CN102263363B - Arc discharge protection system for gas laser - Google Patents
Arc discharge protection system for gas laser Download PDFInfo
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- CN102263363B CN102263363B CN2011101569622A CN201110156962A CN102263363B CN 102263363 B CN102263363 B CN 102263363B CN 2011101569622 A CN2011101569622 A CN 2011101569622A CN 201110156962 A CN201110156962 A CN 201110156962A CN 102263363 B CN102263363 B CN 102263363B
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Abstract
The invention discloses an arc discharge protection system for a gas laser, belonging to the field of automatic control. The protection system comprises an arc detecting coil (2), a voltage comparator (3), a shaping circuit (4), a light emitter (5), an optical fiber (6), a light receiver (7), a binary-coded decimal asynchronous pulse counting circuit (8), a centesimal system asynchronous pulse counting circuit (9), a quinary asynchronous pulse counting circuit (10), a laser control system (11), an AND gate circuit (12) and an OR gate circuit (13). According to the invention, the gas laser can be protected by utilizing an electromagnetic induction principle. The arc discharge protection system disclosed by the invention can be applied to all gas lasers pumped by pulse discharge and the reliabilities of the lasers can be greatly improved.
Description
Technical field
The invention belongs to the automatic control equipment technical field, be specifically related to a kind of gas laser arc discharge protection system.
Background technology
Be to be in glow discharge state during the gas laser operate as normal of pulsed discharge pump type; if arc discharge takes place then Optical Maser System itself is had very big infringement; and the performance to the laser of laser output also has a significant impact; therefore; when laser works, must monitor the discharge condition of laser; send alarm signal immediately to the laser control system in case find laser generation arc discharge, make the laser control system take corresponding safeguard measure.
Summary of the invention
The purpose of this invention is to provide a kind of gas laser arc discharge protection system, it can improve the reliability of gas laser to a great extent.
To achieve these goals, technical scheme of the present invention is as follows:
A kind of gas laser arc discharge protection system comprises arc light search coil, voltage comparator, shaping circuit, optical transmitting set, optical fiber, optical receiver, binary-coded decimal asynchronous pulse counting circuit, centesimal system lock-out pulse counting circuit, quinary lock-out pulse counting circuit, laser control system, AND circuit and OR circuit; Described arc light search coil is installed in the discharging current loop side of gas laser, the magnetic field that the discharging current of its receiver gases laser produces, and will export to voltage comparator through the arc discharge induced voltage that electromagnetic induction obtains; Described voltage comparator is electrically connected with the arc light search coil, it receives the arc discharge induced voltage of arc light search coil output, and this arc discharge induced voltage and preset threshold voltage compared, after the arc discharge induced voltage surpassed preset threshold voltage, voltage comparator outputed signal to shaping circuit; Described shaping circuit is electrically connected with voltage comparator, and its signal of telecommunication to voltage comparator output carries out sending to optical transmitting set after the shaping; Described optical transmitting set is electrically connected with shaping circuit, and optical transmitting set converts the signal of telecommunication that receives light signal to and sends to optical receiver by optical fiber; Described optical receiver is electrically connected with optical fiber, and it converts light signal to the signal of telecommunication and delivers to binary-coded decimal asynchronous pulse counting circuit, centesimal system lock-out pulse counting circuit, quinary lock-out pulse counting circuit more respectively; Described laser control system is electrically connected with gas laser, centesimal system lock-out pulse counting circuit, quinary lock-out pulse counting circuit respectively, the Laser emission signal one tunnel that the laser control system is sent is given gas laser and is made its work, and two-way is delivered to centesimal system lock-out pulse counting circuit, quinary lock-out pulse counting circuit respectively as synchronizing signal in addition; Described centesimal system lock-out pulse counting circuit is electrically connected with AND circuit, outputs signal to AND circuit behind 100 laser discharge pulses of centesimal system lock-out pulse counting circuit counting, and AND circuit is opened; Described binary-coded decimal asynchronous pulse counting circuit is electrically connected with AND circuit, if accumulative total has 20 arc discharge pulses in above-mentioned 100 laser discharge pulses, then pulse signal of binary-coded decimal asynchronous pulse counting circuit output is to AND circuit, and AND circuit exports this pulse signal to OR circuit; Described quinary lock-out pulse counting circuit is electrically connected with OR circuit, if in above-mentioned 100 laser discharge pulses five arc discharge pulse generations are arranged continuously, then quinary lock-out pulse counting circuit can be exported a pulse signal to OR circuit; Described OR circuit is electrically connected with the laser control system, and its output pulse signal is to the laser control system; Described gas laser is electrically connected with the laser control system, and it receives the Laser emission signal that laser control system sends, and adjusts its discharge parameter or quit work according to this signal.
The invention has the beneficial effects as follows: can be applicable to the gas laser of all pulsed discharge pumpings, can improve the reliability of this class laser to a great extent.
Description of drawings
Fig. 1 is the structured flowchart of gas laser arc discharge protection system of the present invention.
Fig. 2 is the circuit diagram of gas laser arc discharge protection system one embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further details.
As shown in Figure 1, the present invention is made up of arc light search coil 2, voltage comparator 3, shaping circuit 4, optical transmitting set 5, optical fiber 6, optical receiver 7, binary-coded decimal asynchronous pulse counting circuit 8, centesimal system lock-out pulse counting circuit 9, quinary lock-out pulse counting circuit 10, laser control system 11, AND circuit 12 and OR circuit 13.
Arc light search coil 2 is installed in the discharging current loop side of gas laser 1; when gas laser 1 arc discharge; the glow discharge of discharging current during than operate as normal increases a lot; the voltage that this arc discharge electric current induces in arc light search coil 2 is bigger than the voltage that glow current induces in arc light search coil 2, and the present invention utilizes this electromagnetic induction principle that gas laser is implemented discharge prevention exactly.
Embodiment:
As shown in Figure 2, gas laser 1 can be by TEA CO
2Laser constitutes, and arc light search coil 2 can be made by the coil that 50 ohm coaxial cable curve diameter 5cm, and voltage comparator 3 is by AD9696 and resistance R
1, R
2, diode D
1, D
2Form, shaping circuit 4 is by 74121 and C
1, R
3Form monostable trigger-action circuit, optical transmitting set 5 is by R
4, peripheral drive circuit 75451, HFBR1521 form, optical fiber 6 is ordinary optic fibre, optical receiver 7 is HFBR2521, binary-coded decimal asynchronous pulse counting circuit 8, centesimal system lock-out pulse counting circuit 9, quinary lock-out pulse counting circuit 10 can be made by the CPLD chip EPM3032A of altera corp, laser control system 11 can be made up of the TMS320F2812DSP of Texas Instruments company, and AND circuit 12, OR circuit 13 can be made by the CPLD chip EPM3032A of altera corp.
The voltage comparator 3 that AD9696 forms arranges a threshold voltage, makes TEA CO
2Glow current during laser 1 operate as normal can not make voltage comparator 3 AD9696 output pulse signals at the induced voltage that arc light search coil 2 produces, and the arc discharge electric current is greater than glow current, therefore, and TEA CO
2Laser 1 just makes AD9696 form when arc discharge takes place voltage comparator 3 output arc discharge pulse signals, arc discharge pulse signal through 4 shapings of 74121 monostable trigger-action circuits after, through by R
4, peripheral drive circuit 75451, HFBR1521 form optical transmitting set 5 and become light pulse signal and enter optical fiber 6, optical receiver 7 HFBR2521 receive light pulse signal, and light pulse signal is transformed into electric impulse signal delivers to binary-coded decimal asynchronous pulse counting circuit 8, centesimal system lock-out pulse counting circuit 9, the quinary lock-out pulse counting circuit 10 that the CPLD chip EPM3032A by altera corp makes respectively.The Laser emission signal one tunnel that the laser control system 11 that TMS320F2812DSP forms is sent is given TEA CO
2Laser makes its work, two the tunnel deliver to centesimal system lock-out pulse counting circuit 9 respectively in addition, quinary lock-out pulse counting circuit 10 is as synchronizing signal, signal of output is to AND circuit 12 after 100 pulses of centesimal system lock-out pulse counting circuit 9 countings, AND circuit 12 is opened, if accumulative total has 20 arc discharge pulses in 100 laser discharge pulses, then binary-coded decimal asynchronous pulse counting circuit 8 is exported a pulse to AND circuit 12 this moment, pulse signal of AND circuit 12 outputs is to OR circuit 13, pulse signal of OR circuit 13 outputs is to laser control system 11, and laser control system 11 is adjusted TEA CO immediately
2The discharge parameter of laser or make TEA CO
2Laser 1 quits work.If five arc discharge pulse generations are arranged in 100 laser discharge pulses continuously, then quinary lock-out pulse counting circuit 10 can be exported a pulse signal to OR circuit 13, pulse signal of OR circuit 13 outputs is to laser control system 11, and laser control system 11 is adjusted TEA CO immediately
2The discharge parameter of laser or make TEA CO
2Laser 1 quits work.
The present invention can be applied to the gas laser of all pulsed discharge pumpings, can improve the reliability of this class laser to a great extent.
Claims (1)
1. gas laser arc discharge protection system, it is characterized in that this system comprises arc light search coil (2), voltage comparator (3), shaping circuit (4), optical transmitting set (5), optical fiber (6), optical receiver (7), binary-coded decimal asynchronous pulse counting circuit (8), centesimal system lock-out pulse counting circuit (9), quinary lock-out pulse counting circuit (10), laser control system (11), AND circuit (12) and OR circuit (13);
Described arc light search coil (2) is installed in the discharging current loop side of gas laser (1), the magnetic field that the discharging current of its receiver gases laser (1) produces, and will export to voltage comparator (3) through the arc discharge induced voltage that electromagnetic induction obtains;
Described voltage comparator (3) is electrically connected with arc light search coil (2), it receives the arc discharge induced voltage of arc light search coil (2) output, and this arc discharge induced voltage and preset threshold voltage compared, after the arc discharge induced voltage surpassed preset threshold voltage, voltage comparator (3) outputed signal to shaping circuit (4);
Described shaping circuit (4) is electrically connected with voltage comparator (3), and its signal of telecommunication to voltage comparator (3) output carries out sending to optical transmitting set (5) after the shaping;
Described optical transmitting set (5) is electrically connected with shaping circuit (4), and optical transmitting set (5) converts the signal of telecommunication that receives light pulse signal to and sends to optical receiver (7) by optical fiber (6);
Described optical receiver (7) is electrically connected with optical fiber (6), and it converts light signal to the signal of telecommunication and delivers to binary-coded decimal asynchronous pulse counting circuit (8), centesimal system lock-out pulse counting circuit (9), quinary lock-out pulse counting circuit (10) more respectively;
Described laser control system (11) is electrically connected with gas laser (1), centesimal system lock-out pulse counting circuit (9), quinary lock-out pulse counting circuit (10) respectively, the Laser emission signal one tunnel that laser control system (11) is sent is given gas laser (1) and is made its work, and two-way is delivered to centesimal system lock-out pulse counting circuit (9), quinary lock-out pulse counting circuit (10) respectively as synchronizing signal in addition;
Described centesimal system lock-out pulse counting circuit (9) is electrically connected with AND circuit (12), outputs signal to AND circuit (12) behind 100 laser discharge pulses of centesimal system lock-out pulse counting circuit (9) counting, and AND circuit (12) is opened;
Described binary-coded decimal asynchronous pulse counting circuit (8) is electrically connected with AND circuit (12), if accumulative total has 20 arc discharge pulses in above-mentioned 100 laser discharge pulses, then pulse signal of binary-coded decimal asynchronous pulse counting circuit (8) output is to AND circuit (12), AND circuit (12) exports this pulse signal to OR circuit (13), pulse signal of OR circuit (13) output is to laser control system (11), and laser control system (11) is adjusted the discharge parameter of gas laser (1) immediately or gas laser (1) is quit work;
Described quinary lock-out pulse counting circuit (10) is electrically connected with OR circuit (13), if in above-mentioned 100 laser discharge pulses, five arc discharge pulse generations are arranged continuously, then quinary lock-out pulse counting circuit (10) can be exported a pulse signal to OR circuit (13), pulse signal of OR circuit (13) output is to laser control system (11), and laser control system (11) is adjusted the discharge parameter of gas laser (1) immediately or gas laser (1) is quit work;
Described OR circuit (13) is electrically connected with laser control system (11), and its output pulse signal is to laser control system (11);
Described gas laser (1) is electrically connected with laser control system (11), and it receives the Laser emission signal that laser control system (11) sends, and adjusts its discharge parameter or quit work according to this signal.
Priority Applications (1)
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CN2011101569622A CN102263363B (en) | 2011-06-13 | 2011-06-13 | Arc discharge protection system for gas laser |
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CN2011101569622A CN102263363B (en) | 2011-06-13 | 2011-06-13 | Arc discharge protection system for gas laser |
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CN102263363A CN102263363A (en) | 2011-11-30 |
CN102263363B true CN102263363B (en) | 2013-07-03 |
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CN2011101569622A Expired - Fee Related CN102263363B (en) | 2011-06-13 | 2011-06-13 | Arc discharge protection system for gas laser |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004221401A (en) * | 2003-01-16 | 2004-08-05 | Amada Co Ltd | Gas laser oscillator |
JP2006108558A (en) * | 2004-10-08 | 2006-04-20 | Shibuya Kogyo Co Ltd | Gas laser oscillator |
US20080267235A1 (en) * | 2007-04-26 | 2008-10-30 | Fanuc Ltd | Laser |
CN101431212A (en) * | 2007-11-06 | 2009-05-13 | 发那科株式会社 | Abnormality detection method for gas laser oscillator and gas laser oscillator for implementing the method |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US7778302B2 (en) * | 2005-11-01 | 2010-08-17 | Cymer, Inc. | Laser system |
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2011
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004221401A (en) * | 2003-01-16 | 2004-08-05 | Amada Co Ltd | Gas laser oscillator |
JP2006108558A (en) * | 2004-10-08 | 2006-04-20 | Shibuya Kogyo Co Ltd | Gas laser oscillator |
US20080267235A1 (en) * | 2007-04-26 | 2008-10-30 | Fanuc Ltd | Laser |
CN101431212A (en) * | 2007-11-06 | 2009-05-13 | 发那科株式会社 | Abnormality detection method for gas laser oscillator and gas laser oscillator for implementing the method |
Non-Patent Citations (1)
Title |
---|
大功率脉冲TEA CO2激光器控制系统设计;孟范江,等;《激光与红外》;20100831;第40卷(第8期);843-845 * |
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