CN102220133A - Stripping solution of titanium carbide and/or titanium nitride film and stripping method - Google Patents
Stripping solution of titanium carbide and/or titanium nitride film and stripping method Download PDFInfo
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- CN102220133A CN102220133A CN2010101500105A CN201010150010A CN102220133A CN 102220133 A CN102220133 A CN 102220133A CN 2010101500105 A CN2010101500105 A CN 2010101500105A CN 201010150010 A CN201010150010 A CN 201010150010A CN 102220133 A CN102220133 A CN 102220133A
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- nitride film
- acid
- titanium nitride
- titanium
- stripping liquid
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
- C23G1/086—Iron or steel solutions containing HF
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Detergent Compositions (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
The invention provides a stripping solution of titanium carbide and/or titanium nitride films, which is an aqueous solution comprising an acid, an accelerator, a promoter and a corrosion inhibitor, wherein the acid is an organic acid or an inorganic acid, and has an acid concentration of 90-1000 g/L; the accelerator is an acid or a salt containing a fluoride ion, and has a concentration of 70-500 g/L; the promoter is an alcohol amine organic compound, and has a concentration of 15-200 g/L; the corrosion inhibitor is one of or a combination of more than one of thiourea and thiourea derivatives, and has a concentration of 2-8 g/L. The invention also provides a stripping method of the titanium carbide and/or titanium nitride film, and the method comprises the contact of the titanium carbide and/or titanium nitride film and a stripping solution, wherein the stripping solution is the stripping solution provided by the invention.
Description
Technical field
The present invention relates to a kind of method that strips the solution of substrate surface titanium carbide and/or titanium nitride film and utilize this solution stripping titanium carbide and/or titanium nitride film.
Background technology
Coating process has a wide range of applications at industrial circle.Yet needing plated film is stripped under following two kinds of situations usually: through behind the life-time service, the plated film of workpiece surface has been damaged or serious aging (1), thereby needs to remove coating, plating again; (2) aborning, the coating of institute's plating does not meet quality requirements, for reducing the loss, saves cost, need return coating, allows the workpiece plated film again of doing over again.Therefore, how under the situation of not damaging base material, it is a major issue the industrial production that coating is removed fully from substrate surface.
Titanium carbide (TiC) and titanium nitride (TiN) rete have very strong anti-oxidant, erosion resistance, and hardness height, toughness are strong, and chemical stability is good, and wear resisting property is good, has broad prospects at industrial circle.But, also do not have at present a kind of can be under the situation of not damaging base material, stable, strip the solution and the method for titanium carbide and/or titanium nitride film effectively.
Summary of the invention
In view of this, be necessary to provide a kind of not easy damaged base material, and can stablize, strip effectively the stripping liquid of titanium carbide and/or titanium nitride film.
In addition, also be necessary to provide a kind of method of using above-mentioned stripping liquid stripping titanium carbide and/or titanium nitride film.
The stripping liquid of a kind of titanium carbide and/or titanium nitride film, this stripping liquid are the aqueous solution that contains acid and accelerator, promotor and inhibiter, and wherein said acid is organic acid or mineral acid, and this sour concentration is 90～1000g/L; This accelerator is the acid or the salt of fluoride ion, and the concentration of this accelerator is 70～500g/L; This promotor is the alcamines organic compound, the concentration 15～200g/L of this promotor; This inhibiter is the derivative of thiocarbamide, thiocarbamide and one or several the combination in the urea, and the concentration of this inhibiter is 2～8g/L.
The stripping method of a kind of titanium carbide and/or titanium nitride film comprises titanium carbide and/or titanium nitride film are contacted with stripping liquid that wherein this stripping liquid is above-mentioned stripping liquid of the present invention.
Compared to prior art, substrate surface was not corroded after the stripping liquid of described titanium carbide and/or titanium nitride film and the stripping method of titanium carbide and/or titanium nitride film made and move back film, and can stablize, strip effectively titanium carbide and/or titanium nitride film.
Embodiment
Stripping liquid of the present invention is applicable to that stripping is formed at the titanium carbide and/or the titanium nitride film of substrate surface.Titanium carbide of the present invention and/or titanium nitride film comprise the rete that formed by titanium carbide, the rete that is formed by titanium nitride and the rete that is formed jointly by titanium carbide and titanium nitride.Described base material comprises ferrous alloy, copper, copper alloy and plastics.
Stripping liquid of the present invention is the aqueous solution that contains acid and accelerator, promotor and inhibiter.Wherein said acid can be that hydrionic organic acid or mineral acid can be provided, and for example, can be preferably sulfuric acid for one or more the mixture in the acid such as sulfuric acid, acetic acid, citric acid and lactic acid.This sour concentration can be 90～1000g/L, is preferably 90～750g/L.
Described accelerator plays and promotes metal ion dissolved effect in titanium carbide and/or the titanium nitride film.This accelerator can be compounds such as the acid of fluoride ion or salt, such as being preferably hydrofluoric acid and/or ammonium bifluoride for one or several the mixture in the compounds such as hydrofluoric acid, ammonium bifluoride, Sodium Fluoride, Potassium monofluoride, Sodium tetrafluoroborate and sodium fluozirconate.The concentration of accelerator can be 70～500g/L, is preferably 75～300g/L.
Described promotor is risen in stripping liquid and is reduced solution interface tension force, auxiliary rete dissolving, and the effect of promotion hydrogen ion rapid osmotic.This promotor be in the alcamines organism can with titanium bonded compound, as trolamine, Monoethanolamine MEA BASF and diethanolamine etc., it can be preferably trolamine for one or more the mixture in the above compound.The concentration of promotor is 15～200g/L, is preferably 30～80g/L.
Described inhibiter plays the corrosive effect that the protection base material is avoided acid in stripping liquid.Inhibiter can be preferably thiocarbamide and derivative thereof for the derivative of thiocarbamide, thiocarbamide and one or several the mixture in the urea.The concentration of inhibiter is 2～8g/L, is preferably 3～5g/L.
This stripping liquid can be by making above-mentioned acid, accelerator, promotor and inhibiter are water-soluble.
Utilize the titanium carbide on the above-mentioned stripping liquid stripping base material and/or the method for titanium nitride film to comprise that the base material that will be formed with titanium carbide and/or titanium nitride film contacts with this stripping liquid, so that this titanium carbide and/or titanium nitride film strip fully.The described way of contact comprises soaks and spray.The temperature of stripping liquid is 20～30 ℃ during contact, and be 0.5～2 hour duration of contact.Base material washs base material and drying after liquid contact with stripping.
The present invention is described in more detail below by embodiment.
Embodiment 1
1. preparation strips liquid
Get the deionized water of 500ml, adding 50ml weight concentration is 98% sulfuric acid in deionized water, add the 5g thiocarbamide again, after being stirred to thiocarbamide and dissolving fully, adding the 200ml weight percent concentration and be 40% hydrofluoric acid solution and 50ml weight percent concentration is 80% trolamine, mending deionized water at last, to make liquor capacity be 1000ml, obtains stripping liquid.In this stripping liquid, vitriolic concentration is 90.16g/L, and the concentration of hydrofluoric acid is 90.4g/L, and the concentration of trolamine is 40.8g/L.
2. strip titanium carbide and/or titanium nitride film
Get sample that the stainless steel substrate surface is formed with titanium carbide and/or titanium nitride film several, the thickness of this titanium carbide and/or titanium nitride film is approximately 2 μ m.Sample is immersed in fully in 25 ℃ the stripping liquid of above-mentioned preparation and soaked stripping titanium carbide and/or titanium nitride film 1.5 hours.Take out sample, water cleans up the back oven dry.
Embodiment 2
1. preparation strips liquid
Get the deionized water of 500ml, adding 55ml weight concentration is 98% sulfuric acid in deionized water, add the 5g thiocarbamide again, after being stirred to thiocarbamide and dissolving fully, add the 175ml weight percent concentration and be 40% hydrofluoric acid solution and 55ml weight percent concentration and be 80% triethanolamine solution, mending deionized water at last, to make liquor capacity be 1000ml, obtains stripping liquid.In this stripping liquid, vitriolic concentration is 99.18g/L, and the concentration of hydrofluoric acid is 79.11g/L, and the concentration of trolamine is 44.88g/L.
2. stripping rete
Get sample that the stainless steel substrate surface is formed with titanium carbide and/or titanium nitride film several, the thickness of this titanium carbide and/or titanium nitride film is approximately 1.5 μ m.Sample is immersed in fully in the stripping liquid of the above-mentioned preparation under the room temperature and soaked 1 hour, stripping titanium carbide and/or titanium nitride film.Take out sample, water cleans up the back oven dry.
Embodiment 3
1. preparation strips liquid
Get the 500ml temperature and be the deionized water about 50 ℃, 400g ammonium bifluoride and 5g thiocarbamide are dissolved in the deionized water, add the 400ml weight percent concentration then and be 36% acetum and 20ml weight percent concentration and be 80% triethanolamine solution, add deionized water again and make liquor capacity, obtain stripping liquid to 1000ml.In this stripping liquid, the concentration of acetic acid is 145g/L, and the concentration of trolamine is 16.32g/L.
2. stripping rete
Get sample that the stainless steel substrate surface is formed with titanium carbide and/or titanium nitride film several, the thickness of this titanium carbide and/or titanium nitride film is approximately 2 μ m.Sample is immersed in fully in the stripping liquid of the above-mentioned preparation under the room temperature and soaked 2 hours, stripping titanium carbide and/or titanium nitride film.Take out sample, water cleans up the back oven dry.
Embodiment 4-6
Respectively according to the preparation stripping of the method described in embodiment 1-3 liquid, different is, the stainless steel substrate among the embodiment 1-3 is replaced with the copper base material, moves back film respectively with under the same terms of embodiment 1-3.
Sample behind the stripping rete in the foregoing description 1 to embodiment 6 is done X-ray diffraction (X-RD) analysis, do not find that all the Ti element exists, and proves that rete strips fully; Sample behind the stripping rete is carried out scanning electron microscope (SEM) test, find that base material is not all corroded.
Claims (14)
1. the stripping liquid of titanium carbide and/or titanium nitride film, it is characterized in that: this stripping liquid is the aqueous solution that contains acid and accelerator, promotor and inhibiter, and wherein said acid is organic acid or mineral acid, and this sour concentration is 90～1000g/L; This accelerator is the acid or the salt of fluoride ion, and the concentration of this accelerator is 70～500g/L; This promotor is the alcamines organic compound, the concentration 15～200g/L of this promotor; This inhibiter is the derivative of thiocarbamide, thiocarbamide and one or several the combination in the urea, and the concentration of this inhibiter is 2～8g/L.
2. the stripping liquid of titanium carbide as claimed in claim 1 and/or titanium nitride film is characterized in that: described acid is one or more the mixture in sulfuric acid, acetic acid, citric acid and the lactic acid.
3. the stripping liquid of titanium carbide as claimed in claim 2 and/or titanium nitride film is characterized in that: described acid is sulfuric acid or acetic acid.
4. the stripping liquid of titanium carbide as claimed in claim 1 and/or titanium nitride film is characterized in that: this sour concentration is 90～750g/L.
5. the stripping liquid of titanium carbide as claimed in claim 1 and/or titanium nitride film is characterized in that: described accelerator is one or several the mixture in hydrofluoric acid, ammonium bifluoride, Sodium Fluoride, Potassium monofluoride, Sodium tetrafluoroborate and the sodium fluozirconate.
6. the stripping liquid of titanium carbide as claimed in claim 5 and/or titanium nitride film is characterized in that: described accelerator is hydrofluoric acid and/or ammonium bifluoride.
7. the stripping liquid of titanium carbide as claimed in claim 1 and/or titanium nitride film is characterized in that: the concentration of this accelerator is 75～300g/L.
8. the stripping liquid of titanium carbide as claimed in claim 1 and/or titanium nitride film is characterized in that: described promotor is one or more the mixture in trolamine, Monoethanolamine MEA BASF and the diethanolamine.
9. the stripping liquid of titanium carbide as claimed in claim 1 and/or titanium nitride film is characterized in that: the concentration 30～80g/L of described promotor.
10. the stripping liquid of titanium carbide as claimed in claim 1 and/or titanium nitride film is characterized in that: described inhibiter is the derivative of thiocarbamide or thiocarbamide.
11. the stripping liquid of titanium carbide as claimed in claim 1 and/or titanium nitride film is characterized in that: the concentration of described inhibiter is 3～5g/L.
12. the stripping method of titanium carbide and/or titanium nitride film, this method comprises: the titanium carbide and/or the titanium nitride film that will be formed at substrate surface contact with stripping liquid, and this stripping liquid is as any described stripping liquid of claim 1～9.
13. the stripping method of titanium carbide as claimed in claim 12 and/or titanium nitride film is characterized in that: the temperature of stripping liquid is 20～30 ℃ during described the contact, and be 0.5～2 hour duration of contact.
14. the stripping method of titanium carbide as claimed in claim 12 and/or titanium nitride film is characterized in that: described base material is a kind of in ferrous alloy, copper, copper alloy and the plastics.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010150010.5A CN102220133B (en) | 2010-04-19 | 2010-04-19 | Stripping solution of titanium carbide and/or titanium nitride film and stripping method |
| US12/974,200 US20110253169A1 (en) | 2010-04-19 | 2010-12-21 | Solution for removing titanium-containing coatings and method for same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010150010.5A CN102220133B (en) | 2010-04-19 | 2010-04-19 | Stripping solution of titanium carbide and/or titanium nitride film and stripping method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102220133A true CN102220133A (en) | 2011-10-19 |
| CN102220133B CN102220133B (en) | 2014-02-12 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010150010.5A Expired - Fee Related CN102220133B (en) | 2010-04-19 | 2010-04-19 | Stripping solution of titanium carbide and/or titanium nitride film and stripping method |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20110253169A1 (en) |
| CN (1) | CN102220133B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102644079A (en) * | 2012-05-04 | 2012-08-22 | 哈尔滨工业大学（威海） | Removing solution of nickel phosphorus alloy coating on magnesium alloy |
| CN102899667A (en) * | 2012-09-11 | 2013-01-30 | 珠海承鸥卫浴用品有限公司 | Application of aqueous solution of ammonium bifluoride in de-plating of PVD decorative film |
| CN109554710A (en) * | 2018-12-25 | 2019-04-02 | 广东富行洗涤剂科技有限公司 | A kind of acid decoating liquid and obstacles in quit containing titanium coating |
| CN110387237A (en) * | 2018-04-20 | 2019-10-29 | 蓝思科技（长沙）有限公司 | It is a kind of to take off plating solution and its preparation method and application for taking off plating NCVM layers |
| CN110616432A (en) * | 2019-08-26 | 2019-12-27 | 广东药科大学 | Zirconium-containing film layer removing liquid and use method thereof |
| CN111850564A (en) * | 2020-07-16 | 2020-10-30 | 桂林理工大学 | A kind of titanium compound film layer stripping solution and stripping method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102234513A (en) * | 2010-04-20 | 2011-11-09 | 深圳富泰宏精密工业有限公司 | Stripping solution for titanium-containing film and using method for stripping solution |
| CN103046052B (en) * | 2012-12-27 | 2016-01-20 | 广东山之风环保科技有限公司 | The stripping liquid of environment-friendly type titanium-containing film and using method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1735671A (en) * | 2002-12-10 | 2006-02-15 | 高级技术材料公司 | Passivative chemical mechanical polishing composition for copper film planarization |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3622391A (en) * | 1969-04-04 | 1971-11-23 | Alloy Surfaces Co Inc | Process of stripping aluminide coating from cobalt and nickel base alloys |
| US3844859A (en) * | 1969-12-16 | 1974-10-29 | Boeing Co | Titanium chemical milling etchant |
| US5932024A (en) * | 1997-07-01 | 1999-08-03 | Moore; Jesse C. | Decoating titanium and other metallized glass surfaces |
| JP4159334B2 (en) * | 2002-09-30 | 2008-10-01 | 新日本製鐵株式会社 | Discoloration removal cleaning agent and discoloration removal cleaning method for titanium and titanium alloy building materials |
| US7611588B2 (en) * | 2004-11-30 | 2009-11-03 | Ecolab Inc. | Methods and compositions for removing metal oxides |
| KR101444468B1 (en) * | 2005-10-05 | 2014-10-30 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | Oxidizing aqueous cleaner for the removal of post-etch residues |
-
2010
- 2010-04-19 CN CN201010150010.5A patent/CN102220133B/en not_active Expired - Fee Related
- 2010-12-21 US US12/974,200 patent/US20110253169A1/en not_active Abandoned
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1735671A (en) * | 2002-12-10 | 2006-02-15 | 高级技术材料公司 | Passivative chemical mechanical polishing composition for copper film planarization |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102644079A (en) * | 2012-05-04 | 2012-08-22 | 哈尔滨工业大学（威海） | Removing solution of nickel phosphorus alloy coating on magnesium alloy |
| CN102644079B (en) * | 2012-05-04 | 2013-09-11 | 哈尔滨工业大学（威海） | Removing solution of nickel phosphorus alloy coating on magnesium alloy |
| CN102899667A (en) * | 2012-09-11 | 2013-01-30 | 珠海承鸥卫浴用品有限公司 | Application of aqueous solution of ammonium bifluoride in de-plating of PVD decorative film |
| CN102899667B (en) * | 2012-09-11 | 2015-01-07 | 珠海承鸥卫浴用品有限公司 | Application of aqueous solution of ammonium bifluoride in de-plating of PVD decorative film |
| CN110387237A (en) * | 2018-04-20 | 2019-10-29 | 蓝思科技（长沙）有限公司 | It is a kind of to take off plating solution and its preparation method and application for taking off plating NCVM layers |
| CN110387237B (en) * | 2018-04-20 | 2021-05-18 | 蓝思科技（长沙）有限公司 | Deplating solution for deplating NCVM (non-conductive metallization) layer and preparation method and application thereof |
| CN109554710A (en) * | 2018-12-25 | 2019-04-02 | 广东富行洗涤剂科技有限公司 | A kind of acid decoating liquid and obstacles in quit containing titanium coating |
| CN110616432A (en) * | 2019-08-26 | 2019-12-27 | 广东药科大学 | Zirconium-containing film layer removing liquid and use method thereof |
| CN111850564A (en) * | 2020-07-16 | 2020-10-30 | 桂林理工大学 | A kind of titanium compound film layer stripping solution and stripping method |
Also Published As
| Publication number | Publication date |
|---|---|
| US20110253169A1 (en) | 2011-10-20 |
| CN102220133B (en) | 2014-02-12 |
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