CN102376458A - Electronic component, electronic device and method for manufacturing electronic component - Google Patents

Abstract

The present invention provides an electronic component, an electronic device, and a method for manufacturing the electronic component, which can improve productivity of electric double layer capacitors and the like. The concave container (2) has a concave portion (13), and a storage portion (17) having a metal layer (11) on the bottom surface is formed at the bottom of the concave portion. A collector (18) using carbon as a conductive material is formed on the metal layer, and an electrode (6) is fixed on the collector. These current collectors (18) and electrodes (6) are formed as follows. After firing the concave container (2), a conductive paste containing carbon as a conductive material is supplied to the storage portion (17). The storage part (17) is provided because the conductive paste is liquid, so the conductive paste is collected in the center of the recess (13) by the storage part (17) in order not to leak to the surroundings and cause a short circuit. Then, when the electrode (6) is placed on the conductive paste and heated, the conductive paste is cured to form a current collector (18) to which the electrode (6) is fixed.

Description

Electronic component, electronic device, and method for manufacturing electronic component

technical field

The present invention relates to electronic components, electronic devices, and methods of manufacturing electronic components, for example, to electrochemical cells such as electric double layer capacitors.

Background technique

An electric double layer capacitor is a device that stores electricity by polarizing ions in an electrolyte, and supplies electricity by discharging them.

With this charge storage and discharge function, the electric double layer capacitor is used, for example, as a clock function of electronic equipment, as a backup power source for semiconductor memories, and as a backup power source for electronic devices such as microcomputers and IC memories.

In particular, surface-mountable electric double layer capacitors can be miniaturized and thinned, and thus are suitable for thin portable terminals.

In order to cope with such a desire for miniaturization and thinning, Patent Document 1 below proposes an electric double layer capacitor in which electrodes and an electrolyte for polarization are accommodated in a container having a concave portion as described below, and The opening is sealed with a sealing plate.

FIG. 9 is a side cross-sectional view of a conventional electric double layer capacitor 100 .

A metal layer 111 is provided on the bottom surface of a concave container 102 made of ceramics in which a concave portion 113 is formed, and a positive electrode 106 is bonded to an upper surface of the metal layer 111 . The metal layer 111 penetrates through the concave container 102 and is electrically connected to the positive terminal 112 on the bottom surface of the concave container 102 . Therefore, the positive electrode 106 is electrically connected to the positive terminal 112 via the metal layer 111 .

Furthermore, the sealing plate 103 is bonded to the opening of the recess 113 via the metal bonding metal layer 108 to seal the recess 113 .

A metal layer 115 functioning as a current collector is formed on the lower surface of the sealing plate 103 , and the negative electrode 105 is bonded to the surface of the metal layer 115 .

A metal layer 109 is formed on the side surface of the concave container 102 , and the metal layer 109 connects the metal layer 108 and the negative electrode terminal 110 on the bottom surface of the concave container 102 .

Furthermore, the negative electrode 105 is electrically connected to the negative terminal 110 via the metal layer 115 , the bonding metal layer 108 , and the metal layer 109 .

A separator 107 is provided between the negative electrode 105 and the positive electrode 106 to prevent them from short-circuiting, and an electrolyte is enclosed in the concave portion 113 .

Furthermore, the electric double layer capacitor 100 stores electricity when a voltage is applied to the negative terminal 110 and the positive terminal 112 , and discharges the stored charge to maintain a clock function and supply power to a memory or the like.

However, the metal layer 111 of the concave portion 113 is composed of a tungsten layer as an underlying layer and an aluminum layer formed on the tungsten layer.

This is based on the following reasons. That is, the metal layer 111 functions as a current collector, and thus needs to be formed of a substance that does not dissolve in the electrolyte even when a voltage is applied. In the case of the current collector of the positive electrode, aluminum is used as such a substance, but aluminum cannot withstand the firing temperature of the concave container 102 (preferably 1000 [° C.] or higher).

Therefore, the bottom layer is made of titanium capable of withstanding high temperatures, and an aluminum layer is formed on the bottom layer of titanium after the firing of the concave container 102 .

However, when forming the aluminum thin film on the bottom surface of the concave portion 113 , a dry process such as vacuum deposition is required, which raises the problem of cost.

[Patent Document 1] Japanese Patent Laid-Open No. 2001-216952

Contents of the invention

An object of the present invention is to improve productivity of electric double layer capacitors and the like.

In the invention according to claim 1, there is provided an electronic component comprising: a container having a cavity; and a first conductor conducting from the cavity to the cavity of the container. Outside: a first collector using carbon as a conductive material, which is joined to the first conductor in the cavity; a first electrode, which is joined to the first collector; a second conductor, which conduction from the cavity to the outside of the container; a second current collector joined to the second conductor in the cavity; a second electrode joined to the second current collector, and facing the first electrode with a predetermined distance therebetween; and an electrolyte in contact with the first electrode and the second electrode.

In the invention according to claim 2, there is provided the electronic component according to claim 1, wherein the first electrode is a positive electrode, and the second electrode is a negative electrode.

In the invention according to claim 3, there is provided the electronic component according to claim 1 or 2, wherein the first current collector covers the entire first conductor in the cavity.

In the invention according to claim 4, there is provided the electronic component according to claim 1, 2 or 3, wherein the first current collector is formed of a resin using carbon as a conductive material.

In the invention according to claim 5, there is provided the electronic component according to any one of claims 1 to 4, wherein the first current collector is formed in a recess formed in the cavity. .

In the invention according to claim 6, there is provided the electronic component according to any one of claims 1 to 5, wherein the first current collector is formed in a layered form using carbon as a conductive material. part.

In the invention according to claim 7, there is provided the electronic component according to any one of claims 1 to 6, wherein the second current collector uses carbon as a conductive material.

In the invention according to claim 8, there is provided an electronic device, characterized in that the electronic device includes: the electronic component according to any one of claims 1 to 7; An electronic component that accumulates electric charges; other electronic components that perform predetermined functions; and a power supply unit that supplies electric power to the other electronic components using the accumulated electric charges.

In the invention according to claim 9, there is provided a method of manufacturing an electronic component, characterized in that the method of manufacturing an electronic component includes the steps of: forming a concave container, wherein the concave container has a concave portion for forming a cavity, A storage portion for storing conductive paste formed in the concave portion, and a first conductor conducting from the bottom surface of the storage portion to the outside; conductive paste using carbon as a conductive material is supplied to the storage portion ; A first electrode is provided on the supplied conductive paste; a first current collector is formed by curing the conductive paste provided with the first electrode; a second current collector is formed in the concave portion, and the A second electrode that is a second current collector and faces the first electrode at a predetermined distance, a second conductor that is connected to the second current collector and conducts to the outside, and the first electrode and the second electrode that are electrically connected to the outside. an electrolyte in contact with the second electrode; and sealing the recess.

According to the present invention, the productivity of the electric double layer capacitor can be improved by forming the current collector mainly composed of carbon on the bottom surface of the concave portion.

Description of drawings

FIG. 1 is a diagram for explaining an electric double layer capacitor according to a first embodiment.

FIG. 2 is a diagram for explaining a modified example of the first embodiment.

FIG. 3 is a diagram for explaining a modified example of the first embodiment.

FIG. 4 is a diagram for explaining a method of forming a current collector according to the first embodiment.

FIG. 5 is a diagram illustrating a method of forming a current collector according to the first embodiment.

FIG. 6 is a diagram illustrating an electric double layer capacitor according to the second embodiment.

FIG. 7 is a diagram for explaining a modified example of the second embodiment.

FIG. 8 is a diagram illustrating a method of forming a current collector according to the second embodiment.

FIG. 9 is a diagram for explaining a conventional example.

Label description

1: electric double layer capacitor; 2: concave container; 3: sealing plate; 5: electrode; 6: electrode; 7: separator; 8: joint metal layer; 9: metal layer; 10: terminal; 11: metal layer; 12: terminal; 13: concave portion; 15: metal layer; 17: storage portion; 18: collector; 19: meniscus; 21, 22: through electrode; 28: intermediate electrode; 31: penetration member; 33: Protrusion; 41-45: sheet; 51, 52: part; 61: through electrode; 100: electric double layer capacitor; 102: concave container; 103: sealing plate; 105: negative electrode; 106: positive electrode; 107: Separator; 108: bonding metal layer; 109: metal layer; 110: negative electrode terminal; 111: metal layer; 112: positive electrode terminal; 113: concave portion; 115: metal layer.

Detailed ways

(1) Outline of Embodiment

As shown in FIG. 1( a ), the concave container 2 has a concave portion 13 , and a storage portion 17 having a metal layer 11 on the bottom surface is formed at the bottom of the concave portion 13 .

The metal layer 11 is made of tungsten and can withstand the firing temperature of the concave container 2 .

A current collector 18 made of carbon as a conductive material is formed on the metal layer 11 , and an electrode 6 serving as a positive electrode is fixed to the current collector 18 . These current collectors 18 and electrodes 6 are formed as follows.

After the concave container 2 is fired, a conductive paste containing carbon as a conductive material is supplied to the storage portion 17 . Reservoir 17 is provided because the conductive paste is in a liquid state, so the conductive paste is concentrated in the center of recess 13 by reservoir 17 so as not to leak to the surroundings and cause a short circuit.

Then, the conductive paste is cured by heating the conductive paste to form current collector 18 . Then, when the electrode 6 is placed on the conductive paste and heated, the conductive paste is cured, and the current collector 18 to which the electrode 6 is fixed is formed.

Generally, as a substance that can be used as a current collector, there is carbon in addition to aluminum, but, as in the present embodiment, when the conductive paste is supplied on the metal layer 11 and heated, the current collector 18 is formed, so, Dry processes such as vacuum deposition of aluminum are not required.

Therefore, reduction of manufacturing cost, simplification of manufacturing process, etc. can be achieved, and the productivity of electric double layer capacitor 1 can be improved.

In addition, when the electrode 6 is placed on the conductive paste, the electrode 6 is positioned at the center of the reservoir 17 by the surface tension of the conductive paste, so the positioning of the electrode 6 is simple, thereby improving productivity.

The viscosity of the conductive paste is about 400 dPa·s, but workability is poor, so it can be diluted with a low-boiling point solvent such as a thinner. Through this dilution, the viscosity can be lowered below about 40 dPa·s. In this way, in the case of reducing the viscosity of the conductive paste in consideration of workability, there is an effect of avoiding the following situation: the conductive paste rises along the wall surface with the solvent, and when it is dried and solidified while rising, the wall surface becomes conductive. State, in the case of stacked electrodes, there is a risk of short circuit.

In addition, an amorphous or crystalline carbonaceous film can be formed by the CVD method.

For example, it can be formed by applying a dispersion solution containing nickel-based catalyst particles as a kind of vapor-phase grown carbon, drying the solvent, heating to a temperature of 600° C. to 1600° C. in a tubular furnace, Inflow of gases containing methane, acetylene or other hydrocarbons.

In addition, at this time, the formed vapor-grown carbon may be single-layer or multi-layer tubular carbon. Furthermore, the specific surface area can be increased by accelerating the crystallization of the carbonaceous coating by heat treatment, and further performing an activity-imparting treatment. In this case, since the electrode 6 and the current collector 18 can be integrally formed, workability is improved.

(2) Details of the embodiment

(first embodiment)

An electrochemical cell constituting the electronic component of this embodiment will be described with reference to the drawings. In the following, an electric double layer capacitor will be described as an example of an embodiment, but the electronic component may be other types of electrochemical cells such as non-aqueous electrolyte cells.

For example, it can be a battery as follows: the negative electrode uses an electrode sheet made of silicon oxide (50wt%) activated by metal lithium, a conductive additive (40wt%) and a polyacrylic binder (20wt%), and the positive electrode uses an electrode sheet made of The element of lithium-manganese-oxygen has an active material (85wt%) with a spinel crystal structure, a conductive additive (10wt%) and a PTFE-based binder (5wt%). A separator made of glass fiber, and an electrolyte solution obtained by dissolving 1M LiN(SO ₂ CF ₃ ) ₂ in PC. Here, the size of the positive electrode and the negative electrode may be 1 mm in length×1.5 mm in width×0.2 mm in thickness.

Furthermore, Li ₄ Ti ₅ O ₁₂ , Li ₄ Mn ₅ O ₁₂ , LiCoO ₂ , and the like can be used in addition to the above-mentioned positive electrode active material. In addition, Li—Si—O, Li—Al, or the like can also be used as the active material of the negative electrode.

Furthermore, a lithium ion battery can be constituted by using an electrolytic solution obtained by dissolving 1M LiBF ₄ in PC, or the like. In this case, a conductive additive and a binder can be used together in each active material.

(a) of FIG. 1 is a side cross-sectional view of an electric double layer capacitor 1 according to the first embodiment. The electric double layer capacitor 1 has a rectangular parallelepiped shape, and its size has, for example, a rectangular parallelepiped shape with a height of 1 [mm] or less, a longitudinal dimension of approximately 2.5 [mm], and a transverse dimension of approximately 3.0 [mm].

A concave container 2 having a concave portion 13, a sealing plate 3 (about 0.1 [mm] in thickness) having a metal layer 15 formed on the lower surface, an electrode 5 serving as a negative electrode, an electrode 6 serving as a positive electrode, a separator 7, and a joint Metal layer 8 , metal layer 11 , current collector 18 , through electrode 21 , through electrode 22 , terminal 10 , terminal 12 , and an electrolyte (not shown) enclosed in recess 13 constitute electric double layer capacitor 1 .

The terminals 10 and 12 are terminals for surface mounting, and in the lower face, the side of the terminals 10 and 12 is defined as a downward direction, and the side of the sealing plate 3 is defined as an upward direction.

In addition, in Fig. 1(a), gaps are shown between the electrodes 5, separators 7, and electrodes 6 in order to easily distinguish the bonding relationship between the components, but the recesses 13 may be filled without gaps. into these parts.

The concave container 2 is made of ceramics using alumina, for example, and is formed by stacking and firing a plurality of flexible ceramic sheets 41 to 45 called green sheets to integrate them. The thickness of each sheet after firing can be set to 100 to 300 μm. In addition, when the thickness is the same, it is desirable to reduce management labor and time when preparing sheets. In (a) of FIG. 1 , the joined portions of the sheets 41 to 45 are shown by dotted lines.

Openings corresponding to the recesses 13 and the reservoirs 17 and holes corresponding to the through-holes provided with the through-electrodes 21 and 22 are formed on the green sheet. The concave container 2 is a through-hole for penetrating the electrodes 21 and 22 . Here, the diameter of the through-electrode can be set to be about 100 μm. In addition, when laminating the green sheets, conductor printing made of tungsten (W) may be performed on the upper surface of each green sheet in advance for the purpose of absorbing errors when the through-electrodes formed in each layer and when the through-electrodes are misaligned.

More specifically, through-holes corresponding to the shape of the through-electrodes 21 and 22 are formed on the sheets 41 and 42 , and through-holes corresponding to the shape of the through-electrodes 21 and the storage portion 17 are formed on the sheet 43 . Openings corresponding to the shape of the through-holes 21 and openings corresponding to the shape of the recess 13 are formed in the sheets 44 to 45 .

The concave portion 13 has a rectangular cross section when viewed from above, and a recessed storage portion 17 having a metal layer 11 formed on the bottom surface thereof is formed at the bottom of the concave portion 13 .

The metal layer 11 is formed by performing conductive printing on the surface of the sheet 42 corresponding to the bottom surface of the storage portion 17 and firing the concave container 2 .

Here, the size of the metal layer 11 is made the minimum necessary to reduce the cost. In addition, the metal layer 11 may be formed on the entire bottom surface of the storage portion 17 .

For example, conductor printing is performed by performing screen printing with an ink containing a high-melting-point metal material such as tungsten that has corrosion resistance and can withstand firing of the concave container 2 .

Tungsten has a high melting point and is difficult to oxidize. Furthermore, it has moderately close contact with the ceramic surface and has practical resistance after firing. Therefore, it is suitable as an electrode formed in the concave portion 13 .

However, when tungsten is used as the current collector of the positive electrode, when a voltage is applied while in contact with the electrolyte, it is electrochemically dissolved in the electrolyte.

Therefore, in order to prevent this dissolution, it is necessary to coat the entire surface in contact with the electrolyte (that is, the entire portion inside the concave container 2 ) with the current collector 18 made of conductive paste, as described below.

In addition, the coating on the entire surface forms a meniscus shape along the wall surface of the inner side by its own surface tension, but also has the effect of flattening the thickness of the center portion of the liquid paste.

Electrochemically, electrons tend to concentrate at the sharp front end of a conductor. When the electrochemical device is charged and discharged, if electrons are concentrated on the sharp front end of the conductor, electric power is concentrated only around the front end, and deterioration may be promoted.

Therefore, by applying the paste of the present invention, it can be expected to avoid sharp parts and concentration of electrons, thereby avoiding deterioration of electrodes.

On the metal layer 11 is formed a current collector 18 obtained by curing the conductive paste.

The metal layer 11 has a thickness, but the thickness of the metal layer 11 is made uniform by the conductive paste to obtain a current collector 18 with a flat surface.

As the conductive paste, one obtained by processing a phenolic resin containing a carbon material and a solvent into a paste form can be used. Carbon materials are added to impart electrical conductivity. As the carbon material, any one of graphite powder, amorphous carbon (carbon black), or a mixture of both can be used.

When the phenolic resin component is polymerized (cured) by heating to dry the solvent, a resin current collector 18 is formed that uses the phenolic resin as a binder and carbon as a conductor.

Here, generally, in the case of the current collector of the negative electrode, various metals such as nickel, copper, brass, zinc, tin, gold, stainless steel, tungsten, and aluminum can be used. However, in order not to dissolve the current collector in the electrolyte, , The current collector of the positive electrode needs to use metals called plug metals such as aluminum, titanium, and niobium. As the current collector of the positive electrode, carbon can be used in addition to these metals, and in this embodiment, a conductive paste containing a carbon material is used. When the conductive paste is used, it is not necessary to form a thin film of the plug metal by vacuum deposition or the like, so the process is greatly simplified.

The conductive paste is a mixture of two materials, namely highly crystalline graphite among carbons and amorphous carbon black among carbons, and further contains a phenolic resin as a main component and a binder. As the phenolic resin, derivatives including aldehyde and phenol represented by formaldehyde can be used.

The reservoir 17 is formed in the center of the bottom of the recess 13, the depth of the reservoir 17 is set to be smaller than the thickness of the electrode 6, and the inner circumference of the reservoir 17 is set to be larger than the outer circumference of the electrode 6. The meniscus of conductive paste Surface 19 degree. The storage portion 17 is provided to prevent the conductive paste from scattering or overflowing before curing and causing a short circuit.

Reservoir 17 functions as a reservoir formed of insulating sheets 42 and 43 for holding the conductive paste.

Here, the meniscus 19 is a concave surface generated on the surface of the conductive paste due to surface tension when the conductive paste is stored in the storage portion 17 .

When manufacturing the electric double layer capacitor 1, a liquid conductive paste is stored in the storage part 17, and when the electrode 6 is placed on the surface of the conductive paste, the electrode 6 is positioned at the center of the storage part 17 by the meniscus 19. .

Then, after the conductive paste is cured by heating, the current collector 18 is formed, and the electrode 6 is fixed at the center of the storage portion 17 . That is, since the electrode 6 is fixed on the concave surface formed by the surface tension of the conductive paste, the electrode 6 can be easily and accurately positioned.

In this way, in this embodiment, a dry process such as vacuum evaporation is not required in the formation of the positive electrode current collector, and the positioning of the electrode 6 is easy. Therefore, it is possible to reduce the manufacturing cost of the electric double layer capacitor 1 and realize the production efficiency. Sexual improvement.

The electrode active material with activated carbon as the main component is formed into a sheet and cut into a rectangle to form the electrode 6. For example, coconut shells can be used in natural materials, and in artificial materials, water vapor, chemical, etc. can be used respectively. A material obtained by chemically or electrically activating carbonite of carbonic pitch, petroleum pitch, or phenolic resin.

As described above, the perforated sheets 41 and 42 are stacked under the concave portion 13 of the concave container 2 to form through holes having openings in the bottom surface of the concave portion 13 and the bottom surface of the concave container 2 .

In addition, a cylindrical through-hole electrode 22 electrically connecting the metal layer 11 and the terminal 12 is formed in the through-hole.

The outer diameter of the through-electrode 22 and the inner diameter of the through-hole are set to be the same so that no gap is generated between the through-electrode 22 and the inner wall of the through-hole. The through electrodes are also referred to as VIA.

The diameter of the penetration electrode 22 is about 0.1 to 0.3 [mm]. Furthermore, intermediate electrodes 28 are provided between the respective sheet layers by conductor printing. Through the intermediate electrode 28 , for example, the through-hole electrode 22 can be reliably formed even when the precision of the through-hole is not high or the lamination of the sheets is misaligned. In addition, the structure of the penetration electrode 21 mentioned later is the same.

Penetrating electrodes 22 are formed by sintering metal paste mainly composed of metal powder such as tungsten, injecting and solidifying conductive paste such as carbon, or inserting metal rods or plates into the through holes. As the metal rod material, for example, aluminum, stainless steel, tungsten, nickel, silver, gold, or carbon-containing conductive resin can be used. Electrode 6 is electrically connected to terminal 12 via metal layer 11 and through electrode 22 .

Metal layer 9 and joining metal layer 8 , which are metal layers that join the sealing plate 3 and the concave container 2 , are formed at the end of the opening of the recess 13 .

The bonding metal layer 8 is composed of a layer of solder (nickel, gold, etc.) formed on the metal layer 9 (metallized layer) over the entire circumference of the end of the opening. The bonding metal layer 8 is also sometimes called a gasket, and is used to ensure airtightness between the sealing plate 3 and the concave container 2 .

The metal sprayed layer is made of, for example, Kovar (Co: 17, Ni: 29, Fe: 54 ratio alloy), and a metal ring made of Kovar is set at the end of the concave container 2 for firing. system to form a metal sprayed layer.

As will be described later, when the sealing plate 3 is placed on the opening of the recess 13 and heated, the solder layer melts and fuses with the metal layer 15 , and the recess 13 is sealed by the sealing plate 3 .

By laminating the sheets 41 to 45 with holes on the concave container 2 , a through hole having an opening is formed in the side wall surrounding the concave portion 13 at the end of the opening of the concave portion 13 and the bottom surface of the concave container 2 .

Further, in the through hole, a cylindrical through electrode 21 electrically connecting the bonding metal layer 8 and the terminal 10 is formed.

The outer diameter of the through-electrode 21 and the inner diameter of the through-hole are set to be the same, and no gap is generated between the through-electrode 21 and the inner wall of the through-hole.

The material and formation method of the penetration electrode 21 , bonding using the intermediate electrode 28 , and the like are the same as those of the penetration electrode 22 .

The terminals 10 and 12 are formed by printing conductors with ink containing tungsten or the like and firing them, and plating gold or nickel on the surfaces thereof. Furthermore, in order to prevent rust, a metal such as gold or tin may be plated on top of the nickel plating.

Plating includes electrolytic plating, electroless plating, and the like, and can also be formed by a vapor phase method such as vacuum evaporation.

Accordingly, high solder wettability of the terminals 10 and 12 can be ensured, and the electric double layer capacitor 1 can be satisfactorily mounted on the substrate surface.

In addition, in this embodiment, the terminals 10 and 12 are provided on the outer bottom surface of the concave container 2, but they may be formed on the outer side surface, or may be formed continuously from the outer bottom surface to the side surface.

Terminals 10 and 12 are formed after penetrating electrodes 21 and 22 are provided in the penetrating holes.

Also, when the terminals 10, 12 are not formed to the end of the bottom of the concave container 2, when a plurality of electric double layer capacitors 1 are formed at the same time using an elliptical sheet, when these electric double layer capacitors 1 are cut, , it is possible to prevent peeling of the terminals 10, 12 and the like.

The sealing plate 3 is a metal member made of Kovar or the like. The coefficient of thermal expansion of Kovar is substantially equal to that of ceramics, and therefore, stress generated between the sealing plate 3 and the concave container 2 can be suppressed when the electric double layer capacitor 1 is heated during reflow soldering.

A nickel-plated metal layer 15 is formed on the lower surface of the sealing plate 3 so that the sealing plate 3 and the joining metal layer 8 are well bonded.

When the metal layer 15 is soldered to the bonding metal layer 8 , the sealing plate 3 is physically and electrically bonded to the opening of the recess 13 .

During soldering, the sealing plate 3 and the concave container 2 are bonded by applying pressure and heating to melt the sealing plate 3 .

More specifically, parallel seam welding can be used in which a roller electrode is brought into contact with the edge of the sealing plate 3 with an appropriate pressure, and is rotated while being energized. The bonding metal layer 8 is heated by contact resistance, pressurized and heated. In addition to parallel seam welding, laser-based heat welding can also be used.

In the case of parallel seam welding, it is preferable to select a material with good compatibility between the joining metal layer 8 and the sealing plate 3. For example, when the joining metal layer 8 uses electrolytic nickel or electroless nickel, the sealing plate 3 uses Kovar is a material obtained by implementing electrolytic nickel or electroless nickel.

Or, conversely, when electrolytic nickel is used for the joining metal layer 8 , a Kovar alloy subjected to electroless nickel is used for the sealing plate 3 . Therefore, it is not necessary to increase the welding power more than necessary. Furthermore, when electroless nickel is performed, various reducing agents can be used. For example, dimethylaminoborane, hypophosphorous acid, hydrazine, sodium borohydride, etc. are mentioned. Here, when nickel for plating is melted as the solder, it is preferable that the melting point of nickel is low. Therefore, hypophosphorous acid is used as the reducing agent in plating, so that when the chemical composition of the completed plating is "Ni: 90%-96%, P: 4%-10%", it is compatible with boron-containing Compared with other cases, the melting point is lower, so it is suitable for soldering.

In addition, in order to fix the gasket joining the metal layer 8 to the ceramic metallized layer, solder or solder materials such as gold solder and silver solder may be used.

The electrode 5 made of an electrode active material is bonded to the lower surface of the metal layer 15 with a carbon-containing conductive adhesive.

The material and shape of the electrode 5 are the same as those of the electrode 6 . A portion 51 of the metal layer 15 that is in contact with the electrode 5 functions as a current collector. Furthermore, the portion 52 of the metal layer 15 that is not in contact with the electrode 5 functions as a conductor joined to the current collector.

In this way, electrode 5 is electrically connected to terminal 10 via metal layer 15 , bonding metal layer 8 , and through electrode 21 .

The electrodes 5 and 6 face each other in a cavity formed by the recess 13 and the sealing plate 3 , and a separator 7 is provided between the electrodes 5 and 6 to prevent the electrodes 5 and 6 from being short-circuited by contact.

As the material of the separator 7, for example, a material made of a heat-resistant resin such as PPS (polyphenylene sulfide), PEEK (polyetheretherketone), denatured PEEK, PTFE (polytetrafluoroethylene), etc., which imparts hydrophilicity to the surface can be used. The resulting material consists of non-woven or glass fibers.

Furthermore, an electrolyte is sealed in the cavity formed by the recess 13 and the sealing plate 3 .

The electrolyte is composed of a solution obtained by dissolving a supporting salt such as (CH ₃ )·(CH ₄ )3N·BF ₄ in a non-aqueous solvent such as PC (propylene carbonate) or SL (sulfolane), for example. Thus, in the present embodiment, a liquid is used as the supporting salt, but a gel or solid electrolyte may also be used. Although it depends on the sealing method, in the case of using a liquid solvent as the electrolyte, it is preferable that the boiling point is 200° C. or higher. Furthermore, it is preferable not to increase the vapor pressure due to the heat applied at the time of sealing. A low-boiling solvent having a boiling point of less than 100° C. may be added to the electrolytic solution, but it is preferable that the vapor pressure at least at the melting point of the resin is 0.2 MPa-G or less. In the case of injecting the electrolytic solution, after injecting the electrolytic solution into the concave portion 13 , the electrolyte can be permeated into the fine parts of the electrode by depressurizing, heating, pressurizing, or a combination thereof alone.

In addition, when a solid electrolyte is used, the separator 7 is unnecessary.

Furthermore, in the case of using a fixed electrolyte, the current collector will not dissolve if the electrolyte is not in contact with the current collector. Therefore, the electrode 5 can be used as the positive electrode and the electrode 6 can be used as the negative electrode.

The electric double layer capacitor 1 configured as described above is mounted on the surface of the substrate so that the terminal 10 is the negative pole and the terminal 12 is the positive pole, and can be used, for example, as a backup power supply for a memory of a mobile phone or a clock.

In this case, in the mobile phone, the electric double layer capacitor 1 is charged while the main power supply battery is installed, and the charge accumulated in the electric double layer capacitor 1 is charged when the battery is replaced or the main power supply voltage drops. Discharge, supply power to memory, or maintain functions such as a clock.

In the above, the concave container 2 is formed of ceramics mainly composed of alumina, but it may also be formed of heat-resistant materials such as heat-resistant resin, glass, and ceramic glass, for example.

When the concave container 2 is formed of glass or glass ceramics, low-melting-point glass or glass ceramics are wired and laminated by conductor printing, and then fired at a low temperature.

When the concave container 2 is made of resin, the through-electrodes 21 and 22 may be insert-molded.

Furthermore, when the diameter of the sheet 42 is set larger than the diameter of the sheet 41 for the penetration electrode 22 , even when the pressure of the concave portion 13 is increased by heating during reflow soldering, the pressure acts on the penetration electrode 22 . , it is possible to prevent the penetration electrode 22 from falling off from the concave container 2 .

Similarly, regarding the penetration electrodes 21 , the diameter of the sheet 45 can be set to be larger than the diameters of the sheets 41 to 44 .

(b) of FIG. 1 is a diagram illustrating a modified example of the electric double layer capacitor 1 .

In this example, electric double layer capacitor 1 does not have through electrodes 21 and 22 , and electrodes 5 and 6 are connected to terminals 10 and 12 through wiring formed on the side surface of concave container 2 . Other configurations are the same as those of the first embodiment described above.

The metal layer 11 penetrates from the bottom surface of the storage portion 17 to the outside of the concave container 2 along the surface of the sheet 42 , and is electrically connected to the terminal 12 formed on the bottom surface of the concave container 2 via the side surface of the concave container 2 .

The metal layer 11 is formed on the bottom surface of the storage portion 17 with a minimum necessary size, but may be formed on the entire bottom surface. In addition, the thickness of the metal layer 11 is made uniform by the conductive paste, and a flat current collector 18 is obtained.

The metal layer 9 is bonded to the bonding metal layer 8 on the upper end surface of the concave container 2 , and is electrically connected to the terminal 10 formed on the bottom surface of the concave container 2 via the side surface of the concave container 2 .

On the side of the concave container 2, auxiliary electrodes are provided on the upper surfaces of the sheets 41-44 to make the electrical connection on the side more reliable.

In this way, the electric double layer capacitor 1 can be configured without using the through electrodes.

(c) of FIG. 1 is an example in which a current collector 20 is provided on the upper surface of the metal layer 11 after applying a conductive paste in advance and curing it. In this case, the metal layer 11 and the current collector 20 , and the current collector 20 and the electrode 6 are bonded using a conductive adhesive or the like.

In this way, instead of injecting and curing the conductive paste into the storage portion 17 , the conductive paste that has been cured in advance may be provided in the storage portion 17 .

In addition, the current collector 20 is buried around the metal layer 11 without gaps so that the electrolytic solution does not come into contact with the metal layer 11 .

Thereby, it is possible to prevent the metal layer 11 from being eluted to cause quality degradation.

(d) of FIG. 2 is an example of forming through electrodes using conductive paste.

A through hole is formed on the sheet 42 from the bottom of the reservoir 17 to the metal layer 11 . When the conductive paste is injected into the reservoir 17 , the conductive paste penetrates into the through hole and solidifies to form the through electrode 61 .

In addition, by depressurizing after injecting the conductive paste, it is possible to eliminate air bubbles entrapped together with the conductive paste at the positions of the penetrating electrodes 61 .

Current collector 18 and through-hole electrode 61 are formed integrally. Therefore, electrode 6 is electrically connected to terminal 12 via current collector 18 , through-hole electrode 61 , and metal layer 11 .

In addition, in this example, the bonding metal layer 8 and the terminal 10 are electrically connected through the through-electrode 21 .

FIG. 2( e ) is an example in which current collector 18 and metal layer 11 are electrically connected by via electrode 61 , and junction metal layer 8 and terminal 10 are electrically connected by metal layer 9 .

(f) of FIG. 3 is an example in which the recessed portion 13 is used as the storage portion 17 without forming a stepped portion. In this example, current collector 18 and metal layer 11 are electrically connected through via electrode 61 .

(g) of FIG. 3 is an example in which current collector 18 is formed on a part of the bottom of storage portion 17 . In this way, the electrode 6 can function without forming the current collector 18 on the entire bottom surface of the storage portion 17 .

In this example, the concave portion 13 is not formed with a stepped portion but serves as the storage portion 17 , and the current collector 18 and the metal layer 11 are electrically connected through the through electrode 61 .

Each diagram in FIG. 4 is a diagram for explaining a method of forming the current collector 18 .

First, as shown in FIG. 4( a ), the concave container 2 in which the bonding metal layer 8 , the through electrodes 21 , 22 , the metal layer 11 , and the terminals 10 , 12 are formed is prepared.

Then, conductive paste as current collector 18 is supplied to storage portion 17 . The supply amount of the conductive paste is set so as to cover the entire bottom surface of the reservoir 17 to form a meniscus 19 .

FIG. 4( b ) is a view of the concave container 2 viewed from above before the conductive paste is supplied to the storage portion 17 .

As shown in the figure, at the bottom of the reserving portion 17, the metal layer 11 is formed in a circular shape. In addition, the shape of the metal layer 11 may be any shape such as a rectangle.

(c) of FIG. 4 is a figure which looked at the state after supplying the conductive paste to the concave container 2 from above. In the center of the concave container 2, a conductive paste serving as a current collector 18 is stored.

Next, as shown in FIG. 5 , the electrode 6 is placed on the liquid surface of the conductive paste as the current collector 18 . Then, the electrode 6 is positioned at the central portion of the reservoir portion 17 by the meniscus 19 of the conductive paste.

Then, after heating to a temperature of about 180 [° C.], the conductive paste is solidified to become the current collector 18 , and the electrode 6 is fixed to the central portion of the storage portion 17 .

Although not shown, the separator 7 is placed on the electrode 6, electrolyte is supplied, and the opening of the recess 13 is sealed and brazed with the sealing plate 3 on which the electrode 5 is attached, and the electric double layer capacitor 1 is completed.

In addition, the process of supplying and curing the conductive paste to the storage portion 17 is performed multiple times (that is, coating is divided into multiple times), whereby the current collector 18 can be formed in a layered form.

In this case, the process of supplying the conductive paste to the storage portion 17 for heat curing and then supplying the conductive paste above it for heat curing is repeated until the lower layer of the uppermost layer is reached.

Then, when forming the uppermost layer, the conductive paste as the uppermost layer is supplied, and the electrode 6 is placed on the liquid surface, followed by heating to cure the conductive paste of the uppermost layer. In this way, current collector 18 is formed in a layered shape.

Also, in the case where the thickness of the conductive paste is thin, variation in resistance occurs due to the difference in thickness and distribution of the conductive paste, thereby causing a low degree of power concentration.

Therefore, when applying the conductive paste, it is important to apply it with a uniform thickness of about 50 μm or more. By heating after application, the main agent of the hardening component contained in the paste and the cured catalyst are polymerized by a chemical reaction, and the carbons are in contact with each other to form the current collector layer 18 having an electronically conductive grid.

At this time, an organic solvent may be added for the purpose of reducing the viscosity of the conductive paste, and bubbles may be generated when the solvent is vaporized, and small communicating holes with a diameter of about several μm may be formed.

Alternatively, gas components in the atmosphere entrained at the time of coating the conductive paste may also form the aforementioned small-diameter communication holes. When the electrolyte is in contact with the metal layer 11 through the communication hole, the metal in the metal layer 11 may be eluted from the communication hole, and may be reduced on the surface of the activated carbon to become a metal.

In order to avoid such dissolution and precipitation of the metal, decompression is performed after the conductive paste is applied to eliminate air bubbles, whereby the effect of suppressing the generation of the via hole can be obtained.

In addition, even when the conductive paste is applied to a uniform thickness of about 50 μm or more in multiple times, the effect of suppressing the formation of the via hole can be obtained. At this time, the coating may be divided into at least two times or more, and it is more preferable to apply three or more times.

According to the embodiment described above, the following effects can be obtained.

(1) The current collector 18 of the positive electrode can be formed from a carbon material.

(2) Since the conductive paste is solidified to form the current collector 18 , a dry process such as vacuum deposition is not required.

(3) By providing the storage portion 17 at the bottom of the concave portion 13 , the liquid conductive paste can be stored, and overflow of the conductive paste can be prevented.

(4) By placing the electrode 6 on the stored liquid conductive paste, the electrode 6 can be easily positioned by the surface tension of the conductive paste.

(2) Second embodiment

(a) of FIG. 6 is a side cross-sectional view of the electric double layer capacitor 1 of the second embodiment.

The same reference numerals are assigned to the same constituent elements as those of the first embodiment, and description thereof will be omitted.

A protrusion 33 that divides the bottom surface into two is formed on the bottom surface of the recessed portion 13 . Then, two storage portions 17 a and 17 b are formed on the bottom surface of the concave portion 13 by the protruding portion 33 as a storage portion for storing the conductive paste before curing.

The conductive paste solidified in the storage portions 17a, 17b becomes current collectors 18a, 18b, respectively. In addition, the conductive paste used is the same as that of the first embodiment.

The depths of the reservoirs 17a and 17b are such that the conductive paste remains, and the inner circumferences of the reservoirs 17a and 17b are set to be larger than the outer circumferences of the electrodes 5 and 6 by the extent of the meniscus of the conductive paste.

Metal layers 11a, 11b are formed on the bottom surfaces of storage portions 17a, 17b, respectively. The manufacturing method of the metal layers 11a and 11b is the same as that of the metal layer 11 of the first embodiment.

Reservoirs 17a, 17b are electrically connected to terminals 10, 12 through penetration electrodes 21, 22 formed on the bottom of concave container 2, respectively. Penetration electrodes 21 and 22 are reliably joined by intermediate electrode 28 .

In the storage portions 17a, 17b, the layers of the current collectors 18a, 18b after the conductive paste is cured are formed on the upper surfaces of the metal layers 11a, 11b, respectively, and further, on the layers of the current collectors 18a, 18b, The electrodes 5, 6 are exposed.

When the conductive paste is liquid, the electrodes 5 and 6 are placed on the conductive paste, the conductive paste is heated to solidify, and the electrodes 5 and 6 are fixed to the storage portions 17a and 17b via the current collectors 18a and 18b.

The metal layers 11a, 11b are formed in the minimum necessary area, the thickness is made uniform by the conductive paste, and the upper surfaces of the current collectors 18a, 18b are flat. In addition, the metal layers 11a, 11b may be formed on the entire bottom surfaces of the storage portions 17a, 17b.

The electrodes 5 and 6 have a rectangular parallelepiped shape and are made of the same material as the electrodes 5 and 6 of the first embodiment. In addition, the electrodes 5 and 6 may have other shapes such as cylindrical shapes.

In the second embodiment, since the electrodes 5 and 6 are formed symmetrically, either one can be made a positive electrode.

In addition, the electrodes 5 and 6 face each other on the upper portion of the protrusion 33 , and the spacer 7 for preventing short circuit is arranged between the electrodes 5 and 6 . The material of the separator 7 is the same as that of the first embodiment. In addition, when a solid electrolyte is used, the separator 7 is unnecessary.

Recess 13 is filled with electrolyte, and permeable member 31 permeated with the electrolyte is provided between the upper surfaces of electrodes 5 , 6 and the lower surface of sealing plate 3 (surface of metal layer 15 ).

The permeable member 31 is formed of a glass material, a resin core, or the like in a sponge shape, and has elasticity and liquid absorption.

The permeable part 31 is pressed by the electrodes 5 , 6 and the separator 7 . Thus, the permeable member 31 can hold the electrodes 5, 6 and the separator 7 in a state where the electrodes 5, 6 are in contact with the electrolyte.

The structure of the sealing plate 3 is the same as that of the first embodiment, however, for example, a member may be used in which the sealing plate 3 is formed of aluminum and an insulating layer made of alumina is formed on the lower surface by thermal oxidation treatment. Thereby, even when the electrodes 5 and 6 come into contact with the lower surface of the sealing plate 3 due to impact or the like, it is possible to prevent a short circuit.

Similar to the first embodiment, the concave container 2 is formed by stacking green sheet-based sheets 41 to 45 .

Through holes for forming the through electrodes 21 and 22 are formed in the sheets 41 and 42 , and openings corresponding to the recesses 13 are formed in the sheets 43 to 45 . A portion serving as the protrusion 33 remains on the sheet 43 .

(b) of FIG. 6 is a diagram for explaining a modified example of the second embodiment.

In this example, electric double layer capacitor 1 does not have through electrodes 21 and 22 , and electrodes 5 and 6 are connected to terminals 10 and 12 through wiring formed on the side surface of concave container 2 . Other configurations are the same as those of the second embodiment described above.

The metal layers 11a, 11b penetrate from the bottoms of the storage parts 17a, 17b along the surface of the sheet 42 to the outside of the concave container 2, and are electrically connected to the terminals 10, 12 via the side surfaces of the concave container 2. The metal layers 11a, 11b are formed on the bottom surfaces of the storage portions 17a, 17b with the necessary minimum size, but may be formed on the entire bottom surfaces.

In this way, the electric double layer capacitor 1 can be configured without using the through electrodes.

(a) of FIG. 7 is a figure for demonstrating still another modification of 2nd Embodiment.

Resin sheets 41 to 45 are formed to constitute the concave container 2 .

As the resin, for example, PTFE (polytetrafluoroethylene), PFA (tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer), FRP (fiber reinforced plastic), or the like can be used.

PFA has properties unique to resins welded to stainless steel, and PTFE has properties unique to resins such as high strength. Therefore, sheets of different types of resins can be combined, for example, sheet 41 is made of PTFE, sheets 42 and 43 are made of PFA, and sheets 42 and 43 are made of PFA. Materials 44, 45 are PTFE.

Metal layers 11 a and 11 b are formed using, for example, stainless steel plates, laminated together with the sheets 41 to 45 , heated, and fused with the sheets 42 and 43 .

Metal layers 11a, 11b are bent on the bottom surface of concave container 2, and terminals 10, 12 are formed at the front end portions of metal layers 11a, 11b.

The sealing plate 3 is made of, for example, a PTFE sheet, and is welded to the opening of the concave container 2 by laser welding or the like.

The thickness of the metal layers 11a, 11b is made uniform by the conductive paste, and the upper surfaces of the current collectors 18a, 18b are flat. Multiple coats of conductive paste are also possible.

When a metal plate is used as the metal layers 11a, 11b, cost can be reduced.

(b) of FIG. 7 is a figure for demonstrating still another modification of 2nd Embodiment.

In this example, the current collector 18a and the metal layer 11a, and the current collector 18b and the metal layer 11b are electrically connected by through electrodes 61a and 61b formed by curing the conductive paste, respectively.

Each figure of FIG. 8 is a figure for demonstrating the formation method of current collector 18a, 18b.

First, as shown in FIG. 8( a ), concave container 2 in which bonding metal layer 8 , penetration electrodes 21 , 22 , reservoirs 17 a , 17 b , metal layers 11 a , 11 b , and terminals 10 , 12 are formed is prepared.

Then, the conductive paste is supplied to the storage parts 17a and 17b. The supply amount of the conductive paste is set so as to cover the entire bottom surfaces of the reservoirs 17a, 17b to form the menisci 19a, 19b.

(b) of FIG. 8 shows the situation after supplying the conductive paste to the concave container 2 as seen from above. The cured conductive paste serving as current collectors 18a, 18b is stored in the storage portions 17a, 17b.

Next, as shown in (c) of FIG. 8 , the electrodes 5 and 6 are respectively placed on the liquid surface of the conductive paste. Then, the electrodes 5, 6 are respectively positioned at the central portions of the reservoirs 17a, 17b by the meniscus of the conductive paste.

Then, when heated to a temperature of about 180[° C.], the conductive paste is cured to form current collectors 18a, 18b, and electrodes 5, 6 are fixed to the central portions of storage portions 17a, 17b.

Although not shown in the figure, a separator 7 is then placed between the electrodes 5 and 6 to supply an electrolyte. Further, the permeable member 31 permeated with the electrolyte is placed on the electrodes 5 and 6, and the opening of the recess 13 is sealed and brazed with the sealing plate 3, and the electric double layer capacitor 1 is completed.

According to the first embodiment described above, the following configurations can be obtained.

The concave portion 13 becomes a hollow portion, and therefore, the concave container 2 sealed by the sealing plate 3 functions as a container having a hollow portion.

The metal layer 11 and the penetration electrode 22 bonded to the metal layer 11 function as a first conductor conducting from the cavity to the outside of the container.

The current collector 18 functions as a first current collector that is bonded to the first conductor in the cavity and uses carbon as a conductive material.

The electrode 6 functions as a first electrode bonded to the first current collector.

The portion 52 of the metal layer 15 not in contact with the electrode 5 , the bonding metal layer 8 bonded to the portion 52 , and the through electrode 21 function as a second conductor conducting from the cavity to the outside of the container.

A portion 51 of the metal layer 15 that is in contact with the electrode 5 functions as a second current collector joined to the second conductor in the cavity.

The electrode 5 functions as a second electrode joined to the second current collector and facing the first electrode with a predetermined distance therebetween.

The electrolyte enclosed in the concave portion 13 functions as an electrolyte in contact with the first electrode and the second electrode.

The electrode 6 is used as a positive electrode, and the electrode 5 is used as a negative electrode. Therefore, the first electrode is a positive electrode and the second electrode is a negative electrode.

In order to prevent the metal layer 11 from being dissolved in the electrolyte, the metal layer 11 is entirely covered by the current collector 18 in the concave portion 13 , and therefore, the first current collector covers the entire first conductor in the cavity.

The conductive paste is obtained by processing a phenolic resin containing a carbon material and a solvent into a paste form, and the phenolic resin component is polymerized into a resinous form. Therefore, the first current collector is formed of a resin using carbon as a conductive material.

The current collector 18 is formed in the reservoir portion 17 (formed by a concave portion), and therefore, the first current collector is formed in the concave portion formed in the hollow portion.

By repeating the supply and curing of the conductive paste, the current collector 18 can be formed in a layered form. In this case, the first current collector is formed in a layered form with a member made of carbon as a conductive material.

Furthermore, in the second embodiment, the electrode 5 is also used to form a current collector using the conductive paste, so in this case, the second current collector uses carbon as a conductive material.

Furthermore, the electric double layer capacitor 1 can be used, for example, as a memory of a mobile phone or as a backup power source for a clock.

In this case, the mobile phone functions as an electronic device including: an electronic component composed of an electric double layer capacitor 1; ; other electronic components that perform predetermined functions such as a memory or a clock; and a power supply unit that uses the accumulated charge to supply power to the other electronic component, for example, discharges the accumulated charge to supply power to the memory or the clock wait.

The sheets 41 to 45 are laminated to form the concave container 2 in which the concave portion 13 for forming the cavity, the storage portion 17, the metal layer 11, and the through electrodes 21 and 22 are formed. Therefore, the manufacturing process of the electric double layer capacitor 1 The method includes the step of forming a concave container having a concave portion for forming a cavity, a storage portion formed in the concave portion for storing conductive paste, and a bottom surface of the storage portion leading to the outside. 1st conductor.

In addition, the conductive paste is supplied to the storage part 17, the electrode 6 is placed on the liquid surface, and then heated to solidify the conductive paste. Therefore, this manufacturing process includes the step of supplying a conductive paste using carbon as a conductive material to the storage part. a step of paste, a step of providing a first electrode on the supplied conductive paste, and a step of curing the conductive paste provided with the first electrode to form a first current collector.

Furthermore, the electrode 5 is bonded to the metal layer 15, the electrolyte is supplied to the recess 13, and the electrode 5 is provided in the recess 13 together with the separator 7. Therefore, this process includes the steps of forming a second current collector in the recess, A second electrode provided on the second current collector and opposed to the first electrode with a predetermined distance therebetween, a second conductor connected to the second current collector and conducted to the outside, and a second conductor connected to the second current collector An electrolyte in contact with the first electrode and the second electrode.

Since brazing is performed and the recess 13 is sealed with the sealing plate 3, this process includes the step of sealing the recess.

Claims (9)

1. An electronic component, characterized in that the electronic component has: a container having a cavity; a first conductor conducting from the cavity to the outside of the container; a first collector using carbon as a conductive material, which is bonded to the first conductor in the cavity; a first electrode bonded to the first current collector; a second conductor conducting from the cavity to the outside of the container; a second current collector joined to the second conductor in the cavity; a second electrode joined to the second current collector and facing the first electrode with a predetermined distance therebetween; and an electrolyte in contact with the first electrode and the second electrode. 2. The electronic component according to claim 1, wherein The first electrode is a positive electrode, and the second electrode is a negative electrode. 3. The electronic component according to claim 1 or 2, wherein The first current collector covers the entire first conductor in the cavity. 4. The electronic component according to claim 1, 2 or 3, characterized in that, The first current collector is formed of a resin using carbon as a conductive material. 5. The electronic component according to any one of claims 1 to 4, wherein The first current collector is formed in a recess formed in the cavity. 6. The electronic component according to any one of claims 1 to 5, wherein In the first current collector, a member made of carbon as a conductive material is formed in layers. 7. The electronic component according to any one of claims 1 to 6, wherein The second current collector uses carbon as a conductive material. 8. An electronic device, characterized in that the electronic device has: The electronic component according to any one of claims 1 to 7; an electric storage unit that accumulates electric charge to the electronic component; other electronic components, which perform their intended function; and and a power supply unit that supplies power to the other electronic components using the accumulated electric charge. 9. A manufacturing method of an electronic component, characterized in that the manufacturing method of the electronic component comprises the following steps: A concave container is formed, wherein the concave container has a concave portion for forming a cavity, a storage portion for storing conductive paste formed in the concave portion, and a first conductive paste conducting from the bottom surface of the storage portion to the outside. body; supplying a conductive paste using carbon as a conductive material to the storage portion; setting a first electrode on the supplied conductive paste; curing the conductive paste provided with the first electrode to form a first current collector; A second current collector is formed in the concave portion, and a second electrode provided on the second current collector and opposed to the first electrode with a predetermined distance therebetween is bonded to the second current collector and is electrically connected to the second current collector. a second electrical conductor to the outside, and an electrolyte in contact with the first electrode and the second electrode; and The recess is sealed.

Images