CN102253047B - Solar silicon wafer photoluminescence on-line sampling detection system and its detection method - Google Patents
Solar silicon wafer photoluminescence on-line sampling detection system and its detection method Download PDFInfo
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- CN102253047B CN102253047B CN 201110106556 CN201110106556A CN102253047B CN 102253047 B CN102253047 B CN 102253047B CN 201110106556 CN201110106556 CN 201110106556 CN 201110106556 A CN201110106556 A CN 201110106556A CN 102253047 B CN102253047 B CN 102253047B
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 188
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 179
- 239000010703 silicon Substances 0.000 title claims abstract description 179
- 238000005070 sampling Methods 0.000 title claims abstract description 104
- 238000001514 detection method Methods 0.000 title claims abstract description 65
- 238000005424 photoluminescence Methods 0.000 title claims abstract description 31
- 238000003384 imaging method Methods 0.000 claims abstract description 60
- 235000012431 wafers Nutrition 0.000 claims abstract description 31
- 230000033001 locomotion Effects 0.000 claims abstract description 25
- 230000001360 synchronised effect Effects 0.000 claims description 14
- 238000005286 illumination Methods 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000012634 fragment Substances 0.000 abstract 1
- 230000002950 deficient Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 210000004877 mucosa Anatomy 0.000 description 1
- 238000000241 photoluminescence detection Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
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Abstract
The invention belongs to the technical field of detection systems, and specifically relates to a solar silicon wafer photoluminescence on-line sampling detection system and its detection method, wherein the solar silicon wafer photoluminescence on-line sampling detection system comprises a silicon wafer conveyer belt and an imaging system, inclusive of a synchronization device for synchronizing the imaging system and sampling silicon wafers. According to the invention, the imaging system synchronizes with the sampling silicon wafers and the detection of the sampling silicon wafers on the conveyer belt in rapid motion is accomplished, therefore realizing the photoluminescence on-line sampling detection, maintaining a rapid operation of the production line, reducing the operation of the silicon wafers and decreasing the fragment percent.
Description
Technical field
The invention belongs to the detection system technical field, specifically, relate to a kind of solar silicon wafers photoluminescence online sampling Detection system and detection method thereof.
Background technology
Photoluminescence (PL) is the important method that detects solar silicon wafers (Bare wafer), and the method adopts infrared laser to be radiated on silicon chip, and silicon chip inspires the fluorescence of near-infrared band and by the collected by camera imaging.Because the fluorescent effect compared with normal zone of defect area dies down, can detect the defective of silicon chip by graphical analysis, and the method is non-contact detection, have advantages of and do not damage silicon chip, but because the fluorescence radiation efficient of silicon chip itself is very low, need to adopt very expensive high power laser and refrigeration camera could accomplish reluctantly to generate the good fluoroscopic image of signal to noise ratio (S/N ratio) in short exposure time (a second).If adopt the moderate refrigeration camera of cost and medium or low power laser to be difficult to realize the short time exposure image, this has just limited the online application that photoluminescence detects.And simultaneously, some other detection method, such as outward appearance detects, minority carrier life time detects, thickness detects, etc. can complete within the very short time (less than one second), this type of checkout equipment can be accomplished per hour 3000 or above detection speed.Therefore, the photoluminescence detection speed is slow and other detection methods such as outward appearance detects, and it is very fast that minority carrier life time detects uniform velocity, and this has just affected the whole detection speed of solar silicon wafers.
The major defect that sampling observation detects for photoluminescence (evil mind and black surround) is reasonably, can increase hardly undetectedly, because with regard to the monocrystalline production technology, there is continuity in this fault in material of the evil mind of the silicon chip that silicon single crystal rod cuts into and black surround; With regard to the polycrystalline production technology, also there is continuity in this fault in material of the black surround of the silicon chip that polysilicon block cuts into.That is to say, if find black surround or evil mind defective on certain a slice silicon chip, all very likely find same defective on some silicon chips before and after it.Otherwise, if do not find black surround or evil mind defective on a certain silicon chip, have the possibility of evil mind black surround defective also very low on some silicon chips before and after it.
Summary of the invention
The present invention has overcome shortcoming of the prior art, for photoluminescence, a kind of solar silicon wafers photoluminescence online sampling Detection system and detection method thereof have been proposed, photoluminescence at a slow speed is module integrated in the high speed on-line detecting system, in this system, the high speed detection module is such as outward appearance detection etc., detect the every a slice silicon chip on production line, and the photoluminescence module is every some silicon chip sampling Detection a slice silicon chips.
In order to solve the problems of the technologies described above, the present invention is achieved by the following technical solutions:
The online sampling Detection of a kind of solar silicon wafers photoluminescence system comprises silicon chip transporting belt and imaging system, also comprises making imaging system and the synchronous synchronous device of sampling silicon chip.
Further, described synchronous device comprises the moving-out device that the sampling silicon chip is shifted out from the silicon chip conveying belt.
Further, described moving-out device is the silicon chip supporting mechanism.
Further, also comprise the feeding device that the silicon chip of sampling on the silicon chip supporting mechanism is moved in conveying belt direction of motion.
Further, described silicon chip transporting belt is separated at least two cover conveying belt point-blank, be provided with a rotating disk between two cover conveying belt, the two parallel rotating disk conveying belt of cover are set on this rotating disk, this two covers rotating disk conveying belt all can go between two cover conveying belt of above-mentioned silicon chip conveying belt, and this imaging system is located at and two cover conveying belt of above-mentioned silicon chip conveying belt point-blank rotating disk conveying belt top not.
Further, described synchronous device comprises the device that the control imaging system moves left and right in the silicon chip belt direction.
The detection method of the online sampling Detection of a kind of solar silicon wafers photoluminescence system, every some silicon chips, just there is at least one room not place silicon chip, the sampling silicon chip is moved out of device and shifts out conveying belt, and imaging system is to sampling silicon chip illumination imaging, simultaneously, silicon chip on transporting belt continues motion, after completing imaging, when above-mentioned room arrived the moving-out device position, moving-out device was put back to transporting belt to the sampling silicon chip of completing detection thereon.
The detection method of the online sampling Detection of another kind of solar silicon wafers photoluminescence system, the described silicon chip supporting mechanism silicon chip of sampling extracts and is placed into imaging system below from transporting belt, imaging system is to sampling silicon chip illumination imaging, simultaneously, silicon chip on transporting belt continues motion, when the sampling silicon chip is extracted, form a room on transporting belt, after the sampling silicon chip is completed detection, described feeding device is with the speed greater than transporting belt, the direction of sampling silicon chip to the transporting belt motion transported, and the sampling silicon chip is placed on described room.
Also can, the detection method of the online sampling Detection of solar silicon wafers photoluminescence system, silicon chip interrupted transmission on transporting belt, when the sampling silicon chip arrives the rotating disk Lower Half, dial rotation, the sampling silicon chip is forwarded to the detection position of the rotating disk first half, imaging system is to sampling silicon chip illumination imaging, the sampling silicon chip of completing detection is transferred to the rotating disk Lower Half, complete detection sampling silicon chip and another sheet sampling position of silicon wafer exchange, imaging system is to another sheet sampling silicon chip illumination imaging, completed detection the sampling silicon chip continue motion from left to right with transporting belt.
All right, the detection method of the online sampling Detection of solar silicon wafers photoluminescence system, transporting belt is uninterruptedly motion from left to right, and when the sampling silicon chip arrived the imaging system initial position, imaging system began to accelerate to the right, after the imaging system accelerates to speed identical with transporting belt, itself and transporting belt are synchronized with the movement, and to the imaging of throwing light on of sampling silicon chip, the illumination imaging finishes, imaging system is returned to initial position to left movement, waits for lower a slice sampling silicon chip.
Compared with prior art, the invention has the beneficial effects as follows:
Imaging system of the present invention and sampling silicon chip are synchronous, realization detects the sampling silicon chip on the transporting belt of high-speed motion, thereby realized the online sampling Detection of photoluminescence and kept the fast turn-around of production line, and reduced operation to silicon chip to reduce the fragmentation rate.
Description of drawings
The present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
Fig. 1 a, 1b, 1c, 1d are the schematic diagram of the embodiment of the present invention 1;
Fig. 2 a, 2b, 2c, 2d are the schematic diagram of the embodiment of the present invention 2;
Fig. 3 a, 3b, 3c are the schematic diagram of the embodiment of the present invention 3;
Fig. 4 a, 4b, 4c are the schematic diagram of the embodiment of the present invention 4.
Embodiment
The online sampling Detection of solar silicon wafers photoluminescence of the present invention system comprises silicon chip transporting belt 1, imaging system 2 and makes imaging system 2 and sampling silicon chip 3 synchronous synchronous device, and imaging system 2 comprises a laser instrument and a camera.
Embodiment 1:
As shown in Figure 1a: a series of silicon chips 4 are motion from left to right incessantly on silicon chip transporting belt 1, when material loading, every some silicon chips 4, just there is a room 5 not place silicon chip 4, in silicon chip transporting belt 1 both sides, a silicon chip supporting mechanism 6 is arranged, this silicon chip supporting mechanism 6 can be flexible at vertical direction, and power can be that cylinder can also be motor etc.When lifting (elongation) state when it is in, do not affect silicon chip 4 motions on lower side silicon wafer transporting belt 1.That imaging system 2 comprises a laser instrument and a camera above silicon chip supporting mechanism 6.Fig. 1 a has described the running of a complete cycle of photoluminescence sampling observation to Fig. 1 d, in Fig. 1 a, sampling silicon chip 3 arrives silicon chip supporting mechanism 6 positions, is held up by silicon chip supporting mechanism 6.The sampling silicon chip 3 that Fig. 1 b is held up is still on silicon chip supporting mechanism 6, and imaging system 2 is to its illumination imaging.In this simultaneously, other silicon chips 4 on silicon chip transporting belt 1 continue original tangential movement from left to right.Fig. 1 c is after completing imaging, and when room shown in Fig. 1 a and 1b 5 arrived silicon chip supporting mechanism 6 position, silicon chip supporting mechanism 6 put down (contraction), and the sampling silicon chip 3 of completing detection is thereon put back to silicon chip transporting belt 1.Fig. 1 d is lower a slice sampling silicon chip when arriving silicon chip supporting mechanism 6, and silicon chip supporting mechanism 6 silicon chip 6 of sampling lifts and detects.Go round and begin again from Fig. 1 a to Fig. 1 d and just realized extracting sampling silicon chip 3 from silicon chip transporting belt 1, detect, sampling silicon chip 3 is put back to the online sampling Detection of silicon chip transporting belt 1.
Embodiment 2:
As shown in Fig. 2 a, 2b, 2c, 2d, silicon chip transporting belt 1 transports a series of silicon chips 4 from left to right incessantly, and in Fig. 2 a, the moving-out device silicon chip 3 of sampling extracts and be placed into imaging system 2 belows from silicon chip transporting belt 1.Moving-out device can be the silicon chip supporting mechanism 6 in embodiment 1, can be also such as mechanical arm, sucker etc. device.In Fig. 2 b, sampling silicon chip 3 test-acceptings (illumination imaging) that are extracted, in this simultaneously, other silicon chips 4 on silicon chip transporting belt 1 continue to move right.Owing to there being a slice sampling silicon chip 3 to be extracted, form a room 5 on silicon chip transporting belt 1.In Fig. 2 c, this sampling silicon chip 3 is completed detection, and feeding device transports this sampling silicon chip 3 to the right with the speed greater than silicon chip transporting belt 1, and purpose is to catch up with the room 5 that forms before this and this sheet sampling silicon chip 3 is placed on 5 positions, room on silicon chip transporting belt 1.This feeding device can be a mechanical arm, can be also another transporting belt.In Fig. 2 d, when this sampling silicon chip 3 arrived room 5, the moving-out device silicon chip 3 of should sampling was put back to silicon chip transporting belt 1.In this while, another sheet sampling silicon chip 3 is extracted out silicon chip transporting belt 1 and detects.
Embodiment 3:
Be depicted as vertical view as Fig. 3 a, 3b, 3c, silicon chip transporting belt 1 is divided into two parts, and the centre has rotating disk 6 to separate, and two cover transporting belts 61,62 are also arranged above rotating disk 6.Rotating disk 6 can rotate, and in Fig. 3 a, the sampling silicon chip 3 of having examined is at rotating disk 6 first halves, rotating disk 6 first halves are detection positions, in its vertical direction, imaging system 2 are arranged, and silicon chip transporting belt 1 runs without interruption, when silicon chip transporting belt 1 arrived rotating disk 6 Lower Half, rotating disk 6 rotated.In Fig. 3 b, rotating disk 6 rotates complete, and the silicon chip 3 of sampling forwards the detection position to, and the sampling silicon chip 3 that has detected is transferred to rotating disk 6 Lower Halves, continues motion from left to right with silicon chip transporting belt 1.On silicon chip transporting belt 1 in silicon chip 4 interrupted transmissions, at the sampling silicon chip 3 of rotating disk 6 first halves by Ear Mucosa Treated by He Ne Laser Irradiation and imaging.In Fig. 3 c, detection is completed.When silicon chip of another sheet sampling by the time 3 arrives rotating disk 6 Lower Half, rotating disk 6 will rotate again, and the sampling silicon chip 3 that has detected and sampling silicon chip to be checked 3 positions are exchanged.
Embodiment 4:
As shown in Fig. 4 a, 4b, 4c, silicon chip transporting belt 1 is uninterruptedly motion from left to right, and in Fig. 4 a, when sampling silicon chip 3 arrived imaging system 2 initial position, imaging system 2 beginnings were accelerated to the right.In Fig. 4 b, after imaging system 2 accelerated to speed identical with silicon chip transporting belt 1, it and silicon chip transporting belt 1 were synchronized with the movement and take pictures, and in Fig. 4 c, when ends of taking pictures, imaging system 2 is returned to initial position to left movement, waited for lower a slice silicon chip 3 of sampling.
The present invention is not limited to above-mentioned embodiment, if various changes of the present invention or distortion are not broken away from the spirit and scope of the present invention, within if these changes and distortion belong to claim of the present invention and equivalent technologies scope, the present invention also is intended to comprise these changes and distortion.
Claims (9)
1. the online sampling Detection of solar silicon wafers photoluminescence system, comprise silicon chip transporting belt and imaging system, it is characterized in that: also comprise making imaging system and the synchronous synchronous device of sampling silicon chip, described silicon chip transporting belt is separated at least two cover transporting belts point-blank, be provided with a rotating disk between two cover transporting belts, the two parallel rotating disk transporting belts of cover are set on this rotating disk, this two covers rotating disk transporting belt all can go between two cover transporting belts of above-mentioned silicon chip transporting belt, this imaging system is located at and two cover transporting belts of above-mentioned silicon chip transporting belt point-blank rotating disk transporting belt top not.
2. the online sampling Detection of solar silicon wafers photoluminescence according to claim 1 system, it is characterized in that: described synchronous device comprises the moving-out device that the sampling silicon chip is shifted out from the silicon chip transporting belt.
3. the online sampling Detection of solar silicon wafers photoluminescence according to claim 2 system, it is characterized in that: described moving-out device is the silicon chip supporting mechanism.
4. the online sampling Detection of solar silicon wafers photoluminescence according to claim 3 system, is characterized in that: also comprise making the feeding device that on the silicon chip supporting mechanism, the sampling silicon chip moves in transporting belt direction of motion.
5. the online sampling Detection of solar silicon wafers photoluminescence according to claim 1 system, it is characterized in that: described synchronous device comprises controls the device that imaging system moves left and right in silicon chip transporting belt direction.
6. the detection method of the online sampling Detection of solar silicon wafers photoluminescence according to claim 2 system, it is characterized in that: every some silicon chips, just there is at least one room not place silicon chip, the sampling silicon chip is moved out of device and shifts out transporting belt, and imaging system is to sampling silicon chip illumination imaging, simultaneously, silicon chip on transporting belt continues motion, after completing imaging, when above-mentioned room arrived the moving-out device position, moving-out device was put back to transporting belt to the sampling silicon chip of completing detection thereon.
7. the detection method of the online sampling Detection of solar silicon wafers photoluminescence according to claim 4 system, it is characterized in that: the described silicon chip supporting mechanism silicon chip of sampling extracts and is placed into imaging system below from transporting belt, imaging system is to sampling silicon chip illumination imaging, simultaneously, silicon chip on transporting belt continues motion, when the sampling silicon chip is extracted, form a room on transporting belt, after the sampling silicon chip is completed detection, described feeding device is with the speed greater than transporting belt, the direction of sampling silicon chip to the transporting belt motion transported, the sampling silicon chip is placed on described room.
8. the detection method of the online sampling Detection of solar silicon wafers photoluminescence according to claim 1 system, it is characterized in that: silicon chip interrupted transmission on transporting belt, when the sampling silicon chip arrives the rotating disk Lower Half, dial rotation, the sampling silicon chip is forwarded to the detection position of the rotating disk first half, imaging system is to sampling silicon chip illumination imaging, the sampling silicon chip of completing detection is transferred to the rotating disk Lower Half, complete detection sampling silicon chip and another sheet sampling position of silicon wafer exchange, imaging system is to another sheet sampling silicon chip illumination imaging, completed detection the sampling silicon chip continue motion from left to right with transporting belt.
9. the detection method of the online sampling Detection of solar silicon wafers photoluminescence according to claim 5 system, it is characterized in that: transporting belt is uninterruptedly motion from left to right, when the sampling silicon chip arrives the imaging system initial position, imaging system begins to accelerate to the right, and after the imaging system accelerated to speed identical with transporting belt, itself and transporting belt were synchronized with the movement, and to the imaging of throwing light on of sampling silicon chip, the illumination imaging finishes, and imaging system is returned to initial position to left movement, waits for lower a slice sampling silicon chip.
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| CN103852470A (en) * | 2012-12-04 | 2014-06-11 | 浚丰太阳能(江苏)有限公司 | Production line inspection bench |
| CN103308491A (en) * | 2013-05-29 | 2013-09-18 | 浙江大学 | Multi-camera synchronously-tracked photoluminescence solar battery detecting device |
| DE102015209589A1 (en) * | 2015-05-26 | 2016-12-01 | Wacker Chemie Ag | Apparatus for conveying a product stream of polysilicon or polysilicon granules |
| CN106903073B (en) * | 2017-03-20 | 2022-08-12 | 常州亿晶光电科技有限公司 | Automatic silicon wafer separation equipment |
| CN109502267B (en) * | 2018-12-11 | 2024-01-26 | 埃华路（芜湖）机器人工程有限公司 | Multi-station sampling inspection conveying system |
| CN111865215A (en) * | 2019-04-29 | 2020-10-30 | 北京铂阳顶荣光伏科技有限公司 | Detection device and method for solar cell |
| CN117690846B (en) * | 2024-02-02 | 2024-04-09 | 深圳市双翌光电科技有限公司 | Visual detection method, device and equipment for solar silicon wafer and storage medium |
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| IT1129509B (en) * | 1980-01-14 | 1986-06-04 | Tasco Spa | PROCEDURE AND EQUIPMENT FOR THE REAL-TIME FINDING OF DEFECTS IN INDUSTRIAL OBJECTS |
| JP2000009661A (en) * | 1998-06-26 | 2000-01-14 | Ntn Corp | Flat panel inspection device |
| DE19930043A1 (en) * | 1999-06-30 | 2001-01-04 | Wolf Systeme Ag | Lighting device for electronic image processing deflects diffuse light to filter that fully covers solar cell with window, tube into which image acquisition camera objective protrudes |
| JP4778755B2 (en) * | 2005-09-09 | 2011-09-21 | 株式会社日立ハイテクノロジーズ | Defect inspection method and apparatus using the same |
| JP2007240519A (en) * | 2006-02-08 | 2007-09-20 | Tokyo Electron Ltd | Method and apparatus for defect inspecting, and computer program |
| JP2007212230A (en) * | 2006-02-08 | 2007-08-23 | Tokyo Electron Ltd | Defect inspecting method, defect inspection system and computer program |
| CN101581671B (en) * | 2009-06-12 | 2011-03-23 | 3i系统公司 | Solar cell silicon chip detecting system |
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