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CN102301214A - MEMS devices and remote sensing systems utilizing the same - Google Patents

MEMS devices and remote sensing systems utilizing the same Download PDF

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Publication number
CN102301214A
CN102301214A CN2010800063227A CN201080006322A CN102301214A CN 102301214 A CN102301214 A CN 102301214A CN 2010800063227 A CN2010800063227 A CN 2010800063227A CN 201080006322 A CN201080006322 A CN 201080006322A CN 102301214 A CN102301214 A CN 102301214A
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China
Prior art keywords
signal
sensing element
frequency
mems device
resonance
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Pending
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CN2010800063227A
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Chinese (zh)
Inventor
D·W·塞克斯顿
G·P·科斯特
A·J·克诺布洛奇
R·G·布朗
D·W·费尔努伊
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General Electric Co
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General Electric Co
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Priority claimed from US12/360,144 external-priority patent/US20100156629A1/en
Application filed by General Electric Co filed Critical General Electric Co
Publication of CN102301214A publication Critical patent/CN102301214A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G01L9/002—Optical excitation or measuring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K2215/00—Details concerning sensor power supply

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Micromachines (AREA)

Abstract

A remote sensing system comprises a micro-electromechanical sensor (MEMS) device comprising a sensing element, an exciting element to resonate the sensing element at resonant frequency from a remote location by transmitting signals comprising any of acoustic signals, optical signals, radio frequency signals, or magnetic induction signals, and a reader circuitry to read an original frequency of the sensing element from a remote location for determining a condition to which the MEMS device is exposed using signals comprising any of acoustic signals, optical signals, radio frequency signals, or magnetic induction signals.

Description

MEMS device and the remote sensing system that utilizes this MEMS device
Technical field
The present invention relates generally to sensor-based system, and relates more particularly to the remote sensing system that micro-electro-mechanical sensors (MEMS) installed and used this MEMS device.
Background technology
In the important application of MEMS device one is for example measuring aspect the environmental aspect such as pressure and temperature.These environmental aspects that the mechanical property of the sensing element in the MEMS device manages to measure according to them change.Mechanical resonant (mechanical resonance) and this effect that this change in the mechanical property influences this device are used to measure this environmental aspect.A type that is used for the MEMS device of measurement environment situation comprises the sensing element that is integrated with electronic equipment.This sensing element generally is a physical construction, and these electronic equipments had both caused that this sensing element vibrated and be used to measure the vibration frequency of this element.This vibration frequency of this sensing element is used for the measurement environment situation, because use the mechanical stress transducing can make it and these situations proportional.
Electronic equipment and sensing element in such MEMS device are positioned at same place.About the major defect of such MEMS device is that the operating conditions of typically MEMS device is retrained by the operating conditions of electronic equipment.Self can tolerate wideer temperature, pressure limit the sensing element of MEMS device, or other harsh situations, but related electronic equipment causes restriction.Therefore it will be desirable being provided for the MEMS device of temperature, pressure or other measurands in the remote sensing harsh and unforgiving environments and sensor-based system and eliminating the needs that approaching sensor is had an electronic equipment.
Summary of the invention
According to an embodiment disclosed herein, remote sensing system comprises: the micro-electro-mechanical sensors (MEMS) that is made of sensing element installs, make the exciting element of this sensing element by any signal that transmits in acoustical signal, light signal, radiofrequency signal or the magnetic induction signal from remote location with resonance frequency resonance, and the id reader circuit of the frequency of using acoustical signal, light signal, radiofrequency signal or magnetic induction signal to read this sensing element from the remote location equally situation that is used for determining that this MEMS device is exposed.
According to another embodiment disclosed herein, remote sensing method comprises sensing element that the signal that comprises any signal in acoustical signal, light signal, radiofrequency signal or the magnetic induction signal by transmission makes micro-electro-mechanical sensors (MEMS) device from remote location with resonance frequency resonance, and is used for the situation of determining that this MEMS device is exposed from the original frequency that remote location reads this sensing element.Emission comprises that the signal of any signal in acoustical signal, light signal, radiofrequency signal or the magnetic induction signal inquires this MEMS device.Reception and processing response obtain the frequency of this sensing element from the signal of this sensing element reflection in the signal of this emission.
Description of drawings
When reading, these and other features of the present invention, aspect and advantage will become better understood with reference to accompanying drawing (wherein similarly symbol is represented similar parts in whole accompanying drawing) when following detailed description, wherein:
Fig. 1 diagram is according to the embodiment of the MEMS device of aspect disclosed herein.
Fig. 2 diagram is according to another embodiment of the MEMS device of aspect disclosed herein.
Fig. 3 diagram is according to another embodiment of the MEMS device of aspect disclosed herein.
Fig. 4 diagram is according to the block diagram of the remote sensing system of aspect disclosed herein.
Fig. 5 diagram reads the system level block diagram of embodiment according to the sound-driving and induction of the remote sensing system of aspect disclosed herein.
The system level block diagram that Fig. 6 diagram reads embodiment according to the induction driving and the induction of the remote sensing system of aspect disclosed herein.
Fig. 7 diagram drives the system level block diagram of embodiment according to the RF of the remote sensing system of aspect disclosed herein.
Fig. 8 diagram is according to the optical drive of the remote sensing system of aspect disclosed herein and the system level block diagram that light reads embodiment.
Fig. 9 diagram is according to another optical drive of the remote sensing system of aspect disclosed herein and the system level block diagram that light reads embodiment.
Figure 10 diagram reads the system level block diagram of embodiment according to the sound-driving harmony of the remote sensing system of aspect disclosed herein.
Embodiment
Embodiment disclosed herein comprises micro-electro-mechanical sensors (MEMS) device and uses the remote sensing system of MEMS device.This sensor-based system is used to measure the environmental aspect such as for example pressure or temperature etc. that this MEMS device is exposed.This MEMS device is placed on wherein need be about the position of the information of environmental aspect.This sensor-based system comprises that sensing element that exciting element drives this MEMS device reaches the environmental aspect of frequency to determine that this MEMS device is exposed that resonance and reader components are gathered this sensing element.
Fig. 1 illustrates MEMS device 10.This MEMS device 10 is passive sensing apparatus (wherein without any semiconductor junction or batteries), and does not comprise for example solar cell or the sound remover homenergic results structure that limits operating temperature.This MEMS device 10 comprises sensing element 12 and can comprise power capacitor (force capacitor) C1.This sensing element 12 is the mechanical resonant sensing elements with high Q (quality factor).In one embodiment, this sensing element 12 is based on the mechanical resonator of silicon, and it has greater than about 20,000 Q to be used for accurate measurement.This sensing element 12 can be micro electronmechanical mass-spring system, and it has the inertial mass 14 that is coupled in pressure sensitive film 16 via the mechanisms such as tethers 18 of for example serving as spring.The application of force or driving capacitor C1 form between this inertial mass 14 and anchoring base 20.These inertial mass 14 up-down vibration are as being illustrated by arrow.
As shown in figure 2 among another embodiment, MEMS device 10 comprises sensing element 12 and can comprise actuator 22, for example the pectination driving actuator.This sensing element 12 can be micro electronmechanical mass-spring system, the pressure sensitive film 16 that it comprises inertial mass 14 and is coupled in this inertial mass 14 via the mechanisms such as tethers 18 of for example serving as spring.This actuator 22 can have a series of pectinations and refer to 24 and drive this sensing element 12 as electrical capacitor C1.Electric power on this actuator 22 (electric force) be approximately equal to the voltage at these actuator two ends square.This electric power can be used for causing mobile at this actuator 22.Mobile this inertial mass 14 of transferring to of this actuator 22.In one embodiment, this inertial mass 14 is with its laterally (for example, while arrive) vibration of resonance frequency.
Variety of way is used for remotely supplying with sensor energy, supplies with sensor energy such as but not limited to the mechanical vibration of the thermal expansion of using light absorption, use acoustically-driven or by induction, RF driving or direct driving of power capacitor in the mode of electricity.Signal transmission/receiving element can be used to drive the frequency that sensing element reaches resonance and/or reads sensing element.
Under the long-range electric actuation and the situation of reading, MEMS device 10 can further comprise as sensing capacitor shown in Figure 3 (sense capacitor) C2.Signal reception/conveying element 26 is related with MEMS device 10.MEMS device 10 and this signal reception/conveying element 26 be combined to form sensor 28.But this sensing capacitor C2 physical connection also can be shared the common electrical connection to power capacitor C1 and they.As being described in more detail ground about remote sensing system embodiment, sensing element vibrates with resonance frequency.
Fig. 4 illustrates the block diagram of general remote sensing system 50.This remote sensing system 50 comprises MEMS sensor device 10 and its associated interface, and remote inquiry unit 52.This interrogator 52 can comprise exciting element, and it comprises that forwarder 54 comes to transmit signal 56 from remote location and is used to encourage this MEMS device 10.This forwarder 54 can comprise the ultrasonic transducer that transmits ultrasonic signal, transmit the light source of light signal, or the electric forwarder that is used for radio frequency or magnetic induction signal encourages the MEMS sensing element.Under the situation of optical mode, can use the optical fiber (not shown) to transmit signal to sensor and receive the signal that returns from sensor.
Interrogator 52 can further comprise id reader circuit 58, and it transmits the frequency that signal 60 reads the sensing element of MEMS device 10 from remote location.This id reader circuit 58 can comprise the ultrasonic transducer that transmits ultrasonic signal, transmit the light source of light signal, or the electric forwarder that is used for radio frequency or magnetic induction signal is inquired the MEMS sensing element.In response to the signal 60 that transmits, MEMS device 10 sends signal 62 and gets back to this id reader circuit.The signal 62 of this reflection contains the information relevant for the frequency of sensing element vibration.The signal 62 of this reflection can be directly from the sensing element signal of radiation or reflection again.In another embodiment, the signal 62 of this reflection is by the signal that mix to transmit and the signal that produces from the frequency of the kinetic signal of sensing element.The frequency that the signal 62 that this id reader circuit 58 is analyzed this reflection is gathered sensing element.The frequency of sensing element depends on the environmental aspects such as for example pressure and temperature that sensing element exposes.
Fig. 5 illustrates the block diagram of the embodiment 100 of remote sensing system, and wherein exciting element 102 uses acoustical signal to make sensing element resonance and id reader circuit 104 use electromagnetic induction inquiry MEMS device 10.In this embodiment, word " sound " and " ultrasonic " use convertibly because the resonance frequency of MEMS device typically～20kHz to 100kHz, and can think ultrasonicly, but other resonance frequency is possible.
Exciting element 102 can comprise sound/ultrasonic transducers 108 such as base band oscillator 106 and for example piezoelectric transducer.This base band oscillator 106 can have the continuous variable frequency, as in the frequency sweep generator.Acoustical signal 110 is produced by oscillator and is sent to the MEMS device by this transducer.This acoustical signal 110 is in the resonance frequency f near sensing element 12 rBaseband frequency f 0To the frequency-swept of this acoustical signal 108 or make the resonance frequency of the frequency change of this acoustical signal 108 by sensing element 12.As previously described, sensing element 12 for example comprises that inertial mass, presser sensor diaphragm and spring tethers such as are connected at displaceable element.This acoustical signal 110 forms pressure wave, and it causes resonance when the displaceable element vibration is overlapped with the resonance frequency of sensor with the frequency when it in the inertial mass of sensing element 12.
Id reader circuit 104 can be inquired the MEMS device based on for example electromagnetic induction.In this embodiment, can use the electromagnetic interrogation mode of some types, for example with less than the near field magnetic induction of the about frequency of 100MHz etc.Id reader circuit 104 comprises carrier signal generator/forwarder 112, splitter 114, circulator 116, transmission/receiving coil 118 and mixer 120.MEMS device 10 among this embodiment comprises that inductive coil 122 is as signal transmission/receiving element.This forwarder 112 transmits and is in frequency f 2Unmodulated signal 124.This splitter 114 receives this signal f 2And be divided into two independent signals, i.e. first signal 126 and secondary signal 128.This first signal 126 is sent to this transmission/receiving coil by this circulator 116.This transmission/receiving coil 118 transmits this first signal 126 to this inductive coil 122.This inductive coil 122 is wirelessly gathered this signal 126 by magnetic induction from this transmission/receiving coil.This secondary signal 128 will be served as reference signal at receiver 134.Especially, it is used as local oscillator in this mixer 120.
Because sensing capacitor C2 physically is attached to the inertial mass of sensing element, sensing capacitor resonance when sensing element 12 carries out resonance by acoustic drive signal 110 application of forces.Sensing capacitor C2 can be used as the mixing element, its use electric power on sensing capacitor be approximately equal to voltage square principle.The frequency f that is in from id reader circuit 2 First signal 126 strengthen by the Q of electric receiving circuit and mix to provide and be in f with the output frequency of sensing element 12 2The f of+/- 0Modulated output signal 130.When the frequency sweep frequency f 0With mechanical resonant frequency f rThe value of these modulation signals is maximum during coincidence.
Transmission/receiving coil 118 receives reradiative output signal 130 from sensor 28, and be in f As mentioned above its current comprising 2The f of+/- 0 Component.Output signal 130 is sent to the RF input of mixer 120 then by circulator 116.Offering local oscillator ports and output signal 132 as previously mentioned from the secondary signal 128 of splitter 114 obtains from the IF port of mixer 120.This signal 132 can (for example pass through to work as baseband frequency f at the original frequency that receiver 134 is analyzed to determine sensing element then 0Frequency sweep is by the resonance f of sensor rThe time seek amplitude maximum or phase shift).Receiver 132 and frequency sweep generator source 106 can integratedly enter individual unit.This functional in the standard electronic network analyser, find similar, but the available dedicated signal processor is finished low-cost the realization.The frequency of determining at receiver is used for the environmental aspect that definite MEMS device exposes.
There are many other spendable interrogator embodiment or frameworks.In a method, the use of the Direct Digitalization of received signal and digital signal processing can be used for determining sensor resonant frequency.In another method, frequency " comb " can replace using Sweep Source to be used for excitation resonator simultaneously.In another method, adaptive algorithm can be used for based on sensor to the response of given excitation frequency and " search " resonance frequency.In addition, determine resonance frequency (different) time response " ring " that can analyze resonator with its frequency response.
In another system embodiment (not shown) again, frequency sweep base band oscillator 106 can be excluded together.By output (IF) signal 132 from mixer being applied suitable gain and phase shift and feedback gained signal, can make total system become oscillator with driving sound/ultrasonic transducer 108.In this case, there is no need " search " resonance frequency.The high Q character of system means that concussion will be only takes place in the resonance frequency of sensor.It guarantees that also system can initiatively shake, and only strengthens from noise.In this embodiment, signal can intercept and send to the frequency that low-cost electronic counting system determines sensing element anywhere.This frequency is used for determining the environmental aspect of MEMS device exposure then.
Fig. 6 illustrates wherein exciting element 202 and id reader circuit 204 boths based on the embodiment of the remote sensing system 200 of electromagnetic induction.Can use the electromagnetic interrogation mode of some types, for example with less than the near field magnetic induction of the about frequency of 100MHz or with greater than the high-frequency RF/microwave electromagnetic excitation of the about frequency of 100MHz etc.Exciting element 202 among this embodiment adopts with less than the approximately near field magnetic induction of the frequency of 100MHz.Exciting element 292 comprises base band oscillator 206, carrier signal generator/forwarder 208 and drive coil 210.This base band oscillator produces and is in frequency f 0Signal 212, and can be near the resonance frequency of the sensing element of MEMS device this frequency of frequency sweep.This carrier signal generator/forwarder 208 produces and is in frequency f 1Signal, it is by being in f 0Baseband signal modulation have as frequency f with generation 0And f 1And with the signal 214 of new frequency of difference.Sensor 28 in this embodiment comprises that the first inductive coil L1 is as signal receiving element.Drive coil 210 wirelessly transmits modulation signal 214 to this first inductive coil L1.As example, f 0Be to be in～frequency sweep generator and the f of 30kHz 1～10MHz, but other combination is possible.
The first inductive coil L1 is connected to power capacitor C1, and it serves as sensor actuator.This forms high Q electricity LC " groove " resonant circuit, the voltage at maximization actuator two ends, and therefore maximize electric power.Utilize this circuit, electric Q value＞10th, possible.Electric power be used for the MEMS device directly infiltrate (mix-down) modulation electrical drive signal produce baseband signal f 0With driving actuator.When the frequency sweep frequency f 0When overlapping with mechanical resonant frequency, sensing element reaches resonance.In certain embodiments, sensor construction can comprise optimize to drive and cell winding between the device that shifts of induced power, for example use of Ferrite Material etc.In other embodiments, low-loss loop construction and manufacturing technology are used to optimize electric Q.
Id reader circuit 204 comprises second carrier signal generator/forwarder 216, splitter 218, circulator 220, the second transmission/receiving coil 222 and mixer 224.This circuit is with identical than what describe in sound/induction mode.The MEMS sensor comprises that further the second inductive coil L2 is as another signal transmission/receiving element.This forwarder 216 transmits and is in frequency f 2Unmodulated signal 226.In one embodiment, exciting element uses different carrier frequencies with id reader circuit.For example, exciting element can use f 1～10MHz and id reader circuit can be used f 2～15MHz.Having two different frequencies makes first and second inductive coils of MEMS device can have different sizes and can be so that the device layout.
Splitter 218 receives and is in frequency f 2Signal and it is divided into two independent signals, i.e. first signal 228 and secondary signal 230.This first signal 228 is sent to transmission/receiving coil 222 by circulator 220.Transmission/receiving coil 222 transmits this first signal 228 to the second inductive coil L2 at sensor 28.This inductive coil L2 wirelessly gathers this signal 228 by magnetic induction from transmission/receiving coil 222.This secondary signal 230 will be served as reference signal at receiver.Especially, it is used as local oscillator in mixer 224.
Because sensing capacitor C2 also physically is attached to the inertial mass of sensing element, when sensing element carries out resonance by the drive signal application of force that forms at first tank circuit that comprises L1 and C1, sensing capacitor resonance.Be in frequency f 2 First signal 228 strengthen by the Q of the electric receiving circuit that comprises L2 and C2 and be in f 0The output frequency of sensing element mix and to be in f to provide 2The f of+/- 0Modulated output signal 232.Sensing capacitor C2 is also as the mixing element, its use electric power on sensing capacitor be approximately equal to voltage square principle.When the frequency sweep frequency f 0With mechanical resonant frequency f rThe value of these modulation signals 232 is maximum during coincidence.
Transmission/receiving coil 222 receives reradiative output signal 232 from sensor tank circuit L2 and C2, and be in f As mentioned above current comprising 2The f of+/- 0 Component.Output signal 232 is sent to the RF input of mixer 224 then by circulator 220.Offering local oscillator ports and output signal 234 as previously mentioned from the secondary signal 230 of splitter 218 obtains from the IF port of mixer 224.This signal 234 can (for example pass through as baseband frequency f at the original frequency that receiver 236 is analyzed to determine sensing element then 0Inswept sensor be in f rResonance the time seek amplitude maximum or phase shift).Receiver 236 and frequency sweep generator source 206 can integratedly enter individual unit.This functional in the standard electronic network analyser, find similar, but the available dedicated signal processor is finished low-cost the realization.The frequency of determining at receiver is used for the environmental aspect that definite MEMS device exposes.
Even in this embodiment, can use many other interrogator frameworks.In a method, the use of the Direct Digitalization of received signal and digital signal processing can be used for determining sensor resonant frequency.In another method, frequency " comb " can replace using Sweep Source to be used for excitation resonator simultaneously.In another method, adaptive algorithm can be used for based on sensor to the response of given excitation frequency and " search " resonance frequency.In addition, as with it frequency response differently, determine resonance frequency the time response " ring " that can analyze resonator.In another method again, two unmodulating carrier signals can send to sensor, and the frequency that they are set makes the mechanical resonant frequency of difference near sensor.This frequency downconversion (down-conversion) can take place in the high Q tank circuit of sensor.The gained motion of sensor will cause new sideband on carrier wave, it can detect back at interrogator.
In another system-level realization (not shown), frequency sweep base band oscillator 206 can be excluded together.By output (IF) signal from mixer being applied suitable gain and phase shift and feedback gained signal to being in f 1The modulation of first carrier frequency, can make total system become oscillator.In this case, there is no need " search " resonance frequency.The high Q character of system means that concussion will be only takes place in the resonance frequency of sensor.It guarantees that also system can initiatively shake, and only strengthens from noise.In this embodiment, signal can intercept and send to the frequency that low-cost electronic counting system determines sensing element anywhere.This frequency is used for determining the environmental aspect of MEMS device exposure then.
As another embodiment 300 shown in Figure 7 in, exciting element adopts to encourage the sensing element 12 of MEMS device greater than the about high-frequency RF/microwave electromagnetic of the frequency of 100MHz.Exciting element among this embodiment comprises and is in f 1(it is with baseband frequency f in the RF source 0Modulation is to produce modulation signal 306) and antenna 308 transmit this modulation signal 306 to sensor 28.
There are two possible modes to drive the MEMS sensor with this modulated RF signal 306.In first mode, " directly " of carrying out device drives, and the power that need carry reception efficiently at the receiving antenna 310 and the impedance matching circuit 312 at sensor 28 places is to MEMS device 10.The power of modulation mixes so that the base band drive signal to be provided by the square law relation of the power-voltage of device electric capacity.
In second mode, MEMS device 10 comprises that reception is with f 1For the antenna 310 of the signal at center, carry this power to infiltrate modulation signal for the impedance matching circuit 312 of nonlinear element and for example schottky diode 314 etc. to be in f with formation 0The nonlinear element of baseband signal.Baseband signal flows to actuator component then and drives sensing element 12 and reach resonance.
RF reads can be by with being in frequency f 2Second unmodulated signal inquiry movable sensor carry out.This frequency can be chosen as near a RF carrier frequency f 1But do not overlap, make it in the bandwidth of driving and receiving antenna.Like this, the antenna 308 and 310 at interrogator and device can be used for driving and receiving.Movable sensor will be modulated second frequency f 2Backreflection or backward scattering, form and to be in f 2The f of+/- 0Signal 316.The backward scattering of this modulation can be used and be in f 2The copy of secondary signal use synchronous detection to detect as local oscillator at interrogator 302.
Can consider that many other RF realize, and in these some are encompassed in the GB application No.0823088 that submitted on Dec 19th, 2008, this application is combination in full by reference thus.
Fig. 8 illustrates the embodiment of remote sensing system 400, and wherein exciting element for example uses that first light signal such as infrared signal makes sensing element resonance, and id reader circuit uses second light signal to determine the frequency of MEMS device.Exciting element comprises that for example first light sources 402 such as LED, laser instrument or superbright degree LED produce light signal 404.In one embodiment, infrared signal is as light signal.Can also use other light signals of various wavelength, for example visible wavelength etc.In this embodiment, two independent optical fiber is used for driving and pickup then, and it provides spatial discrimination.This allows same light wavelength to be used for two of these functions and the threat of not crosstalking or disturbing.
Exciting light signal 404 is sent to MEMS device 10 via first optical fiber 406 that can be single mode fibre or multimode fibre.This signal 404 can be with frequency f 0Modulation, its can be near sensor resonant frequency frequency sweep.The actuating of sensing element 12 is the absorptions via modulated light signal 404.MEMS device 10 can comprise the parts that are used to optimize this absorption, strengthens absorption or thin metal absorption layer etc. such as but not limited to direct material absorption, dopant material layer.As discussing with reference to Fig. 1 before, actuator can be the inertial mass of sensing element 12.This absorbs and produces heat, and it causes moving of actuator by dynamic thermal expansion.If modulating frequency f 0With mechanical resonant frequency f rOverlap, this causes resonance in sensing element 12.
Id reader circuit comprises secondary light source 408, optical splitter 410 and photodiode detector 412.This secondary light source 408 can be that LED, laser instrument or superbright degree LED produce reader light signal 414.In this case, reader light signal 414 does not have modulated.Reader light signal 414 is sent to MEMS device 10 by second optical fiber 416 (preferably multimode optical fiber).Reader light signal 414 enters MEMS device 10 and from sensing element 12 reflection, driving light signal 404 application of forces of these sensing element 12 origin autoexcitation elements and carry out resonance.The light signal 418 of this reflection returns through this optical splitter 410 and reaches photodiode detector 412.The signal 420 that detects is analyzed to determine the original frequency of sensing element 12 at receiver 422 then.This original frequency of sensing element 12 mechanical resonant with sensing element 12 then is relevant to determine the environmental aspect of MEMS device exposure.
Can comprise that some options come the enhanced system performance, comprise and use isolation source and optoisolator 424, light filter and the single mode of backreflection and the various combinations of multimode fibre.Receiver 422 can be integrated with the frequency sweep generator source, and it is used to drive first light source 402.
Fig. 9 diagram makes among another embodiment of remote sensing system 500 photographically, and wherein only single fiber is used to be connected to the MEMS device.In this case, need two different source wavelengths to guarantee not crosstalk or disturb for inquiry with reading.
The modulating driver light signal 502 that is produced by first light source 504 transmits by first optical fiber 506.Id reader circuit comprises secondary light source 508, optical splitter 510 and photodiode detector 512.The reader light signal 514 that is produced by secondary light source 508 is sent to this splitter 510 by second optical fiber 516.This reader light signal 514 of this driver light signal 502 on this first optical fiber 506 and output place of this splitter 510 on second optical fiber 516 is combined in wavelength division multiplexer 518 on the common fiber 520, and common fiber 520 is connected to MEMS device 10.This final stage of fiber 520 most preferably is a multimode fibre.
Be used to drive with the mechanism of reading with describe before identical, different is that the reflecting part 522 of reading light signal separates with the reflecting part (not shown) that drives light signal in wavelength division multiplexer 518.This reflected signal 522 sends it back splitter 510 to photodiode detector 512, analyzes the resonance frequency that this reflected signal is determined sensing element 12 in photodiode detector 512.The signal 526 that detects is analyzed to determine the original frequency of sensing element 12 at receiver 528 then.This original frequency of sensing element 12 mechanical resonant with sensing element 12 then is relevant to determine the environmental aspect of MEMS device exposure.In this case, photodiode detector 512 comprises that further optical band pass filter 524 guarantees that the minimum that is driven wavelength of optical signal pollutes.Equally, optoisolator 530 can be used for any source and backreflection are isolated.
In another system-level realization (it can use in geminal fibers or ultimate fibre query mode), getting rid of this modulation of frequency sweep is possible with the needs of acquisition sensor resonance frequency.In this case, the output of sense photodiode be exaggerated, phase shift and directly feed back to the modulation input of drive laser then.Utilize enough gains, total system will be shaken once more, allow the automatic detection of resonance frequency.This to describe before machine-processed similar, and the intercepting Anywhere that this signal can be in loop once more here and send to the low-cost electronic equipment of counting and determine resonance frequency.
Among another embodiment 600 shown in Figure 10, exciting element and id reader circuit both use ultrasonic signal.Exciting element 602 can comprise that for example ultrasonic transducer such as piezoelectric speaker or tweeter transmits acoustical signal 604.The frequency of this acoustical signal of frequency sweep is to cause resonance in the sensing element 12 of MEMS device 10.As previously described, sensing element 12 for example comprises that inertial mass, presser sensor diaphragm and the tethers that serves as spring such as are connected at displaceable element.This acoustical signal 110 forms pressure wave, and it makes the displaceable element vibration to cause resonance in the inertial mass of sensing element 12.
Id reader circuit 606 comprises that second ultrasonic transducer that serves as the microphone acoustic pickup inquires MEMS device 10.The ultrasonic signal 608 of inquiry usefulness is determined from these reflections 608 from the original frequency of sensing element 12 reflections and sensing element 12.MEMS device 10 among this embodiment does not need to have any electronic circuit.Device 10 can comprise and be used for strengthening that ultrasonic signal enters sensor and the reflection of coming out from sensor and the feature of transmission that it comprises acoustic impedance matching layer harmony waveguiding structure.
Should notice that " driving " and " reception " circuit in each among the embodiment above can mix and mate to be used for special application.For example, optical drive can read combination with RF, or sound-drivingly can read combination with light.Many other combinations are possible.This therein environmental facies be partial under some situation of an embodiment favourable than another embodiment.In addition, each in these methods can drive or read and combine to form hybrid wireless/wired resonant transducer with direct wired electricity.This expect therein to drive and read electricity between the circuit isolate in case for example reduce noise or the situation of crosstalking under can be favourable.
Thereby the remote sensing system of above-described use MEMS device provides the frequency of remotely stimulating MEMS device and remote collection sensing element to measure the mode of the environmental aspect of sensing element exposure.MEMS device and sensor-based system are realized the remote sensing of pressure, temperature or other measurands in the harsh and unforgiving environments, get rid of the needs to line, battery, active electronic equipment and physics proximity transducer simultaneously.Not having active electronic equipment to make the MEMS device be fit to high temperature and high pressure uses.Remote sensing system has the application in severe temperature, pressure, chemistry and noise circumstance.
Be appreciated that not necessarily above-described all such purposes or advantage can realize according to any specific embodiment.Thereby, for example those skilled in that art will recognize that system described herein and technology can adopt the mode that realizes or optimize an advantage or one group of advantage to embody or carry out as this paper lectures, and must not realize other purposes or advantage as lecturing in this article or propose.
Although this paper only illustrates and describe some feature of the present invention, those skilled in that art will expect many modifications and change.Therefore, be appreciated that the claim regulation of enclosing covers all such modification and changes, they fall in the true spirit of the present invention.

Claims (24)

1. remote sensing system, it comprises:
Micro-electro-mechanical sensors (MEMS) device that comprises sensing element;
Exciting element, its signal that comprises any signal in acoustical signal, light signal, radiofrequency signal or the magnetic induction signal by transmission makes described sensing element with resonance frequency resonance from remote location; And
Id reader circuit, its use comprise that the signal of any signal in acoustical signal, light signal, radiofrequency signal or the magnetic induction signal reads the situation of original frequency to be used for determining that described MEMS device exposes of described sensing element from remote location.
2. the system as claimed in claim 1, wherein said id reader circuit are launched described signal and are inquired described MEMS device and reception and handle the frequency of gathering described sensing element from the signal of described MEMS device reflection.
3. system as claimed in claim 2 wherein comprises from the reradiative signal of described sensing element or by mixing the signal that transmitted by described id reader circuit and from the signal that frequency produced of the kinetic signal of described sensing element from the signal of described MEMS device reflection.
4. system as claimed in claim 2, wherein said id reader circuit is configured to drive described exciting element.
5. system as claimed in claim 4 is wherein by applying gain to described reflected signal and make described system become oscillator with in-migration mutually analyzing before the signal of described MEMS device reflection.
6. system as claimed in claim 5 wherein makes concussion take place at the resonance frequency place of described sensing element, eliminates the needs of signal of being used to of being transmitted by described exciting element being searched for the resonance frequency of described sensing element thus.
7. system as claimed in claim 2 wherein can have identical or different frequency by the signal of described id reader circuit transmission and the signal that is transmitted by described exciting element.
8. the system as claimed in claim 1, wherein said sensing element comprises the mechanical resonant sensing element.
9. system as claimed in claim 8, wherein said sensing element comprises micro electronmechanical (MEMS) mass-spring system.
10. the system as claimed in claim 1, wherein said MEMS device further comprises mixing element and signal transmission/receiving element.
11. the system as claimed in claim 1, wherein frequency sweep or the signal that is transmitted by described exciting element is changed to be used to search for the resonance frequency of described sensing element.
12. the system as claimed in claim 1, wherein said MEMS device further comprises at least one capacitor and/or actuator.
13. the system as claimed in claim 1 further comprises the signal controlling element, as splitter, mixer, circulator, isolator or its combination.
14. the system as claimed in claim 1, wherein said situation comprises pressure or temperature.
15. a remote sensing method, it comprises:
The signal that comprises any signal in acoustical signal, light signal, radiofrequency signal or the magnetic induction signal by transmission makes the sensing element of micro-electro-mechanical sensors (MEMS) device with resonance frequency resonance from remote location; And
Read the situation of original frequency to be used for determining that described MEMS device exposes of described sensing element from remote location, it comprises:
Emission comprises that the signal of any signal in acoustical signal, light signal, radiofrequency signal or the magnetic induction signal inquires described MEMS device; And
Reception in response to the signal of described emission from the signal of described sensing element reflection and handle the original frequency that described reflected signal obtains described sensing element.
16. method as claimed in claim 15 further comprises: by mix emission be used to read described sensing element original frequency signal and produce described reflected signal from the frequency of the kinetic signal of described sensing element.
17. method as claimed in claim 15 further comprises: before handling described reflected signal, described reflected signal is applied gain and phase shift.
18. method as claimed in claim 15, wherein the usefulness of Chuan Songing is so that the signal in order to the original frequency that reads described sensing element of the signal of described sensing element resonance and emission can have identical or different frequency.
19. method as claimed in claim 15, wherein said sensing element comprises the mechanical resonant sensing element.
20. system as claimed in claim 19, wherein said sensing element comprises micro electronmechanical (MEMS) mass-spring system.
21. method as claimed in claim 15, wherein frequency sweep or make transmission usefulness so that the signal of described sensing element resonance change to be used to search for the resonance frequency of described sensing element.
22. method as claimed in claim 15, wherein said MEMS device further comprises at least one capacitor and/or actuator.
23. method as claimed in claim 15 further comprises: use to comprise that the signal controlling element of splitter, mixer, circulator, isolator or its combination controls described signal.
24. method as claimed in claim 15, wherein said situation comprises pressure or temperature.
CN2010800063227A 2009-01-27 2010-01-06 MEMS devices and remote sensing systems utilizing the same Pending CN102301214A (en)

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