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CN102338626A - A method for monitoring the stylus position of a contact coordinate measuring machine for tiny holes - Google Patents

A method for monitoring the stylus position of a contact coordinate measuring machine for tiny holes Download PDF

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Publication number
CN102338626A
CN102338626A CN2011101830608A CN201110183060A CN102338626A CN 102338626 A CN102338626 A CN 102338626A CN 2011101830608 A CN2011101830608 A CN 2011101830608A CN 201110183060 A CN201110183060 A CN 201110183060A CN 102338626 A CN102338626 A CN 102338626A
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measuring machine
stylus
coordinate measuring
chaining pin
small hole
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CN102338626B (en
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李醒飞
陈诚
谭文斌
黎春宇
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Tianjin University
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Tianjin University
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Abstract

本发明公开了针对微小孔的接触式坐标测量机测针位置监控方法,它包括以下步骤:(1)将待测工件固定在工装上,在测量机的Z轴上安装光源,在位于工装内部的测量机的工作台上放置用于对测针和小孔成像的摄像机;(2)将测量机的Z轴移动到被测孔上方,使用摄像机拍摄小孔的小孔图像,摄像机将小孔图像输出给计算机进行图像处理,得到小孔的中心位置和半径,然后以小孔的中心坐标为依据,通过测量机的控制系统将测针移动到小孔的正上方;(3)在测针伸进小孔之前,通过摄像机拍摄获取测针红宝石端部的图像,摄像机将测针图像输出给计算机进行测针图像处理,得到测针端部的中心位置。采用本方法提高了测量效率,有效保护了测针。

Figure 201110183060

The invention discloses a method for monitoring the probe position of a contact type coordinate measuring machine for tiny holes, which includes the following steps: (1) fixing the workpiece to be measured on the tooling, installing a light source on the Z axis of the measuring machine, The camera used for imaging the stylus and the small hole is placed on the workbench of the measuring machine; (2) the Z-axis of the measuring machine is moved above the hole to be measured, and the small hole image of the small hole is taken by the camera, and the small hole is captured by the camera. The image is output to the computer for image processing to obtain the center position and radius of the small hole, and then based on the center coordinates of the small hole, the stylus is moved to the top of the small hole through the control system of the measuring machine; (3) the stylus Before entering the small hole, the image of the ruby end of the stylus is captured by the camera, and the camera outputs the image of the stylus to the computer for image processing of the stylus to obtain the center position of the end of the stylus. The method improves the measurement efficiency and effectively protects the probe.

Figure 201110183060

Description

针对微小孔的接触式坐标测量机测针位置监控方法A method for monitoring the stylus position of a contact coordinate measuring machine for tiny holes

技术领域 technical field

本发明涉及测针位置监控方法,尤其涉及针对微小孔的接触式坐标测量机测针位置监控方法。The invention relates to a method for monitoring the position of a stylus, in particular to a method for monitoring the position of a stylus of a contact coordinate measuring machine for tiny holes.

背景技术 Background technique

对于使用机械触发测头的坐标测量机,在对被测要素进行接触测量之前,必须先对测针进行定位,而这个步骤是由操作人员实施。以测量孔的内径为例子,测量前,操作人员要把测针定位到被测孔的正上方,然后测针才能伸进被测孔进行测量。操作人员定位的依据有两个:一是人眼观察,二是被测件的定位基准。在测量对象是直径小于1mm的微小孔的情况下,所用测针端部直径与微小孔直径相差在1mm以下,这时靠人眼观察是不可靠的。当定位基准难以准确获取,或者被测件的制造误差超差时,测针就不能准确的定位在被测孔的正上方。当测针的定位误差偏大时,测针伸进被测孔的过程中,会与被测件发生碰撞。由于测量的是微小孔,所使用的测针也是非常细小的,一旦在非测量过程中发生碰撞,就会致使测针损毁。目前国内企业仍无法生产性能优良的高精度接触式测针,每年用于向国外企业购买测针的花费很高,所以有必要提高测针使用寿命,降低成本。For CMMs using mechanical trigger probes, the stylus must be positioned prior to contact measurement of the feature being measured, and this step is performed by the operator. Taking the inner diameter of a measuring hole as an example, before measuring, the operator must position the stylus directly above the hole to be measured, and then the stylus can be inserted into the hole to be measured. There are two bases for operator positioning: one is human eye observation, and the other is the positioning reference of the tested part. When the measurement object is a tiny hole with a diameter of less than 1 mm, the difference between the diameter of the end of the stylus and the diameter of the tiny hole is less than 1 mm, and it is unreliable to observe with the human eye at this time. When the positioning datum is difficult to obtain accurately, or the manufacturing error of the measured part is out of tolerance, the stylus cannot be accurately positioned directly above the measured hole. When the positioning error of the stylus is too large, the stylus will collide with the measured object when it is inserted into the measured hole. Since the measurement is a tiny hole, the stylus used is also very small, once a collision occurs during the non-measurement process, the stylus will be damaged. At present, domestic enterprises are still unable to produce high-precision contact styli with excellent performance, and the annual cost of purchasing styli from foreign companies is very high, so it is necessary to improve the service life of styli and reduce costs.

现有的测针防撞保护装置主要是针对测针工作在测量状态中与待测工件接触时作用力过大而设计的,例如英国Renishaw公司生产的带有零触力保护装置的测头。但对于非测量状态下测针与被测件的接触,目前尚无很好的解决方法,通常是在三维坐标测量机工作时由相关技术人员在旁边观察,在误碰撞发生前及时使设备停止运行。这种方法费时费力,而且多数情况是当设备停止运行时测针已经损毁。The existing stylus anti-collision protection device is mainly designed for the excessive force when the stylus is in contact with the workpiece to be measured in the measurement state, such as the stylus with a zero-contact force protection device produced by the British Renishaw company. However, there is no good solution for the contact between the stylus and the tested part in the non-measurement state. Usually, when the three-dimensional coordinate measuring machine is working, the relevant technical personnel will observe it and stop the equipment in time before the accidental collision occurs. run. This method is time consuming and in most cases the stylus is destroyed when the equipment is out of service.

发明内容 Contents of the invention

本发明的目的在于克服已有技术的不足,提供一种能快速的确定被测小孔的位置,自动进行测针定位,并且能方便地监测测针和微小孔的位置,有效防止测针损毁的针对微小孔的接触式坐标测量机测针位置监控方法。The purpose of the present invention is to overcome the deficiencies of the prior art, to provide a method that can quickly determine the position of the small hole to be measured, automatically position the measuring needle, and can conveniently monitor the position of the measuring needle and the tiny hole, and effectively prevent the measuring needle from being damaged. A contact coordinate measuring machine stylus position monitoring method for tiny holes.

本发明的针对微小孔的接触式坐标测量机测针位置监控方法,它包括以下步骤:The method for monitoring the position of the stylus of a contact coordinate measuring machine for tiny holes of the present invention comprises the following steps:

(1)将待测工件固定在工装上,在三坐标测量机的Z轴上安装光源实现对安装在三坐标测量机Z轴上的测针和待测工件上的小孔的照明,在位于工装内部的三坐标测量机的工作台上放置用于对测针和小孔成像的摄像机,摄像机放置在用于固定和调整摄像机位置的调整座上,调整座和工装固定在三坐标测量机的工作台上;(1) Fix the workpiece to be measured on the tooling, and install a light source on the Z-axis of the three-coordinate measuring machine to realize the illumination of the stylus installed on the Z-axis of the three-coordinate measuring machine and the small hole on the workpiece to be measured. The camera used to image the stylus and the small hole is placed on the workbench of the three-coordinate measuring machine inside the tooling. The camera is placed on the adjustment seat for fixing and adjusting the position of the camera. The adjustment seat and the tooling are fixed on the three-coordinate measuring machine. on the workbench;

(2)将三坐标测量机的Z轴移动到被测孔上方,使光源在工作距离范围内,然后使用摄像机拍摄小孔的小孔图像,摄像机将小孔图像输出给计算机进行图像处理,得到小孔的中心位置和半径,然后以小孔的中心坐标为依据,通过三坐标测量机的控制系统将测针移动到小孔的正上方;(2) Move the Z-axis of the three-coordinate measuring machine to the top of the measured hole so that the light source is within the working distance range, and then use the camera to capture the small hole image of the small hole, and the camera outputs the small hole image to the computer for image processing, and obtain The center position and radius of the small hole, and then based on the center coordinates of the small hole, move the stylus directly above the small hole through the control system of the three-coordinate measuring machine;

(3)在测针伸进小孔之前,通过摄像机拍摄获取测针红宝石端部的图像,摄像机将测针图像输出给计算机进行测针图像处理,得到测针端部的中心位置,通过小孔的中心位置和半径,以及测针端部的中心位置和预设的测针端部半径这四个信息,就可以判断出测针是否会与小孔发生碰撞。(3) Before the stylus is inserted into the small hole, the image of the ruby end of the stylus is captured by the camera, and the camera outputs the image of the stylus to the computer for image processing of the stylus to obtain the center position of the end of the stylus and pass through the small hole The center position and radius of the stylus, as well as the center position of the end of the stylus and the preset radius of the end of the stylus can be used to determine whether the stylus will collide with the small hole.

本发明的有益效果是:The beneficial effects of the present invention are:

1.能快速定位小孔,并且自动通过控制系统将测针移到小孔的正上方,提高测量效率。1. It can quickly locate the small hole, and automatically move the stylus to the top of the small hole through the control system to improve the measurement efficiency.

2.通过系统对小孔和测针进行定位,确保测针定位的准确性,避免了测针在伸进小孔过程中发生的碰撞,有效保护了测针。2. The small hole and the stylus are positioned by the system to ensure the accuracy of the stylus positioning, avoiding the collision of the stylus when it is inserted into the small hole, and effectively protecting the stylus.

3.对微小孔和测针进行了光学放大,方便操作人员进行观察。3. The optical magnification of the tiny hole and the stylus is carried out, which is convenient for the operator to observe.

附图说明 Description of drawings

图1是本发明的针对微小孔的接触式坐标测量机测针位置监控方法采用的测试结构示意图;Fig. 1 is a schematic diagram of the test structure adopted by the contact type coordinate measuring machine probe position monitoring method for tiny holes of the present invention;

图2是图1所示的结构的I处放大图;Fig. 2 is the enlarged view of the I place of the structure shown in Fig. 1;

图3是图1所示的结构中的光源的结构示意图。FIG. 3 is a schematic structural diagram of a light source in the structure shown in FIG. 1 .

具体实施方式 Detailed ways

下面结合附图和具体实施例对本发明作以详细描述。The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

本发明的针对微小孔的接触式坐标测量机测针位置监控方法,它包括以下步骤:(1)将待测工件103固定在工装104上,在三坐标测量机的Z轴101上安装光源102实现对安装在三坐标测量机Z轴上的测针201和待测工件上的小孔202的照明,在位于工装104内部的三坐标测量机的工作台上放置用于对测针201和小孔202成像的摄像机105,摄像机105放置在用于固定和调整摄像机105位置的调整座106上,调整座106和工装104固定在三坐标测量机的工作台107上;(2)将三坐标测量机的Z轴101移动到被测孔202上方,使光源102在工作距离范围内,然后使用摄像机105拍摄小孔202的小孔图像,摄像机将小孔图像输出给计算机进行图像处理,得到小孔202的中心位置(xo,yo)和半径ro,然后以小孔202的中心坐标为依据,通过三坐标测量机的控制系统将测针201移动到小孔202的正上方;(3)在测针201伸进小孔202之前,通过摄像机105拍摄获取测针201红宝石端部的图像,摄像机将测针图像输出给计算机进行测针图像处理,得到测针201红宝石端部的中心位置(xc,yc)。测针201红宝石端部的中心与小孔202的中心距离

Figure BDA0000072833180000031
如果d≤ro-ro-ε,则说明测针处在安全范围内,其中rc是测针的半径值,ε是用户设定的安全系数,取值区间为(0,ro-rc)The method for monitoring the position of the stylus of a contact coordinate measuring machine for tiny holes of the present invention includes the following steps: (1) fixing the workpiece 103 to be measured on the tooling 104, and installing a light source 102 on the Z axis 101 of the three coordinate measuring machine Realize the illumination of the stylus 201 installed on the Z-axis of the three-coordinate measuring machine and the small hole 202 on the workpiece to be measured. The camera 105 of the hole 202 imaging, the camera 105 is placed on the adjustment seat 106 for fixing and adjusting the position of the camera 105, and the adjustment seat 106 and the tooling 104 are fixed on the workbench 107 of the three-coordinate measuring machine; (2) the three-coordinate measurement The Z-axis 101 of the machine moves to the top of the measured hole 202, so that the light source 102 is within the working distance range, and then the camera 105 is used to shoot the small hole image of the small hole 202, and the camera outputs the small hole image to the computer for image processing to obtain the small hole 202 center position (x o , y o ) and radius r o , and then based on the center coordinates of the small hole 202, move the stylus 201 directly above the small hole 202 through the control system of the three-coordinate measuring machine; (3 ) Before the stylus 201 is inserted into the small hole 202, the image of the ruby end of the stylus 201 is captured by the camera 105, and the camera outputs the image of the stylus to the computer for image processing of the stylus to obtain the center position of the ruby end of the stylus 201 (x c , y c ). The distance between the center of the ruby end of the stylus 201 and the center of the small hole 202
Figure BDA0000072833180000031
If d≤r o -r o -ε, it means that the stylus is in the safe range, where r c is the radius value of the stylus, ε is the safety factor set by the user, and the value range is (0, r o - r c )

优选的所述的光源是由外壳301和环形LED发光二极管阵列302构成并且在环形上的一处安装有毛玻璃303,在所述的步骤(2)中光源的毛玻璃303部分对准小孔进行背光照明。Preferably, the light source is composed of a housing 301 and an annular LED light-emitting diode array 302, and a frosted glass 303 is installed on one of the rings. In the step (2), the frosted glass 303 part of the light source is aligned with the small hole for backlighting. illumination.

在本方法中应把摄像机105的对焦平面调整至工件103的上表面处,使小孔202和测针103都能获得较清晰的图像。In this method, the focus plane of the camera 105 should be adjusted to the upper surface of the workpiece 103 so that both the small hole 202 and the probe 103 can obtain clearer images.

所述摄像机105,应通过调整座106调整,使所得图像的长、宽方向分别与三坐标测量机的X、Y方向尽量平行,以方便操作人员观察,并且使小孔202处在图像的中心。The camera 105 should be adjusted through the adjustment seat 106 so that the length and width directions of the obtained image are as parallel as possible to the X and Y directions of the three-coordinate measuring machine respectively, so as to facilitate the operator to observe, and make the small hole 202 in the center of the image .

所述摄像机105,应在安装完成后进行标定,建立摄像机坐标系与机器坐标系之间的联系。The camera 105 should be calibrated after installation to establish a connection between the camera coordinate system and the machine coordinate system.

采用本方法可以将图像显示在计算机的屏幕上,方便操作人员观察。By adopting the method, the image can be displayed on the computer screen, which is convenient for operators to observe.

实施例1Example 1

将待测工件103固定在工装104上,在三坐标测量机的Z轴101上安装光源102实现对安装在三坐标测量机Z轴上的测针201和待测工件上的小孔202的照明,在位于工装104内部的三坐标测量机的工作台上放置用于对测针201和小孔202成像的摄像机105,摄像机105放置在用于固定和调整摄像机105位置的调整座106上,调整座106和工装104固定在三坐标测量机的工作台107上;(2)将三坐标测量机的Z轴101移动到被测孔202上方,光源是由环形LED发光二极管阵列302构成并且在环形上的一处安装有毛玻璃303,使光源102在工作距离范围内,并使光源的毛玻璃303部分对准小孔进行背光照明,然后使用摄像机105拍摄小孔202的小孔图像,摄像机将小孔图像输出给计算机进行图像处理,得到小孔202的中心位置(xo,yo)=(325.123,201.020)和半径ro=0.34mm,然后以小孔202的中心坐标(xo,yo)为依据,通过三坐标测量机的控制系统将测针201移动到小孔202的正上方;(3)在测针201伸进小孔202之前,通过摄像机105拍摄获取测针201红宝石端部的图像,摄像机将测针图像输出给计算机进行测针图像处理,得到测针201红宝石端部的中心位置(xc,yc)=(325.130,201.011)。测针201红宝石端部的中心与小孔202的中心距离

Figure BDA0000072833180000041
rc是0.15mm,取ε=0.1mm,则d<ro-rc-ε=0.09mm,说明测针处在安全范围内。Fix the workpiece 103 to be measured on the tooling 104, install the light source 102 on the Z-axis 101 of the three-coordinate measuring machine to realize the illumination of the stylus 201 installed on the Z-axis of the three-coordinate measuring machine and the small hole 202 on the workpiece to be measured , the camera 105 for imaging the stylus 201 and the small hole 202 is placed on the workbench of the coordinate measuring machine located inside the tooling 104, and the camera 105 is placed on the adjustment seat 106 for fixing and adjusting the position of the camera 105, adjusting The seat 106 and the tooling 104 are fixed on the workbench 107 of the three-coordinate measuring machine; (2) the Z-axis 101 of the three-coordinate measuring machine is moved to the top of the hole 202 to be measured. A frosted glass 303 is installed on one place, so that the light source 102 is within the working distance range, and the frosted glass 303 part of the light source is aligned with the small hole for backlighting, and then the small hole image of the small hole 202 is taken by the camera 105, and the small hole is captured by the camera. The image is output to the computer for image processing to obtain the central position (x o , y o )=(325.123, 201.020) and the radius r o =0.34mm of the small hole 202, and then use the central coordinates (x o , y o ) as the basis, the stylus 201 is moved to the top of the small hole 202 through the control system of the coordinate measuring machine; (3) before the stylus 201 is inserted into the small hole 202, the ruby end of the stylus 201 is captured by the camera 105 The camera outputs the stylus image to the computer for stylus image processing to obtain the center position (x c , y c )=(325.130, 201.011) of the ruby tip of the stylus 201 . The distance between the center of the ruby end of the stylus 201 and the center of the small hole 202
Figure BDA0000072833180000041
r c is 0.15mm, taking ε=0.1mm, then d<r o -r c -ε=0.09mm, indicating that the stylus is in the safe range.

采用本方法,提高了测量效率,避免了测针在伸进小孔过程中发生的碰撞,有效保护了测针。对微小孔和测针进行了光学放大,方便操作人员进行观察。By adopting the method, the measurement efficiency is improved, the collision of the measuring needle when it is inserted into the small hole is avoided, and the measuring needle is effectively protected. The optical magnification of the tiny hole and the stylus is convenient for the operator to observe.

Claims (2)

1. to the contact coordinate measuring machine chaining pin position monitoring method of micro hole, it is characterized in that it may further comprise the steps:
(1) workpiece for measurement is fixed on the frock; In that being installed on the Z of the three coordinate measuring machine axle, realizes light source being installed in chaining pin and the illumination of the aperture on the workpiece for measurement on the three coordinate measuring machine Z axle; On the worktable that is positioned at the inner three coordinate measuring machine of frock, place and be used for video camera chaining pin and pinhole imaging system; Video camera is placed on and is used for fixing and adjusts on the adjustment seat of camera position, and adjustment seat and frock are fixed on the worktable of three coordinate measuring machine;
(2) the Z axle with three coordinate measuring machine moves to the measured hole top; Make light source in the operating distance scope; Use video camera to take the aperture image of aperture then, video camera is exported to computing machine with the aperture image and is carried out Flame Image Process, obtains the center and the radius of aperture; Centre coordinate with aperture is a foundation then, the control system through three coordinate measuring machine with chaining pin move to aperture directly over;
(3) before chaining pin puts in aperture; Obtain the image of chaining pin ruby end through the video camera shooting; Video camera is exported to computing machine with the chaining pin image and is carried out the chaining pin Flame Image Process, obtains the center of chaining pin end, through the center and the radius of aperture; And the center of chaining pin end and preset these four information of chaining pin end radii, just can judge chaining pin and whether can bump with aperture.
2. the contact coordinate measuring machine chaining pin position monitoring method to micro hole according to claim 1; It is characterized in that: described light source is to be made up of and a place on annular is equipped with frosted glass the annular LED light emitting diode matrix, and the frosted glass part alignment apertures of light source is carried out back lighting in described step (2).
CN 201110183060 2011-06-30 2011-06-30 Method for monitoring position of measuring pin of contact coordinate measuring machine aiming at micro hole Expired - Fee Related CN102338626B (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104395689A (en) * 2012-05-07 2015-03-04 卡尔蔡司工业测量技术有限公司 Improved illumination module for a co-ordinate measuring machine
CN104697447A (en) * 2013-12-06 2015-06-10 特莎有限公司 Accessory for coordinate measuring machine
CN106643616A (en) * 2016-12-27 2017-05-10 广东长盈精密技术有限公司 contact centering method
CN112097701A (en) * 2020-08-05 2020-12-18 海克斯康制造智能技术(青岛)有限公司 Device and method for acquiring safety bit signal of three-coordinate measuring machine
CN112539715A (en) * 2021-01-18 2021-03-23 格力电器(重庆)有限公司 Automatic concentricity detection device and method
CN113237425A (en) * 2021-05-12 2021-08-10 合肥工业大学 Automatic guiding method for measuring tiny workpiece by single-camera auxiliary coordinate measuring machine

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5125035A (en) * 1989-12-18 1992-06-23 Chromalloy Gas Turbine Corporation Five axis generated hole inspection system
CN1204046A (en) * 1998-06-30 1999-01-06 天津大学 Optical contact measuring method and miniature three-dimensional measuring head using the same
EP0916923A2 (en) * 1997-08-18 1999-05-19 Giddings & Lewis Inc. Method and apparatus for displaying active probe tip status of a coordinate measuring machine
CN1952596A (en) * 2005-10-19 2007-04-25 三丰株式会社 Probe observing device, surface property detector
CN201373735Y (en) * 2009-01-14 2009-12-30 东莞市兆丰精密仪器有限公司 Three-dimensional image coordinate measuring instrument
CN201503259U (en) * 2009-08-28 2010-06-09 东莞市兆丰精密仪器有限公司 Full-automatic multifunctional sensor geometric measurement system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5125035A (en) * 1989-12-18 1992-06-23 Chromalloy Gas Turbine Corporation Five axis generated hole inspection system
EP0916923A2 (en) * 1997-08-18 1999-05-19 Giddings & Lewis Inc. Method and apparatus for displaying active probe tip status of a coordinate measuring machine
CN1204046A (en) * 1998-06-30 1999-01-06 天津大学 Optical contact measuring method and miniature three-dimensional measuring head using the same
CN1952596A (en) * 2005-10-19 2007-04-25 三丰株式会社 Probe observing device, surface property detector
CN201373735Y (en) * 2009-01-14 2009-12-30 东莞市兆丰精密仪器有限公司 Three-dimensional image coordinate measuring instrument
CN201503259U (en) * 2009-08-28 2010-06-09 东莞市兆丰精密仪器有限公司 Full-automatic multifunctional sensor geometric measurement system

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
张秀芝: "基于计算机视觉的机械零件几何量精密测量技术研究", 《中国博士学位论文全文数据库信息科技辑》 *
武志宏: "基于CCD和图像处理技术的六角光纤几何尺寸测量系统的研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104395689A (en) * 2012-05-07 2015-03-04 卡尔蔡司工业测量技术有限公司 Improved illumination module for a co-ordinate measuring machine
CN104395689B (en) * 2012-05-07 2016-05-18 卡尔蔡司工业测量技术有限公司 For the improved lighting module of coordinate measuring machine
US9453718B2 (en) 2012-05-07 2016-09-27 Carl Zeiss Industrielle Messtechnik Gmbh Illumination module for a coordinate measuring machine
CN104697447A (en) * 2013-12-06 2015-06-10 特莎有限公司 Accessory for coordinate measuring machine
CN106643616A (en) * 2016-12-27 2017-05-10 广东长盈精密技术有限公司 contact centering method
CN112097701A (en) * 2020-08-05 2020-12-18 海克斯康制造智能技术(青岛)有限公司 Device and method for acquiring safety bit signal of three-coordinate measuring machine
CN112539715A (en) * 2021-01-18 2021-03-23 格力电器(重庆)有限公司 Automatic concentricity detection device and method
CN113237425A (en) * 2021-05-12 2021-08-10 合肥工业大学 Automatic guiding method for measuring tiny workpiece by single-camera auxiliary coordinate measuring machine

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