CN102351435A - Coating method and manufacturing method of organic electroluminescent display - Google Patents
Coating method and manufacturing method of organic electroluminescent display Download PDFInfo
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Abstract
本发明提供对于大面积基板中的每一批次尺寸误差或热膨胀造成的尺寸误差，能够高精度滴落的功能膜的涂覆方法。在通过对具有像素区域和配置在所述像素区域外侧的斥液部的基板，从喷嘴喷出墨液滴，而在所述像素区域形成功能膜的方法中，使墨液滴不仅落在所述像素区域，而且落在所述斥液部，并根据墨液滴落在所述斥液部的落点位置和墨液滴原本应落入的落点位置之差，校正墨从所述喷嘴喷出的喷出定时后，再进行涂覆。
The present invention provides a coating method of a functional film that can drop with high precision for each batch of dimensional errors in a large-area substrate or dimensional errors caused by thermal expansion. In the method of forming a functional film in the pixel region by ejecting ink droplets from nozzles on a substrate having a pixel region and a liquid repellent portion arranged outside the pixel region, the ink droplets are not only dropped on the the pixel area, and land on the liquid repellent part, and according to the difference between the point where the ink drop lands on the liquid repellent part and the point where the ink drop should fall, correct the flow of ink from the nozzle After the spray is timed to spray, apply again.
Description
Technical field
The present invention relates to a kind of method of manufacture that applies the method that forms functional membrane and display of organic electroluminescence (below abbreviate " organic EL (Electro Luminescence) indicating meter " as).
Background technology
OLED display is according to the formation method of organic luminous layer, and can roughly be divided into following two kinds.A kind of is the method that forms organic luminous layer through vapor deposition, is used for the situation that organic luminous layer is made up of low molecular organic material.Another kind is the method that forms organic luminous layer through the solvent coated method, not only can be used for the situation of organic luminous layer for low molecular organic material, is used for situation about being made up of macromolecule organic material also morely.
Form one of representative means of organic luminous layer through the solution cladding process; There is following method: utilize ink discharge device; The drop that will comprise the China ink of luminous organic material is sprayed onto the pixel region of display base plate, forms organic luminous layer (for example with reference to patent documentation 1).At this moment, comprise luminous organic material and solvent in the black drop of ejection.
Ink discharge device comprises the ink gun with a plurality of nozzles, and the nozzle of this ink discharge device control ink gun and the position relation of substrate are simultaneously from nozzle ejection China ink (for example with reference to patent documentation 2).In patent documentation 2, the drop that is dropped in substrate etc. is disclosed to the ground diffusion, form pixel with regulation live width.
The pixel region of the display base plate that on the other hand, drop adhered to is many by the next door regulation that is called separation levee.Reason is to make the China ink of ejection to be trapped in pixel region with selecting the position property.Separation levee both can be divided respectively each pixel region, also can stipulate the same color that the ranks shape arranges (R for example: red, G: green, B: a plurality of pixel regions indigo plant) (for example with reference to patent documentation 3).The separation levee of a plurality of pixel regions of sometimes regulation ranks shape being arranged is called the wire separation levee.That is to say that each zone of wire separation levee regulation (below be also referred to as " line zone ") formed the organic luminous layer of R, G or B.
Yet the pixel region that applies China ink is of a size of 40 μ m～60 μ m, applies if not high precision, produces to apply offset.Applying offset causes and pixel adjacent zone colour mixture or membrane thickness unevenness.As carrying out the method that ink-jet applies accurately; Disclose following method: in advance from whole nozzles of ejection drop, carry out the China ink test and apply, obtain the ejection pattern; And measure the drop point site of black drop, spray position correction (for example with reference to patent documentation 4).
Utilize Figure 15 that patent documentation 4 is described.Expression microarray manufacturing installation 90 among Figure 15, this microarray manufacturing installation 90 comprises image unit 120, driving control unit 110, base station 50, carriage (ink gun) 60, loading stage 70 and print cartridge 80.On loading stage 70, load a plurality of as the substrate 100 that applies object.Comprise inspection in a plurality of substrates 100 and use substrate.In whole nozzles from microarray manufacturing installation 90, drop is sprayed onto inspection uses substrate in advance, process (describing) ejection test pattern 300; And measure the drop drop point site of ejection test pattern 300; According to measuring result, proofread and correct the ejection position, thereby on substrate 100, process microarray.
In addition; As the method that the high precision ink-jet applies, known have a following method: on the repellency sheet material different with applying object, form drop point site skew adjustment and use figure, and read said pattern; Read the result according to this, proofread and correct coating (with reference to patent documentation 5) as the substrate that applies object.
In addition, as the method that the high precision ink-jet applies, also known have a pre-configured alignment mark (with reference to patent documentation 6 and 7) in as the non-coating zone on the coating zone next door of the substrate that applies object.Next, utilize the camera identification to be configured in the alignment mark on the substrate, and calculate the coating position, thereby China ink is coated to substrate according to the alignment mark position.
Patent documentation 1: (Japan) spy opens the 2004-362818 communique
Patent documentation 2: (Japan) spy opens the 2003-266669 communique
Patent documentation 3: (Japan) spy opens the 2005-218918 communique
Patent documentation 4: (Japan) spy opens the 2004-101218 communique
Patent documentation 5: (Japan) spy opens the 2008-229917 communique
Patent documentation 6: (Japan) spy opens the 2004-337725 communique
Patent documentation 7: (Japan) spy opens the 2007-4175 communique
Utilizing ink jet method that China ink is coated to when applying object, the reason that black drop drops on the position different with desired location can be thought and is following 2 points.First reason is by causing that as the coated substrate that applies object its reason is to exist in each batch scale error, or produces scale error because of thermal expansion.Particularly the coated area as the coated substrate that applies object is big more, and scale error of each batch or the scale error that thermal expansion caused are big more.Second reason is to be caused by ink discharge device itself, and its reason is that the conveyer of substrate or ink gun produces deviation in use, and perhaps the installation portion of ink gun produces skew because of thermal expansion in use.
Above-mentioned patent documentation 4 and 5 method; Be before the coating object is applied China ink; Process the ejection test pattern in the inspection area; Perhaps in other inspection sheet material, form drop point site skew adjustment and use pattern, and be after benchmark is proofreaied and correct, apply China ink (formal coating) applying object with these patterns.That is to say, before formal the coating, proofread and correct.Therefore, patent documentation 4 and 5 method can't be proofreaied and correct the coating skew that produces in the formal coating procedure.
Likewise, of the method for patent documentation 6 and 7, even alignment mark is set, also can't proofread and correct the coating skew that causes as the skew of each substrate that applies object or because of the skew of coating unit at substrate.That is to say that if the position between the center of substrate and alignment mark relation changes because of the temperature variation of substrate etc., or device itself produces skew, then can't proofread and correct to apply and squint.
In fact, if desired the substrate of 370mm * 470mm is carried out ink-jet and apply, coating position that then has regulation sometimes and tens microns of actual coating offsets.Can predict,, can produce bigger error along with the big areaization of coated substrate from now on.
Summary of the invention
Therefore; The objective of the invention is in order to solve above-mentioned problem in the past, and provide a kind of can the skew all to carry out gauged ink-jet coating method the coating that causes because of the coating skew of scale error of each batch of the substrate that applies object or the scale error that thermal expansion causes or because of the skew of ink discharge device itself.Particularly, provide a kind of scale error that the scale error or the thermal expansion of each batch are caused to become the coating method that big large-area substrates also can high precision applies.
The coating method of the 1st mode of the present invention [1] through to have a plurality of pixel regions and respectively with the substrate of scolding liquid portion of said pixel region adjacency; The black drop that comprises functional materials from the nozzle ejection; Thereby form functional membrane at said pixel region, it comprises: make said black drop drop on said substrate the 1st pixel region, and and said the 1st pixel region adjacency the 1st scold liquid portion step; Obtain said black drop drop on the said the 1st scold liquid portion the step of drop point site and the difference of the desired location of the black drop of having set; And, proofread and correct China ink after the ejection regularly of nozzle ejection according to said poor, black drop is sprayed onto the step of the 2nd pixel region of said substrate.
According to the coating method [1] of the 1st mode of such formation, can apply China ink at pixel region accurately.
The coating method of the 2nd mode of the present invention [2] is according to [1] described coating method, also comprise take comprise drop on the said the 1st scold black drop and said the 1st pixel region of liquid portion the step of image, and ask said poor according to said photographic images.
The coating method of the 3rd mode of the present invention [3] is that said the 1st pixel region is the zone that disposes one or more sub-pixels according to [1] described coating method.
The coating method of the 4th mode of the present invention [4] is according to [1] described coating method; Said the 1st pixel region is the wire zone that is arranged with a plurality of sub-pixels; And apply identical China ink, the said the 1st scolds the end abutment of the length direction of liquid portion and said the 1st pixel region.
The coating method of the 5th mode of the present invention [5] is according to [1] described coating method; Said the 1st pixel region is the wire zone that is arranged with a plurality of sub-pixels; And apply identical China ink; The said the 1st scolds the both ends adjacency of the length direction of liquid portion and said the 1st pixel region; But also comprise the steps: to ask black drop be sprayed onto the said the 1st scold a side in the liquid portion scold liquid portion drop point site, be sprayed onto drop point site poor that the opposing party scolds liquid portion with black drop, and proofread and correct China ink regularly from the ejection of nozzle ejection according to this difference.
The coating method of the 6th mode of the present invention [6] is according to [1] described coating method; Said the 1st pixel region is the wire zone that is arranged with a plurality of sub-pixels; And apply identical China ink, and the said the 1st scold the width of liquid portion and said the 1st pixel region end abutment.
In addition; The present invention is a kind of method of manufacture of OLED display; Its through to have a plurality of pixel regions, and respectively with the panel substrate of scolding liquid portion of said pixel region adjacency; The black drop that comprises functional materials from the nozzle ejection; Thereby form organic functional membrane and make OLED display at said pixel region, the method for manufacture of said OLED display comprises: the 1st pixel region that makes said black drop drop on said substrate reaches the step of scolding liquid portion with said the 1st pixel region adjacency; Obtain said black drop drop on the said the 1st scold liquid portion the step of drop point site and the difference of the desired location of the black drop of having set; And, proofread and correct China ink after the ejection regularly of nozzle ejection according to said poor, black drop is sprayed onto the step of the 2nd pixel region of said substrate.
As stated; According to coating method of the present invention; Utilize ink jet method that black drop is sprayed onto the 1st pixel region and scolds liquid portion with the 1st of the 1st pixel region adjacency; And according to be coated in the 1st scold the black drop of liquid portion drop point site and the drop point site of having set poor, proofread and correct ejection regularly after, utilize the ink jet method black drop-coated is layed onto the 2nd pixel region.Its result; Even just in case scale error of each batch or the scale error that thermal expansion causes occur; Perhaps the conveyer of the substrate of ink discharge device or ink gun produces deviation in use; Or the installation portion of ink gun also can apply China ink to pixel region accurately in use because of thermal expansion produces skew.Its result can provide the high-quality OLED display of non-mixed color.
Description of drawings
Fig. 1 is the figure of summary of stepped construction of the luminous element of expression OLED display.
Fig. 2 is the figure of the manufacturing step of expression OLED display.
Fig. 3 is the vertical view that the conduct of embodiment 1 applies the substrate (organic EL display panel) of object.
Fig. 4 is the sectional view of the organic EL display panel of embodiment 1, and Fig. 4 A is the sectional view of the A-A line in Fig. 3, and Fig. 4 B is the sectional view of the B-B line in Fig. 3.
Fig. 5 be in the method for manufacture of display of organic electroluminescence of expression embodiment 1 ink gun 5 and the relation of the position between the substrate 1, reach the figure of the scanning direction of ink gun 5.
Fig. 6 is the figure of configuration of the nozzle 6 of the ink gun 5 that uses in the method for manufacture of display of organic electroluminescence of expression embodiment 1.
Fig. 7 is that expression makes black drop drop on the vertical view with the substrate of the display of organic electroluminescence of the situation in the zone of pixel region 4 adjacency.
Fig. 8 is the drop point site of the black drop 11 of expression and the vertical view of the substrate that the position between the former position that should fall into 13 concerns.
Fig. 9 is being seen diagrammatic top view with ink discharge device of identification camera 14 from the top.
Figure 10 A is that expression makes black drop fall into the vertical view of substrate of the display of organic electroluminescence of pixel region 4 situation each other.
Figure 10 B is that expression makes black drop fall into the vertical view of substrate of the display of organic electroluminescence of pixel region 4 situation each other.
Figure 11 is the figure that applies the situation of China ink when being illustrated in by substrate two OLED displays of manufacturing (α and β).
Figure 12 is expression applies the situation of China ink to the substrate with pixel type pixel region 4 figure.
Figure 13 is the vertical view with substrate of non-luminous region 19A.
Figure 14 A is that expression utilizes ink discharge device substrate to be applied the figure of operation.
The figure of Figure 14 B situation that to be expression check the coating that applies the substrate behind the EO.
Figure 15 is the schematic isometric of ink-jet coating unit in the past.
Label declaration
The X scanning direction
1,1-1,1-2 substrate
2 basal substrates
3 separation levees
3A wire separation levee
4,4R, 4G, 4B pixel region
5,5R, 5G, 5G ink gun
6 nozzles
9 China inks
10 pixel specified layer
11,11 α, 11 β China ink drop
The drop point site of the 12 black drops set
The drop point site of the black drop of 13 reality
14 identification cameras
15 platforms
16 saddle portions
17 trestle tables
18 trestle tables
The 19A non-luminous region
The 19B light-emitting zone
20 separation levees zone
The drop point site of 21 black drops
The drop point site of the 22 black drops set
The drop point site of the black drop of 23 reality
24 hole injection layers
25 middle layers
26 organic luminous layers
27 electron supplying layers
28 negative electrodes
29 sealing plys
30 resin layers
31 glass substrates
32 Polarizers
40 planarization films
45 reflection anode
50 base stations
60 carriages
70 loading stages
80 print cartridges
90 microarray manufacturing installations
100 substrates
110 drive controlling mechanisms
120 image units
300 ejection test patterns
Embodiment
The coating method of functional membrane of the present invention be through to have a plurality of pixel regions and respectively with the substrate of scolding liquid portion of said pixel region adjacency, comprise the black drop of functional materials from the nozzle ejection, and form the method for functional membrane at said pixel region.
As the substrate that applies object have in its surface a plurality of pixel regions and with said pixel region respectively adjacency scold liquid portion.The zone that pixel region is preferably marked off by separation levee as long as the material of separation levee has the material of insulativity, can be inorganicss such as resin or glass.As the resin of separation levee material, preferably has thermotolerance, to the insulative resin with tolerance of solvent, for example polyimide resin.
So-called substrate, the typical case is meant panel substrate, preferred organic EL panel substrate.Sometimes also be built-in with for example corresponding TFT (Thin FilmTransistor, thin film transistor) element etc. with each sub-pixel in panel substrate.
Dispose one or more sub-pixels at a pixel region.The pixel region that disposes a subpixels is called the pixel type pixel region.The pixel region that is arranged with two above sub-pixels is called the line style pixel region.Pixel region is sprayed black drop through ink jet method, apply by China ink.Preferably, the coated side of pixel region performance wetting ability, and below contact angle 5 degree for China ink.
Substrate as applying object not only has pixel region, also have with this pixel region adjacency scold liquid portion.What is called is scolded liquid portion, can be the surface etc. of dividing the separation levee of pixel region.Of the back, also to scolding liquid portion to spray black drop, but preferably, drop on the black nonwetting diffusion of scolding liquid portion, and the state after keeping falling into.If the state after black drop can keep falling into then can suppress to drop on and scold the China ink of liquid portion to sneak into pixel region, and confirm to drop on the drop point site of the black drop of scolding liquid portion exactly.Therefore, scolding more than preferred 30 degree of the contact angle to black drop of liquid portion, for example is 40 degree.
Scold liquid portion as long as and pixel region adjacency.When pixel region is pixel type, if make on the separation levee of dividing the pixel type pixel region and near the limit of pixel region for scolding liquid portion.When pixel region is line style, 1) can with the separation levee of end (end or the both ends) adjacency of length (line) direction of pixel region on as scolding liquid portion, 2) also can with the separation levee of the end abutment of the width of pixel region on as scolding liquid portion.
Be coated in the China ink of pixel region of substrate and comprise functional materials, for example comprise organic functional material.When applying the present invention to OLED display and make, China ink is for to comprise the solution of machine luminescent material or charge transport material etc., and can form the organic luminous layer or the charge transfer layer of OLED display through the present invention.
The luminous organic material that can be contained in the China ink both can be low molecule based material, also can be the macromolecular luminescent material.In general, the China ink that comprises the macromolecular luminescent material is difficult to carry out high precision through ink jet method and applies, method performance effect therefore of the present invention.Example as the macromolecular luminescent material includes p-phenylene vinylene (Poly Phenylene Vinylene (PPV)) and verivate, polyacetylene (Poly Acetylene) and verivate, polyphenyl (Polyphenylene) and verivate thereof, gathers vinylbenzene (Poly para-Phenylene Ethylene) and verivate thereof, gathers (3-hexyl thiophene) (Poly3-Hexyl Thiophene (P3HT)) and verivate thereof, gathers fluorine (Poly Fluorine (PF)) and verivate thereof etc.
The coating method that is used to form functional membrane of the present invention is characterised in that and comprises: 1) make said black drop drop on said substrate the 1st pixel region, and and said the 1st pixel region adjacency the 1st scold liquid portion step; 2) obtain said black drop drop on the said the 1st scold liquid portion the step of drop point site and the difference of the drop point site of the black drop of having set; And 3) according to said poor, proofread and correct China ink after the ejection regularly of nozzle ejection, the 2nd pixel region of said substrate is sprayed the step of black drop.
Coating method of the present invention is that the ink gun of ink discharge device is scanned, and simultaneously along the scanning direction, a plurality of pixel regions on the substrate is applied in regular turn.That is to say, behind the 1st pixel region coating China ink, ink gun is moved along the scanning direction, the 2nd pixel region is applied China ink.
In the step 1), when the 1st pixel region is applied China ink, black drop is dropped on the 1st of the 1st pixel region adjacency scold liquid portion.Dropping on the black drop of scolding liquid portion preferably is separated by about 20～150 μ m with pixel region.If it is narrow to drop on the black drop and the interval between the pixel region of scolding liquid portion, then drops on and scold the black drop of liquid portion might be blended into pixel region.If said interval is excessive, the correction of stating after then might can't suitably be carried out.
Drop on the 1st and scold the number that drips of the black drop of liquid portion to be not particularly limited, get final product more than one, also can be for more than two.
Like this, when the pixel region of substrate is applied China ink, also make black drop drop on this pixel region adjacency scold liquid portion, but can make black drop drop on substrate all pixel regions scold liquid portion, what can make also that black drop drops on partial pixel region scolds liquid portion.
The black drop ejection of ink jet method is as long as use ink discharge device.The ejection frequency of ejection China ink is not particularly limited from the nozzle of the ink gun of ink discharge device, suitably sets according to the specification of the OLED display of making etc., but for example is 10kHz.
The viscosity of the China ink of ejection is not particularly limited, and in the scope of preferred about 5～20mPas, for example is 10mPas.
And the reticular density of China ink does not have special restriction yet, and for example the reticular density of scanning direction can be 4800dpi, but can be according to the suitably settings such as specification of the OLED display of making.
The drop amount of the China ink that preferably applies from each nozzle of ink gun is identical.Being not particularly limited from the drop amount of the China ink of each nozzle ejection, in the scope of preferred 1pl～15pl, for example is 5pl (picoliter).
Step 2) in, obtain black drop drop on the 1st scold liquid portion drop point site, poor with the drop point site of the black drop of having set.Said poor in order to obtain, for example to take to comprise and drop on the 1st and scold the black drop of liquid portion and the image of the 1st pixel region, and be benchmark with the 1st pixel region, the skew of obtaining the drop point site of black drop gets final product.
And; Under the situation of line style pixel region; Make black drop drop on the both ends adjacency of length (line) direction of pixel region scold liquid portion (be made as and scold X of liquid portion and Y) time, each is scolded drop point site poor of drop point site that liquid portion obtains the black drop that falls into and the black drop of having set.The side-play amount of the drop point site in scolding the X of liquid portion and the side-play amount of scolding the drop point site among the Y of liquid portion mean that then the nozzle rows of ink gun and the arrangement of pixel region squint not simultaneously.Therefore, preferably adjust the installation of ink gun.
In the step 3), make ink gun move to the 2nd pixel region, the 2nd pixel region is sprayed black drop, carry out China ink and apply from the 1st pixel region.Here, black drop drop on the 1st scold liquid portion drop point site when consistent with the drop point site of having set, need not to proofread and correct ejection regularly, the 2nd pixel region ejection China ink got final product.On the other hand, when black drop drops on the drop point site of scolding liquid portion of the 1st pixel region adjacency with the drop point site skew set, proofread and correct timing to the 2nd pixel region ejection China ink.For example, scold in the liquid portion, compare with the drop point site of having set, be positioned under the situation of scanning direction upstream side, when applying the 2nd pixel region, as long as the ejection that postpones China ink regularly in the drop point site of black drop the 1st.Thus, can apply China ink accurately to the 2nd pixel region.
And then, when the 2nd pixel region is applied China ink, black drop is dropped on the 2nd of the 2nd pixel region adjacency scold liquid portion, and obtain the poor of itself and desired location.Also can be poor according to what obtain, proofread and correct timing to the 3rd pixel region ejection China ink.Through repeating this operation, can apply China ink accurately to all pixel regions on the substrate.
Below, in the time of with reference to accompanying drawing, the coating method of the functional membrane of preferred embodiments of the present invention is described.Particularly, be example with the method for manufacture of OLED display with organic light emission film (functional layer), the present invention is described.
(embodiment 1)
As stated, coating method of the present invention can be applied to the manufacturing of organic EL display panel.At first, Fig. 1 representes the summary of the stepped construction of the organic EL in the typical organic EL display panel.The relative thickness of shown in Figure 1 each layer and shape are not actual thickness and shape of expression, but schematically show for convenience's sake.
Organic EL shown in Figure 1 is on the planarization film that is positioned at basal substrate 40, to form reflection anode 45, hole injection layer 24, on this hole injection layer 24, forms pixel specified layer 10 and separation levee 3.And, also can after making pixel specified layer 10 film forming, make 24 whole film forming of hole injection layer, after this form separation levee 3.Pixel specified layer 10 utilizes common photoetching technique to form.That is to say that pixel specified layer 10 forms with the order that resist-coated processing, mask exposure processing, development treatment, dry-etching are handled, resist is removed processing.
Reflection anode 45 is that each sub-pixel (sub-pixel R, G or B among Fig. 3) is made respectively, and sub-pixel is the flat light emission of indicating meter.Form middle layer (IL, Inter-Layer) 25 and organic luminous layer 26 on the zone of dividing by separation levee 3.And electron supplying layer 27, negative electrode 28, sealing ply 29 and resin layer 30 are to dispose with the mode that covers organic luminous layer 26 and separation levee 3.And, be provided with glass substrate 31 and Polarizer 32 etc. on the top of resin layer 30, thereby constitute OLED display.
OLED display shown in Figure 1 can be with the flow process manufacturing shown in the flow chart of steps of Fig. 2.That is to say, make with the order of formation planarization film, formation reflection anode, formation hole injection layer, formation pixel specified layer, formation separation levee, formation IL layer, formation organic luminous layer, formation electron supplying layer, formation negative electrode, formation sealing ply, formation resin layer.
Coating method of the present invention preferably is used in the China ink that is used to form middle layer shown in Figure 2 (IL) or organic luminous layer and applies.
Fig. 3 is from the method for manufacture of the OLED display of the being seen embodiment 1 in top, should applies the vertical view of the substrate 1 (as the organic EL display panel substrate that applies object) of the China ink that comprises luminous organic material.Fig. 4 A, Fig. 4 B are the amplification views of substrate 1 shown in Figure 3.Fig. 4 A is the sectional view at the A-A line place of substrate 1 shown in Figure 3, and Fig. 4 B is the sectional view at the B-B line place of substrate 1 shown in Figure 3.
The sub-pixel of substrate 1 (R, G, B) comprises pixel electrode (reflection anode) or hole injection layer etc. as the necessary element of OLED display (with reference to Fig. 1), but omits among Fig. 4 A and Fig. 4 B.
Shown in Fig. 3 and Fig. 4 A, Fig. 4 B, substrate 1 comprises basal substrate, be configured in the pixel region 4R of basal substrate, pixel region 4G, pixel region 4B and be used to divide the separation levee 3 of these pixel regions.
As shown in Figure 3, separation levee 3 has straight line and extends a plurality of wire separation levee 3A that (left and right directions along Fig. 1 extends setting) is set, and these wire separation levees 3A is parallel to each other.The wire zone that is clipped each other by wire separation levee 3A is a pixel region 4.Pixel region 4 is made up of pixel region 4R (red), pixel region 4G (green), pixel region 4B (indigo plant).Pixel region 4R, pixel region 4G and pixel region 4B are repeated configuration in substrate 1.Be spaced apart 60 μ m between a plurality of adjacent wire separation levee 3A in the embodiment 1.
In pixel region 4R, be arranged with a plurality of sub-pixel R that send ruddiness, in pixel region 4G, be arranged with a plurality of sub-pixel G that send green glow, and in pixel region 4B, be arranged with a plurality of sub-pixel B that send blue light.Pixel region 4R, pixel region 4G and pixel region 4B are referred to as pixel region 4.
As shown in Figure 3, in the zone of pixel region 4, between the sub-pixel R, between the sub-pixel G, dispose pixel specified layer 10 between the sub-pixel B.The height setting from planarization film 40 of pixel specified layer 10 is the height that is lower than separation levee 3.Though be not particularly limited, the height from planarization film 40 of separation levee 3 for example is about 1 μ m, and the height of pixel specified layer 10 for example is about 100nm.Therefore, be sprayed onto aqueous black 9 (with reference to Fig. 4 A) in the pixel region of dividing by separation levee 34 and can't help pixel specified layer 10 regulations, and can move in the inside of pixel region 4.That is to say, to pixel region 4, supply the China ink 9 of ink-supplying amount, and aqueous black 9 can move in pixel region 4 above the bed thickness of pixel specified layer 10.
Pixel specified layer 10 is along extending setting with the orthogonal direction wire of wire separation levee 3A and forming.As shown in Figure 3, by a plurality of wire separation levee 3A and a plurality of wire pixel specified layer 10 form grid.Pixel specified layer 10 is formed by inorganic materials, and so-called inorganic materials for example is SiON.On pixel specified layer 10, also apply China ink, form functional membrane.
The cross-sectional shape of separation levee 3 shown in Fig. 4 A, 4B, can be positive taper, also can be the back taper that the bottom narrows down.Separation levee 3 is to utilize photoetching technique etc. to carry out patterning and form.For example, separation levee 3 is after applying the separation levee material, forms anticipated shape with the order of curing processing, mask exposure processing, development treatment etc.
Shown in Fig. 4 A, the pixel region 4 ejection China inks 9 to being divided by separation levee 3 carry out China ink and apply.The surface lip-deep, that contact with the China ink 9 that has applied of separation levee 3 has repellency.For the surface that makes separation levee 3 has repellency, needing only this surface irradiation oxygen is gaseous plasma, and perhaps shining fluorine is gaseous plasma etc., carries out fluoridation and gets final product.Because of separation levee 3 has repellency, so shown in Fig. 4 A, the China ink 9 that is full of pixel region 4 is to be kept reliably by separation levee 3, is accommodated in the pixel region 4.
Fig. 5 is that expression utilizes ink discharge device to apply the figure of the situation of China ink to substrate shown in Figure 31.Three ink gun 5R, 5G and 5B (these are referred to as ink gun 5) shown in Figure 5 and substrate 1 adjacency configuration.And the sidepiece of the line direction of the wire separation levee 3A of ink gun 5 and substrate 1 is in abutting connection with configuration.The black drop that sprays with the nozzle from ink gun 5 drops on the mode by the pixel region 4 of separation levee 3 divisions, configuration ink gun 5.
Fig. 6 is the figure of the substrate subtend face of expression ink gun 5 (5R, 5G, 5B), is formed with a plurality of nozzles 6.A plurality of nozzles 6 in the ink gun 5 are along a plurality of row configurations that are parallel to each other.
Make the configuring arrange of a plurality of nozzles 6, with respect to scanning direction (the arrow directions X among Fig. 5) tilted configuration to substrate 1.Like this, the configuring arrange through making a plurality of nozzles 6 in the ink gun 5 is with respect to the scanning direction tilted configuration, thus shorten with the orthogonal direction in scanning direction on the spacing of nozzle 6.With the nozzle 6 on the orthogonal direction in scanning direction, preferred distance is in the scope of 10 μ m～50 μ m, for example is about 20 μ m (for example being 21.16666 μ m), but is not particularly limited.
Like this, through shortening the spacing with the nozzle 6 of the orthogonal direction in scanning direction, thereby make when the black drop of each nozzle 6 ejections drops on the coated side of hydrophilic pixel region 4, can link each other.Like this, can be to applying China ink in the pixel region of dividing by separation levee 34 equably.
As shown in Figure 5, black for substrate 1 is applied, and make ink gun 5 scanning substrate 1 relatively.Particularly, ink gun 5 is to scan along the orthogonal direction of line direction (by the direction shown in the arrow of symbol X) with the wire separation levee of substrate 1.According to the ink discharge device of embodiment 1, can apply China ink to 1 whole of substrate with the single pass action.
In the ink discharge device of embodiment 1,, apply so can apply spacing 5.291667 μ m with minimum along the scanning direction because of the reticular density of scanning direction is 4800dpi (a per inch dot matrix).
China ink R, black G, black B are coated to substrate 1 in regular turn, but its coating is not particularly limited in proper order.For example the order with R, G, B applies.Coating is formed on the thickness of the dried organic luminous layer in the pixel region 4, preferred about 50～100nm (for example 70nm).
Fig. 7 is that expression ink gun 5 (comprising shower nozzle 5R, 5G, 5B) scans substrate shown in Figure 31 and applies the figure of the situation of China ink.China ink is sprayed onto pixel region 4 (comprising pixel region 4R, 4G, 4B), and is sprayed onto the separation levee 3 (scolding liquid portion) with the end abutment of the length direction of pixel region 4.Black drop 11 among Fig. 7 is to drop on the drop of scolding liquid portion.As shown in Figure 7, when a pixel region 4 is applied China ink, also make black drop drop on the separation levee 3 (scolding liquid portion) with these pixel region 4 adjacency.
Fig. 8 is near the figure the black drop 11 of presentation graphs 7.Dotted line 13 expressions drop on as the position on the scanning direction of the black drop 11 of the separation levee 3 of scolding liquid portion.On the other hand, the position (desired location) on the former scanning direction that should drop on of the dotted line 12 black drops of expression.Can know if dotted line 12 is inconsistent with dotted line 13, just produce and applied skew.
Below, each nozzle 6 from ink gun 5 is sprayed black drop to substrate 1, when pixel region 4 formed functional layers, the flow process that suppresses this coating skew described.
Pixel region 4 spraying China inks for to substrate 1 make ink gun 5 scanning substrates 1, simultaneously from the black drop of nozzle 6 ejections.The scanning direction of this moment is shown in the arrow X of Fig. 5, with the line direction quadrature of the wire separation levee 3A of substrate 1.With to pixel region 4 (4R, 4G, 4B), stipulate black 9 mode from nozzle 6 ejections of ink gun 5 (5R, 5G, 5B), make ink gun 5 scanning substrates 1.
Like Fig. 7 and shown in Figure 8, when each pixel region 4 is applied China ink, also make black drop 11 ejections and drop on the separation levee zone of each pixel region 4 adjacency and promptly scold liquid portion.Two black drops drop on the separation levee of pixel region 4 adjacency regional.If, then hold the coating position on the scanning direction more easily to applying the black drop more than two on the separation levee 3.
If some pixel region 4 is applied China ink, and behind the zone (scolding liquid portion) that black drop 11 is dropped on be adjacent, observe its situation (with reference to Fig. 8).Observe and both can carry out, also can take microphotograph through microscope.Observe through this, whether the drop point site 13 of confirming black drop is positioned at the desired location of having set 12.More specifically, for example,, measure the amount (side-play amount) that scanning direction X goes up skew through drop point site 13 and desired location 12.
After definite drop point site 13 and desired location 12 squint, when next pixel region that should apply 4 is applied China ink, proofread and correct the black timing of nozzle ejection from ink gun.Thus, can apply China ink accurately to all pixel regions 4.
Like Fig. 7 and shown in Figure 8, make black drop 11 drop on the separation levee 3 with the both ends adjacency of the length direction of pixel region 4 respectively.Like this; When making black drop drop on the both ends of length direction of pixel region 4; Also can measure the drop point site of the black drop 11 that drops on an end and the offset alpha of desired location; And the drop point site and the skew β of desired location that drop on the black drop 11 of the other end, and confirm the difference of offset alpha and skew β.When having difference between offset alpha and the skew β, the nozzle rows that means ink gun not with line direction configured in parallel, therefore, can proofread and correct with the mode of the angle of the nozzle rows of adjustment ink gun.
As previously discussed, in the ink-jet coating method of embodiment 1, pixel region 4 is being applied China ink, and making black drop 11 also drop on the zone of pixel region 4 adjacency therewith, and measuring the drop point site of black drop 11 and the side-play amount between the desired location.Particularly, can hold on the scanning direction the poor of actual drop point site and the drop point site of having set.And, according to the side-play amount of measuring, proofread and correct timing to the pixel region 4 ejection China inks of next coating.Through repeating this operation, can apply China ink accurately to all pixel regions 4 that are configured on the substrate.
According to this method; Even have scale error of each batch or the scale error that thermal expansion causes as the substrate that applies object 1; Perhaps the conveyer of ink gun produces deviation in use in the operational process of ink discharge device; Or the installation portion of shower nozzle is in use because of thermal expansion produces skew, also can be accurately the pixel region of substrate be applied China ink.And, according to the method for manufacture of the OLED display of embodiment 1,, therefore, non-mixed color and high-quality OLED display can be provided owing to there is not offset as the films such as organic luminous layer of functional membrane.
(embodiment 2)
Below, with reference to accompanying drawing, the method for manufacture of the OLED display of embodiment 2 of the present invention is described.As shown in Figure 9, the method for manufacture of the OLED display of embodiment 2 is that identification camera 14 is set in ink discharge device, and inspection drops on the drop point site of the black drop 11 on the substrate 1.Other steps are identical with the method for manufacture of the OLED display of embodiment 1.Therefore, to have with embodiment 1 in the parts of the parts same structure explained give same numeral, its explanation is quoted the explanation of embodiment 1 and in embodiment 2, is omitted.
Fig. 9 is the diagrammatic top view of the being seen ink discharge device from the top.Identification camera 14 is kept by saddle portion 16, and can move along saddle portion 16.Identification camera 14 is driven by drive system (not shown).Platform 15 moves the substrate 1 that is coated China ink.Trestle table 17 keeps ink gun 5 (5R, 5G, 5B) and identification camera 14.It is whole that trestle table 18 supports ink discharge device.
In embodiment 2, from ink gun 5 (5R, 5G, 5B) China ink 9 is being coated in 1 last time of substrate, loading the mechanism of platform 15 for relatively moving of substrate 1.Arrow among Fig. 9 is an ink gun 5 for platform 15 (scanning) direction that relatively moves.
The structure of the substrate 1 of the conduct coating object in the embodiment 2 is identical with embodiment 1.And, the position relation of the ink gun 5 (5R, 5G, 5B) in substrate 1 and the ink discharge device, and the scanning direction of ink gun 5 also identical with embodiment 1.And then the distributing style of the nozzle 6 of ink gun 5 is also identical with embodiment 1.
In the method for manufacture of the OLED display of embodiment 2, also identical with embodiment 1, the pixel region 4 of substrate 1 is applied China ink, and make black drop 11 drop on the zone (with reference to Fig. 7 and Fig. 8) with this pixel region 4 adjacency.And, in embodiment 2, the drop point site 13 of the black drop 11 that falls into by identification camera 14 (with reference to Fig. 9) identification.Obtain poor by the drop point site of identification camera 14 identifications 13 and the former position that should fall into (desired location 12).Particularly, for example, ask the side-play amount between drop point site 13 and the desired location 12 along the scanning direction.
Poor according to the drop point site of black drop 13 and desired location 12 proofreaied and correct and is used for to next ejection that should apply the China ink that the pixel region 4 of China ink applies regularly.Through repeating this action, can apply China ink accurately to all pixel regions 4 of substrate 1.Its result; Even have scale error of each batch or the scale error that thermal expansion caused as the substrate that applies object 1; Perhaps in the operational process of ink discharge device; The conveyer of ink gun produces deviation in use, or the installation portion of ink gun is in use because of thermal expansion produces skew, also can be accurately the pixel region of substrate be applied China ink.And then, can spray regularly thereby proofread and correct rapidly and exactly through measuring side-play amount by identification camera 14.
(embodiment 3 and 4)
Below, with reference to accompanying drawing, the method for manufacture of the OLED display of embodiment 3 of the present invention and 4 is described.Shown in Figure 10 A and Figure 10 B, in the method for manufacture of the OLED display of embodiment 3 and 4, drop 11 is coated on the separation levee 3 with the end abutment of the width of the wire separation levee 3A of the pixel region 4 of regulation substrate 1.Other steps are identical with the method for manufacture of the OLED display of embodiment 1.Therefore, to have with embodiment 1 and 2 in the parts of parts same structure of explanation give identical label, its explanation is quoted the explanation of embodiment 1 and 2 and in embodiment 3 and 4, is omitted.
Particularly, embodiment 3 is with pixel region 4R, pixel region 4G, pixel region 4B during as a group, makes black drop 21 drop on separation levee zone between each group (by the separation levee zone that constitutes with the separation levee identical materials) 20 and promptly scolds liquid portion (Figure 10 A).On the other hand, in embodiment 4, liquid portion (Figure 10 B) is promptly scolded in the separation levee zone that black drop 21 is dropped between pixel region 4 and the pixel region 4.
Shown in Figure 10 A and Figure 10 B, between the pixel region 4 of substrate 1, there is the separation levee zone 20 that constitutes by the separation levee material.In separation levee zone 20, fall into black drop 21 along drop point site 23.Arbitrary drop in the drop that China ink drop 21 can be the R China ink, G is black or B is black.On the other hand, in Figure 10 A and Figure 10 B, represented that also the position that black drop 21 should fall into is a desired location 22.Can know that in Figure 10 A and Figure 10 B drop point site 23 squints on the scanning direction with desired location 22.
The structure of the substrate 1 of the conduct coating object in the embodiment 3 and 4 is identical with embodiment 1.And the position relation and ink gun 5 scanning directions of the ink gun 5 (5R, 5G, 5B) in substrate 1 and the ink discharge device are also identical with embodiment 1.And then nozzle 6 distributing styles of ink gun 5 are also identical with embodiment 1.Ink discharge device and embodiment 2 likewise have identification camera 14 (Fig. 9).
In the method for manufacture of the OLED display of embodiment 3 and 4, pixel region 4 (4R, 4G, 4B) is applied China ink (R, G, B) in regular turn along the scanning direction of ink gun 5.After the 1st pixel region 4 is applied China ink, and before applying the 2nd pixel region 4, shown in Figure 10 A or Figure 10 B, make black drop 21 drop on separation levee zone 20 along a line.By identification camera 14 shown in Figure 9, take the black drop 21 that falls into along a line, the drop point site 23 of identification China ink drop 21.Then.Obtain the poor of position (desired location 22) that drop point site 23 and black drop should fall into.For example, obtain poor on the scanning direction, and with it as side-play amount.
Secondly, when confirming to have said side-play amount, when the 2nd pixel region 4 that should apply next applies China ink,, proofread and correct black ejection regularly according to this side-play amount.Proofread and correct the ejection timing when like this, the substrate 1 as the coating object being applied China ink.Therefore; Even have scale error or the scale error that thermal expansion caused of each batch of substrate 1; Perhaps the conveyer of ink gun produces deviation in use in the operational process of ink discharge device; Or the installation portion of ink gun also can apply China ink to pixel region 4 accurately in use because of thermal expansion produces skew.Its result can form the functional membrane of the regulation of non-mixed color.
And, in embodiment 3 and 4, be used to obtain the black drop 21 that applies side-play amount and dropped on the separation levee zone 20 between the pixel region 4, thus different with embodiment 1 and 2, can use substrate area effectively.Particularly, in OLED display, when pixel region 4R, pixel region 4G, pixel region 4B are organized as one, usually the separation levee zone design between each group is got broad sometimes.According to embodiment 3 (Figure 10 A), if make black drop 21 drop on this design the separation levee zone 20 of broad, so can more effectively use substrate area.
(embodiment 5)
Be illustrated in the situation of making two OLED displays (α and β) in the substrate 1 among Figure 11.By the left side and the right-hand part of the substrate among Figure 11 1, make OLED display respectively.Figure 11 representes to be coated with in the pixel region 4 of each indicating meter the state of China ink.The pixel region 4 of each indicating meter (4R, 4G, 4B) is the pixel region of wire.Be arranged with a plurality of sub-pixels that send homochromy (R, G or B) light at each pixel region 4R, 4G or 4B.The length direction of pixel region 4R, 4G or the 4B of one OLED display α is consistent with the length direction of pixel region 4R, 4G or the 4B of another OLED display β.
Substrate shown in Figure 11 is when making shower nozzle 5 scanning along the direction of arrow China ink to be coated in each pixel region 4 of substrate 1 in regular turn and to obtain.At this moment; Black drop 11 α are dropped on the separation levee with an end abutment of the length direction of the pixel region 4 of an OLED display α, black drop 11 β are dropped on the separation levee with an end abutment of the length direction of the pixel region 4 of another OLED display β.Like this, need not to make black drop 11 to drop on the separation levee with the both ends adjacency of the length direction of the pixel region of each OLED display.
(embodiment 6)
With reference to accompanying drawing, the method for manufacture of the OLED display of embodiment 6 is described.Pixel region 4 in the embodiment 1～5 is the wire zones by wire separation levee 3A regulation; Portion includes a plurality of sub-pixels (R, G or B) within it; But the pixel region 4 in the embodiment 5 (4R, 4G, 4B) is the zone (pixel shape zone) of being separated by separation levee 3, and portion includes a subpixels (Figure 12) within it.
Shown in figure 12, the pixel region 4 in the embodiment 6 is that each sub-pixel (R, G, B) is divided by separation levee 20.In substrate shown in Figure 12 1, there are pixel line LR, the pixel line LG that is arranged with pixel region 4G that is arranged with pixel region 4R, the pixel line LB that is arranged with pixel region 4B with the luminous sub-pixel B of B with the luminous sub-pixel G of G with the luminous sub-pixel R of R.
Then, when the pixel region 4 along next pixel line L configuration is applied China ink,, proofread and correct the timing of ejection China ink according to said poor.Thus, can apply China ink accurately to pixel region 4.Through repeating this operation; Even have scale error or the scale error that thermal expansion caused of each batch of substrate 1; Perhaps the conveyer of ink gun produces deviation in use in the operational process of ink discharge device; Or the installation portion of shower nozzle also can apply China ink to pixel region 4 accurately in use because of thermal expansion produces skew.Its result can form the functional membrane of the regulation of non-mixed color.
(embodiment 7)
With reference to accompanying drawing, the method for manufacture of the OLED display of embodiment 7 is described.Shown in figure 13, in the method for manufacture of the OLED display of embodiment 7, be provided with light-emitting zone 19B and non-luminous region 19A as the substrate that applies object.Other steps are identical with the method for manufacture of the OLED display of said embodiment 1 and 2.Therefore, to have with embodiment 1 and 2 in the parts of parts same structure of explanation give identical label, its explanation is quoted the explanation of embodiment 1 and 2 and in embodiment 7, is omitted.
Figure 13 has the light-emitting zone 19B that comprises a plurality of pixel regions 4 (4R, 4G, 4B) and comprises false pixel region 4 ' (vertical view of the substrate 1 of 4 ' R, 4 ' G, 4 ' B) non-luminous region 19A.Non-luminous region 19A compares the outer circumferential side that is positioned at substrate 1 with light-emitting zone 19B.More specifically, non-luminous region 19A compares with light-emitting zone 19B, is positioned at the upstream side of the scanning direction X of ink gun.
The structure of the organic EL of the substrate 1 in the substrate 1 in the structure of contained organic EL and the embodiment 1 is identical.The structure of ink discharge device is identical with said embodiment 1 and 2.And the position relation and ink gun 5 scanning directions of the ink gun 5 (5R, 5G, 5B) in substrate 1 and the ink discharge device are also identical with embodiment 1.And then nozzle 6 distributing styles of ink gun 5 are also identical with embodiment 1.Ink discharge device and embodiment 2 likewise have identification camera 14 (Fig. 9).
Coating step in the embodiment 7 be at first to the non-luminous region 19A that is positioned at substrate 1 false pixel region 4 ' (4 ' R, 4 ' G, 4 ' B) apply China ink, then, the pixel region 4 (4R, 4G, 4B) that is positioned at light-emitting zone 19B are applied China ink.
To false pixel region 4 ' coating China ink the time, make black drop 11 drop on false pixel region 4 ' the separation levee 3 (with reference to Fig. 8) of both ends adjacency.By identification camera shown in Figure 9 14 take drop on a false pixel region 4 ' extra-regional black drop 11, the drop point site 13 of identification China ink drop 11.Then, obtain the desired location 12 that drop point site 13 and black drop 11 should fall into poor (with reference to Fig. 8).For example, obtain poor on the scanning direction, and with it as side-play amount.
Secondly, when confirming to have said side-play amount, when the pixel region 4 of light-emitting zone 19B was applied, according to this side-play amount, the ejection of proofreading and correct China ink regularly.Proofread and correct the ejection timing when like this, the substrate 1 as the coating object being applied China ink.Therefore; Even have scale error or the scale error that thermal expansion caused of each batch of substrate 1; Perhaps the conveyer of ink gun produces deviation in use in the operational process of ink discharge device; Or the installation portion of ink gun also can apply China ink to pixel region 4 accurately in use because of thermal expansion produces skew.And, according to the method for manufacture of the OLED display of embodiment 7, owing to do not have offset as the films such as organic luminous layer of functional membrane, so non-mixed color and high-quality OLED display can be provided.
And, in the method for manufacture of the OLED display of embodiment 7,, make this moment black drop 11 drop on the zone with false pixel region 4 ' adjacency at first to false pixel region 4 ' coating China ink of non-luminous region 19A.According to this drop point site, proofread and correct the ejection timing of China ink, the pixel region 4 to light-emitting zone 19B applies China ink simultaneously, therefore, compares with other embodiments, can realize more accurately the China ink of pixel region 4 is applied.
(embodiment 8)
Figure 14 A representes to utilize the situation of the ink discharge device coated substrate 1-2 that possesses ink gun 5, and Figure 14 B representes that by the inspection units with identification camera 14 observation applies the situation of the China ink coating state of the substrate 1-1 behind the EO.
At first, with embodiment 1 likewise, utilize ink discharge device, the pixel region of substrate 1-1 4 is applied China ink, make black drop 11 drop on the separation levee zone with pixel region 4 adjacency.Then; After applying EO; Shown in Figure 14 B, utilize the inspection units (possessing identification camera 14) that separates with ink discharge device, obtain the drop point site 13 of the black drop 11 among the substrate 1-1 behind the coating EO and the side-play amount (with reference to Fig. 8) between the desired location 12.Identification camera 14 is taken black drop 11.
With the side-play amount of utilizing the inspection units shown in Figure 14 B to obtain, feed back to the ink discharge device (with reference to Figure 14 A) that the pixel region 4 that applies the unclosed substrate 1-2 of operation is applied China ink.Substrate 1-2 is made as the substrate with substrate 1-1 same modality.Ink discharge device shown in Figure 14 A is proofreaied and correct after the timing of ink gun 5 ejection China inks according to feedack, to the pixel region 4 coating China inks of substrate 1-2.Thus, can apply China ink to the pixel region 4 of substrate 1-2 accurately.
The method of embodiment 8 is difficult to eliminate the coating skew that the difference because of each batch of substrate 1-1 and substrate 1-2 causes; Even but the conveyer of ink gun produces deviation in use in the operational process of ink discharge device; Perhaps the installation portion of shower nozzle also can be black to the pixel region coating of substrate accurately in use because of thermal expansion produces skew.
And a part of substrate of also can from a plurality of substrates that applied China ink by ink discharge device, taking a sample is checked by inspection units.Compare with all substrates of inspection, can promptly carry out high precision and apply a plurality of substrates.
Preferred embodiments of the present invention is illustrated, but the present invention is not limited to represent the structure of above-mentioned embodiment or the content of manufacturing step, can carries out various changes according to same technical thought.
For example, in each embodiment, make black drop drop on the zone with all pixel region 4 adjacency of substrate 1, but also can make black drop drop on the zone with one part of pixel zone 4 adjacency.For example, also can be only to the pixel region 4 of the upstream side of the scanning direction that is positioned at ink gun, black drop is dropped on the zone with this pixel region 4 adjacency.Perhaps; Also can select to be positioned at ink gun the scanning direction the upper reaches pixel region 4, be positioned at the pixel region 4 in middle reaches and be positioned at the pixel region 4 in downstream; And pixel region only to selecting, the zone of the pixel region adjacency that black drop is dropped on select with this.
For example, in embodiment 1 grade, make black drop 11 drop on the zone with the both ends adjacency of the length direction of the pixel region 4 of wire, but also can make black drop 11 only drop on the zone with an end abutment of the length direction of the pixel region 4 of wire.Particularly, can high precision during the parallelism of nozzle arrangement row and the line of the wire separation levee 3A of substrate 1 of adjustment ink gun 5, the zone that black drop 11 is only dropped on an end abutment gets final product, and thus, can obtain effect of sufficient.
In addition; In embodiment; Be illustrated applying China ink to all pixel regions 4 of substrate 1 through the single pass action of ink gun 5; But during less than substrate 1, also can carry out the scanning of ink gun 5 in the size of the length direction of ink gun 5R, 5G, 5B, make China ink be coated in all pixel regions 4 of substrate 1 substrate 1 repeated multiple times.
Industrial applicibility
According to the coating method that utilizes ink jet method of the present invention, also can proofread and correct because of the coating that causes as the scale error of each batch of the substrate that applies object or the coating that scale error caused skew that thermal expansion causes or because of the skew of ink discharge device itself and squint.Particularly, according to the coating method of ink jet method of the present invention, the scale error that also can cause the scale error or the thermal expansion of each batch becomes big large-area substrates and carries out the high precision coating.Therefore, the coating method of ink jet method of the present invention is particularly suitable for being applied in the step that is formed functional layer by cladding process, helps to provide the large-scale OLED display of high image quality.
Claims (7)
1. coating method, its through to have a plurality of pixel regions and respectively with the substrate of scolding liquid portion of said pixel region adjacency, comprise the black drop of functional materials from the nozzle ejection, thereby form functional membrane at said pixel region,
Said coating method comprises:
Make said black drop drop on the 1st pixel region of said substrate and the step of scolding liquid portion with the 1st of said the 1st pixel region adjacency;
Obtain said black drop drop on the said the 1st scold liquid portion drop point site and the step of the difference of the desired location of the black drop of having set; And
According to said poor, proofread and correct China ink after the ejection regularly of nozzle ejection, black drop is sprayed onto the step of the 2nd pixel region of said substrate.
2. coating method as claimed in claim 1,
Also comprise: take comprise drop on the said the 1st scold black drop and said the 1st pixel region of liquid portion the step of image, it is said poor to obtain according to said photographic images.
3. coating method as claimed in claim 1,
Said the 1st pixel region is the zone that disposes one or more sub-pixels.
4. coating method as claimed in claim 1,
Said the 1st pixel region is the wire zone that is arranged with a plurality of sub-pixels, and applies identical China ink, and the said the 1st scolds the end abutment of the length direction of liquid portion and said the 1st pixel region.
5. coating method as claimed in claim 1,
Said the 1st pixel region is the wire zone that is arranged with a plurality of sub-pixels, and applies identical China ink,
The said the 1st scolds the both ends adjacency of the length direction of liquid portion and said the 1st pixel region,
Also comprise: obtain black drop and be sprayed onto the said the 1st and scold one in the liquid portion to scold the drop point site of liquid portion and black drop to be sprayed onto the poor of another drop point site of scolding liquid portion, and proofread and correct China ink regularly from the ejection of nozzle ejection according to this difference.
6. like each described coating method in the claim 1 to 3,
Said the 1st pixel region is the wire zone that is arranged with a plurality of sub-pixels, and applies identical China ink,
The said the 1st scolds the end abutment of the width of liquid portion and said the 1st pixel region.
7. the method for manufacture of display of organic electroluminescence; Its through to have a plurality of pixel regions and respectively with the panel substrate of scolding liquid portion of said pixel region adjacency; The black drop that comprises functional materials from the nozzle ejection; Thereby form organic functional membrane and make display of organic electroluminescence at said pixel region
The method of manufacture of said display of organic electroluminescence comprises:
The 1st pixel region that makes said black drop drop on said substrate reaches the step of scolding liquid portion with said the 1st pixel region adjacency;
Obtain said black drop drop on the said the 1st scold liquid portion the step of drop point site and the difference of the desired location of the black drop of having set; And
According to said poor, proofread and correct China ink after the ejection regularly of nozzle ejection, black drop is sprayed onto the step of the 2nd pixel region of said substrate.
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