CN102252617B - Morphology registration analysis-based method for detecting precision of precise main shaft rotation - Google Patents
Morphology registration analysis-based method for detecting precision of precise main shaft rotation Download PDFInfo
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- CN102252617B CN102252617B CN 201110084661 CN201110084661A CN102252617B CN 102252617 B CN102252617 B CN 102252617B CN 201110084661 CN201110084661 CN 201110084661 CN 201110084661 A CN201110084661 A CN 201110084661A CN 102252617 B CN102252617 B CN 102252617B
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Abstract
本发明提供了一种基于形貌配准分析的精密主轴回转精度检测方法，将表面样品安装在待测精密主轴上，控制系统控制待测精密主轴到一个角度θ位置，依次采集待测精密主轴在完整圆周位置上表面样品的表面形貌图；形貌数据配准分析处理系统将所获得的若干表面形貌图进行分析，并进行误差评价。本发明对随精密主轴回转的表面样品形貌进行测量及后续形貌配准分析处理，表面样品没有很高的精度要求，不需要昂贵的标准外圆轮廓或复杂测试系统及测试过程，如果选用二维形貌/图像传感器，可测量主轴的径向回转误差；如果选用三维形貌测量传感器，可同时测量主轴径向和轴向回转误差；采用高分辨率的测量传感器，则可实现纳米级精度的主轴回转误差检测。
The invention provides a precision spindle rotation accuracy detection method based on shape registration analysis. The surface sample is installed on the precision spindle to be tested, and the control system controls the precision spindle to be tested to a position at an angle θ, and the precision spindle to be tested is sequentially collected. The surface topography map of the surface sample at the complete circumferential position; the topography data registration analysis and processing system analyzes the obtained several surface topography maps and evaluates the error. The present invention measures the topography of the surface sample rotating with the precision spindle and performs subsequent topographic registration analysis and processing. The surface sample does not have high precision requirements, and does not require expensive standard outer circular contours or complicated testing systems and testing processes. The two-dimensional shape/image sensor can measure the radial rotation error of the spindle; if the three-dimensional shape measurement sensor is selected, the radial and axial rotation errors of the spindle can be measured at the same time; the high-resolution measurement sensor can realize nanoscale High-precision spindle rotation error detection.
Description
Technical field
The present invention relates to a kind of detection method of accurate main shaft turn error.
Background technology
The precision rotating main shaft is the critical component of precision finishing machine and testing apparatus.Development along with ultraprecise processing and nanometer technology, people require more and more higher to the precision level of mechanical component and surveying instrument, especially high-precision rotary body component, such as ultra-precision machine tool main shaft, test table, lasergyro rotor, circle standard, laser fusion target device etc., it makes franchise generally between several nanometers ~ tens nanometers, and this has reached or be higher than the precision level of existing accurate roundness measuring equipment, and (radially turn error approximately 10 ~ 50nm).Improve the rotating accuracy of main shaft to satisfy the part processing request and the accuracy of guaranteeing measurement result under the ultimate limit state, become a problem that has challenge.In addition, because the manufacturing of accurate main shaft building block itself also is under the ultimate precision state, only depend on merely the machining precision that improves spindle unit to guarantee it is that difficulty is proved effective.Error separating and compensating technology is the effective way of the raising Measuring of Axis Rotating Accuracy of generally acknowledging at present.Accurate main shaft, particularly the turn error of static pressure air-bearing main shaft (conditions such as rotating speed, temperature) under certain condition of work is comparatively constant systematic error, this is just so that the turn error nano-precision test problems of accurate main shaft becomes the key of guaranteeing to realize the turn error separating and compensating, improving spindle rotation accuracy.
According to the national standard files specify, spindle rotation error refers to that the instantaneous axis of rotation of main shaft is with respect to the displacement of average axis (being in the mean place place of instantaneous axis of rotation).Spindle rotation error can roughly be divided into two kinds of citation forms: axial end is beated and turn error (comprising diameter run-out and angle swinging) radially.Research to the precision measurement method of accurate main shaft turn error can be traced back to earlier 1900s, quantitative measuring method of the machine tool chief axis of setting up the earliest such as Scheslinger etc.Nineteen fifties, Tlustry and Bryan have set up complete main shaft quantitative measuring method and expressed error result in polar coordinate systems, become the founder of generally acknowledged modern main shaft measuring technology.Twentieth century six the seventies, in order to develop Ultraprecision Machining, U.S.'s Lao Lunsi-livermore national laboratory is studied spindle rotation error, has solved description, test and the spindle error motion of spindle motion error characteristic and the problem that concerns three aspects of workpiece form accuracy; Donaldson has proposed the error separation theorem so that spindle rotation error is affected by sensor accuracy, data acquisition and structural design etc. only; International production technology research association (CIRP) has formally delivered " about the unification of revolving shaft performance requirement and error determine " file through in a few years work in 1976.These files all become the basis (again this standard being made some modifications in 2004) of B89.3.4M international standard foundation in 1985.Enter after the nineties, carry out again in the world a series of high precision circularity and measured contrast, there are the Italian First Astronautic Research Institute for Measurement and Test (IMGC), Germany (PTB), Britain Tayor Hobson etc. in the unit that participates in, by these contrasts further perfect the basic theories of spindle rotation error.Again Error-motion in Rotation is decomposed into synchronous error motion and asynchronous error motion etc. in the ISO/FDIS230-7 international standard.At home; the units such as national universities Measurement Techniques of Mechanic Engineering research association, Chinese Mechanical Engineering Society, machining association begin to hold the academic discussion of national high-precision rotary main shaft test aspect from early eighties, obtained achievement has greatly promoted the development of China's spindle rotation error basic theories.
Aspect the measurement and analytical approach of spindle rotation error, the introducing of each new technology all makes the turn error test job produce very large leap.For example, digital processing technology and rotary encoder that Vanherck and Peters adopt have not only promoted the development of turn error measuring technology, and have been used widely at precision machine tool main shaft manufacture view; Arora and Murthy adopt respectively rotary transformer and digital notch filter to process the Rotational eccentricity problem; What Chapman adopted that capacitance displacement sensor realized 5nm resolution radially, axially reaches the banking motion error measure; Britain professor Whitehouse has carried out system summary in theory to error separating technology, makes the theoretical methods such as " multistep processes ", " reverse method ", and Chetwynd has carried out the error separating experiment according to said method, obtains nano level separation reproducibility error; The reversal process measuring technique that Estler and Donaldson adopt has effectively been removed the turn error of main shaft, and the correlation theory of further having inquired into Multiple probe technique and multi-index method is separated with turn error, compensation work.
At home, also carried out in recent years the research of multiple turn error measuring method.Adopt the lathe spindle turn error test macro based on double testing head of two-point method foundation such as the yellow Long March of University of Science and Technology for National Defence, two sensors circumferencial direction be separated by 180 symmetrical install fixing, lathe spindle when revolution sensor is motionless and pick up signal, then try to achieve the Error-motion in Rotation of main shaft by eliminating eccentric measure and error separating technology, and can try to achieve the deviation from circular from of test axle; Tan of Harbin Institute of Technology refined grade of a specified duration adopted multiple multistep processes identification and the circle contour error of separation criterion device and the gyration error of main shaft, mainly solve harmonic wave and suppressed problem, to eliminate the errors of principles, solve simultaneously the simplification problem of error detachment process, to reduce or to eliminate the impact of machinery, electric drift and external interference; Lee of Shanghai Communications University detects the gyration error of main shaft online from employing quadratic phase shift three point methods such as armies, three transducer probe assemblies that adopt the interval not wait obtain measurement data, and press quadratic phase shift principle recombination data, thereby isolate turn error; Chinese University of Science and Technology's Wang Weidong etc. utilizes digital image processing techniques, set up the CCD measuring system of a cover spindle rotation accuracy, adopt optical CCD to detect the light source position that is installed on the main shaft, and then the kinematic error amount when obtaining main shaft gyration, data are processed and error evaluation is inquired into.
Summarize in fact, the measuring method of present spindle rotation error mainly contains static measurement, dynamic many gauge heads method, multiple bearing method and measuring method etc.Wherein, static measurement is a kind of comparatively original measuring method, and it adopts sensor measurement standard circle contour under main shaft manually turns round at a slow speed, thereby measuring accuracy can't further improve.Dynamic many gauge heads method adopts two or more precision feelers that same circle contour is measured simultaneously, measures efficient high, is fit to on-line measurement; Yet because the restriction of the consistance of the biasing of many gauge heads and sensor characteristic is extensive not as the multiple bearing method in the application of high-precision application scenario.Dynamically the implementation method of multiple bearing has multiple, such as two-step approach, reversal process, multistep processes etc., the method is easy to realize, can reach the higher characteristics such as turn error separation accuracy, its shortcoming is the method error that (also there is Similar Problems in many gauge heads method) existence is brought by harmonic wave inhibition problem, needs analyzing and processing and the reconstruction of further measurement data; Measuring method can be realized not by standard (ball) and non-contacting metering system, use CCD to detect the light source position that is installed on the main shaft, and then the beating information when obtaining main shaft gyration, yet because the impacts such as optical diffraction, the method can't realize nano level cross measure resolution, therefore also just can't satisfy the turn error test problems of nano-precision.Can find out, the rotating accuracy level of accurate main shaft is wanted to reach the nanometer scale detection and is also had some important theory and key technical problems.
Summary of the invention
The objective of the invention is in order to solve the expensive standard excircle configuration of traditional accurate main shaft turn error measuring method needs or the problem of Complicated Testing System and test process, and then a kind of Measuring of Axis Rotating Accuracy detection method of analyzing based on the pattern registration is provided.
The objective of the invention is to be achieved through the following technical solutions:
One, surface sample is installed on the accurate main shaft to be measured, adjust the position of surface sample, make it near the centre of gyration of accurate main shaft to be measured; Two, regulate the surface microscopic topographic survey sensor with respect to the position of surface sample, so that the centre of gyration position of the measurement range of surface microscopic topographic survey sensor when covering surface sample with accurate main shaft rotation to be measured; Three, control system is controlled accurate main shaft to be measured to a certain angle position, measures a width of cloth surface topography map by the surface microscopic topographic survey sensor; Control system is controlled accurate main shaft to a to be measured angle
θThe position is measured a width of cloth surface topography map again; According to said process, gather successively accurate main shaft to be measured at the surface topography map of full circumferences position upper surface sample; Four, topographic data registration analysis process system is analyzed the some surface topography maps that obtain, and can obtain the turn error data of accurate main shaft to be measured, and carries out error assessment.Described topographic data registration analysis process system adopts the homogeneous coordinate transformation matrix theory of three-dimensional or two-dimentional rigid motion to calculate the turn error data of accurate main shaft to be measured.
Beneficial effect of the present invention: the present invention is by using survey sensor, to measuring and follow-up pattern registration analyzing and processing with the rotating surface sample pattern of accurate main shaft, realize the composite measurement of accurate main shaft turn error data, measuring method is simple, surface sample does not have very high accuracy requirement, do not need expensive standard excircle configuration or Complicated Testing System and test process, if select two-dimentional pattern/imageing sensor, can measure so the radially turn error of main shaft; If select the measuring three-dimensional morphology sensor, can measure simultaneously the radial and axial turn error of main shaft; Adopt the survey sensor of high resolving power (comprising vertical and horizontal), can realize that then the spindle rotation error of nano-precision detects.
Description of drawings
Fig. 1 is the measuring principle schematic diagram of the inventive method, and Fig. 2 is that the pattern registration of the inventive method is analyzed schematic diagram.
Embodiment
The better embodiment of the present invention is seen Fig. 1 and Fig. 2, at first, surface sample 2 is installed on the accurate main shaft 3 to be measured, adjusts the position of surface sample 2, makes it near the centre of gyration of accurate main shaft 3 to be measured; Two, regulate surface microscopic topographic survey sensor 1 with respect to the position of surface sample 2, so that the centre of gyration position of the measurement range of surface microscopic topographic survey sensor 1 when covering surface sample 2 with accurate main shaft 3 rotation to be measured; Three, control system 4 controls accurate main shaft 3 to be measured is measured a width of cloth surface topography map to a certain angle position (such as to 0 ° of position or origin position) by surface microscopic topographic survey sensor 1; 3 to angles of control system 4 control accurate main shafts to be measured
θPosition (can by angle uniformly-spaced in even circumferential some positions that distribute) is measured a width of cloth surface topography map again; According to said process, gather successively accurate main shaft 3 to be measured at the surface topography map of full circumferences position upper surface sample 2, these shape appearance figures are actually the same area on the surface sample 2 so, only along with the rotation of accurate main shaft 3 to be measured, these shape appearance figures are different on the locus, but all comprised accurate main shaft 3 turn error information to be measured.Four, topographic data registration analysis process system 5 is analyzed the some surface topography maps that obtain, and can obtain the turn error data of accurate main shaft 3 to be measured, and carries out error assessment.
The measuring accuracy of turn error and measuring error item depend primarily on measuring accuracy and the ability of surface microscopic topographic survey sensor 1 in the inventive method.If surface microscopic topographic survey sensor 1 is two-dimentional pattern/imageing sensor (such as optical microscope and CCD system), the present invention can be used to measure the radially turn error of accurate main shaft 3 to be measured so; If surface microscopic topographic survey sensor 1 is three-dimensional appearance sensor (such as white light interference microscope and or atomic force microscopy mirror system), the present invention then can be used to measure simultaneously the radial and axial turn error of accurate main shaft 3 to be measured so.The turn error measuring accuracy of accurate main shaft 3 to be measured and resolution mainly are subjected to the impact of precision and the resolution of surface microscopic topographic survey sensor 1.
Turn error computing method based on the analysis of topographic data registration also are to guarantee one of key that obtains high precision accurate main shaft turn error data.The embodiment of the topographic data registration analysis process system 5 of the inventive method is based on that the homogeneous coordinate transformation matrix theory of three-dimensional (or two dimension, the data that obtain for dimension sensor) rigid motion calculates.If accurate main shaft on a certain position, has obtained a width of cloth shape appearance figure of surface sample 2, a unique point is arranged on it
, rotate a certain known angle at main shaft
θAfter, this unique point changes on another width of cloth shape appearance figure
, establish the centre of gyration and exist
, then by rigid body around
ZThe Geometrical change relation of axle rotation has
In the following formula, two characteristic of correspondence point coordinate, the anglec of rotation are all known, so the rotation center coordinate can calculate.Since surface sample 2 in turning course only the locus variation has occured, point on the surface topography should be around some instantaneous centre points in revolution, therefore a plurality of unique points on the effects on surface pattern are carried out the registration analytical calculation, just can be turned round accurately the instantaneous centre position.By the instantaneous variation of the revolution of calculating all shape appearance figures, just can obtain the turn error data of tested accurate main shaft 3 on each angle position.
The homogeneous coordinate transformation matrix theory of rigid motion that topographic data registration analysis process system 5 of the present invention has adopted is three-dimensional (or two dimension, the data that obtain for dimension sensor) is calculated the turn error data of accurate main shaft 3 to be measured.Since surface sample 2 in turning course only the locus variation has occured, point on the surface topography should be around a common ground in revolution, therefore a plurality of unique points on the effects on surface pattern are carried out the registration analytical calculation, just can be turned round accurately the instantaneous centre position.Calculate the instantaneous variation of the revolution of accurate main shaft on each angle position, namely can obtain the turn error data of tested main shaft.
Claims (3)
1. a Measuring of Axis Rotating Accuracy detection method of analyzing based on the pattern registration is characterized in that, one, surface sample is installed on the accurate main shaft to be measured, and adjust the position of surface sample, make it near the centre of gyration of accurate main shaft to be measured; Two, regulate the surface microscopic topographic survey sensor with respect to the position of surface sample, so that the centre of gyration position of the measurement range of surface microscopic topographic survey sensor when covering surface sample with accurate main shaft rotation to be measured; Three, control system is controlled accurate main shaft to be measured to a certain angle position, measures a width of cloth surface topography map by the surface microscopic topographic survey sensor; Control system is controlled accurate main shaft to a to be measured angle
θThe position is measured a width of cloth surface topography map again; According to said process, gather successively accurate main shaft to be measured at the surface topography map of full circumferences position upper surface sample; Four, topographic data registration analysis process system is analyzed the some surface topography maps that obtain, and can obtain the turn error data of accurate main shaft to be measured, and carries out error assessment; Described topographic data registration analysis process system adopts the homogeneous coordinate transformation matrix theory of three-dimensional or two-dimentional rigid motion to calculate the turn error data of accurate main shaft to be measured.
2. method according to claim 1 is characterized in that, the surface microscopic topographic survey sensor is two-dimentional pattern or imageing sensor.
3. method according to claim 1 is characterized in that, the surface microscopic topographic survey sensor is the three-dimensional appearance sensor.
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