object to be irradiated through a mask. , the light source element is composed of a short-arc discharge lamp and a reflector configured to surround the discharge lamp to reflect light from the discharge lamp, and the masks will be respectively in the direction perpendicular to the above-mentioned one direction A plurality of extending linear light shielding portions and a plurality of light transmitting portions are alternately arranged side by side in the above-mentioned one direction, and constituted.

In the light irradiation method of the present invention, polarized light may be irradiated through a polarizing element disposed on the optical path between the light emitting portion and the mask.

In addition, in the light irradiation method of the present invention, it is preferable that the light from the above-mentioned light emitting part is condensed into a linear shape extending in the above-mentioned one direction by a light-concentrating member, and the light that has been condensed is passed through the above-mentioned mask. The model is irradiated on the object to be irradiated.

In addition, in the light irradiation method of the present invention, it is preferable that the object to be irradiated is irradiated with light while the object to be irradiated is conveyed in the direction in which the light-transmitting portion of the mask extends.

In this light irradiation method, it is preferable that the object to be irradiated is a film-like substance, and at the same time that the object to be irradiated is transported by a transport member, light is irradiated to a part of the object to be irradiated that is in contact with a roller, and The transport member has the above-mentioned rollers that transport the object in contact with it.

In addition, in the light irradiation method of the present invention, it is preferable that the object to be irradiated is a photopolymerizable liquid crystal material or an alignment film material for producing a retardation film.

The effect of the invention

According to the present invention, as the discharge lamp constituting the light source element, a short-arc discharge lamp as a point light source is used, and the light emission is configured by a light source element row formed by arranging a plurality of light source elements having such a discharge lamp side by side in one direction. Therefore, the light emitted from each discharge lamp of the light source elements constituting the light source element row can be made into parallel lights parallel to each other in one direction in which the light source elements are arranged side by side. The area directly under the light-shielding portion of the mask is irradiated, and as a result, a faithful and high-resolution pattern can be formed on the pattern of the mask.

Description of drawings

FIG. 1 is a perspective view schematically showing the configuration of a light irradiation device according to a first embodiment.

Fig. 2 is a side cross-sectional view showing the light irradiation device shown in Fig. 1 along the line A-A.

Fig. 3 is a plan cross-sectional view showing the light irradiation device shown in Fig. 1 along the line B-B.

4 is a front view of a light emitting unit of the light irradiation device according to the first embodiment.

It is explanatory drawing which shows an example of the concrete structure of a mask, (a) is a top view, (b) is a side view.

FIG. 6 is an explanatory view showing the relationship between the effective irradiation width of the mask with light incident from the light-collecting member, the allowable variation value of the gap between the mask and the object to be irradiated, and the radius of the roller.

FIG. 7 is an explanatory view showing an example of a manufacturing process of a patterned retardation film.

Fig. 8 is an explanatory view showing the direction of light irradiated by the light irradiation device of the present invention.

9 is a side cross-sectional view showing an outline of a configuration of a light irradiation device according to a second embodiment.

10 is a side cross-sectional view showing an outline of the configuration of a light irradiation device according to a third embodiment.

FIG. 11 is an explanatory view showing the configuration of a compound lens of a light irradiation device according to a third embodiment.

12 is a side cross-sectional view showing an outline of the configuration of a light irradiation device according to a fourth embodiment.

Fig. 13 is an explanatory view showing the configuration of an example of a polarizing element, (a) is a perspective view, and (b) is a cross-sectional view along line A-A in (a).

FIG. 14 is an explanatory view showing another example of the manufacturing process of the patterned retardation film.

15 is a front view of a light emitting unit of a light irradiation device according to a fifth embodiment.

16 is a graph showing the illuminance distribution in the x direction of the light irradiation area when the light from the light emitting unit is condensed by the light condensing member in the light irradiation device according to the fifth embodiment.

17 is a perspective view showing an outline of the configuration of a light irradiation device according to a sixth embodiment.

Fig. 18 is a side cross-sectional view showing the light irradiation device shown in Fig. 17 along the line A-A.

19 is a graph showing the illuminance distribution in the x direction of the light irradiation area when the light from the light emitting unit is condensed by the light condensing member in the light irradiation device according to the modified example.

FIG. 20 is an explanatory diagram showing a general configuration of an example of a 3D video display device.

FIG. 21 is an explanatory view showing a manufacturing process of a patterned retardation film.

FIG. 22 is an explanatory view showing the direction of light irradiated by a conventional light irradiation device.

Symbol Description:

10: Light emitting part

11, 11a, 11b: row of light source elements

12: Light source element

13: discharge lamp

14: Light-emitting tube

15: reflector

16: light reflective surface

17: Light exit surface

18: Fixed parts

19: reflector

20: spotlight parts

21: light reflective surface

22: cylindrical convex lens

23: Plane mirror

24: light reflective surface

25: Cylindrical elliptical mirror

26: light reflective surface

27: compound lens

28: cylindrical convex lens

30: mask

31: Translucent substrate

32: Shading film

35: shading part

36: Translucent part

40: Conveying components

41: roll

45: polarizing element

46: Transparent substrate

47: metal wire

51: film substrate

52: Orientation film

52A: Material layer for alignment film

53: Liquid crystal polymer layer

53A: photopolymerizable liquid crystal material layer

55: The first photo-alignment film

55A: Material layer for photo-alignment film

56: Second photo-alignment film

57: First liquid crystal polymer layer portion

57A: Photopolymerizable liquid crystal material layer

58: Second liquid crystal polymer layer portion

59: Liquid crystal polymer layer

70: Flat mirror

71: light reflective surface

80: 3D image sending department

81: Image transmission unit for right eye

82: Image sending unit for left eye

85: Films for forming 3D video displays

86: Image display unit for right eye

87: Image display unit for left eye

88: light source

90: film substrate

91: Orientation film

92: Photopolymerizable liquid crystal material layer

93: liquid crystal polymer layer

95: mask

96: Shading Department

97: Translucent part

G: minimum gap

Detailed ways

Next, embodiments of the present invention will be described.

(first embodiment)

Fig. 1 is a perspective view showing the outline of the structure of the light irradiation device according to the first embodiment, Fig. 2 is a side cross-sectional view showing the light irradiation device shown in Fig. 1 along the line A-A, and Fig. The top cross-sectional view of the light irradiation device shown by the B-B line.

The light irradiation device according to the first embodiment is a device for producing, for example, a patterned retardation film. 10: Concentrate the light from the light emitting part 10 into a linear light concentrating member 20 extending in one direction in which the light source elements 12 described later are arranged; shape the light from the light concentrating member 20 into a strip shape a mask 30 ; and a transport member 40 for transporting the object W to be irradiated.

In the light source element row 11 constituting the light emitting portion 10, as shown in FIG. 4 , each of the light source elements 12 is arranged in one direction (in FIG. is arranged in the "x direction"). Each of the light source elements 12 of the light source element row 11 has a short-arc discharge lamp 13 formed by arranging a pair of electrodes (not shown) facing each other along its tube axis in a light emitting tube 14 and a light source to surround the discharge lamp 13. The reflector 15 that reflects the light from the discharge lamp 13 is arranged in the same manner.

As the discharge lamp 13, an ultra-high-pressure mercury lamp that efficiently emits ultraviolet rays with a wavelength of 270 to 450 nm, for example, in which mercury, a rare gas, and a halogen are sealed in the arc tube 14 can be used. In such a discharge lamp 13 , the inter-electrode distance between a pair of electrodes is, for example, 0.5 to 2.0 mm, and the amount of mercury enclosed is, for example, 0.08 to 0.30 mg/mm ³ .

In the light irradiation device according to the first embodiment, the reflector 15 is composed of a parabolic reflective surface having the light reflective surface 16 of a paraboloid of revolution centered on the optical axis C, and the reflector 15 is arranged so that the optical axis C is located at The discharge lamp 13 is fixed to the discharge lamp 13 by the fixing member 18 in the state where the discharge lamp 13 is on the tube axis of the arc tube 14 and its focal point F is located at the bright point between the electrodes of the discharge lamp 13 .

In addition, in the light irradiation device according to the first embodiment, the condensing member 20 is composed of a cylindrical parabolic reflective surface extending in the x direction having a parabolic light reflective surface 21 in a cross section perpendicular to the x direction. The member 20 is arranged in front of the light exit surface 17 perpendicular to the optical axis C of each reflector 15 of the light exit unit 10 , and its focal point f is located on the surface of the object W to be irradiated.

The condensing member 20 may be a cold mirror coating that reflects only ultraviolet light of a target wavelength and transmits unnecessary visible light and infrared light.

The mask 30 is a long rectangular plate-shaped member in the x direction, and is arranged below the light-condensing member 20 along a plane perpendicular to the optical axis L of the reflected light generated by the light-condensing member 20 . This mask 30 is arranged so as to shield a plurality of linear lines extending in a direction perpendicular to the x direction (a left-right direction in FIGS. part and a plurality of light-transmitting parts alternately arranged side by side in the x direction.

FIG. 5 is an explanatory diagram showing an example of a specific configuration of the mask 30 , (a) is a plan view, and (b) is a side view. In this mask 30, on one surface of a light-transmitting substrate 31 made of, for example, quartz glass, a plurality of linear light-shielding films 32 made of, for example, chromium are arranged side by side at predetermined intervals. The linear light-shielding portion 35 is formed by a region of the light-shielding film 32 , and the light-transmitting portion 36 is formed by the region between adjacent light-shielding films 32 . As shown by the dotted line Lb in FIG. 5( a ), the mask 30 is incident with band-shaped light extending in the x-direction in which the light-shielding portion 35 and the light-transmitting portion 36 are arranged.

Since the object W to be irradiated is transported in the y direction by a transport member 40 described later, the mask 30 is arranged separately from the object W to be irradiated. The minimum gap G between the mask 30 and the object W to be irradiated is, for example, 50 to 1000 μm.

In addition, since the object to be irradiated W is conveyed in contact with the roller 41 described later, the gap between the mask 30 and the object to be irradiated W changes as the object to be irradiated W is conveyed in the y direction, Therefore, the effective irradiation width d on the mask 30 of light incident from the light-collecting member 20 is preferably as small as possible in consideration of the allowable variation value of the gap between the mask 30 and the object W to be irradiated and the radius of the roller 41. ground setting. The reason for this is as follows. That is, when the object to be irradiated W is transported to pass through the area directly under the mask 30, the gap between the object to be irradiated W and the mask 30 first becomes smaller as the object to be irradiated W moves along the y direction, and then reaches the mask 30. Right below the central position of 30, it increases as the object to be irradiated W moves along the y direction, but the greater the minimum effective irradiation width d, the greater the change width of the gap, so it cannot be used in the mask described later. 30 patterns to form faithful and high-resolution patterns.

Specifically, as shown in FIG. 6, when the allowable variation value of the gap between the mask 30 and the object W to be irradiated is set as a, and the radius of the roller 41 is set as r, the effective irradiation width d can pass through Find out. In this formula, theoretically, it is necessary to consider the thickness of the object W to be irradiated. However, the thickness of the object W to be irradiated is extremely small compared with the radius of the roller 41, so it can be ignored. As a specific example, when the allowable variation a of the gap between the mask 30 and the object W is 50 μm and the radius r of the roller 41 is 300 mm, the effective irradiation width d is preferably about 11 mm or less. Therefore, the radiated light from the short-arc discharge lamps 13 of the above-mentioned light emitting part 10 is condensed into a linear shape extending in the x direction by the reflectors 15 and the condensing member 20. Concentrating light within the range of the effective irradiation width d is effective, and in turn, leads to the formation of a faithful and high-resolution pattern on the pattern of the mask 30 .

The transport member 40 has a roller 41 that transports the object W to be irradiated W in contact with it. Specifically, the roller 41 is arranged so that the portion in contact with the object to be irradiated W is located directly under the mask 30, and the rotation axis of the roller 41 (not shown) extends in the x direction. The roller 41 rotates to transport the object W to be irradiated in the y direction.

When the object to be irradiated is a film, the conveyance member 40 has the roller 41 that conveys the object W to be irradiated while being in contact with the object W to be irradiated. Therefore, by reducing the eccentricity of the roller 41, the mask 30 and the roller can be separated. The gap between the film-like objects W to be irradiated in contact with 41 is kept constant.

In addition, by providing a water cooling mechanism on the roller 41, even when the object W is irradiated with high-intensity ultraviolet rays, the object W can be cooled by the roller 41 in contact with the object W, thereby preventing Deformation such as contraction of the object W to be irradiated.

As shown in FIG. 2 , in the light irradiation device described above, light emitted from the light emitting unit 10 passes through the light collecting member 20 and the mask 30 to irradiate the object to be irradiated W conveyed in the y direction by the conveying member 40 . Specifically, in the light emitting part 10, the light emitted from the discharge lamp 13 of the light source element 12 of the light source element row 11 is reflected by the light reflection surface 16 of the reflector 15 of the light source element 12, thereby becoming a The light parallel to the optical axis C of the body 15 is emitted from the light emitting surface 17 to the light collecting member 20 . Then, the light that becomes parallel light emitted from the light emitting portion 10 is reflected downward by the light reflecting surface 21 of the light condensing member 20 , and enters the mask 30 while being condensed into a linear shape extending in the x direction. At this time, the light entering the mask 30 is parallel light parallel to each other in the x direction. Then, the light incident on the mask 30 is shaped into a belt shape by the light shielding portion 35 and the light transmitting portion 36 of the mask 30 shown in FIG. 41 forms a band-shaped light irradiation area corresponding to the pattern of the light shielding portion 35 and the light transmitting portion 36 of the mask 30, and the object W to be irradiated is transported by the transport member 40 in the y direction to face each other. The object to be irradiated W is subjected to required photoirradiation treatment.

In such a light irradiation device, a patterned retardation film can be produced as follows using a photopolymerizable liquid crystal material.

First, as shown in FIG. 7(a), on the film base material 51, the material layer 52A for an alignment film is formed by applying a liquid alignment film material and drying or curing it. The rubbing process forms an alignment film 52 on the film substrate 51 as shown in FIG. 7( b ). Next, as shown in Figure 7(c), a photopolymerizable liquid crystal material layer 53A is formed on the alignment film 52, and then, the photopolymerizable liquid crystal material layer 53A is subjected to selective exposure treatment by the above-mentioned light irradiation device to make the photopolymerizable liquid crystal material layer 53A A part of the liquid crystal material layer 53A is cured so that the patterned liquid crystal polymer layer 53 is formed into a strip shape as shown in FIG. 7( d ). And, by removing the remaining photopolymerizable liquid crystal material layer 53A on the alignment film 52, as shown in FIG. patterned retardation films.

According to the light irradiation device according to the first embodiment, the discharge lamp 13 constituting the light source element 12 is a short-arc discharge lamp as a point light source, and the discharge lamp 13 and the reflector 15 having the light reflection surface 16 of a paraboloid of revolution A plurality of light source elements 12 are arranged side by side in one direction (x direction) to form a light source element row 11 to constitute a light emitting part 10. The emitted light becomes parallel light parallel to each other on a direction in which the light source elements 12 are arranged by each reflector 15 of the light source elements 12. Like this, as shown in FIG. The light-transmitting portion 36 of 30 is incident perpendicularly or substantially perpendicularly to the plane direction thereof, and passes through the light-transmitting portion 36 . Therefore, light is prevented or suppressed from being irradiated to the region of the object W directly under the light shielding portion 35 of the mask 30 , and as a result, a faithful and high-resolution pattern can be formed on the pattern of the mask 30 .

(second embodiment)

9 is a side cross-sectional view showing an outline of a configuration of a light irradiation device according to a second embodiment.

The light irradiation device related to the second embodiment is used to manufacture, for example, a patterned retardation film, and the structure of the device includes: a light emitting part 10 having a light source element row 11 composed of a plurality of, for example, three or more light source elements 12; The light from the light emitting part 10 is condensed into a linear light condensing member 20 extending in one direction (x direction) in which light source elements 12 described later are arranged; a mask 30 ; and a transport member 40 for transporting the object W to be irradiated. Here, the mask 30 and the transport member 40 have the same configuration as the mask 30 and the transport member 40 of the light irradiation device according to the first embodiment.

In the light source element row 11 constituting the light emitting portion 10 , each of the light source elements 12 is arranged in the x direction (direction perpendicular to the paper surface in FIG. 9 ) (see FIG. 4 ). Each of the light source elements 12 of the light source element row 11 has a short-arc type discharge lamp 13 formed by arranging a pair of electrodes (not shown) facing each other along the tube axis of the light emitting tube 14, and a light source to surround the discharge lamp. The reflector 15 that reflects the light from the discharge lamp 13 is arranged in the manner of 13. Here, the discharge lamp 13 has the same configuration as the discharge lamp 13 of the light irradiation device according to the first embodiment.

In the light irradiation device according to the second embodiment, the reflector 15 is composed of a parabolic reflective surface having a paraboloid of revolution light reflective surface 16 centered on the optical axis C, and the reflector 15 is arranged such that the optical axis C is located at The discharge lamp 13 is fixed to the discharge lamp 13 by the fixing member 18 in the state where the discharge lamp 13 is on the tube axis of the arc tube 14 and its focal point F is located at the bright point between the electrodes of the discharge lamp 13 .

In addition, in the light irradiation device according to the second embodiment, the condensing member 20 includes a cylindrical convex lens 22 extending in the x direction and condensing the light from the light irradiation mechanism 10 into a line extending in one direction, It is composed of a flat mirror 23 that reflects light from the cylindrical convex lens 22 to the mask 30 .

The cylindrical convex lens 22 of this condensing member 20 is arranged so that, in front of the light exit surface 17 perpendicular to the optical axis C of each reflector 15 of the light exit part 10, on the direction where its convex surface becomes the light exit surface, its focal point f is located on the surface of the object W projected by the plane mirror 23 .

The plane mirror 23 of the light collecting member 20 is disposed above the mask 30 with the light reflection surface 24 of the plane mirror inclined at an angle of, for example, 45° with respect to the optical axis C of the reflector 15 .

In the light irradiation device described above, the light emitted from the light emitting unit 10 passes through the condensing member 20 and the mask 30 to irradiate the object to be irradiated W conveyed in the y direction by the conveyance member 40 . To describe in detail, in the light emitting part 10, the light radiated from the discharge lamp 13 of each light source element 12 of the light source element row 11 is reflected by the light reflection surface 16 of the reflector 15 of the light source element 12, thereby becoming a light along the light source element 12. The light parallel to the optical axis C of the reflector 15 is emitted from the light emitting surface 17 to the light collecting member 20 . Then, the light that becomes the parallel light emitted from the light emitting part 10 is condensed by the cylindrical convex lens 22 of the light condensing member 20 into a linear shape extending in the x direction, and passes through the light reflecting surface 24 of the plane reflector 23 downward. Reflected, and thus incident on the mask 30 . At this time, the light entering the mask 30 is parallel light parallel to each other in the x direction. Then, the light incident on the mask 30 is shaped into a strip shape by the light-shielding portion 35 and the light-transmitting portion 36 of the mask 30 and irradiated to the object W to be irradiated. On the surface, a belt-shaped light irradiation region corresponding to the pattern of the light-shielding portion 35 and the light-transmitting portion 36 of the mask 30 is formed, and the object W to be irradiated is transported in the y direction by the conveying member 40 to realize Light exposure treatment required.

According to the light irradiation device according to the second embodiment, the discharge lamp 13 constituting the light source element 12 is a short-arc discharge lamp as a point light source, and the discharge lamp 13 and the reflector 15 having the light reflection surface 16 of a paraboloid of revolution A plurality of light source elements 12 are arranged side by side in one direction (x direction) to form a light source element row 11 to constitute a light emitting part 10. The radiated light passes through each reflector 15 of the light source element 12 and becomes parallel light parallel to each other in one direction in which the light source element 12 is arranged. In this way, it is possible to prevent or suppress the radiation to the mask 30 located on the object W to be irradiated. The area directly under the light shielding portion 35 is irradiated with light, and as a result, a faithful and high-resolution pattern can be formed on the pattern of the mask 30 .

(third embodiment)

10 is a side cross-sectional view showing an outline of the configuration of a light irradiation device according to a third embodiment.

The light irradiation device according to the third embodiment is a device for manufacturing, for example, a patterned retardation film, and the configuration of the device includes: a light emitting part having a light source element row 11 composed of a plurality of, for example, three or more light source elements 12 10: Concentrate the light from the light emitting part 10 into a linear light concentrating member 20 extending in one direction (x direction) in which the light source elements 12 described later are arranged; shape the light from the light concentrating member 20 A belt-shaped mask 30 ; and a transport member 40 for transporting the object W to be irradiated. Here, the mask 30 and the transport member 40 have the same configuration as the mask 30 and the transport member 40 of the light irradiation device according to the first embodiment.

In the light source element row 11 constituting the light emitting portion 10 , each of the light source elements 12 is arranged in the x direction (direction perpendicular to the paper surface in FIG. 10 ) (see FIG. 4 ). Each of the light source elements 12 of the light source element row 11 has a short-arc type discharge lamp 13 formed by arranging a pair of electrodes (not shown) facing each other along the tube axis of the light emitting tube 14, and a light source to surround the discharge lamp. The reflector 19 that reflects the light from the discharge lamp 13 is arranged in the manner of 13 . Here, the discharge lamp 13 has the same configuration as the discharge lamp 13 of the light irradiation device according to the first embodiment.

In the light irradiation device according to the third embodiment, the reflector 19 is constituted by an elliptical condenser mirror having a spheroidal light reflection surface 16 centered on the optical axis C, and the reflector 19 is arranged such that the optical axis C is located at On the tube axis of the luminous tube 14 of the discharge lamp 13, and its first focal point F1 is located at the bright point between the electrodes of the discharge lamp 13, and its second focal point F2 is located at the position between the light irradiation part 10 and the condensing member 20, In this state, it is fixed to the discharge lamp 13 by the fixing member 18 .

In addition, in the light irradiation device according to the third embodiment, the condensing member 20 is composed of a cylindrical elliptical mirror 25 extending in the x direction having a light reflection surface 26 having an elliptical cross section perpendicular to the x direction, and a The compound lens 27 into which the light reflected by the cylindrical elliptical mirror 25 enters is constituted.

The cylindrical elliptical reflector 25 of the light-collecting part 20 is configured such that, in front of the light exit surface 17 perpendicular to the optical axis C of each reflector 19 of the light exit portion 10, its first focal point f1 is located at the second end of the reflector 19. On the focal point F2, the second focal point f2 is located on the surface of the object W to be irradiated.

As shown in FIG. 11 , the compound lens 27 of the light-condensing member 20 is arranged so that a plurality of cylindrical convex lenses 28 corresponding to each of the light source elements 12 of the light emitting part 10 are aligned in the x direction (left-right direction in FIG. 11 ). side by side. In addition, each of the cylindrical convex lenses 28 of the compound lens 27 is arranged such that its focal point is located at the second focal point F2 of the reflector 19 projected by the cylindrical elliptical mirror 25 in the direction in which its convex surface becomes the light incident surface.

In the light irradiation device described above, the light emitted from the light emitting unit 10 passes through the condensing member 20 and the mask 30 to irradiate the object to be irradiated W conveyed in the y direction by the conveyance member 40 . Specifically, in the light emitting part 10, the light emitted from the discharge lamp 13 of each light source element 12 of the light source element row 11 is reflected by the light reflecting surface 16 of the reflector 19 of the light source element 12, thereby emitting light from the light source element 12. Surface 17 exits toward cylindrical elliptical mirror 25 of light-collecting element 20 . Then, the light emitted from the light emitting portion 10 is reflected downward by the light reflecting surface 26 of the cylindrical elliptical mirror 25 , condensed into a linear shape extending in the x direction, and enters the mask 30 through the composite lens 27 . At this time, the light entering the mask 30 passes through each of the cylindrical convex lenses 28 of the compound lens 27 and becomes parallel light parallel to each other in the x direction. Then, the light incident on the mask 30 is shaped into a belt shape by the light shielding portion 35 and the light transmitting portion 36 of the mask 30 and is irradiated onto the object W to be irradiated. On the surface of the mask 30, a band-shaped light irradiation area corresponding to the pattern of the light shielding portion 35 and the light transmitting portion 36 is formed, and the object to be irradiated W is transported in the y direction by the conveying member 40, so that the object to be irradiated W completes the desired photoirradiation treatment.

According to the light irradiation device according to the third embodiment, the discharge lamp 13 constituting the light source element 12 is a short-arc discharge lamp as a point light source, and the discharge lamp 13 and the reflector having the spheroidal light reflection surface 16 are combined A plurality of light source elements 12 constituted by 19 are arranged side by side in one direction (x direction) to form a light source element row 11 to constitute a light emitting part 10, so the light emitted from each of the light source elements 12 constituting the light source element row 11 Through the cylindrical convex lens 28 of the compound lens 27 constituting the condensing member 20, parallel lights parallel to each other in one direction in which the light source elements 12 are arranged can be prevented or suppressed from being blocked by the mask 30 located on the object W to be irradiated. The area directly under the portion 35 is irradiated with light, and as a result, a faithful and high-resolution pattern can be formed on the pattern of the mask 30 .

(fourth embodiment)

12 is a side cross-sectional view showing an outline of the configuration of a light irradiation device according to a fourth embodiment.

The light irradiation device according to the fourth embodiment is a device for manufacturing, for example, a patterned retardation film, and is identical to the first The light irradiation device according to the embodiment has the same configuration.

Fig. 13 is an explanatory view showing the configuration of an example of a polarizing element, (a) is a perspective view, and (b) is a cross-sectional view along line A-A in (a). The polarizing element 45 is a metal wire grid polarizing element. On one surface of a rectangular transparent substrate 46 made of glass or quartz glass, for example, a plurality of metal wires 47 are arranged in a certain direction along a direction parallel to one side of the transparent substrate 46. configured at intervals. The arrangement pitch of the metal wires 47 is equal to or less than the wavelength of the light from the light emitting portion 10 . As the metal material constituting the metal wire 47, a metal having a high light reflectance is preferably used, and specifically, aluminum, silver, or the like is preferably used.

In such a polarizing element (wire grid polarizing element) 45, when light having a wavelength of about twice or more the arrangement pitch of the metal wires 47 is irradiated from the surface on which the metal wires 47 are arranged, it is reflected or absorbed in the light constituting the light. Of the vibration components, a component vibrating in the direction in which the metal wire 47 extends and a component vibrating in a direction perpendicular to the direction in which the metal wire 47 extends are transmitted to become linearly polarized light.

In the light irradiation device described above, the light emitted from the light emitting unit 10 passes through the condensing member 20 , the polarizer 45 , and the mask 30 to irradiate the object W to be irradiated W conveyed in the y direction by the conveyance member 40 . At this time, since the light from the condensing member 20 passes through the polarizing element 45 and becomes linearly polarized light, the object W to be irradiated is irradiated with the linearly polarized light.

In such a light irradiation device, a patterned retardation film can be produced as follows using a photo-alignment film material.

First, as shown in FIG. 14( a ), a liquid alignment film material layer 55A is formed on a film substrate 51 by applying a liquid alignment film material and drying or curing it.

Next, with respect to the photo-alignment film material layer 55A, a selective exposure process based on linearly polarized light is carried out by the above-mentioned light irradiation device, thereby forming an imprinted layer on the film substrate 51 as shown in FIG. 14( b ). The pattern is the strip-shaped first alignment film 55 .

Furthermore, through an appropriate light irradiation device, the entire surface is exposed to the polarized light irradiated in Fig. 14(b) and the linearly polarized light whose polarization direction differs by 90°, so that as shown in Fig. 14(c) , the second photo-alignment film 56 is formed between adjacent first photo-alignment films 55 .

Next, as shown in FIG. 14( d), on the surfaces of the first photo-alignment film 55 and the second photo-alignment film 56, a photopolymerizable liquid crystal material layer 57A is formed, and then, with respect to the photopolymerizable liquid crystal material layer 57A, Expose the entire surface with an appropriate light irradiation device to harden the photopolymerizable liquid crystal material layer 57A, thereby forming the first layer to be formed on the first photo-alignment film 55 as shown in FIG. 14( e). The liquid crystal polymer layer 57 and the liquid crystal polymer layer 59 formed by patterning the second liquid crystal polymer layer part 58 different from the alignment state of the liquid crystal in the first liquid crystal polymer layer part 57 in a band shape, thereby obtaining a patterned Retardation film.

According to this light irradiation device, the same effect as that of the light irradiation device according to the first embodiment can be obtained, and linearly polarized light can be irradiated to the object W to be irradiated, so it is extremely suitable as a method for producing a patterned phase using a material for a photo-alignment film. Light irradiation device for poor films.

(fifth embodiment)

15 is a front view showing a light emitting unit of a light irradiation device according to a fifth embodiment. The light irradiation device according to the fifth embodiment has the same configuration as that of the light irradiation device according to the first embodiment except for the light emitting unit.

The light emitting part 10 of this light irradiation device is arrange|positioned and comprised so that two light source element rows 11a, 11b may extend in the same direction mutually. Specifically, each of the light source element rows 11a, 11b is arranged so that a plurality of light source elements 12 are arranged side by side in one direction (x direction), each of the light source elements 12 has a short-arc discharge lamp 13, and The reflector 15 that reflects the light from the discharge lamp 13 is disposed so as to surround the discharge lamp 13 . The discharge lamp 13 and the reflector 15 have the same configuration as the discharge lamp 13 and the reflector 15 of the light irradiation device according to the first embodiment.

In addition, the two light source element rows 11a and 11b are arranged such that a straight line T that connects the electrodes of the discharge lamps 13 of the light source elements 12 related to one light source element row 11a obliquely intersects with the straight line X extending in the x direction. and the center point between electrodes of the discharge lamp 13 of the light source element 12 related to the other light source element row 11 b that is closest to the light source element 12 .

16 is a graph showing the illuminance distribution in the x direction of the light irradiation area when the light from the light emitting unit is condensed by the light condensing member in the light irradiation device according to the fifth embodiment. In this figure, the vertical axis represents the relative illuminance, the horizontal axis represents the relative position in the x direction, the curve (1) is the illuminance distribution curve of the light irradiation area formed by the light from one light source element row, and the curve (2) is from another The illuminance distribution curve of the light irradiated area formed by the light of a light source element row, the curve (3) is the illuminance distribution curve of the light irradiated area formed by the light from the entire light emitting part.

As shown in FIG. 16, in the illuminance distribution formed by the light from any one of the light source element row and the other light source element row, the light irradiation areas formed by the light from the light source elements of the light source element row do not overlap with each other. Arranged ground, so the difference between the maximum and minimum illuminance is extremely large. In contrast, in the illuminance distribution formed by the light from the entire light emitting portion, the light irradiation area formed by the light from one light source element row overlaps with the light irradiation area formed by the light from the other light source element row, and It can be understood that the maximum value position of the illuminance of the light irradiation area formed by the light from one light source element column and the maximum value position of the illuminance of the light irradiation area formed by the light from another light source element column are different from each other, Therefore, the difference between the maximum value and the minimum value of the illuminance is extremely small, and a uniform illuminance distribution can be obtained.

In this way, according to the light irradiation device according to the fifth embodiment, the same effect as that of the light irradiation device according to the first embodiment can be obtained, and since the light emitting part makes the two light source element rows 11 respectively extending in the same direction a specific Since it is arranged in a positional relationship, it is possible to emit light having a uniform illuminance distribution in the x direction.

(sixth embodiment)

17 is a perspective view showing a schematic configuration of a light irradiation device according to a sixth embodiment, and FIG. 18 is a side cross-sectional view showing the light irradiation device shown in FIG. 17 along line A-A.

The light irradiation device according to the sixth embodiment is a device for forming a linear pattern with respect to, for example, a flat plate-shaped object W to be irradiated, and the front of the light emitting direction of the light emitting part 10 is an arrangement plane instead of the light collecting member. Except for the configuration of the reflection mirror 70 , it has the same configuration as that of the light irradiation device according to the first embodiment.

The plane reflector 70 forms a light reflection surface by applying a cold mirror coating that reflects only ultraviolet rays of a target wavelength and transmits unnecessary visible light and infrared rays on one surface of a flat base material made of quartz glass, for example. 71.

The plane mirror 70 is in a state where the normal line of the light reflection surface 71 is inclined at an angle of 45° with respect to the optical axis C of the reflector 15, for example (when the reflected light generated by the plane mirror 70 enters the mask from its normal direction) 30 state) configuration.

The object W to be irradiated is, for example, a substrate made of quartz glass and a polymer material for liquid crystal panel manufacture, and strip-shaped liquid crystal polymer layers 53 and 59 shown in FIG. 7 or FIG. 14 are formed on the surface.

The object to be irradiated W is, for example, a conveyance member (not shown) constituted by a table that conveys the object to be irradiated W parallel to the light-transmitting substrate 31 of the mask 30 in the y direction. (x direction) is conveyed in the direction (y direction) perpendicular to it.

In the light irradiation device described above, the light emitted from the light emitting unit 10 passes through the flat mirror 70 and the mask 30 to irradiate the object W to be irradiated which is conveyed in the y direction by the conveyance member 40 . Specifically, in the light emitting part 10, the light emitted from the discharge lamp 13 of each light source element 12 of the light source element row 11 is reflected by the light reflection surface 16 of the reflector 15 of the light source element 12, thereby becoming a The light parallel to the optical axis C of the body 15 is emitted from the light exit surface 17 to the flat mirror 70 . Then, the parallel light emitted from the light emitting portion 10 is reflected toward the mask 30 by the light reflecting surface 71 of the plane mirror 70 as a strip-shaped light extending in the x direction. The band-shaped light entering the mask 30 is parallel light parallel to each other in the x direction. Then, the light incident on the mask 30 is shaped into a strip shape by the light shielding portion 35 and the light transmitting portion 36 of the mask 30 , and is irradiated to the object W to be irradiated. In this way, on the surface of the object to be irradiated W, a belt-shaped light irradiation region corresponding to the pattern of the light shielding portion 35 and the light transmitting portion 36 of the mask 30 is formed, and the object to be irradiated W is transported in the y direction by the transport member, In this way, the required photoirradiation process for the object W to be irradiated is completed.

According to the light irradiation device according to the sixth embodiment, the same effect as that of the light irradiation device according to the above-mentioned first embodiment can be obtained.

As mentioned above, although embodiment of this invention was described, this invention is not limited to these embodiment, Various changes are possible.

In, for example, the second embodiment, the third embodiment, and the sixth embodiment, a polarizing element can be arranged in the same manner as in the fourth embodiment.

In addition, the position where the polarizing element is arranged should only be on the optical path between the light emitting part and the mask, so it is not limited to the optical path between the light collecting member and the mask, and may be, for example, between the light emitting part and the light collecting member. on the light path between.

The light irradiation device according to the sixth embodiment is also applicable when a large effective irradiation width d is allowed when forming a linear pattern with respect to a film-like object to be processed.

In addition, the light emitting part can also be arranged so that three or more light source element rows extending in the x direction can pass through the center point of the electrode of the discharge lamp of the light source element involved in one light source element row and the electrode center point closest to the light source element. The straight line connecting the electrode center points of the discharge lamps of the light source elements involved in the other light source element row is oblique to the straight line extending in the x direction.

As a modified example of the light irradiation device according to the fifth embodiment, for example, a light irradiation device having a light emitting unit composed of four light source element rows is configured. It is a graph of the illuminance distribution in the x direction of the light irradiation area when the light from the light emitting part is condensed by the condensing member. In this figure, the vertical axis represents the relative illuminance, the horizontal axis represents the relative position in the x direction, the curve (1) is the illuminance distribution curve of the light irradiation area formed by the light from the light source element row of the first row, and the curve (2) is From the illuminance distribution curve of the light irradiation area formed by the light of the light source element row of the second row, curve (3) is the illuminance distribution curve of the light irradiation area formed by the light of the light source element row from the third row, and curve (4) is The illuminance distribution curve of the light irradiation area formed by the light from the fourth light source element row, the curve (5) is the illuminance distribution curve of the light irradiation area formed by the light from the entire light emitting part.

As shown in FIG. 19, in the illuminance distribution formed by the light of any one of the light source element rows, the light irradiation areas formed by the light of each light source element from the light source element row are arranged so as not to overlap each other, so the maximum illuminance The difference between the value and the minimum value is extremely large. In contrast, in the illuminance distribution formed by the light from the entire light emitting portion, the light irradiation areas formed by the light from each light source element column in the first column to the fourth column overlap, and it can be understood that, Since the positions of the maximum values of the illuminance in the light irradiation area formed by the light from each light source element row are different from each other, the difference between the maximum value and the minimum value of the illuminance is extremely small compared with the light emitting device according to the fifth embodiment. A more uniform illuminance distribution can be obtained.

Claims (14)

1. a light irradiation device, is characterized in that, possesses:

Light injection part, described smooth injection part has and is configured abreast in one direction by multiple light source component and the light source component row that form, and described light source component is by short arc discharge lamp and being formed the reflecting body that the light from this discharge lamp reflects of configuring in the mode of surrounding this discharge lamp;

Mask, multiple light shielding part of the wire extended on the direction vertical with an above-mentioned direction respectively and multiple transmittance section alternately configure abreast and form by described mask on an above-mentioned direction; And

Light concentrating components, light optically focused from above-mentioned smooth injection part is the wire extended on an above-mentioned direction by described light concentrating components, and being radiated on the shone thing of film-form through aforementioned mask, the direction that above-mentioned shone thing extends along the transmittance section of aforementioned mask under the state contacted with roller is carried

From the light of above-mentioned smooth injection part, incident to aforementioned mask under the state that an above-mentioned direction becomes directional light parallel to each other, and be radiated at the position contacted with above-mentioned roller of above-mentioned shone thing.

2. light irradiation device according to claim 1, is characterized in that:

Light path between above-mentioned smooth injection part and aforementioned mask is configured with polarizer.

3. light irradiation device according to claim 1, is characterized in that:

Above-mentioned reflecting body is the parts of the light reflection surface of the rotary parabolic planar had centered by its optical axis, and above-mentioned light concentrating components is that the cylindrical mirror of parabolic light reflection surface is formed by having section.

4. light irradiation device according to claim 2, is characterized in that:

Above-mentioned reflecting body is the parts of the light reflection surface of the rotary parabolic planar had centered by its optical axis, and above-mentioned light concentrating components is that the cylindrical mirror of parabolic light reflection surface is formed by having section.

5. light irradiation device according to claim 1, is characterized in that:

Above-mentioned reflecting body is the parts of the light reflection surface of the rotary parabolic planar had centered by its optical axis, and above-mentioned light concentrating components has circular cylindrical projection lens.

6. light irradiation device according to claim 2, is characterized in that:

Above-mentioned reflecting body is the parts of the light reflection surface of the rotary parabolic planar had centered by its optical axis, and above-mentioned light concentrating components has circular cylindrical projection lens.

7. light irradiation device according to claim 1, is characterized in that:

Above-mentioned reflecting body is the parts of the light reflection surface of the ellipse of revolution planar had centered by its optical axis, above-mentioned light concentrating components is by having cylindrical mirror that section is elliptoid light reflection surface and multiple circular cylindrical projection lens are formed, and the light source component of described circular cylindrical projection lens and above-mentioned smooth injection part configures abreast accordingly on an above-mentioned direction.

8. light irradiation device according to claim 2, is characterized in that:

Above-mentioned reflecting body is the parts of the light reflection surface of the ellipse of revolution planar had centered by its optical axis, above-mentioned light concentrating components is by having cylindrical mirror that section is elliptoid light reflection surface and multiple circular cylindrical projection lens are formed, and the light source component of described circular cylindrical projection lens and above-mentioned smooth injection part configures abreast accordingly on an above-mentioned direction.

9. the light irradiation device according to any one of claim 1 to 8, is characterized in that:

Above-mentioned smooth injection part has at least two the light source component row extended in the same direction respectively, these light source components row are configured to, between the electrode connecting the discharge lamp in the light source component involved by light source component row central point and closest to this light source component another light source component row involved by light source component in discharge lamp electrode between the straight line of central point and the straight line oblique extended on an above-mentioned direction

The light irradiation area formed from the light of above-mentioned light source component row and penetrate region overlap from the illumination that the light of above-mentioned another light source component row is formed.

10. the light irradiation device according to any one of claim 1 to 8, is characterized in that:

Above-mentioned shone thing is optical polymerism liquid crystal material or the aligning film material of phase-contrast film manufacture.

11. light irradiation devices according to claim 9, is characterized in that:

Above-mentioned shone thing is optical polymerism liquid crystal material or the aligning film material of phase-contrast film manufacture.

12. 1 kinds of light illuminating methods, is characterized in that:

Make from have multiple light source component is configured in one direction abreast and form light source component row light injection part injection light, be radiated at through mask on shone thing, described light source component is by short arc discharge lamp and being formed the reflecting body that the light from this discharge lamp reflects of configuring in the mode of surrounding this discharge lamp, multiple light shielding part of the wire extended on the direction vertical with an above-mentioned direction respectively and multiple transmittance section alternately configure abreast and form by described mask on an above-mentioned direction

Be the wire extended on an above-mentioned direction by light concentrating components by the light optically focused from above-mentioned smooth injection part, and it is incident to aforementioned mask under the state becoming directional light parallel to each other on an above-mentioned direction, and being radiated on the position contacted with roller of the shone thing of film-form through this mask, the direction that above-mentioned shone thing extends along the transmittance section of aforementioned mask under the state contacted with above-mentioned roller is carried.

13. light illuminating methods according to claim 12, is characterized in that:

Polarized light is irradiated by the polarizer that the light path between above-mentioned smooth injection part and aforementioned mask configures.

14. light illuminating methods according to claim 12 or 13, is characterized in that:

Above-mentioned shone thing is optical polymerism liquid crystal material or the aligning film material of phase-contrast film manufacture.