CN102287851A - Ignition method of furnace tube - Google Patents
Ignition method of furnace tube Download PDFInfo
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- CN102287851A CN102287851A CN2011101962109A CN201110196210A CN102287851A CN 102287851 A CN102287851 A CN 102287851A CN 2011101962109 A CN2011101962109 A CN 2011101962109A CN 201110196210 A CN201110196210 A CN 201110196210A CN 102287851 A CN102287851 A CN 102287851A
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- ignition
- boiler tube
- oxygen
- igniting
- hydrogen
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- 238000000034 method Methods 0.000 title claims abstract description 44
- 239000001301 oxygen Substances 0.000 claims abstract description 31
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 31
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 30
- 239000001257 hydrogen Substances 0.000 claims abstract description 21
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 15
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical group ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 7
- 150000002431 hydrogen Chemical class 0.000 claims description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000002474 experimental method Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 5
- 238000013401 experimental design Methods 0.000 description 2
- 230000005622 photoelectricity Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 238000010205 computational analysis Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
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Abstract
The invention provides an ignition method of a furnace tube. During ignition, the matching ratio of hydrogen to oxygen which are introduced into an ignition cavity of the furnace tube is 1:2.5-1:2.7. By the method, the failure rate of ignition is reduced, and the stability and the reliability of mass production are improved.
Description
Technical field
The present invention relates to technical field of semiconductors, relate in particular to a kind of boiler tube ignition method.
Background technology
In wet oxygen technology, particularly form in the process of gate oxide, very high to the lighting up procedure requirement of boiler tube.If loss of ignition can cause process disruption, can the entire block in the boiler tube be impacted, even may cause scrapping of large-tonnage product, yield, production capacity and cost are caused have a strong impact on.
In the prior art, be example with ASM400 type normal pressure boiler tube, the hydrogen (H that is adopted in its ignition process usually
2) and oxygen (O
2) proportioning be 1: 1.But through statistics, adopt this ignition process batch mixing proportioning in production application, its loss of ignition rate is up to being about 2%.Higher loss of ignition rate often causes in the boiler tube product wafer loss in batch, has had a strong impact on production efficiency, has increased production cost.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of boiler tube ignition method, to reduce the loss of ignition rate.
For solving the problems of the technologies described above, the invention provides a kind of boiler tube ignition method, the hydrogen of the igniting cavity of feeding boiler tube and the ratio range of oxygen are 1: 2.5 to 1: 2.7 in the ignition process.
Alternatively, described boiler tube is an ASM400 type normal pressure boiler tube.
Alternatively, also in described igniting cavity, feed dichloroethylene in the ignition process.
Alternatively, the gas mixing ratio of the described igniting cavity of feeding is in the ignition process: hydrogen 26%～28%, oxygen 66%～68, dichloroethylene 4%～6%.
Alternatively, the pressure in the cavity of igniting described in the ignition process is 700 to 800 millimetress of mercury.
Alternatively, the flow 0.8 of hydrogen that feeds described igniting cavity in the ignition process is to 1.2SLM, and the flow of oxygen is 2.5 to 3SLM, and the flow of dichloroethylene is 0.0001 to 0.001SLM.
Alternatively, igniting is aerating oxygen in described igniting cavity before, makes described igniting cavity be full of oxygen.
Compared with prior art, the present invention has the following advantages:
In the boiler tube ignition method of the embodiment of the invention, the hydrogen of the igniting cavity of feeding boiler tube and the ratio range of oxygen are 1: 2.5 to 1: 2.7 in the ignition process, use this proportioning can improve ignition success rate effectively, the loss that reduces or avoid loss of ignition to cause.
Further, the embodiment of the invention is optimized the ignition condition of ASM400 type normal pressure boiler tube, the gas mixing ratio of igniting cavity is in the ignition process: hydrogen 26%～28%, oxygen 66%～68, dichloroethylene 4%～6% is about 0 thereby the ignition success rate of ASM400 type normal pressure boiler tube dropped to.
Description of drawings
Fig. 1 be in the boiler tube ignition method of the embodiment of the invention corresponding to various gas mixing ratio, the isogram of flame photoelectricity three looks, the length of flame and flame color.
The specific embodiment
The igniting batch mixing proportioning of ASM400 type normal pressure boiler tube generally is that the proportioning of hydrogen and oxygen is 1: 2 in the prior art, but higher relatively at the mortality of this proportioning down-firing, can cause bigger loss in industrial production in batches.
In the boiler tube ignition method of the embodiment of the invention, the hydrogen of the igniting cavity of feeding boiler tube and the ratio range of oxygen are 1: 2.5 to 1: 2.7 in the ignition process, use this proportioning can improve ignition success rate effectively, the loss that reduces or avoid loss of ignition to cause.
Further, the embodiment of the invention is optimized the ignition condition of ASM400 type normal pressure boiler tube, the gas mixing ratio of igniting cavity is in the ignition process: hydrogen 26%～28%, oxygen 66%～68, dichloroethylene 4%～6% is about 0 thereby the ignition success rate of ASM400 type normal pressure boiler tube dropped to.
The invention will be further described below in conjunction with specific embodiments and the drawings, but should not limit protection scope of the present invention with this.
Reliable and stable boiler tube igniting needs following condition: a) security, and guaranteeing can be not risky in the hydrogen-oxygen ignition process; B) reliability guarantees to reach smoothly at the appointed time requirement, lights a fire successfully; C) applicability guarantees to be applied in reliably and produces on the board.
In the present embodiment, in the boiler tube ignition process, the hydrogen of the igniting cavity of feeding boiler tube and the ratio range of oxygen are 1: 2.5 to 1: 2.7, use this proportioning can improve ignition success rate significantly.In addition, before igniting, at first aerating oxygen in the igniting cavity of boiler tube promptly uses oxygen to purify (purge) igniting cavity, makes it be full of oxygen; Afterwards again according to the proportioning of 1: 2.5 to 1: 2.7 hydrogen and oxygen, hydrogen and oxygen are fed the igniting cavity light a fire.In addition, can also feed dichloroethylene (DCE) gas in ignition process, DCE can play combustion-supporting effect after igniting.
In the present embodiment, employed boiler tube is specially ASM400 type normal pressure boiler tube, and the proportioning of hydrogen and oxygen is 1: 2.5 to 1: 2.7 in its ignition process.More specifically, also feed DCE in the ignition process, its proportioning is a hydrogen 26%～28%, oxygen 66%～68, and dichloroethylene 4%～6% need to prove, proportioning herein refers to volume ratio.In the ignition process, the pressure of igniting in the cavity is 700 to 800 millimetress of mercury, and the flow of hydrogen is 0.8 to 1.2SLM, and the flow of oxygen is 2.5 to 3SLM, and the flow of dichloroethylene was 0.0001 to 0.001SLM (being about 0).Adopt above proportioning, can reduce the loss of ignition rate, thereby the stable of semiconductor technology such as assurance wet oxygen technology carry out.
In order to verify the validity of above proportioning, the inventor has carried out corresponding experimental design (DOE), and operational analysis software Minitab comes the proportioning of ignition process is analyzed, and below detailed process is described.
At first set the experimental design scope of corresponding gas, as shown in the table:
Set basic interlocking condition afterwards, as O
2%＞2H
2%, promptly the percentage composition of oxygen makes experiment condition rationally effective greater than 2 times of the hydrogen percentage composition, and draws corresponding experiment condition by the Minitab software analysis, and is as shown in the table:
| H2 | O2 | DCE |
| 33.00％ | 57.00％ | 10.00％ |
| 60.00％ | 30.00％ | 10.00％ |
| 61.67％ | 30.83％ | 7.50％ |
| 34.67％ | 60.33％ | 5.00％ |
| 48.58％ | 45.17％ | 6.25％ |
| 46.92％ | 44.33％ | 8.75％ |
| 33.83％ | 58.67％ | 7.50％ |
| 6.00％ | 86.50％ | 7.50％ |
| 19.92％ | 73.83％ | 6.25％ |
| 63.33％ | 31.67％ | 5.00％ |
| 19.92％ | 71.33％ | 8.75％ |
| 6.00％ | 89.00％ | 5.00％ |
| 6.00％ | 84.00％ | 10.00％ |
Be proportioning in the last table, use the proportioning that goes up in the table to quantize experiment below by the resulting experiment condition of Minitab computational analysis.In the experimentation, use the flame detecting sensor be installed in ASM400 type normal pressure boiler tube to detect flame parameters in the igniting cavity.In the present embodiment, the flame parameters that quantizes comprises: flame photoelectricity three look (flame, be designated as Y1), the length of flame (flame range is designated as Y2) and flame color (flame color is designated as Y3), above-mentioned three parameters detect the factor as experimental result, for the ease of analyzing and calculating, in above-mentioned three parameters, Y1 is quantified as 0～1, Y2 is quantified as 0～2, and Y3 is quantified as 0～2.
Afterwards, according to the detection that experimentizes of above resulting experiment condition, and calculate corresponding experiment result and detect the factor.True and reliable in order to ensure experimental result, every group of experiment carried out 10 times in the present embodiment, and final result is as shown in the table:
At each assembly ratio, last table record the corresponding experiment result that draws of experiment detect the factor.
Afterwards, continue to use Minitab that the result of last table is analyzed, the tolerance interval of experimental result is defined, wherein, the desired value of Y1 is 1.0, and the desired value of Y2 is 1.0, the desired value of Y3 is 1.0, thereby finds out the isopleth that experimental result detects the factor, as shown in Figure 1, wherein, shadow region 10 is most preferred ratio ranges, is specially hydrogen 26%～28%, oxygen 66%～68, dichloroethylene 4%～6%, promptly in the present embodiment before described preferable range.
In order further to verify the validity of said ratio scope, the inventor has also carried out actual batch process data statistics, by adopting above proportioning, in the large-scale production of long duration (above 2 years), the loss of ignition rate of employed ASM400 type normal pressure boiler tube has dropped to 0, has greatly improved the reliability of producing.
Though the present invention with preferred embodiment openly as above; but it is not to be used for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can make possible change and modification, so protection scope of the present invention should be as the criterion with the scope that claim of the present invention was defined.
Claims (7)
1. a boiler tube ignition method is characterized in that, the hydrogen of the igniting cavity of feeding boiler tube and the ratio range of oxygen are 1: 2.5 to 1: 2.7 in the ignition process.
2. boiler tube ignition method according to claim 1 is characterized in that, described boiler tube is an ASM400 type normal pressure boiler tube.
3. boiler tube ignition method according to claim 2 is characterized in that, also feeds dichloroethylene in described igniting cavity in the ignition process.
4. boiler tube ignition method according to claim 3 is characterized in that, the gas mixing ratio that feeds described igniting cavity in the ignition process is: hydrogen 26%～28%, oxygen 66%～68, dichloroethylene 4%～6%.
5. boiler tube ignition method according to claim 3 is characterized in that, the pressure in the cavity of igniting described in the ignition process is 700 to 800 millimetress of mercury.
6. boiler tube ignition method according to claim 3 is characterized in that, the flow that feeds the hydrogen of described igniting cavity in the ignition process is 0.8 to 1.2SLM, and the flow of oxygen is 2.5 to 3SLM, and the flow of dichloroethylene is 0.0001 to 0.001SLM.
7. boiler tube ignition method according to claim 1 is characterized in that, igniting is aerating oxygen in described igniting cavity before, makes described igniting cavity be full of oxygen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101962109A CN102287851A (en) | 2011-07-13 | 2011-07-13 | Ignition method of furnace tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101962109A CN102287851A (en) | 2011-07-13 | 2011-07-13 | Ignition method of furnace tube |
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|---|---|
| CN102287851A true CN102287851A (en) | 2011-12-21 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101962109A Pending CN102287851A (en) | 2011-07-13 | 2011-07-13 | Ignition method of furnace tube |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108822897A (en) * | 2018-06-01 | 2018-11-16 | 山东明泉新材料科技有限公司 | Start-up burner control method capable of improving ignition success rate and achieving on-line start/stop |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW444302B (en) * | 1999-11-25 | 2001-07-01 | Asm Int | Method and apparatus for forming an oxide layer on wafers manufactured from semiconducting material |
| US6334962B1 (en) * | 1997-12-10 | 2002-01-01 | Fujikin Incorporated | Low flow rate moisture supply process |
| JP2002313787A (en) * | 2001-04-13 | 2002-10-25 | Tokyo Electron Ltd | Method for cleaning quartz product in heat treatment system and heat treatment method |
| CN1516235A (en) * | 1999-08-06 | 2004-07-28 | ��ʽ���縻ʿ�� | Water content generation supply device and reaction stove for water content generation |
-
2011
- 2011-07-13 CN CN2011101962109A patent/CN102287851A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6334962B1 (en) * | 1997-12-10 | 2002-01-01 | Fujikin Incorporated | Low flow rate moisture supply process |
| CN1516235A (en) * | 1999-08-06 | 2004-07-28 | ��ʽ���縻ʿ�� | Water content generation supply device and reaction stove for water content generation |
| TW444302B (en) * | 1999-11-25 | 2001-07-01 | Asm Int | Method and apparatus for forming an oxide layer on wafers manufactured from semiconducting material |
| JP2002313787A (en) * | 2001-04-13 | 2002-10-25 | Tokyo Electron Ltd | Method for cleaning quartz product in heat treatment system and heat treatment method |
Non-Patent Citations (2)
| Title |
|---|
| 徐宁 王嵩宇 蔡震: "氢氧合成点火系统的研究与分析", 《第九届全国半导体材料、微波器件学术会议暨第九届全国固体薄膜学术会议》 * |
| 房振华 桑莉莎: "两步三氯乙烯薄栅氧化工艺", 《微电子学》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108822897A (en) * | 2018-06-01 | 2018-11-16 | 山东明泉新材料科技有限公司 | Start-up burner control method capable of improving ignition success rate and achieving on-line start/stop |
| CN108822897B (en) * | 2018-06-01 | 2020-05-26 | 山东明泉新材料科技有限公司 | Start-up burner control method capable of improving ignition success rate and achieving on-line start/stop |
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Application publication date: 20111221 |