CN102378414B - Micro-heater with temperature monitoring function - Google Patents

Abstract

A micro heater with a temperature monitoring function comprises: a chip, a heating plate, a first heating pad, a second heating pad, a temperature measuring resistor and a radiation emission layer. The heating plate is arranged on the chip and has two conducting ends formed on the outer edge. The first heating pad and the second heating pad are arranged on the chip outside the heating plate, and the first heating pad and the second heating pad are electrically connected to the two conducting ends of the heating plate respectively. One end of the temperature measuring resistor is connected to the first heating pad. The radiation emission layer is arranged on the chip and covers the heating plate. Thereby, the micro heater can judge the current temperature of the micro heater according to the current flowing through the temperature measuring resistor, thereby achieving the function of temperature monitoring.

Description

Micro heater with temperature monitoring

technical field

The invention relates to a micro heater, in particular to a micro heater with a temperature monitoring function.

Background technique

There are many types of heaters, and the heater is usually connected with an external temperature sensor to control the temperature of the heater. With the rapid development of technology, heaters are gradually developing toward miniaturization. However, the temperature control of the heater still needs to be monitored by an external temperature sensor. This is easy to cause trouble in use, and the required cost is relatively high.

The inventor of the present invention feels that the above-mentioned shortcomings can be improved, so he devoted himself to research and combined with the application of theories, and finally proposed an invention with reasonable design and effective improvement of the above-mentioned shortcomings.

Contents of the invention

The main purpose of the present invention is to provide a micro heater, and the micro heater has a temperature monitoring function.

In order to achieve the above-mentioned purpose, the present invention provides a micro-heater with temperature monitoring function, comprising: a chip; a heating plate, which is arranged on the chip, and the outer edge of the heating plate is formed with two conducting ends; a first A heating pad and a second heating pad are arranged on the chip outside the heating chip, and the first heating pad and the second heating pad are respectively electrically connected to the two conductions of the heating chip. end; a temperature measuring resistor, one end of which is connected to the first heating pad; and a radiation emitting layer, which is arranged on the chip and covers the heating sheet.

The present invention also provides a micro-heater with a temperature monitoring function, comprising: a chip; a heating chip, which is arranged on the chip, and the outer edge of the heating chip is formed with two conducting ends; a first heating pad and a second heating pad, which is arranged on the chip outside the heating sheet, and the first heating pad and the second heating pad are respectively electrically connected to the two conductive ends of the heating sheet; a first A temperature-measuring resistor, one end of which is connected to the first heating pad; a second temperature-measuring resistor, one end of which is connected to the second heating pad, and the resistance value of the second temperature-measuring resistor is greater than that of the first temperature-measuring resistor resistance value; and a radiation emission layer, which is arranged on the chip and covers the heating chip.

The present invention has following beneficial effect:

The present invention is equipped with a temperature measuring resistor, so that the micro heater can judge the current temperature of the micro heater according to the current flowing through the temperature measuring resistor, thereby achieving the function of temperature monitoring.

In order to enable a further understanding of the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention, but the description and drawings are only used to illustrate the present invention, not to limit the protection scope of the present invention .

Description of drawings

Fig. 1 is a schematic top view of the micro heater with temperature monitoring function of the present invention.

Fig. 2 is a schematic side view of the micro heater with temperature monitoring function of the present invention.

Symbol Description

1 chip 11 film

2 heating sheet 21 conduction terminal

22 gaps 23 paths

231 sub-paths 24 gaps

25 lugs 3 first heating pads

31 temperature measuring pad 4 second heating pad

41 Temperature measuring pad 5 The first temperature measuring resistor

6 Second temperature measuring resistor 7 Radiation emission layer

8 channels

Detailed ways

Please refer to Fig. 1 and Fig. 2, it is a preferred embodiment of the present invention, and the present invention is a kind of micro-heater with temperature monitoring function, and it comprises: a chip 1, a heating sheet 2, a first heating welding pad 3. A second heating pad 4 , a first temperature measuring resistor 5 , a second temperature measuring resistor 6 and a radiation emitting layer 7 . Wherein, the heating chip 2 , the first heating pad 3 , the second heating pad 4 , the first temperature measuring resistor 5 and the second temperature measuring resistor 6 are arranged between the chip 1 and the radiation emitting layer 7 . Wherein, a thin film 11 is formed at the center of the chip 1 .

The heating chip 2 is arranged on the thin film 11 of the chip 1 , and two conducting ends 21 are formed on the outer edge of the heating chip 2 . The two ends of the heating plate 2 are recessed with several notches 22 staggered inward. The notches 22 are elongated and parallel to each other, so that the heating plate 2 forms several connected paths 23 . The frontmost end and the most endmost end of the connected paths 23 are respectively connected to the two conduction ends 21 . These paths 23 each form a slit 24, the slit 24 is elongated and parallel to the notch 22, and the paths 23 respectively pass through the slit 24 to form two sub-paths 231; thereby, when a current flows through the path 23, the current It can be more evenly dispersed in the two sub-paths 231 .

Furthermore, the shape of the heating chip 2 can be square, and the two conducting ends 21 are formed by extending from two corners of one side of the heating chip 2 , and the material of the heating chip 2 can be platinum or polysilicon. The present invention takes the above shapes and materials as examples, but the actual application is not limited thereto.

The first heating pad 3 and the second heating pad 4 are arranged on the chip 1 outside the heating sheet 2, and are arranged opposite to the outside of the heating sheet 2. The first heating pad 3 and the second heating pad 4 The inner edge is parallel to the outer edge of the heating plate 2 . Two passages 8 are formed between the first heating pad 3 and the second heating pad 4 , and the two passages 8 communicate with the gaps 22 at the two ends of the heating sheet 2 respectively. The first heating pad 3 and the second heating pad 4 are respectively connected to the two conducting ends 21 of the heating chip 2; thereby, the heating chip 2 can be electrically connected to the first heating pad 3 and the second heating pad 4.

Furthermore, the first heating pad 3 and the second heating pad 4 can be connected to an external power source to generate current. The material of the first heating pad 3 and the second heating pad 4 can be aluminum or gold, but not limited thereto.

One end of the first temperature measuring resistor 5 is connected to the first heating pad 3 , and one end of the second temperature measuring resistor 6 is connected to the second heating pad 4 . The resistance value of the second temperature-measuring resistor 6 is greater than the resistance value of the first temperature-measuring resistor 5, and the resistance values of the first temperature-measuring resistor 5 and the second temperature-measuring resistor 6 are fixed values, which will not change with temperature changes Change. And the first temperature-measuring resistor 5 and the second temperature-measuring resistor 6 can selectively use one of them; thereby, when the current flows through the first temperature-measuring resistor 5 or the second temperature-measuring resistor 6, the magnitude of the current can be used to Judging the current temperature value of the micro-heater, and then achieving the function of temperature monitoring.

Wherein, the first temperature measuring resistor 5 and the second temperature measuring resistor 6 are made of tantalum, tantalum nitride or nickel-chromium alloy. Furthermore, the material of the first temperature-measuring resistor 5 can be further limited to tantalum, and the material of the second temperature-measuring resistor 6 is limited to tantalum nitride. Moreover, the second temperature measuring resistor 6 may be an interdigitated temperature measuring resistor. The present invention takes the above shapes and materials as examples, but the actual application is not limited thereto.

The radiation emitting layer 7 is disposed on the chip 1 and covers the entire heating chip 2 to achieve high radiation emission. The radiation emitting layer 7 can be made of silicon dioxide or silicon nitride, and can be coated with a high emissivity film, but not limited thereto.

In addition, two flanges 25 can be further formed on the outer edge of the heating plate 2 . Each of the first heating pad 3 and the second heating pad 4 further has a temperature-measuring pad 31, 41, and the two temperature-measuring pads 31, 41 are respectively connected to the other end of the first temperature-measuring resistor 5 and the second end of the second heating pad. At the other end of the temperature measuring resistor 6 , the two temperature measuring pads 31 , 41 are arranged in parallel and spaced outside the two flanges 25 . Wherein, the two flanges 25 are formed by extending from two corners of the heating plate 2 relative to the conducting end 21 . The inner edges of the first heating pad 3 and the second heating pad 4 are respectively parallel to the sides of the two flanges 25; thereby, when the heating sheet 2 is heated, the flange 25 is in contact with the first heating pad 3 and the second heating pad. Second, when the inner edge of the welding pad 4 is heated, the effect of stress dispersion can be achieved.

[Features of the present invention]

(1) With temperature monitoring function: the present invention is provided with the first temperature measuring resistance 5 and the second temperature measuring resistance 6, so that the micro heater can be based on the current flowing through the first temperature measuring resistance 5 or the second temperature measuring resistance 6 , to judge the current temperature of the micro-heater, and then achieve the function of temperature monitoring.

(2) Current flows evenly: the present invention forms a slit 24 in each path 23 to form two sub-paths 231; thereby, when a current flows through the path 23, the current can be more evenly dispersed in the two sub-paths 231 middle.

(3) Radiation heating effect is better: the radiation emissive layer 7 of the present invention covers the heating plate 2, so as to achieve high radiation emissivity.

(4) Stress dispersion: the inner edges of the first heating pad 3 and the second heating pad 4 of the present invention are respectively parallel to the sides of the two flanges 25; When the inner edges of the first heating pad 3 and the second heating pad 4 are heated, the effect of stress dispersion can be achieved.

The content disclosed above is only a preferred embodiment of the present invention, which cannot limit the protection scope of the present invention. Therefore, equivalent changes or modifications made according to the protection scope of the present invention still fall within the scope of the present invention.

Claims (10)

1. A micro-heater with temperature monitoring function, characterized in that, comprising: a chip; a heating chip, which is arranged on the chip, and the outer edge of the heating chip is formed with two conducting ends; A first heating pad and a second heating pad are arranged on the chip outside the heating chip, and the first heating pad and the second heating pad are respectively electrically connected to the two sides of the heating chip. conduction terminal; a temperature measuring resistor, one end of which is connected to the first heating pad; and A radiation emitting layer is arranged on the chip and covers the heating chip. 2. The micro heater with temperature monitoring function as claimed in claim 1, characterized in that, the first heating pad and the second heating pad are oppositely arranged on the outside of the heating sheet, and the first heating pad Two channels are formed between the pad and the second heating pad. 3. The micro-heater with temperature monitoring function as claimed in claim 1, characterized in that, a flange is formed with respect to the outer edge of the heating sheet at one of the conducting ends, and the first heating pad has a temperature measuring welding pad. The temperature-measuring pad is connected to the other end of the temperature-measuring resistor, and the temperature-measuring pad is arranged at intervals outside the flange in parallel. 4. The micro-heater with temperature monitoring function as claimed in claim 1, characterized in that, the two ends of the heating sheet are recessed with several notches staggered inward, so that the heating sheet forms several connected paths, The front end and the end of the connected paths are respectively connected to the two conducting ends. 5 . The micro-heater with temperature monitoring function as claimed in claim 4 , wherein each of the paths forms a slit, and the paths respectively pass through the slits to form two sub-paths. 6. The micro-heater with temperature monitoring function as claimed in claim 1, wherein the temperature measuring resistor has a first temperature measuring resistor and a second temperature measuring resistor, and one end of the first temperature measuring resistor is connected to On the first heating pad, one end of the second temperature measuring resistor is connected to the second heating pad, and the second temperature measuring resistor is an interdigitated temperature measuring resistor. 7. The micro-heater with temperature monitoring function as claimed in claim 1, wherein the material of the heating sheet is platinum or polysilicon, and the material of the temperature measuring resistor is tantalum, tantalum nitride or nickel-chromium alloy. 8. A micro heater with temperature monitoring function, characterized in that, comprising: a chip; a heating chip, which is arranged on the chip, and the outer edge of the heating chip is formed with two conducting ends; A first heating pad and a second heating pad are arranged on the chip outside the heating chip, and the first heating pad and the second heating pad are respectively electrically connected to the two sides of the heating chip. conduction terminal; A first temperature measuring resistor, one end of which is connected to the first heating pad; A second temperature-measuring resistor, one end of which is connected to the second heating pad, the resistance value of the second temperature-measuring resistor is greater than the resistance value of the first temperature-measuring resistor; and A radiation emitting layer is arranged on the chip and covers the heating chip. 9. The micro-heater with temperature monitoring function as claimed in claim 8, characterized in that, two flanges are respectively formed with respect to the outer edges of the heating sheet at the two conducting ends, the first heating pad and the second heating pad Each of the two heating pads has a temperature-measuring pad, and the two temperature-measuring pads are respectively connected to the other end of the first temperature-measuring resistor and the other end of the second temperature-measuring resistor, and the two temperature-measuring pads are respectively connected in parallel The interval is arranged on the outside of the two flanges. 10. The micro-heater with temperature monitoring function as claimed in claim 8, characterized in that, the material of the heating sheet is platinum or polysilicon, the material of the first temperature-measuring resistor is tantalum, and the material of the second temperature-measuring resistor is tantalum. The material is tantalum nitride, and the second temperature measuring resistor is an interdigitated temperature measuring resistor.

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