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CN102226738A - An infrared glass non-uniformity detection device and detection method - Google Patents

An infrared glass non-uniformity detection device and detection method Download PDF

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Publication number
CN102226738A
CN102226738A CN201110073411XA CN201110073411A CN102226738A CN 102226738 A CN102226738 A CN 102226738A CN 201110073411X A CN201110073411X A CN 201110073411XA CN 201110073411 A CN201110073411 A CN 201110073411A CN 102226738 A CN102226738 A CN 102226738A
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infrared
slit
control computer
line spread
optical transfer
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CN102226738B (en
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聂秋华
徐铁锋
宋宝安
戴世勋
吴礼刚
沈祥
王训四
林常规
杨燕
黄国松
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Ningbo University
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Ningbo University
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Abstract

The invention discloses an infrared glass non-uniformity detection apparatus and a detection method. The detection apparatus comprises an infrared light source, a bandpass optical filter, a quasi straight beam expanding lens, a test sample rack, a slit, a photoconductor and a control computer which are arranged in order. The detection apparatus is characterized in that a standard lens is provided between the test sample rack and the slit; the quasi straight beam expanding lens is provided on an up and down, left and right and pitching and deflect four-dimensional adjustable optics adjusting mount; the slit is fixedly provided on a first adjusting mount which can scan up and down and rotate within a plane vertical to an optical axis; the photoconductor is fixedly provided on a second adjusting mount which is up and down, left and right and back and forth three dimensional adjustable; the first adjusting mount and the second adjusting mount are connected to a position controller; the control computer is respectively connected to the infrared light source, the photoconductor and the position controller and the detection of the infrared glass non-uniformity data is realized through detecting the ray diffusion functions and the corresponding optical transfer functions before and after an infrared glass sample to be measured is put.

Description

A kind of infrared glass heterogeneity pick-up unit and detection method
Technical field
The present invention relates to a kind of infrared glass detection technique, especially relate to a kind of infrared glass heterogeneity pick-up unit and detection method.
Background technology
Infrared glass can see through wide spectrum invisible light, can not see through visible light, has less heat difference coefficient and higher refractive index, and its refractive index and germanium single crystal differ bigger, can constitute the camera lens that possesses disappear heat difference and achromatism function simultaneously with germanium single crystal; In addition, infrared glass is fit to accurate die pressing, and its production cost is lower; The field that at present infrared glass has been widely used in that rifle is taken aim at, navigation, interspace life detection, on-vehicle night vision etc. need infrared thermal imaging.But along with the fast development of science and technology, each application also improves day by day to the quality requirements of infrared glass.Quality and precision in order to guarantee product obtain thermal imagery clearly, have higher transmittance, the less unrelieved stress except requiring infrared glass, also require infrared glass to have the good optical homogeneity.
Stipulated the detection method and the corresponding rank standard of the optical heterogeneity of glass in the ordinary optical glass national standard, detection method mainly contains resolution method, asterism method, road junction shadowing method and interferometric method etc.But the prerequisite of carrying out these detection methods is a glass can see through visible light.Because the not saturating visible light of infrared glass uses above-mentioned detection method to detect the infrared glass optical heterogeneity and need overcome a lot of problems, brings very big difficulty to detection; Though utilize infrared planar array detector spare to detect the infrared glass heterogeneity in addition, its member costs an arm and a leg, resolution is lower, and measuring accuracy is not enough.
Summary of the invention
It is low that technical matters to be solved by this invention provides a kind of cost, precision height, the pick-up unit and the detection method that can detect the infrared glass heterogeneity.
The present invention solves the problems of the technologies described above the technical scheme that is adopted: a kind of infrared glass heterogeneity pick-up unit, comprise tactic infrared light supply, bandpass filter, the collimator and extender mirror, the specimen frame, slit, infrared eye and control computer, be provided with standard lens between described specimen frame and the described slit, described collimator and extender mirror is installed on the four-dimensional adjustable optical adjusting frame of pitching deflection up and down, described slit both was fixedly mounted on and can scans up and down, also on first adjustment rack that can in plane, be rotated perpendicular to optical axis, before and after described infrared eye is fixedly mounted on up and down on the three-dimensional accurate second adjustable adjustment rack, described first adjustment rack is connected with positioner with described second adjustment rack, described control computer respectively with described infrared light supply, described infrared eye is connected with described positioner.
Described infrared eye is a point probe, and described collimator and extender mirror is an infrared telescope.
Use the heteropical detection method of infrared glass of above-mentioned detection device, it may further comprise the steps:
(1), regulate the position of infrared light supply, bandpass filter, collimator and extender mirror, standard lens, slit and infrared eye, make their center have identical height and coaxial;
(2), use control computer to receive the data of infrared light supply and infrared eye, adjust the position of second adjustment rack according to the data-driven positioner that receives, the light intensity that infrared eye is received is the strongest;
(3), use control computer activation point controller to adjust first adjustment rack, slit is scanned standard lens in meridian ellipse and Hu Shi face, the slit scan signal that infrared eye is received is transferred to control computer and obtains first line spread function, and first line spread function is obtained first optical transfer function by Fourier transform;
(4), infrared glass sample to be measured is placed on the specimen frame between collimator and extender mirror and the standard lens repeating step (2);
(5), use control computer to adjust first adjustment rack, slit is scanned standard lens in meridian ellipse and Hu Shi face, the slit scan signal that infrared eye is received is transferred to control computer and obtains second line spread function, and second line spread function is obtained second optical transfer function by Fourier transform;
(6), the central value with first line spread function and second line spread function compares, obtain two equations of the ecentre between the line spread function, first optical transfer function and second optical transfer function are compared, obtain the difference of two optical transfer functions, and determine the heterogeneity of tested infrared glass by the difference of the equation of the ecentre between two line spread functions and two optical transfer functions.
Before detection, earlier the surface of infrared glass sample to be measured is carried out precise polishedly, adopt laser interferometer to detect its surface light number of turns N and local f-number Δ N all less than 1.
Compared with prior art, the invention has the advantages that: by the standard lens that is provided with, the central value of the line spread function that the measurement standard lens are obtained compares with the central value of the line spread function of measuring the standard lens that is subjected to infrared glass sample effects to be measured, draw the equation of the ecentre of two line spread functions, adopt Fourier transform method to be converted to modulation transfer function MTF respectively two line spread functions again, the difference of two optical transfer function MTF can be obtained, the optical heterogeneity of infrared glass sample can be determined by above-mentioned two characteristics; Pick-up unit of the present invention is simple in structure, the measuring accuracy height, and in addition because infrared eye can adopt point probe, low price, cost is low.In detection method of the present invention, before detection, carry out precise polished to the surface of infrared glass sample to be measured earlier, adopt laser interferometer to detect its surface light number of turns N and local f-number Δ N, can eliminate the influence of infrared glass sample surfaces state to be measured the optical heterogeneity testing result all less than 1.
Description of drawings
Fig. 1 is the structural representation of pick-up unit of the present invention.
Embodiment
Embodiment describes in further detail the present invention below in conjunction with accompanying drawing.
As shown in Figure 1, a kind of infrared glass nonuniform measurement device, comprise infrared light supply 1, bandpass filter 2, infrared telescope 3, specimen frame (figure does not show), standard lens 5, slit 6 and infrared eye 7, infrared telescope 3 is installed on the four-dimensional adjustable optical adjusting frame of pitching deflection up and down (figure does not show), slit 6 both was fixedly mounted on and can scans up and down, also on first adjustment rack that can in plane, be rotated (figure does not show) perpendicular to optical axis, before and after infrared eye 7 is fixedly mounted on up and down on the three-dimensional accurate second adjustable adjustment racks (figure shows), first adjustment rack is connected with positioner 8 respectively with second adjustment rack, infrared eye 7 is connected with control computer 9, and control computer 9 is connected with infrared light supply 1.
Below in conjunction with Fig. 1, the method for using above-mentioned detection device to carry out the detection of infrared glass heterogeneity specifically is described below:
Infrared glass sample 4 to be measured is a chalcogenide glass, its service band is 8～12 μ m, infrared light supply 1 is for covering the broadband infrared light source of 8～12 μ m, and bandpass filter 2 is the bandpass filter by 8～12 μ m light sources, and infrared telescope 3 is infrared collimator and extender telescope; In addition in order to remove the influence of surface state to the optical homogeneity testing result, the surface of infrared glass sample 4 to be measured is carried out precise polished, adopt laser interferometer to detect its surface light number of turns N and local f-number Δ N all less than 1; The precision that first adjustment rack scans up and down is 1 μ m, swash width 250 μ m.
Before putting into infrared glass sample 4 to be measured, regulate infrared light supply 1, bandpass filter 2, infrared telescope 3, standard lens 5, slit 6 and infrared eye 7, make its center have identical height and coaxial, control computer 9 receives the data of infrared light supply 1 and infrared eye 7 transmission, detect data and activation point controller 8 in real time and regulate the position of infrared eye 7, the strongest position of light intensity is adjusted in the position of infrared eye 7; After infrared light supply 1 passes through bandpass filter 2 and infrared telescope 3, form the secondary color parallel plane ripple of 8～12 μ m, this plane wave is by behind the standard lens 5, converge on the infrared eye 7, form Airy spot, control computer 9 activation point controllers 8 controls first adjustment rack, slit 6 is scanned in meridian ellipse and Hu Shi face, infrared eye 7 collects the scan-data of slit 6 and is transferred to control computer 9, obtain first line spread function, then first line spread function is carried out Fourier transform, obtain first optical transfer function;
Infrared glass sample 4 to be measured is put on the specimen frame between infrared telescope 3 and the standard lens 5, regulate infrared light supply 1, bandpass filter 2, infrared telescope 3, standard lens 5, slit 6 and infrared eye 7, make its center have identical height and coaxial, control computer 9 receives the data of infrared light supply 1 and infrared eye 7 transmission, detect data and activation point controller 8 in real time and regulate the position of infrared eye 7, the strongest position of light intensity is adjusted in the position of infrared eye 7; After infrared light supply 1 passes through bandpass filter 2 and infrared telescope 3, form the secondary color parallel plane ripple of 8～12 μ m, this plane wave is by behind the standard lens 5, converge on the infrared eye 7, form Airy spot, control computer 9 activation point controllers 8 controls first adjustment rack, slit 6 is scanned in meridian ellipse and Hu Shi face, infrared eye 7 collects the scan-data of slit 6 and is transferred to control computer 9, obtain second line spread function, then second line spread function is carried out Fourier transform, obtain second optical transfer function;
By the central value of more above-mentioned first line spread function that obtains and second line spread function, can obtain the equation of the ecentre of two line spread functions; By more above-mentioned first optical transfer function that obtains and second optical transfer function, can draw the difference of two optical transfer functions, can determine the heterogeneity of infrared glass sample 4 to be measured by above-mentioned two characteristics.
Infrared eye 7 can use the cheap point probe of price comparison in the foregoing description, also can realize the heteropical detection of infrared glass when reducing cost.
Optical adjusting frame in the foregoing description, first adjustment rack and second adjustment rack all can use the matured product in present technique field.

Claims (4)

1.一种红外玻璃非均匀性检测装置，包括顺序排列的红外光源、带通滤光片、准直扩束镜、测试样品架、狭缝、红外探测器和控制计算机，其特征在于所述的测试样品架和所述的狭缝之间设置有标准透镜，所述的准直扩束镜安装在上下左右俯仰偏转四维可调的光学调整架上，所述的狭缝固定安装在既可上下扫描，也可在垂直于光轴的平面内进行旋转的第一调整架上，所述的红外探测器固定安装在上下左右前后三维精密可调的第二调整架上，所述的第一调整架和所述的第二调整架与位置控制器连接，所述的控制计算机分别与所述的红外光源、所述的红外探测器和所述的位置控制器连接。1. An infrared glass non-uniformity detection device, comprising an infrared light source arranged in sequence, a bandpass filter, a collimating beam expander, a test sample holder, a slit, an infrared detector and a control computer, is characterized in that the A standard lens is provided between the test sample holder and the slit, and the collimator beam expander is installed on a four-dimensional adjustable optical adjustment frame for up, down, left, and right pitch deflection, and the slit is fixedly installed on either Scanning up and down can also be performed on the first adjustment frame that rotates in a plane perpendicular to the optical axis. The adjustment frame and the second adjustment frame are connected with the position controller, and the control computer is respectively connected with the infrared light source, the infrared detector and the position controller. 2.根据权利要求1所述的一种红外玻璃非均匀性测量装置，其特征在于所述的红外探测器为点探测器，所述的准直扩束镜为红外望远镜。2. An infrared glass non-uniformity measuring device according to claim 1, characterized in that said infrared detector is a point detector, and said collimating beam expander is an infrared telescope. 3.一种使用权利要求1所述的检测装置的红外玻璃非均匀性的检测方法，其特征在于它包括以下步骤：3. a detection method using the infrared glass non-uniformity of detection device claimed in claim 1, is characterized in that it comprises the following steps: (1)、调节红外光源、带通滤波器、准直扩束镜、标准透镜、狭缝和红外探测器的位置，使它们的中心具有相同的高度且同轴；(1), adjust the position of infrared light source, band-pass filter, collimating beam expander, standard lens, slit and infrared detector, make their centers have the same height and coaxial; (2)、使用控制计算机接收红外光源和红外探测器的数据，根据接收到的数据驱动位置控制器调整第二调整架的位置，使红外探测器接收到的光强度最强；(2), use the control computer to receive the data of the infrared light source and the infrared detector, and drive the position controller to adjust the position of the second adjustment frame according to the received data, so that the light intensity received by the infrared detector is the strongest; (3)、使用控制计算机驱动位置控制器调整第一调整架，使狭缝在子午面和弧氏面内对标准透镜进行扫描，将红外探测器接收到的狭缝扫描信号传输给控制计算机得到第一线扩散函数，将第一线扩散函数通过傅里叶变换得到第一光学传递函数；(3), use the control computer to drive the position controller to adjust the first adjustment frame, so that the slit scans the standard lens in the meridian plane and the arcus plane, and transmits the slit scanning signal received by the infrared detector to the control computer to obtain The first line spread function is obtained by Fourier transforming the first line spread function to obtain the first optical transfer function; (4)、将待测红外玻璃样品放置在准直扩束镜与标准透镜之间的测试样品架上，重复步骤(2)；(4), place the infrared glass sample to be tested on the test sample holder between the collimating beam expander and the standard lens, and repeat step (2); (5)、使用控制计算机调整第一调整架，使狭缝在子午面和弧氏面内对标准透镜进行扫描，将红外探测器接收到的狭缝扫描信号传输给控制计算机得到第二线扩散函数，将第二线扩散函数通过傅里叶变换得到第二光学传递函数；(5) Use the control computer to adjust the first adjustment frame so that the slit scans the standard lens in the meridian plane and the arcuate plane, and transmit the slit scanning signal received by the infrared detector to the control computer to obtain the second line spread function , the second line spread function is obtained by Fourier transform to obtain the second optical transfer function; (6)、将第一线扩散函数和第二线扩散函数的中心值进行比较，得到两个线扩散函数之间的中心差，将第一光学传递函数和第二光学传递函数进行比较，得到两个光学传递函数的差值，并由两个线扩散函数之间的中心差和两个光学传递函数的差值确定被测红外玻璃的非均匀性。(6), compare the central value of the first line spread function and the second line spread function, obtain the center difference between the two line spread functions, compare the first optical transfer function and the second optical transfer function, obtain two The difference between two optical transfer functions, and the non-uniformity of the measured infrared glass is determined by the center difference between the two line spread functions and the difference between the two optical transfer functions. 4.如权利要求3所述的红外玻璃非均匀性的检测方法，其特征在于在检测前先对待测红外玻璃样品的表面进行精密抛光，采用激光干涉仪检测其表面光圈数N和局部光圈数ΔN均小于1。4. the detection method of infrared glass inhomogeneity as claimed in claim 3 is characterized in that before detection, the surface of the infrared glass sample to be measured is carried out precision polishing, adopts laser interferometer to detect its surface aperture number N and local aperture number ΔN is less than 1.
CN 201110073411 2011-03-25 2011-03-25 Infrared glass non-uniformity detection method Expired - Fee Related CN102226738B (en)

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Cited By (8)

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CN103278311A (en) * 2013-05-16 2013-09-04 中国电子科技集团公司第四十一研究所 Uniformity measurement device and method for infrared radiation surface
CN104797906A (en) * 2011-12-20 2015-07-22 3M创新有限公司 Sensor for measuring surface non-uniformity
CN107146211A (en) * 2017-06-08 2017-09-08 山东师范大学 Noise Reduction Method for Retinal Vascular Images Based on Line Spread Function and Bilateral Filtering
WO2020078213A1 (en) * 2018-10-19 2020-04-23 中国兵器工业标准化研究所 Temperature impact assessment and control method for infrared optical material uniformity test
CN111595779A (en) * 2020-05-11 2020-08-28 中国科学院西安光学精密机械研究所 A debugging-free slit light source module with the function of purifying the light path
CN112525847A (en) * 2020-12-03 2021-03-19 中国科学院上海技术物理研究所 Wide-temperature-zone condensable volatile real-time spectrum testing device and testing method
CN113155415A (en) * 2021-04-18 2021-07-23 倪国娟 A kind of optical glass lens quality detection system and using method thereof
CN115351854A (en) * 2022-08-22 2022-11-18 江苏金泰祥内外门业有限公司 Multi-axis functional household machining device

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104797906A (en) * 2011-12-20 2015-07-22 3M创新有限公司 Sensor for measuring surface non-uniformity
CN103278311A (en) * 2013-05-16 2013-09-04 中国电子科技集团公司第四十一研究所 Uniformity measurement device and method for infrared radiation surface
CN103278311B (en) * 2013-05-16 2015-12-09 中国电子科技集团公司第四十一研究所 A kind of infrared radiation surface uniformity measurement mechanism and method
CN107146211A (en) * 2017-06-08 2017-09-08 山东师范大学 Noise Reduction Method for Retinal Vascular Images Based on Line Spread Function and Bilateral Filtering
WO2020078213A1 (en) * 2018-10-19 2020-04-23 中国兵器工业标准化研究所 Temperature impact assessment and control method for infrared optical material uniformity test
US10809191B1 (en) 2018-10-19 2020-10-20 China North Standardization Center Method for evaluating and controlling temperature influence on a homogeneity test for infrared optical materials
CN111595779A (en) * 2020-05-11 2020-08-28 中国科学院西安光学精密机械研究所 A debugging-free slit light source module with the function of purifying the light path
CN112525847A (en) * 2020-12-03 2021-03-19 中国科学院上海技术物理研究所 Wide-temperature-zone condensable volatile real-time spectrum testing device and testing method
CN113155415A (en) * 2021-04-18 2021-07-23 倪国娟 A kind of optical glass lens quality detection system and using method thereof
CN115351854A (en) * 2022-08-22 2022-11-18 江苏金泰祥内外门业有限公司 Multi-axis functional household machining device

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