CN102414811A - Movable stage, and conveying device and charged particle beam device both having same - Google Patents
Movable stage, and conveying device and charged particle beam device both having same Download PDFInfo
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- CN102414811A CN102414811A CN2009801589612A CN200980158961A CN102414811A CN 102414811 A CN102414811 A CN 102414811A CN 2009801589612 A CN2009801589612 A CN 2009801589612A CN 200980158961 A CN200980158961 A CN 200980158961A CN 102414811 A CN102414811 A CN 102414811A
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- 239000002245 particle Substances 0.000 title claims description 24
- 238000012360 testing method Methods 0.000 claims description 23
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000006866 deterioration Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20221—Translation
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Chemical & Material Sciences (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Electron Beam Exposure (AREA)
Abstract
A movable stage has a first stage (12) movable in a first direction, a second stage (13) having at least a portion thereof located on the first stage (12) and movable in a second direction crossing the first direction, a generating section (MY) for generating drive power for moving the second stage (13) in the second direction, and power transmitting section (17, 20) for transmitting the drive power from the generating section (MY) to the second stage (13) and having at least a portion thereof adapted to operate as the first stage (12) moves.
Description
Technical field
The present invention relates in for example semiconductor-fabricating device or liquid crystal manufacturing installation, to be used to the transport and the charged particle beam apparatus of carrying the travelling carriage of test portion and having this travelling carriage.
Background technology
As the device that when making semiconductor equipment, uses, the pattern plotter device and the testing fixture that use electron beam or ion beam are arranged.In these devices, the travelling carriage that uses in order to make test portion move to the target location for example disposes the X platform that moves along X-direction on pedestal, and on the X platform, disposes the Y platform that moves along Y direction.And; Proposition has and a kind ofly with the mode parallel with the moving direction of X platform the Y platform is provided with sliding part; And be the setting of Y driving shaft by the structure (for example, TOHKEMY 2007-184193 communique) of stationary roll and the roller hook portion (ロ one ラ Off Star Network portion) that constitutes by pressure roller to power transfering part.In this structure, the Y driving shaft is fixed in linear motor, and sliding part can move along X-direction between at stationary roll and by pressure roller.
Yet, in the structure of patent documentation 1, skid easily, thereby can produce the problem of the positional precision variation of Y platform at sliding part and between by pressure roller and stationary roll.
Therefore, pursue the technology that a kind of positional precision that suppresses platform worsens.
Summary of the invention
The travelling carriage of a form of the present invention has first, second, generation portion, power transfering part.First can be moved along first direction.Second its at least a portion is positioned on first platform and can moves along the second direction of intersecting with first direction.Generation portion generates and to be used to the actuating force that makes second to move along second direction.To second transmission of drive force, and at least a portion is accompanied by first moving and moving to power transfering part from generation portion.
The transport of a form of the present invention has the controller of the travelling carriage and the action of control generation portion.
The charged particle beam apparatus of a form of the present invention has and can upload the transport of putting test portion and be arranged on second top and to the charged particle electron gun of test portion irradiation charged particle beam to second.
Travelling carriage and transport according to a form of the present invention can suppress the deterioration of the positional precision of platform.
According to the charged particle beam apparatus of a form of the present invention, can shine charged particle beam to the desirable position of counterpart more accurately.
Description of drawings
Fig. 1 is the vertical view of the travelling carriage of first execution mode of the present invention.
Fig. 2 is the end view of the travelling carriage of first execution mode of the present invention, is to observe and the end view that obtains from the arrow A direction of Fig. 1.
Fig. 3 is the cutaway view at the B-B line place of Fig. 1.
Fig. 4 is the cutaway view of the part of being surrounded by dotted line C of Fig. 1, be Fig. 2 the D-D line the cross section overlook the figure when observing.
Fig. 5 is the vertical view of the travelling carriage of second execution mode of the present invention.
Fig. 6 is the end view of the travelling carriage of second execution mode of the present invention, is to observe and the end view that obtains from the arrow E direction of Fig. 5.
Fig. 7 is the figure in cross section of a part and gear part of rotating shaft at the F-F line place of presentation graphs 6.
Fig. 8 is the vertical view of a variation of the travelling carriage of second execution mode of the present invention.
Fig. 9 is the figure when the arrow G direction is observed in cross section of a part and gear part of rotating shaft at the H-H line place of Fig. 8.
Figure 10 is the vertical view of the travelling carriage of the 3rd execution mode of the present invention, especially at length representes the figure of the structure of micro-adjusting mechanism.
Figure 11 is the cutaway view at the J-J line place of Figure 10.
Figure 12 is the vertical view of a variation of the travelling carriage of the 3rd execution mode of the present invention.
Figure 13 is the figure of structure of micro-adjusting mechanism that at length representes the travelling carriage of Figure 12.
Figure 14 is the cutaway view at the K-K line place of Figure 13.
Figure 15 is the vertical view of the structure example of expression transport of the present invention.
Figure 16 is the end view of structure example of the charged particle beam apparatus of the expression travelling carriage that used execution mode of the present invention.
Embodiment
Below, with reference to accompanying drawing, execution mode of the present invention is described at length.Need to prove that the whole accompanying drawing acceptance of the bid beyond Fig. 4 is marked with X axle, Y axle and the Z axle of orthogonal coordinate system.And, for the ease of explanation, be marked with in Fig. 1, Fig. 5, Fig. 8, Figure 10, Figure 12, Figure 13, Figure 15 acceptance of the bid and overlook invisible Y ball-screw 17 when observing travelling carriage 1.
(first execution mode)
Like Fig. 1-shown in Figure 3, the travelling carriage 1A of first execution mode have base station 11, on the base station 11 can along X-direction linearly the X platform 12 that moves of shape, can be on X platform 12 along the Y direction Y platform 13 that moves of shape linearly.And travelling carriage 1A has: the X straight line guiding piece 14 that is provided with the mode of extending along X-direction at the upper surface of base station 11; The Y straight line guiding piece 15 that is provided with the mode of extending at the upper surface of X platform 12 along Y direction.X platform 12 is by 14 guiding of X straight line guiding piece, and Y platform 13 is by 15 guiding of Y straight line guiding piece.It is in the vacuum chamber 3 of making such as pure iron, mild steel or permalloy that base station 11, X platform 12 and Y platform 13 are configured in by the ferromagnetism body.
Need to prove that X straight line guiding piece 14 is provided with Y straight line guiding piece 15 mode with quadrature when overlooking observation, the test portions such as wafer that therefore are configured on the travelling carriage 1A can move in the XY plane freely.
Likewise, Y platform 13 also drives through Y electromagnetic motor MY.Particularly, Y platform 13 with X platform 12 opposed surfaces on the lead screw shaft of the Y ball-screw 17 that is provided with under the effect of the driving torque that Y electromagnetic motor MY is produced, rotate.At this, Y ball-screw 17 is installed in the central portion on the X-direction of Y platform 13.When the lead screw shaft of Y ball-screw 17 was rotated, Y platform 13 was guided by Y straight line guiding piece 15 on X platform 12 and moves.At least a portion of Y platform 13 is positioned on the X platform 12.Need to prove that in the travelling carriage 1A of this execution mode, the driving torque that X electromagnetic motor MX and Y electromagnetic motor MY are generated is meant rotating torques.
In addition, X electromagnetic motor MX and Y electromagnetic motor MY heating and magnetic field on every side may changes, therefore are installed in respectively on the outside wall surface of vacuum chamber 3.The inner space that thus, can suppress vacuum chamber 3 receives the situation of the influence of these heatings and field variation.For example, in the inside of vacuum chamber 3, when semiconductor wafer is described, can suppress the situation that charged particle beam bends because of magnetic field.
In addition, make the variations such as rotation number and rotary speed of X ball-screw 16, and can control the moving of X-direction of X platform 12 through utilizing X electromagnetic motor MX.Likewise, make the variations such as rotation number and rotary speed of Y ball-screw 17, and can control the moving of Y direction of Y platform 13 through utilizing Y electromagnetic motor MY.
At this, Y ball-screw 17 transmits driving torque from Y electromagnetic motor MY via driving torque transfer part 20.Below, with reference to Fig. 4, the detailed structure of driving torque transfer part 20 is described.
Driving torque transfer part 20 has: middle rotating shaft 21; Can freely be rotated mobile two arms 22,23 around middle rotating shaft 21; At the both ends of the first arm 22 through two flat tyre wheels of configuration (below, be called " pulley ") 24,25 rotatably such as bearing; At the both ends of second arm 23 through two flat tyre wheels (pulley) 26,27 of configuration rotatably such as bearing.And driving torque transfer part 20 also has: the flat rubber belting 28 that is erected at the ring-type between pulley 24 and the pulley 25; Be erected at the flat rubber belting 29 of the ring-type between pulley 26 and the pulley 27; Be used for each flat rubber belting 28,29 is applied the straining pulley 30,31 of certain tension force.
Driving torque transfer part 20 links Y electromagnetic motor MY and Y platform 13.Below, the connection status of driving torque transfer part 20 with Y platform 13 and Y electromagnetic motor MY described.Pulley 24 is via shaft coupling 41 and driving shaft 42 and be connected with the motor reel 40 of Y electromagnetic motor MY.This driving shaft 42 is connected with pulley 24 securely, and the rotating torques of Y electromagnetic motor MY is transmitted to pulley 24.
In addition, the first arm 22 is fixed on the middle rotating shaft 21.Rotating shaft 21 in the middle of pulley 25,26 is installed on via pair of bearings 48.Thus, pulley 25,26 is not rotated by the first arm 22 can with interfering.Need to prove that at this, pulley 25,26 one constitute.
Then, middle rotating shaft 21 is connected with second arm 23 via pair of bearings 49.Thus, middle rotating shaft 21 can rotate with respect to second arm 23.
Second arm is fixed in transmitter shaft 51 via pair of bearings 50.That is, transmitter shaft 51 can rotate with respect to second arm 23.Be fixed with pulley 27 at transmitter shaft 51.
And transmitter shaft 51 links through shaft coupling 52 and Y ball-screw 17.The lead screw shaft of Y ball-screw 17 is rotated corresponding to the rotation of transmitter shaft 51.Because this rotation, Y platform 13 moves along Y direction.
The first arm 22 and second arm 23 can be that the center is rotated with middle rotating shaft 21.When X platform 12 moved, middle rotating shaft 21 was along moving with X axle and the vertical Z-direction of Y axle, and the first arm 22 and second arm, 23 angulations change.Particularly, when the distance when being accompanied by moving of X platform 12 between driving shaft 40 and the transmitter shaft 51 reduced, middle rotating shaft 21 moved and moves up along Z-direction along X-direction, and the first arm 22 and second arm, 23 angulations reduce.That is the driving torque transfer part 20 that, has the first arm 22 and second arm 23 becomes the state that shrinks along X-direction.
On the other hand; When the distance when being accompanied by moving of X platform 12 between driving shaft 40 and the transmitter shaft 51 increases; Middle rotating shaft 21 moves along X-direction; And the mode that the distance between (and transmitter shaft 51) reduces so that middle rotating shaft 21 and driving shaft 40 along Z-direction moves the first arm 22 and the increase of second arm, 23 angulations.That is, driving torque transfer part 20 becomes along the state of X-direction elongation.
So, in travelling carriage 1A, ball-screw 17 is fixed in Y platform 13, is accompanied by moving of X platform 12, and the driving torque transfer part 20 with the first arm 22 and second arm 23 is stretched along X-direction.
As stated, in the travelling carriage 1A of this execution mode, be accompanied by moving of X platform 12, deform to the driving torque transfer part of Y platform 13 transmission of drive force from Y electromagnetic motor MY.The driving torque transfer part is accompanied by moving of X platform 11 and deforms.At this, driving torque transfer part 20 has by Y electromagnetic motor MY and drives and drive shaft rotating 42, middle rotating shaft 21, transmitter shaft 51, flat rubber belting 28,29, the first arm 22 and second arm 23 etc.
This driving torque transfer part 20 is connected with the Y ball-screw 17 that rotatably is installed on Y platform 13.And, be accompanied by moving of X platform 12 and the length of the X-direction of driving torque transfer part 20 changes.Need to prove, in travelling carriage 1A, will comprise driving torque transfer part 20 and Y ball-screw 17 is called power transfering part in interior structure.And when driving torque transfer part 20 deformed, power transfering part integral body also deformed.
As stated, in the travelling carriage 1A of this execution mode, power transfering part is accompanied by moving of X platform 11 and moves.Thus, though at Y platform 13 when X-direction moves, power transfering part also can keep the positional precision of this Y platform 13 and transmission of drive force simultaneously.And, in travelling carriage 1A,, therefore compare in situation about being fixed on the X-direction on the assigned position with power transfering part owing to power transfering part is accompanied by moving of X platform 11, can reduce the load that imposes on power transfering part.Thus, can suppress Y platform 13 and receive the situation of reaction force, so can suppress the attitude accuracy of Y platform 13 and the deterioration of positional precision from power transfering part.Thus, the deviation of the target location that can further reduce the test portion that will move to through travelling carriage 1A and the physical location of the test portion that moves to (below, abbreviate " position deviation of test portion " as).
In addition; In the travelling carriage 1A of this execution mode; Impose on the central portion on the X-direction of Y platform 13 from the actuating force of Y electromagnetic motor MY via Y ball-screw 17, therefore can suppress unnecessary turning moment and impose on Y platform 13 and make Y platform 13 produce the situation of the rotation on pitch orientation and the yawing moment.Thus, can keep the attitude accuracy of Y platform 13 more well, and suppress the situation of test portion with respect to X, Y direction and the run-off the straight of XY plane.Thus, can further reduce the position deviation of test portion.
Need to prove that the outer peripheral face that pulley 24,25,26,27 and flat rubber belting 28,29 join is preferably convex surface.Like this, when the outer peripheral face of pulley 24,25,26,27 is convex surface, flat rubber belting 28,29 difficult drop-offs.
In the travelling carriage 1A of this execution mode, flat rubber belting 28,29 is made up of for example stainless steel (SUS).And the size of flat rubber belting 28,29 for example its thickness is 0.08mm, and width is 5mm.
In addition; The width of the part of confession flat rubber belting 28,29 contacts of pulley 24,25,26,27; Promptly; Length on the identical direction of the Width with flat rubber belting 28,29 of pulley 24,25,26,27 for example is 7mm, and when the outer peripheral face of pulley 24,25,26,27 was convex surface, the curvature of this convex surface for example was radius 90mm.
In addition, in the travelling carriage 1A of this execution mode, used flat rubber belting 28,29, as long as but can when keeping certain force of strain, be rotated, and transmit rotating torques to transmitter shaft 51 from driving shaft 42, also can use other tension lines such as chain for example.
In addition, X platform 12 and Y platform 13 preferably are made up of pottery.The common proportion than metal of pottery is little and modulus of rigidity is high; Therefore; When utilizing pottery to form X platform 12 and Y platform 13 (below, when not distinguishing X platform 12 and Y platform 13, be called " platform 12,13 "); Also be difficult for deforming even the thickness of platform 12,13 is thin, can reduce to drive the actuating force of platform 12,13.This can bring and can prolong during band durable and reduce effects such as consumes electric power.And, not yielding even platform 12,13 is applied in stress when platform 12,13 is made up of pottery yet, when applying actuating force, can move immediately.Consequently, can further improve the positional precision and the attitude accuracy of platform.
In addition, because pottery is littler than the coefficient of thermal expansion of metal, even therefore the temperature of platform 12,13 changes, its size also is difficult for changing, thereby can come platform is positioned with higher precision.
In addition, X straight line guiding piece 14 and Y straight line guiding piece 15 preferably are made up of pottery.Need to prove, in the travelling carriage 1A of this execution mode, used LM guiding piece (Linear Motion Guide), but also can be intersection roller guiding piece.When X straight line guiding piece 14 and Y straight line guiding piece 15 were pottery, mar proof and specific stiffness improved, so straight line guiding piece 14,15 is not easy to wear and maintenance management is easy, thereby can further improve the positional precision and the attitude accuracy of platform.
In addition,, preferably utilize non-magnetic stainless steel to form the lead screw shaft of X ball-screw 16 and Y ball-screw 17, and utilize high-strength ceramic such as silicon nitride to form the inner ball of nut in order further to reduce field variation.
(second execution mode)
Next, second execution mode of the present invention is described.The difference of the travelling carriage of the travelling carriage of second execution mode and first execution mode is the structure of power transfering part.To shown in Figure 7, the power transfering part of travelling carriage 1B has rotating shaft 60 and gear part 61 like Fig. 5.Rotating shaft 60 is connected with Y electromagnetic motor MY, and on X-direction, is fixed on assigned position.Gear part 61 is connected with rotating shaft 60, is accompanied by moving of X platform 12 and can moves along X-direction.And gear part 61 is accompanied by the rotation of rotating shaft 60 and is rotated.The lead screw shaft of ball-screw 17 is connected with gear part 61.Rotating shaft 60 is rotated under the effect of the actuating force that Y electromagnetic motor MY is applied, and the lead screw shaft of ball-screw 17 is rotated corresponding to the rotation of gear part 61.Need to prove, in Fig. 5 to Fig. 7, use worm gear as gear part 61.
Gear part 61 has helical gear (Screw gear) 61a and angular gear 61b (helical gear).Angular gear 61b is connected with rotating shaft 60.Helical gear 61a is connected with the lead screw shaft of ball-screw 17.Thus, when rotating shaft 60 rotations, angular gear 61b also rotates, and the helical gear 61a that meshes with angular gear 61b also rotates.The lead screw shaft of the ball-screw 17 that consequently, is connected with helical gear 61a is also rotated.Angular gear 61b is connected with rotating shaft 60 via straight line roller bearing 62.
Straight line roller bearing 62 portion within it has the roller groove.And rotating shaft 60 has the groove 63 with the linearity of axially parallel on its surface.Straight line roller bearing 62 has a plurality of spherical rollers.The groove 63 of above-mentioned roller groove and rotating shaft 60 is as the guiding of these rollers and play a role.And a plurality of rollers can circulate when self is rotated along the groove 63 of above-mentioned roller groove and rotating shaft 60.Thus, straight line roller bearing 62 can move along the groove 63 of rotating shaft 60.Consequently, angular gear 62b can move along X-direction.
In addition, angular gear 61b is kept by gear maintaining part 65 via bearing 64.Through this bearing 64, angular gear 61b can rotate with respect to gear maintaining part 65.Thus, angular gear 61b can be accompanied by the rotation of rotating shaft 60 and be rotated.
Through above structure, gear part 61 is accompanied by moving of X platform 12 and can moves along X-direction, and can be rotated corresponding to the rotation of rotating shaft 60.Thus, make rotating shaft 60 rotations through utilizing Y electromagnetic motor MY, and can make ball-screw 17 rotations, thereby Y platform 13 is moved.And, change rotation number and the rotary speed etc. of Y ball-screw 17 through utilizing Y electromagnetic motor MX, and can control the moving of Y direction of Y platform 11.
In addition, like Fig. 8 and shown in Figure 9,, also can use the gear of other kinds as gear part 61.The gear part 61 of Fig. 8 and travelling carriage 1C shown in Figure 9 has two bevel gears (bevel gear) 61a, 61b.A bevel gear 61b is connected with rotating shaft 60, and another bevel gear 61a is connected with the lead screw shaft of ball-screw 17.Thus, when rotating shaft 60 rotations, bevel gear 61b also rotates, and 61a also rotates with bevel gear 61b meshed bevel gears.The lead screw shaft of the ball-screw 17 that consequently, is connected with bevel gear 61a is also rotated.Bevel gear 61b is connected with rotating shaft 60 via straight line roller bearing 62.
Straight line roller bearing 62 portion within it has the roller groove.And rotating shaft 60 has the groove 63 with the linearity of axially parallel on its surface.Straight line roller bearing 62 has a plurality of spherical rollers.The groove 63 of above-mentioned roller groove and rotating shaft 60 is as the guiding of these rollers and play a role.And a plurality of rollers can circulate when self is rotated along the groove 63 of above-mentioned roller groove and rotating shaft 60.Thus, straight line roller bearing 62 can move along the groove 63 of rotating shaft 60.Consequently, bevel gear 61b can move along X-direction.
In addition, bevel gear 61b is kept by gear maintaining part 65 via bearing 64.Through this bearing 64, angular gear 61b can rotate with respect to gear maintaining part 65.Thus, bevel gear 61b can be accompanied by the rotation of rotating shaft 60 and be rotated.
Through above structure, bevel gear 61b is accompanied by moving of X platform 12 and can moves along X-direction, and can be rotated corresponding to the rotation of rotating shaft 60.Thus, make rotating shaft 60 rotations through utilizing Y electromagnetic motor MY, and can make ball-screw 17 rotations, thereby Y platform 13 is moved.And, change rotation number and the rotary speed etc. of Y ball-screw 17 through utilizing Y electromagnetic motor MX, and can control the moving of Y direction of Y platform 11.
In above-mentioned travelling carriage 1B, 1C, power transfering part has: the rotating shaft 60 that on X-direction, is fixed on assigned position; With the gear part 61 that can be connected with rotating shaft 60 along the mode that X-direction moves.According to this structure, the gear part 61 of power transfering part is accompanied by moving of X platform 11 and moves, even so power transfering part at Y platform 13 when X-direction moves, also can keep the positional precision and the transmission of drive force of this Y platform 13.And in travelling carriage 1B, 1C, power transfering part is accompanied by moving of X platform 11 and moves, and therefore compares with power transfering part is fixed on assigned position on X-direction situation, can reduce the load that imposes on power transfering part.Thus, can suppress Y platform 13 and receive the situation of reaction force, so can suppress the attitude accuracy of Y platform 13 and the deterioration of positional precision from power transfering part.Thus, can further reduce the position deviation of test portion.
(the 3rd execution mode)
Next, the 3rd execution mode of the present invention is described.The difference of the travelling carriage of the travelling carriage of the 3rd execution mode and first execution mode is to have the micro-adjusting mechanism that the position of the Y platform 13 on the Y direction is finely tuned.Micro-adjusting mechanism is arranged at Y platform 13.Through this micro-adjusting mechanism, can finely tune the position of the Y platform 13 on the Y direction.
In the travelling carriage of this execution mode, like Figure 10 and shown in Figure 11, micro-adjusting mechanism has the adjustment member 70 and a plurality of piezoelectric elements 71 that is installed on Y platform 13.Adjustment member 70 is through screw 72, be installed in via roller 73 back side of Y platform 13, promptly be installed in Y platform 13 with 11 opposed of X platforms on.Of the back, when the position of Y platform 13 is finely tuned, owing to the screw 72 crooked Y platforms 13 that make relatively move with respect to adjustment member 70.And adjustment member 70 is fixed in nut 75, and this nut 75 is installed on the lead screw shaft of ball-screw 17.Thus, Y platform 13 can relatively move with respect to the adjustment member 70 that is fixed on the nut 75.Consequently, can finely tune the position on the Y direction of Y platform 13.
Fastening part 70b preferably is provided with similar number along Y direction in the both sides of platform part, so that the arbitrary direction of Y platform 13 on Y direction can both be with identical pressing force mobile phase same distance.Need to prove, in Figure 10 and Figure 11, be provided with a pair of fastening part 70b in the both sides of above-mentioned part.
A plurality of piezoelectric elements 71 are corresponding to a plurality of fastening part 70b.Each piezoelectric element 71 is configured between corresponding the fastening part 70b and Y platform 13.Each fastening part 70b is positioned at the both sides of the Y platform 13 on the Y direction for the piezoelectric element 71 before voltage is applied is pressed against Y platform 13.
These piezoelectric elements 71 at first with the state configuration that do not apply voltage between fastening part 70b and Y platform 13.At this moment, piezoelectric element 71 is to dispose in mode very close to each other between piezoelectric element 71 and the Y platform 13 and between piezoelectric element 71 and the fastening part 70b as far as possible.Then, piezoelectric element 71 is applied voltage and piezoelectric element 71 is stretched to about half of maximum elongation amount along the Y direction.Thus, between piezoelectric element 71 and the Y platform 13 and the gap complete obiteration between piezoelectric element 71 and the fastening part 70b or be reduced to negligible degree.
Then; When the position of Y platform 13 is adjusted; Be arranged in a plurality of piezoelectric elements 71 of the platform both sides partly of Y platform 13, make the piezoelectric element 71a elongation of a side that is positioned at this part, and make the piezoelectric element 71b that is positioned at opposite side shrink the amount identical with the elongation of piezoelectric element 71a.Thus, Y platform 13 relatively moves with respect to adjustment member 70, and consequently, Y platform 13 moves along Y direction.
Need to prove that though not shown, the flexible of piezoelectric element 71 carries out through these piezoelectric elements 71 are applied voltage.
According to the travelling carriage of this execution mode,, therefore after making X platform 11 and Y platform 13 move to the position of regulation, can finely tune the position on the Y direction of Y platform 13 through X electromagnetic motor MX and Y electromagnetic motor MY because micro-adjusting mechanism is set.
In addition, also can realize micro-adjusting mechanism through other structure.Figure 12 is to the difference of micro-adjusting mechanism shown in Figure 14 and Figure 10 and micro-adjusting mechanism shown in Figure 11: the length on the Y direction of base part 70a is longer than the length on the Y direction of Y platform 13, and fastening part 70b is arranged on the outside of the peripheral part of Y platform 13; And the peripheral part of piezoelectric element 71 and Y platform 13 configuration of joining.
And because base part 70a is long, therefore will adjusting member 70, to be installed on the number of screw 72 of Y platform 13 many.
In this structure,, can finely tune the position on the Y direction of Y platform 13 through making piezoelectric element 71 flexible.
Need to prove no matter micro-adjusting mechanism is Figure 10 and which structure shown in Figure 11, through the Y direction that can move along Y platform 13 Y platform 13 is applied pressing force, can both adjust the position on the Y direction of Y platform 13.
In addition, when micro-adjusting mechanism is Figure 10, structure shown in Figure 11, compare, can suppress the deterioration of the attitude accuracy of Y platform 13 with Figure 12-structure shown in Figure 14.If this is because because piezoelectric element 71 flexible and the masterpiece of Z durection component when being used for Y platform 13, can reduce to receive the influence of the power of this Z durection component at the outside configuration piezoelectric element 71 of the peripheral part of Y platform 13.
In addition, like Figure 12 and shown in Figure 13, also can micro-adjusting mechanism be arranged at X platform 11.The micro-adjusting mechanism that is arranged at Y platform 13 both can be the same or different with the kind that is arranged at the micro-adjusting mechanism of X platform 11.When the micro-adjusting mechanism that is arranged at Y platform 13 is identical with the micro-adjusting mechanism that is arranged at X platform 11, for example can be with a part of systems such as power supply that piezoelectric element applied voltage with respect to X platform 11 and the 13 common uses of Y platform.Thus, can simplify the overall structure of travelling carriage.
In addition, shown in figure 15, X electromagnetic motor MX and Y electromagnetic motor MY are through fully its action of control of controller 80.Need to prove that this controller 80 also can be used for the travelling carriage of second and third execution mode.
Figure 16 is the end view of structure example of the charged particle beam apparatus of the expression travelling carriage 1A that used this execution mode.Shown in figure 16, charged particle beam apparatus 90 has travelling carriage 1A and charged particle electron gun 91.Test portion can carry the upper surface of putting at Y platform 13.Charged particle electron gun 91 produces charged particle beam such as electron beams or ion beam and test portion is shone.When charged particle beam apparatus 90 for example was electron beam lithography system, electron beam shone to test portions such as silicon wafers.Need to prove that the exit portal of the charged particle electron gun 91 of travelling carriage 1A and ejaculation charged particle beam is configured in the inside of vacuum chamber 3.
When the travelling carriage 1A with this execution mode is used in charged particle beam apparatus 91, can reduce the deviation of the target location and the actual test portion position after test portion is moved of the test portion that will move to.Thus, can reduce the deviation of irradiation position of the charged particle beam of the position that in this test portion, will shine charged particle beam and the reality in this test portion.Thereby can realize finer describing or more accurate inspection to test portion.
[symbol description]
12 first
13 second
17 driving shafts
MY, MY motor
Claims (17)
1. travelling carriage, it has:
First, it can move along first direction;
Second, its at least a portion is positioned on said first platform, and can move along the second direction of intersecting with said first direction;
Generation portion, its generation is used to make said second actuating force that moves along said second direction;
Power transfering part, it transmits said actuating force from said generation portion to said second, and at least a portion is accompanied by said first moving and moves.
2. travelling carriage according to claim 1, wherein,
Said power transfering part is accompanied by said first moving and deforms.
3. travelling carriage according to claim 2, wherein,
Said power transfering part has:
First driving shaft, it is installed on said second with the mode that can rotate;
Variant part, it is accompanied by said first moving and deforms between said generation portion and said first driving shaft.
4. travelling carriage according to claim 3, wherein,
Said first driving shaft is installed in the central portion on said second the said first direction.
5. according to claim 3 or 4 described travelling carriages, wherein,
The length of the said first direction of said variant part is accompanied by said first moving and changes.
6. according to claim 4 or 5 described travelling carriages, wherein,
Said variant part possesses:
Second rotating shaft, it is driven in rotation through said generation portion;
The 3rd rotating shaft, it is arranged between said second rotating shaft and said first rotating shaft;
First tension lines of ring-type, it keeps certain force of strain and surrounds said second rotating shaft and said the 3rd rotating shaft, and with the rotation of said second rotating shaft to said the 3rd rotating shaft transmission;
Second tension lines of ring-type, it keeps certain force of strain and surrounds said the 3rd rotating shaft and said first rotating shaft, and with the rotation of said the 3rd rotating shaft to the said first rotating shaft transmission,
Said the 3rd rotating shaft carries out displacement corresponding to said first moving along the direction vertical with said first direction.
7. travelling carriage according to claim 6, wherein,
The 3rd pulley and the 4th pulley that said variant part has first pulley that is connected with said first rotating shaft, second pulley that is connected with said second rotating shaft, is connected with said the 3rd rotating shaft,
Said first tension lines is the band that is erected between second pulley and the 3rd pulley, and said second tension lines is the band that is erected between the 4th pulley and first pulley.
8. travelling carriage according to claim 7, wherein,
The outer peripheral face that joins with said band of said first pulley, said second pulley and said the 3rd pulley is a convex surface.
9. according to each described travelling carriage in the claim 1～8, wherein,
Said travelling carriage has micro-adjusting mechanism, and this micro-adjusting mechanism is through applying pressing force along said second direction to said second, and said second position on the said second direction is finely tuned.
10. travelling carriage according to claim 9, wherein,
Said micro-adjusting mechanism has:
Be installed on said second member, it has a plurality of fastening parts, and these a plurality of fastening parts are arranged on said second both sides and leave from this second on said second direction;
A plurality of piezoelectric elements, they are arranged between said second and the said a plurality of fastening part.
11. travelling carriage according to claim 9, wherein,
Said second has a plurality of through holes of arranging along said second direction,
Said micro-adjusting mechanism has:
Be installed on said second member; It has a plurality of fastening parts, these a plurality of fastening parts be set in place said second part between the adjacent said through hole in said a plurality of through holes said second direction both sides and leave from this part of second;
A plurality of piezoelectric elements, they are arranged between said second and the said a plurality of fastening part.
12. according to each described travelling carriage in the claim 1～3, wherein,
Said power transfering part has:
First driving shaft, it is installed on said second with the mode that can rotate;
Fixed part, it is connected with said generation portion, and on said first direction, is fixed on assigned position;
Moving part, it is connected with said fixed part and said first driving shaft, is accompanied by said first moving and moves along said first direction.
13. travelling carriage according to claim 12, wherein,
Said fixed part has second driving shaft that is driven in rotation through said generation portion,
Said moving part has the gear part that is rotated corresponding to the rotation of said second driving shaft.
14. travelling carriage according to claim 13, wherein,
Said first driving shaft is installed in the central portion on said second the said first direction.
15. according to each described travelling carriage in the claim 1～14, wherein,
Said first and said second inside that is configured in vacuum tank, said generation portion is configured in the outside of this vacuum tank.
16. a transport, it has:
Each described travelling carriage in the claim 1～15;
Control the controller of the action of said generation portion.
17. a charged particle beam apparatus, it has:
Can upload the described transport of the claim 16 of putting test portion to said second;
Be arranged on said second top, to the charged particle electron gun of said test portion irradiation charged particle beam.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009108091 | 2009-04-27 | ||
| JP2009-108091 | 2009-04-27 | ||
| PCT/JP2009/067063 WO2010125701A1 (en) | 2009-04-27 | 2009-09-30 | Movable stage, and conveying device and charged particle beam device both having same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102414811A true CN102414811A (en) | 2012-04-11 |
Family
ID=43031861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009801589612A Pending CN102414811A (en) | 2009-04-27 | 2009-09-30 | Movable stage, and conveying device and charged particle beam device both having same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5274656B2 (en) |
| KR (1) | KR20120022818A (en) |
| CN (1) | CN102414811A (en) |
| WO (1) | WO2010125701A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101490310B1 (en) * | 2014-08-14 | 2015-02-04 | (주)메티스 | foup loading apparatus |
| CN107267950A (en) * | 2017-04-25 | 2017-10-20 | 苏州同冠微电子有限公司 | A kind of evaporator beam spot remote-control box and its control method |
| CN113874155B (en) * | 2019-03-25 | 2025-01-14 | 株式会社尼康 | Processing system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS642845A (en) * | 1987-06-25 | 1989-01-06 | Koyo Seiko Co Ltd | Accurate positioning device |
| JP2001229867A (en) * | 2000-02-15 | 2001-08-24 | Hitachi Ltd | Stage apparatus |
| JP2007184193A (en) * | 2006-01-10 | 2007-07-19 | Hitachi High-Technologies Corp | Charged particle beam device |
| JP2007220910A (en) * | 2006-02-16 | 2007-08-30 | Nsk Ltd | Positioning apparatus for vacuum |
| JP2008141095A (en) * | 2006-12-05 | 2008-06-19 | Tatsumo Kk | Semiconductor manufacturing carrying device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63140160A (en) * | 1986-12-03 | 1988-06-11 | Matsushita Electric Ind Co Ltd | Fine positioning device |
| JPH04210348A (en) * | 1990-12-12 | 1992-07-31 | Toshiba Corp | X-y table |
| JP4431373B2 (en) * | 2003-12-02 | 2010-03-10 | 日本電産サンキョー株式会社 | Drive coupling mechanism and vacuum robot equipped with the drive coupling mechanism |
| JP4686762B2 (en) * | 2005-06-07 | 2011-05-25 | 独立行政法人産業技術総合研究所 | Three-dimensional shape alignment method and program |
-
2009
- 2009-09-30 CN CN2009801589612A patent/CN102414811A/en active Pending
- 2009-09-30 WO PCT/JP2009/067063 patent/WO2010125701A1/en active Application Filing
- 2009-09-30 JP JP2011511260A patent/JP5274656B2/en not_active Expired - Fee Related
- 2009-09-30 KR KR1020117025206A patent/KR20120022818A/en not_active Application Discontinuation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS642845A (en) * | 1987-06-25 | 1989-01-06 | Koyo Seiko Co Ltd | Accurate positioning device |
| JP2001229867A (en) * | 2000-02-15 | 2001-08-24 | Hitachi Ltd | Stage apparatus |
| JP2007184193A (en) * | 2006-01-10 | 2007-07-19 | Hitachi High-Technologies Corp | Charged particle beam device |
| JP2007220910A (en) * | 2006-02-16 | 2007-08-30 | Nsk Ltd | Positioning apparatus for vacuum |
| JP2008141095A (en) * | 2006-12-05 | 2008-06-19 | Tatsumo Kk | Semiconductor manufacturing carrying device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2010125701A1 (en) | 2012-10-25 |
| KR20120022818A (en) | 2012-03-12 |
| JP5274656B2 (en) | 2013-08-28 |
| WO2010125701A1 (en) | 2010-11-04 |
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Application publication date: 20120411 |