CN102353841A - Resistance measuring device for laser trimmer - Google Patents
Resistance measuring device for laser trimmer Download PDFInfo
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- CN102353841A CN102353841A CN2011102935293A CN201110293529A CN102353841A CN 102353841 A CN102353841 A CN 102353841A CN 2011102935293 A CN2011102935293 A CN 2011102935293A CN 201110293529 A CN201110293529 A CN 201110293529A CN 102353841 A CN102353841 A CN 102353841A
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Abstract
The invention discloses a resistance measuring device for a laser trimmer, which comprises a programmable constant current pool circuit, a voltage measuring circuit and a voltage comparing and triggering circuit, wherein the programmable constant current pool circuit is connected with the voltage measuring circuit which is connected with the voltage comparing and triggering circuit; the programmable constant current pool circuit is used for constant current; the voltage measuring circuit is used for measuring the voltage of the resistance to be measured; and the voltage comparing and triggering circuit is connected with an interrupt signal input end of a CPU (Central Processing Unit) chip and is used for outputting an interrupt signal. By adopting the resistance measuring device for the laser trimmer which is disclosed by the invention, the resistance measuring device for the laser trimmer no longer depends on an operation system of a computer and the like, and thus the measurement efficiency for the resistance of the laser trimmer is improved.
Description
Technical field
The present invention relates to integrated circuit manufacturing equipment field, particularly relate to a kind of electric resistance measuring apparatus that is used for laser resistance adjuster.
Background technology
Laser resistor trimming is a kind of technology of transferring resistance of repairing.Its principle is: when high-power laser beams bump thick film or film resistor material surface, the resistance material medium gasification at impinging light beam place raises resistance.Laser resistance adjuster utilizes this principle exactly, and resistance is repaiied accent, obtains meeting the device of the resistance of resistance accuracy requirement.
Laser resistance adjuster need measure earlier and wait to repair the resistance of transferring resistance before repairing accent resistance.In the prior art, use following two kinds of methods to realize resistance measurement usually: digital universal meter measuring resistance method and constant current able to programme output--measuring voltage method.
Numeral universal meter measuring resistance method is more common and fairly simple method.This method adopts main frame operational outfit driver, connects and sends the command function of digital universal meter measuring resistance and the resistance range is provided with order through USB interface (or 232 interfaces or IEEE488 interface) and digital universal meter.The numeral universal meter is returned to main frame according to the command execution resistance measurement and with resistivity measurements.
Constant current output able to programme--the measuring voltage method is also claimed Kelvin's resistance measurement method.According to ohm theorem (R=U/I), resistance voltage value is divided by the i.e. resistance value of resistance for this reason of the current value of this resistance of flowing through.Before measuring resistance; According to the general resistance of measured resistance constant current source able to programme being carried out constant current value earlier sets: promptly according to AD capture card voltage measurement scope; Move constant current source device driver able to programme, set suitable continuous current value, make continuous current this resistance of flowing through.AD capture card analog detection end is connected to the resistance two ends and reads the AD data, and main frame is through calculating resistance.
Above-mentioned two kinds of methods all are that laser resistance adjuster is linked to each other with the PC main frame.Main frame operation IO expansion card device driver, the resistance measurement control signal is exported by the IO expansion card.Because in the time of main frame operation IO expansion card device driver; Meeting operation system program; So can cause overall electrical resistance measuring speed slow (usually need be several from setting up communication, the selection of resistance measurement range also can spend certain hour) to tens milliseconds to the foldback data.
Summary of the invention
The purpose of this invention is to provide a kind of electric resistance measuring apparatus that is used for laser resistance adjuster, can improve the efficient of the measuring resistance of laser resistance adjuster.
For realizing above-mentioned purpose, the invention provides following scheme:
A kind of electric resistance measuring apparatus that is used for laser resistance adjuster comprises: constant current able to programme pond circuit, tension measuring circuit and voltage ratio reach trigger circuit; Said constant current able to programme pond circuit links to each other with said tension measuring circuit; Said tension measuring circuit reaches trigger circuit with said voltage ratio and links to each other;
Said constant current able to programme pond circuit is used for steady current; Said tension measuring circuit is used to measure the voltage of resistance to be measured; Said voltage ratio reaches trigger circuit and links to each other with the look-at-me input end of cpu chip, is used to export look-at-me.
Preferably, said constant current able to programme pond circuit comprises: numerical control aanalogvoltage maker, ratio discharge circuit and constant current numerical value latch.
Preferably, said tension measuring circuit comprises: programmable-gain voltage amplifier, current driver, operational amplifier and analog to digital converter.
Preferably, said operational amplifier comprises: and be connected into the high input impedance operational amplifier of voltage follower form and high-accuracy operational amplifier.
Preferably, said tension measuring circuit also comprises: the resistance measurement auxiliary circuit; Said resistance measurement auxiliary circuit comprises: T type resistor network resistance test circuit and O type resistor network resistance test circuit.
Preferably, also comprise: the measuring accuracy correcting circuit; Said measuring accuracy correcting circuit and said constant current able to programme pond circuit are used to improve the current precision of constant current able to programme pond circuit output.
According to specific embodiment provided by the invention, the invention discloses following technique effect:
The disclosed electric resistance measuring apparatus that is used for laser resistance adjuster of the present invention; Reach hardware circuits such as trigger circuit through constant current able to programme pond circuit, tension measuring circuit and voltage ratio; Realization is to the measurement of resistance; Replaced software driver of the prior art; Make the disclosed electric resistance measuring apparatus that is used for laser resistance adjuster of the present invention; Be no longer dependent on the operating system of computing machine etc., improved the efficient of the measuring resistance of laser resistance adjuster.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use among the embodiment below; Obviously; Accompanying drawing in describing below only is some embodiments of the present invention; For those of ordinary skills; Under the prerequisite of not paying creative work property, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the disclosed electric resistance measuring apparatus structural drawing that is used for laser resistance adjuster of the present invention;
Fig. 2 is a constant current able to programme pond circuit first circuit diagram;
Fig. 3 is a constant current able to programme pond circuit second portion circuit diagram;
Fig. 4 is a constant current able to programme pond circuit third part circuit diagram;
Fig. 5 is constant current able to programme pond circuit the 4th partial circuit figure;
Fig. 6 is a tension measuring circuit first circuit diagram;
Fig. 7 is a tension measuring circuit second portion circuit diagram;
Fig. 8 is a resistance measurement principle simplified electrical circuit diagram;
Fig. 9 is a T type resistor network resistance test circuit diagram;
The circuit theory diagrams of Figure 10 for resistance R 1 is measured;
The circuit theory diagrams of Figure 11 for resistance R 2 is measured;
The circuit theory diagrams of Figure 12 for resistance R 2 is measured;
Figure 13 is an O type resistor network resistance test circuit diagram;
The circuit theory diagrams of Figure 14 for the resistance R 2 in the O type resistor network is measured;
Figure 15 is that voltage ratio reaches trigger circuit first circuit diagram;
Figure 16 is that voltage ratio reaches trigger circuit second portion circuit diagram;
Figure 17 is a measuring accuracy correcting circuit first circuit diagram;
Figure 18 is a measuring accuracy correcting circuit second portion circuit diagram;
Figure 19 is a measuring accuracy correcting circuit third part circuit diagram;
Figure 20 is logic control signal generative circuit figure;
Figure 21 is EST bus circuit figure.
Embodiment
To combine the accompanying drawing in the embodiment of the invention below, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the present invention's protection.
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below in conjunction with accompanying drawing and embodiment the present invention done further detailed explanation.
Fig. 1 is the disclosed electric resistance measuring apparatus structural drawing that is used for laser resistance adjuster of the present invention.As shown in Figure 1, this device comprises: constant current able to programme pond circuit 101, tension measuring circuit 102 and voltage ratio reach trigger circuit 103; Said constant current able to programme pond circuit 101 links to each other with said tension measuring circuit 102; Said tension measuring circuit 102 reaches trigger circuit 103 with said voltage ratio and links to each other;
Said constant current able to programme pond circuit 101 is used for steady current; Said tension measuring circuit 102 is used to measure the voltage of resistance to be measured; Said voltage ratio reaches trigger circuit 103 and links to each other with the look-at-me input end of cpu chip, is used to export look-at-me.
The disclosed electric resistance measuring apparatus that is used for laser resistance adjuster of the present invention; Reach hardware circuits such as trigger circuit through constant current able to programme pond circuit, tension measuring circuit and voltage ratio; Realization is to the measurement of resistance; Replaced software driver of the prior art; Make the disclosed electric resistance measuring apparatus that is used for laser resistance adjuster of the present invention; Be no longer dependent on the operating system of computing machine etc., improved the efficient of the measuring resistance of laser resistance adjuster.
In order to improve the measuring accuracy of the electric resistance measuring apparatus that is used for laser resistance adjuster, the disclosed device of the present invention can also comprise: measuring accuracy correcting circuit 104; Said measuring accuracy correcting circuit 104 and said constant current able to programme pond circuit 101 are used to improve the current precision of constant current able to programme pond circuit 104 outputs.
Fig. 2 is a constant current able to programme pond circuit first circuit diagram; Fig. 3 is a constant current able to programme pond circuit second portion circuit diagram; Fig. 4 is a constant current able to programme pond circuit third part circuit diagram; Fig. 5 is constant current able to programme pond circuit the 4th partial circuit figure.
Principle of work in the face of constant current able to programme pond circuit describes down.
The present invention adopts Kelvin's resistance measurement principle to carry out resistance measurement.For realizing Kelvin's resistance measurement, it is necessary that accurate continuous current is provided.For thick film circuit, on the same substrate low resistance, middle resistance and high resistance measurement might be arranged simultaneously.This requires continuous current pond circuit that very wide range of adjustment must be arranged.Continuous current pond circuit receives the restriction of voltage detecting circuit input voltage simultaneously, therefore will guarantee that also the product of continuous current value and resistance value is no more than the input voltage upper limit (can not exceed the voltage measurement scope).
Among Fig. 2-5, U1, U2, U3, U4, U5 are respectively that full journey is the accurate continuous current generation module of 40mA, 4mA, 400 μ A, 40 μ A, 4 μ A.The Kai Heguan of each module of Iexp pin control on each module.As U108_PIN12 (Q5) when being high, continuous current generation module U1 is opened; In like manner, when Q4, Q3, Q2, the Q1 of U108 are respectively high, can open continuous current generation module U2, U3, U4, U5 respectively.The Sin pin is the analog voltage input of control module output continuous current size on the module, when its voltage during from the 0-4V linear change, the continuous current that the continuous current generation module that is opened is exported also from zero to full journey linear change.For example, when Q1, Q2, Q3, the Q4 of U108 are low, when Q5 was high, U1 was opened.During Us=0V, continuous current is output as 0mA; During Us=2V, continuous current is output as 20mA; During Us=4V, continuous current is output as 40mA, and the rest may be inferred.U108 is the Iexp data latches, and its data are write through the EST bus by CPU, controls the switching of each continuous current generation module.(in the continuous current generation module circuit; Continuous current Is flows through CR302, CR304, CR306, CR308, CR310 and Q301, Q302, Q303, Q304, Q305 to continuous current generation module pin 4, and what module of specifically flowing through is by Iexp decision on each continuous current generation module).
Among Fig. 2-5, U106, U107, U301, RN4 and U302 form numerical control aanalogvoltage maker (also claiming the Us voltage regulator).U301 is 16 D/A converters, and D0-D15 is 16 bit data input ends, and PIN17 is the aanalogvoltage output terminal.When D0-D15 is 0000H, PIN17 output 10V voltage; When D0-D15 was FFFFH, PIN17 exported 0V voltage (negative sense output).RN4 and U302 form the ratio discharge circuit of K=0.4.So when U301_PIN17 when 0V-10V changes, U302_PIN6 exports 0V-4V thereupon.U106, U107 are constant current numerical value (Mantissa) latch, and its data export U301 data input pin (D0-D15) to.
The continuous current value that constant current able to programme pond circuit produces can be expressed as:
Through Mantissa being write U106, U107, Iexp is write U108 can obtain desired continuous current value.
Fig. 6 is a tension measuring circuit first circuit diagram; Fig. 7 is a tension measuring circuit second portion circuit diagram.
Shown in Fig. 6-7: Rx for the laser trimming of wanting and the resistance that will measure.U204 is the programmable-gain voltage amplifier; U206, U209 are current driver; U210 is high input impedance operational amplifier and is connected into the voltage follower form; U205, U207 are that high-accuracy operational amplifier, U201 are 16 high-speed A/D converters; Programmable-gain voltage amplifier output voltage is carried out the AD conversion, and translation data outputs to the EST bus through U102, U109 and supplies CPU to read.The resistance measurement principle that the circuit that U205, U206, U207, U209, U210 form can be reduced to is as shown in Figure 8 simplified circuit.
Because the input impedance of U204, U210 is very big, so the electric current of the Rx that flows through is Is.When Is flows through Rx, just produced voltage at the Rx two ends.This voltage is sent into U201 and is carried out the AD conversion after the differential amplification of U204, its data that obtain just are 16 voltage datas at Rx two ends.CPU utilizes the continuous current Value Data of this voltage data and setting just can calculate the resistance value of Rx.U201 is 16 high-speed A/D converters, and input voltage range is 0V-10V, adopts the negative sense coding, and promptly the AD data of 0V are FFFFH, and the AD data of 10V are 0000H.U204 is the programmable-gain voltage amplifier, and wherein PIN1, PIN14 are yield value (Gain) control input end.For the resistance that improves different Standard resistance ranges carries out the precision that resistance detects; Simultaneously in order to satisfy the restriction of AD converter to input voltage range; Must (for example handle the voltage at the resistance two ends of different I s; When Is=40mA (maximum continuous current value); When the measurement resistance is 1 Ω resistance; At the resistance two ends 0.04V voltage is only arranged, when GAIN=100, U204 is output as 4V).The relation of U204_PIN1 and U204_PIN14 and yield value is:
U205, U209 and accessory circuit thereof are formed the resistance measurement auxiliary circuit of special resistor network.Work as G
HWith G
LDuring short circuit, U205, U209 circuit equivalent are in a voltage follower, and its input end current potential equates with the output terminal current potential, promptly with V
LCurrent potential equates.
Resistance measurement auxiliary circuit and principle of work thereof in the face of particular electrical resistance network is elaborated down.
(1) Fig. 9 is a T type resistor network resistance test circuit diagram.When three resistance were constructed as follows the T-shape structure and three test leads (test lead 1, test lead 2, test lead 3) are only arranged, the present invention can accurately test the resistance of each resistance.
Above-mentioned T type resistor network can't accurately be measured each resistance by general method for testing resistance, because contain two series resistors between any two test leads.Utilize V
H, I
HAnd V
L, I
LSelectivity combination can accurately test each resistance.Test philosophy is seen Figure 10-12.
The circuit theory diagrams of Figure 10 for resistance R 1 is measured.As shown in figure 10, as test lead 1 connection V
L, I
L, test lead 2 connects I
H, test lead 3 connects V
HThe time, because the VH end connects U204, its input impedance is very high, I
SOnly flow through R1 and R2 (among the R3 no current through), and test lead 3 (V
H) equate with public C point current potential, so voltage is R1 voltage V between test lead 3 and the test lead 1
R1, can get R1=V by Ohm law
R1/ I
S
The circuit theory diagrams of Figure 11 for resistance R 2 is measured.As shown in figure 11, as test lead 2 connection V
L, I
L, test lead 1 connects I
H, test lead 3 connects V
HThe time, because V
HEnd connects U204, and its input impedance is very high, I
SOnly flow through R1 and R2 (among the R3 no current through), and test lead 3 (V
H) equate with public C point current potential, so voltage is R2 voltage V between test lead 3 and the test lead 2
R2, can get R2=V by Ohm law
R2/ I
S
The circuit theory diagrams of Figure 12 for resistance R 2 is measured.As shown in figure 12, as test lead 1 connection I
H, test lead 3 connects V
L, I
LTest lead 2 connects V
HThe time, because V
HEnd connects U204, and its input impedance is very high, I
SOnly flow through R1 and R3 (among the R2 no current through), and test lead 2 (V
H) equate with public C point current potential, so voltage is R3 voltage V between test lead 2 and the test lead 3
R3, can get R3=V by Ohm law
R3/ I
S
(2) Figure 13 is an O type resistor network resistance test circuit diagram.When three resistance (or more than three) were constructed as follows " O " type loop structure, the present invention can accurately test the resistance of each resistance.
Each resistance all is in parallel with all the other 3 resistance in seriess in the above-mentioned O type resistor network, and it is impossible that each resistance is accurately tested by conventional method.And by means of G
H, G
LJust can realize each resistance is accurately tested.Below be example with measuring resistance R2, sketch its principle and method.
The circuit theory diagrams of Figure 14 for the resistance R 2 in the O type resistor network is measured.As shown in figure 14, with G
H, G
LBehind the short circuit, be connected to the P4 measuring junction, V
H, I
HBe connected to the P1 measuring junction, V
L, I
LBe connected to the P2 measuring junction.G
H, G
LBehind the short circuit, U205, U209 and accessory circuit thereof are formed voltage follower, so P2 point current potential equates (U210 also constitutes voltage follower) with P4 point current potential.Can know that by electricity knowledge when P2 point current potential equated with P4 point current potential, the P2 point was equivalent to open circuit (although having R3 to link to each other) with the P4 point, so no current process among the R3.Because I
HConnect the P1 end, I
LConnect the P2 end, the input impedance of U204, U210 is very big, so electric current can only be IS among the process R2.V
HConnect the P1 end, VL connects the P2 end, and voltage is R2 voltage and V between P1 and the P2
R2=I
S* R2.Can get R2=V by Ohm law
R2/ I
S
In like manner, with G
H, G
LBehind the short circuit, be connected to the P2 measuring junction, V
H, I
HBe connected to the P3 measuring junction, V
L, I
LBe connected to the P1 measuring junction, accurately measure R 1; With G
H, G
LBehind the short circuit, be connected to the P1 measuring junction, V
H, I
HBe connected to the P4 measuring junction, V
L, I
LBe connected to the P3 measuring junction, accurately measure R 4; With G
H, G
LBehind the short circuit, be connected to the P3 measuring junction, V
H, I
HBe connected to the P2 measuring junction, V
L, I
LBe connected to the P4 measuring junction, accurately measure R 3.
U201 is 16 high-speed A/D converters, is used for converting the magnitude of voltage of U204 output to 16 bit binary data.Wherein PIN31 is an AD conversion starting signal input end, and when negative edge appearred in PIN31, U201 began the AD conversion, and PIN18 is that AD converts the output signal.After U201 accomplished the AD conversion, PIN18 exported a low level signal, and this signal generates low pulse INT2 to an EST bus after monostable circuit U101A handles.The AD slewing rate is very fast, is generally about 25uS.16 bit binary data D0-D15 of U201 output export EST bus confession CPU through U102 to the U109 gating and read.
Figure 15 is that voltage ratio reaches trigger circuit first circuit diagram; Figure 16 is that voltage ratio reaches trigger circuit second portion circuit diagram.
The major function that voltage ratio reaches trigger circuit is to improve the resistance trimming efficient of laser resistance adjuster, avoids when laser resistor trimming, detecting continually with the calculated resistance resistance also comparing with nominal resistance again.The principle that voltage ratio reaches trigger circuit is: adopt real-time follow-up to be repaiied and transfer the resistance voltage also it and CUTOFF threshold voltage (claiming comparative voltage again) to be compared; In case the resistance voltage is greater than the CUTOFF threshold voltage; Level upset (by high step-down) just takes place in comparer output, simultaneously with after the d type flip flop that connects trigger into low level.This low level generates low level pulse INT0 to an EST bus through monostable circuit U101B, and CPU is interrupted.Among Figure 15,16, U208 is high-accuracy voltage comparator, and U202 is 16 DA converters, and its 16 bit binary data (by user's resistance trimming program setting) according to U103, U110 output generate the CUTOFF threshold voltage.U113 is a d type flip flop, when U113_PIN4 when low, close U113 output (normal output is high, and comparer output is invalid), when the laser resistor trimming pattern, be set to height usually; U113_PIN3 is the rising edge trigger end, when U113_PIN4 be height and U113_PIN3 when rising edge occurring the Q end be set to the voltage comparator output level.When carrying out laser resistor trimming, this end is exported by the laser resistor trimming control module, and synchronous with laser pulse.U113_PIN6 outputs to the laser resistor trimming control module to carry out the laser resistor trimming steering logic for negative Q output after the U112C anti-phase.
Figure 17 is a measuring accuracy correcting circuit first circuit diagram; Figure 18 is a measuring accuracy correcting circuit second portion circuit diagram; Figure 19 is a measuring accuracy correcting circuit third part circuit diagram.
The measuring accuracy correcting circuit, the measuring accuracy when being used to improve electric resistance measuring apparatus resistance being measured.Machine is when start; System utilizes this circuit that the high-accuracy resistance of standard (0.01% resistance error precision) is measured; And obtain the constant current modified value in existing each full each reference constant current of journey constant flow module, with the detection of satisfying different Standard resistance range resistance one continuous current value is accurately arranged.Principle is following:
1. Gain=1000 is set, Mantissa=0000H (being Is=40mA), the high-accuracy resistance R S1 of measurement standard (0.100 Ω) establishes and surveys to such an extent that error is K
1(U204 output theoretical voltage is 4V, and actual measurement voltage is Ux, then K
1=(Ux-4)/4).
2. Gain=1000 is set, Mantissa=E666H (being Is=4mA), the high-accuracy resistance R S2 of measurement standard (1.00 Ω) establishes and surveys to such an extent that error is K
2(U204 output theoretical voltage is 4V, and actual measurement voltage is Ux, then K
2=(Ux-4)/4).
3. calculate and derive and can get, when resistance was in 0.100 Ω≤R＜1.00 Ω, the Mantissa of measuring resistance can be modified to:
Mantissa＝65535×{1-0.1/[R·(1+K)]}；
K=[(K wherein
2-K
1) (R-0.1)]/0.9+K
1R is a nominal resistance.
4. Gain=100 is set, Mantissa=0000H (being Is=40mA), the high-accuracy resistance R S2 of measurement standard (1.00 Ω) establishes and surveys to such an extent that error is K
1(U204 output theoretical voltage is 4V, and actual measurement voltage is Ux, then K
1=(Ux-4)/4).
5. Gain=100 is set, Mantissa=E666H (being Is=4mA), the high-accuracy resistance R S3 of measurement standard (10.0 Ω) establishes and surveys to such an extent that error is K
2(U204 output theoretical voltage is 4V, and actual measurement voltage is Ux, then K
2=(Ux-4)/4).
6. calculate and derive and can get, when resistance was in 1.00 Ω≤R＜10.0 Ω, the Mantissa of measuring resistance can be modified to:
Mantissa＝65535×{1-1/[R·(1+K)]}；
K=[(K wherein
2-K
1) (R-1)]/9+K
1R is a nominal resistance.
Can get the amendment type of the Mantissa of each Standard resistance range with quadrat method:
(is that 4V measures and proofreaies and correct with the U204 output voltage)
Utilize above-mentioned correction data, can in wide Standard resistance range, (0.1 Ω-10M Ω) obtain continuous current value accurately, improve the precision of measuring resistance.Among Figure 16-18, KS1--KS9 is a relay switch, through its conversion, makes measuring junction (V
H, I
H, V
L, I
L) be connected with the high-accuracy resistance of RS1--RS9 standard respectively, KS10, KS11 are measuring accuracy correcting circuit function control switch, and be effective when closing.U402, U404 are the relay circuit driver, and U401, U403 are relay switch control data latch, are write through the EST bus by CPU.J3 is used for measuring junction (V for measuring external connection end
H, I
H, V
L, I
L) be connected with the relay matrix circuit output end.
Figure 20 is logic control signal generative circuit figure.As shown in figure 20, this circuit is formed and is generated the read-write gating signal (comprising the choosing of address decoding sheet) of related device by the GAL device, and CPU reads and writes related device through these signals.
Figure 21 is EST bus circuit figure.As shown in figure 21, this circuit is made up of CON1.The EST bus has 4 interrupt input line INT0-INT3,4 state incoming line GP0-GP3, and 16 bidirectional data line D0-D15,7 address wire A1-A7 read and write line RD and WR for 2,1 root system system reset line RESET and some power leads.CPU reads and writes this unit through this bus, to carry out this device all functions.
Used concrete example among this paper principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, part all can change on embodiment and range of application.In sum, this description should not be construed as limitation of the present invention.
Claims (6)
1. an electric resistance measuring apparatus that is used for laser resistance adjuster is characterized in that, comprising: constant current able to programme pond circuit, tension measuring circuit and voltage ratio reach trigger circuit; Said constant current able to programme pond circuit links to each other with said tension measuring circuit; Said tension measuring circuit reaches trigger circuit with said voltage ratio and links to each other;
Said constant current able to programme pond circuit is used for steady current; Said tension measuring circuit is used to measure the voltage of resistance to be measured; Said voltage ratio reaches trigger circuit and links to each other with the look-at-me input end of cpu chip, is used to export look-at-me.
2. device according to claim 1 is characterized in that, said constant current able to programme pond circuit comprises: numerical control aanalogvoltage maker, ratio discharge circuit and constant current numerical value latch.
3. device according to claim 1 is characterized in that, said tension measuring circuit comprises: programmable-gain voltage amplifier, current driver, operational amplifier and analog to digital converter.
4. device according to claim 3 is characterized in that, said operational amplifier comprises: and be connected into the high input impedance operational amplifier of voltage follower form and high-accuracy operational amplifier.
5. device according to claim 3 is characterized in that, said tension measuring circuit also comprises: the resistance measurement auxiliary circuit; Said resistance measurement auxiliary circuit comprises: T type resistor network resistance test circuit and O type resistor network resistance test circuit.
6. according to each described device of claim 1-5, it is characterized in that, also comprise: the measuring accuracy correcting circuit; Said measuring accuracy correcting circuit and said constant current able to programme pond circuit are used to improve the current precision of constant current able to programme pond circuit output.
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|---|---|---|---|
| CN2011102935293A CN102353841A (en) | 2011-09-29 | 2011-09-29 | Resistance measuring device for laser trimmer |
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|---|---|---|---|
| CN2011102935293A CN102353841A (en) | 2011-09-29 | 2011-09-29 | Resistance measuring device for laser trimmer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107017068A (en) * | 2017-03-24 | 2017-08-04 | 深圳市杰普特光电股份有限公司 | Method and device, the laser resistor trimming system of laser resistor trimming |
| CN110070971A (en) * | 2019-05-13 | 2019-07-30 | 深圳市杰普特光电股份有限公司 | Laser resistor trimming system |
| CN110164641A (en) * | 2019-05-13 | 2019-08-23 | 深圳市杰普特光电股份有限公司 | The control method of laser resistor trimming system |
| CN114019244A (en) * | 2021-11-02 | 2022-02-08 | 洛阳银杏科技有限公司 | Measurement and control system and method for laser resistor trimming machine |
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| US6225802B1 (en) * | 1998-07-17 | 2001-05-01 | U.S. Philips Corporation | Apparatus for automatic measurement of resistance of integrated MR device |
| CN1416310A (en) * | 2001-10-30 | 2003-05-07 | 李俊豪 | Method for quick resistance trimming by using laser on printed circuit board directly |
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| CN107017068A (en) * | 2017-03-24 | 2017-08-04 | 深圳市杰普特光电股份有限公司 | Method and device, the laser resistor trimming system of laser resistor trimming |
| CN110070971A (en) * | 2019-05-13 | 2019-07-30 | 深圳市杰普特光电股份有限公司 | Laser resistor trimming system |
| CN110164641A (en) * | 2019-05-13 | 2019-08-23 | 深圳市杰普特光电股份有限公司 | The control method of laser resistor trimming system |
| CN114019244A (en) * | 2021-11-02 | 2022-02-08 | 洛阳银杏科技有限公司 | Measurement and control system and method for laser resistor trimming machine |
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Application publication date: 20120215 |