CN102313524B - Image acquiring device and method - Google Patents
Image acquiring device and method Download PDFInfo
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- CN102313524B CN102313524B CN 201010221921 CN201010221921A CN102313524B CN 102313524 B CN102313524 B CN 102313524B CN 201010221921 CN201010221921 CN 201010221921 CN 201010221921 A CN201010221921 A CN 201010221921A CN 102313524 B CN102313524 B CN 102313524B
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Abstract
The invention discloses an image acquiring device, which is used for scanning an object to be detected. In the image acquiring device, a second light splitting component is arranged above a microscope objective group to divide a working light beam into a first sub-light beam and a second sub-light beam; and a monochromatic image sensing device and a colored image sensing device are used for receiving the first sub-light beam and the second sub-light beam respectively so as to acquire a monochromatic interference image and a monochromatic or colored image without an interference fringe. In addition, the invention also discloses an image acquiring method. The monochromatic interference image and the monochromatic or colored image without the interference fringe are acquired by the image acquiring device, so that the flaws of the object to be detected can be detected, or a colored plane sharp image and a colored stereoscopic outline image can be acquired.
Description
Technical field
The present invention is about a kind of image-taking device and view finding method, and espespecially a kind of have monochromatic and color image sensing device, and can obtain the monochrome of determinand or image-taking device and the view finding method of color solid profile diagram and monochrome or color plane picture rich in detail.
Background technology
The three-dimensional micro-capture of prior art normally utilizes interference system to reach, yet, owing to when capture, can contain obvious interference fringe in the resulting image, although therefore can utilize interference system to obtain the stereo profile of determinand, can't directly carry out measurement and the Defect Detection of two-dimensional to the image that contains interference fringe.
In order to solve the above problems, comparatively novel settling mode has two kinds at present, and a kind of for utilizing phase-shift method, another kind then utilizes bearing calibration to reach.See also Fig. 1, Fig. 1 is the image capturing device structure of prior art.Image capturing device 100 comprises a light source 11, spectrophotometric unit 12, interference mirror group 13, black and white camera 14 and actuator 15, so that determinand 200 is done vertical scanning.
Light source 11 can produce light beam 31.But spectrophotometric unit 12 folded light beams 31 are to form folded light beam 32.Interference mirror group 13 can utilize reflection reference surface 131 that folded light beam 32 is modulated into reference beam 33 and measures light beam 34, measurement light beam 34 is incident to the surface on the determinand 200, and reflex to and form interfering beam 35 after interference mirror group 13 is closed light with reference beam 33, interfering beam 35 penetrate again spectrophotometric unit 12 to black and white camera 14 to produce image.
In the process of scanning, the actuator 15 that is linked to interference mirror group 13 drives interference mirror group 13, use in different scanning heights determinand 200 is scanned, therefore and obtain a series of interference image, this a series of interference image can obtain by the mode of computing the stereo-picture of determinand 200, yet two dimensional image must rely on combinatorial operation clearly, take out the composition of direct current in the image after, to eliminate the impact of interference fringe, this is phase-shift method.Yet utilize the not coloured information of the obtained two dimensional image of phase-shift method, determinand 200 two dimensional images of therefore trying to achieve are black white image, and owing to the image depth that micro-capture is obtained is very shallow, therefore in the obtained two dimensional image, it is clearly that determinand 200 profiles that correspond to the scanning height place are only arranged, and then blur in other place.
The mode of utilizing bearing calibration to obtain clear two dimensional image then is to link actuator 16 on black and white camera 14, and finish the acquisition action of a series of interference images at image capturing device 100, and after obtaining the stereo profile image of determinand 200, recycling actuator 16 moves black and white camera 14 with the image space of correcting image capture device 100, uses the clear two dimensional image that obtains determinand 200.
Because the mode of utilizing bearing calibration to obtain clear two dimensional image must be separated acquisition with stereo profile image and two dimensional image, therefore can make whole capture process increase unnecessary action, and the excessively shallow problem of the depth of field of two dimensional image and do not have the problem of colouring information also can occur in this view finding method equally.
Summary of the invention
Technical matters and purpose that institute of the present invention wish solves:
Fundamental purpose of the present invention is for providing a kind of image-taking device and view finding method, this image-taking device has a monochrome image sensing apparatus and another monochrome or color image sensing device, and can in the capture process, capture respectively the monochromatic interference image with clearly without interference image, with by view finding method of the present invention after a plurality of scanning position captures, carry out Defect Detection or obtain the color plane picture rich in detail and the color solid contour images.
The technological means that the present invention deals with problems:
A kind of image-taking device, in order to determinand is scanned, this image-taking device comprises light source, the first spectrum groupware, microcobjective group, the second spectrum groupware, monochrome image sensing apparatus and image sensering device.Light source is in order to launch illumination beam; The first spectrum groupware is in order to the reflected illumination light beam; The microcobjective group is arranged at the top of determinand, comprise the reflection reference surface, and in order to illumination beam is modulated into measurement light beam and reference beam, measure the surface that light beam system is projected to determinand, and generation reflexes to the first folded light beam of microcobjective group, reference beam is projected to the reflection reference surface, and produces the second folded light beam that reflexes to the microcobjective group, and the first folded light beam and the synthetic working beam that penetrates the first spectrum groupware of the second folded light beam; The second spectrum groupware is arranged at first spectroscopical top, in order to working beam is divided into the first beamlet and the second beamlet; The monochrome image sensing apparatus is arranged on the course of the first beamlet, receiving the first beamlet, and in the first interference region of the first beamlet, acquisition monochromatic interference image; Image sensering device is arranged on the course of the second beamlet, and receiving the second beamlet, and outside the second interference region of the second beamlet, acquisition is without interference image.
In a preferred embodiment of the present invention, image-taking device also comprises actuator, and this actuator is coupled to the microcobjective group.
In another preferred embodiment of the present invention, image-taking device also comprises reflection subassembly, reflexes to image sensering device in order to this second beamlet that this second spectrum groupware is told.
In another preferred embodiment of the present invention, image sensering device has extended loop, uses the capture focus of adjusting the color image sensing device.
In another preferred embodiment of the present invention, image sensering device can be the color image sensing device.
The present invention also discloses a kind of view finding method, utilizes aforesaid image-taking device that determinand is carried out vertical scanning, and this view finding method may further comprise the steps: the microcobjective group is sequentially moved vertically to a plurality of scanning positions; Receive the first beamlet by the monochrome image sensing apparatus, obtain the monochromatic interference image of determinand one sequence with the above-mentioned scanning position of correspondence; Receive the second beamlet by image sensering device, obtain with the above-mentioned scanning position of correspondence determinand one sequence without interference image; Monochromatic interference image to a sequence carries out surface profile reduction computing, to obtain the monochromatic stereo profile image of determinand; To the carrying out sharpness without interference image and focus on computing an of sequence, a plurality of clear part without in the interference image of this sequence is captured, use the plane picture rich in detail of synthetic determinand.
In a preferred embodiment of the present invention, image sensering device can be the color image sensing device, and view finding method can also comprise from plane picture rich in detail acquisition color-positional information, and utilize color-positional information that monochromatic stereo profile image is carried out color and apply mechanically computing, to obtain the color solid contour images.
The present invention contrasts the effect of prior art:
Compared to existing image-taking device and view finding method, the present invention is by arranging monochrome image sensing apparatus and color image sensing device, and make monochrome image sensing apparatus and color image sensing device can capture respectively simultaneously monochromatic interference image and coloured image by the second spectrum groupware, therefore can after a plurality of scanning position captures, obtain simultaneously color plane picture rich in detail and color solid contour images.
Change to say it, it can under the prerequisite that does not increase the capture action, be obtained the stereo profile image with chromatic information, and obtain having chromatic information and the darker color plane picture rich in detail of the depth of field.
Specific embodiment of the present invention will be further described by following examples and accompanying drawing.
Description of drawings
Fig. 1 is the image capturing device structure of prior art;
Fig. 2 is image-taking device schematic diagram of the present invention;
Fig. 3 is image-taking device mechanism map of the present invention;
Fig. 4 is view finding method block diagram of the present invention;
Fig. 5 is the capture figure as a result of the actual monochromatic interference image of the present invention;
Fig. 6 is reality of the present invention without the capture of interference image figure as a result;
Fig. 7 is that the present invention reduces the three-dimensional as a result figure of determinand.
Wherein, Reference numeral:
Image capturing device 100 light sources 11
Spectrophotometric unit 12 interference mirror groups 13
Reflection reference surface 131 black and white cameras 14
Actuator 15 actuators 16
Determinand 200 light beams 31
Folded light beam 32 reference beams 33
Measure light beam 34 interfering beams 35
Image-taking device 400 light sources 41
The first spectrum groupware 42 microcobjective groups 43
Monochrome image sensing apparatus 45 image sensering devices 46
The second folded light beam 55
The first beamlet 57
The second beamlet 58
Embodiment
The present invention is about a kind of image-taking device and view finding method, and espespecially a kind of have monochromatic and color image sensing device, and can obtain simultaneously the color plane picture rich in detail of determinand and image-taking device and the view finding method of color solid contour images.Below enumerate a preferred embodiment with explanation the present invention, but those skilled in the art knows that all this only is one for example, and be not to limit invention itself.The detailed description of relevant this preferred embodiment is as follows.
See also Fig. 2 and Fig. 3, Fig. 2 is image-taking device schematic diagram of the present invention, and Fig. 3 is image-taking device mechanism map of the present invention.Image-taking device 400 of the present invention, in order to determinand 200 is scanned, image-taking device 400 comprises light source 41, the first spectrum groupware 42, microcobjective group 43, the second spectrum groupware 44, monochrome image sensing apparatus 45 and image sensering device 46.Light source 41 is in order to launch illumination beam 51; The first spectrum groupware 42 is in order to reflected illumination light beam 51.
The second spectrum groupware 44 is arranged at the top of the first spectrum groupware 42, in order to working beam 56 is divided into the first beamlet 57 and the second beamlet 58; Monochrome image sensing apparatus 45 is arranged on the course of the first beamlet 57, receiving the first beamlet 57, and in the first interference region of the first beamlet 57, acquisition monochromatic interference image; Wherein, so-called the first interference region refers in particular to and can make the first folded light beam 54 and the second folded light beam 55 produce the capture zone of interfering.
Please refer to Fig. 4, Fig. 4 is view finding method block diagram of the present invention.The invention also discloses a kind of view finding method, utilize 400 pairs of determinands of aforesaid image-taking device 200 to carry out relative position scanning, this view finding method may further comprise the steps:
S101: microcobjective group 43 is sequentially moved to a plurality of scanning positions; Then, receive the first beamlet 57 by monochrome image sensing apparatus 45, obtain the monochromatic interference image of determinand 200 1 sequences with the above-mentioned scanning position of correspondence; Simultaneously, receive the second beamlet 58 by image sensering device 46, obtain with the above-mentioned scanning position of correspondence determinand 200 1 sequences without interference image.
S103: the monochromatic interference image to an obtained sequence carries out surface profile reduction computing, to obtain the monochromatic stereo profile image of determinand 200; The monochromatic stereo profile image that the view finding method that the resulting monochromatic stereo profile image of this step is prior art can be obtained.
S105: to the carrying out sharpness without interference image and focus on computing of an obtained sequence, a plurality of clear part without in the interference image of this sequence is captured, use the plane picture rich in detail of synthetic determinand 200; Wherein, because image sensering device 46 is to capture without interference image outside the second interference region of the second beamlet 58, therefore each does not have interference fringe without interference image, it then is that each is processed without interference image that so-called sharpness focuses on computing, each is captured without the clear part of interference image in the depth of field, use synthetic plane picture rich in detail that the depth of field is darker.
S107: when image sensering device 46 is the color image sensing device, view finding method of the present invention more can capture color-positional information in the picture rich in detail of plane, and utilize color-positional information that monochromatic stereo profile image is carried out color and apply mechanically computing, to obtain the color solid contour images.
Please continue to consult Fig. 5, Fig. 6 and Fig. 7, Fig. 5 is the capture figure as a result of the actual monochromatic interference image of the present invention, Fig. 6 is reality of the present invention without the capture of interference image figure as a result, Fig. 7 is that the present invention reduces the three-dimensional as a result figure of determinand, can know discovery, compared to existing image-taking device 100 and view finding method, the present invention is by arranging monochrome image sensing apparatus 45 and image sensering device 46, and utilize the second spectrum groupware 44 make monochrome image sensing apparatus 45 and image sensering device 46 can capture respectively simultaneously the monochromatic interference image with without interference image, therefore can be after a plurality of scanning position captures, obtain simultaneously plane picture rich in detail and monochromatic stereo profile image, and when image sensering device 46 is the color image sensing device, more can obtain color plane picture rich in detail and color solid contour images.
Change to say it, the present invention can be under the prerequisite that does not increase the capture action, obtain simultaneously the stereo profile image with chromatic information, and have chromatic information and a darker color plane picture rich in detail of the depth of field, compared to existing image-taking device 100 and view finding method, can obtain more reference informations about determinand 200.By the above detailed description of preferred embodiments, clearly described feature of the present invention and spirit, and be not to come category of the present invention is limited with above-mentioned disclosed preferred embodiment.The arrangement of various changes and tool equality is included in the claim scope of institute of the present invention wish application.
Claims (8)
1. an image-taking device in order to a determinand is scanned, is characterized in that, this image-taking device comprises:
One light source is in order to launch an illumination beam;
One first spectrum groupware is in order to reflect this illumination beam;
One microcobjective group, be arranged at the top of this determinand, comprise a reflection reference surface, and in order to this illumination beam is modulated into measurement light beam and a reference beam, this measurement light beam is projected to the surface of this determinand, and generation reflexes to the first folded light beam of this microcobjective group, this reference beam is projected to this reflection reference surface, and produce the second folded light beam reflex to this microcobjective group, and this first folded light beam and this second folded light beam are synthesized a working beam that penetrates this first spectrum groupware;
One second spectrum groupware is arranged at the top of this first spectrum groupware, in order to this working beam is divided into one first beamlet and one second beamlet;
One monochrome image sensing apparatus is arranged on the course of this first beamlet, receiving this first beamlet, and in one first interference region of this first beamlet, captures a monochromatic interference image; And
One image sensering device is arranged on the course of this second beamlet, and receiving this second beamlet, and outside one second interference region of this second beamlet, acquisition one is without interference image;
The capture zone that this first interference region is interfered for this first folded light beam and this second folded light beam are produced;
The capture zone that this second interference region is interfered for this first folded light beam and this second folded light beam are produced;
Wherein, this image-taking device carries out surface profile reduction computing to this monochromatic interference image, to obtain a monochromatic stereo profile image of this determinand, and, this is carried out a sharpness without interference image focus on computing, this is captured without a plurality of clear part in the interference image, with a synthetic plane picture rich in detail.
2. image-taking device as claimed in claim 1 is characterized in that, also comprises an actuator, and this actuator is coupled to this microcobjective group.
3. image-taking device as claimed in claim 1 is characterized in that, also comprises a reflection subassembly, reflexes to this image sensering device in order to this second beamlet that this second spectrum groupware is told.
4. image-taking device as claimed in claim 1 is characterized in that, this image sensering device has an extended loop, to adjust the capture focus of this image sensering device.
5. image-taking device as claimed in claim 1 is characterized in that, this image sensering device is any one in a monochrome image sensing apparatus and the color image sensing device.
6. image-taking device as claimed in claim 1, it is characterized in that, when this image sensering device is the color image sensing device, this image-taking device also captures one color-positional information from this plane picture rich in detail, and utilize this color-positional information that this monochrome stereo profile image is carried out a color and apply mechanically computing, to obtain a color solid contour images.
7. a view finding method utilizes image-taking device as claimed in claim 1 that this determinand is carried out relative position scanning, it is characterized in that, this view finding method may further comprise the steps:
This microcobjective group is sequentially moved to a plurality of scanning positions;
Receive this first beamlet by this monochrome image sensing apparatus, with to should scanning position and obtain the monochromatic interference image of this determinand one sequence;
Receive this second beamlet by this image sensering device, with to should scanning position and obtain this determinand one sequence without interference image;
Monochromatic interference image to this sequence carries out surface profile reduction computing, to obtain a monochromatic stereo profile image of this determinand;
To the carrying out a sharpness without interference image and focus on computing of this sequence, a plurality of clear part without in the interference image of this sequence is captured, with a synthetic plane picture rich in detail.
8. view finding method as claimed in claim 7, it is characterized in that, when this image sensering device is a color image sensing device, this view finding method also comprises from this plane picture rich in detail and captures one color-positional information, and utilize this color-positional information that this monochrome stereo profile image is carried out a color and apply mechanically computing, to obtain a color solid contour images.
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| CN103376555A (en) * | 2012-04-19 | 2013-10-30 | 致茂电子(苏州)有限公司 | Optical image capture device |
| TWI544213B (en) * | 2014-03-04 | 2016-08-01 | All Ring Tech Co Ltd | Object detection method and device |
| CN114739510B (en) * | 2022-03-02 | 2023-10-17 | 深圳大学 | Compact imaging spectrometer and imaging detection method |
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| CN1991341A (en) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | Interference fringe automatic focus and automatic detection method |
| CN101349540A (en) * | 2007-07-18 | 2009-01-21 | 财团法人工业技术研究院 | Image adjusting method and image capturing device |
| CN101726260A (en) * | 2008-10-13 | 2010-06-09 | 陈亮嘉 | Vibration-resistant interference scanning system and method thereof |
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| JP2507409B2 (en) * | 1987-04-03 | 1996-06-12 | 株式会社三協精機製作所 | Interference fringe generator |
| KR20080032680A (en) * | 2006-10-09 | 2008-04-16 | 선문대학교 산학협력단 | Stereoscopic shape measurement method using optical system and images obtained from the optical system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1991341A (en) * | 2005-12-30 | 2007-07-04 | 财团法人工业技术研究院 | Interference fringe automatic focus and automatic detection method |
| CN101349540A (en) * | 2007-07-18 | 2009-01-21 | 财团法人工业技术研究院 | Image adjusting method and image capturing device |
| CN101726260A (en) * | 2008-10-13 | 2010-06-09 | 陈亮嘉 | Vibration-resistant interference scanning system and method thereof |
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| JP昭63-249004A 1988.10.17 |
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