[go: up one dir, main page]

CN102217193B - Elastic wave filter device and module comprising the elastic wave filter device - Google Patents

Elastic wave filter device and module comprising the elastic wave filter device Download PDF

Info

Publication number
CN102217193B
CN102217193B CN200980144079.2A CN200980144079A CN102217193B CN 102217193 B CN102217193 B CN 102217193B CN 200980144079 A CN200980144079 A CN 200980144079A CN 102217193 B CN102217193 B CN 102217193B
Authority
CN
China
Prior art keywords
wave filter
acoustic wave
electrode
filter device
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200980144079.2A
Other languages
Chinese (zh)
Other versions
CN102217193A (en
Inventor
三宅高志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN102217193A publication Critical patent/CN102217193A/en
Application granted granted Critical
Publication of CN102217193B publication Critical patent/CN102217193B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • H03H9/6436Coupled resonator filters having one acoustic track only
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders or supports
    • H03H9/058Holders or supports for surface acoustic wave devices
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • H03H9/644Coupled resonator filters having two acoustic tracks
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6489Compensation of undesirable effects
    • H03H9/6493Side lobe suppression
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72Networks using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72Networks using surface acoustic waves
    • H03H9/725Duplexers

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

Disclosed is an elastic wave filter device (1) comprising a piezoelectric substrate (10) and elastic wave filters (4, 5) and parallel resonators (3A, 3B) provided on the piezoelectric substrate (10). The elastic wave filter device (1) comprises ground ports (GND1, GND2, GND3). The elastic wave filters (4, 5) comprise input-side resonators (4A, 4C, 4E, 5A, 5C, 5E) and output-side resonators (4B, 4D, 5B, 5D). The input-side resonators (4A, 4C, 4E, 5A, 5C, 5E) are connected between a receiving input port (IN) and a ground port (GND1). The output-side resonators (4B, 4D, 5B, 5D) are connected between receiving output ports (OUT1, OUT2) and a ground port (GND1). The parallel resonators (3A, 3B) are connected parallel to an output line and, at the same time, are connected respectively to the ground ports (GND2, GND3).

Description

Acoustic wave filter device and possess its filter module
Technical field
The present invention relates to one connects the acoustic wave filter device of acoustic wave filter and trap in parallel (trap) notch cuttype and possesses the module of acoustic wave filter device on piezoelectric substrate.
Utilize the vibration on piezoelectric substrate surface elastic surface wave, utilize the vibration of piezoelectric substrate inside bulk acoustic wave (bulk acoustic wave), utilize the acoustic wave filter device of the electricapparatus vibration of the boundary acoustic wave etc. of the vibration of stacked piezoelectric substrate boundary face to be used in the RF filter etc. of pocket telephone.
As an example of acoustic wave filter device, there is such device: multiple port elastic wave resonators are (following, only be called resonator (resonator)) in elastic wave propagation direction, arrange, and make it vertical coupling and become multi-mode filter (multimode filter), and, this multi-mode filter is connected and inserted in parallel trap resonator (trap resonators), become the device (for example,, with reference to patent documentation 1) that notch cuttype connects.
Fig. 1 is the circuit diagram of the configuration example of the existing acoustic wave filter device of explanation.
This acoustic wave filter device possesses the multi-mode filter 111, series connection trap resonator 101,102,107,108 and the trap resonator in parallel 103,104,109,110 that are made up of multiple resonators 105 and multiple resonator 106.
Multiple resonators 105, its IDT electrode is separately connected with input line, and the 2nd IDT electrode is separately connected with earth connection.Multiple resonators 106, its IDT electrode is separately connected with output line, and the 2nd IDT electrode is separately connected with earth connection.Multiple resonators 105,106 are alternately arranged and vertical coupling in elastic wave propagation direction, form multi-mode filter 111.
101,102 series connection of series connection trap resonator are inserted into input line, and 107,108 series connection of series connection trap resonator are inserted into output line.Trap resonator in parallel 103,104 parallel connections are inserted between input line and earth connection, and trap resonator 109,110 parallel connections in parallel are inserted between output line and earth connection.
Such acoustic wave filter device is configured to the chip being wholely set with piezoelectric substrate conventionally.And the chip carrying of this acoustic wave filter device carries out modularization in the module such as ceramic substrate or printed base plate matrix.Now, the grounding connection electrode that multiple ground connection marks in Fig. 1 are represented is set to separately respectively piezoelectric substrate surface can be because of the restriction difficulty of chip size, therefore schematic diagram is as shown in Figure 2 such, and earth connection is concentrated in together, and is jointly connected with single grounding connection electrode.
Patent documentation 1:JP Unexamined Patent 7-131290 communique
But in the situation that acoustic wave filter device is made as to module composition, the wiring on the module matrix till the outside terminal of module plays acoustic wave filter device has spurious impedance.
Therefore, although being arranged at the grounding connection electrode on piezoelectric substrate surface is connected with the external ground terminal of module via spurious impedance, but due to the effect of spurious impedance, the attenuation characteristic of acoustic wave filter or separation (isolation) characteristic has the possibility of deterioration.
Summary of the invention
, the object of the invention is to for this reason, a kind of acoustic wave filter device is provided and possesses its module, it can suppress the attenuation characteristic of acoustic wave filter device and filter, the deterioration of stalling characteristic due to the effect of the spurious impedance of connecting wiring.
The present invention is a kind of acoustic wave filter device, is provided with acoustic wave filter and trap in parallel on piezoelectric substrate, and acoustic wave filter device of the present invention possesses the first grounding connection electrode and the second grounding connection electrode.Acoustic wave filter is coupled input side resonator and outlet side resonator.Input side resonator is connected between input line and earth connection.Outlet side resonator is connected between output line and earth connection.Trap in parallel is connected between earth connection and input line or earth connection and output line.The first grounding connection electrode is arranged at piezoelectric substrate surface, and the earth connection of input side resonator is connected with the earth connection of outlet side resonator.The second grounding connection electrode and the first grounding connection electrode separation and be arranged at piezoelectric substrate surface, connect the earth connection of trap in parallel.
In this formation, multiple resonators of acoustic wave filter are connected with the first grounding connection electrode on piezoelectric substrate surface, trap in parallel be connected with the second grounding connection electrode of the first grounding connection electrode separation.Therefore, connecting wiring for the spurious impedance of the first grounding connection electrode by acting in conjunction in multiple resonators of acoustic wave filter.In addition, connecting wiring is independent with the spurious impedance that acts on acoustic wave filter for the spurious impedance of the second grounding connection electrode, only trap in parallel is worked.
Preferably make input side resonator and outlet side resonator possess the separately IDT electrode being connected with input-output line and the 2nd IDT electrode being connected with earth connection.In this case, input side resonator and outlet side resonator can alternately be arranged in elastic wave propagation direction, the one IDT electrode can be arranged with the 2nd IDT electrode in the direction vertical with elastic wave propagation direction, the one IDT electrode and the 2nd IDT electrode, the configuration sequence in input side resonator can be contrary with the configuration sequence in outlet side resonator.
According to such formation, dispose an IDT electrode of input side resonator and the 2nd IDT electrode of outlet side resonator in the both sides of acoustic wave filter.Therefore, the 2nd IDT electrode of the 2nd IDT electrode of input side resonator and outlet side resonator is connected from different grounding connection electrodes, circuit formation easily becomes simple.But, in this case, if implement modularization,, because of the impact of spurious impedance, can produce the deterioration of attenuation characteristic or the stalling characteristic of filter, therefore, even in the situation that being this formation, also preferably the 2nd IDT electrode is separately connected with common grounding connection electrode.
Module of the present invention, possesses: above-mentioned acoustic wave filter device; With the module matrix that has carried acoustic wave filter device, described module matrix can possess earth terminal on its installed surface, and this earth terminal connects the first grounding connection electrode and the second grounding connection electrode.
According to this invention, the spurious impedance acting in conjunction of the connecting wiring of the first grounding connection electrode based on to acoustic wave filter device, in multiple resonators of acoustic wave filter, is worked independently with the spurious impedance that acts on trap in parallel.Therefore, can the attenuation characteristic of rejects trap or the deterioration of stalling characteristic.
Brief description of the drawings
Fig. 1 is the figure of the circuit example of the existing acoustic wave filter device of explanation.
Fig. 2 is the figure of the circuit example of the existing acoustic wave filter device of explanation.
Fig. 3 be the explanation configuration example that possesses the module of the acoustic wave filter device of the 1st execution mode of the present invention want portion's sectional view and circuit diagram.
Fig. 4 is the upward view of the electrode pattern example of the circuit forming surface of the acoustic wave filter device shown in key diagram 3.
Fig. 5 is the exploded view of the electrode pattern example of the electrode layer of the module shown in key diagram 3.
Fig. 6 is the figure that the electrode pattern example of the circuit forming surface of the acoustic wave filter device of using in emulation is described.
Fig. 7 is the figure of the filtering characteristic of explanation emulation.
Fig. 8 is the circuit diagram of the configuration example of the acoustic wave filter device of the 2nd execution mode.
Fig. 9 is the circuit diagram of the configuration example of the acoustic wave filter device of the 3rd execution mode.
(symbol description)
1: acoustic wave filter device
TX: transtation mission circuit
RX: receiving circuit
2A, 2B: series resonator
3A: parallel resonator
3A, 3B: parallel resonator
4,5: acoustic wave filter
4A, 4C, 4E, 5A, 5C, 5E: input side resonator
4B, 4D, 5B, 5D: outlet side resonator
10: piezoelectric substrate
IN: receive input port
GND1, GND2, GND3: grounding ports
OUT1, OUT2: receive output port
100: module
20: module matrix
Ant: antenna terminal
Gnd1, Gnd2: earth terminal
Rx1, Rx2: receive lead-out terminal
Tx: send input terminal
Line1, line2, line3, line7: ground connection wiring
Line2, line3: ground connection wiring
Line4, line5: receive output wiring
Line6: receive input wiring
Embodiment
The 1st execution mode
Fig. 3 is the figure that the summary of the explanation module that possesses the acoustic wave filter device of the 1st execution mode forms, with figure (A) be equal modules want portion's sectional view, be the circuit diagram of equal modules with scheming (B).
The module 100 of present embodiment is the forming of chip that carries acoustic wave filter device 1 on the module matrix 20 being made up of the multilayer board of 5 layers of structure.Module matrix 20 with the installed surface of chip carrying face opposition side on possess installation terminal described later, and being formed with internal wiring, this internal wiring is connected with terminal each installation with each connectivity port (connecting electrode) of acoustic wave filter device 1.Acoustic wave filter device 1 is the chip that is provided with the transtation mission circuit TX of duplexer and SAW (surface acoustic wave) filter of receiving circuit RX in the circuit forming surface of piezoelectric substrate 10.This chip is mounted on module matrix 20 according to circuit forming surface and the opposed mode of module matrix 20, and each connectivity port is connected by boss (bump) with the electrode of module matrix 20.
Transtation mission circuit TX is uneven input-uneven output type, and the connectivity port of the transmission input of transtation mission circuit TX sends input terminal Tx via the internal wiring of module matrix 20 and the installation of module matrix 20 with terminal and be connected.The connectivity port of the transmission output of transtation mission circuit TX is that antenna terminal Ant is connected via the internal wiring of module matrix 20 and the installation of module matrix 20 with terminal.In addition the coil that, this antenna terminal Ant arranges via the internal wiring as module matrix 20 is that earth terminal Gnd2 is connected with the installation terminal of module matrix 20.
Receiving circuit RX is uneven input-balance output type (balun type: cling to homotopy type) receiving circuit, possesses acoustic wave filter 4,5, series resonator 2A, 2B and parallel resonator 3A, 3B as circuit element portion.In addition, possess reception input port IN, reception output port OUT1, OUT2 and grounding ports GND1, GND2, the GND3 as connectivity port.
Acoustic wave filter 4 is vertical coupled resonance type SAW filters that 5 resonator 4A~4E of alternative arrangement make its vertical coupling in elastic wave propagation direction, and is connected in reception input port IN and receives between output port OUT1.Acoustic wave filter 5 is vertical coupled resonance type SAW filters that 5 resonator 5A~5E of alternative arrangement make its vertical coupling in elastic wave propagation direction, and is connected in reception input port IN and receives between output port OUT2.By making the dephased signal of acoustic wave filter 4, the 5 mutual tool of output, receiving circuit RX is balanced output.
Resonator 4A, 4C, 4E, 5A, 5C, 5E are respectively input side resonators, possess the IDT electrode (not shown) being connected with input line and the 2nd IDT electrode (not shown) being connected with earth connection.Resonator 4B, 4D, 5B, 5D are respectively outlet side resonators, possess the IDT electrode (not shown) being connected with output line and the 2nd IDT electrode (not shown) being connected with earth connection.The earth connection being connected respectively with resonator 4A~4E, 5A~5E be jointly connected as the grounding ports GND1 of the first grounding connection electrode of the present invention.The output line being connected with resonator 4B, 4D is connected with common reception output port OUT1.The output line being connected with resonator 5B, 5D is connected with common reception output port OUT2.
Series resonator 2A series connection is inserted into the input line of acoustic wave filter 4, and series resonator 2B series connection is inserted into the input line of acoustic wave filter 5, and works as series connection trap separately.These input lines are connected with common reception input port IN.
Parallel resonator 3A is inserted into from acoustic wave filter 4 output lines and divides inconsistent parallel wire, and works as trap in parallel.This parallel connection trap be connected as the grounding ports GND2 of the second grounding connection electrode of the present invention.Parallel resonator 3B is inserted into from the output line of acoustic wave filter 5 and divides inconsistent parallel wire, and works as trap in parallel.This parallel wire be connected as the grounding ports GND3 of the second grounding connection electrode of the present invention.
Receiving input port IN is connected with the antenna terminal Ant of terminal with the installation as module matrix 20 via the reception input wiring line6 of the inside of module matrix 20.Receive output port OUT1, OUT2 reception output wiring line4, the line5 via the inside of module matrix 20, receive lead-out terminal Rx1, Rx2 with the installation of module matrix 20 with terminal and be connected.Grounding ports GND1, GND2, GND3 are connected with the ground connection wiring line7 of module matrix 20 inside via ground connection wiring line1, line2, the line3 of the inside of module matrix 20.Then, be connected with the earth terminal Gmd1 of terminal with the installation as module matrix 20 via this ground connection wiring line7.
In the above acoustic wave filter device 1 forming, the earth connection being connected with acoustic wave filter 4,5 is all jointly connected with grounding ports GND1 on piezoelectric substrate 10.In addition, the parallel wire being connected with parallel resonator 3A is connected on piezoelectric substrate 10 with grounding ports GND2, and the parallel wire being connected with parallel resonator 3B is connected on piezoelectric substrate 10 with grounding ports GND3.
Therefore, the spurious impedance acting in conjunction of the ground connection of module matrix 20 wiring line1 is in whole resonator of acoustic wave filter 4,5.In addition, the spurious impedance of the wiring of the ground connection of module matrix 20 line2, line3 is independent with the spurious impedance that acts on acoustic wave filter 4,5.Therefore, can the attenuation characteristic of rejects trap or the deterioration of stalling characteristic.
Next, the concrete circuit diagram case of above-mentioned acoustic wave filter device 1 and module 100 is described.
Fig. 4 is the upward view that represents the circuit forming surface of acoustic wave filter device 1.Fig. 5 is the exploded view that the electrode layer to arranging on module matrix 20 is looked up.
Acoustic wave filter device 1 is provided with the circuit pattern that becomes receiving circuit RX and transtation mission circuit TX in the circuit forming surface of piezoelectric substrate 10.And, in the circuit pattern that becomes receiving circuit RX, be provided with the multiple IDT electrodes that become elastic wave filtering 4,5, series resonator 2A, 2B and parallel resonator 3A, 3B.
In addition, acoustic wave filter 4,5 possesses respectively 3 input side resonators and 2 outlet side resonators, and by each resonator alternative arrangement in the elastic wave propagation direction of transverse direction in the drawings.In addition, the standby IDT electrode being connected with input-output line of each syntonizer and the 2nd IDT electrode being connected with earth connection, an IDT electrode is arranged on longitudinal direction in the figure vertical with elastic wave propagation direction with the 2nd IDT electrode.Input side resonator, according at substrate center side configuration the one IDT electrode, is configured in the order of substrate upper end side (or substrate lower end side) configuration the 2nd IDT electrode, and in outlet side resonator, configuration sequence is contrary.
In addition, in this circuit pattern, possess become receive input port IN electrode part, become receive output port OUT1 electrode part, become receive output port OUT2 electrode part, become the electrode part of grounding ports GND1 and become grounding ports GND2 electrode part, become the electrode part of grounding ports GND3.The electrode corresponding with these each connectivity ports, is connected with the electrode of module matrix 20 via boss electrode.
Module matrix 20 is from chip carrying face to installed surface, possesses 6 electrode layers (A)~(F).
Electrode layer (A) is arranged on the chip carrying face of module matrix 20, possesses multiple electrodes of each connectivity port of having carried acoustic wave filter device 1.Particularly, possess and carry the reception input port IN of receiving circuit RX and form the electrode that receives input wiring line6, carry and receive output port OUT1 and form the electrode that receives output wiring line4, carry and receive output port OUT2 and form the electrode that receives output wiring line5, carry grounding ports GND1 and form the electrode of ground connection wiring line1, carry grounding ports GND2 and form the electrode of ground connection wiring line2, carry grounding ports GND3 and form the electrode of ground connection wiring line3, and be connected with multiple electrodes of each connectivity port of transtation mission circuit TX.
Electrode layer (B) is formed between the ground floor substrate and second layer substrate of multilayer board of module matrix 20, possesses the multiple electrodes that are connected with each electrode of electrode layer (A) with through hole.Particularly, possess the reception input wiring line6 that forms receiving circuit RX electrode, form receive output wiring line4 electrode, form receive output wiring line5 electrode, form ground connection wiring line1 electrode, form ground connection wiring line2 electrode, form the electrode of ground connection wiring line3 and become multiple electrodes of the internal wiring of transtation mission circuit TX.
Electrode layer (C) is formed between the second layer substrate and the 3rd laminar substrate of multilayer board of module matrix 20, possesses the multiple electrodes that are connected with each electrode of electrode layer (B) with through hole.Particularly, possess the reception input wiring line6 that forms receiving circuit RX electrode, form receive output wiring line4 electrode, form the inside grounding connection electrode that receives the electrode of output wiring line5, ground connection wiring line1 is connected with ground connection wiring line3 with ground connection wiring line2 and the multiple electrodes that become the internal wiring of transtation mission circuit TX.
Electrode layer (D) is formed between the 3rd laminar substrate and the 4th laminar substrate of multilayer board of module matrix 20, possesses the multiple electrodes that are connected with each electrode of electrode layer (C) with through hole.Particularly, possess the reception input wiring line6 that forms receiving circuit RX electrode, form receive output wiring line4 electrode, form receive output wiring line5 electrode, be connected with the inside grounding connection electrode of electrode layer (C) and form ground connection connect up line7 inside grounding connection electrode and become multiple electrodes of the internal wiring of transtation mission circuit TX.
Electrode layer (E) is formed between the 4th laminar substrate and layer 5 substrate of multilayer board of module matrix 20, possesses the multiple electrodes that are connected with each electrode of electrode layer (D) with through hole.Particularly, possess the reception input wiring line6 that forms receiving circuit RX electrode, form receive output wiring line4 electrode, form receive output wiring line5 electrode, form multiple electrodes of ground connection wiring line7 and become multiple electrodes of the internal wiring of transtation mission circuit TX.
Electrode layer (F) is formed on the installed surface of module matrix 20, possesses multiple installation terminals.Particularly, possess the reception input wiring line6 that is connected with receiving circuit RX antenna terminal Ant, be connected with receive output wiring line4 reception lead-out terminal Rx1, be connected with receive output wiring line5 reception lead-out terminal Rx2, be connected with the ground connection wiring earth terminal Gnd1 of line7 and the transmission input terminal Tx of transtation mission circuit TX and earth terminal Gnd2.In addition, earth terminal Gnd2 is the reception input wiring line6 difference from being connected with antenna terminal Ant at electrode layer (C), via the internal wiring of coiled type that is arranged at electrode layer (C)~(E) by antenna terminal Ant ground connection.
In the case of being the example of above circuit pattern, with respect to the grounding ports GND1 being connected with the acoustic wave filter 4,5 of acoustic wave filter device 1, being connected the ground connection wiring line1 of the boss electrode, electrode layer (A) of use~(B) and the spurious impedance of the through hole based on from ground floor substrate to the three laminar substrates will work with module matrix 20 sides.In addition, with respect to the grounding ports GND2 being connected with the parallel resonator 3A of acoustic wave filter device 1, be connected the ground connection wiring line2 of the boss electrode, electrode layer (A) of use~(B) and the spurious impedance of the through hole based on from ground floor substrate to the three laminar substrates with module matrix 20 sides and work.In addition, with respect to the grounding ports GND3 being connected with the parallel resonator 3B of acoustic wave filter device 1, be connected the ground connection wiring line3 of the boss electrode, electrode layer (A) of use~(B) and the spurious impedance of the through hole based on from ground floor substrate to the three laminar substrates with module matrix 20 sides and work.
In the example of this circuit pattern, be provided with the ground connection inside grounding connection electrode that line1, line2, line3 be connected with electrode layer (C), (D) that connects up, and be connected with multiple ground connection wiring line7 between these inner grounding connection electrodes and the earth terminal Gnd1 of electrode layer (F).Like this, based on till electrode layer (C)~ground connection wiring line7 and the spurious impedance from the 4th laminar substrate to the through hole of layer 5 substrate (F), grounding ports GND1 to acoustic wave filter device 1, GND2, GND3 work hardly, thereby can the attenuation characteristic of rejects trap or the deterioration of stalling characteristic.
In addition, in the example of this circuit pattern, make grounding ports GND1, GND2, the GND3 oblique configuration not adjacent to each otherly of acoustic wave filter device 1.Like this, further improve the stalling characteristic of filter.
The filtering characteristic of the circuit pattern that next, relatively the circuit pattern based on emulation, above-mentioned and comparative example form.
Fig. 6 (A) is the figure that represents the receiving circuit of the circuit diagram case relatively forming, and Fig. 6 (B) is the figure that represents the receiving circuit of the circuit diagram case of this formation.
In the circuit pattern forming at the comparative example shown in Fig. 6 (A), the formation that the 2nd IDT electrode (substrate outside) of the input side resonator of acoustic wave filter 4,5 is not connected with the electrode part that becomes grounding ports GND2, GND3 with grounding ports GND1 is different from the circuit diagram case of this formation shown in Fig. 6 (B).
Fig. 7 is the figure that the filtering characteristic of the filtering characteristic of this formation and comparative example formation is compared.
In this formation shown in this figure, the nearly all region between downside frequency band and the upside frequency band of passband, magnification ratio can be suppressed to approximately-below 40dB, thus can guarantee large attenuation.On the other hand, in relatively forming, although the frequency of passband or the shape of characteristic waveforms and this formation are roughly the same, be difficult to guarantee on the whole attenuation, nearly all region between downside frequency band and the upside frequency band of passband, only magnification ratio can be suppressed to approximately-below 25dB.
Above, as described, in the module 100 of acoustic wave filter device 1 that possesses present embodiment, via the grounding ports GND1 of acoustic wave filter device 1, make the spurious impedance acting in conjunction of the connecting wiring based on module side in multiple resonators of elasticity filter 4,5.In addition, make to work independently with the spurious impedance of parallel resonator 3A, 3B effect.Like this, can the attenuation characteristic of rejects trap or the deterioration of stalling characteristic.
In addition, in the present embodiment, although possess acoustic wave filter 4,5, and earth connection is separately connected with common grounding ports GND1, if but earth connection is connected with common grounding ports with outlet side resonator with the input side resonator of acoustic wave filter separately, can implement the present invention, can be configured to: acoustic wave filter 4,5 is connected with other grounding ports respectively.
In addition, at this, as acoustic wave filter 4,5, series resonator 2A, 2B and parallel resonator 3A, 3B, show with the surface elasticity wave device example of each that forms them, but in addition, even if border elastic wave equipment, bulk acoustic wave device, also can preferably implement the present invention.
In addition, at this, as acoustic wave filter 4,5, show the formation of vertical coupled resonance type equipment, but in addition, as long as possessing the coupled mode of the IDT electrode being connected with earth connection, no matter be the equipment of which kind of coupled mode, can both preferably implement the present invention.
Next, the acoustic wave filter device of the 2nd execution mode of the present invention is described.
The 2nd execution mode
Acoustic wave filter device 11 is chips of the vertical coupled mode SAW filter of uneven input-balance output type, possesses acoustic wave filter 14 and trap in parallel 13 as circuit element portion.In addition, possess uneven input port IN, balance output end mouth OUT and grounding ports GND1, the GND2 as connectivity port.
Acoustic wave filter 14 is connected between uneven input port IN and balance output end mouth OUT, possesses 1 input side resonator 14A, 2 outlet side resonator 14B and 2 reflector 14C.Input side resonator 14A, a side of its IDT electrode be connected from the input line of uneven input port IN, the opposing party of IDT electrode be connected from the earth connection of grounding ports GND1.Outlet side resonator 14B is disposed at the both sides of input side resonator 14A, a side of IDT electrode be connected from the output line of balance output end mouth OUT, the opposing party of IDT electrode be connected from the earth connection of grounding ports GND1.Dispose reflector 14C in the both sides of resonator 14A, 14B.
Trap 13 in parallel is connected between uneven input port IN and grounding ports GND2, possesses resonator 13A and reflector 13B.Resonator 13A, a side of its IDT electrode be connected from the input line of uneven input port IN, the opposing party of IDT electrode be connected from the earth connection of grounding ports GND2.
In this formation, the whole earth connection being connected with acoustic wave filter 14, and trap in parallel 13 differences, be connected with single grounding ports GND1.Therefore the spurious impedance that, acts on grounding ports GND1 by acting in conjunction in whole resonator of acoustic wave filter 14.In addition, act on the spurious impedance and the spurious impedance independence that acts on acoustic wave filter 14 of grounding ports GND2.Therefore, can the attenuation characteristic of rejects trap or the deterioration of stalling characteristic.
Next, the acoustic wave filter device of the 3rd execution mode of the present invention is described.
Acoustic wave filter device 21 is chips of the vertical coupled mode SAW filter of uneven input-uneven output type, possesses acoustic wave filter 24 and trap in parallel 23 as circuit element portion.In addition, possess as the uneven input port IN of connectivity port, uneven output port OUT and grounding ports GND1, GND2.
Acoustic wave filter 24 is connected between uneven input terminal IN and uneven lead-out terminal OUT, possesses 2 input side resonator 24B, 1 outlet side resonator 24A and 2 reflector 24C.Input side resonator 24B is disposed at the both sides of outlet side resonator 24A, a side of IDT electrode be connected from the input line of uneven input port IN, the opposing party of IDT electrode be connected from the earth connection of grounding ports GND1.Outlet side resonator 24A, a side of its IDT electrode be connected from the output line of uneven output port OUT, the opposing party of IDT electrode be connected from the earth connection of grounding ports GND1.Dispose reflector 24C in the both sides of resonator 24A, 24B.
Trap in parallel is connected between uneven input terminal IN and grounding ports GND2, possesses resonator 23A and reflector 23B.Resonator 23A, a side of its IDT electrode be connected from the input line of uneven input port IN, the opposing party of IDT electrode be connected from the earth connection of grounding ports GND2.
In this formation, the whole earth connection connecting from acoustic wave filter 24 is different with trap in parallel 23, is connected with single grounding ports GND1.Therefore the spurious impedance that, acts on grounding ports GND1 by acting in conjunction in whole resonator of acoustic wave filter 24.In addition, act on the spurious impedance and the spurious impedance independence that acts on acoustic wave filter 24 of grounding ports GND2.Therefore, can the attenuation characteristic of rejects trap or the deterioration of stalling characteristic.
Although can implement the present invention according to above each execution mode, but scope of the present invention is not to be represented by above-mentioned execution mode, but represented to there is the content of equivalents and all changes within the scope of it all within the scope of the present invention with claims by claims.

Claims (3)

1. an acoustic wave filter device, on piezoelectric substrate, be provided with acoustic wave filter and the trap in parallel with at least one pair of IDT electrode, described acoustic wave filter make to be connected in the input side resonator between input line and earth connection and be connected in output line and earth connection between outlet side resonator be coupled, described trap in parallel is connected between earth connection and described input line or earth connection and described output line, one side of at least one pair of IDT electrode of described trap in parallel is connected in input line or output line, the opposing party is connected in earth connection
Described acoustic wave filter device, possesses:
The first grounding connection electrode, it is arranged at described piezoelectric substrate surface, and the earth connection of described input side resonator is connected with the earth connection of described outlet side resonator; With
The second grounding connection electrode, itself and described the first grounding connection electrode separation and be arranged at described piezoelectric substrate surface, connect the earth connection of described trap in parallel.
2. acoustic wave filter device according to claim 1, is characterized in that,
Described input side resonator and described outlet side resonator are alternately arranged in elastic wave propagation direction, the opposite direction of the direction of the link position to earth connection of described input side resonator and the link position to earth connection of described outlet side resonator.
3. a filter module, possesses:
Acoustic wave filter device described in claim 1 or 2; With
Carry the module matrix of described acoustic wave filter device,
Described module matrix possesses earth terminal on its installed surface, and this earth terminal connects described the first grounding connection electrode and described the second grounding connection electrode.
CN200980144079.2A 2008-11-04 2009-09-11 Elastic wave filter device and module comprising the elastic wave filter device Active CN102217193B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008-283104 2008-11-04
JP2008283104 2008-11-04
PCT/JP2009/065933 WO2010052969A1 (en) 2008-11-04 2009-09-11 Elastic wave filter device and module comprising the elastic wave filter device

Publications (2)

Publication Number Publication Date
CN102217193A CN102217193A (en) 2011-10-12
CN102217193B true CN102217193B (en) 2014-11-05

Family

ID=42152779

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980144079.2A Active CN102217193B (en) 2008-11-04 2009-09-11 Elastic wave filter device and module comprising the elastic wave filter device

Country Status (6)

Country Link
US (1) US8319585B2 (en)
EP (1) EP2346166B1 (en)
JP (1) JP5056952B2 (en)
KR (1) KR101232242B1 (en)
CN (1) CN102217193B (en)
WO (1) WO2010052969A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112011102499T5 (en) * 2010-07-27 2013-06-20 Murata Manufacturing Co., Ltd. RF module
US9160304B2 (en) * 2011-01-31 2015-10-13 Kyocera Corporation Branching filter and communication module component
DE112012002389B4 (en) 2011-06-09 2018-12-20 Murata Manufacturing Co., Ltd. Filter device for elastic waves
JP5890670B2 (en) * 2011-12-05 2016-03-22 太陽誘電株式会社 Filter and duplexer
JP5844939B2 (en) * 2013-02-27 2016-01-20 京セラ株式会社 Elastic wave device, duplexer and communication module
JP5910593B2 (en) * 2013-09-19 2016-04-27 株式会社村田製作所 Duplexer
KR101921853B1 (en) * 2015-04-01 2018-11-23 가부시키가이샤 무라타 세이사쿠쇼 Duplexer
JP6337867B2 (en) * 2015-10-26 2018-06-06 株式会社村田製作所 Band pass filter and duplexer
CN209881752U (en) 2016-11-08 2019-12-31 株式会社村田制作所 Elastic wave filter device and multiplexer
JP6642385B2 (en) * 2016-11-17 2020-02-05 株式会社村田製作所 Surface acoustic wave filter
JP7188556B2 (en) * 2019-03-13 2022-12-13 株式会社村田製作所 Acoustic wave filter device and multiplexer
WO2021131125A1 (en) * 2019-12-27 2021-07-01 株式会社村田製作所 High-frequency module and communication device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1376005A (en) * 2001-03-09 2002-10-23 株式会社村田制作所 Sound surface-wave device and telecommunication unit
US6946929B2 (en) * 2002-02-12 2005-09-20 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device having connection between elements made via a conductor not on the piezoelectric substrate

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03293808A (en) 1990-04-11 1991-12-25 Fujitsu Ltd Production of surface acoustic wave element
DE69323163T2 (en) 1992-12-01 1999-06-02 Japan Radio Co. Ltd., Mitaka, Tokio/Tokyo Acoustic surface wave filter and mobile communication system with such a filter
JP3181158B2 (en) 1993-10-28 2001-07-03 日本無線株式会社 Composite surface acoustic wave filter and mobile communication device using composite surface acoustic wave filter
JP3189508B2 (en) * 1993-07-08 2001-07-16 株式会社村田製作所 Surface acoustic wave filter
JP3327433B2 (en) 1993-11-05 2002-09-24 松下電器産業株式会社 Surface acoustic wave filter
US5506552A (en) 1993-11-05 1996-04-09 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave filter with multiple ground terminals
JP3424971B2 (en) 1994-01-20 2003-07-07 松下電器産業株式会社 Surface acoustic wave filter
JPH07264000A (en) 1994-03-16 1995-10-13 Fujitsu Ltd Surface acoustic wave filter element and surface acoustic wave filter formed by packaging the same
JPH08265087A (en) * 1995-03-22 1996-10-11 Mitsubishi Electric Corp Surface acoustic wave filter
JP3194849B2 (en) * 1995-05-30 2001-08-06 日本無線株式会社 Method of manufacturing surface acoustic wave device
DE69614463T2 (en) * 1995-07-25 2002-05-29 Murata Mfg. Co., Ltd. Surface acoustic wave arrangement
JP3895397B2 (en) * 1996-05-30 2007-03-22 日本無線株式会社 Substrate mounting method of SAW filter
JP2000261285A (en) * 1999-03-09 2000-09-22 Hitachi Media Electoronics Co Ltd Surface acoustic wave device
JP2001267885A (en) * 2000-03-17 2001-09-28 Fujitsu Media Device Kk Surface acoustic wave device
TW483238B (en) * 2000-06-30 2002-04-11 Fujitsu Media Devices Ltd Surface acoustic wave device
US6798318B1 (en) * 2001-04-27 2004-09-28 Sawtek, Inc. Hybrid leaky surface acoustic wave resonator filter
JP3873802B2 (en) * 2001-06-12 2007-01-31 株式会社村田製作所 Surface acoustic wave filter
JP3685102B2 (en) * 2001-07-27 2005-08-17 株式会社村田製作所 Surface acoustic wave filter, communication device
JP3838128B2 (en) * 2002-03-18 2006-10-25 株式会社村田製作所 Surface acoustic wave device and communication device equipped with the same
ATE362674T1 (en) * 2002-05-16 2007-06-15 Tdk Corp ANTENNA SWITCH
JP3764731B2 (en) * 2002-10-18 2006-04-12 富士通メディアデバイス株式会社 Multimode surface acoustic wave filter and duplexer
JP4222197B2 (en) * 2003-02-24 2009-02-12 株式会社村田製作所 Surface acoustic wave filter, communication device
JP3963862B2 (en) * 2003-05-20 2007-08-22 富士通メディアデバイス株式会社 Surface acoustic wave filter and duplexer having the same
DE102004031397A1 (en) * 2004-06-29 2006-01-26 Epcos Ag duplexer
JP3918102B2 (en) * 2004-06-30 2007-05-23 株式会社村田製作所 Balanced elastic wave filter and elastic wave filter device
WO2006009021A1 (en) * 2004-07-23 2006-01-26 Murata Manufacturing Co., Ltd. Elastic surface wave device
JP2006135447A (en) * 2004-11-02 2006-05-25 Fujitsu Media Device Kk Duplexer
DE102005032058B4 (en) * 2005-07-08 2016-12-29 Epcos Ag HF filter with improved backbone suppression
JP4811409B2 (en) 2005-11-14 2011-11-09 株式会社村田製作所 Manufacturing method of surface acoustic wave device
JP2006101550A (en) * 2005-12-05 2006-04-13 Fujitsu Media Device Kk Surface acoustic wave device, communication apparatus using the same, and antenna duplexer
JP4670872B2 (en) * 2006-01-18 2011-04-13 株式会社村田製作所 Surface acoustic wave device
DE102006042546A1 (en) * 2006-09-11 2008-03-27 Epcos Ag With surface waves working electrical component
DE102007008110A1 (en) * 2007-02-19 2008-08-21 Epcos Ag Filter working with acoustic waves

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1376005A (en) * 2001-03-09 2002-10-23 株式会社村田制作所 Sound surface-wave device and telecommunication unit
US6946929B2 (en) * 2002-02-12 2005-09-20 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device having connection between elements made via a conductor not on the piezoelectric substrate

Also Published As

Publication number Publication date
WO2010052969A1 (en) 2010-05-14
EP2346166A1 (en) 2011-07-20
EP2346166B1 (en) 2017-01-11
JPWO2010052969A1 (en) 2012-04-05
KR20110076968A (en) 2011-07-06
KR101232242B1 (en) 2013-02-12
CN102217193A (en) 2011-10-12
JP5056952B2 (en) 2012-10-24
US8319585B2 (en) 2012-11-27
EP2346166A4 (en) 2015-04-01
US20110193654A1 (en) 2011-08-11

Similar Documents

Publication Publication Date Title
CN102217193B (en) Elastic wave filter device and module comprising the elastic wave filter device
US6943645B2 (en) Surface acoustic wave duplexer and communication apparatus having the same
US7479846B2 (en) Duplexer
CN102318188B (en) Filter, demultiplexer, and module including demultiplexer, communication apparatus
US6720842B2 (en) Surface acoustic wave filter device having first through third surface acoustic wave filter elements
US7868715B2 (en) Duplexer and communication apparatus using the same
CN108023568A (en) Filter apparatus, multiplexer, high frequency front end circuit and communicator
JP2008504756A (en) Duplexer
WO2018088153A1 (en) Elastic wave filter apparatus and multiplexer
CN103179779A (en) circuit board
KR20140037269A (en) Elastic wave device
CN103339869B (en) High frequency module
US6906600B2 (en) Surface acoustic wave device and branching filter with specified signal terminal locations
JP2012205215A (en) Surface acoustic wave device and method for manufacturing the same
CN207853858U (en) Duplexer
US9148118B2 (en) Acoustic wave filter and module
JP3867733B2 (en) Surface acoustic wave duplexer
CN112671369B (en) Filter device, and duplexer and multiplexer provided with same
JP4353187B2 (en) Surface acoustic wave duplexer
JP5612768B2 (en) Duplexer with balun
JPWO2013054596A1 (en) Demultiplexer
US7187255B2 (en) Arrangement of lattice filter
CN110476355A (en) Multiplexer, high-frequency front-end circuit and communication device
WO2012132093A1 (en) Acoustic wave device
CN108233891A (en) Duplexer

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant