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CN102279057A - Pressure type fluid temperature sensor - Google Patents

Pressure type fluid temperature sensor Download PDF

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Publication number
CN102279057A
CN102279057A CN2011101995009A CN201110199500A CN102279057A CN 102279057 A CN102279057 A CN 102279057A CN 2011101995009 A CN2011101995009 A CN 2011101995009A CN 201110199500 A CN201110199500 A CN 201110199500A CN 102279057 A CN102279057 A CN 102279057A
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fluid
temperature
pressure
sensor
temperature sensor
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陈向东
林其斌
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Southwest Jiaotong University
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Southwest Jiaotong University
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Abstract

本发明公开了一种压力式流体温度传感器,其组成是:密封的内装感温流体的刚性温包(1)、刚性温包(1)经连接导管(11)与能输出电信号的流体压力传感器(3)的感压腔(5)连通。该种流体温度传感器抗电磁干扰,适于易燃易爆流体的测量;且能输出电信号、可与计算机或网络连接,实现远程监控。

Figure 201110199500

The invention discloses a pressure type fluid temperature sensor, which is composed of: a sealed rigid temperature bulb (1) containing a temperature-sensitive fluid inside, the rigid temperature bulb (1) and a fluid pressure sensor capable of outputting electrical signals via a connecting conduit (11). The pressure-sensing cavity (5) of the sensor (3) is connected. The fluid temperature sensor is resistant to electromagnetic interference and is suitable for the measurement of flammable and explosive fluids; it can output electrical signals and can be connected with a computer or network to realize remote monitoring.

Figure 201110199500

Description

一种压力式流体温度传感器A pressure type fluid temperature sensor

技术领域 technical field

本发明涉及一种压力式流体温度传感器。The invention relates to a pressure type fluid temperature sensor.

背景技术 Background technique

流体温度的测量最简单的方法是用水银温度计测量。但其无法输出电信号,不能自动采集数据,也不能与计算机或网络连接,实现远程监控。采用热电偶和铂电阻测量流体温度虽能输出电信号、自动采集数据;但由于探头本身带电,对易燃易爆流体存在安全隐患,同时探头也易受环境电磁干扰,影响测量结果的准确性.。The easiest way to measure fluid temperature is with a mercury thermometer. However, it cannot output electrical signals, cannot automatically collect data, and cannot be connected to a computer or network for remote monitoring. Using thermocouples and platinum resistors to measure fluid temperature can output electrical signals and automatically collect data; however, because the probe itself is charged, there is a safety hazard for flammable and explosive fluids, and the probe is also susceptible to environmental electromagnetic interference, which affects the accuracy of measurement results. ..

发明内容 Contents of the invention

本发明的目的是提供一种压力式流体温度传感器,该种流体温度传感器抗电磁干扰,适于易燃易爆流体的测量;且能输出电信号、可与计算机或网络连接,实现远程监控。The purpose of the present invention is to provide a pressure type fluid temperature sensor, which is resistant to electromagnetic interference and suitable for the measurement of flammable and explosive fluids; and can output electrical signals and can be connected with a computer or network to realize remote monitoring.

本发明解决的技术问题,所采用的技术方案为:一种压力式流体温度传感器,其组成是:密封的内装感温流体的刚性温包、刚性温包经连接导管与能输出电信号的流体压力传感器的感压腔连通。The technical problem solved by the present invention is that the adopted technical solution is: a pressure type fluid temperature sensor, which is composed of: a sealed rigid temperature bulb with a temperature-sensitive fluid inside, a rigid temperature bulb through a connecting conduit and a fluid capable of outputting electrical signals The pressure sensing cavity of the pressure sensor is connected.

本发明的工作过程和原理是:Work process and principle of the present invention are:

将刚性温包置于被测温度的流体环境中,温包内的感温流体(气体或液体)感测到包外流体温度会热胀冷缩而产生相应的正、负压力,该压力通过连接导管传递至流体压力传感器的感压腔,流体压力传感器测出感压腔的压力而输出电信号,该输出电信号随包内流体压力成比例地变化,包内流体压力又与包外被测流体环境温度成比例地变化,由此实现温包外流体环境温度的检测。Place the rigid temperature package in the fluid environment of the measured temperature. The temperature-sensitive fluid (gas or liquid) in the temperature package will sense the temperature of the fluid outside the package and will expand with heat and contract with cold to generate corresponding positive and negative pressures. The pressure passes through The connecting conduit is transmitted to the pressure-sensing chamber of the fluid pressure sensor, and the fluid pressure sensor measures the pressure of the pressure-sensing chamber and outputs an electrical signal, which changes in proportion to the fluid pressure inside the bag, and the fluid pressure inside the bag is in turn related to the pressure outside the bag. The ambient temperature of the measured fluid changes proportionally, thereby realizing the detection of the ambient temperature of the fluid outside the temperature bulb.

与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:

一、该传感器能输出电信号,便于与计算机或网络连接,实现远程监控。1. The sensor can output electrical signals, which is convenient to connect with a computer or network to realize remote monitoring.

二、温包与采用电量信号输出的流体压力传感器在空间上被连通导管分隔开来,测量时与被测流体直接接触的温包不带电,有较高的防燃、防爆性能和安全性,适于易燃易爆流体的测量。2. The temperature bulb and the fluid pressure sensor that uses the electric signal output are separated in space by the connecting conduit. The temperature bulb that is in direct contact with the measured fluid is not charged during measurement, and has high flame-proof, explosion-proof performance and safety. , suitable for the measurement of flammable and explosive fluids.

三、温包对温度的敏感效应非电磁效应,抗电磁干扰能力强,适于电磁干扰大的环境中使用。3. The sensitive effect of the temperature bulb on temperature is non-electromagnetic, and has a strong ability to resist electromagnetic interference, and is suitable for use in environments with large electromagnetic interference.

上述的连接导管的内径为0.5-2.0mm。The inner diameter of the above-mentioned connecting conduit is 0.5-2.0mm.

这样,连接导管实际上为毛细管,既能有效的将温包内的压力传递给感压腔;同时,又能减小温包因热传导对流体压力传感器的影响。In this way, the connecting conduit is actually a capillary tube, which can effectively transmit the pressure in the temperature bulb to the pressure-sensing cavity; at the same time, it can reduce the influence of the temperature bulb on the fluid pressure sensor due to heat conduction.

上述的流体压力传感器为硅压阻式流体压力传感器。The fluid pressure sensor mentioned above is a silicon piezoresistive fluid pressure sensor.

上述的流体压力传感器为硅电容式流体压力传感器。The fluid pressure sensor mentioned above is a silicon capacitive fluid pressure sensor.

这两种流体压力传感器为微电子工艺制作,体积小,且其灵敏度高。这样,可减小整个仪表的体积,并提高其测量精度。These two kinds of fluid pressure sensors are made by microelectronic technology, and have small volume and high sensitivity. In this way, the volume of the entire instrument can be reduced and its measurement accuracy can be improved.

下面结合附图和具体实施方式对本发明作进一步的描述。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

附图说明 Description of drawings

图1为本发明实施例一的压力式流体温度传感器的剖面结构示意图。FIG. 1 is a schematic cross-sectional structure diagram of a pressure fluid temperature sensor according to Embodiment 1 of the present invention.

图2为本发明实施例二的压力式流体温度传感器的剖面结构示意图。FIG. 2 is a schematic cross-sectional structure diagram of a pressure fluid temperature sensor according to Embodiment 2 of the present invention.

具体实施方式 Detailed ways

实施例一Embodiment one

图1示出,本发明的一种具体实施方式是,一种压力式流体温度传感器,其组成是一种压力式流体温度传感器,其组成是:密封的内装感温流体的刚性温包1、刚性温包1经连接导管11与能输出电信号的流体压力传感器3的感压腔5连通。Figure 1 shows that a specific embodiment of the present invention is a pressure type fluid temperature sensor, which is composed of a pressure type fluid temperature sensor, and its composition is: a sealed rigid temperature bulb 1 with a temperature sensitive fluid inside, The rigid temperature bulb 1 communicates with the pressure sensing cavity 5 of the fluid pressure sensor 3 capable of outputting electrical signals through a connecting conduit 11 .

本例的连接导管11的内径为0.5-2.0mm。The inner diameter of the connecting conduit 11 in this example is 0.5-2.0 mm.

本例的流体压力传感器3为硅压阻式流体压力传感器。The fluid pressure sensor 3 in this example is a silicon piezoresistive fluid pressure sensor.

实施例二Embodiment two

图2示出,本例的压力式流体温度传感器3与实施例一基本相同,不同的仅仅是:本例的流体压力传感器3为硅电容式流体压力传感器。FIG. 2 shows that the pressure fluid temperature sensor 3 of this example is basically the same as that of the first embodiment, except that the fluid pressure sensor 3 of this example is a silicon capacitive fluid pressure sensor.

本发明的刚性温包1可用传热好且刚性强的材料制成,如铜、不锈钢、铝、钛、钨等金属,或陶瓷、玻璃等材料制成。感温流体可以为空气、氮气、氩气等气体,也可以是氟里昂、乙醚、氯甲烷等液体。连接导管11则可用铜、不锈钢、钛或玻璃等制成。本发明的流体压力传感器3除可以是以上的硅压阻式和硅电容式流体压力传感器外,还可以是各种能够测量流体(气体、液体)压力,且能输出电信号的压力传感器。The rigid temperature bulb 1 of the present invention can be made of materials with good heat transfer and strong rigidity, such as metals such as copper, stainless steel, aluminum, titanium, tungsten, or materials such as ceramics and glass. The temperature-sensitive fluid can be gases such as air, nitrogen, and argon, or liquids such as Freon, ether, and methyl chloride. Connecting conduit 11 then available copper, stainless steel, titanium or glass etc. are made. In addition to the above silicon piezoresistive and silicon capacitive fluid pressure sensors, the fluid pressure sensor 3 of the present invention can also be various pressure sensors capable of measuring fluid (gas, liquid) pressure and outputting electrical signals.

Claims (4)

1.一种压力式流体温度传感器,其组成是:密封的内装感温流体的刚性温包(1)、刚性温包(1)经连接导管(11)与能输出电信号的流体压力传感器(3)的感压腔(5)连通。1. A pressure type fluid temperature sensor, its composition is: the rigid temperature bulb (1) of the temperature-sensitive fluid of adornment inside sealing, rigidity temperature bulb (1) through connecting conduit (11) and the fluid pressure sensor ( 3) The pressure sensing cavity (5) is connected. 2.根据权利要求1所述的压力式流体温度传感器,其特征在于,所述的连接导管(11)的内径为0.5~2.0mm。2. The pressure type fluid temperature sensor according to claim 1, characterized in that, the inner diameter of the connecting conduit (11) is 0.5-2.0 mm. 3.根据权利要求1所述的压力式流体温度传感器,其特征在于,所述流体压力传感器(3)为硅压阻式流体压力传感器。3. The pressure type fluid temperature sensor according to claim 1, characterized in that, the fluid pressure sensor (3) is a silicon piezoresistive fluid pressure sensor. 4.根据权利要求1所述的压力式流体温度传感器,其特征在于,所述的流体压力传感器(3)为硅电容式流体压力传感器。4. The pressure type fluid temperature sensor according to claim 1, characterized in that, the fluid pressure sensor (3) is a silicon capacitive fluid pressure sensor.
CN2011101995009A 2011-07-16 2011-07-16 Pressure type fluid temperature sensor Pending CN102279057A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104215350A (en) * 2014-09-24 2014-12-17 昆山超强光电设备有限公司 Temperature sensor
CN104614086A (en) * 2015-03-06 2015-05-13 上海新微技术研发中心有限公司 Air pressure type temperature sensor and manufacturing method thereof
CN106768461A (en) * 2017-03-20 2017-05-31 武汉理工大学 Thermal Stress Thermometer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149686A (en) * 1978-05-16 1979-11-24 Mitsubishi Electric Corp Pressure type temperature sensor
JPH09311080A (en) * 1996-05-22 1997-12-02 Yokogawa Electric Corp Pressure-type thermometer
CN101542258A (en) * 2007-02-16 2009-09-23 株式会社电装 Pressure sensor and manufacturing method thereof
CN202182777U (en) * 2011-07-16 2012-04-04 西南交通大学 Pressure type fluid temperature sensing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149686A (en) * 1978-05-16 1979-11-24 Mitsubishi Electric Corp Pressure type temperature sensor
JPH09311080A (en) * 1996-05-22 1997-12-02 Yokogawa Electric Corp Pressure-type thermometer
CN101542258A (en) * 2007-02-16 2009-09-23 株式会社电装 Pressure sensor and manufacturing method thereof
CN202182777U (en) * 2011-07-16 2012-04-04 西南交通大学 Pressure type fluid temperature sensing device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104215350A (en) * 2014-09-24 2014-12-17 昆山超强光电设备有限公司 Temperature sensor
CN104614086A (en) * 2015-03-06 2015-05-13 上海新微技术研发中心有限公司 Air pressure type temperature sensor and manufacturing method thereof
CN106768461A (en) * 2017-03-20 2017-05-31 武汉理工大学 Thermal Stress Thermometer

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Application publication date: 20111214